CN114322839B - Method for detecting light spot contour - Google Patents
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Abstract
The invention provides a light spot contour detection method, which comprises the steps that a light source generates a target light spot and projects the target light spot in the view field range of an image sensor, a motion platform moves the image sensor to step according to a set route, image acquisition is carried out at each step position, and then compensation integration is carried out on the acquired images. According to the invention, the image acquisition is carried out by the moving image sensor of the moving table, and the high-resolution image is formed by compensation integration, so that the resolution of the image sensor is indirectly improved, and the high-precision detection of the light spot contour is realized. Furthermore, the method for detecting the light spot contour provided by the invention realizes the detection of the light spot contour on the basis of the existing light spot contour detection system, does not need to add extra hardware, and saves the detection cost.
Description
Technical Field
The invention relates to the technical field of optical imaging, in particular to a method for detecting a light spot contour.
Background
In many cases of scientific experiments and engineering projects, the light spot needs to be focused and then subjected to the next work, and in such cases, people often want to know the specific contour of the light spot. The existing spot profile measurement technology can be mainly divided into the following categories: scanning, photosensitizing, ablating, and array probing. However, under the existing state of the art, when the method is applied to the measurement of micro light spots, it is difficult to directly measure the light spots with extremely small sizes or the precision is low.
The accuracy of spot detection is affected by the image sensor (camera) resolution. In the prior art, the method for expanding the resolution of the image sensor generally increases the magnifying lens optically to perform pre-magnification, but adding the magnifying lens for a narrow field of view is not necessarily successful in layout, and in addition, additional cost is required to be added to add the magnifying lens. If the image sensor with higher resolution is directly replaced, the model selection is time-consuming and increases the cost. Therefore, when the conventional device is used for detecting the light spot, the light spot profile cannot be accurately calculated and a related curve is given to describe the light spot morphology, so that how to accurately calculate the light spot profile under the condition that the resolution of the conventional light spot detection device is limited is a problem to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a method for detecting a light spot profile so as to realize high-precision detection of the light spot profile.
In order to achieve the above object, the present invention provides a method for detecting a light spot profile, comprising:
the light source generates a target light spot and projects the target light spot in the field of view of the image sensor;
the motion platform carries the image sensor to step according to a set route, and image acquisition is carried out at each step position; and
and compensating and integrating the acquired images.
Optionally, the precision P of the motion stage and the current resolution R of the image sensor satisfy the relationship: R/P > N, wherein N is not less than 1.
Optionally, the zoom ratio of compensating the precision of the integrated target light spot is N, N is not less than 1 and not more than N, and the frame number of the image acquired by the image sensor is N 2 。
Optionally, the Image acquired by the Image sensor is composed of pixel coordinates (Image x ,Image y ) Characterized in that the motion stage is provided with motion stage coordinates, the motion stage coordinates (WS x ,WS y ) And the pixel coordinates (Image x ,Image y ) The relation of (2) is:
or alternatively, the process may be performed,
optionally, performing compensation integration on the acquired image includes:
let the field size of the image sensor be Width Height, the data of the image acquired by the ith frame is:
Image Data[i][Width*Height]
wherein i is E [0, n 2 )，
Let (j, k) denote the single frame image data coordinates, where j e 0, width, k e 0, height,
the data of the compensated integrated image are:
Combination Image Data[k*n+i/n][j*n+i％n]＝Image Data[i][j][k]。
optionally, the compensating and integrating the acquired image further comprises detecting the compensating and integrating image to obtain the outline of the target light spot.
Optionally, the motion precision of the motion platform is less than 400nm.
Optionally, the size of the target spot is 3mm by 0.1mm or 0.1mm by 0.1mm.
Optionally, the resolution of the image sensor is 4.65um.
Optionally, the image sensor is a CCD or CMOS.
In summary, the invention provides a method for detecting a light spot contour, which comprises the steps that a light source generates a target light spot and projects the target light spot in a view field range of an image sensor, a motion platform moves the image sensor to step according to a set route, image acquisition is carried out at each step position, and then compensation integration is carried out on the acquired images. According to the invention, the image acquisition is carried out by the moving image sensor of the moving table, and the high-resolution image is formed by compensation integration, so that the resolution of the image sensor is indirectly improved, and the high-precision detection of the light spot contour is realized. Furthermore, the method for detecting the light spot contour provided by the invention realizes the detection of the light spot contour on the basis of the existing light spot contour detection system, does not need to add extra hardware, and saves the detection cost.
Drawings
FIG. 1 is a schematic diagram of a system for detecting a light spot profile;
FIG. 2 is a flowchart of a method for detecting a light spot profile according to an embodiment of the present invention;
FIGS. 3A-3H are step-by-step set-up roadmaps for a motion stage;
FIG. 4 is a roadmap of unidirectional stepping of a motion stage;
FIGS. 5A-5C are schematic diagrams of shift filling of image data acquired by an image sensor;
fig. 6A is a diagram for compensating the outline of a single target spot image acquired by the image sensor before integration, and fig. 6B is a diagram for compensating the outline of a target spot image obtained after integration;
FIG. 7A is a view showing an image of a single object acquired by an image sensor before compensation and integration, and FIG. 7B is a view showing an image of an object obtained after compensation and integration;
FIG. 8A is a diagram of the long side profile data of a target spot obtained from measurements before and after resolution enhancement of an image sensor;
fig. 8B shows short-side profile data of a target spot obtained by measurement before and after resolution enhancement of an image sensor.
Wherein, the reference numerals are as follows:
110-an upper computer control center; 111-a motion stage control unit; 112-a measurement control unit; 113-a light source unit; 114-a motion stage; 115-target spot; 116-image sensor.
Detailed Description
The method for detecting the light spot profile according to the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and drawings, however, it should be understood that the inventive concept may be embodied in many different forms and is not limited to the specific embodiments set forth herein. The drawings are in a very simplified form and are to non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
The terms "first," "second," and the like in the description are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in other sequences than described or illustrated herein. Similarly, if a method described herein comprises a series of steps, and the order of the steps presented herein is not necessarily the only order in which the steps may be performed, and some of the described steps may be omitted and/or some other steps not described herein may be added to the method. If a component in one drawing is identical to a component in another drawing, the component will be easily recognized in all drawings, but in order to make the description of the drawings clearer, the specification does not refer to all the identical components in each drawing.
Fig. 1 is a schematic structural diagram of a detection system for spot accuracy, referring to fig. 1, the detection system includes a motion stage control unit 111, a measurement control unit 112 and a light source unit 113, and the motion stage control unit 111, the measurement control unit 112 and the laser unit 113 are all connected with an upper computer control center 110. Wherein the motion stage control unit 111 is used for controlling the motion stage 114 to move in the horizontal direction, the light source unit 113 is used for emitting a target light spot 115 to be detected, and the measurement control unit 112 is used for controlling the image sensor (CCD) 116 to perform image acquisition. Illustratively, the motion precision P of the motion stage 114 is less than 400nm, the laser spot size is 0.1mm by 0.1mm, and the current resolution R of the image sensor (CCD) 115 is 4.65um. According to the current target spot shape, we can know that the number of pixels under the current target spot size is:
0.1mm/4.65um＝21.5 (1-1)
the calculation shows that the number of pixels acquired and calculated at present is 22, the measurement precision is greatly restricted, and the light spot profile can not be accurately calculated and a related curve can be given to describe the light spot morphology. In order to solve the problems, the invention provides a spot precision detection method, which is characterized in that a moving image sensor of a moving table steps according to a set route, and images acquired at each stepping position are compensated and integrated, so that the resolution of the image sensor is indirectly improved, and the high-precision detection of the spot contour is realized. Furthermore, the method for detecting the light spot profile provided by the invention realizes the detection of the light spot profile on the basis of the existing equipment, thereby saving the detection cost.
Fig. 2 is a flowchart of a method for detecting a light spot profile according to an embodiment of the present invention, as shown in fig. 2, where the method for detecting a light spot profile according to the embodiment includes:
s01: the light source generates a target light spot and projects the target light spot in the field of view of the image sensor;
s02: the motion platform carries the image sensor to step according to a set route, and image acquisition is carried out at each step position; and
s03: and compensating and integrating the acquired images.
Specifically, referring to fig. 1, step S01 is performed in which the light source generates a target spot and projects the target spot within the field of view of the image sensor. In this embodiment, the light source is a laser light source generated by a laser, and the laser light source is correspondingly shaped to generate the target spot 115. Optionally, the target spot 115 has a size of 3mm by 0.1mm or 0.1mm by 0.1mm. The image sensor 116 may be a complementary metal oxide semiconductor (CMOS, complementary Metal Oxide Semiconductor) or a charge coupled device (CCD, charge Coupled Device), and preferably, in this embodiment, the image sensor 116 is a CCD. The motion stage 114 is a high precision motion stage, for example, the motion precision of the motion stage 114 is less than 400nm. The motion stage 114 moves the image sensor 116 to a position capable of receiving the target spot 115, so that the target spot 115 is within the range of the CCD field of view, preferably, the target spot 115 is near the center of the CCD field of view, and the image data at that time is acquired and stored.
Next, step S02 is executed, in which the image sensor of the motion stage is moved to step according to a set route, and image acquisition is performed at each step position. Wherein, the precision P of the motion platform and the current resolution R of the image sensor satisfy the relation: R/P>N, wherein N is more than or equal to 1, and the larger N is, the higher the space of the resolution improvement multiple of the subsequent image sensor is. In this embodiment, after the subsequent image compensation integration, the resolution of the image sensor is scaled according to a set magnification N, where N is greater than or equal to 1 and less than or equal to N. For example, the accuracy is divided according to the current resolution r=4.65 um of the image sensor, and the magnification scaling can be performed according to the accuracy divisible n=3, so that the accuracy is improved to 1.55um, that is, the magnification of the accuracy of the target light spot profile after compensation integration is 3. In other embodiments of the present invention, the n=3 may be divided into n=3 according to the precision, so as to increase the precision to 0.93um, and of course, those skilled in the art may design according to their own needs, and the present invention is not limited herein. It should be noted that, the number of subsequent image acquisitions is correspondingly different due to different magnification scaling, and the n magnification scaling, which is performed subsequentlyThe number of times of acquisition of the image sensor is n 2 I.e. the number of frames of the acquired image is n 2 The increase in the number of image acquisitions results in a certain time-consuming measurement of the overall spot accuracy.
The Image captured by the Image sensor is composed of pixel coordinates (Image x ,Image y ) To characterize, the information contained in each pixel coordinate is the source of the main data information of the spot contour detection, so that the more the measured target spot occupies, the higher the measurement accuracy. Correspondingly, the motion table is provided with motion table coordinates, the motion table coordinates (WS x ,WS y ) And the pixel coordinates (Image x ,Image y ) The relation of (2) is:
or alternatively
In this embodiment, n is greater than 1, and as can be seen from equation 1-1, 21.5 satisfies the requirement of high resolution stepping, and the coordinate system of the motion table is required to be consistent with the pixel coordinate system of the image sensor. Fig. 3A to 3H illustrate a set path for stepping the motion stage, for example, in this embodiment, the motion stage steps according to the path shown in fig. 3A, and operates with 2×2shot image steps, which is specifically as follows: the operation table steps R/3 along the horizontal direction, image acquisition and storage are carried out, and the image is acquired and stored again after the step R/3 is continued; after the horizontal acquisition is completed, vertically and downwards stepping by R/3, and then carrying out image acquisition and storage; and repeating the process to directly acquire 9 pictures.
It should be noted that, the step-by-step path of the moving table in the image capturing process may be performed as shown in fig. 3A, or may be other paths that meet the step-by-step position points required in the process. For example, for a target spot with a size of 3mm by 0.1mm, the motion stage-carried image sensor may perform image acquisition using a stepping path as shown in fig. 3A to 3H, or may perform image acquisition using a unidirectional stepping path as shown in fig. 4.
Next, step S03 is executed to perform compensation integration on the acquired image. For the acquired image data, compensation is performed according to the following principle: according to the stepping route of fig. 3A, each pixel of the single frame image data is displaced, the internal data is filled in a displacement manner, that is, the image is decomposed and compensated according to the coordinate position of the motion table corresponding to each acquired frame image. For example, the motion stage is displaced according to a 3A stepping route, and fills the image acquired at the first stepping point (starting point) in a pixel coordinate system, as shown in fig. 5A, after the motion stage continues to step R/3 (1/3 pixel shift) according to the 3A stepping route, the image acquired after R/3 stepping is filled in the pixel coordinate system, as shown in fig. 5B, displacement is sequentially performed according to the 3A stepping route, and the image (9 frame) acquired at each stepping point is sequentially subjected to shift filling, so as to obtain final integration (coding) data, as shown in fig. 5C.
Specifically, the field size of the current image sensor is set to be Width and Height, and compensation is performed according to the path and the method.
The Data of the Image acquired by the ith frame is Image Data [ i ]][Width*Height]Wherein i is [0, n ] 2 ) Let the data of the compensated integrated image be Combination Image Data [ n Width Height ]]。
Let (j, k) denote the coordinates of the current single frame image data, where j e 0, width, k e 0, height,
obviously, the data for compensating the integrated image are:
Combination Image Data[k*n+i/n][j*n+i％n]＝Image Data[i][j][k]。
then, the compensated integrated image is detected to obtain the outline of the target light spot, and the resolution is improved.
Fig. 6A is a diagram of a single target spot image acquired by the image sensor before compensation and integration, fig. 6B is a diagram of a target spot image acquired after compensation and integration, fig. 7A is a diagram of a single object acquired by the image sensor before compensation and integration, and fig. 7B is a diagram of a real object acquired after compensation and integration. Comparing fig. 6A and 6B, and fig. 7A and 7B, it can be seen that, by adopting the image compensation integration scheme provided in this embodiment, the resolution of the image sensor is greatly improved.
Fig. 8A is a diagram showing the profile data of the Long side (Long Units) of the target spot obtained by measuring before and after resolution enhancement of the image sensor, wherein curve 1 is the profile data of the Long side of the target spot before resolution enhancement, and curve 2 is the profile data of the Long side of the target spot after resolution enhancement. Fig. 8B shows short side (laser Units) profile data of a target spot obtained by measurement before and after resolution enhancement of an image sensor, wherein curve 3 is profile data of a short side of the target spot before resolution enhancement, and curve 4 is profile data of a short side of the target spot after resolution enhancement. Taking the long side as an example: the curve 2 shows the contour edge of the target light spot with enhanced resolution, the edge shape is more obvious, the contour is more clear, and the long-side contour of the target light spot can be completely shown; the curve 1 represents the contour edge of the target light spot before resolution enhancement, the overall shape is smooth, and the specific shape of the edge contour cannot be seen. In addition, according to the current pixel value, the influence of the penumbra region is removed, the pixel interval 100-2050 is taken, and in total 1950 pixels are taken, the outline size is 1950/3×4.65um= 3022.5 um= 3.0225mm, and the calculation result before resolution enhancement is 720×4.65=3.348 mm, so that the penumbra region before enhancement is not obvious, the outline shape of the main body is not clear, and the target spot length precision is lower according to the previous calculation result. The spot accuracy detection method provided by the implementation of the method has the advantages that the outline measurement accuracy of the target spot after resolution enhancement is higher, and the smaller the target spot is, the more advantageous.
According to the embodiment, the image compensation integration method is adopted, on the basis of an existing light spot contour detection system, extra hardware cost is not increased, multiple frames of images are collected through controlling the moving table to move in a stepping mode, high-resolution images are formed through compensation integration, the resolution of an image sensor is indirectly improved, the accuracy of light spot contour calculation is improved, and particularly the problem that small light spot contours are blurred in the detection process is solved.
The invention provides a light spot contour detection method, which comprises the steps that a light source generates a target light spot and projects the target light spot in the view field range of an image sensor, a motion platform moves the image sensor to step according to a set route, image acquisition is carried out at each step position, and then compensation integration is carried out on the acquired images. According to the invention, the image acquisition is carried out by the moving image sensor of the moving table, and the high-resolution image is formed by compensation integration, so that the resolution of the image sensor is indirectly improved, and the high-precision detection of the light spot contour is realized. Furthermore, the method for detecting the light spot contour provided by the invention realizes the detection of the light spot contour on the basis of the existing light spot contour detection system, does not need to add extra hardware, and saves the detection cost.
The above description is only illustrative of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.
Claims (9)
1. The method for detecting the light spot profile is characterized by comprising the following steps of:
the light source generates a target light spot and projects the target light spot in the field of view of the image sensor;
carrying the image sensor by a moving table to step according to a set route, and collecting images at each step position by the image sensor, wherein the precision P of the moving table and the current resolution R of the image sensor meet R/P > N and N is more than or equal to 1, the position of the moving table corresponds to the moving table coordinate in a moving table coordinate system, the distance between the moving table coordinates corresponding to two adjacent step positions is 1/N of the resolution R, and N is the precision magnification factor, and 1<n is less than or equal to N; and
and compensating and integrating the acquired images, wherein the change of the pixel coordinates of each pixel of the image sensor in a pixel coordinate system is obtained according to the change of the motion table coordinates, the image data corresponding to each pixel acquired at each stepping position are respectively shifted and filled according to the corresponding pixel coordinates, and the compensated and integrated image is obtained, and the resolution of the compensated and integrated image is 1/n of the resolution R.
2. The method for detecting a light spot profile according to claim 1, wherein the precision magnification of the integrated target light spot is n, and the number of frames of the image acquired by the image sensor is n 2 。
3. The method according to claim 2, wherein the Image acquired by the Image sensor is composed of pixel coordinates (Image x ,Image y ) Is characterized in that the motion table is provided with motion table coordinates (WS x ,WS y ) The motion stage coordinates (WS x ,WS y ) And the pixel coordinates (Image x ,Image y ) The relation of (2) is:
or alternatively, the process may be performed,
4. a method of spot profile detection according to claim 3, wherein compensating for the acquired image comprises:
let the field size of the image sensor be Width Height, the data of the image acquired by the ith frame is:
ImageData[i][Width*Height]
wherein i is E [0, n 2 ]，
Let (j, k) denote the coordinates of the single frame image data, where j e 0, width, k e 0, height,
the data of the compensated integrated image are:
Combination Image Data[k*n+i/n][j*n+i％n]＝Image Data[i][j][k]。
5. the method for detecting a light spot profile according to claim 1, wherein the compensating and integrating the acquired images further comprises detecting the compensating and integrating images to obtain the profile of the target light spot.
6. The method according to claim 1, wherein the motion accuracy of the motion stage is less than 400nm.
7. The method of claim 1, wherein the target spot size is 3mm by 0.1mm or 0.1mm by 0.1mm.
8. The method of claim 1, wherein the resolution of the image sensor is 4.65 μm.
9. The method of claim 1, wherein the image sensor is a CCD or CMOS.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101010960A (en) * | 2004-08-13 | 2007-08-01 | 庆熙大学校产学协力团 | Method and device for motion estimation and compensation for panorama image |
| CN101854465A (en) * | 2010-02-01 | 2010-10-06 | 杭州海康威视软件有限公司 | Image processing method and device based on optical flow algorithm |
| CN104469112A (en) * | 2014-12-01 | 2015-03-25 | 大族激光科技产业集团股份有限公司 | Imaging method and device of large view field |
| CN205860995U (en) * | 2016-06-08 | 2017-01-04 | 广东工业大学 | Automatic measurement system based on image mosaic |
| CN110940490A (en) * | 2019-12-13 | 2020-03-31 | 湖南省鹰眼在线电子科技有限公司 | Laser spot scanning precision detection method and device of laser processing equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005017203A (en) * | 2003-06-27 | 2005-01-20 | Matsushita Electric Ind Co Ltd | Position detection device |
-
2020
- 2020-09-28 CN CN202011043521.7A patent/CN114322839B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101010960A (en) * | 2004-08-13 | 2007-08-01 | 庆熙大学校产学协力团 | Method and device for motion estimation and compensation for panorama image |
| CN101854465A (en) * | 2010-02-01 | 2010-10-06 | 杭州海康威视软件有限公司 | Image processing method and device based on optical flow algorithm |
| CN104469112A (en) * | 2014-12-01 | 2015-03-25 | 大族激光科技产业集团股份有限公司 | Imaging method and device of large view field |
| CN205860995U (en) * | 2016-06-08 | 2017-01-04 | 广东工业大学 | Automatic measurement system based on image mosaic |
| CN110940490A (en) * | 2019-12-13 | 2020-03-31 | 湖南省鹰眼在线电子科技有限公司 | Laser spot scanning precision detection method and device of laser processing equipment |
Non-Patent Citations (1)
| Title |
|---|
| 动载体光电平台视轴稳定精度的检测;孙辉等;《光学精密工程》;20110930;第19卷(第09期);第2131-2136页 * |
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