CN114323103A - Detector responsivity test structure, method and device - Google Patents
Detector responsivity test structure, method and device Download PDFInfo
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Abstract
The invention relates to the field of test equipment, in particular to a detector responsivity test structure which comprises a first light guide unit, a second light guide unit, a first light transmission piece and a second light transmission piece, wherein the first light guide unit and the second light guide unit are used for receiving and outputting optical signals, the first light guide unit is optically connected with the second light guide unit, one end of the first light guide unit, which is close to the second light guide unit, is optically connected with one end of the first light transmission piece, and one end of the second light guide unit, which is close to the first light guide unit, is optically connected with one end of the second light transmission piece. Because detector responsivity test structure does not change at the test in-process, only need change the input position of light can, can improve the efficiency of light detector responsivity test, and the insertion loss of first leaded light unit and second leaded light unit can offset when calculating, can improve the accuracy of light detector responsivity test.
Description
Technical Field
The invention relates to the field of test equipment, in particular to a detector responsivity test structure.
Background
A photodetector is a tool for detecting light or other electromagnetic radiant energy that typically requires the measurement of the responsivity of the photodetector by a detector responsivity-testing structure before the tool can be used.
Referring to fig. 1, the detector responsivity test structure includes an input grating coupler 1 and an output grating coupler 2, and the input grating coupler 1 and the output grating coupler 2 are connected by a waveguide. When the responsivity of the optical detector 3 needs to be measured, firstly, the insertion loss between the input grating coupler 1 and the output grating coupler 2 is measured by using a current detector responsivity test structure, then, the output grating coupler 2 is disconnected from the waveguide, the optical detector 3 is connected to one end, far away from the input grating coupler 1, of the waveguide, then, the measurement of the relevant parameters of the responsivity is carried out, and finally, the responsivity of the optical detector 3 can be calculated based on the relevant parameters of the responsivity and the insertion loss.
In view of the above requirements, the responsivity of the optical detector 3 is tested based on the detector responsivity test structure in two stages, that is, the insertion loss measurement and the responsivity related parameter measurement are performed, and after the insertion loss measurement is completed, the connection mode of elements of the detector responsivity test structure needs to be changed, so that the operation is troublesome, and the test efficiency is low; in addition, the insertion loss can be caused to change after the connection mode of the elements of the detector responsivity test structure is changed, namely, an error can be generated between the insertion loss measured firstly and the insertion loss actually existing in the subsequent measurement, and the accuracy of the responsivity test of the optical detector 3 is lower.
Disclosure of Invention
In view of the above, the present invention provides a probe responsivity testing structure, which can improve the efficiency and accuracy of the probe responsivity test.
In order to achieve the technical purpose, the invention discloses a detector responsivity test structure which comprises a first light guide unit, a second light guide unit, a first light transmission piece and a second light transmission piece, wherein the first light guide unit and the second light guide unit are used for receiving and outputting optical signals, the first light guide unit is optically connected with the second light guide unit, one end of the first light guide unit, which is close to the second light guide unit, is optically connected with one end of the first light transmission piece, and one end of the second light guide unit, which is close to the first light guide unit, is optically connected with one end of the second light transmission piece.
By adopting the technical scheme, when the responsivity of the optical detector needs to be tested, firstly, one end of the first light transmission piece, which is far away from the first light guide unit, and one end of the second light transmission piece, which is far away from the second light guide unit, are both connected with the optical detector; then inputting light with known optical power from the first light guide unit, wherein a part of light enters the second light guide unit and is output, the other part of light enters the optical detector through the first light transmission piece, and the optical power output from the second light guide unit and the current photocurrent of the optical detector are detected; then, light with known optical power is input from the second light guide unit, part of the light enters the first light guide unit and is output, the other part of the light enters the optical detector through the second light transmission piece, the optical power output from the first light guide unit and the current optical current of the optical detector are detected, and the responsivity of the optical detector can be calculated based on the data obtained by the test. Because detector responsivity test structure does not change at the test in-process, need not to change the connected mode of detector responsivity test structure's component on the one hand, only need change the input position of light can, convenient operation can improve the efficiency of light detector responsivity test, and the insertion loss of the first light guide unit of on the other hand and second light guide unit can offset when calculating, can improve the accuracy of light detector responsivity test.
Further, the first light guiding unit includes a first grating coupler gc1 and a first optical splitter m1, the second light guiding unit includes a second grating coupler gc2 and a second optical splitter m2, each of the first optical splitter m1 and the second optical splitter m2 includes an upstream port and two downstream ports, the upstream port of the first optical splitter m1 is connected to the first grating coupler gc1 through a waveguide, one downstream port of the first optical splitter m1 is connected to one downstream port of the second optical splitter m2 through a waveguide, the other downstream port of the first optical splitter m1 is optically connected to one end of the first optical transmission member, the other downstream port of the second optical splitter m2 is optically connected to one end of the second optical transmission member, and the upstream port of the second optical splitter m2 is connected to the second grating coupler gc2 through a waveguide.
By adopting the technical scheme, when the responsivity of the optical detector needs to be tested, firstly, one end of the first light transmission piece, which is far away from the first light guide unit, and one end of the second light transmission piece, which is far away from the second light guide unit, are both connected with the optical detector; then, inputting light with known optical power from the first grating coupler gc1, wherein a part of light sequentially passes through the first optical splitter m1 and the second optical splitter m2, is output from the second grating coupler gc2, and the other part of light sequentially passes through the first optical splitter m1 and the first light-transmitting member and enters the photodetector, and detecting the optical power output from the second grating coupler gc2 and the current photocurrent of the photodetector; then, light with known optical power is input from the second grating coupler gc2, at this time, a part of light sequentially passes through the second optical splitter m2 and the first optical splitter m1, is output from the first grating coupler gc1, and the other part of light sequentially passes through the second optical splitter m2 and the second light-transmitting member and enters the photodetector, the optical power output from the first grating coupler gc1 and the current photocurrent of the photodetector are detected, and the responsivity of the photodetector can be calculated based on the data obtained by the above tests; the grating coupler can input or output light, the light splitter can split the light, and then the test of the responsivity of the optical detector with high efficiency and high accuracy can be realized through the grating coupler and the blocking device.
The invention also discloses a method for testing the responsivity of the detector, which comprises the following steps:
s1, connecting the end of the first light transmission piece far away from the first light guide unit and the end of the second light transmission piece far away from the second light guide unit with the optical detector;
s2, inputting a first light with known optical power from the first light guide unit, and detecting a first output optical power output from the second light guide unit and a first photocurrent of the photodetector;
s3, inputting a second light with known optical power from the second light guiding unit, and detecting a second output optical power output from the first light guiding unit and a second photocurrent of the photodetector;
and S4, calculating the responsivity of the light detector based on the optical power of the first light, the first output optical power, the first photocurrent, the optical power of the second light, the second output optical power and the second photocurrent.
By adopting the technical scheme, the detector responsivity test structure is not changed in the test process, only the input and the output of light are exchanged, namely the light source and the power meter outside the detector responsivity test structure are exchanged and connected with the detector responsivity test structure, the detector responsivity test structure does not need to be adjusted, and the test efficiency is improved.
Further, the splitting ratio of the two downstream ports of the first splitter m1 is set to 1:1, and the splitting ratio of the two downstream ports of the second splitter m2 is set to 1: 1;
the calculating to obtain the responsivity of the light detector comprises the following steps:
calculating the responsivity of the light detector according to the following responsivity calculation formula:
wherein, Pin1Is the optical power, P, of the first lightout1Is the first output optical power, Im1Is a first photocurrent, Pin2Is the optical power, P, of the second lightout2Is the second output optical power, Im2And R is the second photocurrent, and the responsivity of the photodetector.
By adopting the technical scheme, the insertion loss of the first optical splitter m1, the insertion loss of the second optical splitter m2, the insertion loss of the first grating coupler gc1 and the insertion loss of the second grating coupler gc2 are offset in the derivation process of the formula, so that the accuracy of the responsivity test of the optical detector can be improved.
The invention also discloses a detector responsivity testing device, which comprises the detector responsivity testing structure, and further comprises an optical switch, light source equipment, a power meter and a source meter, wherein the optical switch comprises a first port, a second port, a third port and a fourth port, the light source equipment is connected with the first port of the optical switch through an optical fiber, the power meter is connected with the second port of the optical switch through an optical fiber, the third port of the optical switch is coupled with a first grating coupler gc1 through an optical fiber, the fourth port of the optical switch is coupled with a second grating coupler gc2 through an optical fiber, the optical switch is used for switching between a first mode and a second mode, the first mode is that the first port and the third port are correspondingly transmitted, the second port and the fourth port are correspondingly transmitted, the second mode is that the first port and the fourth port are correspondingly transmitted, the second port and the third port are correspondingly transmitted, one end of a first light transmission piece far away from a first light splitter m1 and one end of a second light transmission piece far away from a second light splitter m2 are both connected with the optical switch And the source meter is connected with the light detector and used for providing bias voltage for the light detector and monitoring the photocurrent of the light detector.
By adopting the technical scheme, when the responsivity of the optical detector needs to be tested, the optical switch is switched to the first mode, at the moment, the light source equipment inputs light with known optical power from the first grating coupler gc1, the power meter can detect the optical power output from the second grating coupler gc2, and the current optical current of the optical detector can be obtained from the source meter; then, the optical switch is switched to a second mode, at this time, the light source device inputs light with known optical power from the second grating coupler gc2, the power meter can detect the optical power output from the first grating coupler gc1, the current photocurrent of the optical detector can be obtained from the source table, and based on the data obtained by the above test, the responsivity of the optical detector can be calculated based on the above responsivity calculation formula; when the input and the output of adjusting luminance, only need switch off the mode can, convenient operation is swift, can further improve efficiency of software testing.
The invention has the beneficial effects that:
compared with the prior art, the detector responsivity test structure provided by the invention is not changed in the test process, and the insertion loss of the first light guide unit and the second light guide unit can be offset in calculation, so that the efficiency and the accuracy of the responsivity test of the optical detector can be improved.
Drawings
Fig. 1 is a schematic circuit diagram of a responsivity test structure of a detector in the background art of the invention.
Fig. 2 is a schematic circuit diagram of a detector responsivity test structure and device according to an embodiment of the invention.
In the figure, the position of the upper end of the main shaft,
1. an input grating coupler; 2. an output grating coupler; 3. a light detector; 4. a first light guide unit; 5. a second light guide unit; 6. a first light-transmitting member; 7. a second light transmitting member; 8. an optical switch; 81. a first port; 82. a second port; 83. a third port; 84. a fourth port; 9. a light source device; 10. a power meter; 11. a source table.
Detailed Description
The technical solution of the detector responsivity test structure provided by the present invention is explained and explained in detail below with reference to the drawings of the specification, and obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 2 is a schematic circuit diagram of a detector responsivity test structure and device according to an embodiment of the invention. The embodiment of the invention specifically discloses a detector responsivity test structure, which is used for testing the responsivity of an optical detector 3, and the embodiment of the invention takes a silicon optical chip detector as an example of a test object, and the embodiment of the invention does not limit the specific test object, and the detector responsivity test structure comprises a first light guide unit 4, a second light guide unit 5, a first light transmission piece 6 and a second light transmission piece 7, wherein the first light guide unit 4 and the second light guide unit 5 are used for receiving and outputting optical signals, the first light guide unit 4 is optically connected with the second light guide unit 5, one end of the first light guide unit 4, which is close to the second light guide unit 5, is optically connected with one end of the first light transmission piece 6, and one end of the second light guide unit 5, which is close to the first light guide unit 4, is optically connected with one end of the second light transmission piece 7.
When the responsivity of the silicon optical chip detector needs to be tested, firstly, one end of the first light transmission piece 6, which is far away from the first light guide unit 4, and one end of the second light transmission piece 7, which is far away from the second light guide unit 5, are both connected with the silicon optical chip detector; then inputting light with known optical power from the first light guide unit 4, and detecting the optical power output from the second light guide unit 5 and the current photocurrent of the silicon optical chip detector; then, light with known optical power is input from the second light guide unit 5, the optical power output from the first light guide unit 4 and the current photocurrent of the silicon photo chip detector are detected, and the responsivity of the silicon photo chip detector can be calculated based on the data obtained by the above tests.
Referring to fig. 2, the first light guiding unit 4 includes a first grating coupler gc1 and a first optical splitter m1, the second light guiding unit 5 includes a second grating coupler gc2 and a second optical splitter m2, both the first optical splitter 6 and the second optical splitter 7 may be configured as waveguides, both the first optical splitter m1 and the second optical splitter m2 may employ optical splitters having a splitting ratio of 1:1, both the first optical splitter m1 and the second optical splitter m2 include one upstream port and two downstream ports, the upstream port of the first optical splitter m1 is connected to the first grating coupler gc1 through a waveguide, one downstream port of the first optical splitter m1 is connected to one downstream port of the second optical splitter m2 through a waveguide, the other downstream port of the first optical splitter m1 is connected to one end of the first optical splitter 6, the other downstream port of the second optical splitter m2 is connected to one end of the second optical splitter m 467, and the second upstream port of the second optical splitter m2 is coupled to one end of the first optical splitter m 8536 through a waveguide.
When the responsivity of the silicon optical chip detector needs to be tested, firstly, one end of the first light-transmitting piece 6, which is far away from the first light-guiding unit 4, and one end of the second light-transmitting piece 7, which is far away from the second light-guiding unit 5, are respectively connected with two germanium absorption regions of the silicon optical chip detector; then, inputting light with known optical power from a first grating coupler gc1, wherein at this time, a part of light sequentially passes through a first optical splitter m1 and a second optical splitter m2 and is output from a second grating coupler gc2, and the other part of light sequentially passes through the first optical splitter m1 and a first light-transmitting member 6 and enters a silicon microchip detector, and detecting the optical power output from the second grating coupler gc2 and the current photocurrent of the silicon microchip detector; then, light with known optical power is input from the second grating coupler gc2, at this time, a part of light sequentially passes through the second optical splitter m2 and the first optical splitter m1, and is output from the first grating coupler gc1, another part of light sequentially passes through the second optical splitter m2 and the second light-transmitting member 7 to enter the silicon optical chip detector, the optical power output from the first grating coupler gc1 and the current photocurrent of the silicon optical chip detector are detected, and the responsivity of the silicon optical chip detector can be calculated based on the data obtained by the above tests.
Because the detector responsivity test structure is not changed in the test process, on one hand, the connection mode of elements of the detector responsivity test structure is not required to be changed, only the input position of light is required to be changed, the operation is convenient, and the responsivity test efficiency of the silicon optical chip detector can be improved; on the other hand, the insertion loss of the first optical splitter m1, the insertion loss of the second optical splitter m2, the insertion loss of the first grating coupler gc1 and the insertion loss of the second grating coupler gc2 can be offset during calculation, and the accuracy of responsivity test of the silicon optical chip detector can be improved.
The implementation principle of the detector responsivity test structure provided by the invention is as follows: when the responsivity of the silicon photo chip detector needs to be tested, firstly, light with known optical power is input from the first grating coupler gc1, and at the moment, the optical power output from the second grating coupler gc2 and the current photocurrent of the silicon photo chip detector are detected; then inputting light with known optical power from the second grating coupler gc2, detecting the optical power output from the first grating coupler gc1 and the current photocurrent of the silicon photo chip detector, and calculating the responsivity of the silicon photo chip detector based on the known data and the data obtained by the test; in the process, the connection mode of elements of the detector responsivity test structure is not required to be changed, and the insertion loss of the first optical splitter m1, the insertion loss of the second optical splitter m2, the insertion loss of the first grating coupler gc1 and the insertion loss of the second grating coupler gc2 can be offset during calculation, so that the efficiency and the accuracy of the detector responsivity test can be improved.
Referring to fig. 2, an embodiment of the present invention further discloses a method for testing the responsivity of a detector, including the following steps:
s1, connecting one end of the first light-transmitting piece 6 far away from the first light-guiding unit 4 and one end of the second light-transmitting piece 7 far away from the second light-guiding unit 5 with two germanium absorption regions of the silicon optical chip detector respectively;
s2, inputting a first light with known optical power from the first light guiding unit 4, and detecting a first output optical power output from the second light guiding unit 5 and a first photocurrent of the silicon photo-chip detector;
s3, inputting a second light with known optical power from the second light guiding unit 5, and detecting a second output optical power output from the first light guiding unit 4 and a second photocurrent of the silicon photo-chip detector;
s4, calculating the responsivity of the silicon optical chip detector according to the following responsivity calculation formula based on the optical power of the first light, the first output optical power, the first photocurrent, the optical power of the second light, the second output optical power and the second photocurrent:
wherein, Pin1Is the optical power, P, of the first lightout1Is the first output optical power, Im1Is a first photocurrent, Pin2Is the optical power, P, of the second lightout2Is the second output optical power, Im2And R is the responsivity of the silicon optical chip detector.
The derivation process of the above responsivity calculation formula is as follows:
Pout1＝Pin1-Lgc1-Lm1-Lm2-Lgc2 (1)
Pd1(dBm)＝Pin1-Lgc1-Lm1 (2)
Im1＝R×Pd1(mW) (4)
Pout2＝Pin2-Lgc1-Lm1-Lm2-Lgc2 (5)
Pd2(dBm)＝Pin2-Lgc2-Lm2 (6)
Im2＝R×Pd2(mW) (8)
wherein L ism1Is the insertion loss of the first beam splitter m1, Lm2Is the insertion loss of the second beam splitter m2, Lgc1Is the insertion loss, L, of the first grating coupler gc1gc2Is the insertion loss, P, of the second grating coupler gc2d1(dBm) is the optical power of the first light in decibel-milliwatts entering the silicon microchip detector, Pd1(mW) is the optical power of the first light in milliwatts entering the silicon photo chip detector, Pd2(dBm) is the optical power of the second light in decibel-milliwatts entering the silicon microchip detector, Pd2(mW) is the optical power of the second light in milliwatts entering the silicon photo chip detector.
The responsivity calculation formula can be obtained by the arrangement of the formulas (1) to (8), and the responsivity calculation formula is used for deducing Lm1、Lm2、Lgc1And Lgc2Offset, and then can improve the accuracy of silicon optical chip detector responsivity test.
The implementation principle of the detector responsivity test method provided by the invention is as follows: inputting first light with known optical power from a first light guide unit 4, and detecting first output optical power output from a second light guide unit 5 and a first photocurrent of a silicon photo chip detector; inputting second light with known optical power from a second light guide unit 5, and detecting second output optical power output from the first light guide unit 4 and a second photocurrent of the silicon photo chip detector; calculating the responsivity of the silicon optical chip detector based on the optical power of the first light, the first output optical power, the first photocurrent, the optical power of the second light, the second output optical power and the second photocurrent; in the calculation process, the insertion loss of the first optical splitter m1, the insertion loss of the second optical splitter m2, the insertion loss of the first grating coupler gc1 and the insertion loss of the second grating coupler gc2 can be offset, so that the accuracy of the detector responsivity test can be improved.
Referring to fig. 2, an embodiment of the present invention further discloses a detector responsivity testing apparatus, which includes the detector responsivity testing structure, and further includes an optical switch 8, an optical source device 9, a power meter 10, and a source meter 11, where the optical switch 8 includes a first port 81, a second port 82, a third port 83, and a fourth port 84, the optical source device 9 is connected to the first port 81 of the optical switch 8 through an optical fiber, the power meter 10 is connected to the second port 82 of the optical switch 8 through an optical fiber, the third port 83 of the optical switch 8 is coupled to a first grating coupler gc1 through an optical fiber, the fourth port 84 of the optical switch 8 is coupled to a second grating coupler gc2 through an optical fiber, the optical switch 8 is configured to switch between a first mode and a second mode, the first mode is that the first port 81 and the third port 83 transmit correspondingly, the second port 82 and the fourth port 84 transmit correspondingly, and the second mode is that the first port 81 and the fourth port 84 transmit correspondingly, The second port 82 and the third port 83 are correspondingly transmitted, the source meter 11 is connected with a probe through a cable, the probe can be loaded on an electrode of the silicon optical chip detector, and when a reverse bias voltage is provided for the silicon optical chip detector, the source meter 11 is used for providing a bias voltage for the silicon optical chip detector and monitoring the photocurrent of the silicon optical chip detector.
When the responsivity of the silicon optical chip detector needs to be tested, the optical switch 8 is switched to the first mode, and at the moment, the light source device 9 changes the optical power to be Pin1Is inputted from the first grating coupler gc1, the power meter 10 can detect P outputted from the second grating coupler gc2out1From the source table 11, the current I of the silicon optical chip detector can be obtainedm1(ii) a The optical switch 8 is then switched to a second mode, in which the light source device 9 supplies light with a power Pin2Is inputted from the second grating coupler gc2, the power meter 10 can detect P outputted from the first grating coupler gc1out2From the source table 11, the current I of the silicon optical chip detector can be obtainedm2P obtained based on the above testin1、Pout1、Im1、Pin2、Pout2And Im2Calculating the responsivity of the silicon optical chip detector based on the responsivity calculation formula; when the input and the output of adjusting luminance, only need switch 8's the mode can, convenient operation is swift, can further improve efficiency of software testing.
The implementation principle of the detector responsivity testing device provided by the invention is as follows: when the input and the output of dimming are needed in the detector responsivity test process, the state that the optical switch 8 correspondingly transmits from the first port 81 and the third port 83 and correspondingly transmits from the second port 82 and the fourth port 84 can be switched to the state that the first port 81 and the fourth port 84 correspondingly transmit and the second port 82 and the third port 83 correspondingly transmit; therefore, when the input and the output of the dimming are carried out, only the working state of the optical switch 8 needs to be switched, the operation is convenient and fast, and the testing efficiency can be further improved.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, references to the description of the term "the present embodiment," "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and simplifications made in the spirit of the present invention are intended to be included in the scope of the present invention.
Claims (5)
1. A detector responsivity test structure is characterized in that: the detector responsivity test structure comprises a first light guide unit (4), a second light guide unit (5), a first light transmission piece (6) and a second light transmission piece (7), wherein the first light guide unit (4) and the second light guide unit (5) are used for receiving and outputting optical signals, the first light guide unit (4) is optically connected with the second light guide unit (5), one end, close to the second light guide unit (5), of the first light guide unit (4) is optically connected with one end of the first light transmission piece (6), and one end, close to the first light guide unit (4), of the second light guide unit (5) is optically connected with one end of the second light transmission piece (7).
2. A probe responsivity testing structure according to claim 1, wherein: the first light guide unit (4) comprises a first grating coupler gc1 and a first optical splitter m1, the second light guide unit (5) comprises a second grating coupler gc2 and a second optical splitter m2, each of the first optical splitter m1 and the second optical splitter m2 comprises an upstream port and two downstream ports, the upstream port of the first optical splitter m1 is connected with the first grating coupler gc1 through a waveguide, one downstream port of the first optical splitter m1 is connected with one downstream port of the second optical splitter m2 through a waveguide, the other downstream port of the first optical splitter m1 is optically connected with one end of the first light-transmitting member (6), the other downstream port of the second optical splitter m2 is optically connected with one end of the second light-transmitting member (7), and the upstream port of the second optical splitter m2 is connected with the second grating coupler gc2 through a waveguide.
3. A probe responsiveness test method for performing a test using the probe responsiveness test structure according to claim 1, characterized by comprising the steps of:
s1, connecting one end of the first light transmission piece (6) far away from the first light guide unit (4) and one end of the second light transmission piece (7) far away from the second light guide unit (5) with the optical detector (3);
s2, inputting first light with known optical power from the first light guide unit (4), and detecting first output optical power output from the second light guide unit (5) and first photocurrent of the optical detector (3);
s3, inputting a second light with known optical power from the second light guiding unit (5), and detecting a second output optical power output from the first light guiding unit (4) and a second photocurrent of the photodetector (3);
and S4, calculating the responsivity of the optical detector (3) based on the optical power of the first light, the first output optical power, the first photocurrent, the optical power of the second light, the second output optical power and the second photocurrent.
4. A method of testing responsivity of a probe according to claim 3, wherein: the splitting ratio of the two downstream ports of the first optical splitter m1 is set to be 1:1, and the splitting ratio of the two downstream ports of the second optical splitter m2 is set to be 1: 1;
the calculating the responsivity of the light detector (3) comprises:
calculating the responsivity of the light detector (3) according to the following responsivity calculation formula:
wherein, Pin1Is the optical power, P, of the first lightout1Is the first output optical power, Im1Is a first photocurrent, Pin2Is the optical power, P, of the second lightout2Is the second output optical power, Im2R is the responsivity of the photodetector (3).
5. A detector responsivity testing device is characterized in that: comprising a detector responsivity testing structure according to claim 2, further comprising an optical switch (8), an optical source device (9), a power meter (10) and a source meter (11), the optical switch (8) comprising a first port (81), a second port (82), a third port (83) and a fourth port (84), the optical source device (9) being connected to the first port (81) of the optical switch (8) by means of an optical fiber, the power meter (10) being connected to the second port (82) of the optical switch (8) by means of an optical fiber, the third port (83) of the optical switch (8) being coupled to the first grating coupler gc1 by means of an optical fiber, the fourth port (84) of the optical switch (8) being coupled to the second grating coupler gc2 by means of an optical fiber, the optical switch (8) being adapted to switch between a first mode and a second mode, the first mode being a transmission path between the first port (81) and the third port (83), The second port (82) and the fourth port (84) transmit correspondingly, the second mode is that the first port (81) and the fourth port (84) transmit correspondingly, the second port (82) and the third port (83) transmit correspondingly, one end of the first light-transmitting piece (6) far away from the first optical splitter m1 and one end of the second light-transmitting piece (7) far away from the second optical splitter m2 are both connected to the light detector (3), the source meter (11) is connected with the light detector (3), and the source meter (11) is used for providing bias voltage for the light detector (3) and monitoring the light current of the light detector (3).
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| CN116202747A (en) * | 2023-05-04 | 2023-06-02 | 南京光智元科技有限公司 | Test structure and method of photoelectric detector and related chip and wafer |
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