CN114324360A - AOI indentation detection system and method - Google Patents
AOI indentation detection system and method Download PDFInfo
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- CN114324360A CN114324360A CN202111667728.6A CN202111667728A CN114324360A CN 114324360 A CN114324360 A CN 114324360A CN 202111667728 A CN202111667728 A CN 202111667728A CN 114324360 A CN114324360 A CN 114324360A
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Abstract
The invention discloses an AOI indentation detection system and method, which comprises the following steps: the device comprises a shell, a beam splitting adjusting button, a polarization adjusting button, a TDI camera and a DIC prism; the DIC prism comprises a first prism and a second prism; the TDI camera and the DIC prism are arranged in the shell at intervals; the beam splitting adjusting button is connected with the DIC prism and used for adjusting the distance between the DIC prism and the TDI camera; the polarization adjusting button is connected with at least one of the first prism and the second prism and used for adjusting the distance between the first prism and the second prism. The existing indentation detection technology mainly has the defects of large volume, high cost, low efficiency, unclear imaging, incapability of flexible adjustment and the like, the flexible adjustment can be realized, the small change of the optical path difference caused by the small change of the thickness of the prism is utilized, a better interference effect is generated, the better user observation experience is realized, and the quantitative analysis with higher precision is facilitated.
Description
Technical Field
The invention relates to the field of intelligent optical detection, in particular to an AOI indentation detection system and method.
Background
With the development of industrial modernization, the traditional manual detection can not meet the requirements of scientific and technological development, and the visual intelligent detection represented by AOI detection becomes a great trend.
AOI is a device for detecting common defects in production by making particles clearer through an ultrahigh pixel lens based on an optical principle, which is called automatic optical detection. AOI detection belongs to a novel detection technology, the market of domestic AOI detection equipment is still in a fast growth stage at the present stage, domestic enterprises are in stable low-end markets, and high-end markets are actively seized.
In the actual research and development process, the existing AOI detection technology still has technical bottleneck in the aspect of shooting definition, and the defects of products are not easy to find out accurately.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the existing AOI detection technology still has technical bottleneck in the aspect of shooting definition, and is not easy to find out the defects of products accurately.
In order to solve the above problems, an embodiment of the present invention provides an AOI indentation detection system, which can achieve flexible adjustment, and generate a better interference effect by using a small change in optical path difference caused by a small change in prism thickness, thereby achieving better user observation experience and facilitating higher-precision quantitative analysis.
In a first aspect, an embodiment of the present invention provides an AOI indentation detection system, including: the device comprises a shell, a beam splitting adjusting button, a polarization adjusting button, a TDI camera and a DIC prism; the DIC prism comprises a first prism and a second prism; the TDI camera and the DIC prism are arranged in the shell at intervals; the beam splitting adjusting button is connected with the DIC prism and used for adjusting the distance between the DIC prism and the TDI camera; the polarization adjusting button is connected with at least one of the first prism and the second prism and used for adjusting the distance between the first prism and the second prism.
The further technical proposal is that the device also comprises a light splitting adjusting track and a polarization adjusting track; the light splitting adjusting track is arranged on the shell, and the light splitting adjusting button is nested in the light splitting adjusting track; the polarization adjusting track is arranged on the shell, and the polarization adjusting button is nested in the polarization adjusting track.
The technical scheme is that the upper end of the shell is provided with an installation groove, and the lower end of the TDI camera is embedded into the installation groove.
The technical scheme is that the device further comprises a TDI sensor, wherein the TDI sensor is arranged in the TDI camera, the TDI sensor and the DIC prism are located on the same plane, and the TDI sensor and the DIC prism are arranged in parallel.
The TDI camera further comprises a lens and an objective lens, wherein the lens is arranged at the upper end of the TDI camera, and the objective lens is arranged at the upper end of the lens.
The further technical proposal is that the shell comprises a vertical body, a horizontal channel, a vertical channel, an inclined lens and a light source; one end of the horizontal channel is connected with the vertical body and is mutually vertical, the other end of the horizontal channel is connected with the vertical channel and is mutually vertical, and the inclined lens is arranged on the inner side of the horizontal channel; the light source is arranged at one end of the vertical channel, and light rays emitted by the light source can penetrate through the vertical channel to irradiate on the inclined lens and are reflected to the DIC prism by the inclined lens.
The technical scheme is that the DIC prism further comprises a linear camera, wherein the linear camera is arranged at the lower end of the vertical body and is coaxial with the DIC prism.
The further technical scheme is that the light source is a coaxial light LED.
The further technical scheme is that the device further comprises a display, a host and a detection unit, wherein the display is electrically connected with the host, the host is electrically connected with the detection unit, and the detection unit is electrically connected with the linear camera.
In a second aspect, the present invention provides an AOI indentation detection method applied to the AOI indentation detection system according to the first aspect, the method comprising: adjusting the angle of the TDI sensor to be parallel to the DIC prism; adjusting the position of a polarization adjusting button to enable the center of the polarization adjusting button and the center of the DIC prism to be located in the same vertical direction; adjusting the position of the DIC prism to ensure that the brightness of an image observed by an eyepiece is darkest; adjusting the position of a light splitting adjusting button to reduce the brightness difference at the vertical positions of the two ends of the DIC prism; and rotating the DIC prism, and adjusting the brightness of the light source to obtain a target observation point of the image observed by the ocular.
The remarkable progress of the invention is embodied in that: the moving direction of the DIC prism of the system is variable, the thickness of the DIC prism is variable, compared with the prior art, flexible adjustment can be achieved, the small change of the optical path difference caused by the small change of the thickness of the prism is utilized, a better interference effect is generated, better user observation experience is achieved, and quantitative analysis with higher precision is facilitated.
In summary, the existing indentation detection mainly has the defects of large volume, high cost, low efficiency, unclear imaging, incapability of flexible adjustment and the like, and compared with the prior art, the indentation detection method has the advantages that: the technical bottleneck of the AOI indentation detection unit in the aspect of clear imaging can be solved, and the defects can be found out to complete detection.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is an external view of an AOI indentation inspection system according to an embodiment of the present invention.
Fig. 2 is another external view of an AOI indentation inspection system according to an embodiment of the present invention.
Fig. 3 is a partial view of an AOI indentation detection system according to an embodiment of the present invention.
Fig. 4 is another external view of an AOI indentation inspection system according to an embodiment of the present invention.
Fig. 5 is a flowchart of an AOI indentation detection method according to an embodiment of the present invention.
Reference numerals
10. The device comprises a shell, 11, a beam splitting adjusting button, 12, a polarization adjusting button, 13, a beam splitting adjusting track, 14, a polarization adjusting track, 15, a mounting groove, 20, a TDI camera, 21, a TDI sensor, 22, a lens and 23, an objective lens
30, DIC prism, 31, first prism, 32, second prism, 40, linear camera, 51, vertical body, 52, horizontal channel, 53, vertical channel, 54, oblique lens, 55, light source, 61, display, 62, host computer, 63, detection unit
Detailed Description
The technical solutions in the embodiments will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, wherein like reference numerals represent like elements in the drawings. It is apparent that the embodiments to be described below are only a part of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
Examples
Referring to fig. 1 to 5, an AOI indentation detection system proposed for an embodiment of the present invention includes a housing 10, a beam splitting adjustment button 11, a polarization adjustment button 12, a TDI camera 20, and a DIC prism 30; the DIC prism 30 includes a first prism 31 and a second prism 32; the TDI camera 20 and the DIC prism 30 are arranged in the shell 10 at intervals; the beam split adjusting button 11 is connected with the DIC prism 30 and used for adjusting the distance between the DIC prism 30 and the TDI camera 20; the polarization adjustment button 12 is connected to at least one of the first prism 31 and the second prism 32, and is used for adjusting the distance between the first prism 31 and the second prism 32.
In the above solution, a small distance exists between the first prism 31 and the second prism 32 of the DIC prism 30, and when the distance between the first prism 31 and the second prism 32 changes, the thickness of the DIC prism 30 also changes, so that a small change in optical path length or optical path length difference is caused, and a significant interference phase contrast effect is generated; the spacing between the DIC prism 30 and the TDI camera 20 can be made larger or smaller to match the difference in focal plane position of the objective 23 at different multiples to ensure uniform illumination across the field of view.
In the above scheme, the DIC prism 30 has a variable moving direction and a variable thickness, and compared with the prior art, the DIC prism brings a flexible adjusting mode and a uniform lighting effect for a user, so that the DIC prism is more suitable for an actual detection scene.
The technical effect of the scheme is that flexible adjustment can be achieved, the small change of the optical path difference caused by the small change of the thickness of the prism is utilized, a better interference effect is generated, better user observation experience is achieved, and quantitative analysis with higher precision is facilitated.
Further, the AOI indentation detection system further includes a beam splitting adjustment track 13, a polarization adjustment track 14; the light splitting adjusting track 13 is arranged on the shell 10, and the light splitting adjusting button 11 is nested in the light splitting adjusting track 13; the polarization adjusting track 14 is arranged on the shell 10, and the polarization adjusting button 12 is nested in the polarization adjusting track 14.
When the housing 10 is vertically placed, the beam splitting adjustment button 11 can vertically move along a track to drive the DIC prism 30 to also move along the vertical direction, and the polarization adjustment button 12 can horizontally move along a track to drive the DIC prism 30 to also move along the horizontal direction; the technical effect is that the track is used for bearing the movement of the two adjusting buttons, so that the device is firm and durable, and the movement precision of the light splitting adjusting button 11 and the polarization adjusting button 12 can be better controlled.
Further, the upper end of the casing 10 of the AOI indentation detection system is provided with a mounting groove 15, and the lower end of the TDI camera 20 is embedded in the mounting groove 15; the technical effect is that the shell 10 protects the outer surface of the TDI camera 20, and the service life of the indentation detection system is further prolonged.
Further, the AOI indentation detection system further comprises a TDI sensor 21, the TDI sensor 21 is arranged in the TDI camera 20, the TDI sensor 21 and the DIC prism 30 are located on the same plane, and the TDI sensor 21 and the DIC prism 30 are arranged in parallel; the technical effect is that the transmission distance of any two light rays is consistent between the TDI sensor 21 and the DIC prism 30, so that the optimal observation effect can be realized, and a user can be helped to successfully find the optimal point of an image.
Further, the AOI indentation detection system further includes a lens 22 and an objective lens 23, the lens 22 is disposed at the upper end of the TDI camera 20, and the objective lens 23 is disposed at the upper end of the lens 22; the technical effects are that the lens 22 and the objective lens 23 are matched to realize the amplification of the detected object, so that the observation precision of a user is improved, and the details of the object to be detected can be conveniently found.
Further, the housing 10 of the AOI indentation detection system includes a vertical body 51, a horizontal channel 52, a vertical channel 53, an oblique mirror 54, a light source 55; one end of the horizontal channel 52 is connected with the vertical body 51 and is perpendicular to the vertical body, the other end of the horizontal channel 52 is connected with the vertical channel 53 and is perpendicular to the vertical channel, and the inclined lens 54 is arranged on the inner side of the horizontal channel 52; the light source 55 is disposed at one end of the vertical channel 53, and light emitted from the light source 55 can penetrate through the vertical channel 53 to irradiate on the tilted lens 54 and be reflected by the tilted lens 54 to the DIC prism 30.
One end of the horizontal channel 52 is connected with and penetrates through the vertical body 51, and the other end of the horizontal channel 52 is connected with and penetrates through the vertical channel 53, so that the light can be smoothly transmitted due to the structural design; the angle of the oblique lens 54 can be 45 degrees with the horizontal plane, so as to ensure that the propagation path of the light is parallel to the horizontal channel 52 for better observation; the technical effect of the above scheme is that through the cooperation of the horizontal channel 52 and the vertical channel 53, when the housing 10 is vertically placed, the position of the light source 55 can be set at a lower position, which is more beneficial to fully utilizing the height of the housing 10, reducing the width of the AOI indentation detection system in the horizontal direction, and occupying less space when the detection system is installed in a large detection device, thereby optimizing the volume of the device and the structure of the device, and realizing significant reduction of cost.
Further, the AOI indentation detection system further includes a linear camera 40, wherein the linear camera 40 is disposed at a lower end of the vertical body 51, and the linear camera 40 and the DIC prism 30 form a coaxial line.
In the process of photographing by the linear camera 40, the unpolarized light passes through the 45-degree polarizing film and then passes through the prism, and is divided into two beams of polarized light which are perpendicular to each other, then passes through the condenser lens, the light irradiates on a product, the light is subjected to phase shift, passes through the convergence of the condenser lens of the objective lens 23 and then passes through the prism again, at the moment, the two beams of polarized light which are perpendicular to each other are recombined by the prism to form the same polarization direction, namely, the polarization direction of 135 degrees, which causes the interference of the light, causes the enhancement or darkening of an image, and finally, the light which is directly transmitted can be removed through the 135-degree polarizing film.
The method has the technical effects that the scanning part of the linear camera 40 is smaller than an article to be detected, all results are converged and imaged through an algorithm after multiple times of scanning, the adverse condition of a target product can be identified in an all-round mode, in this case, due to the fact that the linear camera 40 and the DIC prism 30 are matched with each other, the relative hierarchical relation of the scanned images is prominent, the effect is obvious, and therefore correct judgment on the conditions of deviation, particle quantity, particle strength, foreign matters, fragments and the like is facilitated.
Further, the light source 55 of the AOI indentation detection system is a coaxial light LED; the coaxial light LED has the technical effects of high brightness and good uniformity, is combined with a camera for use, and can scan the adverse conditions of a target product through the linear camera 40 to acquire clear indentation imaging.
Further, the AOI indentation detection system further includes a display 61, a host 62, and a detection unit 63, wherein the display 61 is electrically connected to the host 62, the host 62 is electrically connected to the detection unit 63, and the detection unit 63 is electrically connected to the linear camera 40.
The automatic detection system has the technical effects that when the AOI indentation detection system and large-scale detection equipment work in a matched mode, a mechanical handle product is placed at the photographing position of the detection platform and is scanned by a camera of the AOI indentation detection system, and after the detection unit 63 judges whether the AOI indentation detection system is qualified or not, the result can be interacted with a user through the display 61.
Further, the present invention also provides an AOI indentation detection method, which is applied to any one of the AOI indentation detection systems described above, and the method includes: adjusting the angle of the TDI sensor 21 to be parallel to the DIC prism 30; adjusting the position of the polarization adjustment button 12 so that the center of the polarization adjustment button 12 and the center of the DIC prism 30 are located in the same vertical direction; adjusting the position of the DIC prism 30 to make the brightness of the image observed by an ocular darkest; adjusting the position of the beam splitting adjusting button 11 to reduce the brightness difference at the vertical positions of the two ends of the DIC prism 30; rotating the DIC prism 30, adjusting the brightness of the light source 55, and obtaining a target observation point of an image observed by an eyepiece; the method has the technical effects that flexible adjustment can be realized, the micro change of the optical path difference is caused by the micro change of the thickness of the prism, a better interference effect is generated, a target observation point is obtained, and better user observation experience is realized.
Further, the present invention also provides another AOI indentation detection method, which is applied to the AOI indentation detection system of any one of the above embodiments, and the method includes: adjusting the angle of the TDI sensor to be parallel to the DIC prism; placing a polarizer in a central position; adjusting the position of the DIC prism to make the image darkest; adjusting the position of the spectroscope to enable the brightness of the vertical positions of the two ends to be close; the user observes the image and finds the optimal position of the DIC prism and the proper LED intensity; the method has the technical effects that 2 to 3 optimal observation points can be observed when the DIC prism is rotated from one end to the other end, flexible adjustment can be realized, the small change of the optical path difference is caused by the small change of the thickness of the prism, a better interference effect is generated, and better user observation experience is realized.
Furthermore, in the detection process of the large-scale detection equipment, the product can be placed in a photographing position of the detection platform through a mechanical handle, the product is transmitted to the motion control system through photographing and calculation, then the product is moved to the detection position and scanned by the detection camera, and after the product is judged to be qualified, the product is respectively transferred to different stations through the mechanical handle to be blanked; AOI indentation detecting system's upper end still is provided with aligning device and alignment system, including counterpoint camera, coaxial light LED, highlight shot-light among the aligning device, before linear camera shoots, alignment system shoots the product on the platform, makes linear camera more accurate shoot.
In summary, the movement direction and the thickness of the DIC prism are variable, and compared with the prior art, the method brings flexible adjustment modes and uniform illumination effects for users, so that the method is more suitable for actual detection scenes; therefore, the significant progress of the invention is mainly reflected in that: the method can realize flexible adjustment, utilizes the small change of the prism thickness to cause the small change of the optical path difference, generates better interference effect, further realizes better user observation experience, and is favorable for carrying out quantitative analysis with higher precision.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, while the invention has been described with respect to the above-described embodiments, it will be understood that the invention is not limited thereto but may be embodied with various modifications and changes.
While the invention has been described with reference to specific embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. An AOI indentation detection system, comprising: the device comprises a shell, a beam splitting adjusting button, a polarization adjusting button, a TDI camera and a DIC prism; the DIC prism comprises a first prism and a second prism; the TDI camera and the DIC prism are arranged in the shell at intervals; the beam splitting adjusting button is connected with the DIC prism and used for adjusting the distance between the DIC prism and the TDI camera; the polarization adjusting button is connected with at least one of the first prism and the second prism and used for adjusting the distance between the first prism and the second prism.
2. The AOI indentation detection system of claim 1, further comprising a beam splitting adjustment track, a polarization adjustment track; the light splitting adjusting track is arranged on the shell, and the light splitting adjusting button is nested in the light splitting adjusting track; the polarization adjusting track is arranged on the shell, and the polarization adjusting button is nested in the polarization adjusting track.
3. The AOI indentation detection system of claim 2, wherein the housing has a mounting slot at an upper end thereof, and the TDI camera has a lower end inserted into the mounting slot.
4. The AOI indentation detection system of claim 3, further comprising a TDI sensor disposed within the TDI camera, the TDI sensor being in a same plane as the DIC prism, the TDI sensor being disposed parallel to the DIC prism.
5. The AOI indentation detection system of claim 4, further comprising a lens disposed at an upper end of the TDI camera and an objective lens disposed at an upper end of the lens.
6. The AOI indentation detection system of claim 5 wherein the housing comprises a vertical body, a horizontal channel, a vertical channel, a tilted mirror, a light source;
one end of the horizontal channel is connected with the vertical body and is mutually vertical, the other end of the horizontal channel is connected with the vertical channel and is mutually vertical, and the inclined lens is arranged on the inner side of the horizontal channel;
the light source is arranged at one end of the vertical channel, and light rays emitted by the light source can penetrate through the vertical channel to irradiate on the inclined lens and are reflected to the D IC prism by the inclined lens.
7. The AOI indentation detection system of claim 6, further comprising a linear camera disposed at a lower end of the vertical body, the linear camera being coaxial with the DIC prism.
8. The AOI indentation detection system of claim 7 wherein the light source is a coaxial light LED.
9. The AOI indentation detection system according to any one of claims 1-8, further comprising a display, a host computer, and a detection unit, wherein the display is electrically connected to the host computer, the host computer is electrically connected to the detection unit, and the detection unit is electrically connected to the linear camera.
10. An AOI indentation detection method, applied to the AOI indentation detection system according to any one of claims 1 to 8, the method comprising:
adjusting the angle of the TDI sensor to be parallel to the DIC prism;
adjusting the position of a polarization adjusting button to enable the center of the polarization adjusting button and the center of the DIC prism to be located in the same vertical direction;
adjusting the position of the DIC prism to ensure that the brightness of an image observed by an eyepiece is darkest;
adjusting the position of a light splitting adjusting button to reduce the brightness difference at the vertical positions of the two ends of the DIC prism;
and rotating the DIC prism, and adjusting the brightness of the light source to obtain a target observation point of the image observed by the ocular.
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| CN114951037A (en) * | 2022-04-13 | 2022-08-30 | 泉州师范学院 | Semiconductor crystal grain four-side simultaneous aplanatic imaging detection device and method |
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