CN114280321B - Low-coherent-light three-piece hybrid integrated angular velocity detection system and method - Google Patents
Low-coherent-light three-piece hybrid integrated angular velocity detection system and method Download PDFInfo
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Abstract
The invention discloses a low coherent light three-piece hybrid integrated angular velocity detection system and a method. The invention realizes the detection of the angular velocity by detecting the change of the optical power of clockwise and anticlockwise light beams after passing through the resonant cavity by utilizing the fact that the resonant cavity has different filtering characteristics under different rotation angular velocities. The invention adopts the idea of hybrid integration to integrate the low-coherence light source and photoelectric detector module, the coupler and push-pull Y-branch module and the optical waveguide resonant cavity module on the same silicon substrate. In the invention, a low-coherence light source is used as a system light source, so that a plurality of optical parasitic effects including polarization noise are reduced, and the precision and the stability of the angular velocity detection system are improved; meanwhile, a three-chip hybrid integration mode is adopted, so that the volume of the system is greatly reduced, and the development trend of miniaturization is met.
Description
Technical Field
The invention relates to the technical field of signal detection, in particular to a low-coherent-light three-chip hybrid integrated angular velocity detection system and a low-coherent-light three-chip hybrid integrated angular velocity detection method. The optical resonant cavity has the functions of frequency selection and filtering of input light, and has different filtering characteristics on clockwise light paths and anticlockwise light paths under different rotation angular speeds according to the optical Sagnac effect, and the rotation angular speed of the system can be detected based on the characteristics.
Background
The resonant optical gyroscope is a high-precision inertial sensor for detecting angular velocity by using optical Sagnac effect, and comprises two main types of resonant optical fiber gyroscopes and resonant micro-optical gyroscopes. The resonant fiber optic gyroscope utilizes the fiber resonant cavity as a sensitive element, and the resonant micro-optic gyroscope utilizes the optical waveguide resonant cavity as a sensitive element, so that the resonant micro-optic gyroscope has great advantages in miniaturization and integration.
Since the Sagnac effect is an extremely weak effect, the conventional resonant micro-optical gyroscope utilizes high-coherence light as its system light source, which causes many optical parasitic effects such as back scattering noise, polarization noise, residual intensity noise, etc. to be generated in the system. The occurrence of these noises increases the complexity of the system signal processing, and also limits the improvement of the system precision, which is not favorable for the realization of system miniaturization.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a detection system and a detection method for realizing angular velocity detection by adopting a low-coherence light source as an emission source and an optical waveguide resonant cavity as an angular velocity sensitive element and utilizing the difference of filter characteristics of a clockwise light path and a counterclockwise light path under different angular velocities.
The invention provides a low-coherence light three-piece hybrid integrated angular velocity detection system, which comprises an optical system consisting of a low-coherence light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity and a signal processing system consisting of a signal modulation and demodulation module, wherein the optical system consists of a light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity; the low-coherence light source, the coupler, the push-pull type Y branch and the optical waveguide resonant cavity are connected in sequence; the other port of the coupler is connected with the input end of the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull Y branch, and the demodulation signal generated by the signal modulation and demodulation module is input to an external data recorder as the output signal of the system.
The detection method applying the detection system comprises the following steps:
(1) The low-coherence light source, the photoelectric detector module, the coupler, the push-pull Y-branch module and the optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source enters the optical waveguide resonant cavity from clockwise and counterclockwise directions through the coupler and the push-pull Y branch respectively, multi-circle transmission is carried out in the optical waveguide resonant cavity, then clockwise and counterclockwise light beams pass through the push-pull Y branch again and interfere at the push-pull Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam at the push-pull Y branch reaches the maximum value, and when the system rotates, the interference light intensity of the light beam changes along with the rotation speed, so that the angular speed can be detected by detecting the change of the optical power of the interference signal. The demodulation output of the modulation and demodulation module reflects the change condition of the optical power, so that the demodulation output of the modulation and demodulation module is used as the output of the system and is output to an external data recorder, and finally the angular velocity detection value of the system can be obtained after calibration.
The invention also provides another low-coherence light three-piece hybrid integrated angular velocity detection system, which comprises an optical system consisting of a low-coherence light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity and a signal processing system consisting of a signal modulation and demodulation module and a servo frequency shift module; the low-coherence light source, the coupler, the push-pull Y branch and the optical waveguide resonant cavity are connected in sequence; the other port of the coupler is connected with the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull type Y branch, the demodulation signal generated by the signal modulation and demodulation module is input to the servo frequency shift module, and the servo frequency shift module is connected with the push-pull type Y branch.
The detection method applying the detection system comprises the following steps:
(1) A low-coherence light source, a photoelectric detector module, a coupler, a push-pull Y-branch module and an optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source enters the optical waveguide resonant cavity from clockwise and counterclockwise directions through the coupler and the push-pull Y branch respectively, multi-circle transmission is carried out in the optical waveguide resonant cavity, then clockwise and counterclockwise light beams pass through the push-pull Y branch again and interfere at the push-pull Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam at the push-pull Y branch reaches the maximum value, and when the system rotates, the interference light intensity of the light beam changes along with the rotation speed, so that the angular speed can be detected by detecting the change of the light power of the interference signal. The demodulation output of the modulation and demodulation module reflects the change condition of the optical power and is output to the servo frequency shift module, and the servo frequency shift module generates sawtooth waves to act on the push-pull Y branch, so that the optical power of clockwise and counterclockwise optical interference reaches the maximum value; and taking the frequency signal of the sawtooth wave as frequency shift quantity and simultaneously as an output signal of the angular velocity detection system, outputting the frequency signal to an external data recorder, and finally obtaining the angular velocity detection value of the system after calibration.
The invention has the following beneficial effects:
1. according to the low-coherence light three-chip hybrid integrated angular velocity detection system and method, the low-coherence light is used as the light source, so that optical parasitic effects including polarization noise can be reduced to a great extent, and the stability of the system is improved to a great extent.
2. According to the low coherent light three-chip hybrid integrated angular velocity detection system and method provided by the invention, the optical system is integrated on the same silicon substrate by adopting a hybrid integration thought and method, so that the volume of the system is greatly reduced, and the miniaturization of the angular velocity detection system is favorably realized.
Drawings
FIG. 1 is a schematic diagram of a first low coherent light three-chip hybrid integrated angular velocity detection system and method according to the present invention;
FIG. 2 is a schematic diagram of a second low coherence light three-chip hybrid integrated angular velocity detection system and method according to the present invention;
fig. 3 is a graph illustrating the output of the demodulated signal.
FIG. 4 is a schematic diagram of the relationship between the clockwise and counterclockwise resonant frequencies and the laser frequency when the low coherent light three-chip hybrid integrated angular velocity detection system and method rotates.
FIG. 5 is a schematic diagram of an embodiment of a low coherent light three-chip hybrid integrated angular velocity detection system and method.
In the figure: 1. the optical fiber laser comprises a silicon substrate, 2 low-coherence light source and photoelectric detector modules, 3 a coupler and push-pull type Y-branch module, 4 an optical waveguide resonant cavity module, 5 a signal modulation and demodulation module, 6 a data recorder, 7 a photoelectric detector, 8 a low-coherence light source, 9 a coupler, 10 and push-pull type Y-branch. Wherein the module 2 and the module 3 are hetero-integrated with the module 4 on a silicon substrate using Die to Wafer (D2W) bonding technology.
Detailed Description
The present invention will be described in detail below with reference to examples and drawings, but the present invention is not limited thereto.
Example 1
As shown in fig. 1, the low coherent light three-chip hybrid integrated angular velocity detection system provided in this embodiment includes an optical system composed of a low coherent light source, a photodetector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity, and a signal processing system composed of a signal modulation and demodulation module;
the low-coherence light source, the coupler, the push-pull Y branch and the optical waveguide resonant cavity are sequentially connected; the other port of the coupler is connected with the input end of the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull Y branch, and the demodulation signal generated by the signal modulation and demodulation module is input to an external data recorder as the output signal of the system.
The detection method comprises the following steps:
(1) The low-coherence light source, the photoelectric detector module, the coupler, the push-pull Y-branch module and the optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source enters the optical waveguide resonant cavity from clockwise and counterclockwise directions through the coupler and the push-pull Y branch respectively, multi-circle transmission is carried out in the optical waveguide resonant cavity, then clockwise and counterclockwise light beams pass through the push-pull Y branch again and interfere at the push-pull Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam at the push-pull Y branch reaches the maximum value, and when the system rotates, the interference light intensity of the light beam changes along with the rotation speed, so that the angular speed can be detected by detecting the change of the optical power of the interference signal. The demodulation output of the modulation and demodulation module reflects the change condition of the optical power, so that the demodulation output of the modulation and demodulation module is used as the output of the system and is output to an external data recorder, and finally the angular velocity detection value of the system can be obtained after calibration.
Example 2
The low coherent light three-chip hybrid integrated angular velocity detection system provided by the embodiment comprises an optical system consisting of a low coherent light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity, and a signal processing system consisting of a signal modulation and demodulation module and a servo frequency shift module;
the low-coherence light source, the coupler, the push-pull Y branch and the optical waveguide resonant cavity are sequentially connected; the other port of the coupler is connected with the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull type Y branch, the demodulation signal generated by the signal modulation and demodulation module is input to the servo frequency shift module, and the servo frequency shift module is connected with the push-pull type Y branch.
The detection method comprises the following steps:
(1) A low-coherence light source, a photoelectric detector module, a coupler, a push-pull type Y branch module and an optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source enters the optical waveguide resonant cavity from clockwise and counterclockwise directions through the coupler and the push-pull Y branch respectively, multi-circle transmission is carried out in the optical waveguide resonant cavity, then clockwise and counterclockwise light beams pass through the push-pull Y branch again and interfere at the push-pull Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam at the push-pull Y branch reaches the maximum value, and when the system rotates, the interference light intensity of the light beam changes along with the rotation speed, so that the angular speed can be detected by detecting the change of the optical power of the interference signal. The demodulation output of the modulation and demodulation module reflects the change condition of the optical power and is output to the servo frequency shift module, and the servo frequency shift module generates sawtooth waves to act on the push-pull Y branch, so that the optical power of clockwise and counterclockwise optical interference reaches the maximum value; and taking the frequency signal of the sawtooth wave as frequency shift quantity and simultaneously as an output signal of the angular velocity detection system, outputting the frequency signal to an external data recorder, and finally obtaining the angular velocity detection value of the system after calibration.
As shown in fig. 3, output demodulation curves of the low coherent light three-chip hybrid integrated angular velocity detection system and method according to embodiments 1 and 2 are shown. It can be seen from the demodulation curve that when the system is stationary, the demodulation output is 0, when the system rotates, that is, when the clockwise and counterclockwise beams have resonant frequency difference, the demodulation output begins to change, and by calibrating the relationship between the demodulation output and the actual rotational angular velocity of the system, the rotational angular velocity of the system can be obtained according to the demodulation output value.
As shown in fig. 4, a schematic diagram of a relationship between clockwise and counterclockwise frequencies when the low coherent light three-chip hybrid integrated angular velocity detection system and method rotate is provided, and a resonant frequency difference between clockwise and counterclockwise is a rotation signal of the system. Because the system adopts a low-coherence light source, the spectral width of the system is far larger than one free spectral width (FSR) of a resonant cavity, and the change of clockwise and counterclockwise frequencies in one FSR is used for representing the overall change. When the system is static, the resonant frequencies of clockwise and counterclockwise beams are completely overlapped in each FSR, and the optical power obtained by interference in the system is also the maximum value; when the system rotates, the resonant frequencies of clockwise and counterclockwise light beams are different, namely, the situation in the corresponding diagram is reflected to the actual system, namely, the reduction of the optical power obtained by interference is realized.
As shown in fig. 5, the embodiment of the system and the method for detecting angular velocity based on low coherent light three-chip hybrid integration includes a silicon substrate 1, a low coherent light source and photodetector module 2, a coupler and push-pull Y-branch module 3, an optical waveguide resonant cavity module 4, a signal modulation and demodulation module 5, and a data recorder 6; the low-coherence light source and detector module 2 comprises a photoelectric detector 7 and a low-coherence light source 8, the coupler and push-pull type Y-branch module 3 comprises a coupler 9 and a push-pull type Y-branch 10, and the optical waveguide ring resonator can be a silicon oxide or silicon nitride optical waveguide ring resonator. The invention integrates the low-coherence light source, the photoelectric detector module, the coupler, the push-pull Y-branch module and the optical waveguide resonant cavity module on the same silicon substrate through the Die to Wafer (D2W) bonding technology. Low-coherence light emitted by a coherent light source enters a resonant cavity from clockwise and counterclockwise directions respectively, multi-turn transmission is carried out in the resonant cavity, interference is carried out through push-pull Y-branch again, an optical signal after interference is converted into an electric signal at a photoelectric detector, and then the electric signal is demodulated into a system output. Due to the fact that the resonant cavity has different filtering characteristics under different rotation angular velocities, the angular velocity is detected by detecting the optical power change of the interference signal which is finally output. In the invention, a low-coherence light source is used as a system light source, so that a plurality of optical parasitic effects including polarization noise are reduced, and the stability of angular velocity detection is improved; meanwhile, a three-chip hybrid integration mode is adopted, so that the volume of the system is greatly reduced, and the development trend of miniaturization is met.
Claims (2)
1. A detection method for applying a low-coherent light three-piece hybrid integrated angular velocity detection system comprises an optical system consisting of a low-coherent light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity and a signal processing system consisting of a signal modulation and demodulation module; the low-coherence light source, the coupler, the push-pull Y branch and the optical waveguide resonant cavity are sequentially connected; the other port of the coupler is connected with the input end of the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull Y branch, and the demodulation signal generated by the signal modulation and demodulation module is input to an external data recorder as the output signal of the system;
the detection method of the detection system is characterized by comprising the following steps:
(1) The low-coherence light source, the photoelectric detector module, the coupler, the push-pull Y-branch module and the optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source enters the optical waveguide resonant cavity from clockwise and counterclockwise directions through the coupler and the push-pull Y branch respectively, multi-circle transmission is carried out in the optical waveguide resonant cavity, then clockwise and counterclockwise light beams pass through the push-pull Y branch again and interfere at the push-pull Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam at the push-pull Y branch reaches the maximum value, and when the system rotates, the light intensity of the interference light beam changes along with the rotation speed, so that the angular speed can be detected by detecting the change of the light power of the interference signal; the demodulation output of the modulation and demodulation module reflects the change condition of the optical power, so that the demodulation output of the modulation and demodulation module is used as the output of the system and is output to an external data recorder, and finally the angular velocity detection value of the system can be obtained after calibration.
2. A detection method for applying a low-coherent light three-piece hybrid integrated angular velocity detection system comprises an optical system consisting of a low-coherent light source, a photoelectric detector, a coupler, a push-pull Y branch and an optical waveguide resonant cavity and a signal processing system consisting of a signal modulation and demodulation module and a servo frequency shift module; the low-coherence light source, the coupler, the push-pull Y branch and the optical waveguide resonant cavity are sequentially connected; the other port of the coupler is connected with the photoelectric detector; the output signal of the photoelectric detector is input to a modulation and demodulation module; the modulation signal generated by the modulation and demodulation module is input to the push-pull type Y branch, the demodulation signal generated by the signal modulation and demodulation module is input to the servo frequency shift module, and the servo frequency shift module is connected with the push-pull type Y branch;
the detection method of the detection system is characterized by comprising the following steps:
(1) A low-coherence light source, a photoelectric detector module, a coupler, a push-pull type Y branch module and an optical waveguide resonant cavity module are heterogeneously integrated on the same silicon substrate through a Die to Wafer bonding technology;
(2) Light emitted by the low-coherence light source respectively enters the optical waveguide resonant cavity from the clockwise direction and the counterclockwise direction through the coupler and the push-pull type Y branch, multi-turn transmission is carried out in the optical waveguide resonant cavity, then clockwise light beams and counterclockwise light beams pass through the push-pull type Y branch again and are interfered at the push-pull type Y branch, and finally the light beams obtained by interference enter the photoelectric detector after passing through the coupler;
(3) Modulation of the signal:
phase modulation is carried out on low-coherence light emitted by a low-coherence light source at a push-pull Y branch, wherein a driving signal of a phase modulator is a modulation signal U1 (t) generated by a signal modulation and demodulation module;
(4) And (3) demodulation of signals:
interference signals generated at the push-pull type Y branch enter the photoelectric detector through the coupler and are converted into electric signals, and the signal modulation and demodulation module generates reference signals with the same frequency as the modulation signals U1 (t) to demodulate the electric signals;
(5) And (3) outputting a system signal:
when the system is static, the light intensity of the interference light beam obtained at the push-pull type Y branch reaches the maximum value, and when the system rotates, the interference light intensity of the light beam can change along with the rotating speed, so that the angular speed can be detected by detecting the change of the light power of the interference signal, the demodulation output of the modulation and demodulation module reflects the change condition of the light power and outputs the change condition to the servo frequency shift module, and the servo frequency shift module generates sawtooth waves to act on the push-pull type Y branch, so that the light intensity of clockwise light interference and anticlockwise light interference reaches the maximum value; and taking the frequency signal of the sawtooth wave as frequency shift quantity and simultaneously as an output signal of the angular velocity detection system, outputting the frequency signal to an external data recorder, and finally obtaining the angular velocity detection value of the system after calibration.
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