CN114352513B - Vacuum pumping system - Google Patents
Vacuum pumping system Download PDFInfo
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- CN114352513B CN114352513B CN202111579045.5A CN202111579045A CN114352513B CN 114352513 B CN114352513 B CN 114352513B CN 202111579045 A CN202111579045 A CN 202111579045A CN 114352513 B CN114352513 B CN 114352513B
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Abstract
An embodiment of the present application provides an extraction vacuum system, includes: the device comprises a container, a vacuum pump, a first exhaust pipeline, a front end valve, a first gas detector and a control system. The container comprises a vacuum cavity and a medium cavity, wherein the medium cavity is used for containing dangerous gas, and the vacuum cavity and the medium cavity are isolated from each other. The first exhaust line connects the vacuum chamber of the container and the inlet of the vacuum pump. The front end valve is arranged on the first exhaust pipeline, and the first gas detector is arranged on the first exhaust pipeline and located at the upstream of the front end valve along the gas flowing direction. When the concentration value represented by the concentration information of the first gas detector reaches a first preset value, the control system controls the front end valve to close. The vacuum pumping system of this application embodiment detects hazardous gas's concentration value in the first exhaust pipeline through control system according to first gas detector, and the switching of control front end valve prevents that hazardous gas from leading to the fact environmental pollution and personnel to endanger in exhausting into the external atmosphere.
Description
Technical Field
The invention relates to the field of chemical production, in particular to a vacuum pumping system.
Background
The chemical production involves the treatment of various toxic and harmful gases (such as CO gas and BF) 3 Boron trifluoride gas) or flammable and explosive gas, and performing adsorption, purification, pressurization, liquefaction, vaporization, rectification and other treatments. The above process requires that the media chambers of the two-chamber vessel (in which these gases are typically stored during production) be maintained in a relatively good high or low temperature environment. In order to meet the condition, a vacuum pump is required to be used for continuously vacuumizing the vacuum cavities in the two-cavity container so as to ensure the high vacuum degree in the vacuum cavities, so that the medium cavities in the two-cavity container and the outside have a good heat insulation effect (the medium cavities are arranged in the vacuum cavities), the heat exchange with the outside is avoided, and the temperature characteristic in the medium cavities is changed. Since the vacuum chambers and the medium chamber of the two-chamber container are usually connected by a vacuum joint, the vacuum joint may cause toxic and harmful gases or flammable and explosive gases in the medium chamber to permeate into the vacuum chamber due to insufficient sealing performance, and the toxic and harmful gases or flammable and explosive gases are pumped by the vacuum pumpAfter being taken out, the waste gas is discharged into the atmosphere, thus causing environmental pollution. Therefore, the prior art singly uses the vacuum pump and is not suitable for carrying out vacuum pumping operation on equipment related to toxic and harmful gases or flammable and explosive gases.
Disclosure of Invention
In view of the above, embodiments of the present application are intended to provide an evacuation system for evacuating equipment involving hazardous gases (including toxic and harmful gases or flammable and explosive gases).
An extraction vacuum system of an embodiment of the present application includes:
the container comprises a vacuum cavity and a medium cavity, wherein the medium cavity is used for containing hazardous gas, the hazardous gas comprises toxic and harmful gas or inflammable and explosive gas, and the vacuum cavity and the medium cavity are isolated from each other;
a vacuum pump having an inlet and an outlet;
a first exhaust line connecting the vacuum chamber and an inlet of the vacuum pump;
a front end valve disposed on the first exhaust conduit;
a first gas sensor for detecting a concentration of a hazardous gas on the first exhaust line, the first gas sensor being disposed on the first exhaust line upstream of the front end valve in a gas flow direction;
and the control system is used for controlling the opening and closing of the front-end valve, acquiring the concentration information of the first gas detector, and controlling the front-end valve to be closed when the concentration value represented by the concentration information of the first gas detector reaches a first preset value.
In some embodiments, the extraction vacuum system comprises a second exhaust line, one end of which is connected to the outlet of the vacuum pump.
In some embodiments, the vacuum pumping system includes a second gas detector disposed on the second exhaust line, the second gas detector is configured to detect a concentration of a hazardous gas on the second exhaust line, and the control system is configured to obtain concentration information of the second gas detector, and control the front end valve to close when a concentration value indicated by the concentration information of the second gas detector reaches a second preset value.
In some embodiments, the vacuum pumping system includes a back-end valve disposed on the second exhaust pipe and located downstream of the second gas detector in the gas flow direction, and the control system controls the vacuum pump to stop operating and controls the back-end valve to close when a concentration value indicated by the concentration information of the second gas detector reaches a second predetermined value.
In some embodiments, when the concentration value represented by the concentration information of the first gas detector reaches a first preset value, the control system controls both the front end valve and the rear end valve to be closed, and controls the vacuum pump to stop operating.
In some embodiments, the control system is configured to obtain an operating parameter of the vacuum pump, determine whether the first exhaust line and/or the second exhaust line has a fault according to the operating parameter, and control both the front end valve and the rear end valve to close when the first exhaust line and/or the second exhaust line has a fault.
In some embodiments, the operating parameter comprises a current value, and when the current value is greater than a preset upper limit current value, it is determined that the first exhaust line and/or the second exhaust line has a blockage fault; and when the current value is smaller than a preset current lower limit value, determining that the first exhaust pipeline and/or the second exhaust pipeline has a leakage fault, wherein the preset current lower limit value is smaller than the preset current upper limit value.
In some embodiments, the extraction vacuum system comprises a cooling water supply system connected to the vacuum pump.
In some embodiments, the extraction vacuum system includes a vacuum gauge disposed on the container or on the first exhaust line.
The extraction vacuum system of this application embodiment detects hazardous gas's concentration value in the first exhaust pipeline through control system according to first gas detector, and the switching of control front end valve prevents that hazardous gas from leading to the fact environmental pollution and personnel to endanger in discharging into external atmosphere.
Drawings
Fig. 1 is a schematic view of an evacuation system according to an embodiment of the present application.
Description of the reference numerals
A container 1; a vacuum chamber 11; a media chamber 12; a vacuum pump 2; the inlet 2a of the vacuum pump; an outlet 2b of the vacuum pump; a first exhaust line 3; a front end valve 4; a first gas detector 5; a control system 6; a second exhaust line 7; a second gas detector 8; a rear end valve 9; vacuum measuring instrument 10
Detailed Description
It should be noted that, in the present application, technical features in examples and embodiments may be combined with each other without conflict, and the detailed description in the specific embodiment should be understood as an explanation of the gist of the present application and should not be construed as an improper limitation to the present application.
An embodiment of the present application provides a vacuum pumping system, please refer to fig. 1, which includes: a vessel 1, a vacuum pump 2, a first exhaust line 3, a front-end valve 4, a first gas detector 5 and a control system 6.
The container 1 comprises a vacuum cavity 11 and a medium cavity 12, wherein the medium cavity 12 is used for containing dangerous gas, and the dangerous gas comprises poisonous and harmful gas or inflammable and explosive gas.
Illustratively, toxic and harmful gases include, but are not limited to, CO (carbon monoxide), BF 3 Boron trifluoride, hg (mercury vapor), rn (radon gas), and the like.
Illustratively, flammable and explosive gases include, but are not limited to, H 2 (hydrogen) CH 4 (methane), C 2 H 4 (ethylene), C 2 H 2 (acetylene) and the like.
The vacuum chamber 11 and the medium chamber 12 are isolated from each other. The vacuum pump 2 has an inlet and an outlet, and the first exhaust line 3 connects the vacuum chamber 11 of the container 1 and the inlet 2a of the vacuum pump.
The vacuum pump 2 is not limited in kind, and for example, a rotary vane vacuum pump, an oil diffusion pump, a turbo molecular pump, or the like can be used as the vacuum pump 2.
The front valve 4 is disposed on the first exhaust line 3, and the first gas detector 5 is disposed on the first exhaust line 3 and upstream of the front valve 4 in the gas flow direction to detect the concentration of the hazardous gas on the first exhaust line 3. And the control system 6 is used for controlling the opening and closing of the front end valve 4 and acquiring the concentration information of the first gas detector 5. When the concentration value represented by the concentration information of the first gas detector 5 reaches a first preset value, the control system 6 controls the front end valve 4 to close.
The kind of the first gas detector 5 is not limited. For example, for flammable gas, the first gas detector 5 may be a catalytic combustible gas detector or an infrared optical gas detector. For toxic gas, the first gas detector 5 may be an intrinsically safe toxic gas detector or an explosion-proof toxic gas detector.
The vacuum pumping system of this application embodiment detects hazardous gas's concentration value in the first exhaust pipeline 3 through control system 6 according to first gas detector 5, and the switching of control front end valve 4 prevents that hazardous gas from discharging into external atmosphere, causes environmental pollution and personnel to endanger.
In order to enhance the reliability of the cut-off gas path when the front end valve 4 is closed, the hazardous gas is prevented from entering the vacuum pump 2. Illustratively, the front-end valve 4 includes at least two automatic valves in series.
The front end valve 4 is not limited in its category and may include automatic valves of the same category or automatic valves of different categories. In some embodiments, the front end valve 4 employs two vacuum gate valves in series. For example, a vacuum gate valve is selected as an opening and closing device on a pipeline with the working temperature less than or equal to 425 ℃ (centigrade) and the working medium being steam or air.
In other embodiments, the front end valve 4 is formed by connecting a vacuum gate valve and a butterfly valve in series. The front end valve 4 in the embodiment combines the advantages of convenience in opening and closing of the butterfly valve, simple structure, small fluid resistance of the vacuum gate valve and reliability in sealing.
For example, referring to fig. 1, the vacuum pumping system includes a second exhaust pipe 7, and one end of the second exhaust pipe 7 is connected to an outlet 2b of the vacuum pump.
In this embodiment, the gas coming out of the outlet 2b of the vacuum pump can be discharged to a suitable location through the second exhaust line 7.
Illustratively, referring to FIG. 1, the extraction vacuum system includes a second gas detector 8. A second gas detector 8 is arranged on the second exhaust line 7 to detect the concentration of hazardous gases on the second exhaust line 7.
The kind of the second gas detector 8 is not limited. For example, for flammable gas, the second gas detector 8 may be a catalytic combustible gas detector or an infrared optical gas detector. For toxic gas, the second gas detector 8 may be an intrinsically safe toxic gas detector or an explosion-proof toxic gas detector.
The control system 6 controls the front-end valve 4 to open and close according to the acquired concentration information of the second gas detector 8, and when the concentration value represented by the concentration information of the second gas detector 8 reaches a second preset value, the control system 6 controls the front-end valve 4 to close.
In this embodiment, when the first gas detector 5 fails, the second gas detector 8 can still detect the concentration value of the hazardous gas output from the outlet of the vacuum pump 2, and the closing of the front valve 4 prevents the vacuum pump 2 from continuously extracting the hazardous gas from the vacuum chamber 11, thereby improving the operation safety of the vacuum extraction system.
In order to ensure that the vacuum pump 2 stops working, the external atmosphere is prevented from flowing back into the vacuum pump 2 from the outlet of the vacuum pump 2. Illustratively, referring to fig. 1, the vacuum pumping system includes a back-end valve 9, the back-end valve 9 is disposed on the second exhaust pipe 7 and downstream of the second gas detector 8 along the gas flow direction, and when the concentration value represented by the concentration information of the second gas detector 8 reaches a second preset value, the control system 6 controls the vacuum pump 2 to stop operating and controls the back-end valve 9 to close.
In this embodiment, when the second gas detector 8 detects that the concentration value reaches the second preset value, the vacuum pump 2 does not pump the gas in the vacuum chamber 11 any more, so that the hazardous gas in the vacuum chamber 11 does not further enter the vacuum pump 2. The closing of the rear valve 9 closes the second exhaust duct 7, preventing the external air flow from flowing backward into the outlet 2b of the vacuum pump under the action of atmospheric pressure, causing reverse damage to the vacuum pump 2.
The type of the valve used for the rear end valve 9 is not limited, and for example, a solenoid valve or a pneumatic angle seat valve is used.
It will be appreciated that the gas extracted from within the vacuum chamber 11 by the extraction vacuum system of the embodiment of the present application first passes through the first gas detector 5.
Referring to fig. 1, for example, when the concentration value represented by the concentration information of the first gas detector 5 reaches a first preset value, the control system 6 controls the front valve 4 and the rear valve 9 to be closed, and controls the vacuum pump 2 to stop operating.
In this embodiment, the first gas detector 5 detects that the concentration value reaches the first preset value, which indicates that the first gas line has entered the hazardous gas, and the control system 6 controls the front valve 4 to close, so as to block the communication between the inlet 2a of the vacuum pump and the vacuum chamber 11, and prevent the hazardous gas from polluting the vacuum pump 2 and further polluting the second exhaust pipe 7. The control system 6 controls the rear end valve 9 to be closed, the second exhaust pipeline 7 is cut off, and external air flow is prevented from flowing back into the outlet 2b of the vacuum pump under the action of atmospheric pressure to cause reverse damage of the vacuum pump 2.
It will be appreciated that in the event of a failure of the first 3 and/or second 7 vent line, the vacuum chamber 11 within the container 1 should be cut off from the environment.
Illustratively, the control system 6 obtains operating parameters of the vacuum pump 2 and determines whether the first exhaust line 3 and/or the second exhaust line 7 are/is faulty according to the operating parameters, and controls both the front end valve 4 and the rear end valve 9 to be closed when the fault occurs.
The closing of the front end valve 4 cuts off the communication between the inlet 2a of the vacuum pump and the vacuum chamber 11, eliminates the possibility that the gas in the vacuum chamber 11 diffuses into the vacuum pump 2, and the closing of the rear end valve 9 eliminates the influence of the external atmosphere on the vacuum pump 2.
In this embodiment, the control system 6 is used to monitor the vacuum pump 2 in real time, so as to obtain the operation condition of the vacuum pumping system and form closed-loop control on the whole vacuum pumping system.
The control system 6 may monitor various operating parameters of the vacuum pump 2, such as pumping rate, pumping volume, and current level.
In some embodiments, the operating parameter comprises a current value, and when the current value is greater than a preset upper limit value of current, it is determined that a blockage fault occurs in the first exhaust line 3 and/or the second exhaust line 7; and when the current value is smaller than the preset lower limit value of the current, determining that the leakage fault occurs in the first exhaust pipeline 3 and/or the second exhaust pipeline 7. The preset lower current limit value is smaller than the preset upper current limit value.
It will be appreciated that during operation of the vacuum pump 2, a portion of the energy is dissipated as heat energy.
In order to prevent the vacuum pump 2 from being overheated and damaging the fan in the vacuum pump 2, the evacuation system illustratively includes a cooling water supply system connected to the vacuum pump 2. For example, the vacuum pump 2 is an Edwardsiella semiconductor high vacuum dry pump (EPX 180 LE). The Edward semiconductor high vacuum dry pump generates heat by doing work in the working process, so that cooling water is heated, the water temperature is higher, gas is output by the exhaust pipe, and water is discharged from the water outlet of the Edward semiconductor high vacuum dry pump. Therefore, the cooling water supply systems are connected to the two sides of the pump body, cold water is continuously supplied to supplement hot water discharged from the pump body, and meanwhile, the high vacuum dry pump of the Edward semiconductor is cooled, so that the working water temperature is not too high, the performance of the high vacuum dry pump of the Edward semiconductor is ensured to reach the technical index, and the technological requirement is met.
In this embodiment, the cooling water supplied from the cooling water supply system when the vacuum pump 2 is normally operated is at a temperature of 32 ℃ (centigrade) and a flow rate of 2m 3 H (cubic meters per hour); when the exhaust temperature of the vacuum pump 2 is too high, the flow rate in the cooling water supply system is increased, and the temperature reduction of the vacuum pump 2 is accelerated. When the supply of cooling water can not meet the normal cooling requirement of the vacuum pump 2, the temperature of the pump body of the vacuum pump 2 is further increased, and when the temperature is increased to the built-in overheat protector of the vacuum pump 2 per seWhen the device is protected, the vacuum pump 2 is automatically stopped, and the control system 6 controls the front end valve 4 and the rear end valve 9 to be closed, so that the vacuum pump 2 is protected from being damaged.
In order to obtain the vacuum level in the vacuum chamber 11 of the container 1 in real time, the vacuum pumping system illustratively comprises a vacuum gauge 10, the vacuum gauge 10 being disposed on the container 1 or on the first exhaust line 3.
The vacuum measuring instrument 10 is not limited in kind, and may be, for example, an elastic element vacuum gauge, a heat conduction vacuum gauge, an ionization vacuum gauge, a pressure display transducer, or the like.
In some embodiments, a vacuum pressure gauge is installed on the container 1, and the value of the vacuum pressure gauge is directly read.
In other embodiments, a pressure display transducer is provided in the first exhaust line 3, which converts the vacuum measurement into an electrical signal that is transmitted to the control system 6 to display the vacuum level of the vessel 1.
The various embodiments/implementations provided herein may be combined with each other without contradiction. The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (7)
1. An extraction vacuum system, comprising:
the container (1), the container (1) includes a vacuum chamber (11) and a medium chamber (12), the medium chamber (12) is used for containing hazardous gas, wherein, the hazardous gas includes poisonous and harmful gas or flammable and explosive gas, the vacuum chamber (11) and the medium chamber (12) are isolated from each other;
a vacuum pump (2), the vacuum pump (2) having an inlet and an outlet;
a first exhaust line (3), the first exhaust line (3) connecting the vacuum chamber (11) and an inlet (2 a) of the vacuum pump;
a front end valve (4), the front end valve (4) being disposed on the first exhaust line (3);
a first gas detector (5) for detecting the concentration of the hazardous gas on the first exhaust line (3), the first gas detector (5) being arranged on the first exhaust line (3) upstream of the front-end valve (4) in the gas flow direction;
the control system (6) is used for controlling the opening and closing of the front-end valve (4), acquiring concentration information of the first gas detector (5), and controlling the front-end valve (4) to be closed when a concentration value represented by the concentration information of the first gas detector (5) reaches a first preset value;
the vacuum pumping system comprises a second exhaust pipeline (7), and one end of the second exhaust pipeline (7) is connected to an outlet (2 b) of the vacuum pump;
the vacuum pumping system comprises a second gas detector (8) arranged on the second exhaust pipeline (7), the second gas detector (8) is used for detecting the concentration of dangerous gas on the second exhaust pipeline (7), the control system (6) is used for obtaining the concentration information of the second gas detector (8), and when the concentration value represented by the concentration information of the second gas detector (8) reaches a second preset value, the front-end valve (4) is controlled to be closed.
2. The extraction vacuum system according to claim 1, comprising a back-end valve (9), wherein the back-end valve (9) is arranged on the second exhaust line (7) downstream of the second gas detector (8) in the gas flow direction, and wherein the control system (6) controls the vacuum pump (2) to stop and controls the back-end valve (9) to close when a concentration value indicated by the concentration information of the second gas detector (8) reaches a second predetermined value.
3. An extraction vacuum system according to claim 2, characterized in that when the concentration value represented by the concentration information of the first gas detector (5) reaches a first preset value, the control system (6) controls the front end valve (4) and the rear end valve (9) to be both closed and controls the vacuum pump (2) to be stopped.
4. An extraction vacuum system according to claim 2, characterized in that the control system (6) is configured to obtain operating parameters of the vacuum pump (2) and to determine whether the first exhaust line (3) and/or the second exhaust line (7) is/are faulty according to the operating parameters, and to control the front-end valve (4) and the rear-end valve (9) to be closed when a fault occurs.
5. The extraction vacuum system according to claim 4, characterised in that the operating parameters comprise a current value, when the current value is greater than a preset upper current limit value, it is determined that a blocking fault has occurred in the first exhaust line (3) and/or in the second exhaust line (7); and when the current value is smaller than a preset current lower limit value, determining that the first exhaust pipeline (3) and/or the second exhaust pipeline (7) has a leakage fault, wherein the preset current lower limit value is smaller than the preset current upper limit value.
6. The extraction vacuum system according to claim 1, characterized in that it comprises a cooling water supply system connected to the vacuum pump (2).
7. The vacuum extraction system according to claim 1, characterized in that it comprises a vacuum gauge (10), said vacuum gauge (10) being arranged on said container (1) or on said first exhaust line (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111579045.5A CN114352513B (en) | 2021-12-22 | 2021-12-22 | Vacuum pumping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111579045.5A CN114352513B (en) | 2021-12-22 | 2021-12-22 | Vacuum pumping system |
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| Publication Number | Publication Date |
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| CN114352513A CN114352513A (en) | 2022-04-15 |
| CN114352513B true CN114352513B (en) | 2023-01-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111579045.5A Active CN114352513B (en) | 2021-12-22 | 2021-12-22 | Vacuum pumping system |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH575871A5 (en) * | 1974-03-14 | 1976-05-31 | Asf Gmbh | |
| JP2001050669A (en) * | 1999-08-11 | 2001-02-23 | Daido Steel Co Ltd | Vacuum heat treatment furnace |
| CN106499941A (en) * | 2015-09-06 | 2017-03-15 | 天津宏昊源科技有限公司 | Protected against explosion liquefied natural gas carrier vehicle |
| CN112284651A (en) * | 2020-09-29 | 2021-01-29 | 张家港富瑞深冷科技有限公司 | Method for detecting interlayer vacuum degree of low-temperature storage tank |
| CN212798037U (en) * | 2020-06-12 | 2021-03-26 | 李世勇 | High-temperature and high-pressure resistant chemical raw material storage device |
-
2021
- 2021-12-22 CN CN202111579045.5A patent/CN114352513B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH575871A5 (en) * | 1974-03-14 | 1976-05-31 | Asf Gmbh | |
| JP2001050669A (en) * | 1999-08-11 | 2001-02-23 | Daido Steel Co Ltd | Vacuum heat treatment furnace |
| CN106499941A (en) * | 2015-09-06 | 2017-03-15 | 天津宏昊源科技有限公司 | Protected against explosion liquefied natural gas carrier vehicle |
| CN212798037U (en) * | 2020-06-12 | 2021-03-26 | 李世勇 | High-temperature and high-pressure resistant chemical raw material storage device |
| CN112284651A (en) * | 2020-09-29 | 2021-01-29 | 张家港富瑞深冷科技有限公司 | Method for detecting interlayer vacuum degree of low-temperature storage tank |
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| CN114352513A (en) | 2022-04-15 |
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