CN116576842A - A kind of resonant optical gyroscope and angular velocity measurement method - Google Patents
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Abstract
本公开提供一种谐振式光学陀螺仪及角速度测量方法,陀螺仪包括:光学谐振单元、可调谐激光器、光电探测器和信号处理与控制系统,光学谐振单元包括总线波导和至少两个波导环;信号处理与控制系统分别与光电探测器和可调谐激光器信号连接;光学谐振单元中,总线波导与第一波导环相邻,第一波导环和第二波导环相邻,第一波导环与总线波导和第二波导环邻近部位均存在光耦合,信号处理与控制系统根据双环谐振谱线得到双环的自由光谱范围,当存在外界角速度时,根据双环的自由光谱范围的变化量计算外界角速度的大小,相较于现有技术,本公开的谐振式光学陀螺仪结构简单,可以极大地提升陀螺仪的角速度敏感度。
The disclosure provides a resonant optical gyroscope and a method for measuring angular velocity. The gyroscope includes: an optical resonant unit, a tunable laser, a photoelectric detector, and a signal processing and control system. The optical resonant unit includes a bus waveguide and at least two waveguide rings; The signal processing and control system are respectively connected to the photodetector and the tunable laser signal; in the optical resonance unit, the bus waveguide is adjacent to the first waveguide ring, the first waveguide ring is adjacent to the second waveguide ring, and the first waveguide ring is connected to the bus There is optical coupling between the waveguide and the adjacent parts of the second waveguide ring. The signal processing and control system obtains the free spectral range of the double ring according to the resonance spectrum of the double ring. When there is an external angular velocity, the magnitude of the external angular velocity is calculated according to the change in the free spectral range of the double ring. , compared with the prior art, the resonant optical gyroscope of the present disclosure has a simple structure and can greatly improve the angular velocity sensitivity of the gyroscope.
Description
技术领域technical field
本公开涉及陀螺仪技术领域,具体涉及一种谐振式光学陀螺仪及角速度测量方法。The present disclosure relates to the technical field of gyroscopes, in particular to a resonant optical gyroscope and an angular velocity measurement method.
背景技术Background technique
陀螺仪是一种角速度传感器,用以敏感角速度,可应用于导弹、飞机等的惯性导航。谐振式光学陀螺仪通常以光学谐振环为基础,光学谐振环是一种环形光学器件,如图1所示,光学谐振环由总线波导和波导环组成。Gyroscope is an angular velocity sensor, which is used to sense angular velocity and can be applied to inertial navigation of missiles, aircraft, etc. Resonant optical gyroscopes are usually based on an optical resonant ring, which is a ring-shaped optical device. As shown in Figure 1, the optical resonant ring is composed of a bus waveguide and a waveguide ring.
现有的谐振式光学陀螺仪的一般结构如图2所示,整个陀螺系统由可调谐激光器、隔离器、电光调制器、光电探测器、谐振环、信号处理与控制系统等器件构成,结构较复杂且角速度敏感度较低。The general structure of the existing resonant optical gyroscope is shown in Figure 2. The entire gyroscope system is composed of tunable lasers, isolators, electro-optic modulators, photodetectors, resonant rings, signal processing and control systems, etc. The structure is relatively Complex and less sensitive to angular velocity.
发明内容Contents of the invention
本公开的目的是提供一种谐振式光学陀螺仪及角速度测量方法,以简化谐振式光学陀螺仪,并提高角速度测量敏感度。The purpose of the present disclosure is to provide a resonant optical gyroscope and a method for measuring angular velocity, so as to simplify the resonant optical gyroscope and improve the sensitivity of angular velocity measurement.
本公开第一方面实施例提供一种谐振式光学陀螺仪,包括:The embodiment of the first aspect of the present disclosure provides a resonant optical gyroscope, including:
光学谐振单元、可调谐激光器、光电探测器和信号处理与控制系统,所述光学谐振单元包括总线波导和至少两个波导环,所述两个波导环分别为第一波导环和第二波导环;An optical resonance unit, a tunable laser, a photodetector, and a signal processing and control system, the optical resonance unit includes a bus waveguide and at least two waveguide rings, and the two waveguide rings are respectively a first waveguide ring and a second waveguide ring ;
所述可调谐激光器设置在所述总线波导的输入端,所述光电探测器设置在所述总线波导的输出端,所述信号处理与控制系统分别与所述光电探测器和所述可调谐激光器信号连接;The tunable laser is set at the input end of the bus waveguide, the photodetector is set at the output end of the bus waveguide, and the signal processing and control system is connected with the photodetector and the tunable laser respectively signal connection;
所述光学谐振单元中,总线波导与第一波导环相邻,第一波导环和第二波导环相邻,第一波导环与总线波导和第二波导环邻近部位均存在光耦合;In the optical resonance unit, the bus waveguide is adjacent to the first waveguide ring, the first waveguide ring is adjacent to the second waveguide ring, and there is optical coupling between the first waveguide ring and the adjacent parts of the bus waveguide and the second waveguide ring;
所述信号处理与控制系统,用于输出扫频信号至所述可调谐激光器,以使所述可调谐激光器输出连续线性扫频激光;The signal processing and control system is used to output a frequency sweep signal to the tunable laser, so that the tunable laser can output continuous linear frequency sweep laser;
所述可调谐激光器发出的激光经总线波导耦合进入第一波导环,之后又耦合进入第二波导环;所述可调谐激光器输入激光的频率同时满足第一波导环和第二波导环的谐振条件;The laser light emitted by the tunable laser is coupled into the first waveguide ring through the bus waveguide, and then coupled into the second waveguide ring; the frequency of the laser input by the tunable laser satisfies the resonance conditions of the first waveguide ring and the second waveguide ring at the same time ;
所述光电探测器,用于采集通过第一波导环和第二波导环后输出光的光强,得到第一波导环和第二波导环的频率响应谱,即双环谐振谱线;The photodetector is used to collect the light intensity of the output light after passing through the first waveguide ring and the second waveguide ring, and obtain the frequency response spectrum of the first waveguide ring and the second waveguide ring, that is, the double-ring resonant spectral line;
所述信号处理与控制系统,还用于根据所述双环谐振谱线得到双环的自由光谱范围,当存在外界角速度时,根据所述双环的自由光谱范围的变化计算外界角速度的大小。The signal processing and control system is also used to obtain the free spectral range of the double ring according to the resonance spectrum of the double ring, and calculate the magnitude of the external angular velocity according to the change of the free spectral range of the double ring when there is an external angular velocity.
根据本公开的一些实施方式中,所述第一波导环和第二波导环的腔长差设置为:使双环谐振谱线在所述可调谐激光器扫频范围足够扫描出两个完整的深谐振谷的情况下能够达到的最大值。According to some embodiments of the present disclosure, the cavity length difference between the first waveguide ring and the second waveguide ring is set such that the double-ring resonant spectral lines are sufficient to scan two complete deep resonances in the frequency sweep range of the tunable laser The maximum value that can be reached in the case of valleys.
根据本公开的一些实施方式中,所述第一波导环的总长大于所述第二波导环的总长。According to some embodiments of the present disclosure, the total length of the first waveguide ring is greater than the total length of the second waveguide ring.
根据本公开的一些实施方式中,所述第一波导环和第二波导环中心的连线垂直于所述总线波导。According to some embodiments of the present disclosure, a line connecting centers of the first waveguide ring and the second waveguide ring is perpendicular to the bus waveguide.
根据本公开的一些实施方式中,所述第一波导环和第二波导环的形状相同。According to some embodiments of the present disclosure, the first waveguide ring and the second waveguide ring have the same shape.
根据本公开的一些实施方式中,所述第一波导环和第二波导环的形状不同。According to some embodiments of the present disclosure, the shapes of the first waveguide ring and the second waveguide ring are different.
本公开第二方面实施例提供一种角速度测量方法,基于第一方面中所述的谐振式光学陀螺仪,所述方法包括:The embodiment of the second aspect of the present disclosure provides a method for measuring angular velocity, based on the resonant optical gyroscope described in the first aspect, the method includes:
信号处理与控制系统输出扫频信号至可调谐激光器;The signal processing and control system outputs the frequency sweep signal to the tunable laser;
所述可调谐激光器向总线波导输出连续线性扫频激光,该激光经总线波导耦合进入第一波导环,之后又耦合进入第二波导环;所述可调谐激光器输入激光的频率同时满足第一波导环和第二波导环的谐振条件;The tunable laser outputs continuous linear frequency-sweeping laser to the bus waveguide, the laser is coupled into the first waveguide ring through the bus waveguide, and then coupled into the second waveguide ring; the frequency of the tunable laser input laser meets the requirements of the first waveguide The resonance conditions of the ring and the second waveguide ring;
光电探测器采集通过第一波导环和第二波导环后输出光的光强,得到第一波导环和第二波导环的频率响应谱,即双环谐振谱线;The photodetector collects the light intensity of the output light after passing through the first waveguide ring and the second waveguide ring, and obtains the frequency response spectrum of the first waveguide ring and the second waveguide ring, that is, the double-ring resonant spectral line;
所述信号处理与控制系统根据所述双环谐振谱线得到双环的自由光谱范围;The signal processing and control system obtains the free spectral range of the double ring according to the double ring resonant spectral line;
当存在外界角速度时,所述信号处理与控制系统根据所述双环的自由光谱范围的变化量计算外界角速度的大小。When there is an external angular velocity, the signal processing and control system calculates the magnitude of the external angular velocity according to the variation of the free spectral range of the double rings.
本公开与现有技术相比的优点在于:The advantages of the present disclosure over the prior art are:
本公开提供的谐振式光学陀螺仪,包括:光学谐振单元、可调谐激光器、光电探测器和信号处理与控制系统,所述光学谐振单元包括总线波导和至少两个波导环,所述两个波导环分别为第一波导环和第二波导环;所述可调谐激光器设置在所述总线波导的输入端,所述光电探测器设置在所述总线波导的输出端,所述信号处理与控制系统分别与所述光电探测器和所述可调谐激光器信号连接;所述光学谐振单元中,总线波导与第一波导环相邻,第一波导环和第二波导环相邻,第一波导环与总线波导和第二波导环邻近部位均存在光耦合,信号处理与控制系统根据双环谐振谱线得到双环的自由光谱范围,当存在外界角速度时,根据所述双环的自由光谱范围的变化量计算外界角速度的大小,相较于现有技术,本公开的谐振式光学陀螺仪结构简单,基于谐振谱线游标效应的双环结构可以极大地提升陀螺仪的角速度敏感度。The resonant optical gyroscope provided by the present disclosure includes: an optical resonant unit, a tunable laser, a photodetector, and a signal processing and control system, the optical resonant unit includes a bus waveguide and at least two waveguide rings, and the two waveguides The rings are respectively the first waveguide ring and the second waveguide ring; the tunable laser is set at the input end of the bus waveguide, the photodetector is set at the output end of the bus waveguide, and the signal processing and control system respectively connected to the photodetector and the tunable laser signal; in the optical resonance unit, the bus waveguide is adjacent to the first waveguide ring, the first waveguide ring is adjacent to the second waveguide ring, and the first waveguide ring is adjacent to the second waveguide ring. There is optical coupling between the bus waveguide and the adjacent parts of the second waveguide ring, and the signal processing and control system obtains the free spectral range of the double ring according to the resonance spectrum of the double ring, and when there is an external angular velocity, calculates the external Regarding the size of the angular velocity, compared with the prior art, the resonant optical gyroscope of the present disclosure has a simple structure, and the double-ring structure based on the resonant spectral line vernier effect can greatly improve the angular velocity sensitivity of the gyroscope.
附图说明Description of drawings
通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本公开的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiment. The drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present disclosure. Also throughout the drawings, the same reference numerals are used to designate the same components. In the attached picture:
图1示出了现有的一种光学谐振环的结构示意图;FIG. 1 shows a schematic structural view of an existing optical resonant ring;
图2示出了现有的一种谐振式光学陀螺仪的结构示意图;FIG. 2 shows a schematic structural view of an existing resonant optical gyroscope;
图3示出了图1所示光学谐振环的谐振谱线的示意图;Fig. 3 shows a schematic diagram of the resonant spectral lines of the optical resonant ring shown in Fig. 1;
图4示出了本公开所提供的一种谐振式光学陀螺仪的结构示意图;FIG. 4 shows a schematic structural diagram of a resonant optical gyroscope provided by the present disclosure;
图5示出了本公开所提供的双环谐振谱线的示意图。FIG. 5 shows a schematic diagram of the double-ring resonance spectrum provided by the present disclosure.
具体实施方式Detailed ways
以下,将参照附图来描述本公开的实施例。但是应该理解,这些描述只是示例性的,而并非要限制本公开的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本公开的概念。Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.
在附图中示出了根据本公开实施例的各种结构示意图。这些图并非是按比例绘制的,其中为了清楚表达的目的,放大了某些细节,并且可能省略了某些细节。图中所示出的各种区域、层的形状以及它们之间的相对大小、位置关系仅是示例性的,实际中可能由于制造公差或技术限制而有所偏差,并且本领域技术人员根据实际所需可以另外设计具有不同形状、大小、相对位置的区域/层。Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The figures are not drawn to scale, with certain details exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions/layers with different shapes, sizes, and relative positions can be additionally designed as needed.
在本公开的上下文中,当将一层/元件称作位于另一层/元件“上”时,该层/元件可以直接位于该另一层/元件上,或者它们之间可以存在居中层/元件。另外,如果在一种朝向中一层/元件位于另一层/元件“上”,那么当调转朝向时,该层/元件可以位于该另一层/元件“下”。In the context of the present disclosure, when a layer/element is referred to as being "on" another layer/element, the layer/element may be directly on the other layer/element, or there may be intervening layers/elements in between. element. Additionally, if a layer/element is "on" another layer/element in one orientation, the layer/element can be located "below" the other layer/element when the orientation is reversed.
如图1所示的光学谐振环由总线波导和一个波导环组成,这里的波导可以是光纤,也可以是SOI、Si3N4等材料构成的片上光波导,图1中波导环以圆形示例,实际还可以是跑道形、矩形等各种形状。总线波导与波导环邻近位置存在光耦合,经输入端进入总线波导的光在经过耦合部位时可耦合进入波导环内。The optical resonant ring shown in Figure 1 is composed of a bus waveguide and a waveguide ring. The waveguide here can be an optical fiber, or an on-chip optical waveguide made of SOI, Si3N4 and other materials. In Figure 1, the waveguide ring is a circular example, and the actual It can also be various shapes such as racetrack shape and rectangle. There is optical coupling between the bus waveguide and the adjacent position of the waveguide ring, and the light entering the bus waveguide through the input end can be coupled into the waveguide ring when passing through the coupling part.
波导环实际上是一种环形谐振腔,耦合进入波导环内的光频率满足下式条件时即可在腔内发生谐振:The waveguide ring is actually a ring resonant cavity, and the optical frequency coupled into the waveguide ring can resonate in the cavity when the following conditions are met:
式中,f为光频率,L为波导环总长,c为光速,neff为波导环波导的有效折射率,当输入光在波导环内发生谐振时则会被部分限制在腔内,无法从总线波导输出端输出,由(1)式可知可在腔内谐振的光频率呈周期性分布,且相邻两个谐振频率之间的间隔,即自由光谱范围为:In the formula, f is the optical frequency, L is the total length of the waveguide ring, c is the speed of light, and n eff is the effective refractive index of the waveguide ring waveguide. When the input light resonates in the waveguide ring, it will be partially confined in the cavity and cannot be transmitted from The output at the output end of the bus waveguide can be seen from formula (1) that the optical frequency that can resonate in the cavity is periodically distributed, and the interval between two adjacent resonant frequencies, that is, the free spectral range is:
此时利用可调谐激光器在输入端输入连续线性扫频激光,在输出端采集通过谐振环后的输出光功率,即可得到谐振环的频率响应谱,即其谐振谱线,谐振谱线的示意图如图3所示。图3中展示了波导环的两个谐振谷,f1和f2是波导环的两个谐振频率,二者之间的频率差为自由光谱范围fFSR。At this time, the tunable laser is used to input a continuous linear frequency sweep laser at the input end, and the output optical power after passing through the resonant ring is collected at the output end, and the frequency response spectrum of the resonant ring can be obtained, that is, its resonant spectral line, the schematic diagram of the resonant spectral line As shown in Figure 3. Figure 3 shows the two resonance valleys of the waveguide ring, f 1 and f 2 are the two resonance frequencies of the waveguide ring, and the frequency difference between them is the free spectral range f FSR .
谐振式光学陀螺仪是一种以Sagnac效应为基础设计的陀螺仪,Sagnac效应以相对论为原理,即运动的物体其长度会发生变化,所以外界旋转角速度会使波导环的腔长发生变化,当外界角速度方向与光传播方向相同时,波导环的腔长会变长,当外界角速度方向与光传播方向相反时,波导环的腔长会变短,此时,由(1)式可知波导环中顺逆时针两路光的谐振频率都会发生偏移,二者之间则会产生一个微小的频率差值Δf,在一定范围内这一频率差值与角速度存在正比关系:The resonant optical gyroscope is a gyroscope designed based on the Sagnac effect. The Sagnac effect is based on the theory of relativity, that is, the length of a moving object will change, so the external rotational angular velocity will change the cavity length of the waveguide ring. When When the direction of external angular velocity is the same as the direction of light propagation, the cavity length of the waveguide ring will become longer. When the direction of external angular velocity is opposite to the direction of light propagation, the cavity length of the waveguide ring will be shortened. At this time, the waveguide ring can be known from formula (1) The resonant frequency of the clockwise and counterclockwise two paths of light will shift, and a small frequency difference Δf will be generated between the two. Within a certain range, this frequency difference is proportional to the angular velocity:
式中,Ω为角速度,n为折射率,λ0为光波在真空中的波长,D为波导环环路直径,实际应用中,可利用光电探测器探测波导环中顺逆时针两路光的光强P1、P2,通过调相谱技术对陀螺仪信号进行调制解调得到频率差Δf,并根据(3)式关系解算出外界旋转角速度的大小。In the formula, Ω is the angular velocity, n is the refractive index, λ0 is the wavelength of the light wave in vacuum, and D is the diameter of the waveguide ring. In practical applications, photodetectors can be used to detect the two paths of clockwise and counterclockwise light in the waveguide ring. Light intensities P 1 and P 2 are modulated and demodulated on the gyroscope signal by phase modulation spectrum technology to obtain the frequency difference Δf, and the external rotational angular velocity is calculated according to the relationship in (3).
谐振式光学陀螺仪的一般结构如图2所示,整个陀螺系统由可调谐激光器、隔离器、电光调制器、光电探测器、谐振环、信号处理与控制系统等器件构成,图中实线链路表示光学通路,虚线链路表示电学通路,其中光学通路由可调谐激光器提供窄线宽光源,经隔离器I后由1分2分束器C0分为等光强的两路光,其中一路经相位调制器P1调制后耦合到谐振环沿逆时针方向传输,之后经耦合器C1耦合进光电探测器D1,另外一路经相位调制器P2调制后沿硅基谐振环顺时针方向传输,之后经耦合器C2耦合进光电探测器D2,信号调制与控制系统将对光电探测器D1、D2探测到的两路光的光强信号进行解调处理并判断顺逆两束光的频率相对于硅基谐振环的谐振中心频率的偏移量,之后信号调制与控制系统将频率跟踪信号发送至可调谐激光器,使光源频率与顺逆时针两路中一路光的谐振频率始终保持一致,此时根据另一路光的输出光功率值即可判断顺逆两束光的谐振频率差值,进而解算出外界角速度值。The general structure of a resonant optical gyroscope is shown in Figure 2. The entire gyroscope system is composed of tunable lasers, isolators, electro-optical modulators, photodetectors, resonant rings, signal processing and control systems and other components. The solid line chain in the figure The path represents the optical path, and the dotted link represents the electrical path, in which the optical path is provided by a tunable laser with a narrow line width light source, and after passing through the isolator I, it is divided into two paths of light with equal light intensity by a 1-2 beam splitter C 0 , where One path is modulated by the phase modulator P 1 and coupled to the resonant ring for transmission in the counterclockwise direction, and then coupled into the photodetector D 1 through the coupler C 1 , and the other path is modulated by the phase modulator P 2 and clockwise along the silicon-based resonant ring direction transmission, and then coupled into the photodetector D 2 via the coupler C 2 , the signal modulation and control system will demodulate the light intensity signals of the two paths of light detected by the photodetectors D 1 and D 2 and judge whether they are forward or reverse The frequency offset of the two beams of light relative to the resonance center frequency of the silicon-based resonant ring, and then the signal modulation and control system sends the frequency tracking signal to the tunable laser, so that the frequency of the light source and the resonance of one of the clockwise and counterclockwise light The frequency is always consistent. At this time, the difference between the resonant frequency of the forward and reverse beams can be judged according to the output optical power value of the other beam, and then the external angular velocity value can be calculated.
本申请提供了一种具有两个环形谐振腔的谐振式光学陀螺仪,由上述相关技术可知,环形谐振腔(简称谐振环)发生转动时,其长度会发生改变,根据(2)式可知,腔长变化会使环内谐振光的自由光谱范围fFSR会发生改变,本申请则基于这一原理,通过采集外界角速度造成的谐振环的fFSR变化敏感角速度。The application provides a resonant optical gyroscope with two ring resonators. It can be known from the above-mentioned related technologies that when the ring resonator (resonant ring for short) rotates, its length will change. According to (2) formula, The change of the cavity length will change the free spectral range f FSR of the resonant light in the ring. This application is based on this principle, and is sensitive to the angular velocity by collecting the f FSR change of the resonant ring caused by the external angular velocity.
因为外界角速度导致的单谐振环fFSR变化太小,其变化难以被探测到,为增加陀螺仪的敏感度,本申请设计了双谐振环结构。图4示出了本公开所提供的一种谐振式光学陀螺仪的示意图,如图4所示,本公开提供的谐振式光学陀螺仪,包括:Because the change of f FSR of the single resonant ring caused by the external angular velocity is too small, its change is difficult to be detected. In order to increase the sensitivity of the gyroscope, this application designs a double resonant ring structure. FIG. 4 shows a schematic diagram of a resonant optical gyroscope provided by the present disclosure. As shown in FIG. 4 , the resonant optical gyroscope provided by the present disclosure includes:
光学谐振单元、可调谐激光器100、光电探测器200和信号处理与控制系统300,所述光学谐振环包括总线波导410和至少两个波导环,所述两个波导环分别为第一波导环420和第二波导环430。可选的,上述波导环的形状可以设置为圆形、跑道形或矩形等形状。Optical resonance unit, tunable laser 100, photodetector 200 and signal processing and control system 300, the optical resonance ring includes a bus waveguide 410 and at least two waveguide rings, the two waveguide rings are respectively the first waveguide ring 420 and the second waveguide ring 430 . Optionally, the shape of the above-mentioned waveguide ring can be set to a shape such as a circle, a racetrack, or a rectangle.
根据本申请的一些实施方式中,可设置第一波导环420的总长大于第二波导环430的总长,第一波导环420和第二波导环430中心的连线垂直于总线波导410。According to some embodiments of the present application, the total length of the first waveguide ring 420 can be set to be longer than the total length of the second waveguide ring 430 , and the connecting line between the centers of the first waveguide ring 420 and the second waveguide ring 430 is perpendicular to the bus waveguide 410 .
根据本公开的一些实施方式中,第一波导环420和第二波导环430的形状相同,例如均为圆形。所述第一波导环420和第二波导环430的形状也可以不同,例如一个为圆形,另一个为跑道形。According to some embodiments of the present disclosure, the first waveguide ring 420 and the second waveguide ring 430 have the same shape, for example, both are circular. The shapes of the first waveguide ring 420 and the second waveguide ring 430 may also be different, for example, one is circular and the other is racetrack-shaped.
可调谐激光器100设置在总线波导410的输入端,光电探测器200设置在总线波导410的输出端,信号处理与控制系统300分别与光电探测器200和可调谐激光器100信号连接。The tunable laser 100 is set at the input end of the bus waveguide 410 , the photodetector 200 is set at the output end of the bus waveguide 410 , and the signal processing and control system 300 is connected with the photodetector 200 and the tunable laser 100 respectively.
所述光学谐振单元中,总线波导410与第一波导环420相邻,第一波导环420和第二波导环430相邻,第一波导环420与总线波导410和第二波导环430邻近部位均存在光耦合。In the optical resonance unit, the bus waveguide 410 is adjacent to the first waveguide ring 420, the first waveguide ring 420 is adjacent to the second waveguide ring 430, and the first waveguide ring 420 is adjacent to the bus waveguide 410 and the second waveguide ring 430. Both are optically coupled.
信号处理与控制系统300用于输出扫频信号至可调谐激光器100,以使可调谐激光器100输出连续线性扫频激光。The signal processing and control system 300 is used to output frequency sweeping signals to the tunable laser 100, so that the tunable laser 100 outputs continuous linear frequency sweeping laser.
可调谐激光器100发出的激光经总线波导410耦合进入第一波导环420,之后又耦合进入第二波导环430;可调谐激光器100输入激光的频率可同时满足第一波导环420和第二波导环430的谐振条件。当输入激光频率满足任一波导环的谐振条件时,激光即可部分被限制在波导环内,而当输入激光频率同时满足第一波导环420和第二波导环430的谐振条件时,则激光会更多地被限制在两波导环内。The laser light emitted by the tunable laser 100 is coupled into the first waveguide ring 420 through the bus waveguide 410, and then coupled into the second waveguide ring 430; the frequency of the laser input from the tunable laser 100 can meet the requirements of the first waveguide ring 420 and the second waveguide ring at the same time. 430 resonance conditions. When the input laser frequency satisfies the resonance condition of any waveguide ring, the laser can be partially confined in the waveguide ring, and when the input laser frequency satisfies the resonance conditions of the first waveguide ring 420 and the second waveguide ring 430 at the same time, the laser will be more confined within the two waveguide rings.
光电探测器200用于采集通过第一波导环420和第二波导环430后输出光的光强,得到第一波导环420和第二波导环430的频率响应谱,即双环谐振谱线。The photodetector 200 is used to collect the light intensity of the output light passing through the first waveguide ring 420 and the second waveguide ring 430 to obtain the frequency response spectrum of the first waveguide ring 420 and the second waveguide ring 430 , that is, double-ring resonant spectral lines.
信号处理与控制系统300还用于根据双环谐振谱线得到双环的自由光谱范围,当存在外界角速度时,根据双环的自由光谱范围的变化量计算外界角速度的大小。The signal processing and control system 300 is also used to obtain the free spectral range of the double ring according to the resonance spectrum of the double ring, and calculate the magnitude of the external angular velocity according to the variation of the free spectral range of the double ring when there is an external angular velocity.
如图5所示,假如第一波导环420和第二波导环430的谐振曲线分别为曲线1和曲线2,可知双环谐振谱线为二者的叠加即如图5中曲线3所示,可知曲线3的深谐振谷出现的频率为第一波导环420和第二波导环430的谐振曲线谐振谷出现的频率的差值,此时,如第一波导环420和第二波导环430之间的腔长差值很小,则二者谐振曲线中谐振谷出现的频率差就很小,也即双环深谐振谷出现的频率很小,即其自由光谱范围fFSR很大,此时,当存在外界角速度时,会使第一波导环420和第二波导环430的腔长同时发生改变,且因为光在二者中传播方向是相反的,所以同一外界角速度引起的二者腔长变化趋势也是相反的,最终会引起双环深谐振谷fFSR的明显变化,其变化量的大小与外界角速度的大小成正比,此时即可通过探测到的双环谐振谱线fFSR计算外界角速度的大小。As shown in Figure 5, if the resonance curves of the first waveguide ring 420 and the second waveguide ring 430 are curve 1 and curve 2 respectively, it can be seen that the double-ring resonance spectrum is the superposition of the two, that is, as shown in curve 3 in Figure 5, it can be seen that The frequency at which the deep resonance valley of curve 3 appears is the difference between the frequencies at which the resonance valley of the resonance curve of the first waveguide ring 420 and the second waveguide ring 430 appears. If the difference in cavity length is very small, the frequency difference between the resonance valleys in the two resonance curves is very small, that is, the frequency of the double-ring deep resonance valleys is very small, that is, the free spectral range f FSR is very large. At this time, when When there is an external angular velocity, the cavity lengths of the first waveguide ring 420 and the second waveguide ring 430 will change at the same time, and because the direction of light propagation in the two is opposite, the change trend of the two cavity lengths caused by the same external angular velocity It is also the opposite, and will eventually cause a significant change in the double-ring deep resonance valley f FSR , and the magnitude of the change is proportional to the magnitude of the external angular velocity. At this time, the magnitude of the external angular velocity can be calculated from the detected double-ring resonance spectral line f FSR .
根据本申请的一些实施方式中,第一波导环420和第二波导环430的腔长差设置为:使双环谐振谱线在所述可调谐激光器扫频范围足够扫描出两个完整的深谐振谷的情况下能够达到的最大值。According to some embodiments of the present application, the cavity length difference between the first waveguide ring 420 and the second waveguide ring 430 is set so that the double-ring resonant spectral line is sufficient to scan two complete deep resonances in the frequency sweep range of the tunable laser The maximum value that can be reached in the case of valleys.
也就是说,实际应用中可合理设置双环腔长差使双环的fFSR在可调谐激光器扫频范围足够扫描出两个完整的深谐振谷的情况下尽可能的大,从而获得最大的角速度敏感度。That is to say, in practical applications, the length difference of the double-ring cavity can be reasonably set to make the f FSR of the double-ring as large as possible when the frequency sweep range of the tunable laser is sufficient to scan two complete deep resonance valleys, so as to obtain the maximum angular velocity sensitivity .
本公开与现有技术相比的优点在于:The advantages of the present disclosure over the prior art are:
本公开提出的谐振式光学陀螺仪结构简单,利用两个环形谐振腔的Sagnac效应及游标效应导致的双环谐振谱线自由光谱范围变化,来敏感外界角速度,相对于传统的谐振式光学陀螺仪,不需要跟踪谐振频率,所以对信号控制系统要求较低,不需要复杂的信号调制解调技术,所以不需要相位调制器,同时基于谐振谱线游标效应的双环结构可以极大地提升陀螺仪的角速度敏感度。The resonant optical gyroscope proposed in this disclosure has a simple structure, and uses the Sagnac effect of two ring resonators and the vernier effect to change the free spectral range of the double-ring resonant spectral lines to be sensitive to the external angular velocity. Compared with the traditional resonant optical gyroscope, There is no need to track the resonant frequency, so the requirements for the signal control system are relatively low, no complex signal modulation and demodulation technology is required, so no phase modulator is needed, and the double-ring structure based on the vernier effect of the resonant spectral line can greatly improve the angular velocity of the gyroscope sensitivity.
本公开还提供了一种角速度测量方法,该方法基于上述实施例中的谐振式光学陀螺仪,该方法包括以下步骤:The present disclosure also provides a method for measuring angular velocity, the method is based on the resonant optical gyroscope in the above embodiment, and the method includes the following steps:
信号处理与控制系统输出扫频信号至可调谐激光器;The signal processing and control system outputs the frequency sweep signal to the tunable laser;
所述可调谐激光器向总线波导输出连续线性扫频激光,该激光经总线波导耦合进入第一波导环,之后又耦合进入第二波导环;所述可调谐激光器输入激光的频率同时满足第一波导环和第二波导环的谐振条件;The tunable laser outputs continuous linear frequency-sweeping laser to the bus waveguide, the laser is coupled into the first waveguide ring through the bus waveguide, and then coupled into the second waveguide ring; the frequency of the tunable laser input laser meets the requirements of the first waveguide The resonance conditions of the ring and the second waveguide ring;
光电探测器采集通过第一波导环和第二波导环后输出光的光强,得到第一波导环和第二波导环的频率响应谱,即双环谐振谱线;The photodetector collects the light intensity of the output light after passing through the first waveguide ring and the second waveguide ring, and obtains the frequency response spectrum of the first waveguide ring and the second waveguide ring, that is, the double-ring resonant spectral line;
所述信号处理与控制系统根据所述双环谐振谱线得到双环的自由光谱范围;The signal processing and control system obtains the free spectral range of the double ring according to the double ring resonant spectral line;
当存在外界角速度时,所述信号处理与控制系统根据所述双环的自由光谱范围的变化量计算外界角速度的大小。When there is an external angular velocity, the signal processing and control system calculates the magnitude of the external angular velocity according to the variation of the free spectral range of the double rings.
本公开与现有技术相比的优点在于:The advantages of the present disclosure over the prior art are:
本公开提出的角速度测量方法,利用两个环形谐振腔的Sagnac效应及游标效应导致的双环谐振谱线自由光谱范围变化,来敏感外界角速度,相对于传统的谐振式光学陀螺仪,不需要跟踪谐振频率,所以对信号控制系统要求较低,不需要复杂的信号调制解调技术,所以不需要相位调制器,角速度测量敏感度较高。The angular velocity measurement method proposed in this disclosure uses the Sagnac effect of the two ring resonators and the change in the free spectral range of the double-ring resonant spectral lines caused by the vernier effect to be sensitive to the external angular velocity. Compared with the traditional resonant optical gyroscope, it does not need to track the resonance Frequency, so the requirements for the signal control system are low, no complex signal modulation and demodulation technology is required, so no phase modulator is required, and the sensitivity of angular velocity measurement is high.
为了形成同一结构,本领域技术人员还可以设计出与以上描述的方法并不完全相同的方法。另外,尽管在以上分别描述了各实施例,但是这并不意味着各个实施例中的措施不能有利地结合使用。In order to form the same structure, those skilled in the art can also devise methods that are not exactly the same as those described above. In addition, although the various embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be advantageously used in combination.
以上对本公开的实施例进行了描述。但是,这些实施例仅仅是为了说明的目的,而并非为了限制本公开的范围。本公开的范围由所附权利要求及其等价物限定。不脱离本公开的范围,本领域技术人员可以做出多种替代和修改,这些替代和修改都应落在本公开的范围之内。The embodiments of the present disclosure have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the present disclosure is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the present disclosure, and these substitutions and modifications should all fall within the scope of the present disclosure.
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CN117128945A (en) * | 2023-10-20 | 2023-11-28 | 中北大学 | Super-sensitive angular velocity sensor based on singular surface and measuring method |
CN117128945B (en) * | 2023-10-20 | 2023-12-26 | 中北大学 | An ultra-sensitive angular velocity sensor and measurement method based on singular surfaces |
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