CN114321436A - A chemical pneumatic diaphragm valve - Google Patents

Abstract

The invention discloses a chemical pneumatic diaphragm valve, which comprises: a base; the bottom end of the valve body is fixed on the top end of the base, a valve cavity for medium circulation is arranged in the valve body, and a medium inlet pipe and a medium outlet pipe are respectively and integrally formed on two sides of the valve body; the bottom end of the cylinder barrel is fixed on the top end of the valve body, a piston cavity is arranged in the cylinder barrel, and a first air inlet and outlet interface is arranged on one side wall of the cylinder barrel; the bottom end of the top cover is fixed on the top end of the cylinder barrel, the bottom end of the top cover is provided with an accommodating cavity, and a second air inlet and outlet port is formed in one side wall of the top cover; a valve core which is pressed between the valve body and the cylinder barrel; the piston is arranged in the piston cavity, and the bottom end of the piston is detachably connected with the top end of the valve core; and the spring is arranged between the top wall of the accommodating cavity and the top end of the piston, or the spring is arranged between the bottom of the piston and the bottom wall of the piston cavity. The chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to use requirements, one valve can be multipurpose, and the universality is high.

Description

A chemical pneumatic diaphragm valve

technical field

The invention relates to the technical field of fluid shut-off valves, and more particularly to a chemical pneumatic diaphragm valve, which is mainly used in the semiconductor industry and is used as a liquid switch, such as pure water, sulfuric acid, nitric acid, etc., not only has strong corrosion resistance, but also The liquid has a high cleanliness after passing through the diaphragm valve.

Background technique

At present, the existing pneumatic diaphragm valves generally have the form of normally open single pneumatic, normally closed single pneumatic and double pneumatic, and these three types are not common and inconvenient to use; and the existing pneumatic diaphragm valves are generally made of metal, when used for connecting When passing and blocking chemicals, especially acidic solutions, it is easy to corrode the diaphragm valve and reduce its service life; and the elastic diaphragm on the current pneumatic diaphragm valve is a separate part, which is often prone to excessive pressure and leads to loss, making the elasticity The life of the diaphragm is short.

Therefore, how to provide a chemical pneumatic diaphragm valve that is universal and has a long service life is an urgent problem to be solved by those skilled in the art.

SUMMARY OF THE INVENTION

In view of this, the present invention provides a chemical pneumatic diaphragm valve that is universal and has a long service life.

In order to achieve the above object, the present invention adopts the following technical solutions:

A chemical pneumatic diaphragm valve comprising:

base;

A valve body, the bottom end of the valve body is fixed on the top end of the base, a valve cavity for medium circulation is arranged in the valve body, and a medium inlet pipe and a medium outlet pipe are integrally formed on both sides of the valve body, respectively. The medium inlet pipe and the medium outlet pipe are both communicated with the valve cavity;

A cylinder barrel, the bottom end of the cylinder barrel is fixed on the top end of the valve body, a piston cavity is arranged inside the cylinder barrel, and a first air inlet and outlet port communicated with the piston cavity is arranged on a side wall of the cylinder barrel ;

a top cover, the bottom end of the top cover is fixed on the top end of the cylinder barrel, the bottom end of the top cover is provided with a accommodating cavity, and a side wall of the top cover is provided with a second air inlet and outlet communicating with the accommodating cavity interface;

a valve core, the valve core is crimped between the valve body and the cylinder barrel, and the valve core moves up and down to block or connect the valve cavity;

a piston, wherein the piston is arranged in the piston cavity, and the bottom end of the piston is detachably connected with the top end of the valve core;

The spring is provided between the top wall of the accommodating chamber and the top end of the piston, or the spring is provided between the bottom of the piston and the bottom wall of the piston chamber.

As can be seen from the above technical solutions, compared with the prior art, the present disclosure provides a chemical pneumatic diaphragm valve. When the spring is arranged in the accommodating cavity, the first air inlet and outlet ports are connected to the air source, and the second air inlet and outlet ports are connected to the air source. When the interface is not connected to the air source, the diaphragm valve is a normally closed single pneumatic valve; when the spring is set in the piston cavity, and the second air inlet and outlet ports are connected to the air source, and the first air inlet and outlet ports are not connected to the air source, The diaphragm valve is a normally open single pneumatic valve; when there is no spring, and both the first air inlet and outlet ports and the second air inlet and outlet ports are connected to the air source, the diaphragm valve is a double pneumatic valve. Therefore, the chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to the needs of use. One valve can be used for multiple purposes and has strong versatility. In addition, the valve core and the piston are connected in an integral structure, which can avoid the phenomenon that the valve core is over-pressurized and wear out, and improve the service life of the valve core.

Further, the bottom wall of the valve cavity is integrally formed with a sealing hollow column, a side wall of the sealing hollow column is provided with a communication hole, and the medium inlet pipe communicates with the interior of the sealing hollow column through the communication hole, so The upper port of the sealing hollow column is communicated with the valve cavity, the upper end surface of the sealing hollow column is a sealing surface, and the bottom end surface of the valve core is in contact with or disconnected from the sealing surface.

The beneficial effect of the above technical solution is that the chemical medium enters the valve cavity through the medium inlet, the communication hole and the sealed hollow column, and finally flows out of the valve body through the medium outlet. When the valve core blocks the valve cavity, the piston acts on the air pressure. Move down and down, drive the valve core to move down together, the bottom end face of the valve core is in contact with the sealing surface, thus blocking the valve cavity, at this time, the diaphragm valve is in a closed state, and the medium does not flow; when the piston moves up under the action of air pressure , drive the valve core to move up together, and the bottom end surface of the valve core is disconnected from the sealing surface, thereby conducting the valve cavity. At this time, the diaphragm valve is in an open state.

Further, the valve core includes:

a core body, the top end of the core body is detachably connected with the bottom end of the piston, and the bottom end surface of the core body is in contact with or disconnected from the sealing surface;

an elastic diaphragm, the inner side of the elastic diaphragm is integrally connected to the outer surface of the core body;

A crimping ring, the inner side of the crimping ring and the outer side of the elastic diaphragm are integrally formed, and the crimping ring is crimped between the valve body and the cylinder barrel.

The beneficial effect of the above technical solution is that the elastic diaphragm has a certain elasticity, so the piston can drive the core body to move up and down, so as to realize the opening or conduction of the valve cavity.

Further, the top end of the valve body is provided with an annular clamping flange, the bottom end surface of the crimping ring is provided with an annular clamping groove, and the annular clamping groove is engaged with the annular clamping flange. An annular positioning flange is integrally formed on the bottom end surface of the cylinder barrel, an annular positioning groove is formed on the top surface of the crimping ring, and the annular positioning flange is snap-fitted with the annular positioning groove.

The beneficial effect of the above technical solution is that the annular clamping groove and the annular clamping flange are clamped and matched, and the annular positioning flange is clamped and matched with the annular positioning groove, which is beneficial for the cylinder barrel to quickly and stably crimp the valve core. On the valve body, avoid movement of the spool.

Further, a guide cylinder is integrally formed on the bottom wall of the piston cavity, and the piston includes:

a piston disc, the piston disc is placed in the piston cavity;

A guide column, one end of the guide column is integrally formed with the bottom end of the piston disc, the other end of the guide column is penetrated in the guide cylinder, and is threadedly connected with the top end of the core body, and the two ends of the spring are respectively sleeved It is arranged on the guide column and the guide cylinder.

The beneficial effect of the above technical solution is that when the piston moves up and down, the guide column can move up and down in the guide cylinder, so the guide cylinder plays a positioning and guiding role for the piston, that is, the stability of the piston moving up and down is improved, thereby ensuring the core The position of the bottom end surface of the body and the sealing surface can correspond in real time to ensure that the valve cavity can be normally conducted or closed.

Further, a first sealing ring installation groove is opened on the outer peripheral wall of the piston disc, a first sealing ring is installed in the first sealing ring installation groove, and a second sealing ring is installed on the outer column wall of the guide column. A second sealing ring is installed in the second sealing ring installation groove, and a sealing ring sleeve tube is integrally formed on the bottom end of the top cover on the outer peripheral side of the accommodating cavity, and a sealing ring sleeve sleeve is sleeved on the sealing ring sleeve tube. There is a third sealing ring.

The beneficial effect of adopting the above technical scheme is that the sealing performance of the diaphragm valve is improved and the leakage of chemical medium is avoided.

Further, the base, the valve body, the cylinder barrel and the top cover are fixedly connected by a plurality of connecting screw assemblies.

Further, each of the connecting screw assemblies includes:

a connecting nut, the connecting nut is placed inside the base;

a connecting screw, which is successively penetrated through the top cover, the cylinder barrel, and the through hole on the valve body and then connected to the connecting nut in a screw connection;

a cap, the cap is connected to the through hole on the top cover, and is located above the head end of the connecting screw.

The beneficial effect of adopting the above technical solution is that the diaphragm valve can be disassembled and assembled, and the arrangement of the cap can avoid leakage of the head end of the connecting screw, and improve the overall aesthetics of the diaphragm valve.

Further, it also includes:

a connecting nut, there are two connecting nuts, which are respectively connected with the medium inlet pipe and the medium outlet pipe by screw connection, and a plurality of clamping strips are integrally formed on the outer wall of the connecting nut;

There are two anti-loosening rings, which are respectively sleeved on the medium inlet pipe and the medium outlet pipe, and a plurality of anti-loosening gaps are evenly distributed on the anti-loosening rings. The end of the connecting bar is plug-connected with the anti-loosening notch.

The beneficial effect of adopting the above technical solution is that, after the take-over nut is screwed onto the medium inlet pipe or medium outlet pipe, the end of the clamping strip is inserted and matched with the anti-loosening notch, which effectively prevents the take-over nut from loosening and achieves anti-loosening. The purpose is to ensure the reliability of the connection between the medium pipeline and the diaphragm valve.

Further, the material of the diaphragm valve is PTFE or PFA.

The beneficial effect of adopting the above technical solution is that the diaphragm valve is made of plastic as a whole, which effectively avoids the situation of being corroded by chemical medium during operation.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to the provided drawings without creative work.

1 is a schematic structural diagram of a chemical pneumatic diaphragm valve provided by the present invention.

FIG. 2 is a schematic diagram of the exploded structure of FIG. 1 .

Figure 3 is a schematic diagram of the structure of the spring when the spring is in the accommodating cavity.

Figure 4 is a schematic diagram of the structure of the spring in the piston cavity.

FIG. 5 is an enlarged schematic view of the structure of part A in FIG. 2 .

FIG. 6 is an enlarged schematic view of the structure of part B in FIG. 3 .

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Referring to FIG. 1 to FIG. 6 , an embodiment of the present invention discloses a chemical pneumatic diaphragm valve, including:

base 1;

Valve body 2, the bottom end of the valve body 2 is fixed on the top of the base 1, the valve body 2 is provided with a valve cavity 201 for medium circulation, and the two sides of the valve body 2 are integrally formed with a medium inlet pipe 21 and a medium outlet pipe 22, the medium Both the inlet pipe 21 and the medium outlet pipe 22 communicate with the valve cavity 201;

The cylinder barrel 3, the bottom end of the cylinder barrel 3 is fixed on the top end of the valve body 2, a piston cavity 301 is arranged inside the cylinder barrel 3, and a first air inlet and outlet port 302 communicated with the piston cavity 301 is arranged on a side wall of the cylinder barrel 3;

The top cover 4, the bottom end of the top cover 4 is fixed on the top end of the cylinder barrel 3, the bottom end of the top cover 4 is provided with an accommodating cavity 401, and a side wall of the top cover 4 is provided with a second air inlet and outlet port 402 communicating with the accommodating cavity 401;

The valve core 5, the valve core 5 is crimped between the valve body 2 and the cylinder barrel 3, and the valve core 5 moves up and down to block or connect the valve cavity 201;

Piston 6, the piston 6 is arranged in the piston cavity 301, and the bottom end of the piston 6 is detachably connected with the top end of the valve core 5;

The spring 7 is arranged between the top wall of the accommodating chamber 401 and the top end of the piston 6 , or the spring 7 is arranged between the bottom of the piston 6 and the bottom wall of the piston chamber 301 .

The bottom wall of the valve cavity 201 is integrally formed with a sealing hollow column 202, a side wall of the sealing hollow column 202 is provided with a communication hole 2021, the medium inlet pipe 21 is communicated with the interior of the sealing hollow column 202 through the communication hole 2021, and the upper port of the sealing hollow column 202 is connected to the inside of the sealing hollow column 202. The valve cavity 201 is in communication, the upper end surface of the sealing hollow column 202 is the sealing surface, and the bottom end surface of the valve core 5 is in contact with or disconnected from the sealing surface.

Spool 5 includes:

The core body 51, the top end of the core body 51 is detachably connected with the bottom end of the piston 6, and the bottom end surface of the core body 51 is in contact with or disconnected from the sealing surface;

The elastic diaphragm 52, the inner side of the elastic diaphragm 52 is integrally connected to the outer surface of the core body 51;

The crimping ring 53 is integrally formed with the inner side of the crimping ring 53 and the outer side of the elastic diaphragm 52 , and the crimping ring 53 is crimped between the valve body 2 and the cylinder barrel 3 .

The top end of the valve body 2 is provided with an annular clamping flange 203, the bottom end surface of the crimping ring 53 is provided with an annular clamping groove 531, and the annular clamping groove 531 is engaged with the annular clamping flange 203; An annular positioning flange 303 is integrally formed on the end surface, an annular positioning groove 532 is formed on the top surface of the crimping ring 53 , and the annular positioning flange 303 is snap-fitted with the annular positioning groove 532 .

A guide cylinder 304 is integrally formed on the bottom wall of the piston cavity 301, and the piston 6 includes:

The piston disc 61, the piston disc 61 is placed in the piston cavity 301;

The guide column 62, one end of the guide column 62 is integrally formed with the bottom end of the piston disc 61, the other end of the guide column 62 is penetrated in the guide cylinder 304, and is threadedly connected with the top end of the core body 51, and the two ends of the spring 7 are respectively sleeved on the guide column 62. and guide cylinder 304.

A first sealing ring installation groove 611 is opened on the outer peripheral wall of the piston disc 61, the first sealing ring 8 is installed in the first sealing ring installation groove 611, and a second sealing ring installation groove 621 is opened on the outer column wall of the guide column 62. The second sealing ring 9 is installed in the second sealing ring installation groove 621 , and a sealing ring sleeve 403 is integrally formed on the bottom end of the top cover 4 on the outer peripheral side of the accommodating cavity 401 , and a third sealing ring is sleeved on the sealing ring sleeve 403 10.

The base 1 , the valve body 2 , the cylinder barrel 3 and the top cover 4 are fixedly connected by a plurality of connecting screw assemblies 11 .

Each connecting screw assembly 11 includes:

connecting nut 111, the connecting nut 111 is placed inside the base 1;

Connecting screw 112, the connecting screw 112 is successively penetrated through the holes on the top cover 4, the cylinder barrel 3, and the valve body 2, and then is screwed and connected with the connecting nut 111;

The cover cap 113 is covered and connected to the through hole on the top cover 4 and is located above the head end of the connecting screw 112 .

Chemical-pneumatic diaphragm valves also include:

Take-over nut 12, there are two take-over nuts 12, which are respectively connected with the medium inlet pipe 21 and the medium outlet pipe 22 by screw connection, and a plurality of clamping strips 121 are integrally formed on the outer wall of the take-over nut 12;

There are two anti-loosening rings 13, which are respectively sleeved on the medium inlet pipe 21 and the medium outlet pipe 22. The anti-loosening ring 13 is evenly provided with a plurality of anti-loosening gaps 131, and the end of the clamping strip 121 The part is plug-connected with the anti-loosening notch 131 .

Diaphragm valve material is PTFE or PFA.

The chemical pneumatic diaphragm valve of the present invention has universality, that is, when the spring is arranged in the accommodating cavity, and the first air inlet and outlet ports are connected to the air source, and the second air inlet and outlet ports are not connected to the air source, the diaphragm valve is normally closed Single pneumatic valve (when the downward elastic force of the spring is greater than the air pressure provided by the first air inlet and outlet, the valve core is always in contact with the sealing surface under the action of the spring); when the spring is set in the piston cavity, and the second air inlet and outlet are connected Ventilation source, when the first air inlet and outlet ports are not connected to the air source, the diaphragm valve is a normally open single pneumatic valve (when the upward elastic force of the spring is greater than the air pressure provided by the second air inlet and outlet ports, the valve core is always in contact with the air supply under the action of the spring. The sealing surface is disconnected); when there is no spring, and both the first air inlet and outlet ports and the second air inlet and outlet ports are connected to the air source, the diaphragm valve is a double pneumatic valve. Therefore, the chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to the needs of use. One valve can be used for multiple purposes and has strong versatility. In addition, the valve core and the piston are connected in an integral structure, which can avoid the phenomenon that the valve core is over-pressurized and wear out, and improve the service life of the valve core. The whole diaphragm valve is made of PTFE or PFA plastic material, which effectively avoids being corroded by chemical media during operation. In addition, the chemical medium only contacts the valve body and the valve core, and the contact surface between the chemical medium and the diaphragm valve is small, which can reduce the possibility of contamination of the chemical medium, ensure the cleanliness of the chemical medium after passing through the diaphragm valve, and ensure the subsequent use effect of the chemical medium. , so that the diaphragm valve is mainly used in the semiconductor industry, as a liquid switch, such as pure water, sulfuric acid, nitric acid, etc., not only has strong corrosion resistance, but also has high cleanliness after the liquid passes through the diaphragm valve.

The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments can be referred to each other. As for the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the method.

The above description of the disclosed embodiments enables any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A chemical pneumatic diaphragm valve, comprising:

a base (1);

the bottom end of the valve body (2) is fixed to the top end of the base (1), a valve cavity (201) for medium circulation is formed in the valve body (2), a medium inlet pipe (21) and a medium outlet pipe (22) are respectively formed in two sides of the valve body (2) in an integrated mode, and the medium inlet pipe (21) and the medium outlet pipe (22) are communicated with the valve cavity (201);

the bottom end of the cylinder barrel (3) is fixed on the top end of the valve body (2), a piston cavity (301) is formed in the cylinder barrel (3), and a first air inlet and outlet interface (302) communicated with the piston cavity (301) is formed in one side wall of the cylinder barrel (3);

the bottom end of the top cover (4) is fixed on the top end of the cylinder barrel (3), an accommodating cavity (401) is formed in the bottom end of the top cover (4), and a second air inlet and outlet interface (402) communicated with the accommodating cavity (401) is formed in one side wall of the top cover (4);

the valve core (5), the said valve core (5) is pressed and connected between said valve block (2) and said cylinder barrel (3), and the said valve core (5) moves up and down and can block or connect the said valve chamber (201);

the piston (6) is arranged in the piston cavity (301), and the bottom end of the piston (6) is detachably connected with the top end of the valve core (5);

the spring (7) is arranged between the top wall of the containing cavity (401) and the top end of the piston (6), or the spring (7) is arranged between the bottom of the piston (6) and the bottom wall of the piston cavity (301).

2. The chemical pneumatic diaphragm valve according to claim 1, wherein a sealed hollow column (202) is integrally formed at the bottom wall of the valve cavity (201), a communication hole (2021) is formed in one side wall of the sealed hollow column (202), the medium inlet pipe (21) is communicated with the inside of the sealed hollow column (202) through the communication hole (2021), an upper port of the sealed hollow column (202) is communicated with the valve cavity (201), an upper end face of the sealed hollow column (202) is a sealing face, and a bottom end face of the valve core (5) is in contact with or disconnected from the sealing face.

3. A chemical pneumatic diaphragm valve according to claim 2, wherein the spool (5) comprises:

the top end of the core body (51) is detachably connected with the bottom end of the piston (6), and the bottom end surface of the core body (51) is in contact with or disconnected from the sealing surface;

an elastic diaphragm (52), the inner side of the elastic diaphragm (52) is integrally connected on the outer surface of the core body (51);

the inner side of the compression joint ring (53) and the outer side of the elastic diaphragm (52) are integrally formed, and the compression joint ring (53) is compressed between the valve body (2) and the cylinder barrel (3).

4. The chemical pneumatic diaphragm valve according to claim 3, wherein an annular clamping flange (203) is arranged at the top end of the valve body (2), an annular clamping groove (531) is formed in the bottom end face of the clamping ring (53), and the annular clamping groove (531) is in clamping fit with the annular clamping flange (203); an annular positioning flange (303) is integrally formed on the bottom end face of the cylinder barrel (3), an annular positioning groove (532) is formed in the top end face of the press connection ring (53), and the annular positioning flange (303) is in clamping fit with the annular positioning groove (532).

5. A chemical pneumatic diaphragm valve according to claim 3, wherein the bottom wall of the piston chamber (301) is integrally formed with a guide cylinder (304), and the piston (6) comprises:

a piston disc (61), the piston disc (61) being disposed within the piston cavity (301);

guide post (62), guide post (62) one end with piston dish (61) bottom integrated into one piece, the guide post (62) other end is worn to establish in guide cylinder (304), and with core (51) top threaded connection, spring (7) both ends are established respectively the guide post (62) with on the guide cylinder (304).

6. The chemical pneumatic diaphragm valve according to claim 5, wherein a first sealing ring installation groove (611) is formed in the outer peripheral wall of the piston disc (61), a first sealing ring (8) is installed in the first sealing ring installation groove (611), a second sealing ring installation groove (621) is formed in the outer column wall of the guide column (62), a second sealing ring (9) is installed in the second sealing ring installation groove (621), a sealing ring sleeve installation tube (403) is integrally formed on the outer peripheral side of the accommodating cavity (401) at the bottom end of the top cover (4), and a third sealing ring (10) is sleeved on the sealing ring sleeve installation tube (403).

7. A chemical pneumatic diaphragm valve according to claim 1, wherein the base (1), the valve body (2), the cylinder barrel (3) and the top cover (4) are fixedly connected by a plurality of connecting screw assemblies (11).

8. A chemical pneumatic diaphragm valve according to claim 7 wherein each of said connecting screw assemblies (11) includes:

the connecting screw cap (111), the said connecting screw cap (111) is placed inside the said base (1);

the connecting screw rod (112) is sequentially arranged on the top cover (4), the cylinder barrel (3) and the valve body (2) in a penetrating mode and then connected with the connecting nut (111) in a threaded mode;

and the cap (113) is covered in the through hole on the top cover (4) and positioned above the head end of the connecting screw rod (112).

9. A chemical pneumatic diaphragm valve according to any of claims 1 to 8 further comprising:

the device comprises two adapter nuts (12), wherein the adapter nuts (12) are respectively in threaded connection with the medium inlet pipe (21) and the medium outlet pipe (22), and a plurality of clamping strips (121) are integrally formed on the outer wall of the adapter nut (12);

anti-loosening ring (13), anti-loosening ring (13) are two, and overlap respectively admittedly medium inlet tube (21) with on medium outlet pipe (22), a plurality of locking breachs (131) have been seted up to the equipartition on anti-loosening ring (13), joint strip (121) tip with locking breach (131) plug-in connection.

10. A chemical pneumatic diaphragm valve according to any of claims 1 to 8, in which the diaphragm valve material is PTFE or PFA.

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