CN114310809A - Workpiece table moving-in and moving-out device and operating system - Google Patents

Workpiece table moving-in and moving-out device and operating system Download PDF

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Publication number
CN114310809A
CN114310809A CN202210112103.1A CN202210112103A CN114310809A CN 114310809 A CN114310809 A CN 114310809A CN 202210112103 A CN202210112103 A CN 202210112103A CN 114310809 A CN114310809 A CN 114310809A
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China
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connecting rod
workpiece
moving
workpiece table
driving mechanism
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CN202210112103.1A
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CN114310809B (en
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李龙飞
杨师
梅阳
侯得锋
李海彬
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The invention provides a workpiece table moving-in and moving-out device and an operating system, relates to the technical field of operating equipment, and aims to solve the problems that the operating space of a workpiece table is narrow and difficult to move in and out manually to a certain extent. The invention provides a workpiece table moving-in and moving-out device, which is used for an operating system and comprises a driving mechanism and a connecting rod mechanism; the connecting rod mechanism comprises a first connecting rod and a second connecting rod, the first end of the first connecting rod is connected with the driving mechanism, the second end of the first connecting rod is rotatably connected with one end of the second connecting rod, and one end of the second connecting rod, which is far away from the first connecting rod, extends into the working space of the working system and is connected with a workpiece table of the working system; the driving mechanism can drive the first connecting rod to rotate relative to the mounting mechanism by taking the first end as a rotation center so as to drive the second connecting rod to move and pull out part of the workpiece table from the operation space.

Description

Workpiece table moving-in and moving-out device and operating system
Technical Field
The invention relates to the technical field of operation equipment, in particular to a workpiece table moving-in and moving-out device and an operation system.
Background
In the semiconductor equipment with high integration level, the workpiece table is located in a narrow space when working, and in order to realize maintenance and repair of the workpiece table, the workpiece table needs to be moved out to an open space for further operation; after the maintenance, the workpiece table needs to be moved into the working position in a narrow space again.
However, the conventional workpiece table moving-in and moving-out mode is adopted, and the workpiece table moves along the groove or the guide rod in two directions in the horizontal plane by manpower, so that the workload is large, the efficiency is low, the speed of the workpiece table is uncontrollable, and the hidden danger of safety accidents caused by improper manual operation exists.
Therefore, it is desirable to provide a workpiece stage moving-in and moving-out device and an operating system, which can solve the problems of the prior art to some extent.
Disclosure of Invention
The invention aims to provide a workpiece table moving-in and moving-out device and an operating system, which aim to solve the problems that the working space of a workpiece table is narrow and difficult to move in and out manually to a certain extent.
The invention provides a workpiece table moving-in and moving-out device which is used for an operating system and comprises a driving mechanism and a connecting rod mechanism; the connecting rod mechanism comprises a first connecting rod and a second connecting rod, the first end of the first connecting rod is connected with the driving mechanism, the second end of the first connecting rod is rotatably connected with one end of the second connecting rod, and one end of the second connecting rod, which is far away from the first connecting rod, extends into the working space of the working system and is connected with a workpiece table of the working system; the driving mechanism can drive the first connecting rod to rotate relative to the driving mechanism by taking the first end as a rotation center so as to drive the second connecting rod to move and pull out part of the workpiece table from the working space.
The workpiece table moving-in and moving-out device further comprises an installation mechanism, and the connecting rod mechanism further comprises a third connecting rod and a fourth connecting rod; one end of the third connecting rod is rotatably connected with the position, close to the second connecting rod, of the first connecting rod, the other end of the third connecting rod is rotatably connected with one end of the fourth connecting rod, and one end, far away from the third connecting rod, of the fourth connecting rod is connected with the power end of the driving mechanism.
The workpiece table moving-in and moving-out device further comprises a first connecting piece, wherein the first connecting piece is used for connecting a base of the operating system and the workpiece table; the connecting position of the first connecting piece and the workpiece platform and the connecting position of the second connecting rod and the workpiece platform are simultaneously positioned on the same side of the axis of the workpiece platform in the first direction, so that the other side of the workpiece platform is a free end.
Furthermore, first connecting piece corresponds and is equipped with first disassembly body, first disassembly body can drive first connecting piece with the work piece platform is connected or the phase separation.
Specifically, the workpiece table moving-in and moving-out device provided by the invention further comprises a second connecting piece, wherein the second connecting piece is used for connecting the base and the workpiece table; the second connecting piece with the connected position of work piece platform with the second connecting rod with the connected position of work piece platform is located simultaneously work piece platform is in the same one side of the axis of second side, works as first connecting piece with when work piece platform phase separation, work piece platform can be relative the second connecting piece rotates.
Furthermore, the second connecting piece is correspondingly provided with a second disassembling mechanism, and the second disassembling mechanism can drive the second connecting piece to be connected with or separated from the workpiece table.
Furthermore, the first connecting piece, the second connecting piece and the workpiece table are in clearance fit.
Specifically, the first connecting piece and the second connecting piece are both bolts.
Further, the driving mechanism is a cylinder, a motor or a hand lever.
Compared with the prior art, the workpiece table moving-in and moving-out device provided by the invention has the following advantages:
the invention provides a workpiece table moving-in and moving-out device, which is used for an operating system and comprises a driving mechanism and a connecting rod mechanism; the connecting rod mechanism comprises a first connecting rod and a second connecting rod, the first end of the first connecting rod is connected with the driving mechanism, the second end of the first connecting rod is rotatably connected with one end of the second connecting rod, and one end of the second connecting rod, which is far away from the first connecting rod, extends into the working space of the working system and is connected with a workpiece table of the working system; the driving mechanism can drive the first connecting rod to rotate relative to the driving mechanism by taking the first end as a rotation center so as to drive the second connecting rod to move and pull out part of the workpiece table out of the operation space.
From the analysis, it can be known that the first end of the first connecting rod is rotatably connected with the mounting mechanism, the second end of the first connecting rod is rotatably connected with one end of the second connecting rod, and the other end of the second connecting rod extends into the working space and is rotatably connected with the workpiece table. Because the power end of the driving mechanism is connected with the first connecting rod, when the workpiece platform needs to be overhauled or the position covered by the workpiece platform needs to be overhauled, the power end of the driving mechanism acts to drive the first connecting rod to rotate relative to the driving mechanism by taking the first end as a rotation center, so that the second connecting rod can be driven to move, and the part of the workpiece platform can be pulled out of the operation space through the second connecting rod.
Then, the maintainer operates the position of the workpiece platform pulled out through other tools, so that the whole workpiece platform can be completely moved out of the working space, and in the process, the power end of the driving mechanism can be matched with the maintainer to simultaneously perform corresponding actions, so that the workpiece platform can be quickly and stably moved out of the working space.
After the overhaul is finished, the power end of the driving mechanism drives the first connecting rod to act in the opposite direction, so that the workpiece table can stretch into the operation space again, and the moving-out and moving-in operation of the workpiece table is finished.
In addition, the invention also provides an operating system which comprises a workpiece table, a base and the workpiece table moving-in and moving-out device; the workpiece table is arranged on the base and can move relative to the base.
By adopting the operation system of the workpiece table moving-in and moving-out device, as the end, far away from the first connecting rod, of the second connecting rod is rotatably connected with the workpiece table, partial gravity of the workpiece table can be borne by the second connecting rod, so that the friction force between the workpiece table and the base is reduced to a certain extent, and the workpiece table can smoothly move in and move out.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural view of a workpiece stage moving-in and moving-out apparatus according to an embodiment of the present invention in an initial state;
fig. 2 is a schematic structural view of the workpiece stage moving-in and moving-out apparatus according to the embodiment of the present invention in a first pulling state;
fig. 3 is a schematic structural view of the workpiece stage moving-in and moving-out apparatus in the second pulling state according to the embodiment of the present invention.
In the figure: 1-a first link; 101-a first end; 102-a second end; 2-a second link; 3-a third link; 4-a fourth link; 5-a workpiece table; 6-a base; 601-a first connection hole; 602-a second connection hole; 7-a first connector; 8-a second connector;
s1 — first direction; s2-second direction.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
In the description of the embodiments of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the products of the present invention are usually placed in when used, and are only used for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements indicated must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the embodiments of the present application, it should also be noted that, unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.
For ease of description, spatial relationship terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms also are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.
Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.
The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present application.
Example 1
As shown in fig. 1, the present invention provides a workpiece stage 5 moving-in and moving-out apparatus for a working system, including a mounting mechanism, a driving mechanism, and a link mechanism; the connecting rod mechanism comprises a first connecting rod 1 and a second connecting rod 2, a first end 101 of the first connecting rod 1 is rotatably connected with the mounting mechanism, a second end 102 of the first connecting rod 1 is rotatably connected with one end of the second connecting rod 2, and one end of the second connecting rod 2, which is far away from the first connecting rod 1, extends into the working space of the working system and is connected with a workpiece table 5 of the working system; the power end of the driving mechanism is connected with the first connecting rod 1, and the driving mechanism can drive the first connecting rod 1 to rotate relative to the driving mechanism by taking the first end 101 as a rotation center so as to drive the second connecting rod 2 to move and pull out part of the workpiece table 5 from the operation space.
Compared with the prior art, the workpiece table 5 moving-in and moving-out device provided by the invention has the following advantages:
according to the workpiece table 5 moving-in and moving-out device provided by the invention, the first end 101 of the first connecting rod 1 is rotatably connected with the mounting mechanism, the second end 102 is rotatably connected with one end of the second connecting rod 2, and the other end of the second connecting rod 2 extends into the working space and is rotatably connected with the workpiece table 5. Since the power end of the driving mechanism is connected to the first link 1, as described with reference to the direction shown in fig. 1, when the workpiece table 5 needs to be inspected or the position covered by the workpiece table 5 needs to be inspected, the power end of the driving mechanism operates to drive the first link 1 to rotate clockwise with respect to the mounting mechanism with the first end 101 as the rotation center, so that the second link 2 is driven to move, and thus the part of the workpiece table 5 can be pulled out of the working space by the second link 2.
Then, the maintainer operates the position of pulling out the workpiece platform 5 through other tools, so that the whole workpiece platform 5 can be completely moved out of the working space, and in the process, the power end of the driving mechanism can be matched with the maintainer to simultaneously perform corresponding action to control the first connecting rod 1 and the second connecting rod 2 to move out of the working space quickly and stably.
After the overhaul is finished, the power end of the driving mechanism drives the first connecting rod 1 to rotate anticlockwise in the opposite direction, so that the workpiece table 5 can move into the working space again, and the moving-out and moving-in operation of the workpiece table 5 is finished.
It should be noted that, in the present embodiment, the driving mechanism may be a motor, a telescopic cylinder, a hand lever, or the like, and when the driving mechanism is a motor, an output end of the motor is connected to the first end 101 of the first connecting rod 1, and when the output end of the motor rotates, the first connecting rod 1 can be driven to rotate with the first end 101 as a rotation center, so as to drive the second connecting rod 2 to move, and further, the workpiece stage 5 can be moved out.
When the driving mechanism is a telescopic cylinder or other structure with telescopic capability, the first end 101 of the first connecting rod 1 is connected with the mounting mechanism through a pin shaft or other structure, and the first connecting rod 1 can still rotate relative to the mounting mechanism by taking the first end 101 as a rotation center. The stiff end of flexible hydro-cylinder or telescopic cylinder rotates with installation mechanism to be connected, and flexible end rotates with the position that first end 101 was kept away from to first connecting rod 1 to through the flexible of flexible end, can drive the rotation of the relative installation mechanism of first connecting rod 1, thereby realize the removal of second connecting rod 2, and then can shift out workspace with work piece platform 5 through second connecting rod 2.
When the driving mechanism is a telescopic oil cylinder or a telescopic air cylinder, preferably, the telescopic end is rotatably connected with the second end 102 of the first connecting rod 1, and when the workpiece table 5 is completely located in the working space, the telescopic end is in a completely extending state, so that the workpiece table 5 with a larger area can be moved out through the recovery of the telescopic end, and the operability of the maintenance personnel is improved.
Example 2
As shown in fig. 1, the workpiece stage 5 moving-in and moving-out device provided by the present invention further includes a mounting mechanism, and the link mechanism further includes a third link 3 and a fourth link 4; one end of the third connecting rod 3 is rotatably connected with the position, close to the second connecting rod 2, of the first connecting rod 1, the other end of the third connecting rod is rotatably connected with one end of the fourth connecting rod 4, and one end, far away from the third connecting rod 3, of the fourth connecting rod 4 is connected with the power end of the driving mechanism.
As shown in fig. 1, in the second embodiment of the present application, a third link 3 and a fourth link 4 are added on the basis of embodiment 1, and in this embodiment, the first end 101 of the first link 1 is fixed relative to the position of the mounting mechanism, and the first end 101 is rotatably connected with the mounting mechanism, one end of the third link 3 is connected with the rod body of the first link 1, the other end is rotatably connected with one end of the fourth link 4, and the power end of the driving mechanism is connected with one end of the fourth link 4 far from the third link 3.
In this embodiment, the driving mechanism is a motor or the like having a rotary output shaft, and when the workpiece table 5 needs to be moved out of the working space, the driving mechanism is activated to drive the fourth link 4 to rotate clockwise, taking the direction shown in fig. 1 as an example, since the position of the first end 101 of the first link 1 relative to the mounting mechanism is fixed, and the first link 1 can rotate relative to the mounting mechanism with the first end 101 as a rotation center. Therefore, when the fourth connecting rod 4 rotates clockwise, the third connecting rod 3 can move to a certain extent along the counterclockwise direction, so as to drive the first connecting rod 1 to rotate clockwise, and further pull the second connecting rod 2 to move, thereby realizing the moving-out of the workpiece table 5.
As shown in fig. 1, since the position of the first link 1 is close to the base 6 in the present application, the space at the position of the first link 1 is small, and it is difficult to provide a sufficient space for installing the power mechanism, and therefore, in the present embodiment, the third link 3 and the fourth link 4 are added, so that on one hand, the overall size and the operation range of the overall link mechanism can be increased, and on the other hand, the spatial position of the operation system can be separated to a certain extent by the link mechanism, so that a sufficient space is provided for installing the driving mechanism, and the operation process of the overall device is more stable.
Example 3
Based on the above embodiment, the present application further optimizes the overall apparatus, wherein, as shown in fig. 1 to 3, the workpiece stage 5 moving-in and moving-out apparatus provided by the present invention further includes a first connecting member 7, and the base 6 can be connected to the workpiece stage 5 through the first connecting member 7.
Optionally, in the present application, a first connection hole 601 is formed in the base 6 of the operating system, a first through hole is formed in the workpiece table 5, one end of the first connection member 7 passes through the first through hole to be connected to the first connection hole 601, and the workpiece table 5 can rotate relative to the first connection member 7; the first through hole and the connecting position of the second link 2 to the workpiece table 5 are both located on the same side of the axis of the workpiece table 5 in the first direction S1, so that the other side of the workpiece table 5 is a free end.
As shown in fig. 1 to fig. 3, in the present embodiment, a first connecting member 7 is further added, and when the workpiece table 5 needs to be moved out of the working space, the driving mechanism drives the fourth connecting rod 4 to rotate clockwise, so that the third connecting rod 3 can generate a displacement to a certain extent while rotating counterclockwise, and thus the third connecting rod 3 can drive the first connecting rod 1 to rotate relative to the mounting mechanism, and further drive the second connecting rod 2 to move, so that the workpiece table 5 obtains a force of moving out of the working space.
Due to the addition of the first connecting member 7 in the embodiment, when the workpiece stage 5 is located in the working space, the first connecting member 7 is connected to the first through hole and the first connecting hole 601 in an aligned manner, and the workpiece stage 5 can rotate relative to the first connecting member 7.
Therefore, in this state, the side of the workpiece table 5 away from the second link 2 is a free end, so that when the second link 2 is operated, the free end of the workpiece table 5 can be rotated from the state shown in fig. 1 to the state shown in fig. 2, and the purpose of moving the free end of the workpiece table 5 out of the working space is achieved. After that, the service man separates the first connection member 7 from the first connection hole 601, and uses a tool to perform an operation on the free end of the work stage 5, thereby achieving the complete removal of the work stage 5.
Example 4
Based on the solution of embodiment 3, as shown in fig. 1 to 3, the workpiece stage 5 in the present application moves into and out of the device, and further includes a second connecting member 8, and the base 6 can be connected to the workpiece stage 5 by the second connecting member 8.
Optionally, the base 6 of the operating system is further provided with a second connecting hole 602, and the second connecting hole 602 is located outside the operating space; a second through hole is formed on the workpiece table 5, and one end of the second connecting piece 8 passes through the second through hole to be connected with the second connecting hole 602; the second through hole and the connecting position of the second connecting rod 2 and the workpiece stage 5 are located on the same side of the axis of the workpiece stage 5 in the second direction S2, and when the first connecting member 7 is separated from the first connecting hole 601, the workpiece stage 5 can rotate relative to the second connecting member 8.
In this embodiment, when the workpiece table 5 is moved from the state of fig. 1 to the state of fig. 2, the second through hole can be gradually aligned with the second connection hole 602, and the second link 8 is sequentially inserted through the second through hole and the second connection hole 602, thereby realizing the pivotal connection between the workpiece table 5 and the base 6.
Then, the service person detaches the first connecting member 7 from the first connecting hole 601, and the driving mechanism continues to drive the fourth connecting rod 4 to rotate, so that the workpiece table 5 can rotate around the second connecting member 8 as a rotation center, and the state in fig. 2 is moved to the state in fig. 3, so that most of the position of the workpiece table 5 is outside the working space. Finally, the workpiece table 5 is completely moved out of the working space by the maintainer.
Based on the above structure, when the workpiece table 5 needs to be moved into the working space, the driving mechanism drives the fourth link 4 to rotate counterclockwise, so that the second link 2 is moved by the third link 3 and the first link 1, and the workpiece table 5 is rotated from the state in fig. 3 to the state in fig. 2.
In the process, the first through hole is gradually opposite to the first connection hole 601, then the first connection member 7 is installed in the first through hole and the first connection hole 601, the second connection member 8 is pulled out of the second connection hole 602, and the driving mechanism continues to drive the fourth connection rod 4 to rotate in the counterclockwise direction, so that the workpiece stage 5 can move from the state in fig. 2 to the state in fig. 1, and the workpiece stage 5 is moved into the working space.
It should be added here that, preferably, the first connecting member 7 and the second connecting member 8 in this application are both latches. Since the base 6 is provided with the first connection hole 601 and the second connection hole 602 in this embodiment, the workpiece stage 5 can be accurately positioned during the moving in and out process through the first connection hole 601 and the second connection hole 602.
Based on the above embodiment, optionally, as shown in fig. 1 to 3, the length of the second link 2 in the present application is greater than the length of the first link 1, the length of the first link 1 is greater than the length of the third link 3, and the length of the third link 3 is greater than the length of the fourth link 4.
One end of the second connecting rod 2 needs to extend into the working space to be connected with the workpiece platform 5, so that the connecting rod mechanism can be stably connected with the workpiece platform 5 by enabling the length of the second connecting rod 2 to be longer. The length of the fourth connecting rod 4 is shortest, so that the response time can be shortened, and the moving-in and moving-out speed of the workpiece table 5 is improved.
The lengths of the first connecting rod 1, the second connecting rod 2, the third connecting rod 3 and the fourth connecting rod 4 can be adjusted according to specific operation requirements.
It should be added here that the first connecting rod 1, the second connecting rod 2, the third connecting rod 3 and the fourth connecting rod 4 in the present application are all in a lath structure, and particularly, the second connecting rod 2 needs to adopt a lath structure, so as to be able to smoothly extend into a narrow working space.
Further preferably, the device for moving the workpiece stage 5 in and out provided by the present invention further includes a first detaching mechanism and a second detaching mechanism, the first detaching mechanism is disposed corresponding to the first connecting member 7, the second detaching mechanism is disposed corresponding to the second connecting member 8, the first connecting member 7 can be separated from or connected to the first connecting hole 601 through the first detaching mechanism and the second detaching mechanism, and the second connecting member 8 can be separated from or connected to the second connecting hole 602.
Through the first disassembly body that corresponds the setting with first connecting piece 7 and the second disassembly body that second connecting piece 8 corresponds the setting, can realize the automatic dismouting of first connecting piece 7 and second connecting piece 8 to reduce artifical participation degree, when promoting the operating efficiency, improve integrated device's safety in utilization.
It should be added that, in the present application, both the first detaching mechanism and the second detaching mechanism may adopt a jacking cylinder, and the jacking cylinder may be disposed on the workpiece table 5 or the base 6, and when the jacking cylinder is disposed on the workpiece table 5, the workpiece table 5 may not be provided with the first through hole and the second through hole; when the jacking cylinder is arranged on the base 6, the first connecting hole 601 and the second connecting hole 602 may not be formed in the base 6, and the first through hole and the second through hole in the workpiece table 5 are connected as connecting holes.
Optionally, in the present application, the diameter of the first connecting element 7 is not greater than the diameter of the first through hole and the first connecting hole 601, and the diameter of the second connecting element 8 is not greater than the diameter of the second through hole and the second connecting hole 602, so that the first connecting element 7 is in clearance fit with the first through hole and the first connecting hole 601, and the second connecting element 8 is in clearance fit with the second through hole and the second connecting hole 602, and the inserting and extracting processes of the first connecting element 7 and the second connecting element 8 with the first connecting hole 601 and the second connecting hole 602 are smoother.
In addition, the invention also provides an operating system, which comprises a workpiece table 5, a base 6 and the workpiece table 5 moving-in and moving-out device; the workpiece stage 5 is provided on the base 6, and the workpiece stage 5 is movable relative to the base 6.
By adopting the operation system of the workpiece table 5 moving-in and moving-out device provided by the application, because one end of the second connecting rod 2, which is far away from the first connecting rod 1, is rotatably connected with the workpiece table 5, partial gravity of the workpiece table 5 can be borne by the second connecting rod 2, so that the friction force between the workpiece table 5 and the base 6 is reduced to a certain extent, and the workpiece table 5 can be smoothly moved in and moved out.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (10)

1. A workpiece table moving-in and moving-out device is used for an operating system and is characterized by comprising a driving mechanism and a connecting rod mechanism;
the connecting rod mechanism comprises a first connecting rod and a second connecting rod, the first end of the first connecting rod is connected with the driving mechanism, the second end of the first connecting rod is rotatably connected with one end of the second connecting rod, and one end of the second connecting rod, which is far away from the first connecting rod, extends into the working space of the working system and is connected with a workpiece table of the working system;
the driving mechanism can drive the first connecting rod to rotate relative to the driving mechanism by taking the first end as a rotation center so as to drive the second connecting rod to move and pull out part of the workpiece table from the working space.
2. The workpiece stage in-and-out apparatus of claim 1, further comprising a mounting mechanism, the linkage further comprising a third link and a fourth link;
one end of the third connecting rod is rotatably connected with the position, close to the second connecting rod, of the first connecting rod, the other end of the third connecting rod is rotatably connected with one end of the fourth connecting rod, and one end, far away from the third connecting rod, of the fourth connecting rod is connected with the power end of the driving mechanism.
3. The workpiece stage in-and-out apparatus according to claim 2, further comprising a first connector for connecting a base of the work system and the workpiece stage;
the connecting position of the first connecting piece and the workpiece platform and the connecting position of the second connecting rod and the workpiece platform are simultaneously positioned on the same side of the axis of the workpiece platform in the first direction, so that the other side of the workpiece platform is a free end.
4. The device for moving a workpiece stage in and out of a workpiece stage according to claim 3, wherein the first connecting member is provided with a first detaching mechanism, and the first detaching mechanism can drive the first connecting member to be connected with or separated from the workpiece stage.
5. The workpiece stage in-and-out apparatus of claim 3, further comprising a second connector for connecting the base and the workpiece stage;
the second connecting piece with the connected position of work piece platform with the second connecting rod with the connected position of work piece platform is located simultaneously work piece platform is in the same one side of the axis of second side, works as first connecting piece with when work piece platform phase separation, work piece platform can be relative the second connecting piece rotates.
6. The device for moving a workpiece stage in and out of a workpiece stage according to claim 5, wherein the second connecting member is correspondingly provided with a second disassembling mechanism, and the second disassembling mechanism can drive the second connecting member to be connected with or separated from the workpiece stage.
7. The workpiece stage in-and-out apparatus of claim 5, wherein the first and second connectors are a clearance fit with the workpiece stage.
8. The workpiece stage in-and-out apparatus of claim 5, wherein the first and second connectors are latches.
9. The workpiece stage moving-in and moving-out device according to claim 2, wherein the driving mechanism is a cylinder, a motor, or a hand lever.
10. A work system comprising a workpiece table, a base, and a workpiece table in-and-out device as claimed in any one of claims 1 to 9;
the workpiece table is arranged on the base and can move relative to the base.
CN202210112103.1A 2022-01-29 2022-01-29 Workpiece table moving-in and moving-out device and operating system Active CN114310809B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2337838Y (en) * 1998-09-14 1999-09-15 童绍伟 Cantilever table for hospital bed
CN2657874Y (en) * 2003-11-13 2004-11-24 大庆石油管理局 Vehicle movable bench working table
JP2008264881A (en) * 2007-04-16 2008-11-06 Fanuc Ltd Working device
CN107601383A (en) * 2017-09-19 2018-01-19 徐工集团工程机械有限公司 A kind of aerial working platform vehicle
US20200012203A1 (en) * 2016-09-30 2020-01-09 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Device for moving workpiece platform
CN112062069A (en) * 2020-09-14 2020-12-11 湖南星邦智能装备股份有限公司 High-altitude working platform swing mechanism

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2337838Y (en) * 1998-09-14 1999-09-15 童绍伟 Cantilever table for hospital bed
CN2657874Y (en) * 2003-11-13 2004-11-24 大庆石油管理局 Vehicle movable bench working table
JP2008264881A (en) * 2007-04-16 2008-11-06 Fanuc Ltd Working device
US20200012203A1 (en) * 2016-09-30 2020-01-09 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Device for moving workpiece platform
CN107601383A (en) * 2017-09-19 2018-01-19 徐工集团工程机械有限公司 A kind of aerial working platform vehicle
CN112062069A (en) * 2020-09-14 2020-12-11 湖南星邦智能装备股份有限公司 High-altitude working platform swing mechanism

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