CN114300601A - Preparation method of quantum dot color conversion layer based on microfluidic technology - Google Patents
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Abstract
A preparation method of a quantum dot color conversion layer based on a microfluidic technology relates to the technical field of display and solves the problems of quantum dot waste and low photoluminescence efficiency existing in the existing quantum dot and photoresist bonding technology and the problem that the size and the appearance of quantum dots are difficult to control by an ink-jet printing technology, and comprises the following steps: bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet; injecting the oily quantum dot solution of the primary color I and the primary color II into the bonding sheet and filling the bonding sheet with the micro-channel substrate below the upper pixel array substrate; injecting deionized water solution into the bonding sheet from the micro-channel substrate through a liquid inlet so that the oily quantum dot solution in the quantum dot micro-channel is washed away by the deionized water solution; injecting gas into the bonding piece from the micro-channel substrate, discharging the deionized water solution from the bonding piece, and curing by ultraviolet light. The invention can effectively reduce the quantum dot waste, the prepared quantum dot has small pixel size and high precision, and effectively reduces the optical crosstalk effect and slows down the quantum dot degradation.
Description
Technical Field
The invention relates to the technical field of micro LED display, in particular to a preparation method of a quantum dot color conversion layer based on a microfluidic technology.
Background
Micro LEDs have received much attention because of their advantages of high brightness, high light emitting efficiency, long lifetime, wide color gamut, and the like. Micro LED displays have greater potential for self-illumination, good outdoor visibility, extreme environmental tolerance, and compact optical structures than Liquid Crystal Displays (LCDs) and Organic Light Emitting Diode (OLED) displays.
Due to the incompatibility of material systems, it is difficult to realize monolithic integration of RGB Micro LED substrates on a single wafer by efficient epitaxial techniques. Therefore, it is a very simple and effective method to use blue or Ultraviolet (UV) Micro LEDs as excitation light sources and combine quantum dot color conversion layers to realize full color display. At present, there are two main schemes for realizing pixel array of quantum dot color conversion layer: one is to spray quantum dots on an LED or transparent substrate by inkjet printing technology; the other method is to mix quantum dots and photoresist according to a certain proportion and carry out pixel patterning by adopting a plurality of photoetching methods. However, the inkjet printing method depends on the nozzle precision, and is more suitable for quantum dot pixels with the size larger than 30 microns, and if the size is smaller, the size and the shape of the quantum dots are difficult to control. The photolithography technique can well control the uniformity of quantum dot pixels, but the photolithography and the development are carried out by mixing with composite materials such as photoresist, etc., which causes the waste of quantum dots, and the doped photoresist easily degrades the performance of the quantum dots, thus reducing the photoluminescence efficiency.
Disclosure of Invention
In view of this, the invention provides a method for preparing a quantum dot color conversion layer based on a microfluidic technology.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a preparation method of a quantum dot color conversion layer based on a microfluidic technology comprises the following steps:
taking a micro-channel substrate and a pixel array substrate, wherein the micro-channel substrate is made of a hydrophilic oleophobic material, the pixel array substrate is made of an oleophilic hydrophobic material, and the micro-channel substrate and the pixel array substrate are both made of transparent materials; the micro flow channel substrate comprises a primary color one-quantum-dot micro flow channel, a primary color two-quantum-dot micro flow channel and a primary color three-transmission area, wherein the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are both grooves arranged on the micro flow channel substrate, a liquid inlet and a liquid outlet of the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are both arranged on the micro flow channel substrate, and the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are not crossed; the pixel array substrate comprises at least two pixel points, each pixel point comprises a primary color first quantum point, a primary color second quantum point and a primary color third pixel empty point, and the primary color first quantum point and the primary color second quantum point are both grooves formed in the pixel array substrate;
aligning and bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet, wherein primary color one quantum dot is aligned to a primary color one quantum dot micro-channel, primary color two quantum dot is aligned to a primary color two quantum dot micro-channel, and a primary color three-transmission area is aligned to a primary color three-pixel empty dot;
injecting an oily quantum dot solution of the primary color I and an oily quantum dot solution of the primary color II into the bonding sheet from the micro-channel substrate under the upper pixel array substrate, so that the oily quantum dot solution of the primary color I is filled with the micro-channel of the primary color-one quantum dot and the primary color-one quantum dot, and the oily quantum dot solution of the primary color II is filled with the micro-channel of the primary color-two quantum dot and the primary color-two quantum dot;
injecting deionized water solution into the bonding sheet from the liquid inlet through the micro-channel substrate, so that the oily quantum dot solution of the primary color I in the primary color-one quantum dot-position micro-channel and the oily quantum dot solution of the primary color II in the primary color-two quantum dot-position micro-channel are flushed away by the deionized water solution;
injecting gas into the bonding sheet from the micro-channel substrate, discharging the deionized water solution from the bonding sheet, curing the oily quantum dot solution of the primary color I in the primary color I quantum dot position and the oily quantum dot solution of the primary color II in the primary color II quantum dot position by ultraviolet light, and completing the preparation of the quantum dot color conversion layer.
The quantum dot color conversion layer is prepared by the quantum dot color conversion layer preparation method based on the microfluidic technology.
The invention has the beneficial effects that:
1. according to the preparation method of the quantum dot color conversion layer based on the microfluidic technology, the consumed quantum dot material is less, the material waste can be effectively reduced, and the cost is saved;
2. the quantum dot pixel prepared by the preparation method has small size and high preparation precision;
3. each pixel of the quantum dot color conversion layer prepared by the method is separated, so that the optical crosstalk effect can be effectively reduced;
4. the quantum dots are not doped with photoresist, so that the degradation of the quantum dots can be effectively slowed down, and the photoluminescence efficiency of the quantum dot material cannot be reduced;
5. the used micro-channel combined with the pixel array structure is relatively closed, so that the influence of the external environment on the quantum dot material can be reduced, and large-area packaging is avoided.
Drawings
FIG. 1 is a schematic structural view of a glass micro flow channel substrate of a quantum dot color conversion layer according to the present invention.
FIG. 2 is a schematic diagram of a pattern of micro flow channels on a glass substrate of a quantum dot color conversion layer according to the present invention.
FIG. 3 is a schematic diagram of a PDMS substrate structure of a quantum dot color conversion layer according to the present invention.
Fig. 4 is a schematic diagram of a pixel array pattern of the pixel array substrate of the quantum dot color conversion layer according to the invention.
Fig. 5 is a flow chart of a method for preparing a quantum dot color conversion layer based on a microfluidic technology.
Fig. 6 is a dynamic diagram of bonding and solution injection of a quantum dot color conversion layer preparation method based on a microfluidic technology.
FIG. 7 is a schematic diagram of the integration of a quantum dot color conversion layer with a blue light Micro-LED backlight array of the present invention.
Fig. 8 is a dynamic schematic diagram of the preparation of a PDMS pixel array substrate of a quantum dot color conversion layer preparation method based on a microfluidic technology.
FIG. 9 is a schematic diagram of the dynamic preparation of a glass micro-channel substrate of the quantum dot color conversion layer preparation method based on the micro-fluidic technology.
In the figure: 1. 11, a red light Micro-channel quantum dot site, 12, a green light Micro-channel quantum dot site, 13, a flow channel transmission region, 14, a first liquid inlet, 15, a first liquid outlet, 16, a second liquid inlet, 17, a second liquid outlet, 18, a first auxiliary Micro-channel, 19, a second auxiliary Micro-channel, 2, a PDMS substrate, 21, a red light sub-pixel quantum dot site, 22, a green light sub-pixel quantum dot site, 23, a sub-pixel transmission region, 3, a quantum dot color conversion layer structure, 31, a red oil quantum dot solution, 32, a green oil quantum dot solution, 33, a deionized water solution, 34, a gas, 4, a blue light Micro-LED array backlight layer, 41, a blue light Micro-LED array substrate, 42, a blue light Micro-LED array, 43, a black isolation grid, 5, a photoresist I, 6, a silicon wafer, 7, and a photoresist II.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
The invention discloses a quantum dot color conversion layer preparation method based on a microfluidic technology. The material used for the micro flow channel substrate includes, but is not limited to, glass, quartz, etc. The pixel array substrate is made of materials including but not limited to PDMS, PMMA, PI (polyimide), PVA, etc. The micro-channel substrate is bonded with the pixel array substrate.
The micro-channel substrate comprises two quantum dot position micro-channels which are not crossed with each other, the two micro-channels are grooves formed in the micro-channel substrate, one quantum dot position micro-channel is used for flowing red oil quantum dot solution 31 and is called as a red quantum dot position micro-channel, and the other quantum dot position micro-channel is used for flowing green oil quantum dot solution 32 and is called as a green quantum dot position micro-channel. Each quantum dot micro flow channel is as follows: one port is a liquid inlet for injecting the solution and the other port is a liquid outlet for allowing the solution to flow out. A vacancy is reserved on the Micro-channel substrate and used for blue light Micro-LED backlight transmission.
The pixel array substrate at least comprises one pixel point, and each pixel point comprises two sub-pixel point positions according to the three-primary-color principle, wherein one sub-pixel point position is a red light quantum point position, and the other sub-pixel point position is a green light quantum point position. The red light quantum dot and the green light quantum dot are both of groove structures, the red light quantum dot is aligned, bonded and communicated with the red light quantum dot micro-channel, and the green light quantum dot is aligned, bonded and communicated with the green light quantum dot micro-channel. The red light quantum dots are cured to form red light quantum dots, and the red light quantum dots can emit red light when the blue light irradiates; and the green light quantum dots are cured to form green light quantum dots, and the green light quantum dots emit green light under the irradiation of blue light. When the number of the pixel points is more than or equal to 2, the sub-pixel points with the same color are communicated through a micro-channel structure communicated with the sub-pixel points. In one pixel point, except for a red light quantum point position and a green light quantum point position, a sub-pixel empty position, namely a vacant position, called a blank sub-pixel point position, is reserved on the pixel array substrate aiming at each pixel point, is aligned and bonded with a vacant position of the Micro-channel substrate and is used for blue light Micro-LEDs to be used as backlight transmission, the blue light Micro-LEDs are allowed to be used as backlight to be directly transmitted, and blue light can be directly transmitted through the sub-pixel empty position reserved in the pixel point.
The adjacent red light quantum dot positions are not connected with each other, the adjacent green light quantum dot positions are not connected with each other, namely, the red light quantum dots in the adjacent red light quantum dot positions are not connected with each other, and the red light quantum dots in the adjacent green light quantum dot positions are not connected with each other.
The structure of the quantum dot color conversion layer prepared by the invention is explained in detail below.
FIG. 1 is a schematic view showing the structure of a glass micro flow channel substrate according to an example of the invention. As shown in fig. 1, the present invention shows a structure of a glass micro flow channel substrate, which comprises: the device comprises a glass substrate 1, red light micro-channel quantum dot sites 11, green light micro-channel quantum dot sites 12 and a channel transmission region 13. The flow channel transmission region 13 is a reserved vacancy on the micro-flow channel substrate, and is used for directly transmitting blue light without changing the color of the blue light.
Fig. 2 shows a schematic diagram of a pattern of micro channels on a glass substrate 1, where the micro channels include a red light micro channel quantum dot 11, a green light micro channel quantum dot 12, a first liquid inlet 14, a first liquid outlet 15, a second liquid inlet 16, a second liquid outlet 17, a first auxiliary micro channel 18, and a second auxiliary micro channel 19. The red light micro-channel quantum dot site 11, the green light micro-channel quantum dot site 12, the first auxiliary micro-channel 18 and the second auxiliary micro-channel 19 are all grooves arranged on the glass substrate 1. The first liquid inlet 14, the first liquid outlet 15, the second liquid inlet 16 and the second liquid outlet 17 are arranged on the glass substrate 1. The red light micro flow channel quantum dot positions 11 are communicated with each other through a first auxiliary micro flow channel 18, the red light micro flow channel quantum dot positions 11 and the first auxiliary micro flow channel 18 form a red light quantum dot position micro flow channel, the red light quantum dot position micro flow channel is used for circulation of red oil quantum dot solution 31, a first liquid inlet 14 serves as a liquid inlet of the red light quantum dot position micro flow channel, a first liquid outlet 15 serves as a liquid outlet of the red light quantum dot position micro flow channel, the positions of the first liquid inlet 14 and the first liquid outlet 15 can be mutually exchanged, and the first auxiliary micro flow channel 18 is communicated. The green light micro-channel quantum dot positions 12 are communicated with each other through a second auxiliary micro-channel 19, the green light micro-channel quantum dot positions 12 and the second auxiliary micro-channel 19 form a green light quantum dot position micro-channel, the green light quantum dot position micro-channel is used for circulation of green oil quantum dot solution 32, a second liquid inlet 16 is used as a liquid inlet of the green light quantum dot position micro-channel, a second liquid outlet 17 is used as a liquid outlet of the green light quantum dot position micro-channel, the positions of the second liquid inlet 16 and the second liquid outlet 17 can be mutually exchanged, and the second auxiliary micro-channel 19 is communicated with each other. First inlet 14 and first liquid outlet 15 communicate ruddiness quantum dot position miniflow channel, and second inlet 16 and second liquid outlet 17 communicate green glow quantum dot position miniflow channel, are equipped with the feed liquor hole on the glass substrate 1 and go out the liquid hole, and the inlet is link up with the feed liquor hole, connects its quantum dot position miniflow channel that corresponds through the feed liquor hole, and the liquid outlet is link up with going out the liquid hole, connects its quantum dot position miniflow channel that corresponds through going out the liquid hole. The glass substrate 1 is reserved with a flow channel transmission region 13, namely the flow channel transmission region 13 is only a reserved vacancy and is still glass, and the flow channel transmission region 13 is not specifically manufactured here and is used for blue light Micro-LED backlight transmission.
Fig. 3 shows a schematic structural diagram of a PDMS substrate 2 according to an embodiment of the present invention. PDMS is selected as the material of the pixel array substrate, and the pixel array substrate comprises: the device comprises a PDMS substrate 2, red light sub-pixel quantum dot positions 21, green light sub-pixel quantum dot positions 22 and sub-pixel transmission regions 23. According to the three-primary-color principle, the red light sub-pixel quantum dot 21, the green light sub-pixel quantum dot 22 and the sub-pixel empty dot 23 jointly form a complete pixel, the red light sub-pixel quantum dot 21 and the green light sub-pixel quantum dot 22 are both of groove structures, and the sub-pixel quantum dots with the same conversion color in each row of pixels are aligned, bonded and communicated with the micro-channel quantum dots with the corresponding colors of the glass substrate 1 respectively. Red light sub-pixel quantum dots 21 are cured to form red light quantum dots which can emit red light when being irradiated by blue light; similarly, the green light sub-pixel quantum dots 22 are cured to form green light quantum dots, and the green light is emitted under the irradiation of blue light; the blue light may be directly transmitted through the sub-pixel transmission region 23. One red sub-pixel quantum dot site 21, one green sub-pixel quantum dot site 22, and one sub-pixel empty site 23 constitute one pixel site. When at least two pixel points exist on the PDMS substrate 2, the sub-pixel quantum dot positions with the same color in each pixel point are communicated through a quantum dot position micro-channel communicated with the sub-pixel quantum dot positions.
Fig. 4 shows a schematic diagram of a pixel array pattern on the PDMS substrate 2 according to the present invention, which includes two RGB pixel arrangements, i.e. a first RGB pixel 24 and a second RGB pixel 25. After the pixel array substrate and the glass micro-channel substrate are bonded, the red light micro-channel quantum dot 11 and the red light sub-pixel quantum dot 21 are aligned and bonded, the green light micro-channel quantum dot 12 and the green light sub-pixel quantum dot 22 are aligned and bonded, and the channel transmission region 13 and the sub-pixel transmission region 23 are aligned and bonded. All red light sub-pixel quantum dots 21 on the pixel array substrate are mutually connected and communicated through the red light quantum dot micro-flow channels, and all green light sub-pixel quantum dots 22 on the pixel array substrate are mutually connected and communicated through the green light quantum dot micro-flow channels.
The three primary colors are primary color one, primary color two and primary color three, the three primary colors are red, green and blue, the primary color one, the primary color two and the primary color three are different in color, the primary color one quantum dot site of the quantum dot color conversion layer can emit light with the color of the primary color one under the irradiation of the primary color three, and the primary color two quantum dot site of the quantum dot color conversion layer can emit light with the color of the primary color two under the irradiation of the primary color three. The primary color I, the primary color II and the primary color III can respectively correspond to red, green and blue one by one, so that the primary color I micro-channel quantum dot is a red light micro-channel quantum dot 11, the primary color II micro-channel quantum dot is a green light micro-channel quantum dot 12, the primary color III transmission area is the vacancy, namely a channel transmission area 13 for transmitting blue light, the primary color I quantum dot micro-channel is a red light quantum dot micro-channel, and the primary color II quantum dot micro-channel is a green light quantum dot micro-channel; the primary color first sub-pixel quantum dot is a red light sub-pixel quantum dot 21, the primary color second sub-pixel quantum dot is a green light sub-pixel quantum dot 22, and the primary color third sub-pixel empty dot is a sub-pixel empty dot 23, corresponding to the blue light sub-pixel empty dot, for transmitting blue light.
The depth range of the micro-channel of the primary color one-quantum-dot micro-channel is 2-100 micrometers, the depth range of the micro-channel of the primary color two-quantum-dot micro-channel is 2-100 micrometers, the depth range of the groove body of the primary color one-quantum-dot micro-channel is 5-500 micrometers, and the depth range of the groove body of the primary color two-quantum-dot micro-channel is 5-500 micrometers.
Fig. 5 shows a flow chart of quantum dot color conversion layer preparation according to an embodiment of the invention. As shown in fig. 5, the method for preparing a quantum dot color conversion layer according to the embodiment of the present invention includes the following steps:
s1, preparing a red light quantum dot position micro-channel, a green light quantum dot position micro-channel and a liquid inlet and a liquid outlet (a first liquid inlet 14, a first liquid outlet 15, a second liquid inlet 16 and a second liquid outlet 17) of the quantum dot position micro-channel on the glass substrate 1 by using a wet etching technology, penetrating the glass substrate 1 at the liquid inlet and the liquid outlet by using an ultrasonic drilling instrument, processing a liquid inlet through hole and a liquid outlet through hole for injecting solution, and preparing the glass micro-channel substrate. In particular, the wet etching solution is a BOE solution, the width of the micro flow channel is 50 microns, and the depth is 5 microns.
And S2, preparing the photoresist substrate containing the raised pixel array pattern by utilizing a photoetching process according to the arrangement of the pixel points, and using the photoresist substrate as a template for PDMS (polydimethylsiloxane) reverse mold. In particular, the height of a photoresist pixel can be determined by the rotational speed at which the photoresist is spun, the faster the rotational speed, the thinner the photoresist.
And S3, pouring, discharging bubbles, curing and reversing the mold of the PDMS on the photoetching glue base plate to prepare the PDMS groove pixel array substrate, namely obtaining the PDMS pixel array substrate. Preferably, the prepared photoresist pixel groove has a length of 150 microns, a width of 50 microns and a height of 50 microns.
And S4, aligning and bonding the prepared glass micro-channel substrate and the PDMS pixel array substrate to form the quantum dot color conversion layer structure 3, namely a bonding sheet. In particular, the micro flow channels in the glass substrate 1 are aligned with, bonded to, and run through the corresponding sub-pixel sites in the PDMS so as to inject quantum dot solutions of the same color. Namely, the red light micro-channel quantum dot 11 injected with the red quantum dot corresponds to the red light sub-pixel quantum dot 21, and the green light micro-channel quantum dot 12 injected with the green quantum dot corresponds to the green light sub-pixel quantum dot 22; while the null is aligned to the subpixel null point 23.
S5, placing the glass micro-channel substrate of the bonding sheet on top of the PDMS pixel array substrate, injecting red oil quantum dot solution 31 (oily quantum dot solution of primary color one) into the bonding sheet from the first liquid inlet 14, filling all primary color one quantum dot position micro-channels and all primary color one quantum dot positions, and then flowing out from the second liquid outlet 15. Green oil quantum dot solution 32 (oily quantum dot solution of the primary color two) is injected into the bonding sheet from the second liquid inlet 16, and flows out from the second liquid outlet 17 after filling all the primary color two quantum dot micro-channels and all the primary color two quantum dot positions. Particularly, the oily quantum dot solution of the primary color I and the oily quantum dot solution of the primary color II are both oily substances and can be cured by ultraviolet irradiation.
S6, keeping the glass micro-channel substrate of the bonding sheet on top, placing the PDMS pixel array substrate under, injecting deionized water solution 33 into the red light quantum dot micro-channel and the green light quantum dot micro-channel from the liquid inlet, wherein the oily quantum dot solution in the micro-channel can be washed away by the aqueous solution without being adhered to the wall of the channel to generate residue due to poor affinity of glass to the oily quantum dot solution and strong affinity to the aqueous solution. Specifically, the deionized water was doped with 0.5% by mass of SDS (sodium dodecyl sulfate) surfactant for reducing the affinity with PDMS.
S7, keeping the glass micro-channel substrate of the bonding sheet on top, placing the PDMS pixel array substrate under, slowly introducing gas 34 from two liquid inlets, discharging deionized water solution 33 in the red light quantum dot micro-channel and the green light quantum dot micro-channel, filling the primary color first oil quantum dot solution with the primary color first quantum dot solution, filling the primary color second oil quantum dot solution with the primary color second quantum dot solution, blocking the liquid inlet and outlet holes, and performing ultraviolet curing on the quantum dot solution in the pixel array substrate to obtain red light quantum dots and green light quantum dots, so as to form a quantum dot color conversion layer; in particular, the gas 34 introduced into the bonding sheet includes, but is not limited to, air, nitrogen, argon, and the like. The primary color-quantum dots of the quantum dot color conversion layer are not connected with each other, and the primary color-quantum dots are not connected with each other, namely the primary color-quantum dots are not connected with each other, and the primary color-quantum dots are not connected with each other.
Fig. 6 shows the quantum dot color conversion layer bonding and solution injection dynamics, corresponding to S4-S6.
FIG. 7 shows a schematic of the integration of a quantum dot color conversion layer with a blue light Micro-LED backlight array. As shown in fig. 7, the blue Micro-LED array backlight layer 4 includes: the blue light Micro-LED array comprises a blue light Micro-LED array substrate 41, a blue light Micro-LED array 42 and a black isolation grid 43, wherein the blue light Micro-LED array 42 comprises a plurality of blue light Micro-LED core particles, and the black isolation grid 43 is located between adjacent blue light Micro-LEDs. The black isolation grid is mainly used for reducing the optical crosstalk effect of the blue LED, and includes, but is not limited to, black photoresist, black printing material, chrome plating, and the like. The Micro LED display device comprises a blue light Micro-LED array backlight layer 4 and a quantum dot color conversion layer, the blue light Micro-LED array backlight layer 4, a Micro channel substrate of the quantum dot color conversion layer and a pixel array substrate of the quantum dot color conversion layer are sequentially arranged from top to bottom, light emitting points of the blue light Micro-LED array backlight layer 4 are opposite to corresponding red light quantum dot positions 21, green light quantum dot positions 22 and sub-pixel empty positions 23, and the blue light Micro-LED arrays 42 are aligned with the sub-pixel dots on the PDMS pixel array substrate one by one.
FIG. 8 shows a dynamic diagram for preparing a PDMS pixel array substrate according to the present invention. As shown in fig. 8, a layer of photoresist (photoresist one 5) is first spin-coated on a silicon wafer 6, then exposure and development are performed by using a mask pattern, and a photoresist bump array pattern is prepared, wherein the photoresist bump array pattern corresponds to a primary color one quantum dot position and a primary color two quantum dot position; then coating PDMS colloid (colloid of the pixel array substrate preparation material) on the prepared photoresist convex array pattern, discharging bubbles and baking to cure PDMS; and finally, performing reverse mold on PDMS to form a pixel array, wherein the reverse mold grooves are primary color one quantum dot and primary color two quantum dot, and obtaining the pixel array substrate. In particular, the thickness of the photoresist is affected by the spin speed, the faster the speed, the thinner the photoresist. In particular, the thickness of the photoresist affects the depth of the grooves formed in the pixel array, with the thicker the photoresist, the greater the groove depth. Preferably, the back-mold grooves are 50 microns deep, 50 microns wide and 150 microns long. In particular, the photoresist may be a negative or positive photoresist, including but not limited to SU8 photoresist, 7133 photoresist, PI photoresist, and the like.
FIG. 9 is a diagram showing the production kinetics of the glass micro flow channel substrate of the present invention. As shown in fig. 9, a layer of photoresist (second photoresist 7) is first spin-coated on a glass substrate 1 (material substrate), then exposed and developed through a mask to prepare a photoresist groove micro-channel pattern, then wet etching is performed with BOE solution, a micro-channel structure (primary color one quantum dot micro-channel and primary color two quantum dot micro-channel) is etched on the glass surface of the glass substrate 1 which is not protected by the second photoresist 7, and then the second photoresist 7 on the surface of the glass substrate 1 is removed. And finally, penetrating the glass substrate 1 at the liquid inlet and the liquid outlet by using an ultrasonic drilling instrument to respectively process a liquid inlet hole and a liquid outlet hole for injecting solution, wherein the liquid inlet is communicated with the liquid inlet hole corresponding to the liquid inlet, and the liquid outlet is communicated with the liquid outlet hole corresponding to the liquid outlet hole. One end of a liquid inlet hole of the primary color-quantum dot-position micro-channel is communicated with the other end of the primary color-quantum dot-position micro-channel to serve as a liquid outlet of the micro-channel, and one end of a liquid outlet hole of the primary color-quantum dot-position micro-channel is communicated with the other end of the primary color-quantum dot-position micro-channel to serve as a liquid outlet of the micro-channel. Preferably, the etch depth is about 5 microns and the width is 50 microns. In particular, the drilling method includes, but is not limited to, femtosecond laser etching, dry etching, gas etching, and the like.
The invention provides a method for preparing a quantum dot color conversion layer by utilizing a microfluidic technology, which consumes less quantum dot materials, can effectively reduce material waste and save cost; the quantum dot pixel prepared by the method has small size and high preparation precision; because each pixel is separated, the optical crosstalk effect can be effectively reduced; the quantum dots are not doped with photoresist, so that the degradation of the quantum dots can be effectively slowed down, and the photoluminescence efficiency of the quantum dot material cannot be reduced; the used micro-channel combined with the pixel array structure is relatively closed, so that the influence of the external environment on the quantum dot material can be reduced, and large-area packaging is avoided.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A preparation method of a quantum dot color conversion layer based on a microfluidic technology is characterized by comprising the following steps:
taking a micro-channel substrate and a pixel array substrate, wherein the micro-channel substrate is made of a hydrophilic oleophobic material, the pixel array substrate is made of an oleophilic hydrophobic material, and the micro-channel substrate and the pixel array substrate are both made of transparent materials; the micro flow channel substrate comprises a primary color one-quantum-dot micro flow channel, a primary color two-quantum-dot micro flow channel and a primary color three-transmission area, wherein the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are both grooves arranged on the micro flow channel substrate, a liquid inlet and a liquid outlet of the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are both arranged on the micro flow channel substrate, and the primary color one-quantum-dot micro flow channel and the primary color two-quantum-dot micro flow channel are not crossed; the pixel array substrate comprises at least two pixel points, each pixel point comprises a primary color first quantum point, a primary color second quantum point and a primary color third pixel empty point, and the primary color first quantum point and the primary color second quantum point are both grooves formed in the pixel array substrate;
aligning and bonding the micro-channel substrate and the pixel array substrate to form a bonding sheet, wherein primary color one quantum dot is aligned to a primary color one quantum dot micro-channel, primary color two quantum dot is aligned to a primary color two quantum dot micro-channel, and a primary color three-transmission area is aligned to a primary color three-pixel empty dot;
injecting an oily quantum dot solution of the primary color I and an oily quantum dot solution of the primary color II into the bonding sheet from the micro-channel substrate under the upper pixel array substrate, so that the oily quantum dot solution of the primary color I is filled with the micro-channel of the primary color-one quantum dot and the primary color-one quantum dot, and the oily quantum dot solution of the primary color II is filled with the micro-channel of the primary color-two quantum dot and the primary color-two quantum dot;
injecting deionized water solution into the bonding sheet from the liquid inlet through the micro-channel substrate, so that the oily quantum dot solution of the primary color I in the primary color-one quantum dot-position micro-channel and the oily quantum dot solution of the primary color II in the primary color-two quantum dot-position micro-channel are flushed away by the deionized water solution;
injecting gas into the bonding sheet from the micro-channel substrate, discharging the deionized water solution from the bonding sheet, curing the oily quantum dot solution of the primary color I in the primary color I quantum dot position and the oily quantum dot solution of the primary color II in the primary color II quantum dot position by ultraviolet light, and completing the preparation of the quantum dot color conversion layer.
2. The method according to claim 1, wherein the depth ranges of the micro-channels of the primary color-quantum dot micro-channel and the primary color-quantum dot micro-channel are both 2-100 μm, and the depth ranges of the primary color-quantum dot micro-channel and the primary color-quantum dot micro-channel are both 5-500 μm.
3. The method for preparing a quantum dot color conversion layer according to claim 1, wherein the primary color-quantum dot sites of the bonding sheet are communicated with each other via primary color-quantum dot site microchannels, and the primary color-quantum dot sites of the bonding sheet are communicated with each other via primary color-quantum dot site microchannels.
4. The method according to claim 1, wherein the micro flow channel substrate comprises a primary color-one micro flow channel quantum dot, a primary color-two micro flow channel quantum dot, a first auxiliary micro flow channel and a second auxiliary micro flow channel, wherein the primary color-one micro flow channel quantum dot corresponds to the primary color-one quantum dot, the primary color-two micro flow channel quantum dot corresponds to the primary color-two quantum dot, the primary color-one micro flow channel quantum dot is connected to the first auxiliary micro flow channel to form the primary color-one quantum dot micro flow channel, the primary color-two micro flow channel quantum dot is connected to the second auxiliary micro flow channel to form the primary color-two quantum dot micro flow channel, a liquid inlet and a liquid outlet of the primary color-one quantum dot micro flow channel are both connected to the first auxiliary micro flow channel, and a liquid inlet and a liquid outlet of the primary color-two quantum dot micro flow channel are both connected to the second auxiliary micro flow channel.
5. The method according to claim 1, wherein the first oily quantum dot solution, the deionized water solution and the air in the first primary color quantum dot microchannel enter from a liquid inlet of the first primary color quantum dot microchannel and exit from a liquid outlet of the first primary color quantum dot microchannel, and the second oily quantum dot solution, the deionized water solution and the air in the second primary color quantum dot microchannel enter from a liquid inlet of the second primary color quantum dot microchannel and exit from a liquid outlet of the second primary color quantum dot microchannel.
6. The method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in claim 1, wherein the preparation process of the pixel array substrate comprises: spin-coating a layer of photoresist on a silicon wafer, exposing and developing by using a mask pattern to prepare a photoresist convex array pattern, coating the colloid of the pixel array substrate preparation material on the prepared photoresist convex array pattern, discharging bubbles, baking to solidify the colloid of the pixel array substrate preparation material, and performing reverse molding to obtain the pixel array substrate, wherein the photoresist convex array pattern corresponds to a primary color one quantum dot position and a primary color two quantum dot position.
7. The method for preparing a quantum dot color conversion layer based on a microfluidic technology as claimed in claim 1, wherein the preparation process of the micro-channel substrate comprises: spin-coating a layer of photoresist on a material substrate, then exposing and developing through a mask to prepare a photoresist groove micro-channel pattern, then carrying out wet etching by using a BOE solution, etching a primary color one-quantum-point-location micro-channel and a primary color two-quantum-point-location micro-channel on the glass surface of the material substrate which is not protected by the photoresist, and removing the photoresist on the surface of the material substrate; and finally, preparing a liquid inlet and a liquid outlet of the primary color-quantum dot-position micro-channel and the primary color-quantum dot-position micro-channel in a mode of penetrating through the material substrate.
8. The method of claim 1, wherein the micro-channel substrate is made of glass or quartz, and the pixel array substrate is made of PDMS, PMMA, PI or PVA.
9. The method as claimed in claim 1, wherein the quantum dot color conversion layer of the fifth step is capable of emitting light with a first primary color under irradiation of the third primary color, and the quantum dot color conversion layer of the fifth step is capable of emitting light with a second primary color under irradiation of the third primary color.
10. The quantum dot color conversion layer prepared by the method for preparing the quantum dot color conversion layer based on the microfluidic technology as claimed in any one of claims 1 to 9.
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