CN114280858B - Reflective liquid crystal phase modulation device - Google Patents

Reflective liquid crystal phase modulation device Download PDF

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CN114280858B
CN114280858B CN202210007666.4A CN202210007666A CN114280858B CN 114280858 B CN114280858 B CN 114280858B CN 202210007666 A CN202210007666 A CN 202210007666A CN 114280858 B CN114280858 B CN 114280858B
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CN114280858A (en
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霍英东
荣誉东
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Nanchang Virtual Reality Institute Co Ltd
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Abstract

The invention provides a reflective liquid crystal phase modulation device, which comprises an upper substrate, a lower substrate and a liquid crystal layer positioned between the upper substrate and the lower substrate, wherein the upper substrate comprises an upper glass substrate, and a common electrode and a second liquid crystal alignment layer which are sequentially arranged from the upper glass substrate towards the liquid crystal layer; the lower substrate comprises a lower glass substrate, a first thin film transistor, a first organic flat layer, a first pixel electrode, a second organic flat layer, a second pixel electrode and a first liquid crystal alignment layer which are sequentially arranged from the lower glass substrate towards the liquid crystal layer; the second pixel electrode comprises a plurality of second pixel sub-electrodes distributed in an array, a gap is formed between two adjacent second pixel sub-electrodes, and the first pixel electrode comprises a plurality of first pixel sub-electrodes corresponding to the gap. The gap is filled by the first pixel sub-electrode, so that the technical problems that in the prior art, the aperture opening ratio of the pixel electrode is difficult to improve, the utilization rate of phase modulation light is reduced, and high-order diffraction is formed by bigger gaps to generate stray light are solved.

Description

Reflective liquid crystal phase modulation device
Technical Field
The invention relates to the technical field of liquid crystal display, in particular to a reflective liquid crystal phase modulation device.
Background
The reflective liquid crystal phase modulation device can exhibit the advantages of thin and lightweight and low power consumption, and is widely used in electronic devices such as monitors, projectors, cellular phones, and portable information terminals (PDAs), and the pixel electrode is an important component in the reflective liquid crystal phase modulation device.
The pixel electrodes of the liquid crystal phase modulator are mainly used for carrying out phase modulation on incident light, so that the utilization rate of the incident light is improved, however, the pixel electrodes of the traditional glass-based liquid crystal phase modulator are distributed in a large array, a certain gap is reserved between two adjacent pixel electrodes, the size of the gap is generally more than 2 microns, the aperture opening ratio of the pixel electrodes cannot be higher, the utilization rate of the phase modulated light of the liquid crystal display device is affected, and the gap between the pixel electrodes is bigger, so that high-order diffraction can be increased to generate stray light.
Disclosure of Invention
Based on this, the present invention is directed to a reflective liquid crystal phase modulation device, which is used to solve the technical problems that the aperture ratio of the pixel electrode of the glass-based liquid crystal phase modulator is difficult to be increased, the utilization rate of the phase modulated light is reduced, and the gap is bigger to form high-order diffraction to generate stray light in the prior art.
The invention provides a reflective liquid crystal phase modulation device, which comprises an upper substrate, a lower substrate and a liquid crystal layer positioned between the upper substrate and the lower substrate, wherein the upper substrate comprises an upper glass substrate, and a common electrode and a second liquid crystal alignment layer which are sequentially arranged from the upper glass substrate towards the liquid crystal layer;
the lower substrate comprises a lower glass substrate, a first thin film transistor, a first organic flat layer, a first pixel electrode, a second organic flat layer, a second pixel electrode and a first liquid crystal alignment layer which are sequentially arranged from the lower glass substrate towards the liquid crystal layer;
the second pixel electrode comprises a plurality of second pixel sub-electrodes distributed in an array, a gap is formed between every two adjacent second pixel sub-electrodes, the first pixel electrode comprises a plurality of first pixel sub-electrodes, and the first pixel sub-electrodes and the gaps are arranged in a one-to-one opposite mode.
According to the reflective liquid crystal phase modulation device, the first pixel sub-electrode is additionally arranged in the gap between the corresponding second pixel sub-electrodes, the gap between the two adjacent second pixel sub-electrodes is filled by the first pixel sub-electrode, the light-permeable effective area is increased, the aperture ratio is further improved, the utilization rate of phase modulation light is optimized, the gap is avoided from being overlarge, stray light is generated due to high-order diffraction, and the technical problems that in the prior art, the aperture ratio of the pixel electrode is difficult to improve, the utilization rate of phase modulation light is reduced, and stray light is generated due to high-order diffraction due to overlarge gaps are solved.
Further, the second pixel sub-electrode is distributed in a rectangular array, the second pixel sub-electrode has a first side and a second side that are adjacent, the first pixel sub-electrode includes a first covering portion and a second covering portion that are adjacent, and the first covering portion and the second covering portion are respectively corresponding to the first side and the second side.
Further, the reflective liquid crystal phase modulation device, wherein the liquid crystal layer is electrically controlled birefringence liquid crystal.
Further, the reflective liquid crystal phase modulation device is characterized in that the second pixel sub-electrode and the first pixel sub-electrode are respectively externally connected with a storage capacitor, and the storage capacitor comprises a second storage capacitor and a first storage capacitor which are respectively connected with the first pixel sub-electrode and the second pixel sub-electrode.
Further, in the reflective liquid crystal phase modulation device, a first electrical contact pin extends from one side of the second pixel sub-electrode facing the lower glass substrate, and the first electrical contact pin passes through the second organic flat layer and the first organic flat layer to be electrically connected with the first storage capacitor; and a second electric contact pin extends towards one side of the lower glass substrate of the first pixel sub-electrode, and the second electric contact pin penetrates through the first organic flat layer to be electrically connected with the second storage capacitor.
Further, the reflective liquid crystal phase modulation device, wherein the first pixel sub-electrode and the second pixel sub-electrode are controlled by a driving circuit, so that the voltage of the first pixel sub-electrode is higher than the voltage of the second pixel sub-electrode.
Further, the reflective liquid crystal phase modulation device, wherein the lower substrate further includes a second thin film transistor located at the same layer as the first thin film transistor, and the second thin film transistor is used for separately driving the first pixel sub-electrode.
Further, the reflective liquid crystal phase modulation device, wherein the lower substrate further comprises a passivation layer disposed between the first liquid crystal alignment layer and the second pixel sub-electrode.
Further, the reflective liquid crystal phase modulation device, wherein a phase compensation film is arranged on one side of the upper glass substrate, which is away from the liquid crystal layer.
Further, the reflective liquid crystal phase modulation device is characterized in that the passivation layer is prepared from silicon dioxide or silicon nitride.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic diagram of a reflective liquid crystal phase modulation device according to a first embodiment of the present invention;
FIG. 2 is an equivalent circuit diagram of a first pixel electrode and a second pixel electrode according to a first embodiment of the present invention;
FIG. 3 is a graph showing the relationship between the phase delay of the first Pixel electrode and the second Pixel electrode and the Pixel voltage according to the first embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating an arrangement of a first pixel sub-electrode and a second pixel sub-electrode according to a first embodiment of the present invention;
FIG. 5 is a schematic diagram of a layer structure of a reflective liquid crystal phase modulation device according to a second embodiment of the present invention;
the main component symbols in the drawings illustrate: the upper substrate 10, the upper glass substrate 11, the common electrode 12, the second liquid crystal alignment layer 13, the liquid crystal layer 20, the lower substrate 30, the lower glass substrate 31, the first thin film transistor 32, the first organic planarization layer 33, the first pixel sub-electrode 34, the second organic planarization layer 35, the second pixel sub-electrode 36, the first liquid crystal alignment layer 37, the first side 41, the second side 42, the storage capacitor 50, the second storage capacitor 51, the first storage capacitor 52, the first contact pin 61, the second contact pin 62, the passivation layer 70, the phase compensation film 80, the second thin film transistor 90, the first cover 110, and the second cover 120.
Detailed Description
In order to make the objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. Several embodiments of the invention are presented in the figures. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and the like are used herein for descriptive purposes only and not to indicate or imply that the apparatus or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
In the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
The light-emitting brightness of the liquid crystal display panel is the product of the brightness of the backlight source and the transmittance of the pixel, and on the premise that the light-emitting brightness of the liquid crystal display panel is certain, the luminance of the backlight source can be reduced by improving the transmittance of the pixel, so that the energy conservation and the consumption reduction are realized.
The reflective liquid crystal phase modulator can be roughly divided into a silicon-based liquid crystal phase modulator and a glass-based liquid crystal phase modulator, wherein the silicon-based liquid crystal phase modulator is generally limited and has smaller silicon wafer and process limiting size, the glass-based liquid crystal phase modulator can be larger in size, but the process precision is inferior to that of the silicon-based liquid crystal phase modulator, and the device performance is poorer than that of the silicon-based liquid crystal phase modulator.
However, the pixel electrodes of the conventional glass-based liquid crystal phase modulator are mostly distributed in an array, a certain gap is reserved between two adjacent pixel electrodes, the size of the gap is generally more than 2 microns, the aperture ratio of the pixel electrodes cannot be higher, the phase modulation light utilization rate of the liquid crystal display device is affected, and the gap between the pixel electrodes is bigger, so that high-order diffraction can be increased to generate stray light.
In order to improve the above-described problems, embodiments of the present application provide a reflective liquid crystal phase modulation device.
Referring to fig. 1, the reflective liquid crystal phase modulation device in the first embodiment of the present invention includes an upper substrate 10, a lower substrate 30, and a liquid crystal layer 20 therebetween, wherein the upper substrate 10 includes an upper glass substrate 11, and a Common electrode 12 (Common electrode) and a second liquid crystal alignment layer 13 sequentially disposed from the upper glass substrate 11 toward the liquid crystal layer 20;
the lower substrate 30 includes a lower glass substrate 31, a first thin film transistor 32 (Thin Film Transistor, TFT), a first organic flat layer 33, a first Pixel electrode (Pixel electrode), a second organic flat layer 35, a second Pixel electrode, and a first liquid crystal alignment layer 37, which are sequentially disposed from the lower glass substrate 31 toward the liquid crystal layer 20;
the second pixel electrode includes a plurality of second pixel sub-electrodes 36 distributed in an array, a gap is provided between every two adjacent second pixel sub-electrodes 36, the first pixel electrode includes a plurality of first pixel sub-electrodes 34, and the plurality of first pixel sub-electrodes 34 are disposed opposite to the plurality of gaps.
The gaps among the plurality of second pixel sub-electrodes 36 are filled by the plurality of first pixel sub-electrodes 34, so that the effective light transmission area of the pixel electrodes is increased, the aperture opening ratio is increased to the greatest extent, the utilization rate of the device to light is increased, and the phase modulation performance of the device is optimized.
In the present embodiment, the first thin film transistor 32 is not limited in type, and the existing TFT type is generally amorphous silicon TFT, polysilicon TFT, metal oxide TFT, and the like.
In this embodiment, the first liquid crystal alignment layer 37 and the second liquid crystal alignment layer 13 on opposite sides of the liquid crystal layer 20 are polyimide and DMA, NMP or BC solvents as main components. The solid component of the alignment layer is a small molecular compound in the stock solution, and the small molecular compound generates polymerization reaction at high temperature to form long-chain macromolecular solid polymer polyamide with a plurality of branched chains, wherein the included angle between the branched chains and the main chain in the polymer molecule is the so-called pretilt angle of the guide layer, the acting force between the branched chain groups of the polymer and the liquid crystal molecules is stronger, the liquid crystal molecules are anchored, and the liquid crystal can be arranged in the pretilt angle direction.
Specifically, the second pixel sub-electrode 36 and the first pixel sub-electrode 34 are respectively connected with a storage capacitor 50 in an external connection manner, and the storage capacitor 50 includes a second storage capacitor 51 and a first storage capacitor 52 respectively connected with the first pixel sub-electrode 34 and the second pixel sub-electrode 36. Specifically, a first electrical contact pin 61 extends from the second pixel sub-electrode 36 toward one side of the lower glass substrate 31, and the first electrical contact pin 61 penetrates through the second organic planarization layer 35 and the first organic planarization layer 33 to be electrically connected to the first storage capacitor 52; the first pixel sub-electrode 34 extends toward one side of the lower glass substrate 31 to form a second electrical contact pin 62, and the second electrical contact pin 62 penetrates through the first organic planarization layer 33 to be electrically connected to the second storage capacitor 51. Through the structural design of the first electric contact pin 61 and the second electric contact pin 62, the space required by wiring is saved, and the overall structural design is improved.
It should be noted that, in the present embodiment, when the first thin film transistor 32 charges the storage capacitor, the storage capacitor 50 can provide a stable voltage to the liquid crystal layer 20, so that the liquid crystal layer 20 maintains a stable deflection angle, and further the phase modulation effect is ensured, so that the displayed frame can be continuously maintained until the next frame update.
Further, the second pixel sub-electrodes 36 are distributed in a rectangular array, the second pixel sub-electrodes 36 have a first edge 41 and a second edge 42 that are adjacent to each other, the first pixel sub-electrodes 34 include a first covering portion 110 and a second covering portion 120 that are adjacent to each other, the first covering portion 110 and the second covering portion 120 are respectively disposed corresponding to the first edge 41 and the second edge 42, and further, the first covering portion 110 and the second covering portion 120 intersect to form an L shape.
Specifically, referring to fig. 4, the second pixel sub-electrodes 36 are in square structures, the first pixel sub-electrodes 34 are located below the second pixel sub-electrodes 36 in L-shaped structures, and it can be appreciated that the gaps between the second pixel sub-electrodes 36 are filled by using the first pixel sub-electrodes 34 designed in L-shaped structures, so as to increase the effective light transmission area of the pixel electrodes, thereby increasing the aperture ratio to the greatest extent, increasing the light utilization rate of the device, and optimizing the phase modulation performance of the device.
The first pixel sub-electrode 34 and the second pixel sub-electrode 36 are controlled by a driving circuit so that the voltage of the first pixel sub-electrode 34 is higher than the voltage of the second pixel sub-electrode 36. Referring to fig. 2, an equivalent circuit diagram of the first pixel electrode and the second pixel electrode in the first embodiment is shown, wherein the scan line Gn outputs a high level, the Cst-A, clc-a and Ccs-a are charged through the TFT1, the Cst-A1, clc-A1 and Ccs-A1 are charged through the TFT2, and finally the substantially same pixel voltages VpA and VpA1 are reached. After the charging is finished, the TFT1 and the TFT2 are turned off, gn+1 outputs a high level, the TFT3 is turned on, the voltage of the Pixel electrode A1 is higher than the Pixel electrode by capacitive coupling partial pressure of the charge sharing capacitors Ccs-A and Ccs-B, the final Pixel voltage VpA1 is formed, the rotation angle of the liquid crystal above the Pixel electrode A1 is higher than that of the liquid crystal above the Pixel electrode A in the initial state by utilizing the characteristic that VpA1 is higher than VpA, and the phase difference generated by the second organic flat layer 35 above the Pixel electrode A1 and compared with the Pixel electrode A is compensated, so that the phase delay of the Pixel electrode A1 and the Pixel electrode A is consistent.
Referring to FIG. 3, a graph of the phase delay versus the Pixel voltage in the first embodiment is shown, wherein the Pixel A1 phase delay is 2pi when the Pixel A phase delay is 2pi, and the Pixel electrode A1 voltage VA1-0 is higher than the Pixel electrode A voltage VA-0.
Further, a phase compensation film 80 is disposed on a side of the upper glass substrate 11 facing away from the liquid crystal layer 20, and when the Pixel a phase delay is 0, the Pixel A1 phase delay can reach 0 by adding the phase compensation film 80. At this time, the voltage VA1-0 of the Pixel electrode A1 is higher than the voltage VA-0 of the Pixel electrode A, and the phase modulation capability of the Pixel A is consistent with that of the Pixel A1 under different gray scales, so that the aperture opening ratio of the Pixel is improved, the light utilization rate of the device is improved, and the phase modulation performance of the device is optimized.
It should be noted that, the Pixel electrode A1 is the first Pixel sub-electrode 34 in the present embodiment, the Pixel electrode a is the second Pixel sub-electrode 36 in the present embodiment, cst-a is the first storage capacitor 52 in the present embodiment, and cst-A1 is the second storage capacitor 51 in the present embodiment.
In this embodiment, the first pixel electrode and the second pixel electrode include reflective metal, reflective metal alloy, or any combination thereof, and may be a single layer of metal with high reflectivity, such as silver, or a multi-layer structure, such as titanium/aluminum or titanium/aluminum/titanium in sequence from a bottom layer to a top layer, a reflective region is formed on the corresponding upper surface, and when no voltage is applied, the phase retardation of light passing through the reflective region is the largest, when the voltage is applied to the reflective electrode, the vertical deflection angle of the liquid crystal layer 20 in the reflective region occurs, the phase retardation of light passing through the reflective region becomes smaller, and the higher the voltage, the larger the vertical deflection angle of the liquid crystal is, the smaller the phase retardation.
Further, the lower substrate 30 further includes a passivation layer 70 disposed between the first liquid crystal alignment layer 37 and the second pixel sub-electrode 36. In this embodiment, the passivation layer 70 is made of silicon dioxide, but not limited thereto, and may be silicon nitride, so that the passivation layer 70 is added to protect the plurality of second pixel sub-electrodes 36, so as to prevent oxidation of metal or other effects caused by cleaning and other processing steps after the second pixel electrode processing, thereby affecting the light reflectivity.
In this embodiment, the liquid crystal layer is electrically controlled birefringence liquid crystal (ECB liquid crystal), the liquid crystal cell satisfies that nd > 2 pi, the liquid crystal adopts positive liquid crystal, and the liquid crystal arrangement mode is parallel arrangement mode.
It should be explained that the ECB type liquid crystal is a color liquid crystal that can display a plurality of colors by voltage control. According to the different internal structure principles, ECB is divided into three types of vertical alignment liquid crystal (DAP type), parallel alignment mode and LB film alignment mixed alignment nematic (HAN type liquid crystal), wherein the DAP type liquid crystal is formed by aligning nematic liquid crystal with negative dielectric anisotropy perpendicular to the surface of a liquid crystal box; the parallel arrangement mode adopts a parallel orientation liquid crystal box in which the long axes of nematic liquid crystal molecules with positive dielectric anisotropy are arranged along the parallel surface of the substrate; the HAN type liquid crystal is formed by arranging one side of nematic liquid crystal with positive dielectric anisotropy perpendicular to the surface of the liquid crystal box and the other side parallel to the surface of the liquid crystal box;
when the ECB type liquid crystal display device is electrified, the included angle theta between the long axes of liquid crystal molecules and the electric field changes due to different voltages, so that the birefringence of the liquid crystal box changes. When linearly polarized light impinges on the cell, different phase retardation is created at different birefringence, and the device therefore has phase modulation capability.
In summary, in the reflective liquid crystal phase modulation device according to the above embodiment of the present invention, a layer of first pixel sub-electrode 34 is additionally added to the gap between the corresponding second pixel sub-electrodes 36, the gap between two adjacent second pixel sub-electrodes 36 is filled by the first pixel sub-electrode 34, so that the light-permeable effective area is increased, the aperture ratio is further improved, the phase modulation light utilization rate is optimized, and the excessive gap is avoided, so that stray light generated by high-order diffraction is avoided.
Referring to fig. 5, a reflective liquid crystal phase modulation device according to a second embodiment of the present invention is shown, wherein the reflective liquid crystal phase modulation device according to the present embodiment is different from the reflective liquid crystal phase modulation device according to the first embodiment in that: the lower substrate 30 further includes a second thin film transistor 90 located at the same layer as the first thin film transistor 32, and the second thin film transistor 90 is used to individually drive the first pixel sub-electrode 34. Specifically, the second thin film transistor 90 is made of the same material as the first thin film transistor 32, the first pixel sub-electrode 34 is driven by the second thin film transistor 90 and the data line signal, so that the voltage of the first pixel sub-electrode 34 is higher than the voltage of the second pixel sub-electrode 36, the rotation angle of the liquid crystal above the first pixel sub-electrode 34 is larger than the rotation angle of the liquid crystal above the second pixel sub-electrode 36, so as to compensate the phase delay generated by the light passing through the second organic flat layer 35, and achieve the effect that the phase delay of the first pixel sub-electrode 34 is consistent with the phase delay of the second pixel sub-electrode, and the first pixel sub-electrode 34 is driven by adopting the independent second thin film transistor 90, so that the voltage of the first pixel sub-electrode 34 is more flexible and can be independently written.
The reflective liquid crystal phase modulation device in the above technical solution may be applied to electronic devices requiring a display unit, such as a computer screen, a flat-panel television, a monitor screen, a mobile phone, a palm game device, a Digital Camera (DC), a digital video recorder (DV), a digital pick-and-place device, a personal digital assistant (personal digital assistant, PDA), a notebook computer (notebook), and a tablet PC.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing examples illustrate only a few embodiments of the invention, and are described in detail, but are not to be construed as limiting the scope of the invention. It should be noted that it is possible for those skilled in the art to make several variations and modifications without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (8)

1. The reflective liquid crystal phase modulation device comprises an upper substrate, a lower substrate and a liquid crystal layer positioned between the upper substrate and the lower substrate, and is characterized in that the upper substrate comprises an upper glass substrate, and a common electrode and a second liquid crystal alignment layer which are sequentially arranged from the upper glass substrate towards the liquid crystal layer;
the lower substrate comprises a lower glass substrate, a first thin film transistor, a first organic flat layer, a first pixel electrode, a second organic flat layer, a second pixel electrode and a first liquid crystal alignment layer which are sequentially arranged from the lower glass substrate towards the liquid crystal layer;
the second pixel electrode comprises a plurality of second pixel sub-electrodes distributed in an array, a gap is formed between every two adjacent second pixel sub-electrodes, the first pixel electrode comprises a plurality of first pixel sub-electrodes, and the first pixel sub-electrodes and the gaps are arranged in a one-to-one opposite mode;
the second pixel sub-electrodes are distributed in a rectangular array, each second pixel sub-electrode is provided with a first edge and a second edge which are adjacent, each first pixel sub-electrode comprises a first covering part and a second covering part which are adjacent, and each first covering part and each second covering part are respectively arranged corresponding to the first edge and the second edge;
the second pixel sub-electrode is in a square structure, the first pixel sub-electrode is in an L-shaped structure and is positioned below the second pixel sub-electrode, and the first pixel sub-electrode and the second pixel sub-electrode are controlled through a driving circuit so that the voltage of the first pixel sub-electrode is higher than that of the second pixel sub-electrode to compensate the phase difference generated by the second organic flat layer above the first pixel sub-electrode and compared with the second pixel sub-electrode.
2. The reflective liquid crystal phase modulation device according to claim 1, wherein the liquid crystal layer is an electrically controlled birefringent liquid crystal.
3. The reflective liquid crystal phase modulation device according to claim 1, wherein the second pixel sub-electrode and the first pixel sub-electrode are respectively externally connected with a storage capacitor, and the storage capacitor comprises a second storage capacitor connected with the first pixel sub-electrode and a first storage capacitor connected with the second pixel sub-electrode.
4. The reflective liquid crystal phase modulation device according to claim 3, wherein a first electrical contact pin extends from a side of the second pixel sub-electrode facing the lower glass substrate, and the first electrical contact pin passes through the second organic planarization layer and the first organic planarization layer to be electrically connected to the first storage capacitor; and a second electric contact pin extends towards one side of the lower glass substrate of the first pixel sub-electrode, and the second electric contact pin penetrates through the first organic flat layer to be electrically connected with the second storage capacitor.
5. The reflective liquid crystal phase modulation device according to claim 2, wherein the lower substrate further comprises a second thin film transistor at the same layer as the first thin film transistor, the second thin film transistor being for individually driving the first pixel sub-electrode.
6. The reflective liquid crystal phase modulation device according to claim 1, wherein the lower substrate further comprises a passivation layer disposed between the first liquid crystal alignment layer and the second pixel sub-electrode.
7. The reflective liquid crystal phase modulation device according to claim 1, wherein a phase compensation film is provided on a side of the upper glass substrate facing away from the liquid crystal layer.
8. The reflective liquid crystal phase modulation device of claim 6, wherein the passivation layer is made of silicon dioxide or silicon nitride.
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