CN114318294A - High-pressure washing device for vapor deposition equipment parts - Google Patents
High-pressure washing device for vapor deposition equipment parts Download PDFInfo
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- CN114318294A CN114318294A CN202210004032.3A CN202210004032A CN114318294A CN 114318294 A CN114318294 A CN 114318294A CN 202210004032 A CN202210004032 A CN 202210004032A CN 114318294 A CN114318294 A CN 114318294A
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Abstract
The invention belongs to the technical field of washing equipment, and particularly discloses a high-pressure washing device for vapor deposition equipment parts, which comprises a rack, a water outlet pipe and a connecting pipe, wherein a washing bin is arranged at the upper part of the rack, a water storage bin is arranged at the lower part of the rack, and a fixing unit and a washing unit are arranged in the washing bin; two ends of the connecting pipe are respectively communicated with the water washing unit and the water storage bin, and the connecting pipe is also provided with a pump body; a water outlet is arranged in the washing bin, a recovery part is arranged at the lower part of the frame, and the recovery part is communicated with the water outlet through a connecting pipe; the fixing unit comprises a base and a fixing piece, the fixing piece is arranged at the upper end of the base and used for fixing parts, and a driving part for driving the base to rotate is arranged at the lower end of the base. The high-pressure washing device can improve the high-pressure washing effect on the parts of the vapor deposition equipment, so that the vapor deposition equipment is cleaned more cleanly.
Description
Technical Field
The invention relates to the technical field of washing equipment, in particular to a high-pressure washing device for vapor deposition equipment parts.
Background
The vapor deposition technology is to change the surface components of a workpiece by utilizing the physical and chemical processes generated in vapor phase, and the surface has special properties. Vapor deposition equipment plays an important role in chemical vapor deposition processes, and directly affects the uniformity and purity of deposited films, the uniformity of film particle size, the rate of deposited films, and the like. The chemical vapor deposition apparatus generally includes a gas inlet device, a gas exhaust device, and a reactor in which a carrier for placing a substrate is disposed.
When the vapor deposition equipment is used, the requirement on the use condition is high, the tidiness of the whole vapor deposition equipment before use needs to be ensured, and in the production and maintenance processes, each part of the vapor deposition equipment needs to be cleaned separately to ensure that the vapor deposition equipment can meet the condition when in use.
For the washing of vapor deposition equipment spare part, all adopt the mode of high pressure washing at present to go on, but the direction that current high pressure water washing device goes out water is unchangeable mostly, and this partial position that only spare part can be sprayed by high pressure water when just leading to wasing, and the cleaning effect is not good.
Disclosure of Invention
The invention aims to provide a high-pressure washing device for vapor deposition equipment parts, which can improve the high-pressure washing effect on the vapor deposition equipment parts and enables the vapor deposition equipment parts to be washed more cleanly.
In order to achieve the above purpose, the basic scheme of the invention is as follows: a high-pressure washing device for vapor deposition equipment parts comprises a rack, a water outlet pipe and a connecting pipe, wherein a washing bin is arranged at the upper part of the rack, a water storage bin is arranged at the lower part of the rack, and a fixing unit and a washing unit are arranged in the washing bin; two ends of the connecting pipe are respectively communicated with the water washing unit and the water storage bin, and the connecting pipe is also provided with a pump body; a water outlet is arranged in the washing bin, a recovery part is arranged at the lower part of the rack, and the recovery part is communicated with the water outlet through a connecting pipe; the fixing unit comprises a base and a fixing piece, the fixing piece is arranged at the upper end of the base and used for fixing parts, and a driving part for driving the base to rotate is arranged at the lower end of the base; the driving part comprises a driving motor, a crank, a connecting rod, a gear, a connecting unit and a rack, an output shaft of the motor is hinged with one end of the crank, the other end of the crank is hinged with one end of the connecting rod, and the other end of the connecting rod is hinged with the rack; the rack is connected with the inner wall of the washing bin in a sliding manner; the rack is engaged with the gear, the gear is rotationally connected with the bottom wall of the washing bin, the gear is coaxially and fixedly connected with the connecting unit, and the connecting unit is fixedly connected with the base.
The basic scheme has the following working principle and beneficial effects: when the high-pressure deposition equipment for the parts of the vapor deposition equipment needs to be cleaned, the high-pressure washing equipment for the parts of the vapor deposition equipment to be cleaned is placed on the base in the washing bin, and the parts of the vapor deposition equipment can be washed after being fixed by the fixing piece. When washing, start the pump body, because the pump body is connected with the water source, so when starting the pump body, the pump body is gone into the connecting pipe with water pump and is made water enter into the cleaning unit from the connecting pipe and follow the cleaning unit blowout and wash vapor deposition equipment spare part. When water is sprayed out at high pressure, the driving motor is started, the motor rotates and drives the crank to rotate, and the crank is hinged with the end part of the connecting rod, so that the connecting rod is also driven to move when the crank rotates. And because one end of the connecting rod is hinged with the rack which is connected with the washing bin in a sliding way, when the crank drives the connecting rod to move, the connecting rod drives the rack to slide along the washing bin in a reciprocating way. And because the rack is meshed with the gear, when the rack slides in a reciprocating manner, the rack can drive the gear to rotate in a reciprocating manner, the connecting column which is coaxially connected with the gear can drive the base to rotate in a reciprocating manner, and parts fixed on the base can also rotate in a reciprocating manner along with the base. Thereby reach the effect of carrying out high pressure washing to each part of spare part, improve the clean rate of washing.
Water enters into the washing storehouse from the scavenge pipe blowout back and then flows into through the connecting pipe and retrieves in the storehouse and recycle, avoids the water waste.
Preferably, the washing unit comprises a plurality of washing parts, and the plurality of washing parts are arranged on the inner wall of the washing bin. Set up a plurality of washing portions and can carry out high pressure washing to spare part all around simultaneously, also can make each position of spare part more easily by the washing arrive when improving high pressure washing work efficiency, also improved the effect of washing.
Preferably, the washing part comprises a placing pipe, a cleaning pipe, an elastic membrane body and a plurality of connecting elastic connecting sheets, the placing pipe is connected with the inner wall of the washing bin, and the cleaning pipe is arranged in the placing pipe and is connected with the water outlet pipe; a plurality of elastic connection pieces evenly set up along scavenge pipe tip circumference and form the control tube, and the control tube is lived in the parcel of elastic membrane body, still is equipped with the regulating unit that can adjust control tube tip size in control tube circumference. When high-pressure water washing is carried out, water flow enters the cleaning pipe through the connecting pipe and then enters the adjusting pipe from the cleaning pipe. The elastic membrane body can prevent water from leaking out of the elastic connecting sheets, so that the water can only be sprayed out from the free end of the adjusting pipe. Can adjust the bore of control tube free end through the regulating unit at the washing in-process, when the bore of control tube free end diminishes, high pressure water washing spun rivers are thinner and the velocity of flow can be faster, can clean some turnings of spare part or the place that the aperture is little, can make the cleaning performance better fast moreover when the velocity of flow.
Preferably, the adjusting unit comprises an adjusting piece, the adjusting piece is provided with a through hole, and the adjusting piece is sleeved outside the adjusting pipe and is in sliding fit with the adjusting pipe. The caliber of the adjusting pipe can be changed by sliding the adjusting piece along the adjusting pipe, so that the adjusting pipe is suitable for different cleaning conditions.
Preferably, the through hole is in a truncated cone shape.
Preferably, the connecting unit comprises a driving rod, a connecting column and a nut, the outer wall of the driving rod is axially provided with threads, the driving rod penetrates through the nut and is in threaded fit with the nut, the lower end of the driving rod is in sliding connection with the connecting column, and the lower end of the driving rod is coaxially and fixedly connected with the gear; the driving rod can drive the connecting column to rotate when rotating, and the upper end of the driving rod is fixedly connected with the base. When the gear rotates in a reciprocating mode, the driving rod is driven to rotate in a reciprocating mode when the gear rotates because the driving rod is coaxially connected with the gear. And because the driving rod is provided with threads and the driving rod is in threaded fit with the nut, the driving rod can move up and down under the action of the nut while rotating in a reciprocating manner. That is to say what the screw rod was done is the combined motion that makes a round trip to reciprocate when making a round trip to rotate, and the screw rod also drives spare part through the base and is combined motion, makes each place on spare part not only the same plane can both be washd by high-pressure water flow and arrive, and each place on spare part is vertical in addition also can be washd by high-pressure water flow to make the cleaning performance of spare part better.
Preferably, the lower end of the driving rod is provided with a connecting groove with an oval cross section, and the cross section of the connecting column is oval and has the same shape as the cross section of the connecting groove. Therefore, the screw rod can reciprocate up and down and can drive the driving rod to rotate in a reciprocating manner through the connecting column.
Drawings
FIG. 1 is a schematic structural view of an embodiment of a high-pressure water washing apparatus for vapor deposition equipment components of the present invention;
FIG. 2 is a schematic structural view of a driving part in an embodiment of a high-pressure water washing apparatus for parts of a vapor deposition apparatus according to the present invention;
FIG. 3 is a schematic structural view of a water washing section in an embodiment of a high-pressure water washing apparatus for parts of a vapor deposition apparatus according to the present invention;
FIG. 4 is a schematic structural view of a regulating member in an embodiment of a high-pressure water washing apparatus for parts of a vapor deposition apparatus according to the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the device comprises a rack 1, a recovery box 2, a water storage bin 3, a pump body 4, a water outlet pipe 5, a water washing bin 6, a lower cavity 7, an upper cavity 8, a water washing unit 9, a base 10, a fixing piece 11, a water outlet 12, a connecting pipe 13, a partition plate 14, a speed reducer 15, a crank 16, a connecting rod 17, a sliding rail 18, a rack 19, a connecting column 20, a gear 21, a driving rod 22, a connecting groove 23, a nut 24, a placing pipe 25, a through groove 26, an adjusting rod 27, an adjusting piece 28, an elastic membrane body 29, a cleaning pipe 30 and an elastic connecting sheet 31.
Examples
This embodiment is substantially as shown in figure 1: a high-pressure washing device for vapor deposition equipment parts comprises a rack 1, a water outlet pipe 5 and a connecting pipe 13, wherein a washing bin 6 is arranged at the upper part of the rack 1, and a water storage bin 3 is arranged at the lower part of the rack 1. Specifically, the washing bin 6 is provided with a transverse partition plate 14, the partition plate 14 divides the washing bin 6 into an upper cavity 8 and a lower cavity 7, and a fixing unit and a washing unit 9 are arranged in the upper cavity 8 of the washing bin 6. Two ends of the connecting pipe 13 are respectively communicated with the water washing unit 9 and the water storage bin 3, the connecting pipe 13 is further provided with a pump body 4, and the pump body 4 adopted in the embodiment is a high-pressure water pump. The bottom surface of the lower chamber 7 in the washing bin 6 is provided with a water outlet 12, the lower part of the frame 1 is provided with a recovery part, the recovery part in the embodiment adopts a recovery box 2, and the recovery box 2 is communicated with the water outlet 12 through a connecting pipe 13.
The fixing unit includes a base 10 and a fixing member 11, the fixing member 11 is disposed at an upper end of the base 10 and is used for fixing the component, and a person skilled in the art can use a suitable fixing member 11 as required, such as a clamp, etc., which is known in the art and will not be described herein again. The lower end of the base 10 is provided with a driving part for driving the base 10 to rotate, and the driving part is positioned in the lower chamber 7. Specifically, as shown in fig. 2, the driving portion includes a driving motor, a speed reducer 15, a crank 16, a connecting rod 17, a gear 21, a connecting unit, and a rack 19, an output shaft of the motor is connected to an input end of the speed reducer 15, an output end of the speed reducer 15 is hinged to one end of the crank 16, the other end of the crank 16 is hinged to one end of the connecting rod 17 through a connecting pin, and the other end of the connecting rod 17 is hinged to an end of the rack 19 through a connecting pin. A support (not shown) is provided in the lower chamber 7, and a gear 21 is rotatably connected to the support. The rack 19 is connected with the lower chamber 7 of the inner wall of the washing bin 6 in a sliding way through a sliding rail 18; the rack 19 is engaged with a gear 21, and the gear 21 is coaxially and fixedly connected with the connecting unit. The connecting unit comprises a driving rod 22, a connecting column 20 and a nut 24, wherein threads are axially arranged on the outer wall of the driving rod 22, the driving rod 22 penetrates through the nut 24 and is in threaded fit with the nut 24, and the nut 24 is fixedly connected with the lower cavity 7. The lower end of the driving rod 22 is connected with the connecting column 20 in a sliding way, and the lower end of the driving rod 22 is coaxially and fixedly connected with the gear 21; the drive rod 22 rotates to drive the connecting column 20 to rotate. The lower end of the driving rod 22 is provided with a connecting groove 23 with an oval cross section, and the cross section of the connecting column 20 is oval and is the same as the cross section of the connecting groove 23. This allows the screw to reciprocate up and down while driving the driving rod 22 to rotate back and forth through the connecting column 20. The dividing plate 14 is also provided with bearings and sealing rings. The upper end of the driving rod 22 passes through the bearing and is fixedly connected with the base 10 through a screw, and the arrangement of the sealing ring can play a role in sealing, so that water flow is prevented from entering the lower chamber 7.
The adjusting unit comprises an adjusting piece 28 and an adjusting rod 27, the adjusting piece 28 is provided with a through hole, the through hole is in a circular truncated cone shape, the adjusting piece 28 is sleeved outside the adjusting pipe and is in sliding fit with the adjusting pipe, the placing pipe 25 is provided with a through groove 26, the adjusting rod 27 penetrates through the through groove 26 and is in sliding fit with the through groove 26, and the lower end of the adjusting rod 27 is fixedly connected with the adjusting ring.
The specific implementation process is as follows: when the high-pressure deposition equipment for the parts of the vapor deposition equipment needs to be cleaned, the high-pressure washing equipment for the parts of the vapor deposition equipment to be cleaned is placed on the base 10 in the washing bin 6, and the parts of the vapor deposition equipment can be washed after being fixed by the fixing piece 11. When the pump body 4 is started, and because the pump body 4 is connected with a water source, when the pump body 4 is started, the pump body 4 pumps water into the connecting pipe 13 and enables the water to enter the cleaning unit from the connecting pipe 13 and be sprayed out from the cleaning unit to clean the parts of the vapor deposition equipment. When the water is sprayed out under high pressure, the driving motor is started, the motor rotates and drives the crank 16 to rotate, and because the crank 16 is hinged with the end part of the connecting rod 17, the connecting rod 17 is also driven to move when the crank 16 rotates. And because one end of the connecting rod 17 is hinged with the rack 19, and the rack 19 is connected with the washing bin 6 in a sliding way, when the crank 16 drives the connecting rod 17 to move, the connecting rod 17 drives the rack 19 to slide along the washing bin 6 in a reciprocating way. And because the rack 19 is meshed with the gear 21, when the rack 19 slides back and forth, the rack can drive the gear 21 to rotate back and forth, the connecting column 20 coaxially connected with the gear 21 can drive the base 10 to rotate back and forth, and parts fixed on the base 10 can also rotate back and forth along with the base 10. Thereby reach the effect of carrying out high pressure washing to each part of spare part, improve the clean rate of washing. When the gear 21 rotates reciprocally, the driving rod 22 is driven to rotate reciprocally when the gear 21 rotates because the driving rod 22 is connected coaxially with the gear 21. Since the driving rod is provided with threads and the driving rod 22 is in threaded fit with the nut 24, the driving rod 22 can move up and down under the action of the nut 24 while rotating back and forth. That is to say that what the screw rod was done is the combined motion that reciprocates back and forth when making a round trip to rotate, and the screw rod also drives spare part through base 10 and makes combined motion, makes each place on spare part not only the same plane can both be washd by high-pressure water flow, and each place on spare part is vertical also can be washd by high-pressure water flow moreover to make the cleaning performance of spare part better.
When high-pressure water washing is performed, water flows into the cleaning pipe 30 through the connection pipe 13, and then flows into the adjustment pipe from the cleaning pipe 30. The elastic membrane 29 is arranged to prevent water from leaking between the elastic connecting pieces 31, so that water can only be sprayed out of the free end of the regulating tube. Thereby can move regulating part 28 through removing regulation pole 27 in the washing process, because the through-hole of regulating part 28 becomes the round platform form, so when removing regulating part 28 left, can adjust the bore of pipe free end, make the bore of adjusting pipe free end diminish, when the bore of adjusting pipe free end diminishes, high pressure water washing spun rivers are thinner and the velocity of flow can be faster, can clean some corners or the little place in aperture of spare part, moreover can make the cleaning performance better when the velocity of flow of rivers soon. The aperture of the adjustment tube can be varied by sliding the adjustment member 28 along the adjustment tube, thereby allowing for different cleaning situations.
Set up a plurality of washing portions and can carry out high pressure washing to spare part all around simultaneously, also can make each position of spare part more easily by the washing arrive when improving high pressure washing work efficiency, also improved the effect of washing. Water enters the washing bin 6 after being sprayed out from the cleaning pipe 30 and then flows into the recovery bin through the connecting pipe 13 for recovery and use, so that water resource waste is avoided.
Claims (7)
1. The utility model provides a vapor deposition equipment high pressure water washing device for spare part, includes frame, outlet pipe and connecting pipe, its characterized in that: a washing bin is arranged at the upper part of the rack, a water storage bin is arranged at the lower part of the rack, and a fixing unit and a washing unit are arranged in the washing bin; two ends of the connecting pipe are respectively communicated with the water washing unit and the water storage bin, and the connecting pipe is also provided with a pump body; a water outlet is arranged in the washing bin, a recovery part is arranged at the lower part of the rack, and the recovery part is communicated with the water outlet through a connecting pipe; the fixing unit comprises a base and a fixing piece, the fixing piece is arranged at the upper end of the base and used for fixing parts, and a driving part for driving the base to rotate is arranged at the lower end of the base; the driving part comprises a driving motor, a crank, a connecting rod, a gear, a connecting unit and a rack, an output shaft of the motor is hinged with one end of the crank, the other end of the crank is hinged with one end of the connecting rod, and the other end of the connecting rod is hinged with the rack; the rack is connected with the inner wall of the washing bin in a sliding manner; the rack is engaged with the gear, the gear is rotationally connected with the bottom wall of the washing bin, the gear is coaxially and fixedly connected with the connecting unit, and the connecting unit is fixedly connected with the base.
2. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 1, characterized in that: the washing unit includes washing portion, and the quantity of washing portion is a plurality of, and a plurality of washing portions set up at washing storehouse inner wall.
3. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 2, characterized in that: the washing part comprises a placing pipe, a cleaning pipe, an elastic membrane body and a plurality of connecting elastic connecting sheets, the placing pipe is connected with the inner wall of the washing bin, and the cleaning pipe is arranged in the placing pipe and is connected with a water outlet pipe; a plurality of elastic connection pieces evenly set up along scavenge pipe tip circumference and form the control tube, and the control tube is lived in the parcel of elastic membrane body, still is equipped with the regulating unit that can adjust control tube tip size in control tube circumference.
4. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 3, characterized in that: the adjusting unit comprises an adjusting piece, the adjusting piece is provided with a through hole, and the adjusting piece is sleeved outside the adjusting pipe and is in sliding fit with the adjusting pipe.
5. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 4, characterized in that: the through hole is in a circular truncated cone shape.
6. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 5, characterized in that: the connecting unit comprises a driving rod, a connecting column and a nut, wherein threads are axially arranged on the outer wall of the driving rod, the driving rod penetrates through the nut and is in threaded fit with the nut, the lower end of the driving rod is in sliding connection with the connecting column, and the lower end of the driving rod is coaxially and fixedly connected with the gear; the driving rod can drive the connecting column to rotate when rotating, and the upper end of the driving rod is fixedly connected with the base.
7. The high-pressure water washing apparatus for vapor deposition equipment parts according to claim 6, characterized in that: the lower end of the driving rod is provided with a connecting groove with an oval cross section, and the cross section of the connecting column is oval and is the same as the cross section of the connecting groove in shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210004032.3A CN114318294B (en) | 2022-01-04 | 2022-01-04 | High-pressure water washing device for vapor deposition equipment parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210004032.3A CN114318294B (en) | 2022-01-04 | 2022-01-04 | High-pressure water washing device for vapor deposition equipment parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114318294A true CN114318294A (en) | 2022-04-12 |
| CN114318294B CN114318294B (en) | 2023-09-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210004032.3A Active CN114318294B (en) | 2022-01-04 | 2022-01-04 | High-pressure water washing device for vapor deposition equipment parts |
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| Country | Link |
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| CN (1) | CN114318294B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU884989A1 (en) * | 1980-02-18 | 1981-11-30 | Московский Завод Шлифовальных Станков | Apparatus for feeding cutting fluid |
| KR20100007001U (en) * | 2008-12-30 | 2010-07-08 | 유완기 | Manual vegetables, fruits and dishwashers with cleaning agents. |
| CN108393314A (en) * | 2018-01-15 | 2018-08-14 | 扬州全球鹰机械制造有限公司 | One kind being based on auto parts and components inside pipe fitting cleaning device |
| CN112156409A (en) * | 2020-10-21 | 2021-01-01 | 南京德沃克自动化有限公司 | Variable flow injection device |
| CN212418857U (en) * | 2020-05-28 | 2021-01-29 | 天津双诚科技发展有限公司 | Washing formula electric motor car spare part processing is with self-cleaning equipment |
-
2022
- 2022-01-04 CN CN202210004032.3A patent/CN114318294B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU884989A1 (en) * | 1980-02-18 | 1981-11-30 | Московский Завод Шлифовальных Станков | Apparatus for feeding cutting fluid |
| KR20100007001U (en) * | 2008-12-30 | 2010-07-08 | 유완기 | Manual vegetables, fruits and dishwashers with cleaning agents. |
| CN108393314A (en) * | 2018-01-15 | 2018-08-14 | 扬州全球鹰机械制造有限公司 | One kind being based on auto parts and components inside pipe fitting cleaning device |
| CN212418857U (en) * | 2020-05-28 | 2021-01-29 | 天津双诚科技发展有限公司 | Washing formula electric motor car spare part processing is with self-cleaning equipment |
| CN112156409A (en) * | 2020-10-21 | 2021-01-01 | 南京德沃克自动化有限公司 | Variable flow injection device |
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| Publication number | Publication date |
|---|---|
| CN114318294B (en) | 2023-09-26 |
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