CN114321436A - Chemical pneumatic diaphragm valve - Google Patents
Chemical pneumatic diaphragm valve Download PDFInfo
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- CN114321436A CN114321436A CN202210087145.4A CN202210087145A CN114321436A CN 114321436 A CN114321436 A CN 114321436A CN 202210087145 A CN202210087145 A CN 202210087145A CN 114321436 A CN114321436 A CN 114321436A
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Abstract
The invention discloses a chemical pneumatic diaphragm valve, which comprises: a base; the bottom end of the valve body is fixed on the top end of the base, a valve cavity for medium circulation is arranged in the valve body, and a medium inlet pipe and a medium outlet pipe are respectively and integrally formed on two sides of the valve body; the bottom end of the cylinder barrel is fixed on the top end of the valve body, a piston cavity is arranged in the cylinder barrel, and a first air inlet and outlet interface is arranged on one side wall of the cylinder barrel; the bottom end of the top cover is fixed on the top end of the cylinder barrel, the bottom end of the top cover is provided with an accommodating cavity, and a second air inlet and outlet port is formed in one side wall of the top cover; a valve core which is pressed between the valve body and the cylinder barrel; the piston is arranged in the piston cavity, and the bottom end of the piston is detachably connected with the top end of the valve core; and the spring is arranged between the top wall of the accommodating cavity and the top end of the piston, or the spring is arranged between the bottom of the piston and the bottom wall of the piston cavity. The chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to use requirements, one valve can be multipurpose, and the universality is high.
Description
Technical Field
The invention relates to the technical field of fluid block valves, in particular to a chemical pneumatic diaphragm valve which is mainly applied to the semiconductor industry and used as a liquid switch, such as pure water, sulfuric acid, nitric acid and the like.
Background
At present, the existing pneumatic diaphragm valve generally has a normally open single pneumatic mode, a normally closed single pneumatic mode and a double pneumatic mode, but the three modes are not universal and inconvenient to use; moreover, the existing pneumatic diaphragm valve is generally made of metal materials, and when the diaphragm valve is used for connecting and blocking chemical substances, particularly acidic solutions, the diaphragm valve is easy to corrode, so that the service life of the diaphragm valve is shortened; and the elastic diaphragm on the current pneumatic diaphragm valve is an independent part, and the elastic diaphragm is easy to be excessively pressed to cause loss, so that the service life of the elastic diaphragm is short.
Therefore, how to provide a general-purpose, long-life chemical pneumatic diaphragm valve is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of this, the invention provides a universal chemical pneumatic diaphragm valve with long service life.
In order to achieve the purpose, the invention adopts the following technical scheme:
a chemical-pneumatic diaphragm valve comprising:
a base;
the bottom end of the valve body is fixed on the top end of the base, a valve cavity for medium circulation is formed in the valve body, a medium inlet pipe and a medium outlet pipe are respectively and integrally formed on two sides of the valve body, and the medium inlet pipe and the medium outlet pipe are both communicated with the valve cavity;
the bottom end of the cylinder barrel is fixed on the top end of the valve body, a piston cavity is arranged in the cylinder barrel, and a first air inlet and outlet port communicated with the piston cavity is arranged on one side wall of the cylinder barrel;
the bottom end of the top cover is fixed on the top end of the cylinder barrel, an accommodating cavity is formed in the bottom end of the top cover, and a second air inlet and outlet port communicated with the accommodating cavity is formed in one side wall of the top cover;
the valve core is pressed between the valve body and the cylinder barrel in a pressing mode, and the valve core can block or communicate the valve cavity by moving up and down;
the piston is arranged in the piston cavity, and the bottom end of the piston is detachably connected with the top end of the valve core;
the spring is arranged between the top wall of the containing cavity and the top end of the piston, or the spring is arranged between the bottom of the piston and the bottom wall of the piston cavity.
According to the technical scheme, compared with the prior art, the invention discloses the chemical pneumatic diaphragm valve, when the spring is arranged in the accommodating cavity, the first air inlet and outlet interface is communicated with an air source, and the second air inlet and outlet interface is not communicated with the air source, the diaphragm valve is a normally closed single pneumatic valve; when the spring is arranged in the piston cavity, the second air inlet and outlet interface is communicated with an air source, and the first air inlet and outlet interface is not communicated with the air source, the diaphragm valve is a normally open single pneumatic valve; when the spring is not provided and the first air inlet and outlet interface and the second air inlet and outlet interface are both communicated with the air source, the diaphragm valve is a double pneumatic valve. Therefore, the chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to the use requirements, one valve can be used for multiple purposes, and the universality is high. And the valve core and the piston are connected into an integral structure, so that the phenomenon that the valve core is excessively pressed and is lost can be avoided, and the service life of the valve core is prolonged.
Furthermore, a sealed hollow column is integrally formed on the bottom wall of the valve cavity, a communication hole is formed in one side wall of the sealed hollow column, the medium inlet pipe is communicated with the inside of the sealed hollow column through the communication hole, an upper port of the sealed hollow column is communicated with the valve cavity, the upper end face of the sealed hollow column is a sealing face, and the bottom end face of the valve core is in contact with or disconnected from the sealing face.
The technical scheme has the beneficial effects that chemical media enter the valve cavity through the media inlet, the communication hole and the sealed hollow column and finally flow out of the valve body through the media outlet, when the valve cavity is blocked by the valve core, the piston moves downwards under the action of air pressure to drive the valve core to move downwards together, the bottom end face of the valve core is contacted with the sealing surface, so that the valve cavity is blocked, and at the moment, the diaphragm valve is in a closed state, and the media do not circulate; when the piston moves upwards under the action of air pressure to drive the valve core to move upwards together, the bottom end face of the valve core is disconnected with the sealing surface, so that the valve cavity is switched on, and at the moment, the diaphragm valve is in an open state.
Further, the valve cartridge includes:
the top end of the core body is detachably connected with the bottom end of the piston, and the bottom end surface of the core body is in contact with or disconnected from the sealing surface;
an elastic diaphragm, the inner side of the elastic diaphragm is integrally connected to the outer surface of the core body;
the inner side of the compression joint ring and the outer side of the elastic diaphragm are integrally formed, and the compression joint ring is connected between the valve body and the cylinder barrel in a compression joint mode.
The beneficial effect that adopts above-mentioned technical scheme to produce is that, the elasticity diaphragm has certain elasticity, therefore the piston can drive the core and reciprocate to realize opening or switching on of valve pocket.
Furthermore, an annular clamping flange is arranged at the top end of the valve body, an annular clamping groove is formed in the bottom end face of the compression joint ring, and the annular clamping groove is in clamping fit with the annular clamping flange; the cylinder barrel is characterized in that an annular positioning flange is integrally formed on the bottom end face of the cylinder barrel, an annular positioning groove is formed in the top end face of the compression joint ring, and the annular positioning flange is in clamping fit with the annular positioning groove.
Adopt the beneficial effect that above-mentioned technical scheme produced to be, annular joint recess and the cooperation of annular joint flange joint, annular positioning flange and the cooperation of annular positioning groove joint do benefit to the cylinder section of thick bamboo with the crimping that the case can be quick and firm on the valve body, avoid the removal of case.
Further, an integrated into one piece has the guide cylinder on the diapire in piston chamber, the piston includes:
a piston disc disposed within the piston chamber;
the guide post, guide post one end with piston dish bottom integrated into one piece, the guide post other end wears to establish in the guide cylinder, and with core top threaded connection, the spring both ends are established respectively the cover the guide post with on the guide cylinder.
The beneficial effect who adopts above-mentioned technical scheme to produce is that, when the piston reciprocated, the guide post can reciprocate in the guide cylinder, therefore the guide cylinder plays the location guide effect to the piston, has improved the stability that the piston reciprocated promptly to guaranteed that the bottom face of core can correspond in real time with sealed face position, guaranteed that the valve pocket can normally switch on or close.
Further, a first sealing ring mounting groove is formed in the peripheral wall of the piston disc, a first sealing ring is mounted in the first sealing ring mounting groove, a second sealing ring mounting groove is formed in the wall of the guide column outer column, a second sealing ring is mounted in the second sealing ring mounting groove, the top cover bottom is located on the peripheral side of the containing cavity, a sealing ring sleeve is integrally formed on the peripheral side of the containing cavity, and a third sealing ring is sleeved on the sealing ring sleeve.
The diaphragm valve has the beneficial effects that the sealing performance of the diaphragm valve is improved, and the leakage of a chemical medium is avoided.
Furthermore, the base, the valve body, the cylinder barrel and the top cover are fixedly connected through a plurality of connecting screw components.
Further, each of the connecting screw assemblies includes:
the connecting nut is arranged inside the base;
the connecting screw rod is sequentially arranged on the top cover, the cylinder barrel and the through holes in the valve body in a penetrating way and then is in threaded connection with the connecting nut;
and the cover cap is connected in the penetrating hole on the top cover and is positioned above the head end of the connecting screw rod.
Adopt the beneficial effect that above-mentioned technical scheme produced to make this diaphragm valve dismantled and assembled to the setting of block avoids connecting the hourglass of screw rod head end, improves the whole aesthetic property of diaphragm valve.
Further, the method also comprises the following steps:
the two adapter nuts are respectively in threaded connection with the medium inlet pipe and the medium outlet pipe, and a plurality of clamping strips are integrally formed on the outer wall of each adapter nut;
the anti-loosening ring comprises two anti-loosening rings, the anti-loosening rings are fixedly sleeved on the medium inlet pipe and the medium outlet pipe respectively, a plurality of anti-loosening notches are uniformly distributed on the anti-loosening rings, and the end parts of the clamping strips are connected with the anti-loosening notches in an inserted mode.
The beneficial effect who adopts above-mentioned technical scheme to produce is that, after the takeover nut was twisted on medium inlet tube or medium outlet pipe, joint strip tip and locking breach grafting cooperation have prevented effectively that the takeover nut from appearing not hard up, reach locking purpose, guarantee the reliability that medium pipeline and diaphragm valve are connected.
Furthermore, the diaphragm valve is made of PTFE or PFA.
The diaphragm valve has the beneficial effects that the diaphragm valve is integrally made of plastic, so that the situation that the diaphragm valve is corroded by a chemical medium during working is effectively avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a chemical pneumatic diaphragm valve according to the present invention.
Fig. 2 is a schematic exploded view of fig. 1.
Fig. 3 is a schematic structural diagram of the spring in the accommodating cavity.
Fig. 4 is a schematic structural diagram of a spring in a piston cavity.
Fig. 5 is an enlarged schematic view of the structure of the part a in fig. 2.
Fig. 6 is an enlarged schematic view of a part B in fig. 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 6, an embodiment of the present invention discloses a chemical pneumatic diaphragm valve, including:
a base 1;
the bottom end of the valve body 2 is fixed on the top end of the base 1, a valve cavity 201 for medium circulation is arranged in the valve body 2, a medium inlet pipe 21 and a medium outlet pipe 22 are respectively and integrally formed on two sides of the valve body 2, and the medium inlet pipe 21 and the medium outlet pipe 22 are both communicated with the valve cavity 201;
the bottom end of the cylinder barrel 3 is fixed on the top end of the valve body 2, a piston cavity 301 is arranged in the cylinder barrel 3, and a first air inlet and outlet interface 302 communicated with the piston cavity 301 is arranged on one side wall of the cylinder barrel 3;
the bottom end of the top cover 4 is fixed on the top end of the cylinder barrel 3, the bottom end of the top cover 4 is provided with an accommodating cavity 401, and a second air inlet and outlet interface 402 communicated with the accommodating cavity 401 is arranged on one side wall of the top cover 4;
the valve core 5 is pressed between the valve body 2 and the cylinder barrel 3, and the valve core 5 can block or communicate with the valve cavity 201 by moving up and down;
the piston 6 is arranged in the piston cavity 301, and the bottom end of the piston 6 is detachably connected with the top end of the valve core 5;
and a spring 7, wherein the spring 7 is arranged between the top wall of the accommodating cavity 401 and the top end of the piston 6, or the spring 7 is arranged between the bottom of the piston 6 and the bottom wall of the piston cavity 301.
The bottom wall of the valve cavity 201 is integrally formed with a sealed hollow column 202, one side wall of the sealed hollow column 202 is provided with a communication hole 2021, the medium inlet pipe 21 is communicated with the inside of the sealed hollow column 202 through the communication hole 2021, the upper end port of the sealed hollow column 202 is communicated with the valve cavity 201, the upper end surface of the sealed hollow column 202 is a sealing surface, and the bottom end surface of the valve core 5 is in contact with or disconnected from the sealing surface.
The spool 5 includes:
a core body 51, wherein the top end of the core body 51 is detachably connected with the bottom end of the piston 6, and the bottom end surface of the core body 51 is contacted with or disconnected from the sealing surface;
an elastic diaphragm 52, the inner side of the elastic diaphragm 52 is integrally connected to the outer surface of the core body 51;
the pressure ring 53, the inner side of the pressure ring 53 and the outer side of the elastic diaphragm 52 are integrally formed, and the pressure ring 53 is pressed between the valve body 2 and the cylinder tube 3.
The top end of the valve body 2 is provided with an annular clamping flange 203, the bottom end face of the compression joint ring 53 is provided with an annular clamping groove 531, and the annular clamping groove 531 is in clamping fit with the annular clamping flange 203; an annular positioning flange 303 is integrally formed on the bottom end face of the cylinder barrel 3, an annular positioning groove 532 is formed in the top end face of the compression joint ring 53, and the annular positioning flange 303 is in clamping fit with the annular positioning groove 532.
A guide cylinder 304 is integrally formed on the bottom wall of the piston chamber 301, and the piston 6 includes:
a piston disc 61, the piston disc 61 being disposed in the piston chamber 301;
and one end of the guide column 62 and the bottom end of the piston disc 61 are integrally formed, the other end of the guide column 62 is arranged in the guide cylinder 304 in a penetrating manner and is in threaded connection with the top end of the core body 51, and two ends of the spring 7 are respectively sleeved on the guide column 62 and the guide cylinder 304.
First sealing washer mounting groove 611 has been seted up on the piston disc 61 periphery wall, installs first sealing washer 8 in the first sealing washer mounting groove 611, has seted up second sealing washer mounting groove 621 on the outer column wall of guide post 62, installs second sealing washer 9 in the second sealing washer mounting groove 621, and the periphery side integrated into one piece that lies in holding chamber 401 in the top cap 4 bottom is equipped with a sealing washer cover and establishes a section of thick bamboo 403, and the cover is equipped with third sealing washer 10 on the sealing washer cover establishes a section of thick bamboo 403.
The base 1, the valve body 2, the cylinder barrel 3 and the top cover 4 are fixedly connected through a plurality of connecting screw components 11.
Each connecting screw assembly 11 includes:
the connecting screw cap 111, the connecting screw cap 111 is placed inside the base 1;
the connecting screw rod 112 is connected with the connecting screw cap 111 in a threaded manner after the connecting screw rod 112 sequentially penetrates through the through holes in the top cover 4, the cylinder barrel 3 and the valve body 2;
and the cap 113 is covered in the through hole on the top cover 4, and is positioned above the head end of the connecting screw rod 112.
The chemical pneumatic diaphragm valve further comprises:
the number of the connecting pipe screw caps 12 is two, the connecting pipe screw caps 12 are respectively in threaded connection with the medium inlet pipe 21 and the medium outlet pipe 22, and a plurality of clamping strips 121 are integrally formed on the outer wall of the connecting pipe screw cap 12;
the number of the anti-loosening rings 13 is two, the anti-loosening rings 13 are fixedly sleeved on the medium inlet pipe 21 and the medium outlet pipe 22 respectively, a plurality of anti-loosening notches 131 are uniformly distributed on the anti-loosening rings 13, and the end parts of the clamping strips 121 are connected with the anti-loosening notches 131 in an inserted mode.
The diaphragm valve is made of PTFE or PFA.
The chemical pneumatic diaphragm valve has universality, namely when the spring is arranged in the accommodating cavity, the first air inlet and outlet port is communicated with an air source, and the second air inlet and outlet port is not communicated with the air source, the diaphragm valve is a normally closed single pneumatic valve (when the downward elastic force of the spring is greater than the air pressure provided by the first air inlet and outlet port, the valve core is always contacted with a sealing surface under the action of the spring); when the spring is arranged in the piston cavity, the second air inlet and outlet interface is communicated with an air source, and the first air inlet and outlet interface is not communicated with the air source, the diaphragm valve is a normally open single pneumatic valve (when the upward elastic force of the spring is greater than the air pressure provided by the second air inlet and outlet interface, the valve core is always disconnected with the sealing surface under the action of the spring); when the spring is not provided and the first air inlet and outlet interface and the second air inlet and outlet interface are both communicated with the air source, the diaphragm valve is a double pneumatic valve. Therefore, the chemical pneumatic diaphragm valve can be used as a normally closed single pneumatic valve, a normally open single pneumatic valve or a double pneumatic valve according to the use requirements, one valve can be used for multiple purposes, and the universality is high. And the valve core and the piston are connected into an integral structure, so that the phenomenon that the valve core is excessively pressed and is lost can be avoided, and the service life of the valve core is prolonged. The diaphragm valve is integrally made of PTFE or PFA plastic materials, so that the condition that the diaphragm valve is corroded by chemical media during working is effectively avoided. And the chemical medium only contacts with valve body and case, and the contact surface of chemical medium and diaphragm valve is little, and reducible chemical medium appears polluting the possibility, guarantees the cleanliness factor behind the diaphragm valve of chemical medium, guarantees the subsequent result of use of chemical medium for this diaphragm valve mainly uses in the semiconductor trade, uses as liquid switch, such as pure water, sulphuric acid, nitric acid etc. not only corrosion resistance is very strong, and liquid has very high cleanliness factor behind the diaphragm valve.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A chemical pneumatic diaphragm valve, comprising:
a base (1);
the bottom end of the valve body (2) is fixed to the top end of the base (1), a valve cavity (201) for medium circulation is formed in the valve body (2), a medium inlet pipe (21) and a medium outlet pipe (22) are respectively formed in two sides of the valve body (2) in an integrated mode, and the medium inlet pipe (21) and the medium outlet pipe (22) are communicated with the valve cavity (201);
the bottom end of the cylinder barrel (3) is fixed on the top end of the valve body (2), a piston cavity (301) is formed in the cylinder barrel (3), and a first air inlet and outlet interface (302) communicated with the piston cavity (301) is formed in one side wall of the cylinder barrel (3);
the bottom end of the top cover (4) is fixed on the top end of the cylinder barrel (3), an accommodating cavity (401) is formed in the bottom end of the top cover (4), and a second air inlet and outlet interface (402) communicated with the accommodating cavity (401) is formed in one side wall of the top cover (4);
the valve core (5), the said valve core (5) is pressed and connected between said valve block (2) and said cylinder barrel (3), and the said valve core (5) moves up and down and can block or connect the said valve chamber (201);
the piston (6) is arranged in the piston cavity (301), and the bottom end of the piston (6) is detachably connected with the top end of the valve core (5);
the spring (7) is arranged between the top wall of the containing cavity (401) and the top end of the piston (6), or the spring (7) is arranged between the bottom of the piston (6) and the bottom wall of the piston cavity (301).
2. The chemical pneumatic diaphragm valve according to claim 1, wherein a sealed hollow column (202) is integrally formed at the bottom wall of the valve cavity (201), a communication hole (2021) is formed in one side wall of the sealed hollow column (202), the medium inlet pipe (21) is communicated with the inside of the sealed hollow column (202) through the communication hole (2021), an upper port of the sealed hollow column (202) is communicated with the valve cavity (201), an upper end face of the sealed hollow column (202) is a sealing face, and a bottom end face of the valve core (5) is in contact with or disconnected from the sealing face.
3. A chemical pneumatic diaphragm valve according to claim 2, wherein the spool (5) comprises:
the top end of the core body (51) is detachably connected with the bottom end of the piston (6), and the bottom end surface of the core body (51) is in contact with or disconnected from the sealing surface;
an elastic diaphragm (52), the inner side of the elastic diaphragm (52) is integrally connected on the outer surface of the core body (51);
the inner side of the compression joint ring (53) and the outer side of the elastic diaphragm (52) are integrally formed, and the compression joint ring (53) is compressed between the valve body (2) and the cylinder barrel (3).
4. The chemical pneumatic diaphragm valve according to claim 3, wherein an annular clamping flange (203) is arranged at the top end of the valve body (2), an annular clamping groove (531) is formed in the bottom end face of the clamping ring (53), and the annular clamping groove (531) is in clamping fit with the annular clamping flange (203); an annular positioning flange (303) is integrally formed on the bottom end face of the cylinder barrel (3), an annular positioning groove (532) is formed in the top end face of the press connection ring (53), and the annular positioning flange (303) is in clamping fit with the annular positioning groove (532).
5. A chemical pneumatic diaphragm valve according to claim 3, wherein the bottom wall of the piston chamber (301) is integrally formed with a guide cylinder (304), and the piston (6) comprises:
a piston disc (61), the piston disc (61) being disposed within the piston cavity (301);
guide post (62), guide post (62) one end with piston dish (61) bottom integrated into one piece, the guide post (62) other end is worn to establish in guide cylinder (304), and with core (51) top threaded connection, spring (7) both ends are established respectively the guide post (62) with on the guide cylinder (304).
6. The chemical pneumatic diaphragm valve according to claim 5, wherein a first sealing ring installation groove (611) is formed in the outer peripheral wall of the piston disc (61), a first sealing ring (8) is installed in the first sealing ring installation groove (611), a second sealing ring installation groove (621) is formed in the outer column wall of the guide column (62), a second sealing ring (9) is installed in the second sealing ring installation groove (621), a sealing ring sleeve installation tube (403) is integrally formed on the outer peripheral side of the accommodating cavity (401) at the bottom end of the top cover (4), and a third sealing ring (10) is sleeved on the sealing ring sleeve installation tube (403).
7. A chemical pneumatic diaphragm valve according to claim 1, wherein the base (1), the valve body (2), the cylinder barrel (3) and the top cover (4) are fixedly connected by a plurality of connecting screw assemblies (11).
8. A chemical pneumatic diaphragm valve according to claim 7 wherein each of said connecting screw assemblies (11) includes:
the connecting screw cap (111), the said connecting screw cap (111) is placed inside the said base (1);
the connecting screw rod (112) is sequentially arranged on the top cover (4), the cylinder barrel (3) and the valve body (2) in a penetrating mode and then connected with the connecting nut (111) in a threaded mode;
and the cap (113) is covered in the through hole on the top cover (4) and positioned above the head end of the connecting screw rod (112).
9. A chemical pneumatic diaphragm valve according to any of claims 1 to 8 further comprising:
the device comprises two adapter nuts (12), wherein the adapter nuts (12) are respectively in threaded connection with the medium inlet pipe (21) and the medium outlet pipe (22), and a plurality of clamping strips (121) are integrally formed on the outer wall of the adapter nut (12);
anti-loosening ring (13), anti-loosening ring (13) are two, and overlap respectively admittedly medium inlet tube (21) with on medium outlet pipe (22), a plurality of locking breachs (131) have been seted up to the equipartition on anti-loosening ring (13), joint strip (121) tip with locking breach (131) plug-in connection.
10. A chemical pneumatic diaphragm valve according to any of claims 1 to 8, in which the diaphragm valve material is PTFE or PFA.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210087145.4A CN114321436A (en) | 2022-01-25 | 2022-01-25 | Chemical pneumatic diaphragm valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210087145.4A CN114321436A (en) | 2022-01-25 | 2022-01-25 | Chemical pneumatic diaphragm valve |
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| Publication Number | Publication Date |
|---|---|
| CN114321436A true CN114321436A (en) | 2022-04-12 |
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ID=81028734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210087145.4A Pending CN114321436A (en) | 2022-01-25 | 2022-01-25 | Chemical pneumatic diaphragm valve |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117267408A (en) * | 2023-11-23 | 2023-12-22 | 海普瑞(常州)洁净系统科技有限公司 | Zero dead water bypass valve for semiconductor manufacturing |
-
2022
- 2022-01-25 CN CN202210087145.4A patent/CN114321436A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117267408A (en) * | 2023-11-23 | 2023-12-22 | 海普瑞(常州)洁净系统科技有限公司 | Zero dead water bypass valve for semiconductor manufacturing |
| CN117267408B (en) * | 2023-11-23 | 2024-02-09 | 海普瑞(常州)洁净系统科技有限公司 | Zero dead water bypass valve for semiconductor manufacturing |
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Effective date of registration: 20221104 Address after: 200135 building C, No.888, Huanhu West 2nd Road, Lingang New District, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Xingqi (Shanghai) Semiconductor Co.,Ltd. Address before: 101111 1369, floor 13, building 2, yard 38, Kechuang Fifth Street, economic and Technological Development Zone, Daxing District, Beijing Applicant before: Xingqi Technology (Beijing) Co.,Ltd. |