CN114321536A - Rotary air supply device and carrying equipment adopting same - Google Patents

Rotary air supply device and carrying equipment adopting same Download PDF

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Publication number
CN114321536A
CN114321536A CN202210026363.7A CN202210026363A CN114321536A CN 114321536 A CN114321536 A CN 114321536A CN 202210026363 A CN202210026363 A CN 202210026363A CN 114321536 A CN114321536 A CN 114321536A
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CN
China
Prior art keywords
air
gas
seat
rotary
groove
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Pending
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CN202210026363.7A
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Chinese (zh)
Inventor
杨杰
李欢
曹葵康
周明
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Tztek Technology Co Ltd
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Tztek Technology Co Ltd
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Application filed by Tztek Technology Co Ltd filed Critical Tztek Technology Co Ltd
Priority to CN202210026363.7A priority Critical patent/CN114321536A/en
Publication of CN114321536A publication Critical patent/CN114321536A/en
Pending legal-status Critical Current

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Abstract

The invention provides a rotary air supply device and carrying equipment adopting the same, belonging to the field of air supply and high-precision bearing, wherein the rotary air supply device comprises an air passing pipe, a transfer block, an air supply main body, a rotary seat, an air supply base, an air pipe and an air source; the top surface of the air pipe is connected with the air pressure demand mechanism and can rotate along with the air pipe, and the air pipe penetrates through the air pipe through groove to supply air or exhaust air upwards. Through this rotatory air feeder, effectively solved traditional air feed structure complicacy and can not be along with the problem of target pivoted, design cost is low, can be applicable to the rotatory air feed of different microscope carriers well, is convenient for popularize and apply in high-precision machining, equipment and detection area.

Description

Rotary air supply device and carrying equipment adopting same
Technical Field
The invention belongs to the field of gas supply and high-precision bearing, and particularly relates to a rotary gas supply device and carrying equipment adopting the same.
Background
The gas supply mechanism or device is used as the most common machine table component on modern processing, assembling and measuring production lines, and directly influences the final quality and the working efficiency. At present traditional air feed mechanism or device generally adopts the structure of air supply, trachea and air cock, and the trachea generally adopts the hose, its and air cock flexible coupling, and in current high-accuracy processing, equipment and measurement, tasting the air cock can rotate along with the target product, can lead to the trachea to remove this moment, and many tracheal wriggling rotate, often can lead to gas circuit compensation, atmospheric pressure unstability, and cause the gas circuit to complicate easily. Therefore, a mechanism capable of supplying air by rotation is required.
Disclosure of Invention
In order to overcome the disadvantages of the prior art, the present invention provides a rotary air supply device and a carrying apparatus using the same, which can solve the above problems.
A rotary air supply device comprises an air passing pipe, a switching block, an air supply main body, a rotary seat, an air supply base, an air pipe and an air source; it is connected and can rotate thereupon to cross tracheal top surface and atmospheric pressure demand mechanism, cross tracheal bottom through the switching piece joint in the air feed main part, the air feed main part cup joints the support and is in on the roating seat, the roating seat bottom surface is fixed extremely the upper surface of air feed base, cross trachea, switching piece and air feed main part for the roating seat is coaxial to be rotated the periphery of air feed main part sets up a plurality of air cocks it leads to the groove to cross to set up a plurality of tracheas on the tracheal cavity body, and the air supply is connected the air feed with the roating seat or is bled, the roating seat to air cock air feed in the air feed main part or bleed, the air cock is connected with the trachea, and the trachea passes the trachea leads to the groove upwards to air feed or bleed.
Furthermore, the air passing pipe comprises a hollow pipe body and a transfer flange arranged at the upper end of the hollow pipe body, a plurality of air pipe through grooves are formed in the hollow pipe body, two driving clamping grooves are symmetrically formed in the bottom end of the hollow pipe body, and a plurality of threaded holes are uniformly formed in the transfer flange and used for being connected with an air pressure demand mechanism.
Furthermore, an upper sealed inner groove, a plurality of inner gas ring grooves and a lower sealed inner groove are formed in the hollow inner cylindrical surface of the gas supply main body from top to bottom; the outer end of the inner air ring groove is provided with an air nozzle seat communicated to the outer peripheral surface and used for installing an air nozzle; two driving mounting holes are vertically formed in the upper surface of the air supply main body and used for mounting the adapter block.
Furthermore, the rotary seat comprises a seat disc, an air seat column, an air source joint, an upper sealing ring and a lower sealing ring, wherein the air seat column and the air source joint are oppositely arranged at the upper side and the lower side of the seat disc; the upper sealing ring is embedded into the upper sealing outer groove, and the lower sealing ring is embedded into the lower sealing outer groove; wherein, the upper sealing outer groove, the plurality of outer gas ring grooves and the lower sealing outer groove of the rotary seat are matched with the upper sealing inner groove, the plurality of inner gas ring grooves and the lower sealing inner groove of the gas supply main body, and an external gas source supplies or exhausts gas to a target product through a gas source connector, a hollow cavity of the gas seat column, a gas channel hole, the outer gas ring grooves, the inner gas ring grooves, a gas nozzle seat and a gas pipe.
The invention also provides high-precision carrying equipment which comprises an adsorption carrying platform, a carrying platform motor group, a frame and a rotary air supply device, wherein the adsorption carrying platform is supported on the carrying platform motor group and is driven by the carrying platform motor group to rotate circumferentially; carrying the product plates with different specifications through the adsorption carrying platform, and carrying out position fine adjustment and positioning on the conveyed product plates in the transverse direction, the longitudinal direction and the vertical direction; the rotary air supply device is arranged below the stage motor group and supplies or exhausts air for the adsorption stage.
Compared with the prior art, the invention has the beneficial effects that: through this rotatory air feeder, effectively solved traditional air feed structure complicacy and can not be along with the problem of target pivoted, design cost is low, can be applicable to the rotatory air feed of different microscope carriers well, is convenient for popularize and apply in high-precision machining, equipment and detection area.
Drawings
FIG. 1 is a schematic view of a rotary air supply apparatus according to the present invention;
FIG. 2 is a schematic view of the structure of the air duct;
FIG. 3 is a cross-sectional view of the gas supply body;
FIG. 4 is an isometric view of the swivel;
FIG. 5 is a front view of the swivel;
FIG. 6 is a schematic view of a half-section of a gas supply body sleeved on a rotating seat;
fig. 7 is a schematic view of the carrier device.
In the figure, the position of the upper end of the main shaft,
100. an adsorption carrying platform;
200. a stage motor group;
300. a frame;
400. a position sensing assembly;
500. a rotary air supply device;
1. passing through the trachea; 11. a hollow tube body; 12. a tracheal through groove; 13. a drive card slot; 14. a transfer flange; 2. a transfer block; 3. a gas supply main body; 31. the inner groove is sealed at the upper part; 32. an inner gas ring groove; 33. an air nozzle seat; 34. lower sealing the inner groove; 35. a drive mounting hole; 4. a rotating base; 41. a seat pan; 42. an air seat post; 421. an outer gas ring groove; 422. an airway hole; 43. a gas source connector; 44. an upper sealing ring; 45. a lower seal ring; 46. a locking seat; 5. an air supply base; 6. an air tap;
600. and (4) an anti-collision piece.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
It should be understood that "system", "device", "unit" and/or "module" as used in this specification is a method for distinguishing different components, elements, parts or assemblies at different levels. However, other words may be substituted by other expressions if they accomplish the same purpose.
Rotary air supply device
A rotary air supply device is shown in figures 1-6 and comprises an air pipe 1, a switching block 2, an air supply main body 3, a rotary seat 4, an air supply base 5, an air pipe and an air source.
Connection relation: the top surface of crossing trachea 1 is connected with atmospheric pressure demand mechanism and can rotate thereupon, it is in through switching piece 2 joint to cross the bottom of trachea 1 on the air feed main part 3, air feed main part 3 cup joints the support and is in on the roating seat 4, 4 bottom surfaces of roating seat are fixed extremely the upper surface of air feed base 5, cross trachea 1, switching piece 2 and air feed main part 3 for roating seat 4 coaxial rotation the periphery of air feed main part 3 sets up a plurality of air cocks 6 set up a plurality of trachea and lead to groove 12 on crossing trachea 1's the cavity body 11, the air supply is connected the air feed with roating seat 4 or is bled, roating seat 4 to air cock 6 air feed or bleed on the air feed main part 3, air cock 6 is connected with the trachea, and the trachea passes the trachea leads to groove 12 upwards air feed or bleed.
The air passing pipe 1 comprises a hollow pipe body 11 and a transfer flange 14 arranged at the upper end of the hollow pipe body 11, a plurality of air pipe through grooves 12 are formed in the hollow pipe body 11, two driving clamping grooves 13 are symmetrically formed in the bottom end of the hollow pipe body 11, and a plurality of threaded holes are uniformly distributed in the transfer flange 14 and used for being connected with an air pressure demand mechanism.
Wherein, the switching block 2 is "concave" type or strip piece type, and its bottom is fixed to the upper surface of air feed main part 3, and the upper portion main part joint of switching block 2 goes into in the drive draw-in groove 13 of trial trachea 1.
Wherein, the hollow inner cylindrical surface of the gas supply main body 3 is provided with an upper sealed inner groove 31, a plurality of inner gas ring grooves 32 and a lower sealed inner groove 34 from top to bottom; the outer end of the inner air ring groove 32 is provided with an air nozzle seat 33 communicated with the outer peripheral surface and used for installing an air nozzle 6; two driving installation holes 35 are vertically formed in the upper surface of the air supply main body 3 and used for installing the adapter block 2.
The rotary seat 4 comprises a seat disc 41, a gas seat column 42, a gas source joint 43, an upper sealing ring 44 and a lower sealing ring 45, wherein the gas seat column 42 and the gas source joint 43 are oppositely arranged at the upper side and the lower side of the seat disc 41, an upper sealing outer groove, a plurality of outer gas ring grooves 421 and a lower sealing outer groove are formed in the peripheral surface of the gas seat column 42 from top to bottom, and gas channel holes 422 are formed in the outer gas ring grooves 421; the upper sealing ring 44 is embedded into the upper sealing outer groove, and the lower sealing ring 45 is embedded into the lower sealing outer groove.
Further, the rotary seat 4 further includes a locking seat 46 for positioning and connecting the seat post 42 to the seat plate 41 from the circumferential direction.
See fig. 6; the upper sealing outer groove, the plurality of outer gas ring grooves 421 and the lower sealing outer groove of the rotary seat 4 are matched with the upper sealing inner groove 31, the plurality of inner gas ring grooves 32 and the lower sealing inner groove 34 of the gas supply main body 3, and an external gas source supplies or exhausts gas to a target product through the gas source connector 43, the hollow cavity of the gas seat column 42, the gas passage hole 422, the outer gas ring grooves 421, the inner gas ring grooves 32, the gas nozzle seat 33 and the gas pipe.
Alternatively, the rotary seat 4 is not provided with a plurality of outer gas ring grooves 421, but only the outer surface of the middle section of the gas seat post 42 is necked down to form a large gas cavity. And secondly, the air supply main body 3 is not provided with a plurality of inner air ring grooves 32, and an annular atmospheric air cavity is formed in the middle section of the inner cylindrical surface of the air supply main body 3 in a concave mode. Wherein, the first and the second can be only one condition, or two conditions can exist simultaneously to form a large air cavity.
High-precision carrying equipment
A high-precision carrier apparatus, see fig. 7, includes an adsorption stage 100, a stage motor group 200, a frame 300, and a rotary gas supply device 500.
Arrangement relation: the suction stage 100 is supported and arranged on the stage motor group 200 and is driven by the stage motor group 200 to rotate in the circumferential direction, and the stage motor group 200 is supported by the frame 300; the adsorption carrying platform 100 is used for carrying product plates with different specifications, and carrying out position fine adjustment and positioning on the conveyed product plates in the transverse direction, the longitudinal direction and the vertical direction; the rotary air supply device 500 is the rotary air supply device, and the rotary air supply device 500 is arranged below the stage motor set 200 to supply or exhaust air to or from the adsorption stage 100.
Wherein, the adsorption carrier plate group of the adsorption carrier 100 comprises an air suction plate connected with an external air source, suction nozzle discs with different heights, suction heads, detachable auxiliary supporting blocks and an air suction fixing plate (see fig. 7); the nozzle plate and the suction head are connected to the rotary air supply device 500 through an air pipe, thereby supplying negative pressure to the suction stage 100.
Further, a position sensing assembly 400 is disposed at the suction stage 100 and the stage motor set 200, and is used for determining the circumferential position of the suction stage 100.
Further, the carrier device further includes a bumper 600 disposed outside the frame 300 to absorb shock.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (9)

1. A rotary gas supply apparatus, characterized by: the rotary air supply device comprises an air passing pipe (1), a switching block (2), an air supply main body (3), a rotary seat (4), an air supply base (5), an air pipe and an air source; the top surface of crossing trachea (1) is connected with atmospheric pressure demand mechanism and can rotate thereupon, cross the bottom of trachea (1) and pass through switching piece (2) joint in on air feed main part (3), air feed main part (3) cup joint the support in on roating seat (4), roating seat (4) bottom surface is fixed to the upper surface of air feed base (5), cross trachea (1), switching piece (2) and air feed main part (3) for roating seat (4) coaxial rotation, set up a plurality of air cocks (6) in the periphery of air feed main part (3), set up a plurality of trachea logical groove (12) on crossing the cavity body (11) of trachea (1), the air supply is connected the air feed with roating seat (4) or is bled, roating seat (4) to air cock (6) on air feed main part (3) air feed or is bled, and air cock (6) are connected with the trachea, the air pipe penetrates through the air pipe through groove (12) to supply air or exhaust air upwards.
2. The rotary gas supply apparatus according to claim 1, wherein: the air passing pipe (1) comprises a hollow pipe body (11) and a transfer flange (14) arranged at the upper end of the hollow pipe body (11), a plurality of air pipe through grooves (12) are formed in the hollow pipe body (11), two driving clamping grooves (13) are symmetrically formed in the bottom end of the hollow pipe body (11), and a plurality of threaded holes are uniformly formed in the transfer flange (14) and are used for being connected with an air pressure demand mechanism.
3. The rotary gas supply apparatus according to claim 1, wherein: the adapter block (2) is of a concave type or a strip block type, the bottom end of the adapter block is fixed to the upper surface of the air supply main body (3), and the upper main body of the adapter block (2) is clamped into a driving clamping groove (13) of the trial air pipe (1).
4. The rotary gas supply apparatus according to claim 1, wherein: an upper sealed inner groove (31), a plurality of inner gas ring grooves (32) and a lower sealed inner groove (34) are formed in the hollow inner cylindrical surface of the gas supply main body (3) from top to bottom; the outer end of the inner gas ring groove (32) is provided with a gas nozzle seat (33) communicated to the outer peripheral surface and used for installing a gas nozzle (6); two driving installation holes (35) are vertically formed in the upper surface of the air supply main body (3) and used for installing the adapter block (2).
5. The rotary gas supply apparatus according to claim 4, wherein: the rotary seat (4) comprises a seat disc (41), an air seat column (42), an air source joint (43), an upper sealing ring (44) and a lower sealing ring (45), wherein the air seat column (42) and the air source joint (43) are oppositely arranged on the upper side and the lower side of the seat disc (41), an upper sealing outer groove, a plurality of outer air ring grooves (421) and a lower sealing outer groove are formed in the outer peripheral surface of the air seat column (42) from top to bottom, and air channel holes (422) are formed in the outer air ring grooves (421); the upper sealing ring (44) is embedded into the upper sealing outer groove, and the lower sealing ring (45) is embedded into the lower sealing outer groove; wherein, the upper sealing outer groove, the plurality of outer gas ring grooves (421) and the lower sealing outer groove of the rotary seat (4) are matched with the upper sealing inner groove (31), the plurality of inner gas ring grooves (32) and the lower sealing inner groove (34) of the gas supply main body (3), and an external gas source supplies or extracts gas to a target product through a gas source joint (43), a hollow cavity of a gas seat column (42), a gas channel hole (422), the outer gas ring grooves (421), the inner gas ring grooves (32), a gas nozzle seat (33) and a gas pipe.
6. The rotary gas supply apparatus according to claim 5, wherein: the rotary seat (4) further comprises a locking seat (46) for positioning and connecting the gas seat post (42) to the seat disc (41) from the circumferential direction.
7. A high precision carrier apparatus, characterized by: the carrying equipment comprises an adsorption carrying platform (100), a platform motor group (200), a frame (300) and a rotary air supply device (500), wherein the adsorption carrying platform (100) is supported and arranged on the platform motor group (200) and driven by the platform motor group (200) to rotate in the circumferential direction, and the platform motor group (200) is supported by the frame (300); the adsorption carrying platform (100) is used for carrying product plates with different specifications, and carrying out position fine adjustment and positioning on the conveyed product plates in the transverse direction, the longitudinal direction and the vertical direction; the rotary air supply device (500) adopts the rotary air supply device of any one of claims 1 to 6, and the rotary air supply device (500) is arranged below the stage motor set (200) to supply or exhaust air for the adsorption stage (100).
8. The carrier device of claim 7, wherein: and a position sensing assembly (400) is arranged at the position of the adsorption carrier (100) and the carrier motor set (200) and is used for determining the circumferential position of the adsorption carrier (100).
9. The carrier device of claim 7, wherein: the carrier device further comprises a bumper (600) arranged outside the frame (300).
CN202210026363.7A 2022-01-11 2022-01-11 Rotary air supply device and carrying equipment adopting same Pending CN114321536A (en)

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Application Number Priority Date Filing Date Title
CN202210026363.7A CN114321536A (en) 2022-01-11 2022-01-11 Rotary air supply device and carrying equipment adopting same

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Application Number Priority Date Filing Date Title
CN202210026363.7A CN114321536A (en) 2022-01-11 2022-01-11 Rotary air supply device and carrying equipment adopting same

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100889638B1 (en) * 2008-03-17 2009-03-20 한국뉴매틱(주) Vacuum pad device
CN204805800U (en) * 2015-07-02 2015-11-25 佛山市精一自动化设备有限公司 Rotatory breather
CN206708611U (en) * 2017-02-23 2017-12-05 中山市鸿之远智能科技有限公司 A kind of swivel joint
CN108515371A (en) * 2018-05-17 2018-09-11 无锡意佳工业设备制造有限公司 A kind of sustainable pneumatic clamping mechanism passively rotated
CN208681407U (en) * 2018-09-06 2019-04-02 上海金东唐科技有限公司 A kind of turntable jig lower die rotating device
CN113385808A (en) * 2021-06-24 2021-09-14 苏州科韵激光科技有限公司 Laser processing bearing device
CN214947204U (en) * 2020-12-31 2021-11-30 辰星(天津)自动化设备有限公司 Rotary sealing movable platform

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100889638B1 (en) * 2008-03-17 2009-03-20 한국뉴매틱(주) Vacuum pad device
CN204805800U (en) * 2015-07-02 2015-11-25 佛山市精一自动化设备有限公司 Rotatory breather
CN206708611U (en) * 2017-02-23 2017-12-05 中山市鸿之远智能科技有限公司 A kind of swivel joint
CN108515371A (en) * 2018-05-17 2018-09-11 无锡意佳工业设备制造有限公司 A kind of sustainable pneumatic clamping mechanism passively rotated
CN208681407U (en) * 2018-09-06 2019-04-02 上海金东唐科技有限公司 A kind of turntable jig lower die rotating device
CN214947204U (en) * 2020-12-31 2021-11-30 辰星(天津)自动化设备有限公司 Rotary sealing movable platform
CN113385808A (en) * 2021-06-24 2021-09-14 苏州科韵激光科技有限公司 Laser processing bearing device

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* Cited by examiner, † Cited by third party
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成大先: "《机械设计图册 零部件的结构与组合》", 31 December 1997 *

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