CN114295279A - Air pressure detection device and detection method - Google Patents
Air pressure detection device and detection method Download PDFInfo
- Publication number
- CN114295279A CN114295279A CN202111671668.5A CN202111671668A CN114295279A CN 114295279 A CN114295279 A CN 114295279A CN 202111671668 A CN202111671668 A CN 202111671668A CN 114295279 A CN114295279 A CN 114295279A
- Authority
- CN
- China
- Prior art keywords
- air
- air pressure
- detection
- independent
- air cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 100
- 230000001105 regulatory effect Effects 0.000 claims abstract description 11
- 230000003247 decreasing effect Effects 0.000 claims abstract description 3
- 230000008859 change Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 4
- 230000001276 controlling effect Effects 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 3
- 239000002699 waste material Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides an air pressure detection device and a detection method, which comprise a detection air cavity, a micro-pressure meter, a regulating valve and an independent air cavity, wherein the detection air cavity is used for accommodating gas to be detected, and a first air pressure sensor for detecting air pressure is arranged on the detection air cavity; the number of the independent air cavities is N, and the independent air cavities are communicated with the detection air cavities, and the pressure difference from the 1 st independent air cavity to the Nth independent air cavity is arranged in a sequentially increasing or decreasing mode to form a pressure difference gradient; each independent air cavity is provided with a second air pressure sensor for detecting air pressure; a micro-pressure meter is arranged between the detection air cavity and each independent air cavity; each independent air cavity is also provided with an adjusting valve for adjusting the air pressure in the independent air cavity. The air pressure detection device provided by the invention has the advantages that the pressure difference value of each independent air cavity relative to the detection air cavity is adjusted by designing the plurality of independent air cavities with the pressure difference gradient relative to the detection air cavity, so that closed-loop control is formed, and the stability of the pressure difference of the plurality of independent cavities relative to the detection air cavity is ensured.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to an air pressure detection device and a detection method.
Background
The air pressure detection device is widely applied to field measurement and control of industrial processes such as petroleum, chemical engineering, metallurgy, electric power and the like. The existing air pressure detection device on the market at present has the following problems in some scientific research experiments: firstly, a high-resolution air pressure sensor is adopted, when the air pressure is small, the measurement precision can be ensured, but the requirement of the test on the air pressure measurement range cannot be met, and the air pressure data of the whole test process cannot be obtained; secondly, the air pressure sensor with a large measuring range is adopted, the requirement of the whole test process on the air pressure measuring range can be met, but the small air pressure measuring precision is poor in the initial stage.
Disclosure of Invention
In order to solve the above problems, the present invention provides an air pressure detection apparatus and method, which can meet both the requirements of a large range and a high resolution by using the existing air pressure sensor.
The invention provides an air pressure detection device, which comprises a detection air cavity, a micro-pressure meter, a regulating valve and an independent air cavity, wherein the detection air cavity is provided with a micro-pressure sensor; the detection air cavity is used for containing gas to be detected, and a first air pressure sensor for detecting air pressure is arranged on the detection air cavity; the number of the independent air cavities is N, the independent air cavities are communicated with the detection air cavity, the pressure difference from the 1 st independent air cavity to the Nth independent air cavity is arranged in a sequentially increasing mode, a pressure difference gradient is formed, and N is larger than or equal to 1; each independent air cavity is provided with a second air pressure sensor for detecting air pressure; a micro-pressure meter for detecting the gas pressure difference between the detection gas cavity and each independent gas cavity is arranged between the detection gas cavity and each independent gas cavity; each independent air cavity is also provided with an adjusting valve for adjusting the air pressure in the independent air cavity.
Optionally, a control valve for controlling the flow of the gas flowing into each independent gas cavity is arranged between the detection gas cavity and each independent gas cavity.
Optionally, the control valve is provided as one of a pressure reducing valve, a throttle valve or a damper.
Optionally, the regulating valve is configured as a proportional valve or a waste gate valve.
Optionally, the range and resolution r of the first barometric pressure sensor is the same as the range and resolution r of the second barometric pressure sensor.
Optionally, the range W of the micro-manometer0Is greater than the resolution W of the micro-manometer<r/(N+1)。
In addition to the above structure, the air pressure detecting device provided by the present invention further includes a controller, wherein the controller controls the flow rate of the regulating valve according to the air pressure value detected by the first air pressure sensor, the air pressure value detected by the second air pressure sensor, and the air pressure difference value between the detected air cavity and each independent air cavity.
Optionally, the step of detecting the air pressure by using the air pressure detecting device includes the following steps:
step one, a first air pressure sensor detects air pressure in a detection air cavity to obtain a real-time air pressure value C0；
Step two, adjusting the air pressure difference value between the 1 st independent air cavity and the detection air cavity to a value of r/(N +1) according to the number of the independent air cavities and the sum of the number of the detection air cavities, and by analogy, sequentially adjusting the air pressures from the 2 nd independent air cavity to the Nth independent air cavity, wherein the air pressure difference values between two adjacent independent air cavities are r/(N +1) values;
and step three, when the air pressure value in the detection air cavity increases or decreases by r/(N +1), distinguishing the air pressure change r/(N +1) in the detection air cavity through the change conditions of the feedback values of the air pressure sensors in the detection air cavity and the independent air cavity, and improving the accuracy of air pressure detection in the detection air cavity.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the air pressure detection device provided by the invention, the pressure difference value of each independent air cavity relative to the detection air cavity is adjusted by designing the plurality of independent air cavities with the pressure difference gradient relative to the detection air cavity, so that closed-loop control is formed to ensure that the air pressure difference of the plurality of independent cavities relative to the detection air cavity is stable.
(2) The invention provides an air pressure detection method, which designs a plurality of independent air cavities with pressure difference gradients relative to a detection air cavity, controls the opening of a regulating valve of each independent air cavity through an air pressure difference value between the independent air cavity and the detection air cavity detected by a micro-manometer through a controller so as to regulate the pressure difference value of the independent air cavity relative to the detection air cavity, thereby forming closed-loop control to ensure the stability of the air pressure difference of the independent cavity relative to the detection cavity and further improving the accuracy of air pressure detection in the detection air cavity.
In addition to the objects, features and advantages described above, other objects, features and advantages of the present invention are also provided. The present invention will be described in further detail below with reference to the drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic diagram of an air pressure detecting device according to an embodiment of the present invention.
Wherein:
1. the device comprises a detection air cavity, 2, a control valve, 3, a micro-pressure meter, 4, a regulating valve, 5, a second air pressure sensor, 6, an independent air cavity, 7 and a controller.
Detailed Description
Referring to fig. 1, the air pressure detecting device provided by the present invention includes a detecting air cavity 1 and an independent air cavity 6; the detection air cavity 1 is used for containing gas to be detected, and a first air pressure sensor for detecting air pressure is arranged on the detection air cavity 1; the number of the independent air cavities 6 is N, the number of the independent air cavities is N, the independent air cavities are communicated with the detection air cavity 1, the pressure difference from the 1 st independent air cavity 6 to the Nth independent air cavity 6 is arranged in a sequentially increasing mode, a pressure difference gradient is formed, and N is larger than or equal to 1; and each independent air cavity 6 is provided with a second air pressure sensor 5 for detecting air pressure. Preference is given here to: the range R and the resolution R of the first baroceptor are the same as the range R and the resolution R of the second baroceptor 5.
Optionally, in order to control the connection or disconnection between the detection air cavity 1 and each independent air cavity 6, a control valve 2 for controlling the flow of air flowing into each independent air cavity 6 is arranged between the detection air cavity 1 and each independent air cavity 6. Preference is given here to: the control valve 2 is provided as one of a pressure reducing valve, a throttle valve or a damper.
Optionally, for detecting the air pressure between the detection air cavity 1 and each independent air cavity 6, a micro-pressure gauge 3 for detecting the air pressure difference between the detection air cavity 1 and each independent air cavity 6 is arranged between the detection air cavity 1 and each independent air cavity 6. Preference is given here to: the range W0 of the micro-manometer is larger than the resolution W of the micro-manometer, and the resolution W of the micro-manometer is less than r/(N + 1).
Optionally, in order to adjust the air pressure in each independent air cavity 6, each independent air cavity 6 is further provided with an adjusting valve 4 for adjusting the air pressure in the independent air cavity 6. Preference is given here to: the regulating valve 4 is provided as a proportional valve or a waste gate valve.
In addition to the above structure, the air pressure detecting device provided by the present invention further includes a controller 7, wherein the controller 7 controls the flow rate of the control valve 4 according to the air pressure value detected by the first air pressure sensor, the air pressure value detected by the second air pressure sensor 5, and the air pressure difference value between the detected air cavity 1 and each independent air cavity 6.
The invention provides an air pressure detection method, which adopts the air pressure detection device, and the steps of detecting the air pressure specifically comprise the following steps:
step one, first air pressure sensingThe air pressure in the detection air cavity is detected by the air pressure detector to obtain a real-time air pressure value C0(ii) a Preference is given here to: at this time, the actual air pressure value P0 in the air cavity is detected to be P0＝C0R, wherein: c0>r；
Step two, adjusting the air pressure difference value between the 1 st independent air cavity and the detection air cavity to a value of r/(N +1) according to the number of the independent air cavities and the sum of the number of the detection air cavities, and by analogy, sequentially adjusting the air pressures from the 2 nd independent air cavity to the Nth independent air cavity, wherein the air pressure difference values between two adjacent independent air cavities are r/(N +1) values;
and step three, when the air pressure value in the detection air cavity increases or decreases by r/(N +1), distinguishing the air pressure change r/(N +1) in the detection air cavity through the change conditions of the feedback values of the air pressure sensors in the detection air cavity and the independent air cavity, and improving the accuracy of air pressure detection in the detection air cavity.
Specifically, for example, the steps of detecting the real-time air pressure in the detection air cavity by using the first air pressure sensor is 0.09Mpa, the ranges of the first air pressure sensor and the second air pressure sensor are 1Mpa, the resolutions of the first air pressure sensor and the second air pressure sensor are 100pa, the range of the micro-pressure meter is 100pa, the resolution of the micro-pressure meter is 10pa, and the number of the independent air cavities is 4, by using the air pressure detection device, the air pressure detection method specifically includes the following steps:
step one, detecting the air pressure in the air cavity: the first air pressure sensor detects the air pressure in the detection air cavity to obtain a real-time air pressure value C00.09MPa, and real-time air pressure value C0Transmitting to the controller, detecting the actual pressure P in the air cavity0＝0.09Mpa；
Step two, adjusting the air pressure difference value between the N independent air cavities and the detection air cavity: according to the sum of the number of the independent air cavities and the number of the detection air cavities, the air pressure difference value between the 1 st independent air cavity and the detection air cavity is adjusted to be 20pa (namely 20pa is obtained by calculation according to r/(N + 1)); specifically, the controller controls the opening of the regulating valve arranged on the 1 st independent air cavity according to the value of 20pa so as to regulate the air pressure difference value between the 1 st independent air cavity and the detection air cavity to the value of 20 pa; by analogy, the air pressure difference value from the 2 nd independent air cavity to the Nth independent air cavity is adjusted in a sequential increasing or decreasing mode, namely the pressure difference value between the 2 nd independent air cavity and the detection air cavity is adjusted to 40pa, the pressure difference value between the 3 rd independent air cavity and the detection air cavity is adjusted to 60pa, and the pressure difference value between the 4 th independent air cavity and the detection air cavity is adjusted to 80 pa; specifically, if the pressure difference value between the 2 nd independent air cavity and the detection air cavity is detected to be 50pa, the controller sends a pressure release instruction to the adjusting valve arranged on the 2 nd independent air cavity so as to release the pressure in the 2 nd independent air cavity to 0.09Mpa +40pa, and the like, so that the 3 rd independent air cavity and the 4 th independent air cavity are adjusted;
and step three, when the air pressure value in the detection air cavity increases by 20pa, the pressure of the 4 th independent air cavity changes by 0.09Mpa +100pa, the air pressure value changes by integral multiple of the resolution of the second air pressure sensor by 100pa, and the air pressure value fed back to the controller by the second air pressure sensor changes, so that the minimum resolution of the air pressure value change in the detection air cavity is 20pa, and the accuracy of the air pressure detection in the detection air cavity is improved.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. An air pressure detection device is characterized by comprising a detection air cavity (1), a micro-pressure meter (3), a regulating valve (4) and an independent air cavity (6),
the detection air cavity (1) is used for containing gas to be detected, and a first air pressure sensor for detecting air pressure is arranged on the detection air cavity (1);
the number of the independent air cavities (6) is N, the number of the independent air cavities is N, the independent air cavities are communicated with the detection air cavity (1), the pressure difference from the 1 st independent air cavity (6) to the Nth independent air cavity (6) is arranged in a sequentially increasing or decreasing mode, a pressure difference gradient is formed, and N is larger than or equal to 1; and each independent air cavity (6) is provided with a second air pressure sensor (5) for detecting air pressure;
a micro-pressure meter (3) for detecting the gas pressure difference in the detection air cavity (1) and the independent air cavities (6) is arranged between the detection air cavity (1) and each independent air cavity (6);
each independent air cavity (6) is also provided with an adjusting valve (4) for adjusting the air pressure in the independent air cavity (6).
2. The air pressure detecting device according to claim 1, wherein a control valve (2) for controlling the flow rate of air flowing into each independent air chamber (6) is provided between the detecting air chamber (1) and each independent air chamber (6).
3. The air pressure detecting device according to claim 2, characterized in that the control valve (2) is provided as one of a pressure reducing valve, a throttle valve or a damper.
4. The air pressure detecting device according to claim 1, wherein the range W of the micro-manometer0Is greater than the resolution W of the micro-manometer<r/(N+1)。
5. The air pressure detection device according to claim 1, wherein the regulating valve (4) is provided as a proportional valve or a waste gate valve.
6. The air pressure detection device according to claim 1, characterized in that the range and resolution r of the first air pressure sensor coincides with the range and resolution r of the second air pressure sensor (5).
7. The air pressure detecting device according to any one of claims 1 to 6, further comprising a controller (7), wherein the controller (7) controls the flow rate of the regulating valve (4) based on the air pressure value detected by the first air pressure sensor, the air pressure value detected by the second air pressure sensor (5), and the air pressure difference value between the detected air chamber (1) and each individual air chamber (6).
8. An air pressure detecting method, characterized in that, with the air pressure detecting device according to claim 7, the step of detecting the air pressure specifically includes the following steps:
step one, a first air pressure sensor detects air pressure in a detection air cavity to obtain a real-time air pressure value C0；
Step two, adjusting the air pressure difference value between the 1 st independent air cavity and the detection air cavity to a value of r/(N +1) according to the number of the independent air cavities and the sum of the number of the detection air cavities, and by analogy, sequentially adjusting the air pressures from the 2 nd independent air cavity to the Nth independent air cavity, wherein the air pressure difference values between two adjacent independent air cavities are r/(N +1) values;
and step three, when the air pressure value in the detection air cavity increases or decreases by r/(N +1), distinguishing the air pressure change r/(N +1) in the detection air cavity through the change conditions of the feedback values of the air pressure sensors in the detection air cavity and the independent air cavity, and improving the accuracy of air pressure detection in the detection air cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111671668.5A CN114295279A (en) | 2021-12-31 | 2021-12-31 | Air pressure detection device and detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111671668.5A CN114295279A (en) | 2021-12-31 | 2021-12-31 | Air pressure detection device and detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114295279A true CN114295279A (en) | 2022-04-08 |
Family
ID=80975332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111671668.5A Pending CN114295279A (en) | 2021-12-31 | 2021-12-31 | Air pressure detection device and detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114295279A (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002030981A (en) * | 2000-07-18 | 2002-01-31 | Denso Corp | Atmospheric pressure detecting device |
| JP2003227773A (en) * | 2001-11-27 | 2003-08-15 | Shinichiro Arima | Pressure measuring method and apparatus thereof |
| US20040231413A1 (en) * | 2001-06-08 | 2004-11-25 | Lars Stenmark | Advanced volume gauging device |
| KR20050049677A (en) * | 2003-11-22 | 2005-05-27 | 이승규 | A flooding sensor and the system for warning of flooding thereof |
| WO2010143470A1 (en) * | 2009-06-12 | 2010-12-16 | ボッシュ株式会社 | Differential pressure detection device and fluid pressure control device |
| DE102013209783A1 (en) * | 2012-06-07 | 2013-12-12 | GM Global Technology Operations, LLC (n.d. Ges. d. Staates Delaware) | METHOD FOR MONITORING A DIFFERENTIAL PRESSURE SENSOR OF AN EXHAUST TREATMENT SYSTEM |
| JP2014035313A (en) * | 2012-08-10 | 2014-02-24 | Amano Corp | Clogging prevention device for pressure detection pipe |
| CN204214590U (en) * | 2014-11-05 | 2015-03-18 | 中石化宁波工程有限公司 | A kind of pressure-detecting device |
| CN107356364A (en) * | 2017-06-26 | 2017-11-17 | 中国石油大学(北京) | The measurement apparatus and method of compact rock core free-boundary problem |
| KR20180106830A (en) * | 2017-03-21 | 2018-10-01 | 달리안 유니버시티 오브 테크놀러지 | Experimental apparatus and experimental method for measuring indoor and outdoor penetration coefficient of airborne |
| CN108868793A (en) * | 2018-09-17 | 2018-11-23 | 中国铁建重工集团有限公司 | A kind of shield owner driving high pressure sealing system and a kind of slurry balance shield machine |
| CN110715772A (en) * | 2019-11-21 | 2020-01-21 | 中国铁建重工集团股份有限公司 | Shield machine main drive seal test system and test method |
| JP2021011956A (en) * | 2019-07-03 | 2021-02-04 | 株式会社村田製作所 | Atmospheric pressure control system |
| DE102020200718A1 (en) * | 2020-01-22 | 2021-07-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Device for function control of at least one pressure sensor, in particular function control with generation and high-precision back measurement of real differential pressures |
-
2021
- 2021-12-31 CN CN202111671668.5A patent/CN114295279A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002030981A (en) * | 2000-07-18 | 2002-01-31 | Denso Corp | Atmospheric pressure detecting device |
| US20040231413A1 (en) * | 2001-06-08 | 2004-11-25 | Lars Stenmark | Advanced volume gauging device |
| JP2003227773A (en) * | 2001-11-27 | 2003-08-15 | Shinichiro Arima | Pressure measuring method and apparatus thereof |
| KR20050049677A (en) * | 2003-11-22 | 2005-05-27 | 이승규 | A flooding sensor and the system for warning of flooding thereof |
| WO2010143470A1 (en) * | 2009-06-12 | 2010-12-16 | ボッシュ株式会社 | Differential pressure detection device and fluid pressure control device |
| DE102013209783A1 (en) * | 2012-06-07 | 2013-12-12 | GM Global Technology Operations, LLC (n.d. Ges. d. Staates Delaware) | METHOD FOR MONITORING A DIFFERENTIAL PRESSURE SENSOR OF AN EXHAUST TREATMENT SYSTEM |
| JP2014035313A (en) * | 2012-08-10 | 2014-02-24 | Amano Corp | Clogging prevention device for pressure detection pipe |
| CN204214590U (en) * | 2014-11-05 | 2015-03-18 | 中石化宁波工程有限公司 | A kind of pressure-detecting device |
| KR20180106830A (en) * | 2017-03-21 | 2018-10-01 | 달리안 유니버시티 오브 테크놀러지 | Experimental apparatus and experimental method for measuring indoor and outdoor penetration coefficient of airborne |
| CN107356364A (en) * | 2017-06-26 | 2017-11-17 | 中国石油大学(北京) | The measurement apparatus and method of compact rock core free-boundary problem |
| CN108868793A (en) * | 2018-09-17 | 2018-11-23 | 中国铁建重工集团有限公司 | A kind of shield owner driving high pressure sealing system and a kind of slurry balance shield machine |
| JP2021011956A (en) * | 2019-07-03 | 2021-02-04 | 株式会社村田製作所 | Atmospheric pressure control system |
| CN110715772A (en) * | 2019-11-21 | 2020-01-21 | 中国铁建重工集团股份有限公司 | Shield machine main drive seal test system and test method |
| DE102020200718A1 (en) * | 2020-01-22 | 2021-07-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Device for function control of at least one pressure sensor, in particular function control with generation and high-precision back measurement of real differential pressures |
Non-Patent Citations (2)
| Title |
|---|
| 刘在政;廖金军;胡骞;: "基于推进压差和回转压力变化的钻孔参数自动匹配系统设计", 隧道建设(中英文), no. 08, 18 September 2018 (2018-09-18) * |
| 高新平;彭钧亮;韩慧芬;周玉超;李力民;冯艳;: "相国寺储气库储层微粒运移伤害实验研究及应用", 钻采工艺, no. 03, 25 May 2020 (2020-05-25) * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100740914B1 (en) | Differential pressure type flowmeter and differential pressure type flowmeter controller | |
| CN100480656C (en) | Pressure sensor, pressure controller, and automatic zero point-correcting device for pressure flow control device | |
| JP5337542B2 (en) | Mass flow meter, mass flow controller, mass flow meter system and mass flow controller system including them | |
| CN102640070B (en) | Pressure-type flow rate control device | |
| Kawashima et al. | Determination of flow rate characteristics of pneumatic solenoid valves using an isothermal chamber | |
| JP4822464B2 (en) | Pressure regulator and vibration isolator | |
| KR20180100203A (en) | Flow control device, flow rate calibration method of flow control device, flow measurement device and flow measurement method using flow measurement device | |
| KR101544648B1 (en) | Flow calculation apparatus and flow control apparatus | |
| CN110571171B (en) | Calibration method and calibration system of gas flow controller and gas inlet device | |
| CN110553786A (en) | Pressure sensor compensation method and system | |
| CN107830914B (en) | Micro-flow calibration device and method with double-channel symmetrical structure | |
| CN109855691B (en) | Differential laminar flow measuring method and device | |
| US20220082415A1 (en) | Mass flow controller | |
| JPH1194603A (en) | Method for monitoring actual flow of gas to vacuum facility, and vacuum processing device | |
| EP2221280A3 (en) | Apparatus and method for supplying hydrogen gas, and quartz glass manufacturing apparatus | |
| CN109612899A (en) | A kind of pressure correction formula gas permeability calculation method | |
| CN105181269B (en) | The multichannel fast calibration device and method of a kind of leakage detecting instrument | |
| CN114295279A (en) | Air pressure detection device and detection method | |
| JP4669193B2 (en) | Temperature measuring device for pressure flow control device | |
| US11326921B2 (en) | Flow rate measuring method and flow rate measuring device | |
| CN111103020A (en) | Flow detection device, flow control system and flow detection method | |
| CN206339467U (en) | Core porosity measurement apparatus | |
| Haase et al. | Ex-situ gas diffusion layer intrusion effect determination of polymer electrolyte membrane fuel cell flow fields | |
| JP4852654B2 (en) | Pressure flow control device | |
| KR20130005896A (en) | Apparatus for supplying fluid's leak |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |