CN114322933A - Visual feedback compensation method based on tray inclination angle - Google Patents
Visual feedback compensation method based on tray inclination angle Download PDFInfo
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- CN114322933A CN114322933A CN202111619844.0A CN202111619844A CN114322933A CN 114322933 A CN114322933 A CN 114322933A CN 202111619844 A CN202111619844 A CN 202111619844A CN 114322933 A CN114322933 A CN 114322933A
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- 238000007599 discharging Methods 0.000 claims abstract description 38
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- 238000012360 testing method Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
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- 230000000694 effects Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
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Abstract
The invention aims to provide a visual feedback compensation method based on a tray inclination angle, which is convenient to build and realizes accurate positioning. The method is realized by a discharging groove on a tray, a vision camera and an upper computer, six edge detectors acquire an external rectangular area of the hexagon to obtain a groove position central point, the distance between two mark points outside the discharging groove is calculated by the vision camera or manually using a circular caliper, a two-dimensional code generator generates a two-dimensional code and is arranged on the tray, when the tray is placed in a discharging occasion, the vision camera positions the current two mark points and reads information of the two-dimensional code, a chip is placed in the discharging groove, the upper computer analyzes the offset and the offset direction of the chip, adjusts the inclination angle and the reverse position compensation until the levelness of the discharging groove and the levelness of a suction nozzle sucking the chip are close to the same level, and a control module stores the compensation quantity of the current tray groove. The invention is applied to the technical field of machine vision.
Description
Technical Field
The invention is applied to the technical field of machine vision, and particularly relates to a visual feedback compensation method based on a tray inclination angle.
Background
Along with the development of semiconductor trade, the integrated level of chip components and parts is higher and higher, the specification is littleer and smaller, because the chip is the core part of electronic product, need carry out the test of a series of correlation performance before the chip equipment, the tray is as the special dish that carries of chip, if through the artifical mode that uses vacuum pen to absorb and place the chip with the help of the microscope, obviously increase intensity of labour, greatly influence efficiency of software testing, be difficult to guarantee the accurate location of chip simultaneously, if the chip does not accurately place in the silo of putting of tray, the surface of chip can be scraped the flower by the tray, cause scrapping of chip easily, consequently, the equilibrium of tray also is the important factor who influences the chip location.
At present, a visual positioning system is gradually popularized for carrying the loading and unloading of trays, the high-precision tray placing examines not only the visual positioning precision, but also the mechanical installation precision of the whole machine, the repeated positioning precision of a motor shaft and the like, so that the problem of inaccurate placing is only examined from the aspects of visual calibration and pixel precision, the dead end of fundamental problems can not be found, a large amount of time is consumed, the testing effect is not improved,
the existing tray is unstable in visual positioning, tray processing difference and the like, which cause inaccuracy of a final positioning position to cause discharging deviation. For a large-scale machine, if the levelness of the two spliced parts is inconsistent in the splicing process, a certain inclination angle is generated, and the deviation of discharging can also be caused. Even if the uniformity of the levelness of the splicing machine table can be ensured, the installation levelness of the tray part and the levelness of the suction nozzle plane still have non-negligible influence in high-precision positioning. Under the existing mechanical installation and leveling technology, the integral horizontal consistency is still difficult to ensure, and the fine inclination angle can cause the failure of high-precision discharging. Therefore, it is necessary to provide a visual feedback compensation method based on the tray inclination angle, which is convenient to build and realizes accurate positioning.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a visual feedback compensation method based on a tray inclination angle, which is convenient to build and realizes accurate positioning.
The technical scheme adopted by the invention is as follows: the method is realized by a feeding groove, a vision camera and an upper computer on a tray, wherein the vision camera transmits acquired digital signals to the upper computer for analysis and processing, and the upper computer sends instructions to a control module for compensating the inclination angle of the tray, and is characterized by comprising the following steps:
step a, manually cleaning the edge of a tray feeding groove, detecting the edge of the feeding groove by six edge detectors to obtain six edge points, sending position signals to an upper computer by the six edge detectors, sequentially connecting the six edge points by the upper computer to form a hexagon, obtaining an external rectangular area of the hexagon, and intersecting diagonals of the rectangular area to obtain a groove position central point;
b, calculating the distance between two mark points on the outer side of the discharging groove by using a visual camera or manually using a circular caliper, and storing data to an upper computer;
step c, according to the slot position central point and the distance between the two mark points obtained in the step a and the step b, the upper computer associates the position information of the slot position central point and the two mark points with a two-dimensional code generated by a known two-dimensional code generator on the tray, and the storage information of the two-dimensional code consists of single capital letters of A-Z, so that the calibration of the tray is completed;
d, when the tray is placed in a discharging occasion, the vision camera positions the positions of the current two mark points and reads two-dimensional code information, the position of the current slot position central point is calculated according to the precisely positioned central position of the current two mark points through the corresponding relation between the marked pin on the tray and the slot position center, and then the chip is placed in the discharging slot to realize the central positioning of the current tray;
d, the visual camera positions the distance between the two mark points, if the distance between the two mark points is reduced, or the position of the current slot position central point deviates from the position of the original slot position central point, the tray is inclined leftwards or rightwards, the visual camera scans the position of the chip, an optical signal is converted into an ordered electrical signal, the ordered electrical signal is transmitted to an upper computer to analyze the offset and the offset direction of the chip, whether the chip is rightly placed is judged, so that the inclination angle of the tray is adjusted, if the chip is carried on one side of the discharging slot, the height of one side corresponding to the tray is higher than that of the other side, the control module lowers the higher side of the tray, raises the lower side of the tray until the levelness of the discharging slot is approximately level with the levelness of a suction nozzle for sucking the chip;
and e, the control module stores the compensation quantity of the current tray slot position.
It is visible by above-mentioned scheme, the vision camera is used for scanning storing trough and two-dimensional code, convert light signal into the signal of telecommunication and transmit for the host computer, the host computer carries out the coordinate of analysis trench central point and the offset and the skew direction of chip to send the compensation of the inclination or the suction nozzle reverse position of instruction for control module adjustment tray, until the state that the storing trough levelness is close the parallel and level with the suction nozzle levelness of absorbing the chip, control module will preserve the compensation volume of current tray trench. Because the edge of the tray emptying groove is easily polluted by product friction and dust, the imaging of the edge is unstable and unclear, and the like, the situation that the algorithm for directly positioning the edge of the groove is unstable and the positioning precision is not high exists, so that a tray calibration mode with good compatibility and high precision is necessary.
The distance between the two mark points on the outer side of the discharging groove is calculated by a vision camera or manually by using a circular caliper and is used as a reference contrast value in a horizontal state, the upper computer associates the position information of the groove position central point and the two mark points with the two-dimensional code generated by a known two-dimensional code generator on the tray, and the two-dimensional code storage information is composed of single capital letters of A-Z. The tray is placed in the occasion of blowing, the position of two current mark points of vision camera location is and read two-dimensional code information, through pin and trench center corresponding relation on the tray after the demarcation, again according to the central point that two current mark points pinpoint, calculate the position of current trench central point, and then place the chip in the blowing groove, the interval of two mark points of vision camera location, if the interval of two mark points diminishes, perhaps the position of current trench central point deviates from the position of original trench central point, then represent that the tray has taken place to incline left or incline right.
Under the condition that there is the contained angle in tray trench levelness and chip surface levelness, because the inclination of tray can't be observed to the vision camera, consequently, the position of locating current trench central point is not the position of trench central point under the horizontality, if the position of current trench central point shifts left in comparison with the position of trench central point under the horizontality, and increase along with the declination increases, consequently, when the position that the center of chip aimed at current trench central point down transfers, can appear the chip from the high one side of trench down the landing, and the phenomenon that can't put into on one side of low, thereby lead to the chip can't accurately put into the trench. Therefore, in the occasion of high-precision discharging, the discharging error can be thoroughly eliminated only by ensuring that the horizontal included angle between the slot position and the chip is 0 degree, but the included angle cannot be ensured to be 0 degree in actual production, and even if a very small included angle exists, discharging failure can be caused under the condition that the difference between the width of the chip and the width of the slot position is small. If the chip is carried on one side of the discharging groove, the height of one side corresponding to the tray is higher than that of the other side, the control module lowers the higher side of the tray and raises the lower side of the tray, and vice versa, until the levelness of the discharging groove and the levelness of the suction nozzle sucking the chip are close to the parallel and level state, the control module stores the compensation amount of the current tray groove position.
The invention can effectively eliminate random pixel error caused by directly positioning the slot position by the relative position relationship between the mark point of the tray and the slot position center, can avoid the error of poor consistency of processing a plurality of trays, can adjust the inclination angle of the tray by vision, has simple adjusting method and can feed back the effect in time after adjustment, the existing tray center positioning adopts the mode of directly positioning the edge of the slot position or compensating the fixed value by positioning the mark point, the invention adopts the mode of finding the six edge points and fitting the hexagon external rectangle to calculate the center, not only has high edge point positioning precision, but also can reduce the slot position center positioning error caused by fuzzy and dirty edges, each tray has a two-dimensional code to record the position relationship between the mark point and the slot position center, and can effectively avoid the slot position center positioning error caused by the processing error between different trays, the mode of adjusting the inclination angle of the tray by combining vision can replace the scheme of accurately leveling a single component by pure machinery, and the scheme has quick feedback of the adjusting effect and can achieve the expected discharging effect more quickly.
According to a preferred scheme, the two mark points are metal positioning pins, and the two-dimensional code and the two metal positioning pins fall in the scanning range of the vision camera, so that the accurate positioning of the center point of the slot position can be realized.
According to the scheme, the two marking points are metal positioning pins, the metal positioning pins are good in imaging consistency, the tray is used repeatedly, the influence on the metal positioning pins is small, and the two-dimensional code is related to the position coordinates and the angles of the two metal positioning pins.
According to the step d, a preferred scheme is that after a large number of tests, the detection chips all deviate from the same direction by a fixed value, and then the suction nozzles for sucking the chips slightly compensate gradually in the direction opposite to the deviation until the chips are accurately placed into the material accommodating groove.
According to the scheme, if the detection chips are deviated to the left side by a fixed value after a large number of tests,
the suction nozzle for sucking the chip is slightly and gradually compensated towards the right direction until the chip is accurately placed into the slot position, so that the chip is adjusted to be in a proper placing posture.
Drawings
FIG. 1 is a flow chart of the calibration of a slot center point;
FIG. 2 is a flow chart of the calibration of the coordinates of the slot center point;
FIG. 3 is a flowchart illustrating the calibration of the adjustment of the slot tilt angle of the tray;
FIG. 4 is a top plan view of the tray;
FIG. 5 is a diagram of a detection of a slot center point;
fig. 6 is a schematic view of the tray tilting.
Detailed Description
As shown in fig. 1 to 6, in this embodiment, the method is implemented by a material feeding groove on a tray, a vision camera and an upper computer, the vision camera transmits acquired digital signals to the upper computer for analysis and processing, and the upper computer sends instructions to a control module to compensate the inclination angle of the tray, and the method is characterized by comprising the following steps:
step a, manually cleaning the edge of a tray feeding groove, detecting the edge of the feeding groove by six edge detectors to obtain six edge points, sending position signals to an upper computer by the six edge detectors, sequentially connecting the six edge points by the upper computer to form a hexagon, obtaining an external rectangular area of the hexagon, and intersecting diagonals of the rectangular area to obtain a groove position central point;
b, calculating the distance between two mark points on the outer side of the discharging groove by using a visual camera or manually using a circular caliper, and storing data to an upper computer;
step c, according to the slot position central point and the distance between the two mark points obtained in the step a and the step b, the upper computer associates the position information of the slot position central point and the two mark points with a two-dimensional code generated by a known two-dimensional code generator on the tray, and the storage information of the two-dimensional code consists of single capital letters of A-Z, so that the calibration of the tray is completed;
d, when the tray is placed in a discharging occasion, the vision camera positions the positions of the current two mark points and reads two-dimensional code information, the position of the current slot position central point is calculated according to the precisely positioned central position of the current two mark points through the corresponding relation between the marked pin on the tray and the slot position center, and then the chip is placed in the discharging slot to realize the central positioning of the current tray;
d, the visual camera positions the distance between the two mark points, if the distance between the two mark points is reduced, or the position of the current slot position central point deviates from the position of the original slot position central point, the tray is inclined leftwards or rightwards, the visual camera scans the position of the chip, an optical signal is converted into an ordered electrical signal, the ordered electrical signal is transmitted to an upper computer to analyze the offset and the offset direction of the chip, whether the chip is rightly placed is judged, so that the inclination angle of the tray is adjusted, if the chip is carried on one side of the discharging slot, the height of one side corresponding to the tray is higher than that of the other side, the control module lowers the higher side of the tray, raises the lower side of the tray until the levelness of the discharging slot is approximately level with the levelness of a suction nozzle for sucking the chip;
and e, the control module stores the compensation quantity of the current tray slot position.
In this embodiment, two mark points are metal locating pins, and two-dimensional code and two metal locating pins fall in the scope that vision camera scanned, and the accurate positioning trench central point of homoenergetic realization.
In this embodiment, it is known from step d that after a large number of tests, the detection chips all deviate by a fixed value in the same direction, and then the suction nozzles sucking the chips slightly compensate step by step in the direction opposite to the deviation until the chips are accurately put into the feeding trough.
The working principle of the invention is as follows: the method comprises the steps of manually cleaning the edge of a tray discharging groove, detecting the edge of the discharging groove by six edge detectors to obtain six edge points, symmetrically distributing the six edge points, simulating by an upper computer to sequentially connect the six edge points to form a hexagon, then obtaining an external rectangular area of the hexagon, obtaining a groove position central point according to the rule that the diagonal lines of the rectangle intersect at a central point, calculating the distance between two mark points outside the discharging groove by a visual camera or manually using a circular caliper, associating the groove position central point and the position information of the two mark points with a two-dimensional code generated by a known two-dimensional code generator on the tray by the upper computer, wherein the two-dimensional code storage information consists of single capital letters from A to Z, placing the tray in a discharging occasion, positioning the current two mark points by the visual camera and reading the two-dimensional code information, and correspondingly relating the pin on the calibrated tray with the center of the groove, and then, calculating the position of the current slot position central point according to the precisely positioned central positions of the current two mark points, further placing the chip in the discharging groove, positioning the distance between the two mark points by a vision camera, and if the distance between the two mark points is reduced or the position of the current slot position central point deviates from the position of the original slot position central point, representing that the tray inclines leftwards or rightwards. The vision camera converts the optical signal of scanning test chip position into an ordered electrical signal, and transmits the electrical signal to the host computer to analyze the offset and offset direction of the test chip, thereby sending an instruction to the control module to perform feeding and inclination angle adjustment and reverse position compensation, if the chip is carried on one side of the discharging groove, the height of one side corresponding to the tray is higher than that of the other side, the control module lowers the higher side of the tray and raises the lower side of the tray, and vice versa, after a large number of tests, the detection chip is all offset by a fixed value in the same direction, the suction nozzle sucking the chip is slightly and gradually compensated in the opposite direction of offset until the chip is accurately placed in the discharging groove, until the discharging groove levelness and the suction nozzle levelness sucking the chip are close to the parallel and level state, and the control module stores the compensation amount of the current tray groove.
Claims (3)
1. A visual feedback compensation method based on a tray inclination angle is realized by a material feeding groove on a tray, a visual camera and an upper computer, wherein the visual camera transmits acquired digital signals to the upper computer for analysis and processing, and the upper computer sends an instruction to a control module for compensating the tray inclination angle, and is characterized by comprising the following steps:
step a, manually cleaning the edge of a tray feeding groove, detecting the edge of the feeding groove by six edge detectors to obtain six edge points, sending position signals to an upper computer by the six edge detectors, sequentially connecting the six edge points by the upper computer to form a hexagon, obtaining an external rectangular area of the hexagon, and intersecting diagonals of the rectangular area to obtain a groove position central point;
b, calculating the distance between two mark points on the outer side of the discharging groove by using a visual camera or manually using a circular caliper, and storing data to an upper computer;
step c, according to the slot position central point and the distance between the two mark points obtained in the step a and the step b, the upper computer associates the position information of the slot position central point and the two mark points with a two-dimensional code generated by a known two-dimensional code generator on the tray, and the storage information of the two-dimensional code consists of single capital letters of A-Z, so that the calibration of the tray is completed;
d, when the tray is placed in a discharging occasion, the vision camera positions the positions of the current two mark points and reads two-dimensional code information, the position of the current slot position central point is calculated according to the precisely positioned central position of the current two mark points through the corresponding relation between the marked pin on the tray and the slot position center, and then the chip is placed in the discharging slot to realize the central positioning of the current tray;
d, the visual camera positions the distance between the two mark points, if the distance between the two mark points is reduced, or the position of the current slot position central point deviates from the position of the original slot position central point, the tray is inclined leftwards or rightwards, the visual camera scans the position of the chip, an optical signal is converted into an ordered electrical signal, the ordered electrical signal is transmitted to an upper computer to analyze the offset and the offset direction of the chip, whether the chip is rightly placed is judged, so that the inclination angle of the tray is adjusted, if the chip is carried on one side of the discharging slot, the height of one side corresponding to the tray is higher than that of the other side, the control module lowers the higher side of the tray, raises the lower side of the tray until the levelness of the discharging slot is approximately level with the levelness of a suction nozzle for sucking the chip;
and e, the control module stores the compensation quantity of the current tray slot position.
2. The visual feedback compensation method based on the tray inclination angle as claimed in claim 1, wherein: the two mark points are metal positioning pins, and the two-dimensional code and the two metal positioning pins fall in the scanning range of the visual camera, so that the accurate positioning of the center point of the slot position can be realized.
3. The visual feedback compensation method based on the tray inclination angle as claimed in claim 1, wherein: and d, obtaining that the detection chips are deviated in the same direction by a fixed value after a large number of tests, and slightly and gradually compensating the suction nozzles for sucking the chips in the direction opposite to the deviation until the chips are accurately placed into the feeding groove.
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| CN202111619844.0A CN114322933A (en) | 2021-12-28 | 2021-12-28 | Visual feedback compensation method based on tray inclination angle |
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| CN202111619844.0A CN114322933A (en) | 2021-12-28 | 2021-12-28 | Visual feedback compensation method based on tray inclination angle |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115216843A (en) * | 2022-07-14 | 2022-10-21 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060155408A1 (en) * | 2003-02-28 | 2006-07-13 | Borries Markier-System Gmbh | Quality control method for two-dimensional matrix codes on metallic workpieces, using an image processing device |
| US20140185910A1 (en) * | 2012-12-27 | 2014-07-03 | Mitutoyo Corporation | Method for improving repeatability in edge location results of a machine vision inspection system |
| CN108766894A (en) * | 2018-06-07 | 2018-11-06 | 湖南大学 | A kind of chip attachment method and system of robot vision guiding |
| CN109556616A (en) * | 2018-11-09 | 2019-04-02 | 同济大学 | A kind of automatic Jian Tu robot of view-based access control model label builds figure dressing method |
-
2021
- 2021-12-28 CN CN202111619844.0A patent/CN114322933A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060155408A1 (en) * | 2003-02-28 | 2006-07-13 | Borries Markier-System Gmbh | Quality control method for two-dimensional matrix codes on metallic workpieces, using an image processing device |
| US20140185910A1 (en) * | 2012-12-27 | 2014-07-03 | Mitutoyo Corporation | Method for improving repeatability in edge location results of a machine vision inspection system |
| CN108766894A (en) * | 2018-06-07 | 2018-11-06 | 湖南大学 | A kind of chip attachment method and system of robot vision guiding |
| CN109556616A (en) * | 2018-11-09 | 2019-04-02 | 同济大学 | A kind of automatic Jian Tu robot of view-based access control model label builds figure dressing method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115216843A (en) * | 2022-07-14 | 2022-10-21 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
| CN115216843B (en) * | 2022-07-14 | 2023-07-07 | 深圳市纳设智能装备有限公司 | Graphite tray state detection method, device and system and terminal equipment |
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