CN114294463A

CN114294463A - Three-fork valve core type super-clean valve

Info

Publication number: CN114294463A
Application number: CN202111608800.8A
Authority: CN
Inventors: 陈昌; 周瑞; 孙伟杰; 孙继腾; 王龙
Original assignee: Hangzhou Dianzi University
Current assignee: Hangzhou Dianzi University
Priority date: 2021-12-27
Filing date: 2021-12-27
Publication date: 2022-04-08

Abstract

The invention discloses a three-fork valve core type ultra-clean valve, which comprises a valve seat, wherein the front end of the valve seat is sleeved in a valve cover, a valve core is arranged between the valve seat and the valve cover, a valve core tail electromagnet is installed at the rear end of the valve seat, a valve core tail electromagnet protective cover is covered outside the valve core tail electromagnet, a valve core head electromagnet is installed at the front end of the valve cover, a valve core head electromagnet protective cover is covered outside the valve core head electromagnet, and the volume and the magnetic force of the valve core head electromagnet are both larger than those of the valve core tail electromagnet.

Description

Three-fork valve core type super-clean valve

Technical Field

The invention belongs to the technical field of ultra-clean valves, and particularly relates to a three-fork valve core type ultra-clean valve.

Background

The requirements of the fields of semiconductors, biological medicines, electronic grade chemical industry and the like on pollutants such as particulate matters are very strict, and meanwhile, the requirement on cleanliness of a liquid or gas production environment required by a production process is also very high, so that a material or a process which meets a certain cleanliness standard is called an ultra-clean material or an ultra-clean process. In the environment that ultra-clean fluid or corrosive fluid is needed to be conveyed, the structure of the valve must be safe and reliable, the material of the valve needs to be corrosion-resistant, the communication of the medium inside the valve with the outside is strictly avoided, and meanwhile, abrasion and particles cannot be generated in the opening and closing process of the valve.

The traditional valve is generally provided with an external extending control part similar to a valve rod, so that the dynamic sealing point of the traditional valve is difficult to eliminate in principle, the traditional valve is easy to generate external leakage in the long-term and repeated opening and closing process, even the internal medium is enabled to be communicated with the outside, fluid pollution is further caused, great financial affairs with great potential safety hazard and great loss are generated, the traditional valve is generally sealed by adopting a sliding friction pair, the problems of abrasion and particle pollution can be caused after long-time use, and the interference on the internal medium and the external environment is generated.

In order to adapt to the environment of ultra-clean production, the common traditional valve which cannot achieve ultra-clean is eliminated, and the ultra-clean electromagnetic valve is used as a control element of the ultra-clean valve. If the permanent magnet embedded type ultra-clean valve, elements for controlling opening and closing, such as an external electromagnet and an external permanent magnet, are arranged outside the flow chamber, the permanent magnet is embedded in the valve core, the valve core is connected with the valve cover through a spring, the axial movement of the valve core is controlled by controlling the on-off of the electromagnet, and then the opening and closing of the valve port are controlled. The method for controlling the connection of the permanent magnet embedded type ultra-clean valve through magnetic force avoids the problem of external leakage of the valve core type connection of the traditional valve rod on the premise of ensuring the requirement of ultra-clean environment, solves the problems of short service life and weak protection capability after breakage of an elastic membrane of the valve rod compared with the existing diaphragm valve and the existing corrugated pipe valve, and greatly improves the service life and the safety performance of the ultra-clean valve; compared with the existing fully-sealed ultra-clean one-way valve, the opening and closing of the valve can be controlled by the outside, and the control requirements of conveying different ultra-clean fluids can be better met. However, the following disadvantages are present:

(1) the valve core is connected through a single-point spring, when the flow velocity is too large or the flow control element vibrates, the risk of resonance collision with the valve wall and the like is caused due to the too large degree of freedom, and the internal closed structure is abraded or polluted by particles over time.

(2) The valve core adopts a cylindrical design, the valve core is not tightly closed only by the contact of the valve core plane and the valve port plane, and the risk of leakage of the internal flow chamber is generated due to the unstable factors of the electromagnetic force.

Disclosure of Invention

The invention aims to overcome the defects in the prior art and provides the trifurcate valve core type ultra-clean valve which can accurately control the opening and closing of the valve, does not generate leakage of an internal flow chamber and does not generate abrasion and pollution particles.

In order to achieve the above purposes, the technical scheme adopted by the invention is as follows: the utility model provides a super clean valve of trident case formula, includes the disk seat, and the disk seat front end cover is established in the valve gap, has laid the case between disk seat, the valve gap, and case afterbody electromagnet is installed to the rear end of disk seat, and the outer cladding of case afterbody electromagnet has case afterbody electromagnet safety cover, and the front end of valve gap is installed case head portion electromagnet, and the outer cladding of case head portion electromagnet has case head portion electromagnet safety cover, the volume of case head portion electromagnet, magnetic force all are greater than the volume of case afterbody electromagnet, magnetic force.

As a preferable scheme of the invention, the valve seat and the valve cover are connected to form an ultra-clean flow chamber inside, and the valve core is positioned in the ultra-clean flow chamber.

As a preferable scheme of the present invention, the valve seat includes a transition flow chamber, one end of the transition flow chamber is communicated with the valve front end flow passage, and the other end of the transition flow chamber is communicated with the guide flow passage and the branch flow passage.

As a preferable mode of the present invention, the guide flow passages and the branch flow passages are circumferentially arranged in the valve seat, and the number of the guide flow passages is 2.

As a preferred scheme of the invention, the valve core comprises an embedded permanent magnet, fork heads, guide fork heads and a flow channel, wherein the fork heads and the guide fork heads are distributed on the circumference of the bottom of the valve core, and the number of the guide fork heads is 2.

As a preferable scheme of the present invention, the fork is adapted to the branch flow passage, and the guide fork is adapted to the guide flow passage.

In a preferred embodiment of the present invention, a spring is further connected between the valve core and the valve cover, one end of the spring is embedded in a spring groove at the head of the valve core, and the other end of the spring is embedded in a spring groove of the valve cover at the inner surface of the valve cover.

In a preferred embodiment of the present invention, the spring is made of ultra-clean spring steel.

As a preferable scheme of the present invention, the front end of the valve cover is provided with an electromagnetic valve slot for installing the electromagnet at the head of the valve core, and the rear end of the valve seat is provided with a valve seat electromagnetic valve slot for installing the electromagnet at the tail of the valve core.

As a preferable scheme of the present invention, the valve cap includes an inner stepped surface and a nozzle located in the valve cap, and an outlet flow passage is formed in the nozzle.

The invention has the beneficial effects that:

1. the valve core in the ultra-clean flow chamber is controlled to move axially by the electromagnet at the tail part of the valve core and the electromagnet at the head part of the valve core, so that the valve port is opened and closed, wherein the two guide forks on the valve core are axially positioned, the degree of freedom of the valve core is effectively limited, and the risk of leakage of the inner flow chamber and abrasion caused by collision of the valve core due to irregular movement of the valve core in the ultra-clean flow chamber caused by factors such as overlarge flow speed are avoided.

2. The electromagnet driving assembly has small volume and short distance, the speed response of opening and closing of the valve port is fast, the moving speed and amplitude of the valve core can be controlled by adjusting the current of one or two electromagnets, and the opening and closing of the valve core can be controlled more accurately.

3. According to the invention, the head electromagnet and the tail electromagnet of the valve core are externally coated with the head electromagnet protective cover and the tail electromagnet protective cover of the valve core, and the head electromagnet protective cover and the tail electromagnet protective cover of the valve core protect the head electromagnet and the tail electromagnet of the valve core from being damaged and corroded, so that the normal work of the head electromagnet and the tail electromagnet of the valve core is ensured; the electromagnetic valve groove arranged at the front end of the valve cover and the electromagnetic valve groove arranged at the rear end of the valve seat facilitate the positioning and installation of the electromagnet at the head part of the valve core and the electromagnet at the tail part of the valve core.

Drawings

FIG. 1 is a schematic view of the valve cartridge of the present invention when open;

FIG. 2 is a schematic view of the valve cartridge of the present invention when closed;

FIG. 3 is a schematic view of the construction of the valve seat of the present invention;

FIG. 4 is a side cross-sectional view of the valve seat of the present invention;

FIG. 5 is a first schematic structural view of the valve cover of the present invention;

FIG. 6 is a second schematic structural view of the valve cover of the present invention;

FIG. 7 is a first schematic structural view of the valve cartridge of the present invention;

FIG. 8 is a second schematic structural view of the valve cartridge of the present invention;

reference numbers in the figures: the valve core comprises a valve core head electromagnet protection cover 1, a valve cover 2, a valve seat 3, a valve core 4, a valve core tail electromagnet 5, a valve core tail electromagnet protection cover 6, a valve core head electromagnet 7, a spring 8, an ultra-clean flow chamber 9, a valve cover spring groove 21, an electromagnetic valve groove 22, a stepped surface 23, a pipe orifice 24, an outlet flow passage 25, a transition flow chamber 31, a valve front end flow passage 32, a guide flow passage 33, a branch flow passage 34, a valve seat electromagnetic valve groove 35, a permanent magnet 41, a fork head 42, a guide fork head 43, a spring groove 44 and a flow passage 45.

Detailed Description

The following describes embodiments of the present invention in detail with reference to the accompanying drawings.

As shown in fig. 1-2, a trifurcate valve core type ultra-clean valve comprises a valve seat 3, the front end of the valve seat 3 is sleeved in a valve cover 2, an ultra-clean flow chamber 9 is formed inside the valve seat 3 and the valve cover 2 after being connected, a valve core 4 is positioned in the ultra-clean flow chamber 9, a valve core tail electromagnet 5 is installed at the rear end of the valve seat 3, a valve core tail electromagnet protection cover 6 is covered outside the valve core tail electromagnet 5, the valve core tail electromagnet protection cover 6 is used for protecting the valve core tail electromagnet 5 from being damaged and corroded, and ensuring the normal operation of the valve core tail electromagnet 5, a valve core head electromagnet 7 is installed at the front end of the valve cover 2, a valve core head electromagnet protection cover 1 is covered outside the valve core head electromagnet 7, the valve core head electromagnet protection cover 1 is used for protecting the valve core head electromagnet 7 from being damaged and corroded, and ensuring the normal operation of the valve core head electromagnet 7, and the volume of the valve core head electromagnet 7 is small, The magnetic force is larger than the volume and the magnetic force of the electromagnet 5 at the tail part of the valve core.

Specifically, the valve cover 2, the valve seat 3 and the valve core 4 form a main body part of the valve, the valve core head electromagnet protection cover 1, the valve core tail electromagnet protection cover 6, the valve core head electromagnet 7, the valve core tail electromagnet 5 and the valve core inner permanent magnet 41 jointly form a driving assembly of the valve, the valve core tail electromagnet 5 and the valve core head electromagnet 7 at two ends of the valve core 4 can jointly adjust magnetic force to further interact, accurate traction control is achieved on axial displacement of the valve core 4, and the ultra-clean valve is opened and closed.

Considering that the electromagnet needs to shield a changing electromagnetic field in a normal working chamber, such as a power frequency electromagnetic field, and needs high magnetic conductivity and high electric conductivity besides the requirement of high magnetic conductivity, the materials of the valve core head electromagnet protection cover 1 and the valve core tail electromagnet protection cover 6 are preferably permalloy, when the nickel content in the permalloy is higher than 40%, the magnetic conductivity and the electric conductivity are both good, and of course, a magnetic shielding material containing ferroaluminum of about 15% -16% of aluminum can also be adopted.

To accommodate the high cleanliness requirements of ultra-clean tooling, the valve cover 2, valve seat 3, and valve core 4 should be an ultra-clean material of fluoroplastic, including perfluoroalkoxy, polytetrafluoroethylene, or polyvinylidene fluoride, or any combination thereof. Or the inner surface of the high-cleanliness metal is processed by adopting a fluorine lining technology, and the selectable fluoroplastics are various and comprise Polytetrafluoroethylene (PTFE), Fluorinated Ethylene Propylene (FEP), Polychlorotrifluoroethylene (PCTFE) and the like, and the specific situation is determined according to the using environment.

The valve seat 3 comprises a transition flow chamber 31, one end of the transition flow chamber 31 is communicated with a valve front end flow passage 32, the other end of the transition flow chamber 31 is communicated with a guide flow passage 33 and a branch flow passage 34, the guide flow passage 33 and the branch flow passage 34 are distributed in the valve seat 3 in the circumferential direction, and the number of the guide flow passages 33 is 2.

The front end of the valve cover 2 is provided with an electromagnetic valve slot 22 for installing the valve core head electromagnet 7, the rear end of the valve seat 3 is provided with a valve seat electromagnetic valve slot 35 for installing the valve core tail electromagnet 5, and the electromagnetic valve slot 22 and the valve seat electromagnetic valve slot 35 are convenient for the positioning and installation of the valve core head electromagnet 7 and the valve core tail electromagnet 5.

Specifically, the spool tail electromagnet 5 and the spool head electromagnet 7 use annular electromagnets, and the sizes of the electromagnets are suitable for the sizes of the electromagnetic valve groove 22 and the valve seat electromagnetic valve groove 35, and the electromagnets need to be designed and customized.

The valve cap 2 includes an internal stepped surface 23 and a nozzle 24 at the front end of the valve cap 2, the nozzle 24 forming an outlet flow passage 25.

The valve core 4 is of a three-fork structure, the valve core 4 comprises an embedded permanent magnet 41, a fork 42, a guide fork 43 and a flow passage 45,

the fork head 42 and the guide fork head 43 are arranged on the circumference of the bottom of the valve core 4, the extension type guide fork head 43 limits the axial movement of the valve core 4 in the valve seat 3, the valve core 4 always keeps a degree of freedom, and the extension type short conical head fork head 42 controls the on-off of fluid.

The head of the fork head 42 is conical, the half cone angle of the conical surface is greater than or equal to 45 degrees and less than or equal to 75 degrees, the length dimension of the fork head 42 is far smaller than that of the guide fork head 43, the longer guide fork head 43 prevents the valve core 4 from being separated from the valve seat 3, the number of the guide fork heads 33 is 2, the fork head 42 is matched with the branch flow channel 34, and the guide fork head 43 is matched with the guide flow channel 33.

Specifically, the valve core 4 is preferably made of polytetrafluoroethylene except for the embedded permanent magnet 41, the surface of the permanent magnet 41 needs to be plated with a metal film with a thickness of micron order or more during manufacturing, and meanwhile, the permanent magnet 41 is embedded in the valve core 4 in an injection molding manner.

A spring 8 is connected between the valve core 4 and the valve cover 2, one end of the spring 8 is embedded into a spring groove 44 at the head part of the valve core 4, and the other end of the spring 8 is embedded into a valve cover spring groove 21 on the inner surface of the valve cover 2.

The material of the spring 8 is an ultra-clean spring steel having a wire sulfur content of not more than 10% of oxide inclusions, which are present in the outer layer of a quarter of the wire diameter and not less than 70% of such inclusions having a width of not less than 3 μm.

When the three-fork valve core type ultra-clean valve is implemented specifically:

as shown in fig. 1, 3-8, when the valve core is opened:

the liquid medium flows into the transition flow chamber 31 in the valve seat 32 from the flow passage 32 at the front end of the valve, and then flows into three flow passages at the other end of the transition flow chamber 31, wherein two of the three flow passages are guide flow passages 33, the other flow passage is convenient for the liquid medium to pass through a branch flow passage 34, and the liquid medium reaches the ultra-clean flow chamber 9 through the branch flow passage 34, then passes through the flow passage 45 in the valve core 4, and finally flows into a pipeline or the next immersion liquid assembly after passing through the outlet flow passage 25.

As shown in fig. 2, 3-8, when the valve core is closed:

in the ultra-clean flow chamber 9, due to the action of elastic potential energy of the spring 8, one end of the spring 8 abuts against the valve cover 2, the other end of the spring 8 pushes the valve core 4 to the valve seat 3, the guide fork 43 moves axially in the guide flow passage 33, the fork 42 enters the branch flow passage 34 from the ultra-clean flow chamber 9, at the moment, the three flow passages are all closed, the electromagnet 5 at the tail part of the valve core is electrified, the electromagnet 5 at the tail part of the valve core generates axial suction to the permanent magnet 41 in the valve core 4, the valve core 4 is further driven to move axially to the valve seat 3, at the moment, the guide flow passage 33 and the branch flow passage 34 are sealed, and the valve body is in a closed state.

When the valve core is opened again:

when the valve body is closed, the valve core head electromagnet 7 is electrified, the current passing through the valve core head electromagnet 7 is regulated regularly, and when the current linearly increases from zero, the suction force of the valve core head electromagnet 7 to the embedded permanent magnet 41 is also linearly increased. When the attraction force of the electromagnet 7 at the head part of the valve core is greater than the sum of the attraction force of the electromagnet 5 at the tail part of the valve core and the elastic force vector of the spring, the valve core 4 starts to move axially towards the valve cover 2, correspondingly, the displacement of the valve core 4 can be controlled by controlling the current of the electromagnet 7 at the head part of the valve core, and the moving speed of the valve core 4 can be controlled by controlling the current acceleration of the electromagnet 7.

When the valve core 4 reaches the limit position close to the valve cover 2 due to the suction force of the valve core head electromagnet 7, the fork 42 on the valve core 4 is moved out of the branch flow channel 34, then the branch flow channel 34 is completely opened, the fluid medium can pass through the branch flow channel 34 from the transition flow chamber 31 to the ultra-clean flow chamber 9 and flow into the outlet flow channel 25 through the flow channel 45, and the valve body is in the open state again.

If the driving assembly only comprises the valve core head electromagnet 7 and the spring 8 and is used for driving the valve core 4, the opening and closing of the valve port can be realized, but if the liquid inlet flow rate of the valve body is too high, the flow rate of a liquid medium entering the branch flow channel 34 is too high, at the moment, although the elastic potential energy of the spring is used for supporting, the valve core 4 can be flushed out of the branch flow channel 34 by immersion liquid, and the condition of internal leakage is generated in the closing stage of the valve body;

after the double electromagnet control is additionally arranged, the suction force of the electromagnet 7 at the head of the valve core can be adjusted by adjusting the input current of the electromagnet 7 at the head of the valve core, so that the speed of the valve core 4 is adjusted. In the later design, displacement sensors can be additionally arranged on the valve core 4, the valve cover 2 and the like, or a flowmeter is additionally arranged at the rear end of the valve body to measure the flow passing through the valve port, so that the position or the displacement speed of the valve core can be monitored and adjusted in real time.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention; thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Although the reference numerals in the figures are used more here: the valve core head electromagnet protection cover 1, the valve cover 2, the valve seat 3, the valve core 4, the valve core tail electromagnet 5, the valve core tail electromagnet protection cover 6, the valve core head electromagnet 7, the spring 8, the ultra-clean flow chamber 9, the valve cover spring groove 21, the electromagnetic valve groove 22, the stepped surface 23, the pipe orifice 24, the outlet flow passage 25, the transition flow chamber 31, the valve front end flow passage 32, the guide flow passage 33, the branch flow passage 34, the valve seat electromagnetic valve groove 35, the permanent magnet 41, the fork 42, the guide fork 43, the spring groove 44 and other terms, but the possibility of using other terms is not excluded; these terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.

Claims

1. A three-fork valve core type super-clean valve is characterized in that: including disk seat (3), disk seat (3) front end cover is established in valve gap (2), has laid case (4) between disk seat (3), the valve gap (2), and case afterbody electromagnet (5) are installed to the rear end of disk seat (3), and the outer cladding of case afterbody electromagnet (5) has case afterbody electromagnet safety cover (6), and case head electromagnet (7) are installed to the front end of valve gap (2), and case head electromagnet (7) outer cladding has case head electromagnet safety cover (1), volume, the magnetic force of case head electromagnet (7) all are greater than volume, the magnetic force of case afterbody electromagnet (5).

2. The three-prong spool-type ultra-clean valve according to claim 1, wherein: the valve seat (3) and the valve cover (2) are connected to form an ultra-clean flow chamber (9) inside, and the valve core (4) is located in the ultra-clean flow chamber (9).

3. The three-prong spool-type ultra-clean valve according to claim 1, wherein: the valve seat (3) comprises a transition flow chamber (31), one end of the transition flow chamber (31) is communicated with a valve front end flow passage (32), and the other end of the transition flow chamber (31) is communicated with a guide flow passage (33) and a branch flow passage (34).

4. The three-way spool type ultra-clean valve according to claim 3, characterized in that: the guide flow channels (33) and the branch flow channels (34) are distributed in the circumferential direction in the valve seat (3), and the number of the guide flow channels (33) is 2.

5. The three-prong spool-type ultra-clean valve according to claim 1, wherein: the valve core (4) comprises an embedded permanent magnet (41), a fork head (42), a guide fork head (43) and a flow channel (45), the fork head (42) and the guide fork head (43) are distributed on the circumference of the bottom of the valve core (4), and the number of the guide fork heads (33) is 2.

6. The three-way spool type ultra-clean valve according to claim 5, characterized in that: the fork head (42) is matched with the branch flow channel (34), and the guide fork head (43) is matched with the guide flow channel (33).

7. The three-prong spool-type ultra-clean valve according to claim 1, wherein: and a spring (8) is also connected between the valve core (4) and the valve cover (2), one end of the spring (8) is embedded into a spring groove (44) at the head of the valve core (4), and the other end of the spring (8) is embedded into a valve cover spring groove (21) on the inner surface of the valve cover (2).

8. The three-way spool type ultra-clean valve according to claim 7, characterized in that: the spring (8) is made of ultra-clean spring steel.

9. The three-prong spool-type ultra-clean valve according to claim 1, wherein: the front end of the valve cover (2) is provided with an electromagnetic valve groove (22) for installing the valve core head electromagnet (7), and the rear end of the valve seat (3) is provided with a valve seat electromagnetic valve groove (35) for installing the valve core tail electromagnet (5).

10. The three-prong spool-type ultra-clean valve according to claim 1, wherein: the valve cover (2) comprises an inner stepped surface (23) and a pipe orifice (24) located at the front end of the valve cover (2), and an outlet flow passage (25) is formed in the pipe orifice (24).