CN215487664U - Ultra-clean differential electromagnetic valve with low power consumption - Google Patents

Abstract

The utility model discloses an ultra-clean differential electromagnetic valve with low power consumption. The valve cover and the valve seat are tightly assembled to form an ultra-clean flow chamber, and the ultra-clean flow chamber is provided with an inlet flow path and an outlet flow path; an ultra-clean valve core is arranged in the ultra-clean flow chamber, and an outer upper permanent magnet and an outer lower permanent magnet are respectively arranged on the outer walls of the valve covers outside the top and the bottom of the ultra-clean flow chamber; an actuating coil is sleeved on the outer wall of the valve cover between the outer upper layer permanent magnet and the outer lower layer permanent magnet, a valve core displacement sensor is sleeved outside the fixed sleeve and used for detecting the axial position of the ultra-clean valve core in the ultra-clean flow chamber in real time. The utility model is electrified only when the opening degree is maintained, solves the problem that the temperature rise of the ultra-clean medium is overhigh due to the large current and serious heating in the coil-driven ultra-clean electromagnetic valve, and reduces the power consumption of the coil type ultra-clean electromagnetic valve.

Description

Ultra-clean differential electromagnetic valve with low power consumption

Technical Field

The utility model relates to an electromagnetic valve in the technical field of valves, in particular to a low-power-consumption electromagnetic valve suitable for ultra-clean occasions.

Background

The fields of semiconductors, biological medicines, electronic grade chemical engineering and the like are very sensitive to pollutants such as particles, ions and the like, very high cleanliness requirements are provided for liquid or gas required by a production process, and materials or processes which meet certain cleanliness standards are called ultra-clean materials or ultra-clean processes. The flow control element for conveying ultra-clean fluid medium must strictly prevent the communication between the internal medium and the outside, and is safe, reliable and corrosion-resistant, and meanwhile, the valve cannot generate abrasion and particulate matters in the opening and closing process.

In the field of ultra-clean fluid or corrosive fluid input control, an ultra-clean electromagnetic valve is often used as a basic element of ultra-clean fluid control, and a traditional electromagnetic valve is generally provided with an external extending control part similar to a valve rod, so that a dynamic sealing point is difficult to eliminate in principle, and external leakage is easy to generate in the long-term and repeated opening and closing process. In addition, the traditional electromagnetic valve usually adopts a metal elastic element (such as a return spring), which can pollute the whole ultra-clean environment, and if a nonmetal elastic element (such as a polytetrafluoroethylene PTFE spring) is adopted, the problems of insufficient rigidity, difficult manufacture, short service life and the like exist.

In contrast, a common measure in the industry is to use an electric diaphragm valve (see patent WO2007089689a2, CN101365904A, CN1836124A, US20030722168 for details), to realize opening and closing and opening control of a valve port by pushing a flexible element with elasticity to deform by a motor, and to completely isolate a driving device such as an outer valve rod from a flow channel by using a diaphragm of the flexible element as a sealing member, thereby ensuring the clean property of fluid, but the diaphragm is easy to fatigue fracture, and has a slow control response speed. The Chinese utility model with the application number of CN202011163914.1 provides an ultra-clean proportional electric valve, which realizes opening and closing of a valve port by using the minimum magnetic resistance principle and can realize accurate control on the position of the valve port; but compared with the electromagnetic coil driving mode, the valve has the problems of large integral structure volume and low control response speed to the valve port.

Compared with an electric valve driven by a motor, the electromagnetic valve driven by the coil has the advantages of compact structure, quick control response and the like, but one of the important factors for restricting the application of the electromagnetic valve driven by the coil to the field of ultra-clean flow control lies in that: compared with the traditional electromagnetic valve, the ultra-clean electromagnetic valve is limited by the ultra-clean characteristic, and the armature air gap of the ultra-clean electromagnetic valve is larger, so that the coil current required for maintaining the position of the valve core is larger, the heat is more serious, the temperature of an ultra-clean fluid medium can be changed, and the electromagnetic valve scheme driven by the coil is rarely used in the field of ultra-clean flow control.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides the ultra-clean differential electromagnetic valve with low power consumption, which solves the problem that the temperature rise of an ultra-clean medium is too high due to the fact that the current in the ultra-clean electromagnetic valve driven by a coil is large and the heat is serious, and reduces the power consumption of the coil type ultra-clean electromagnetic valve.

The technical scheme adopted by the utility model is as follows:

the utility model comprises a permanent magnet, an actuating coil, a valve core displacement sensor and an ultra-clean valve core; wherein the valve cover and the valve seat of the ultra-clean material are tightly assembled and are internally enclosed to form an ultra-clean flow chamber, and the ultra-clean flow chamber is provided with an inlet flow path and an outlet flow path which are communicated with the external environment; an ultra-clean valve core is arranged in the ultra-clean flow chamber, the ultra-clean valve core is positioned right above the position of the top surface of the valve seat of the inlet flow path outlet, the ultra-clean valve core can move in the axial direction of the ultra-clean flow chamber in the ultra-clean flow chamber, and annular outer upper layer permanent magnets and outer lower layer permanent magnets are respectively arranged on the outer walls of the valve covers outside the top and the bottom of the ultra-clean flow chamber; an actuating coil is sleeved on the outer wall of the valve cover between the outer upper layer permanent magnet and the outer lower layer permanent magnet, a fixed sleeve is sleeved outside the actuating coil for packaging, and a valve core displacement sensor is sleeved outside the fixed sleeve.

The ultra-clean valve core comprises an annular body, a block-shaped body, an embedded permanent magnet, a connecting arm and an outer ultra-clean material coating layer; the ring body is located the massive body top, is equipped with annular cavity in the ring body, and embedded permanent magnet is installed to annular cavity embedded, and the through-flow hole is seted up to the ring body, has the clearance of upper and lower direction between ring body and the massive body, through a plurality of linking arms zonulae occludens that set up along circumference interval around between ring body and the massive body, sets up to the hollow structure that has the annular chamber inside the ring body, and the massive body is inside solid.

The top surface of the valve seat is provided with a convex surface as a sealing boss at the position of the outlet of the inlet flow path, the bottom surface of the ultra-clean valve core is provided with an inner concave surface as an annular sealing surface, and the sealing boss and the annular sealing surface are embedded corresponding to the phase line.

The valve core displacement sensor comprises but is not limited to an LVDT sensor and an LDC sensor.

The valve core displacement sensor adopts an LVDT sensor and comprises an LVDT secondary winding and an LVDT primary winding; two LVDT secondary windings and one LVDT primary winding are arranged outside the fixed sleeve, the LVDT primary winding is arranged in the middle, and the upper side and the lower side of the LVDT primary winding are respectively provided with the LVDT secondary windings; the LVDT secondary winding and one LVDT primary winding are externally coated with a winding shell.

The valve core displacement sensor 0 adopts an LDC sensor, and comprises an outer fixed shell and an LDC sensor, wherein the LDC sensor is arranged on the surface of one side of the outer fixed sleeve, the LDC sensor is a sensing coil, the sensing coil is spirally arranged on a plane, the coil density of one side of the sensing coil is lower than that of the other side of the sensing coil, and the LDC sensor is packaged by the outer fixed shell.

The magnetizing directions of the outer upper layer permanent magnet, the outer lower layer permanent magnet and the embedded permanent magnet of the ultra-clean valve core are the same, and the magnetizing directions are the same along the up-down direction and the magnetic arrangement direction.

The static magnetic adsorption of the ultra-clean valve core is controlled by the outer upper layer permanent magnet and the outer lower layer permanent magnet, the movement and the position of the ultra-clean valve core in the axial up-down direction of the ultra-clean flow chamber are controlled by the electrification of the actuating coil and the current magnitude, the distance between the ultra-clean valve core and the inlet flow path is adjusted, and then the ultra-clean differential electromagnetic valve with the opening degree is adjusted. The larger the distance between the ultra-clean valve element and the inlet flow path is, the smaller the flow resistance is, and the larger the opening degree is.

The valve cover, the valve seat, the annular body of the ultra-clean valve core, the block-shaped body and the connecting arm are all made of ultra-clean materials.

The embedded permanent magnet is embedded into the annular permanent magnet made of the ultra-clean material in the injection molding process, or coated and wrapped on the surface of the annular permanent magnet by the ultra-clean material to form the ultra-clean valve core, and all wall surfaces in contact with fluid are made of the ultra-clean material to ensure the ultra-clean characteristic.

The ultra-clean material is fluorine-containing plastic and comprises perfluor alkoxy, polytetrafluoroethylene or polyvinylidene fluoride, or any combination thereof.

The embedded permanent magnet needs to be plated with metal during manufacturing, and the surface of the embedded permanent magnet is at least provided with a metal film with the thickness of more than micron level.

The ultra-clean differential electromagnetic valve is used for ultra-clean fluid output control in the fields of semiconductors, biological medicines, electronic grade chemical engineering and the like.

The ultra-clean differential electromagnetic valve can be used for ultra-clean fluid output control in the fields of semiconductors, biomedicine, electronic grade chemical engineering and the like.

LVDT refers to a linear variable differential transformer and LDC refers to an inductive sensor.

The utility model has the beneficial effects that:

in the utility model, through the analysis and experiments of the maintaining force required by the valve core at different positions, the static pressure borne by the sealing fluid of the valve core is higher by one order of magnitude than the fluid impact force borne by the valve core at the fixed position in the opening state in the engineering practice, and the required coil current is the largest and the heating is the most serious in the closing and sealing process.

The valve utilizes two permanent magnets to construct a symmetrical magnetic circuit, changes the stress of the valve core by controlling the current of the electrified coil, detects the position of the valve core by means of valve core position sensing, adjusts the current of the coil to compensate the magnetic force difference caused by the position deviation of the valve core, thereby controlling the position of the valve core and realizing the functions of opening and closing a valve port and opening the valve port.

Because the required magnetic force of regulation aperture is more accomplished the required magnetic force of sealed closure and is a few orders of magnitude less, and the super clean solenoid valve that has differential magnetic circuit only relies on permanent magnet magnetic force to seal when closing, and the coil only need be circular telegram when maintaining the aperture, so this utility model solves the problem that the electric current is great in the super clean solenoid valve of coil drive, generates heat seriously so that super clean medium temperature rise is too high, has reduced the consumption of coil type super clean solenoid valve.

Drawings

FIG. 1 is a schematic structural diagram of an open state according to an embodiment of the present invention;

FIG. 2 is a schematic view of an ultra clean valve cartridge according to an embodiment of the present invention; (a) is a three-dimensional view of the ultra-clean valve core, and (b) is a sectional view of the ultra-clean valve core;

FIG. 3 is a schematic structural diagram of a closed state according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of the valve element position detection principle of an LVDT-based embodiment of the present invention;

fig. 5 is a schematic diagram of a valve element position detection principle based on LDC according to an embodiment of the present invention.

Fig. 6 is a wiring diagram of an LDC sensor according to an embodiment of the present invention.

In the figure, 1: a discharge flow path; 2: a valve cover; 3: an ultra-clean flow chamber; 4: an outer upper permanent magnet; 5: fixing a sleeve; 6: an actuation coil; 7: an outer lower permanent magnet; 8: a threaded seal face; 9: a valve seat; 10: a through-flow aperture; 11: a permanent magnet is embedded; 12: ultra-clean coating layer; 13: a connecting arm; 14: an annular sealing surface; 15: an ultra-clean valve core; 16: sealing the boss; 17: entering a flow path; 18: an LVDT secondary winding; 19: an LVDT primary winding; 20: a spool displacement sensor; 21: a housing; 22: an outer stationary shell; 23: an LDC sensor.

Detailed Description

The utility model is further described with reference to the following figures and embodiments:

as shown in fig. 1, the valve structure includes a valve seat 9, a valve cover 2, two permanent magnets 4, 7 and an actuating coil 6, a spool displacement sensor 20, an ultra-clean spool 15; the valve cover 2 is in a cylinder shape, the valve cover 2 is installed on the valve seat 9, the valve cover 2 made of ultra-clean materials and the valve seat 9 are tightly assembled and are enclosed inside to form an ultra-clean flow chamber 3, the ultra-clean flow chamber 3 is arranged in the vertical direction in the axial direction, and the ultra-clean flow chamber 3 is provided with an inlet flow path 17 and an outlet flow path 1 which are communicated with the external environment; in specific implementation, the top end of the valve cover 2 is provided with a through hole for communicating the outside and the ultra-clean flow chamber 3 as a discharge flow path 1, the bottom end of the valve seat 9 is provided with a channel for communicating the outside and the ultra-clean flow chamber 3 as an inlet flow path 17, and fluid enters the ultra-clean flow chamber 3 through the inlet flow path 17 and is discharged from the ultra-clean flow chamber 3 through the discharge flow path 1.

An ultra-clean valve core 15 is arranged in the ultra-clean flow chamber 3, the ultra-clean valve core 15 is positioned right above the position of the top surface of the valve seat 9 at the outlet of the inlet flow path 17, the ultra-clean valve core 15 can move in the axial direction of the ultra-clean flow chamber 3 in the ultra-clean flow chamber 3, the outer walls of the valve cover 2 outside the top and the bottom of the ultra-clean flow chamber 3 are respectively provided with an annular outer upper layer permanent magnet 4 and an outer lower layer permanent magnet 7, the magnetizing directions of the outer upper layer permanent magnet 4 and the outer lower layer permanent magnet 7 are the same as the strength, and the ultra-clean valve core 15 is arranged at the upper part and the lower part of the outer wall of the valve cover 2; an actuating coil 6 is sleeved on the outer wall of the valve cover 2 between the outer upper layer permanent magnet 4 and the outer lower layer permanent magnet 7, a fixing sleeve 5 is sleeved outside the actuating coil 6 for packaging, a valve core displacement sensor 20 is sleeved outside the fixing sleeve 5, the valve core displacement sensor 20 is arranged on the outer side of the valve cover, and the valve core displacement sensor 20 is used for detecting the axial position of the ultra-clean valve core 15 in the ultra-clean flow chamber 3 in real time.

As shown in fig. 2, the ultra-clean valve core 15 comprises an annular body, a block-shaped body, an embedded permanent magnet 11, a connecting arm 13 and an outer ultra-clean material coating layer 12; the annular body is positioned above the block-shaped body, a closed annular cavity is arranged in the annular body, the embedded permanent magnet 11 is embedded in the annular cavity, the annular body outside the embedded permanent magnet 11 forms an ultra-clean coating layer 12 for the embedded permanent magnet 11, the embedded permanent magnet 11 is embedded in the ultra-clean coating layer 12 in an injection molding mode, namely, the permanent magnet is ensured not to be contacted with a conveying medium, the annular body is provided with a through hole 10, a gap in the vertical direction is formed between the annular body and the block-shaped body, the annular body and the block-shaped body are tightly connected through a plurality of connecting arms 13 arranged at intervals along the circumferential direction, the connecting arms 13 are L-shaped, the inner part of the annular body is provided with a hollow structure with an annular cavity, and the inner part of the block-shaped body is solid; the annular body and the block body are made of non-magnetic materials. The valve cover 2, the valve seat 9, and the annular body, the block-shaped body and the connecting arm 13 of the ultra-clean valve core 15 are all made of ultra-clean materials.

The through hole 10 formed in the annular body with the embedded permanent magnet 11 is arranged in the center of the ultra-clean valve core 15 to play a role in fluid updating and pressure difference balancing, the inlet flow path and the outlet flow path are arranged at the upper end and the lower end of the ultra-clean flow chamber, and fluid in the ultra-clean flow chamber is updated in a flowing mode and has no flowing dead zone.

The fluid entering the ultra-clean flow chamber 3 below the ultra-clean valve core 15 sequentially passes through the gap between the annular body and the block body and the through-flow hole 10 and then enters the ultra-clean flow chamber 3 above the ultra-clean valve core 15.

The connecting arms 13 are preferably 3-4 in number, evenly distributed circumferentially around the annular body and the block-shaped body.

The top surface of the valve seat 9 is provided with a convex surface as a sealing boss 16 at the outlet end of the inlet flow path 17, the bottom surface of the block body of the ultra-clean valve core 15 is provided with an inner concave surface as an annular sealing surface 14, and the sealing boss 16 and the annular sealing surface 14 are embedded corresponding to a phase line; the annular sealing surface 14 can be tightly attached to the sealing boss 16 and block the flow passage, when the sealing boss 16 is embedded into the annular sealing surface 14, the ultra-clean valve core 15 is hermetically mounted on the valve seat 9 and blocks the flow passage 17.

The actuating coil 6 is electrified, and the actuating coil has a current adjusting function, and the currents with different intensities are adjusted according to the feedback quantity of the position of the valve core to generate magnetic fields with different intensities.

Currents with different strengths are led into the actuating coil 6 according to the position of the valve core to generate magnetic fields with different strengths, so that driving forces with different sizes are generated for the ultra-clean valve core 15 in the ultra-clean flow chamber 3, non-contact control of valve core movement is realized, and opening, closing, sealing and opening control of a valve port are realized on the premise of ensuring the ultra-clean characteristic of a fluid medium.

The valve core displacement sensor is arranged on the outer side of the valve cover and connected with the actuating coil, detects the position of the ultra-clean valve core at any time, compares the position with a target value set by the position of the ultra-clean valve core, feeds back and outputs the position to the actuating coil, and then controls the movement and the position of the ultra-clean valve core 15 in a closed loop mode through the actuating coil.

The magnetizing directions of the outer upper layer permanent magnet 4, the outer lower layer permanent magnet 7 and the embedded permanent magnet 11 of the ultra-clean valve core 15 are the same, and the magnetic arrangement directions are the same along the vertical direction parallel to the axial direction of the ultra-clean flow chamber 3.

In fig. 1, the outer upper permanent magnet 4 and the outer lower permanent magnet 7 are magnetized in the same direction and strength. The symmetric line of the upper and lower positions of the two permanent magnets is positioned in the working range of the valve core, the magnetizing directions of the embedded permanent magnet and the external permanent magnet are the same, and the embedded permanent magnet works by means of suction.

When the valve core embedded permanent magnet 11 is positioned in the middle between the outer upper layer permanent magnet 4 and the outer lower layer permanent magnet 7, the magnetic forces of the outer upper layer permanent magnet 4 and the outer lower layer permanent magnet 7 to the embedded permanent magnet 11 are mutually offset, or the residual is very small;

when the valve is in a closed state, as shown in fig. 3, the ultra-clean valve core 15 is under the action of gravity, sealing is completed only by the magnetic attraction of the lower layer permanent magnet 7 on the outer side and the embedded permanent magnet 11, the actuating coil 6 does not need to be electrified, the magnetic force required by sealing of the valve core is one or two orders of magnitude larger than that required by adjusting the opening degree, and the power consumption is greatly reduced by not electrifying when the valve is closed.

The magnetic attraction of the outer upper layer permanent magnet 4 and the outer lower layer permanent magnet 7 to the embedded permanent magnet 11 in the ultra-clean valve core 15 is smaller than the gravity of the ultra-clean valve core 15.

When the valve is in an open state, as shown in fig. 4, the actuating coil 6 is energized to generate a magnetic field, which drives the embedded permanent magnet 11 in the ultra-clean valve core 15 to rise, so that the ultra-clean valve core 15 is separated from the inlet flow path 17 outlet on the top surface of the valve seat 9, and the valve is opened.

The energizing current of the actuating coil 6 is increased to drive the embedded permanent magnet 11 in the ultra-clean valve core 15 to rise, so that the distance between the ultra-clean valve core 15 and the inlet flow path 17 is increased, and the opening degree is larger.

The valve core displacement sensor in the specific implementation includes but is not limited to an LVDT sensor and an LDC sensor.

As shown in fig. 3 and 4, one embodiment of spool displacement sensor 20 employs an LVDT sensor, including an LVDT secondary winding 18 and an LVDT primary winding 19; two LVDT secondary windings 18 and an LVDT primary winding 19 are arranged outside the fixed sleeve 5, the LVDT primary winding 19 is arranged in the middle, and the LVDT secondary windings 18 are respectively arranged on the upper side and the lower side of the LVDT primary winding 19; the LVDT secondary winding 18 and an LVDT primary winding 19 are wrapped by a winding sheath 21 and pass through the winding sheath 21.

As shown in fig. 5 and 6, another embodiment of the valve element displacement sensor 20 employs an LDC sensor, which includes an outer fixing shell 22 and an LDC sensor 23, the LDC sensor 23 is disposed on the surface of one side of the outer fixing sleeve 5, the LDC sensor 23 is a sensing coil, the sensing coil is spirally arranged in a plane, the coil density of one side of the sensing coil is lower than that of the other symmetrical side, that is, the distance between the coils of one side of the sensing coil is lower than that of the other symmetrical side, and the LDC sensor 23 is encapsulated by the outer fixing shell 22.

As shown in fig. 4, for the working state when the valve is in the opening degree adjustment, an LVDT sensor 20 is arranged outside the actuating coil 6, and is divided into a central LVDT primary winding 19 and two symmetrical LVDT secondary windings 18 on two sides, when the embedded permanent magnet 11 is manufactured, the surface needs to be provided with a zinc-plated or nickel-plated coating, the thickness of the metal coating is generally more than 50 micrometers, the metal coating is integrally arranged in an ultra-clean material ring, and according to the skin effect of current, when the LVDT primary winding 19 is energized, the metal coating can generate electromagnetic induction to affect the induced current in the LVDT secondary windings 18 on two sides.

The metal coating is in an annular body made of an ultra-clean material, the metal coating is a part of the embedded permanent magnet 11, the metal coating is similar to a layer of outer skin of the embedded permanent magnet 11, the embedded permanent magnet is generally an NdFeB permanent magnet, the manufacturing process is generally that the NdFeB is sintered into a bar, the bar is machined into a magnetic block with a fixed size, then the bar is magnetized, a coating process is carried out after the magnetization is finished, the zinc plating or nickel plating is generally adopted, the thickness is dozens of micrometers, the coating in the industry is mainly used for corrosion prevention, the surface generates induced current according to the skin effect of metal electromagnetic induction, the counter electromotive force acts on a secondary coil of the LVDT to change the current of the secondary coil, and the coating with the thickness can generate the induced current for positioning the valve core.

When the embedded permanent magnet 11 is in the middle position, the difference value of the coil currents at the two sides is 0. When the embedded permanent magnet 11 generates an offset distance, the difference value of the current of the coils at the two sides is not 0 and is fed back to the actuating coil 6 from time to time, the magnitude of the current in the actuating coil 6 is changed, and the axial position of the ultra-clean valve core 15 is further changed. For example, when the target offset of the embedded permanent magnet 11 required for adjusting the opening degree is a, the LVDT sensor 20 detects the position of the valve element from time to time, compares the detected value with a value a in the control circuit, and adjusts the current of the actuating coil 6 until the axial position of the valve element is equal to the target value a, at this time, the feedback output of the LVDT sensor 20 is 0, the current of the actuating coil 6 does not change any more, and the position of the valve element is dynamically stabilized at the target offset a.

Because the permanent magnet magnetic circuits on the two sides are symmetrical, the magnetic force difference borne by the valve core is only caused by the offset a generated by the position of the valve core, the driving force of the coil only needs to compensate the differential quantity of the magnetic forces on the two sides, in the opening adjustment, the required offset distance a is often very small, the magnetic force difference is small, and the actuating coil 6 only needs small current to maintain the opening. In summary, the actuation coil 6 does not need to be energized when the valve core is sealed, and the actuation coil 6 only needs a small current when the opening degree is maintained, so the utility model can reduce the power consumption of the coil of the solenoid valve, solve the problem of heating of the coil-driven solenoid valve, and enable the coil-driven solenoid valve to be used in the field of ultra-clean flow control.

Further, the LVDT sensor 20 can be replaced by an LDC sensor 23, as shown in fig. 5, the basic operation principle is substantially the same as that described above, and the difference is that the LDC sensor 23 is used to replace the LVDT sensor 20, wherein the LDC sensor 23 is routed as shown in fig. 6, so as to form an arrangement with symmetrical coils at two sides having different pitch densities, the embedded permanent magnet 11 in the ultra-clean valve core is provided with a metal coating during manufacturing, when the ultra-clean valve core 15 moves in the LDC routing zone, the metal coating on the surface generates an induced current on the surface of the permanent magnet due to the electromagnetic induction principle and the skin effect, and the induced magnetic field generated by the induced current further acts on the LDC coil to change the current therein, thereby completing the detection of the axial position of the valve core, feeding back to the actuation coil 6, changing the current magnitude of the actuation coil 6, changing the axial position of the valve core, and completing the adjustment of the opening of the valve port.

In order to meet the requirement of high-cleanliness occasions, the wall surface in the ultra-clean magnetic suspension valve, which is in contact with fluid, should be made of an ultra-clean material, the embedded permanent magnet arrays 19 which are arranged in a spatial layering manner are embedded in the ultra-clean material in the injection molding process, or coated and wrapped on the surface of the ultra-clean material to form the ultra-clean magnetic suspension valve core 22, and the optional ultra-clean material includes but is not limited to fluorine-containing plastics such as Perfluoroalkoxy (PFA), Polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF) and the like or any combination thereof.

In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.

The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the utility model. The foregoing examples and description have been presented to illustrate the principles of the utility model and are intended to provide various changes and modifications within the spirit and scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (9)

1. The utility model provides an ultra-clean differential solenoid valve of low-power consumption, includes disk seat (9) and valve gap (2), and install on disk seat (9) valve gap (2), its characterized in that: the device comprises permanent magnets (4, 7), an actuating coil (6), a valve core displacement sensor (20) and an ultra-clean valve core (15); wherein the valve cover (2) and the valve seat (9) of the ultra-clean material are tightly assembled and are enclosed inside to form an ultra-clean flow chamber (3), and the ultra-clean flow chamber (3) is provided with an inlet flow path (17) and an outlet flow path (1) which are communicated with the external environment; an ultra-clean valve core (15) is arranged in the ultra-clean flow chamber (3), the ultra-clean valve core (15) is positioned right above the position of the top surface of the valve seat (9) of an inlet flow path (17) and can move along the axial direction of the ultra-clean flow chamber (3) in the ultra-clean flow chamber (3), and annular outer upper permanent magnets (4) and outer lower permanent magnets (7) are respectively arranged on the outer walls of the valve covers (2) outside the top and the bottom of the ultra-clean flow chamber (3); an actuating coil (6) is sleeved on the outer wall of the valve cover (2) between the outer upper layer permanent magnet (4) and the outer lower layer permanent magnet (7), a fixing sleeve (5) is sleeved outside the actuating coil (6) for packaging, and a valve core displacement sensor (20) is sleeved outside the fixing sleeve (5).

2. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 1, characterized in that:

the ultra-clean valve core (15) comprises an annular body, a block-shaped body, an embedded permanent magnet (11), a connecting arm (13) and an outer ultra-clean material coating layer (12); the ring body is located the massive body top, is equipped with annular cavity in the ring body, and embedded permanent magnet (11) of installing of annular cavity, through-flow hole (10) are seted up to the ring body, have the clearance of upper and lower direction between ring body and the massive body, through a plurality of linking arms (13) zonulae occludens that set up along circumference interval around between ring body and the massive body, and the ring body is inside to be set up to the hollow structure that has the annular chamber, and the massive body is inside solid.

3. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 2, characterized in that:

the top surface of the valve seat (9) is provided with a convex surface as a sealing boss (16) at the outlet end of the inlet flow path (17), the bottom surface of the ultra-clean valve core (15) is provided with an inner concave surface as an annular sealing surface (14), and the sealing boss (16) and the annular sealing surface (14) are embedded corresponding to the phase line.

4. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 1, characterized in that:

the valve core displacement sensor comprises but is not limited to an LVDT sensor and an LDC sensor.

5. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 4, characterized in that:

the valve core displacement sensor (20) adopts an LVDT sensor and comprises an LVDT secondary winding (18) and an LVDT primary winding (19); two LVDT secondary windings (18) and one LVDT primary winding (19) are arranged outside the fixed sleeve (5), the LVDT primary winding (19) is arranged in the middle, and the upper side and the lower side of the LVDT primary winding (19) are respectively provided with the LVDT secondary windings (18); the LVDT secondary winding (18) and one LVDT primary winding (19) are externally coated with a winding shell (21).

6. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 4, characterized in that:

valve core displacement sensor (20) adopt the LDC sensor, including external fixation shell (22), LDC sensor (23), fixed cover (5) outer side surface is equipped with LDC sensor (23), LDC sensor (23) are sense coil, sense coil uses plane spiral to arrange, the coil density of sense coil one side is less than the coil density of symmetry opposite side, LDC sensor (23) external fixation shell (22) encapsulation.

7. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 1, characterized in that:

the magnetizing directions of the outer upper layer permanent magnet (4), the outer lower layer permanent magnet (7) and the embedded permanent magnet (11) of the ultra-clean valve core (15) are the same, and the magnetizing directions are the same along the up-down direction and the magnetic arrangement direction.

8. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 7, characterized in that:

static magnetic adsorption of the ultra-clean valve core (15) is controlled through the outer upper layer permanent magnet (4) and the outer lower layer permanent magnet (7), the ultra-clean valve core (15) is controlled to move and position in the up-and-down direction of the ultra-clean flow chamber (3) through the energization of the actuating coil (6), and then the ultra-clean differential electromagnetic valve with the opening degree is adjusted.

9. The ultra-clean differential electromagnetic valve with low power consumption as claimed in claim 1, characterized in that:

the valve cover (2), the valve seat (9) and the annular body, the block-shaped body and the connecting arm (13) of the ultra-clean valve core (15) are all made of ultra-clean materials.

Images