CN114296393B - Motion table zeroing method and device, electronic equipment and storage medium - Google Patents
Motion table zeroing method and device, electronic equipment and storage medium Download PDFInfo
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Abstract
The invention discloses a method and a device for zeroing a motion platform, electronic equipment and a storage medium. Controlling a lower closed loop of the encoder, and controlling the motion platform to move along a first direction; when an electrical limit signal on any one of the double guide rails is detected, stopping the movement of the movement table, and controlling the movement table to move along a second direction; when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment; when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment; obtaining a bias parameter of the motion platform according to the first original value of the encoder and the second original value of the encoder; controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters; the motion platform is closed again, and initial position information of the motion platform in closed loop is obtained; and controlling the motion platform to move back to the zero point based on the initial position information. The scheme provided by the invention can realize the zeroing of the motion platform with higher precision.
Description
Technical Field
The present invention relates to the field of motion table zeroing technologies, and in particular, to a motion table zeroing method, a motion table zeroing device, an electronic device, and a storage medium.
Background
The existing zeroing modes include an absolute encoder zeroing mode and an incremental encoder zeroing mode. The absolute encoder can maintain the coordinate value actual position memory through a battery after the system is powered off, and the operation of returning to a reference point is not needed. The incremental encoder does not have a memory function after the system is powered off and needs to confirm the reference point first.
The zero return mode of the absolute encoder has the defects of high cost and low economic benefit. Therefore, it is common to use incremental encoders in motion stages.
The incremental encoder generally achieves position judgment by sensing a return-to-zero switch/contact switch when returning to zero, and the incremental encoder is moved to zero at a low speed after touching a speed-reducing switch by pressing a manual axial movement switch until a return-to-zero indicator light is on or through a speed-reducing stop block.
However, at present, the zero-resetting motion method of the incremental encoder generally only sets a zero-resetting trigger point, and for a single motion physical axis, when the motion axis is long, the zero-resetting speed is slow, the zero-resetting precision depends on the sensing distance of a zero-resetting switch, and the zero-resetting precision is low.
Disclosure of Invention
In order to solve the technical problem of low zeroing precision of an incremental encoder, the embodiment of the invention provides a method, a device, electronic equipment and a storage medium for zeroing a motion platform.
The technical scheme of the embodiment of the invention is realized as follows:
the embodiment of the invention provides a zeroing method of a motion platform, which is applied to a motion platform with a double-guide-rail H-shaped structure, and comprises the following steps:
controlling a lower closed loop of the encoder, and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rail;
stopping the movement of the movement table and controlling the movement of the movement table along the second direction when the electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction;
when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment;
when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment;
obtaining the bias parameters of the motion platform according to the first original value of the encoder and the second original value of the encoder;
controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters;
re-closing the moving table to obtain initial position information of the moving table in closed loop;
and controlling the motion platform to move back to the zero point based on the initial position information.
In the above scheme, stopping the motion of the motion stage includes:
and smoothly stopping the motion of the motion platform.
In the scheme, the zero position sensor on the double guide rails is arranged at a position with a preset height difference.
In the above scheme, the height difference is set to be larger than the product of the distance between the double guide rails and the maximum inclination angle.
In the above scheme, the offset parameters of the motion platform comprise a first offset parameter corresponding to the height difference of the zero position sensor on the double guide rail, a second offset parameter corresponding to the first original value of the encoder, and a mechanical zero position on the guide rail.
In the above solution, the setting the encoder bias parameters of the dual guide rail according to the bias parameters includes:
setting the encoder bias of the guide rail corresponding to the first original value of the encoder as the sum of the first bias parameter and the second bias parameter minus the first original value of the encoder; and setting the encoder bias of the guide rail corresponding to the encoder second original value as a second bias parameter minus the encoder second original value.
In the above scheme, the re-closing the moving table, and obtaining the initial position information of the moving table when the moving table is closed includes:
and re-closing the loop of the moving table, and obtaining the initial position information of the moving table during the loop closing according to the transformation matrix of the physical axis-to-logical axis.
The embodiment of the invention also provides a motion platform zeroing device, which comprises:
the first control module is used for controlling the lower closed loop of the encoder and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rail;
the motion stopping module is used for stopping the motion of the motion platform and controlling the motion platform to move along a second direction when an electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction;
the first acquisition module is used for acquiring a first original value of the encoder on any guide rail when detecting a zero sensor signal on the guide rail;
the second acquisition module is used for acquiring a second original value of the encoder on the other guide rail when the zero sensor signal of the other guide rail is detected;
the third acquisition module is used for acquiring the offset parameter of the motion platform according to the first original value of the encoder and the second original value of the encoder;
the setting module is used for controlling the motion platform to open loop and setting the encoder bias parameters of the double guide rails according to the bias parameters;
the re-closed loop module is used for re-closing the moving table to obtain initial position information of the moving table during closed loop;
and the second control module is used for controlling the motion platform to move back to the zero point based on the initial position information.
The embodiment of the invention also provides electronic equipment, which comprises: a processor and a memory for storing a computer program capable of running on the processor; wherein,
the processor is configured to perform the steps of any of the methods described above when the computer program is run.
The embodiment of the invention also provides a storage medium, wherein a computer program is stored in the storage medium, and when the computer program is executed by a processor, the steps of any one of the methods are realized.
The motion platform zeroing method, the motion platform zeroing device, the electronic equipment and the storage medium provided by the embodiment of the invention control the lower closed loop of the encoder and control the motion platform to move along the first direction; the first direction is parallel to the sliding direction of the double guide rail; stopping the movement of the movement table and controlling the movement of the movement table along the second direction when the electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction; when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment; when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment; obtaining the bias parameters of the motion platform according to the first original value of the encoder and the second original value of the encoder; controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters; re-closing the moving table to obtain initial position information of the moving table in closed loop; and controlling the motion platform to move back to the zero point based on the initial position information. By adopting the scheme provided by the invention, the zeroing of the motion platform can be realized with higher precision, and the cost is lower.
Drawings
FIG. 1 is a schematic flow chart of a zeroing method of a motion platform according to an embodiment of the invention;
FIG. 2 is a schematic diagram of a double-rail H-shaped structure motion stage according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a zeroing process of a motion stage according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a motion stage zeroing device according to an embodiment of the present invention;
fig. 5 is an internal structural diagram of a computer device according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
The embodiment of the invention provides a zeroing method for a motion platform, which is shown in figure 1 and comprises the following steps:
step 101: controlling a lower closed loop of the encoder, and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rail;
step 102: stopping the movement of the movement table and controlling the movement of the movement table along the second direction when the electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction;
step 103: when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment;
step 104: when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment;
step 105: obtaining the bias parameters of the motion platform according to the first original value of the encoder and the second original value of the encoder;
step 106: controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters;
step 107: re-closing the moving table to obtain initial position information of the moving table in closed loop;
step 108: and controlling the motion platform to move back to the zero point based on the initial position information.
In particular, the present embodiment is applicable to a double-rail H-type structure moving table as shown in fig. 2. The return to zero of the two degrees of freedom of the motion stages X and Rz can be achieved.
Fig. 2 shows a moving table structure, which comprises two X-direction guide rails and a Y-direction guide rail, wherein the left motor X1 and the right motor X2 on the X-direction guide rails drive the Y-direction guide rails to realize the movement of a logic axis in the X direction and the rotation of a certain angle in the Rz direction. Because the motion platform is an incremental encoder, when the motion platform is electrified and initialized again, the initial positions of the left motor X1 and the right motor X2 are unknown, and the motors X1 and X2 are required to be moved to a calibrated zero position through zero return, so that zero return of two degrees of freedom X\rz is realized.
In one embodiment, the motion of the motion stage is stopped smoothly.
In addition, in one embodiment, the zero position sensor on the double guide rail is arranged at a position with a preset height difference.
In practical application, the height difference is set to be larger than the product of the distance between the double guide rails and the maximum inclination angle.
Specifically, the offset parameters of the motion platform comprise a first offset parameter corresponding to the height difference of the zero position sensor on the double guide rail, a second offset parameter of the zero position sensor corresponding to the first original value of the encoder and the mechanical zero position on the guide rail.
In an embodiment, the setting the encoder bias parameters of the dual rail according to the bias parameters includes:
setting the encoder bias of the guide rail corresponding to the first original value of the encoder as the sum of the first bias parameter and the second bias parameter minus the first original value of the encoder; and setting the encoder bias of the guide rail corresponding to the encoder second original value as a second bias parameter minus the encoder second original value.
In an embodiment, the re-closing the motion stage, and obtaining initial position information of the motion stage when the motion stage is closed includes:
and re-closing the loop of the moving table, and obtaining the initial position information of the moving table during the loop closing according to the transformation matrix of the physical axis-to-logical axis.
Further, based on fig. 2, the present embodiment provides a motion zeroing scheme involving two coupled physical axes, aiming at realizing zeroing of two degrees of freedom of x\rz with higher precision and repeatability. The method comprises the following specific steps:
the initialization of the motion platform is completed, the encoder closes a loop, and a zero return flow is received and started;
setting motion parameters, and performing full-stroke motion in a determined direction of an X axis of a motion table, wherein a positive direction is taken as an example;
judging whether the positive direction electrical limit of the X1 or X2 guide rail is detected in the movement process, and if no signal is detected, continuing the movement in the positive direction; if the limit switch signal is detected, starting smooth stop;
when a limit signal is detected and the table is stopped smoothly, setting a motion parameter in the opposite direction, moving to the X-axis in the negative direction in a full stroke manner, and detecting a zero Index sensor signal on an X1 guide rail;
if a zero Index sensor signal pulse on the X1 guide rail is detected in the movement process, recording the original value of an encoder on the X1 guide rail at the moment, marking the original value as a1, and starting smooth stop;
continuing to move in the negative direction, detecting a zero Index sensor signal on the X2 guide rail, and recording an original encoder value a2 on the X2 guide rail when the pulse signal is detected;
it should be noted here that, to simplify the zeroing process design, the Index mounting positions on the rails of the present embodiments X1 and X2 have a height difference h, h > L X θR z_max The opposite movement of the table in any posture is ensured, and the zero position sensor on the X1 guide rail is triggered firstly and then the zero position sensor on the X2 guide rail is triggered under the action of mechanical constraint Rz.
From the sensor output= (original value + offset) the conversion factor, the offset b corresponding to the X1, X2 guide rail Index sensor height difference h can be obtained, and the offset c of the Index sensor zero position and the mechanical zero position of X1 can also be obtained. Opening a moving table, setting encoder parameters of left and right guide rails X1/X2, and setting encoder bias of the X1 guide rail to b+c-a1; the encoder bias of the X2 guide rail is set to c-a2;
and (3) re-closing the loop of the motion platform, and obtaining initial position information of the X axis and the Rz axis of the motion platform during loop closing by a transformation matrix of a physical axis to a logical axis, wherein the X axis and the Rz axis are moved to an original point, so that the zeroing action of the motion platform is realized.
In addition, it should be noted that, after the mechanical assembly of the motion platform and the sensor arrangement are completed, the values of the offsets b and c need to be measured and calibrated for the first time due to the reasons of machining and installation tolerance and the like, and after the measurement and calibration are completed, the values are issued as machine constants for subsequent use. The magnitude of the offset b is modified, the posture of the Rz zero position can be modified, the magnitude of the offset c is modified, and the position of the X zero position can be modified.
According to the zeroing method for the motion platform, provided by the embodiment of the invention, the lower closed loop of the encoder is controlled, and the motion platform is controlled to move along the first direction; the first direction is parallel to the sliding direction of the double guide rail; stopping the movement of the movement table and controlling the movement of the movement table along the second direction when the electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction; when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment; when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment; obtaining the bias parameters of the motion platform according to the first original value of the encoder and the second original value of the encoder; controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters; re-closing the moving table to obtain initial position information of the moving table in closed loop; and controlling the motion platform to move back to the zero point based on the initial position information. By adopting the scheme provided by the invention, the zeroing of the motion platform can be realized with higher precision, and the cost is lower.
The present invention will be described in further detail with reference to examples of application.
The X stroke of the moving table is driven by two linear motors on the side, the Y stroke is driven by a single linear motor on a Y guide rail, and the mechanical rotating shaft is adopted to provide high flexibility in the Rz direction, as shown in figure 1. Incremental encoders are distributed on the two sides of the X guide rail and the Y guide rail and used for feeding back the measuring position of the physical axis X1/X2/Y. The input of the sensor signal is an original bit value, the sensor signal is subjected to dimension conversion through a sensor interface and is converted into an international unit system signal, the conversion factor is initially determined according to mechanical design parameter calculation, and then the assembly error is corrected in an actual measurement mode. The conversion formula of the sensor interface is as follows: sensor interface output= (original value + bias) conversion factor. The original value is the output of the sensor board card; the conversion factor and the bias value are machine constants, and the value can be modified by the setting module.
Because the physical axes X1 and X2 have a coupling relationship, and the algorithm of the controller is designed for controlling the decoupled logic axis, the output of the sensor interface cannot be directly used as feedback, and the measurement position of the physical axis must be converted into the measurement position of the logic axis through a conversion relationship. As can be taken from fig. 2, the motion stage encoder measures the conversion relationship as:
wherein, the left side of the equation is a logical axis coordinate, the right side of the equation is a physical axis measurement coordinate, L enc Indicating the distance between the two reading heads.
The layout of the switch sensor is shown in figure 3, and the electric limit sensor s is arranged in the positive and negative mechanical limit of the X1 and X2 guide rails 1p ，s 1n ，s 2p ，s 2n The stroke protection device is used for protecting the stroke of the moving table; zero Index sensor s of X1 and X2 guide rails 1i ，s 2i For zero detection. In the design of the scheme, in order to simplify the return-to-zero flow logic, s is arranged in the zero sensor layout 1i Sum s 2i Relative distance h in X direction z The height difference L theta R of X1 and X2 corresponding to the maximum rotation angle larger than the Rz direction is needed z_max Thereby ensuring that the motion platform moves from the positive limit to the reverse direction, and the motion platform can trigger s at first no matter what gesture is used 1i A sensor. It is noted that this is based on the fact that the motion stage has a small rotational travel, in order to simplify the determination of s in the zeroing process 1i Sum s 2i And if other equipment does not have the installation condition of a proper height difference, the sequence of triggering zero position sensors needs to be detected, but the application of the zero-return algorithm is not influenced.
When the system is powered up again, the original value of the sensor is always counted again from zero because the incremental encoder does not have a memory function, and the position and the posture of the moving table are unknown. In order to make the motion stage work normally, it is necessary to perform a zeroing operation first and establish a correct origin coordinate system. The zeroing flow design is described in detail below with reference to fig. 3.
After power-on, the system performs initialization setting, the sensor interface bias is set to 0, the motion platform state is closed, a zeroing instruction is received, and a zeroing process is started.
(1) And the motion platform moves to the maximum stroke in the positive direction, whether the positive direction electrical limit of the X1 or X2 guide rail is detected is judged, and if the limit sensor signal is detected at any side, the smooth stop is started immediately. This step is mainly for determining the direction in which the position of the null sensor relative to the motion stage is located. After the moving table in fig. 3 is electrified, the initial position posture is shown in the figure, at the moment, the position coordinates of the relative mechanical zero position cannot be determined, the moving direction of the zero position sensor cannot be judged, after the zero return process is started, the positive direction of the moving table moves to the S0 position in the figure, the X2 side motor triggers the signal of the limit sensor first, the moving table starts to stop smoothly, and at the moment, the negative direction of the position of the zero position sensor at the moving table can be determined.
(2) Maximum travel of reverse movement of moving table and zero sensor s on X1 guide rail 1i If the trigger is not triggered, if the trigger pulse signal is detected, the original value a1 of the encoder on the X1 guide rail at the trigger pulse moment is recorded, and the smooth stop is started. The system does not immediately stop at the null sensor position due to inertia. FIG. 3 zero sensor S on X1 rail when the motion stage moves to S1 position 1i And generating a trigger pulse, and recording the original value of the X1 side encoder at the trigger moment of the pulse, wherein the original value is the change of the original number of the X1 side encoder of the motion platform moving from the initial position to the zero position sensor.
(3) The motion table continues to move reversely, and a zero sensor s on the X2 guide rail is detected 2i If the trigger pulse signal is detected, the original value a2 of the encoder on the guide rail at the trigger pulse time X2 is recorded, and the smooth stop is started. When the moving table moves to the S2 position in FIG. 3, the zero position sensor S on the X2 guide rail 2i Generating a trigger pulse, and recording the original value of the encoder at the X2 side of the trigger moment of the pulse, wherein the value corresponds to the movement of the moving table from the initial position to the zero sensor s 2i Changes in the number of X2 side encoder originals.
(4) Setting sensor interface parameters. According to the distances h1 and h2 from the mounting positions of the left and right zero position sensors to the mechanical zero position and the conversion factor coefficient fa from the original value of the encoder to the measured output value, the original value variation b1 and b2 corresponding to the zero position sensors to the mechanical zero position can be obtained: |b1|=h1/fa; |b2|=h2/fa, where the symbol of b is identical toThe installation position of the zero sensor is related to the direction of the mechanical origin coordinate system, if the zero sensor is installed in the positive direction of the mechanical zero, the sign is positive, and otherwise, the sign is negative. Left-right encoder offset is set, X1 rail encoder offset1 is set to offset1 = -a1+b1, and X2 rail encoder offset2 is set to offset2 = -a2+b2. In fig. 3, the distance h1=h from the zero position sensor on the X1 guide rail to the mechanical zero position c Zero sensor-to-mechanical zero distance h2 = h on X2 guide rail c +h z The corresponding original value offset can be obtained, and as the zero position sensor is arranged in the negative direction of the mechanical zero position in the figure, b1= -h1/fa; b2 = -h2/fa. Further, the left and right rail sensor offsets may be set to be: offset1 = -a1-h c /fa；offset2＝-a2-(h c +h z ) Fa. Adjust h c And h z The X zero position and the Rz zero position can be respectively adjusted. Outputting a calculation formula according to a sensor interface: sensor interface output= (original value + bias) conversion factor, taking X1 guide rail encoder as an example, when X1 motor moves to zero sensor position s 1i When the original value of the encoder is a1, taking the inverse as offset, taking the offset into a calculation formula, and at the moment, calculating the output to be zero, establishing a coordinate system taking the zero position sensor as an original point, and when the mechanical zero position is not overlapped with the zero position sensor, moving the original point of the coordinate to the mechanical zero position through coordinate translation. Setting the offset to offset1 = -a1-h c Fa is carried into a calculation formula to obtain a zero sensor s 1i The coordinate at the position is-h c And example s in FIG. 3 1i The coordinates are consistent.
(5) After the sensor parameters are set, the position coordinates of the physical axes x1 and x2 of the motion platform can be obtained and brought into the motion platform encoder to measure the conversion relation:the position coordinates of the relative mechanical zero position of the motion stages x and Rz at this time can be obtained, the motion of the motion stages is controlled in a closed loop to x=0, r z Target position=0, i.e. zero return of the motion stage is achieved.
In order to implement the method of the embodiment of the present invention, the embodiment of the present invention further provides a motion table zeroing apparatus, as shown in fig. 4, a motion table zeroing apparatus 400 includes: a first control module 401, a stop motion module 402, a first acquisition module 403, a second acquisition module 404, a third acquisition module 405, a setting module 406, a re-closing loop module 407, and a second control module 408; wherein,
the first control module 401 is used for controlling the lower closed loop of the encoder and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rail;
a stop motion module 402, configured to stop motion of the motion stage and control the motion stage to move along a second direction when an electrical limit signal on any one of the dual rails is detected; the second direction is the opposite direction of the first direction;
a first obtaining module 403, configured to obtain a first original value of the encoder on any guide rail when detecting a zero sensor signal on the guide rail;
a second obtaining module 404, configured to obtain, when a zero sensor signal of another rail is detected, a second original value of an encoder on the other rail at this time;
a third obtaining module 405, configured to obtain a bias parameter of the motion stage according to the first original encoder value and the second original encoder value;
the setting module 406 is configured to control the motion stage to open loop, and set the encoder bias parameters of the dual guide rail according to the bias parameters;
a re-closing module 407, configured to re-close the motion stage to obtain initial position information of the motion stage during closed loop;
a second control module 408, configured to control the motion stage to move back to the zero point based on the initial position information.
In practical application, the first control module 401, the motion stopping module 402, the first obtaining module 403, the second obtaining module 404, the third obtaining module 405, the setting module 406, the re-closing loop module 407 and the second control module 408 may be implemented by a processor in the motion stage zeroing device.
It should be noted that: the above-mentioned apparatus provided in the above-mentioned embodiment is only exemplified by the division of the above-mentioned program modules when executing, and in practical application, the above-mentioned process allocation may be performed by different program modules according to needs, i.e. the internal structure of the terminal is divided into different program modules to complete all or part of the above-mentioned processes. In addition, the apparatus provided in the foregoing embodiment and the method embodiment belong to the same concept, and specific implementation processes of the apparatus and the method embodiment are detailed in the method embodiment and are not repeated herein.
Based on the hardware implementation of the program modules, and in order to implement the method of the embodiment of the present invention, the embodiment of the present invention further provides an electronic device (computer device). In particular, in one embodiment, the computer device may be a terminal, the internal structure of which may be as shown in fig. 5. The computer apparatus includes a processor a01, a network interface a02, a display screen a04, an input device a05, and a memory (not shown in the figure) which are connected through a system bus. Wherein the processor a01 of the computer device is adapted to provide computing and control capabilities. The memory of the computer device includes an internal memory a03 and a nonvolatile storage medium a06. The nonvolatile storage medium a06 stores an operating system B01 and a computer program B02. The internal memory a03 provides an environment for the operation of the operating system B01 and the computer program B02 in the nonvolatile storage medium a06. The network interface a02 of the computer device is used for communication with an external terminal through a network connection. Which when executed by a processor a01, performs the method of any of the embodiments described above. The display screen a04 of the computer device may be a liquid crystal display screen or an electronic ink display screen, and the input device a05 of the computer device may be a touch layer covered on the display screen, or may be a key, a track ball or a touch pad arranged on a casing of the computer device, or may be an external keyboard, a touch pad or a mouse.
It will be appreciated by those skilled in the art that the structure shown in fig. 5 is merely a block diagram of some of the structures associated with the present application and is not limiting of the computer device to which the present application may be applied, and that a particular computer device may include more or fewer components than shown, or may combine certain components, or have a different arrangement of components.
The device provided by the embodiment of the invention comprises a processor, a memory and a program stored on the memory and capable of running on the processor, wherein the processor executes the program to realize the method of any one of the embodiments.
It will be appreciated by those skilled in the art that embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
In one typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.
The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, etc., such as Read Only Memory (ROM) or flash memory (flashRAM). Memory is an example of a computer-readable medium.
Computer readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device. Computer-readable media, as defined herein, does not include transitory computer-readable media (transshipment) such as modulated data signals and carrier waves.
It will be appreciated that the memory of embodiments of the invention may be either volatile memory or nonvolatile memory, and may include both volatile and nonvolatile memory. Wherein the nonvolatile Memory may be Read Only Memory (ROM), programmable Read Only Memory (PROM, programmable Read-Only Memory), erasable programmable Read Only Memory (EPROM, erasable Programmable Read-Only Memory), electrically erasable programmable Read Only Memory (EEPROM, electrically Erasable Programmable Read-Only Memory), magnetic random access Memory (FRAM, ferromagnetic random access Memory), flash Memory (Flash Memory), magnetic surface Memory, optical disk, or compact disk Read Only Memory (CD-ROM, compact Disc Read-Only Memory); the magnetic surface memory may be a disk memory or a tape memory. The volatile memory may be random access memory (RAM, random Access Memory), which acts as external cache memory. By way of example, and not limitation, many forms of RAM are available, such as static random access memory (SRAM, static Random Access Memory), synchronous static random access memory (SSRAM, synchronous Static Random Access Memory), dynamic random access memory (DRAM, dynamic Random Access Memory), synchronous dynamic random access memory (SDRAM, synchronous Dynamic Random Access Memory), double data rate synchronous dynamic random access memory (ddr SDRAM, double Data Rate Synchronous Dynamic Random Access Memory), enhanced synchronous dynamic random access memory (ESDRAM, enhanced Synchronous Dynamic Random Access Memory), synchronous link dynamic random access memory (SLDRAM, syncLink Dynamic Random Access Memory), direct memory bus random access memory (DRRAM, direct Rambus Random Access Memory). The memory described by embodiments of the present invention is intended to comprise, without being limited to, these and any other suitable types of memory.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises an element.
The foregoing is merely exemplary of the present application and is not intended to limit the present application. Various modifications and changes may be made to the present application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. which are within the spirit and principles of the present application are intended to be included within the scope of the claims of the present application.
Claims (7)
1. A motion stage zeroing method applied to a motion stage with a double-guide-rail H-shaped structure, which is characterized by comprising the following steps:
controlling a lower closed loop of the encoder, and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rail;
stopping the movement of the movement table and controlling the movement of the movement table along the second direction when the electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction;
when detecting a zero sensor signal on any guide rail, acquiring a first original value of an encoder on the guide rail at the moment;
when detecting a zero sensor signal of the other guide rail, acquiring a second original value of the encoder on the other guide rail at the moment;
obtaining the bias parameters of the motion platform according to the first original value of the encoder and the second original value of the encoder;
controlling the motion platform to open loop, and setting the encoder bias parameters of the double guide rails according to the bias parameters;
re-closing the moving table to obtain initial position information of the moving table in closed loop; controlling the motion platform to move back to the zero point based on the initial position information;
the offset parameters of the motion platform comprise a first offset parameter corresponding to the height difference of the zero position sensor on the double guide rail, a second offset parameter of the zero position sensor corresponding to the first original value of the encoder and the mechanical zero position on the guide rail;
the setting the encoder bias parameters of the double guide rails according to the bias parameters comprises: setting the encoder bias of the guide rail corresponding to the first original value of the encoder as the sum of the first bias parameter and the second bias parameter minus the first original value of the encoder; setting the encoder bias of the guide rail corresponding to the encoder second original value as a second bias parameter minus the encoder second original value;
the step of re-closing the moving table, and the step of obtaining the initial position information of the moving table when the moving table is closed comprises the following steps: and re-closing the loop of the moving table, and obtaining the initial position information of the moving table during the loop closing according to the transformation matrix of the physical axis-to-logical axis.
2. The method of claim 1, wherein the stopping movement of the motion stage comprises: and smoothly stopping the motion of the motion platform.
3. The method of claim 1, wherein the zero position sensor on the dual rail is positioned at a location having a predetermined height differential.
4. A method according to claim 3, wherein the height difference is set to be greater than the product of the double rail spacing and the maximum tilt angle.
5. A motion stage zeroing apparatus, comprising:
the first control module is used for controlling the lower closed loop of the encoder and controlling the motion platform to move along a first direction; the first direction is parallel to the sliding direction of the double guide rails;
the motion stopping module is used for stopping the motion of the motion platform and controlling the motion platform to move along a second direction when an electric limit signal on any one of the double guide rails is detected; the second direction is the opposite direction of the first direction;
the first acquisition module is used for acquiring a first original value of the encoder on any guide rail when detecting a zero sensor signal on the guide rail;
the second acquisition module is used for acquiring a second original value of the encoder on the other guide rail when the zero sensor signal of the other guide rail is detected;
the third acquisition module is used for acquiring the offset parameter of the motion platform according to the first original value of the encoder and the second original value of the encoder;
the setting module is used for controlling the motion platform to open loop and setting the encoder bias parameters of the double guide rails according to the bias parameters;
the re-closed loop module is used for re-closing the moving table to obtain initial position information of the moving table during closed loop;
the second control module is used for controlling the motion platform to move back to the zero point based on the initial position information;
the offset parameters of the motion platform comprise a first offset parameter corresponding to the height difference of the zero position sensor on the double guide rail, a second offset parameter of the zero position sensor corresponding to the first original value of the encoder and the mechanical zero position on the guide rail;
the setting the encoder bias parameters of the double guide rails according to the bias parameters comprises: setting the encoder bias of the guide rail corresponding to the first original value of the encoder as the sum of the first bias parameter and the second bias parameter minus the first original value of the encoder; setting the encoder bias of the guide rail corresponding to the encoder second original value as a second bias parameter minus the encoder second original value;
the step of re-closing the moving table, and the step of obtaining the initial position information of the moving table when the moving table is closed comprises the following steps: and re-closing the loop of the moving table, and obtaining the initial position information of the moving table during the loop closing according to the transformation matrix of the physical axis-to-logical axis.
6. An electronic device, comprising: a processor and a memory for storing a computer program capable of running on the processor; wherein the processor is adapted to perform the steps of the method of any of claims 1 to 4 when the computer program is run.
7. A storage medium having a computer program stored therein, which, when executed by a processor, implements the steps of the method of any one of claims 1 to 4.
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