CN114358168A - Data comparison method, device equipment and storage medium - Google Patents
Data comparison method, device equipment and storage medium Download PDFInfo
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- CN114358168A CN114358168A CN202111637969.6A CN202111637969A CN114358168A CN 114358168 A CN114358168 A CN 114358168A CN 202111637969 A CN202111637969 A CN 202111637969A CN 114358168 A CN114358168 A CN 114358168A
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- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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Abstract
The application provides a data comparison method, device equipment and a storage medium, wherein the data comparison method comprises the following steps: responding to the selection operation of the first semiconductor device in the semiconductor device set, and aiming at each second semiconductor device in the semiconductor device set, comparing a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device to obtain a comparison result which is used for indicating that the first Recipe and the second Recipe are the same or different; displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface; by the data comparison method, the workload of workers is reduced, and the user experience is improved.
Description
Technical Field
The present application relates to the field of automated manufacturing technologies, and in particular, to a data comparison method, device and storage medium.
Background
The current RMS System (Resource Management System) stores a plurality of types of Recipe (automatic process Recipe) of semiconductor devices, and can realize uploading and downloading of the Recipe of each semiconductor device; wherein the semiconductor devices of the same device type constitute a semiconductor device set.
If a user wants to know whether the Recipe of a certain semiconductor device in a certain semiconductor device set is different from the recipes of other semiconductor devices in the semiconductor device set before downloading the recipes of the certain semiconductor device in the certain semiconductor device set, the user needs to sequentially compare whether each parameter included in the Recipe of the semiconductor device is the same as each parameter included in the recipes of the other semiconductor devices, so as to judge whether the recipes of the semiconductor device are different from the recipes of the other semiconductor devices in the semiconductor device set.
Disclosure of Invention
In view of this, embodiments of the present application provide a data comparison method, device and storage medium, so as to reduce manual workload, thereby facilitating improvement of user experience.
Mainly comprises the following aspects:
in a first aspect, an embodiment of the present application provides a data comparison method, applied to an RMS system, including:
responding to a selection operation of a first semiconductor device in a semiconductor device set, and aiming at each second semiconductor device in the semiconductor device set, comparing a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device to obtain a comparison result for indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device;
and displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface.
Optionally, after the displaying the identification information of the first semiconductor device, the identification information of each second semiconductor device, and the comparison result between the first Recipe and each second Recipe in a first page on a graphical user interface, the data comparison method further includes:
responding to target operation of a target comparison result in each comparison result, and acquiring comparison information of the first target and the second target corresponding to the target comparison result; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the same or different parameter values, wherein the first parameter and the second parameter which are compared have the same parameter name;
displaying the comparison information in a second page on the graphical user interface.
Optionally, after the comparing information is displayed in the second page on the graphical user interface, the data comparing method further includes:
determining a target parameter comparison result for indicating that the parameter values are different in the comparison information;
and labeling the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target parameter corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target parameter corresponding to the target parameter comparison result.
Optionally, the data comparison method further includes:
the display area of the second page on the graphical user interface comprises other areas on the graphical user interface except the display area of the first page.
Optionally, the data comparison method further includes:
and storing each comparison result and comparison information corresponding to each comparison result.
In a second aspect, an embodiment of the present application provides a data comparison apparatus, applied to an RMS system, including:
a comparison module, configured to respond to a selection operation on a first semiconductor device in a semiconductor device set, compare, for each second semiconductor device in the semiconductor device set, a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device, and obtain a comparison result indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device;
and the first display module is used for displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface.
Optionally, after the first display module is configured to display the identification information of the first semiconductor device, the identification information of each second semiconductor device, and the comparison result between the first Recipe and each second Recipe in a first page on a graphical user interface, the data comparison apparatus further includes:
the obtaining module is used for responding to target operation of target comparison results in the comparison results and obtaining comparison information of the first target Recipe and the second target Recipe corresponding to the target comparison results; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the same or different parameter values, wherein the first parameter and the second parameter which are compared have the same parameter name;
and the second display module is used for displaying the comparison information in a second page on the graphical user interface.
Optionally, after the second display module is configured to display the comparison information in a second page on the graphical user interface, the data comparison apparatus further includes:
the determining module is used for determining a target parameter comparison result which is used for indicating that the parameter values are different in the comparison information;
and the marking module is used for marking the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target corresponding to the target parameter comparison result.
Optionally, the data comparing device further includes:
the display area of the second page on the graphical user interface comprises other areas on the graphical user interface except the display area of the first page.
Optionally, the data comparing device further includes:
and the storage module is used for storing each comparison result and comparison information corresponding to each comparison result.
In a third aspect, an embodiment of the present application provides a computer device, including a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor implements the steps of the data comparison method according to any one of the first aspect when executing the computer program.
In a fourth aspect, the present application provides a computer-readable storage medium, on which a computer program is stored, where the computer program is executed by a processor to perform the steps of the data comparison method in any one of the first aspect.
The technical scheme provided by the embodiment of the application can have the following beneficial effects:
in the data comparison method provided in the embodiment of the application, if a user wants to know whether a difference exists between a Recipe of a certain semiconductor device (a first semiconductor device) in a semiconductor device set and recipes of a plurality of semiconductor devices (second semiconductor devices) in the semiconductor device set, the user only needs to select the first semiconductor device in the semiconductor device set, and an RMS system automatically compares the Recipe of the first semiconductor device with each second semiconductor device to obtain at least one comparison result; after obtaining each comparison result, the RMS system automatically displays the identification information of the first semiconductor device, the identification information of each second semiconductor device to be compared, and the comparison result between the Recipe of the first semiconductor device and the Recipe of each second semiconductor device; in the above process, the user only needs to participate once, namely: the RMS system can automatically complete a series of subsequent comparison operations by selecting the first semiconductor device to be compared, and display the obtained comparison result, and the mode is favorable for reducing the manual workload, thereby being favorable for improving the experience of users.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a flow chart of a data comparison method provided in an embodiment of the present application;
FIG. 2 is a diagram illustrating an example of a display manner of a comparison result provided in the first embodiment of the present application;
FIG. 3 is an exemplary diagram illustrating another manner of displaying comparison results provided by the first embodiment of the present application;
FIG. 4 is a diagram illustrating an example of a display manner of comparison information provided in the first embodiment of the present application;
FIG. 5 is an exemplary diagram illustrating another display manner of comparison information provided in the first embodiment of the present application;
FIG. 6 is a schematic structural diagram of a data comparison apparatus provided in the second embodiment of the present application;
fig. 7 shows a schematic structural diagram of a computer device provided in the third embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
The embodiment of the application provides a data comparison method, device equipment and a storage medium, and is described by the embodiment below.
Example one
Fig. 1 shows a flowchart of a data comparison method provided in an embodiment of the present application, which is applied to an RMS system as shown in fig. 1, and the data comparison method can be implemented by the following steps:
step S101: responding to a selection operation of a first semiconductor device in a semiconductor device set, and aiming at each second semiconductor device in the semiconductor device set, comparing a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device to obtain a comparison result for indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device.
Specifically, in a Recipe management module of the RMS system, a plurality of semiconductor devices (machines) and recipes of the semiconductor devices are stored, wherein the semiconductor devices of the same device type (for example, model type) form a semiconductor device set; if a user selects one of the semiconductor devices in a semiconductor device set, the semiconductor device selected by the user is a first semiconductor device, which may be the semiconductor device considered by the user to be the most optimal for the Recipe in the semiconductor device set, or may be the semiconductor device selected by the user at will, and is not limited specifically herein; in the semiconductor device set: the remaining semiconductor devices (at least one) except the selected first semiconductor device are second semiconductor devices; since the second semiconductor devices are located in the same semiconductor device group as the first semiconductor device, the second semiconductor devices are of the same device type as the first semiconductor device.
It should be noted that Recipe of the semiconductor device is responsible for the automated process of the semiconductor device, that is: for a first Recipe of a first semiconductor device, when the first semiconductor device executes an automated process, the RMS system only needs to call the first Recipe of the first semiconductor device and send the first Recipe to a controller of the first semiconductor device, so that the controller controls the first semiconductor device to execute the process according to the first Recipe; for the second Recipe of the second semiconductor device, reference is made to the above description of the first Recipe of the first semiconductor device, and details thereof will not be repeated here.
It should be noted again that the selection operation may be set according to actual situations, for example: the first semiconductor device may be clicked or a selection box in front of the first semiconductor device may be selected from the semiconductor devices included in the semiconductor device set displayed on the graphical user interface; and is not particularly limited herein.
In specific implementation, after a user selects a first semiconductor device in a semiconductor device set, whether a first Recipe of the first semiconductor device is the same as a second Recipe of each second semiconductor device is determined, that is: comparing the first Recipe of the first semiconductor device with the second recipes of the second semiconductor devices; if each parameter included in the first Recipe of the first semiconductor device is the same as each parameter included in the second Recipe of the second semiconductor device, which means that the first Recipe of the first semiconductor device is the same as the second Recipe of the second semiconductor device, the comparison result is identification information indicating that the first Recipe is the same as the second Recipe, such as: same; on the contrary, if there is a parameter different from the parameter included in the second Recipe of the second semiconductor device in the parameters included in the first Recipe of the first semiconductor device, which indicates that the first Recipe of the first semiconductor device is different from the second Recipe of the second semiconductor device, the comparison result is identification information indicating that the first Recipe is different from the second Recipe, such as: differential (different). This mode is after the user selects the first semiconductor device that needs the comparison, can carry out the comparison of this first semiconductor device's Recipe and each second semiconductor device's Recipe automatically, and for the mode of artifical comparison among the prior art, this mode is favorable to improving the contrast efficiency of Recipe.
Note that the number of comparison results is the same as the number of second semiconductor devices.
It should be noted that, when comparing the first Recipe of the first semiconductor device with the second recipes of the second semiconductor devices, the first Recipe may be sequentially compared with the second recipes, or the first Recipe may be simultaneously compared with the second recipes, and the comparison method between the first Recipe and the second recipes is not specifically limited herein.
Step S102: and displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface.
Specifically, the identification information of the semiconductor device may be a number preset for the semiconductor device, or may be an icon used for representing the semiconductor device, which is not specifically limited herein; the display area of the first page on the graphical user interface can be the whole graphical user interface (occupying the whole interface) or a partial area (such as the left half area) on the graphical user interface; and is not particularly limited herein.
In specific implementation, after comparing the first Recipe of the first semiconductor device with the second recipes of the second semiconductor devices and obtaining at least one comparison result, in order to enable a user to more intuitively know whether the recipes of the first semiconductor device are different from the recipes of the second semiconductor devices, the identifier of the first semiconductor device, the identifier of the second semiconductor device, and the comparison result between the first Recipe of the first semiconductor device and the second Recipe of the second semiconductor device may be correspondingly displayed.
By way of example, fig. 2 shows an exemplary diagram of a display manner of a comparison result provided in the first embodiment of the present application, and as shown in fig. 2, in a table displayed on the first page 201, a semiconductor device numbered 001 is a first semiconductor device, and semiconductor devices numbered 002, 003, and 004 are all second semiconductor devices, where a comparison result of a Recipe of the first semiconductor device 001 and a Recipe of the second semiconductor device 002 is "Same", which indicates that the Recipe of the first semiconductor device 001 is the Same as the Recipe of the second semiconductor device 002; as above, the result of comparing the Recipe of the first semiconductor device 001 with the Recipe of the second semiconductor device 003 is "Same", which indicates that the Recipe of the first semiconductor device 001 is the Same as the Recipe of the second semiconductor device 003; the result of comparing the Recipe of the first semiconductor device 001 with the Recipe of the second semiconductor device 004 is "differential", which indicates that the Recipe of the first semiconductor device 001 is Different from the Recipe of the second semiconductor device 004.
By way of further example, fig. 3 shows an exemplary diagram of another display manner of comparison results provided in the first embodiment of the present application, and as shown in fig. 3, in the icons displayed on the first page 201, an oval icon is used to represent one semiconductor device, an oval 301 is used to represent the first semiconductor device 301, an oval 302 is used to represent the second semiconductor device 302, an oval 303 is used to represent the second semiconductor device 303, and an oval 304 is used to represent the second semiconductor device 304; the word "Same" on the connection line between the ellipse 301 and the ellipse 302 is used to indicate that the Recipe of the first semiconductor device 301 is the Same as the Recipe of the second semiconductor device 302; as above, the word "Same" on the line between the ellipse 301 and the ellipse 303 is used to indicate that the Recipe of the first semiconductor device 301 is the Same as the Recipe of the second semiconductor device 303; the word "differential" on the line between the ellipse 301 and the ellipse 304 is used to indicate that the Recipe for the first semiconductor device 301 is not the same as the Recipe for the second semiconductor device 304.
In the data comparison method provided in fig. 1, if a user wants to know whether there is a difference between a Recipe of a certain semiconductor device (a first semiconductor device) in a semiconductor device set and recipes of a plurality of semiconductor devices (second semiconductor devices) in the semiconductor device set, the RMS system automatically compares the Recipe of the first semiconductor device with each of the second semiconductor devices to obtain at least one comparison result, only needs to select the first semiconductor device in the semiconductor device set; after obtaining each comparison result, the RMS system automatically displays the identification information of the first semiconductor device, the identification information of each second semiconductor device to be compared, and the comparison result between the Recipe of the first semiconductor device and the Recipe of each second semiconductor device; in the above process, the user only needs to participate once, namely: the RMS system can automatically complete a series of subsequent comparison operations by selecting the first semiconductor device to be compared, and display the obtained comparison result, and the mode is favorable for reducing the manual workload, thereby being favorable for improving the experience of users.
In a possible embodiment, after the step S102 is executed, the data comparison method can be further implemented by:
step S201: responding to target operation of a target comparison result in each comparison result, and acquiring comparison information of the first target and the second target corresponding to the target comparison result; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the parameter values to be the same or different, are obtained, and the first parameter and the second parameter to be compared have the same parameter name.
Step S202: displaying the comparison information in a second page on the graphical user interface.
Specifically, the target operation includes, but is not limited to, a click operation, a sliding operation, a hook operation, and the like, the first target of the first semiconductor device includes at least one first parameter, the specific representation form of the first parameter includes a parameter name and a parameter value, and as above, the second target of the second target semiconductor also includes at least one second parameter, the specific representation form of the second parameter includes a parameter name and a parameter value, and when comparing the first target with the second target, it is necessary to compare parameter values corresponding to the same parameter name in the first target and the second target; the second page and the first page may be the same page or different pages, and are not specifically limited herein; when the second page and the first page are different pages, the display area of the second page may cover the display area of the first page, or may not cover the display area of the first page, which is not specifically limited herein.
In specific implementation, when a user performs a target operation on one of comparison results (i.e., a target comparison result) displayed on a graphical user interface, the RMS system obtains comparison information corresponding to the target comparison result, where the comparison information includes specific detail information when a first target of a first semiconductor device is compared with a second target of a second semiconductor device, that is, the comparison information includes: the parameter name and the parameter value of at least one first parameter included in the first Recipe, the parameter name and the parameter value of at least one second parameter included in the second target Recipe, and at least one parameter comparison result are used for indicating that the parameter value of the first parameter and the parameter value of the second parameter to be compared are the same or different according to each parameter comparison result; and after the comparison information is acquired, displaying the acquired comparison information on a second page of the image user interface. By the method, the user can check specific comparative details, and the user experience is favorably improved.
It should be noted that the number of the first parameters included in the first Recipe and the number of the second parameters included in the second target Recipe may be the same or different, and is not specifically limited herein. If the number of the first parameters is different from the number of the second parameters, the first target Recipe is different from the second target Recipe. If the number of the first parameters is the same as that of the second parameters but one first parameter exists, the second parameters with the same name as that of the first parameters do not exist in the second parameters; or a certain second parameter exists, and the first parameter with the same name as the second parameter does not exist in the first parameters; the first Recipe is not the same as the second target Recipe. If the number of the first parameters is the same as that of the second parameters, and each first parameter has a second parameter with the same name as that of the first parameter, and each second parameter has a first parameter with the same name as that of the second parameter, but each parameter comparison result has a parameter comparison result for indicating that the parameter values are different; the first Recipe is not the same as the second target Recipe. If the number of the first parameters is the same as that of the second parameters, and for each first parameter, a second parameter with the same name as that of the first parameter exists, and for each second parameter, a first parameter with the same name as that of the second parameter exists, and meanwhile, each parameter comparison result is a parameter comparison result used for representing the same parameter value; the first Recipe is the same as the second target Recipe.
For example, fig. 4 is an exemplary diagram illustrating a display manner of comparison information provided in the first embodiment of the present application, and as shown in fig. 4, it is assumed that when a user clicks a comparison result "Same" between a Recipe of a semiconductor device 001 and a Recipe of a semiconductor device 002 displayed on a first page 201 in fig. 2, the semiconductor device 001 is a first semiconductor device, the semiconductor device 002 is a second target semiconductor device, and the comparison result "Same" is a target comparison result; the second page 202 in fig. 4 displays the comparison information corresponding to the target comparison result "Same", and the first Recipe of the first semiconductor device 001 includes three parameters, which are a parameter a, a parameter B, and a parameter C, respectively, where a parameter value of the parameter a is 5, a parameter value of the parameter B is 3, and a parameter value of the parameter C is 1; the second target Recipe of the second target semiconductor device 002 includes two parameters, which are a parameter a and a parameter B, respectively, where a parameter value of the parameter a is 5 and a parameter value of the parameter B is 3; comparing the parameter value of the parameter A in the first Recipe with the parameter value of the parameter A in the second target Recipe to obtain a parameter comparison result 'Same' for representing the Same parameter value; comparing the parameter value of the parameter B in the first Recipe with the parameter value of the parameter B in the second target Recipe to obtain a parameter comparison result 'Same' for representing the Same parameter value; since the parameter C is not included in the second target Recipe of the second target semiconductor device 002, the parameter comparison result corresponding to the parameter C in the first Recipe is set to "differential", and thus the first Recipe of the first semiconductor device 001 and the second target Recipe of the second target semiconductor device 002 are not the same.
In a possible embodiment, after performing step S202, the data comparison method can be further implemented by:
step S301: and determining a target parameter comparison result for indicating that the parameter values are different in the comparison information.
Step S302: and labeling the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target parameter corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target parameter corresponding to the target parameter comparison result.
Specifically, since there is at least one parameter that can be compared in the first and second target recipes, the comparison information includes at least one parameter comparison result, each parameter comparison result includes a parameter comparison result used for indicating that the parameter values are the same and a parameter comparison result used for indicating that the parameter values are different, and the RMS system determines, in each parameter comparison result, a parameter comparison result used for indicating that the parameter values are different, that is: comparing the target parameters; and then, marking the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target used for obtaining the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target used for obtaining the target parameter comparison result. Through the mode, the user can be favorably and quickly distinguished from the different parameters and the positions of the parameters in the first target Recipe and the second target Recipe.
The labeling method may be set according to actual conditions, for example, the labeling is performed by pattern filling, or labeling is performed by adding remark information, and the labeling method is not particularly limited herein.
For example, based on the exemplary diagram of one display manner of the comparison information provided by the first embodiment of the present application shown in fig. 4, fig. 5 is an exemplary diagram of another display manner of the comparison information provided by the first embodiment of the present application, and as shown in fig. 5, background filling of a vertical bar pattern is performed on a row where a comparison result "difference" is located, where in the row where background filling is performed, a parameter name of a parameter in a Recipe of the first semiconductor device 001 is C, and a parameter value of the parameter C is 1; since there is no parameter having the same name as the parameter C in the Recipe of the second target semiconductor device 002, the corresponding table of parameter names and parameter values is empty.
In a possible embodiment, the data comparison method further includes the following implementation manners:
the display area of the second page on the graphical user interface comprises other areas on the graphical user interface except the display area of the first page.
Specifically, when the second page and the first page are not the same page, the first page and the second page may be simultaneously displayed on the graphical user interface, and in order to prevent the second page from blocking data displayed on the first page, the display area of the second page may be set as another display area on the graphical user interface except for the display area of the first page.
In a possible embodiment, the data comparison method further includes the following implementation manners:
and storing each comparison result and comparison information corresponding to each comparison result.
Specifically, when the comparison results and the comparison information corresponding to the comparison results are obtained, the comparison results and the comparison information corresponding to the comparison results can be stored; when the user selects the first semiconductor device in the semiconductor device set again, the corresponding comparison result and the comparison information corresponding to each comparison result can be directly obtained from the memory, and the method does not need the RMS system to perform comparison operation again, and is favorable for improving the speed of obtaining the comparison result and the comparison information corresponding to each comparison result by the RMS system.
After storing each comparison result and the comparison information corresponding to each comparison result, identification information indicating the semiconductor device set and/or the first semiconductor device is added to the comparison information corresponding to each comparison result and each comparison result for easy recognition.
Example two
Fig. 6 is a schematic structural diagram of a data comparison apparatus provided in the second embodiment of the present application, and as shown in fig. 6, the data comparison apparatus is applied to an RMS system, and includes:
a comparing module 601, configured to respond to a selection operation on a first semiconductor device in a semiconductor device set, compare, for each second semiconductor device in the semiconductor device set, a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device, and obtain a comparison result indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device;
a first display module 602, configured to display the identification information of the first semiconductor device, the identification information of each second semiconductor device, and a comparison result between the first Recipe and each second Recipe in a first page on a graphical user interface.
In a possible implementation, after the first display module 602 is configured to display the identification information of the first semiconductor device, the identification information of each second semiconductor device, and the comparison result between the first Recipe and each second Recipe in a first page on a graphical user interface, the data comparison apparatus further includes:
the obtaining module is used for responding to target operation of target comparison results in the comparison results and obtaining comparison information of the first target Recipe and the second target Recipe corresponding to the target comparison results; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the same or different parameter values, wherein the first parameter and the second parameter which are compared have the same parameter name;
and the second display module is used for displaying the comparison information in a second page on the graphical user interface.
In a possible embodiment, after the second display module is configured to display the comparison information in a second page on the graphical user interface, the data comparison apparatus further includes:
the determining module is used for determining a target parameter comparison result which is used for indicating that the parameter values are different in the comparison information;
and the marking module is used for marking the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target corresponding to the target parameter comparison result.
In a possible embodiment, the data comparison device further comprises:
the display area of the second page on the graphical user interface comprises other areas on the graphical user interface except the display area of the first page.
In a possible embodiment, the data comparison device further comprises:
and the storage module is used for storing each comparison result and comparison information corresponding to each comparison result.
The apparatus provided in the embodiments of the present application may be specific hardware on a device, or software or firmware installed on a device, etc. The device provided by the embodiment of the present application has the same implementation principle and technical effect as the foregoing method embodiments, and for the sake of brief description, reference may be made to the corresponding contents in the foregoing method embodiments where no part of the device embodiments is mentioned. It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the foregoing systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the data comparison method provided in the embodiment of the application, if a user wants to know whether a difference exists between a Recipe of a certain semiconductor device (a first semiconductor device) in a semiconductor device set and recipes of a plurality of semiconductor devices (second semiconductor devices) in the semiconductor device set, the user only needs to select the first semiconductor device in the semiconductor device set, and an RMS system automatically compares the Recipe of the first semiconductor device with each second semiconductor device to obtain at least one comparison result; after obtaining each comparison result, the RMS system automatically displays the identification information of the first semiconductor device, the identification information of each second semiconductor device to be compared, and the comparison result between the Recipe of the first semiconductor device and the Recipe of each second semiconductor device; in the above process, the user only needs to participate once, namely: the RMS system can automatically complete a series of subsequent comparison operations by selecting the first semiconductor device to be compared, and display the obtained comparison result, and the mode is favorable for reducing the manual workload, thereby being favorable for improving the experience of users.
EXAMPLE III
Fig. 7 shows a schematic structural diagram of a computer device provided in the third embodiment of the present application, and as shown in fig. 7, the device includes a memory 701, a processor 702, and a computer program stored in the memory 701 and executable on the processor 702, where the memory 701 and the processor 702 are communicatively connected through a bus, and the processor 702 implements the data comparison method when executing the computer program.
Specifically, the memory 701 and the processor 702 can be general memories and processors, which are not limited in particular, and when the processor 702 runs a computer program stored in the memory 701, the data comparison method can be executed, so that the problem of large workload in the prior art is solved.
Example four
The embodiment of the present application further provides a computer-readable storage medium, where a computer program is stored on the computer-readable storage medium, and when the computer program is executed by a processor, the computer program performs the steps of the data comparison method.
Specifically, the storage medium can be a general-purpose storage medium, such as a removable disk, a hard disk, and the like, and when a computer program on the storage medium is executed, the data comparison method can be executed, so that the problem of large workload in the prior art is solved.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments provided in the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application or portions thereof that substantially contribute to the prior art may be embodied in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus once an item is defined in one figure, it need not be further defined and explained in subsequent figures, and moreover, the terms "first", "second", "third", etc. are used merely to distinguish one description from another and are not to be construed as indicating or implying relative importance.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the present disclosure, which should be construed in light of the above teachings. Are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A data comparison method applied to an RMS system comprises the following steps:
responding to a selection operation of a first semiconductor device in a semiconductor device set, and aiming at each second semiconductor device in the semiconductor device set, comparing a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device to obtain a comparison result for indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device;
and displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface.
2. The data comparison method of claim 1, wherein after displaying the identification information of the first semiconductor device, the identification information of each of the second semiconductor devices, and the comparison result of the first Recipe and each of the second recipes in a first page on a graphical user interface, the data comparison method further comprises:
responding to target operation of a target comparison result in each comparison result, and acquiring comparison information of the first target and the second target corresponding to the target comparison result; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the same or different parameter values, wherein the first parameter and the second parameter which are compared have the same parameter name;
displaying the comparison information in a second page on the graphical user interface.
3. The data comparison method of claim 2, wherein after said displaying said comparison information in a second page on said graphical user interface, said data comparison method further comprises:
determining a target parameter comparison result for indicating that the parameter values are different in the comparison information;
and labeling the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target parameter corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target parameter corresponding to the target parameter comparison result.
4. The data comparison method of claim 2, wherein the data comparison method further comprises:
the display area of the second page on the graphical user interface comprises other areas on the graphical user interface except the display area of the first page.
5. The data comparison method of claim 2, wherein the data comparison method further comprises:
and storing each comparison result and comparison information corresponding to each comparison result.
6. A data comparison device, applied to an RMS system, comprising:
a comparison module, configured to respond to a selection operation on a first semiconductor device in a semiconductor device set, compare, for each second semiconductor device in the semiconductor device set, a first Recipe of the first semiconductor device with a second Recipe of the second semiconductor device, and obtain a comparison result indicating that the first Recipe and the second Recipe are the same or different; wherein each of the second semiconductor devices includes the other semiconductor devices in the semiconductor device group except the first semiconductor device;
and the first display module is used for displaying the identification information of the first semiconductor equipment, the identification information of each second semiconductor equipment and the comparison result of the first Recipe and each second Recipe in a first page on a graphical user interface.
7. The data comparison apparatus according to claim 6, wherein after the first display module is configured to display the identification information of the first semiconductor device, the identification information of each of the second semiconductor devices, and the comparison result between the first Recipe and each of the second recipes on a first page on a graphical user interface, the data comparison apparatus further comprises:
the obtaining module is used for responding to target operation of target comparison results in the comparison results and obtaining comparison information of the first target Recipe and the second target Recipe corresponding to the target comparison results; wherein the comparison information comprises: the parameter name and the parameter value of at least one first parameter in the first Recipe, the parameter name and the parameter value of at least one second parameter in the second target Recipe, and a parameter comparison result between each first parameter and each second parameter, which is used for representing the same or different parameter values, wherein the first parameter and the second parameter which are compared have the same parameter name;
and the second display module is used for displaying the comparison information in a second page on the graphical user interface.
8. The data comparison apparatus of claim 7, wherein after said second display module is configured to display said comparison information in a second page on said graphical user interface, said data comparison apparatus further comprises:
the determining module is used for determining a target parameter comparison result which is used for indicating that the parameter values are different in the comparison information;
and the marking module is used for marking the target parameter comparison result, the parameter name and the parameter value of the first target parameter in the first target corresponding to the target parameter comparison result, and the parameter name and the parameter value of the second target parameter in the second target corresponding to the target parameter comparison result.
9. A computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the steps of the data comparison method according to any of the preceding claims 1-5 when executing the computer program.
10. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the data comparison method according to any one of claims 1 to 5.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0254644A2 (en) * | 1986-07-22 | 1988-01-27 | Schlumberger Technologies, Inc. | Mask alignment and measurement of critical dimensions in integrated circuits |
| CN1486506A (en) * | 2000-12-01 | 2004-03-31 | 株式会社日立制作所 | Method for identifying semiconductor integrated circuit device, method for manufacturing semiconductor integrated circuit device, semiconductor integrated circuit device and semiconductor chip |
| CN102789999A (en) * | 2012-08-16 | 2012-11-21 | 上海华力微电子有限公司 | Defect detecting method for utilizing graphic features to scan and manufacturing method of semiconductor chip |
| CN103066060A (en) * | 2011-10-19 | 2013-04-24 | 中芯国际集成电路制造(上海)有限公司 | Detection structure and detection method of semiconductor device mismatch characteristic |
| CN103794596A (en) * | 2012-10-29 | 2014-05-14 | 中芯国际集成电路制造(上海)有限公司 | Standard wafer and manufacturing method thereof |
| CN105426862A (en) * | 2015-12-01 | 2016-03-23 | 杨春光 | Analysis method and system based on RFID (Radio Frequency Identification Devices), positioning technology and video technology |
| CN105446277A (en) * | 2014-08-20 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method and system for managing and controlling semiconductor production process recipe |
| CN110889260A (en) * | 2018-09-05 | 2020-03-17 | 长鑫存储技术有限公司 | Method and device for detecting process parameters, electronic equipment and computer readable medium |
| CN112259644A (en) * | 2019-07-22 | 2021-01-22 | 山东浪潮华光光电子股份有限公司 | Method for testing parameters of LED chip |
-
2021
- 2021-12-29 CN CN202111637969.6A patent/CN114358168A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0254644A2 (en) * | 1986-07-22 | 1988-01-27 | Schlumberger Technologies, Inc. | Mask alignment and measurement of critical dimensions in integrated circuits |
| CN1486506A (en) * | 2000-12-01 | 2004-03-31 | 株式会社日立制作所 | Method for identifying semiconductor integrated circuit device, method for manufacturing semiconductor integrated circuit device, semiconductor integrated circuit device and semiconductor chip |
| CN103066060A (en) * | 2011-10-19 | 2013-04-24 | 中芯国际集成电路制造(上海)有限公司 | Detection structure and detection method of semiconductor device mismatch characteristic |
| CN102789999A (en) * | 2012-08-16 | 2012-11-21 | 上海华力微电子有限公司 | Defect detecting method for utilizing graphic features to scan and manufacturing method of semiconductor chip |
| CN103794596A (en) * | 2012-10-29 | 2014-05-14 | 中芯国际集成电路制造(上海)有限公司 | Standard wafer and manufacturing method thereof |
| CN105446277A (en) * | 2014-08-20 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method and system for managing and controlling semiconductor production process recipe |
| CN105426862A (en) * | 2015-12-01 | 2016-03-23 | 杨春光 | Analysis method and system based on RFID (Radio Frequency Identification Devices), positioning technology and video technology |
| CN110889260A (en) * | 2018-09-05 | 2020-03-17 | 长鑫存储技术有限公司 | Method and device for detecting process parameters, electronic equipment and computer readable medium |
| CN112259644A (en) * | 2019-07-22 | 2021-01-22 | 山东浪潮华光光电子股份有限公司 | Method for testing parameters of LED chip |
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