CN114279831A

CN114279831A - Test equipment of spacer for semiconductor packaging

Info

Publication number: CN114279831A
Application number: CN202111402503.8A
Authority: CN
Inventors: 廖浚男; 范光宇; 古德宗
Original assignee: Jiaxing Yangjia Technology Partnership LP
Current assignee: Jiaxing Yangjia Technology Partnership LP
Priority date: 2021-11-24
Filing date: 2021-11-24
Publication date: 2022-04-05

Abstract

The invention discloses test equipment for a semiconductor packaging spacer, which comprises a base, wherein a feeding piece is arranged on the base, a feeding frame and a detection piece are arranged on the base, the feeding frame is positioned between the feeding piece and the detection piece, a material distributing piece is arranged on the base, a lifting piece is arranged on the base, a rotating rod is arranged on the base, a shifting block is arranged at one end of the rotating rod, a swing rod is arranged on the feeding frame, the swing rod is in sliding connection with the shifting block, a material moving plate is rotatably arranged on the swing rod, the test equipment comprises a detection mechanism, the detection mechanism comprises a detection block, a pressing block and a pressing plate, the detection block and the pressing block are arranged on the detection piece in a staggered mode, and the pressing plate is arranged on the lifting piece. According to the test equipment, the feeding piece and the feeding piece are fed, the detection piece carries out comprehensive pressure detection on the spacing piece, the material distribution piece separates defective products from qualified products to guarantee the quality of the products, the packaging piece packages the qualified products, the packaged products are moved to the lifting piece, and the lifting piece detects the packaged products.

Description

Test equipment of spacer for semiconductor packaging

Technical Field

The invention relates to the technical field of semiconductor production, in particular to a test device for a spacer for semiconductor packaging.

Background

The semiconductor packaging refers to a process of processing a wafer passing a test according to a product model and a functional requirement to obtain an independent chip. The packaging process comprises the following steps: the wafer from the previous process of the wafer is cut into small chips through a scribing process, then the cut chips are pasted on the corresponding small islands of the substrate frame through glue, and then the bonding pads of the chips are connected to the corresponding pins of the substrate through superfine metal wires or conductive resin to form a required circuit; the individual chips are then encapsulated and protected by a plastic housing.

The one deck distance piece can be add between chip and chip, between chip and the base plate to current packaging process, improves the heat dissipation function of chip, and current packaging process detects the distance piece trouble, can be broken when unqualified distance piece encapsulates, need carry out pressure detection to the distance piece before the encapsulation, ensures packaging process safety, reduces the loss, and the semiconductor after the encapsulation is accomplished lacks the detection, can't confirm the fastness of encapsulation.

Disclosure of Invention

The invention aims to provide a testing device for a spacer for a semiconductor package, which solves the problems of troublesome detection and package firmness detection of a packaging process detection piece.

The purpose of the invention can be realized by the following technical scheme:

the utility model provides a test equipment of semiconductor package is with distance piece, test equipment includes the base, is equipped with the feeding piece on the base, is equipped with material loading frame and detection piece on the base, and material loading frame is located between feeding piece and the detection piece, is equipped with the branch material piece on the base, is equipped with the lift piece on the base.

The base is provided with a rotating rod, and one end of the rotating rod is provided with a shifting block.

The feeding frame is provided with a swing rod, the swing rod is connected with the shifting block in a sliding mode, and the swing rod is rotatably provided with a material moving plate.

The test equipment comprises a detection mechanism, the detection mechanism comprises a detection block, a pressing block and a pressing plate, the detection block and the pressing block are arranged on a detection piece in a staggered mode, and the pressing plate is arranged on a lifting piece.

Further, be equipped with the dirty tank on the base, be equipped with the first riser of symmetric distribution on the base, rotate between the first riser and be equipped with the feeding piece, be equipped with the feeder hopper on the first riser, be equipped with the mounting hole on the first riser, be equipped with the second riser of symmetric distribution on the base, also be equipped with the mounting hole on the second riser, be equipped with the third riser between first riser and the second riser, the dwang rotates with the third riser to be connected, is equipped with the arc slider of symmetric distribution between the second riser, rotates on the second riser and is equipped with first gear.

Be equipped with the montant of symmetric distribution on the base, one side of montant is equipped with T shape pole, one side of T shape pole is equipped with vertical spout, one side of T shape pole is equipped with the guide bar that the array distributes, be equipped with the slide bar of symmetric distribution on the base, be equipped with first hydraulic stem on the base, first hydraulic stem and slide bar setting are between the montant, be equipped with the packaging part on the base, the packaging part setting is between lifter and holder, one side on the packaging part is equipped with the feeding conveyer belt, be equipped with the processing platform that is used for the encapsulation on the base.

Further, be equipped with the holder of symmetric distribution on the base, the holder setting is between the second riser, holder and second riser fastening connection, and the holder is including straight board, and the fixed punch holder that is equipped with on the straight board, one side of straight board are equipped with the sliding tray, and one side of straight board is rotated and is equipped with the second lead screw, and it is equipped with the movable plate to slide in the sliding tray.

The movable plate is provided with first springs which are symmetrically distributed, a lower clamping plate is rotatably arranged on the movable plate, the joint of the lower clamping plate and the movable plate is located between the first springs, ejector rods which are symmetrically distributed are arranged on one side of the lower clamping plate, and the joint of the lower clamping plate and the movable plate is located between the ejector rods.

The moving plate is matched with the second lead screw.

Further, the feeding part is arranged between the first vertical plates, the feeding part comprises a fixing shaft which is rotatably connected with the first vertical plates, circular plates which are symmetrically distributed are arranged on the fixing shaft, spacer blocks which are distributed in an array mode are arranged on one side of each circular plate, a fan-shaped groove is formed between every two adjacent spacer blocks, the spacer blocks are located between the circular plates, a material taking groove is arranged between the circular plates and communicated with the fan-shaped grooves, a limiting groove is arranged on one side of each spacer block, a second spring is arranged in each fan-shaped groove, and a supporting plate is arranged on each second spring.

Further, go up the work or material rest and include the work or material rest main part, go up the work or material rest main part and install on the mounting hole, go up the swing rod that rotates to be equipped with symmetric distribution in the work or material rest main part, one side of swing rod is equipped with the straight flute, rotates between the swing rod to be equipped with and moves the flitch, moves the flitch and is connected with the swing rod rotation through the connecting piece, moves and is equipped with the sucking disc on the flitch, moves one side of flitch and is equipped with the counterweight.

The shifting block is matched with the straight groove to slide.

Further, the detection piece further comprises a straight rod, a moving block is arranged on the straight rod in a sliding mode, a push rod is arranged on the moving block, a lifting rod and a limiting strip are arranged on the straight rod in a sliding mode, the lifting rod is fixedly connected with the limiting strip, a lifting plate is fixedly arranged at one end of the lifting rod, a detection plate is arranged at the other end of the lifting rod, and the lifting plate is rotatably connected with the push rod.

The utility model discloses a portable electronic device, including lifter, pick-up plate, pressure sensor, straight-bar, arc pole, detection piece, briquetting, the lifter internal rotation is equipped with the axis of rotation of being connected with the detection plate, is equipped with array distribution's detection piece and briquetting on the detection plate, is equipped with pressure sensor on the detection plate, pressure sensor and briquetting electric connection, and the both ends of straight-bar are equipped with the arc pole, and one side of arc pole is equipped with the arc wall, and an arc pole is the tight arc rack that has set firmly.

Further, the arc-shaped groove is matched with the arc-shaped sliding block, and the arc-shaped rack is matched with the first gear.

Further, divide the material piece to include the sliding block, sliding block and base sliding connection are equipped with the three hornblocks that are used for dividing the material on the sliding block, are equipped with first draw-in groove and the second draw-in groove of symmetric distribution on the three hornblocks, and the second draw-in groove is located the below of first draw-in groove.

The first clamping groove is matched with the ejector rod, and the second clamping groove is matched with the ejector rod.

Further, the piece that goes up and down includes the bottom block, and one side of bottom block is equipped with the sliding hole of symmetric distribution, fixedly on the bottom block being equipped with the mobile station, and one side of mobile station is equipped with the connecting block, and the output and the connecting block fastening connection of first hydraulic stem rotate on the connecting block to be equipped with the regulation pole, are equipped with L shape pole on the regulation pole, and the one end of L shape pole is equipped with the cooperation piece, and one side fastening of cooperation piece is equipped with the connecting rod, and the connecting rod rotates with the regulation pole to be connected, is equipped with the second hydraulic stem on the L shape pole.

The output of second hydraulic stem rotates and is equipped with the mounting panel, slides on the mounting panel and is equipped with the vibrations piece, and the one end rotation of vibrations piece is equipped with the connecting rod, and the one end fastening of connecting rod is equipped with the clamp plate, is equipped with the dead lever between the vibrations piece, and one side of dead lever is rotated and is equipped with the lug, is equipped with the standing groove on the mobile station, rotates on the mobile station and is equipped with the stopper, is equipped with the recess on the stopper, is equipped with the third spring of being connected with the stopper in the open slot.

Furthermore, the slide hole is matched with the slide rod, the matching block is matched with the vertical slide groove, the guide rod is matched with the pressing plate, and the groove is matched with the pressing plate.

The invention has the beneficial effects that:

1. according to the test equipment, a feeding piece and a feeding piece are fed, a detection piece carries out comprehensive pressure detection on a spacing piece, a material distribution piece separates defective products from qualified products after detection, the quality of the products is guaranteed, the qualified products are packaged by a packaging piece, and the packaged products are moved to a lifting piece;

2. according to the test equipment, the lifting piece is used for detecting the packaged product, the packaging effect and firmness are detected, the structure is simple, the detection is convenient, and the product quality rate is high.

Drawings

The invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic diagram of the test apparatus of the present invention;

FIG. 2 is a schematic view of the base structure of the present invention;

FIG. 3 is a schematic view of the base structure of the present invention;

FIG. 4 is a schematic view of the structure of the clamp of the present invention;

FIG. 5 is a schematic view of the feed member of the present invention;

FIG. 6 is a cross-sectional view of an inlet of the present invention;

FIG. 7 is a schematic view of a loading frame structure according to the present invention;

FIG. 8 is a schematic view of the structure of the detecting member of the present invention;

FIG. 9 is a schematic view of the structure of the detecting member of the present invention;

FIG. 10 is a schematic view of the construction of the distributing member of the present invention;

FIG. 11 is a schematic view of the lifter of the present invention;

FIG. 12 is an enlarged view of the structure of FIG. 11 at A in accordance with the present invention;

FIG. 13 is an enlarged view of FIG. 11 at B in accordance with the present invention;

fig. 14 is a schematic view of the lifter structure of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The utility model provides a test equipment of semiconductor package is with distance piece, test equipment includes base 1, as shown in fig. 1, be equipped with waste material groove 100 on the base 1, be equipped with symmetric distribution's holder 2 on the base 1, it is equipped with feeding piece 6 to rotate on the base 1, be equipped with work or material rest 3 on the base 1, it is equipped with detection piece 4 to rotate on the base 1, detection piece 4 is located holder 2, it is located between feeding piece 6 and holder 2 to go up work or material rest 3, it is equipped with branch material piece 8 to slide on the base 1, divide material piece 8 to set up the below at holder 2, the fixed packaging part 9 that is equipped with on the base 1, it is equipped with lift 5 to slide on the base 1, packaging part 9 sets up between lift 5 and holder 2.

As shown in fig. 2 and 3, a first vertical plate 11 is arranged on the base 1 and symmetrically distributed, a feeding piece 6 is arranged between the first vertical plate 11 in a rotating mode, a feeding hopper 7 is fixedly arranged on the first vertical plate 11, a baffle 71 is arranged at one end of the feeding hopper 7 in a rotating mode, a first motor 70 is arranged on one side of the feeding hopper 7, an output end of the first motor 70 is tightly connected with the baffle 71, a mounting hole 111 is formed in the first vertical plate 11, a second vertical plate 12 is fixedly arranged on the base 1 and symmetrically distributed, a mounting hole 111 is also formed in the second vertical plate 12, and a third vertical plate 13 is arranged between the first vertical plate 11 and the second vertical plate 12.

One side of third riser 13 is equipped with dwang 131, the fixed second motor 130 that is equipped with of opposite side, the one end of dwang 131 is equipped with shifting block 132, the other end and the output fastening connection of second motor 130, be equipped with symmetric distribution's arc slider 122 between the second riser 12, it is equipped with first gear 121 to rotate on the second riser 12, the fixed third motor 120 that is equipped with in one side of second riser 12, the output and the first gear 121 fastening connection of third motor 120, holder 2 sets up between second riser 12, holder 2 and a second riser 12 fastening connection, another holder 2 and another second riser 12 fastening connection.

Be equipped with first lead screw 19 and guide arm 191 on base 1, first lead screw 19 and guide arm 191 set up between second riser 12, the fixed fourth motor 190 that is equipped with on the base 1, the output and the first lead screw 19 fastening connection of fourth motor 190, be equipped with symmetric distribution's montant 14 on the base 1, the fixed T shape pole 141 that is equipped with in one side of montant 14, one side of T shape pole 141 is equipped with vertical spout 15, one side of T shape pole 141 is equipped with array distribution's guide bar 16, be equipped with symmetric distribution's slide bar 17 on the base 1, be equipped with first hydraulic stem 18 on the base 1, first hydraulic stem 18 and slide bar 17 set up between montant 14.

The packaging member 9 is arranged on the base 1, the packaging member 9 is arranged between the second vertical plate 12 and the vertical rod 14, the packaging member 9 can move along the XYZ direction, a feeding conveyor belt 91 is arranged on one side of the packaging member 9, the feeding conveyor belt 94 is used for conveying a substrate or a chip, a processing table 92 is arranged on the base 1, and the chip, the substrate and the spacer are connected and fixed through the processing table 92 to complete packaging.

As shown in fig. 4, the clamping member 2 includes a straight plate 21, an upper clamping plate 24 is fixedly disposed on the straight plate 21, a fifth motor 23 is disposed on the upper clamping plate 24, a sliding groove 22 and a second lead screw 29 are disposed on one side of the straight plate 21, an output end of the fifth motor 23 is fixedly connected with the second lead screw 29, a moving plate 25 is slidably disposed in the sliding groove 22, and the moving plate 25 is in threaded fit with the second lead screw 29.

First springs 27 which are symmetrically distributed are fixedly arranged on the moving plate 25, a lower clamping plate 26 is rotatably arranged on the moving plate 25, the joint of the lower clamping plate 26 and the moving plate 25 is positioned between the first springs 27, ejector rods 28 which are symmetrically distributed are arranged on one side of the lower clamping plate 26, the joint of the lower clamping plate 26 and the moving plate 25 is positioned between the ejector rods 28, the lower clamping plate 26 is kept horizontal by the first springs 27, and the upper clamping plate 24 and the lower clamping plate 26 are matched with each other to fix the spacing piece.

As shown in fig. 5 and 6, the feeding member 6 is disposed between the first vertical plates 11, the feeding member 6 includes a fixed shaft 61, the fixed shaft 61 is rotatably connected with the first vertical plates 11, the fixed shaft 61 is provided with symmetrically distributed circular plates 62, one side of the circular plates 62 is provided with spacing blocks 65 distributed in an array, a fan-shaped groove 63 is formed between adjacent spacing blocks 65, the fan-shaped groove 63 is used for placing a spacing element, the spacing blocks 65 are located between the circular plates 62, a material taking groove 64 is disposed between the circular plates 62, the material taking groove 64 is communicated with the fan-shaped groove 63, and one side of the spacing block 65 is provided with a limiting groove 66.

Second springs 67 are fixedly arranged in the sector groove 63 in an array distribution mode, a supporting plate 68 is arranged on the second springs 67, the supporting plate 68 is used for supporting a spacing piece, the spacing piece enters the sector groove 63 from the feeding hopper 7, the impact force of falling of the spacing piece is reduced by the second springs 67, a sixth motor 110 is arranged on one side of the first vertical plate 11, and the output end of the sixth motor 110 is fixedly connected with the fixed shaft 61.

As shown in fig. 7, the feeding frame 3 includes a feeding frame main body 31, threaded rods 32 distributed in an array manner are arranged on the feeding frame main body 31, a support rod 33 is fixedly arranged on the feeding frame main body 31, swing rods 34 distributed symmetrically are rotatably arranged on the support rod 33, a straight groove 35 is arranged on one side of each swing rod 34, material moving plates 37 are rotatably arranged between the swing rods 34, connecting members 36 distributed symmetrically are arranged on the material moving plates 37, the material moving plates 37 are rotatably connected with the swing rods 34 through the connecting members 36, suction cups 38 are arranged on the material moving plates 37, a counterweight 39 is arranged on one side of each material moving plate 37, and the counterweight 39 keeps the material moving plates 37 in a horizontal state, so that the suction cups 38 are kept in an upward state.

The threaded rod 32 is matched and fixed with the mounting hole 111, and the shifting block 132 is matched and slides with the straight groove 35.

As shown in fig. 8 and 9, the detecting member 4 includes a straight rod 41, a third lead screw 42 and a seventh motor 43 are symmetrically arranged on the straight rod 41, an output end of the seventh motor 43 is fixedly connected to the third lead screw 42, a moving block 44 is arranged on the third lead screw 42, the moving block 44 is in threaded fit with the third lead screw 42, the moving block 44 is slidably connected to the straight rod 41, a push rod 45 is arranged on the moving block 44, a lifting rod 48 is slidably arranged on the straight rod 41, a lifting plate 46 is fixedly arranged at one end of the lifting rod 48, a detecting plate 484 is arranged at the other end of the lifting rod 48, and the lifting plate 46 is rotatably connected to the push rod 45.

Fixed eighth motor 47 that is equipped with on lifter plate 46, one side of lifter 48 is equipped with spacing 481, spacing 481 and straight-bar 41 sliding fit, be equipped with circular slot 482 in the lifter 48, the circular slot 482 internal rotation is equipped with axis of rotation 483, eighth motor 47's output and axis of rotation 483 fastening connection, axis of rotation 483 and detection plate 484 fastening connection, be equipped with detection piece 485 and briquetting 486 of array distribution on the detection plate 484, it sets up with briquetting 486 is crisscross to detect piece 485, be equipped with pressure sensor 487 on the detection plate 484, pressure sensor 487 and briquetting 486 electric connection, a crushing resistance for detecting the spacer.

The two ends of the straight rod 41 are provided with arc-shaped rods 49, one side of each arc-shaped rod 49 is provided with an arc-shaped groove 491, each arc-shaped groove 491 is matched with the arc-shaped sliding block 122, one arc-shaped rod 49 is fixedly provided with an arc-shaped rack 40, and each arc-shaped rack 40 is matched with the first gear 121.

As shown in fig. 10, the material distributing member 8 includes a sliding block 81, a threaded hole 82 and a through hole 83 are formed in one side of the sliding block 81, the threaded hole 82 is matched with the first lead screw 19, the through hole 83 is matched with the guide rod 191, a triangular block 84 is arranged on the sliding block 81, a first clamping groove 86 and a second clamping groove 85 are symmetrically arranged on the triangular block 84, the first clamping groove 86 and the second clamping groove 85 are located on an inclined surface of the triangular block 84, and the second clamping groove 85 is located below the first clamping groove 86.

The first locking groove 86 is matched with the top rod 28, the second locking groove 85 is matched with the top rod 28, and the spacer slides down from the lower clamping plate 26 and slides down along the inclined plane on the triangular block 84 to the next process.

As shown in fig. 11, 12, 13, and 14, the lifting member 5 includes a bottom block 51, slide holes 52 are symmetrically distributed on one side of the bottom block 51, the slide holes 52 are matched with the slide rods 17 to slide, a moving table 53 is fixed on the bottom block 51, a connecting block 54 is arranged on one side of the moving table 53, one side of the connecting block 54 is tightly connected with the output end of the first hydraulic rod 18, an adjusting rod 55 is rotatably arranged on the connecting block 54, an L-shaped rod 56 is arranged on the adjusting rod 55, a matching block 561 is arranged at one end of the L-shaped rod 56, and a connecting rod 562 is tightly arranged on one side of the matching block 561.

The connecting rod 562 is rotatably connected with the adjusting rod 55, and the matching block 561 is matched with the vertical sliding chute 15.

The L-shaped rod 56 is provided with a second hydraulic rod 563, the output end of the second hydraulic rod 563 is provided with a frame 57, the frame 57 is internally provided with a ninth motor 570, one side of the frame 57 is fixedly provided with a mounting plate 571, the output end of the ninth motor 570 is fixedly connected with the mounting plate 571 to control the mounting plate 571 to rotate, the mounting plate 571 is provided with symmetrically distributed moving grooves 572, vibrating blocks 573 are arranged in the moving grooves 572 in a sliding manner, one end of each vibrating block 573 is rotatably provided with a rotating block 574, and one side of each rotating block 574 is provided with a connecting rod 575.

One end of the connecting rod 575 is fastened with a pressing plate 576, the other end is fastened with a rotating block 574, the pressing plate 576 is guided by the guide rod 16, a fixing rod 577 is arranged between the vibrating blocks 573, a bump 578 is arranged on one side of the fixing rod 577, a tenth motor 579 is arranged on the other side of the fixing rod 577, the output end of the tenth motor 579 is fastened with a bump 578, and the tenth motor 579 rotates the bump 578 to generate vibration, so that the vibrating block 573 slides in the moving groove 572.

The moving table 53 is provided with a placing groove 58, the placing groove 58 is used for placing packaged chips, the moving table 53 is provided with open grooves 59 distributed in an array manner, a limit block 591 is rotationally arranged in the open grooves 59, a groove 592 is arranged on the limit block 591, the groove 592 is matched with a pressure plate 576, third springs 594 distributed in an array manner are arranged in the open grooves 59, and one end of each third spring 594 is fixedly connected with the limit block 591 to fasten the limit block 591.

During use, the spacing element is placed in the feeding hopper 7, the baffle 71 is opened, the spacing element is moved onto the feeding element 6, the feeding element 6 rotates, the spacing element is moved to be close to the upper material rack 3, the rotating rod 131 is rotated to drive the swing rod 34 to move, the material moving plate 37 is moved to the spacing element of the feeding element 6, the spacing element is lifted upwards, the sucking disc 38 fixes the spacing element, the feeding element 6 continues to rotate, the swing rod 34 rotates reversely at the moment, the spacing element is moved to the second vertical plate 12 and is attached to the upper clamping plate 24, the lower clamping plate 26 moves upwards, the spacing element is fixed, the lifting rod 48 is controlled by the push rod 45 to move, the detection block 485 and the pressing block 486 perform primary detection on the upper surface of the spacing element, the first gear 121 controls the rotating arc-shaped rod 49 to enable the detection block 485 and the pressing block 486 to perform primary detection on the lower surface of the spacing element, and the detection on whether the pressure resistance of the spacing element is qualified or not.

After the first detection, the lower clamp plate 26 drives the spacing member to move downwards, the material distributing member 8 is moved according to the first detection result, the first clamping groove 86 on the lower clamp plate 26 is matched with the ejector rod 28, then the second clamping groove 85 is matched with the ejector rod 28, at the moment, the lower clamp plate 26 is in an inclined state, the spacing member is poured out, the qualified product is conveyed to the packaging member 9, the defective product is conveyed to the waste material groove 100 to facilitate later recovery, the packaging member 9 packages the spacing member with the semiconductor chip, then the output end of the first hydraulic rod 18 extends to push the movable table 53 to move towards the packaging member 9, the packaging member 9 puts the packaged chip into the placing groove 58, the output end of the first hydraulic rod 18 is shortened, the movable table 53 moves to the adjusting rod 55 to be jointed with the T-shaped rod 141, at the moment, the output end of the second hydraulic rod 563 extends to enable the pressing plate 576 to be inserted into the groove 592, the bump 578 controls the pressing plate 576 to swing back and forth to extrude the side edge of the chip, and testing whether the package is qualified or not, wherein the ninth motor 570 rotates the mounting plate 571, and the pressing plate 576 performs secondary detection on the other side of the chip.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.

Claims

1. A test device of a spacer for semiconductor packaging comprises a base (1) and is characterized in that a feeding piece (6) is arranged on the base (1), a feeding frame (3) and a detection piece (4) are arranged on the base (1), the feeding frame (3) is located between the feeding piece (6) and the detection piece (4), a material distributing piece (8) is arranged on the base (1), and a lifting piece (5) is arranged on the base (1);

a rotating rod (131) is arranged on the base (1), and a shifting block (132) is arranged at one end of the rotating rod (131);

the feeding frame (3) is provided with a swing rod (34), the swing rod (34) is connected with the shifting block (132) in a sliding mode, and the swing rod (34) is rotatably provided with a material transferring plate (37);

the test equipment comprises a detection mechanism, the detection mechanism comprises a detection block (485), a pressing block (486) and a pressing plate (576), the detection block (485) and the pressing block (486) are arranged on the detection piece (4) in a staggered mode, and the pressing plate (486) is arranged on the lifting piece (5).

2. The apparatus for testing a spacer for semiconductor packages according to claim 1, be equipped with waste material groove (100) on base (1), be equipped with first riser (11) of symmetric distribution on base (1), it is equipped with feeding piece (6) to rotate between first riser (11), be equipped with feeder hopper (7) on first riser (11), be equipped with mounting hole (111) on first riser (11), be equipped with symmetric distribution's second riser (12) on base (1), also be equipped with mounting hole (111) on second riser (12), be equipped with third riser (13) between first riser (11) and second riser (12), dwang (131) are rotated with third riser (13) and are connected, be equipped with the arc slider (122) of symmetric distribution between second riser (12), it is equipped with first gear (121) to rotate on second riser (12).

Be equipped with symmetric distribution's montant (14) on base (1), one side of montant (14) is equipped with T shape pole (141), one side of T shape pole (141) is equipped with vertical chute (15), one side of T shape pole (141) is equipped with guide bar (16) that the array distributes, be equipped with symmetric distribution's slide bar (17) on base (1), be equipped with first hydraulic stem (18) on base (1), first hydraulic stem (18) and slide bar (17) set up between montant (14), be equipped with packaging part (9) on base (1), packaging part (9) set up between lifter (5) and holder (2), one side on packaging part (9) is equipped with feeding conveyer belt (91), be equipped with processing platform (92) that are used for the encapsulation on base (1).

3. The testing equipment of the spacer for the semiconductor package according to claim 2, wherein the base (1) is provided with symmetrically distributed clamping pieces (2), the clamping pieces (2) are arranged between the second vertical plates (12), the clamping pieces (2) are fixedly connected with the second vertical plates (12), each clamping piece (2) comprises a straight plate (21), an upper clamping plate (24) is fixedly arranged on each straight plate (21), one side of each straight plate (21) is provided with a sliding groove (22), one side of each straight plate (21) is rotatably provided with a second lead screw (29), and a moving plate (25) is slidably arranged in each sliding groove (22);

first springs (27) which are symmetrically distributed are arranged on the moving plate (25), lower clamping plates (26) are arranged on the moving plate (25) in a rotating mode, the joints of the lower clamping plates (26) and the moving plate (25) are located between the first springs (27), ejector rods (28) which are symmetrically distributed are arranged on one sides of the lower clamping plates (26), and the joints of the lower clamping plates (26) and the moving plate (25) are located between the ejector rods (28);

the moving plate (25) is matched with a second lead screw (29).

4. The apparatus for testing the spacer for semiconductor packages according to claim 2, wherein the feeding member (6) is disposed between the first vertical plates (11), the feeding member (6) comprises a fixed shaft (61) rotatably connected to the first vertical plates (11), symmetrically distributed circular plates (62) are disposed on the fixed shaft (61), spacers (65) are disposed on one side of the circular plates (62) in an array, sector grooves (63) are formed between adjacent spacers (65), the spacers (65) are disposed between the circular plates (62), a material taking groove (64) is disposed between the circular plates (62), the material taking groove (64) is communicated with the sector grooves (63), a limiting groove (66) is disposed on one side of the spacer (65), a second spring (67) is disposed in the sector groove (63), and a support plate (68) is disposed on the second spring (67).

5. The testing equipment of the spacer for the semiconductor packaging according to claim 2, wherein the loading frame (3) comprises a loading frame main body (31), the loading frame main body (31) is installed on the installation hole (111), symmetrically distributed swing rods (34) are rotatably arranged on the loading frame main body (31), a straight groove (35) is formed in one side of each swing rod (34), a material moving plate (37) is rotatably arranged between the swing rods (34), the material moving plate (37) is rotatably connected with the swing rods (34) through a connecting piece (36), a suction cup (38) is arranged on the material moving plate (37), and a counterweight piece (39) is arranged on one side of the material moving plate (37);

the shifting block (132) is matched with the straight groove (35) to slide.

6. The testing device of the spacer for the semiconductor packages according to claim 2, wherein the detecting member (4) further comprises a straight rod (41), a moving block (44) is slidably arranged on the straight rod (41), a push rod (45) is arranged on the moving block (44), a lifting rod (48) and a limiting strip (481) are slidably arranged on the straight rod (41), the lifting rod (48) is fixedly connected with the limiting strip (481), a lifting plate (46) is fixedly arranged at one end of the lifting rod (48), a detecting plate (484) is arranged at the other end of the lifting rod, and the lifting plate (46) is rotatably connected with the push rod (45);

the utility model discloses a detection of arc rack, including lifter (48), detecting plate (484), pressure sensor (487), briquetting (486), straight-bar (41), the both ends of straight-bar (49) are equipped with arc pole (49), one side of arc pole (49) is equipped with arc groove (491), arc pole (49) is fastened and is equipped with arc rack (40).

7. The apparatus for testing the spacer for semiconductor packages as claimed in claim 6, wherein the arc-shaped groove (491) is engaged with the arc-shaped slider (122), and the arc-shaped rack (40) is engaged with the first gear (121).

8. The testing equipment for the spacing element for the semiconductor packaging, according to claim 3, is characterized in that the material distribution member (8) comprises a sliding block (81), the sliding block (81) is connected with the base (1) in a sliding manner, a triangular block (84) for material distribution is arranged on the sliding block (81), a first clamping groove (86) and a second clamping groove (85) which are symmetrically distributed are arranged on the triangular block (84), and the second clamping groove (85) is positioned below the first clamping groove (86);

the first clamping groove (86) is matched with the ejector rod (28), and the second clamping groove (85) is matched with the ejector rod (28).

9. The testing equipment of the spacer for the semiconductor package according to claim 2, wherein the lifting member (5) comprises a bottom block (51), one side of the bottom block (51) is provided with symmetrically distributed slide holes (52), a moving table (53) is fixedly arranged on the bottom block (51), one side of the moving table (53) is provided with a connecting block (54), the output end of the first hydraulic rod (18) is fixedly connected with the connecting block (54), the connecting block (54) is rotatably provided with an adjusting rod (55), the adjusting rod (55) is provided with an L-shaped rod (56), one end of the L-shaped rod (56) is provided with a matching block (561), one side of the matching block (561) is fixedly provided with a connecting rod (562), the connecting rod (562) is rotatably connected with the adjusting rod (55), and the L-shaped rod (56) is provided with a second hydraulic rod (563);

the output end of the second hydraulic rod (563) is rotatably provided with a mounting plate (571), the mounting plate (571) is slidably provided with a vibration block (573), one end of the vibration block (573) is rotatably provided with a connecting rod (575), one end of the connecting rod (575) is fixedly provided with a pressing plate (576), a fixing rod (577) is arranged between the vibration blocks (573), one side of the fixing rod (577) is rotatably provided with a convex block (578), a placing groove (58) is arranged on the moving platform (53), a limiting block (591) is rotatably arranged on the moving platform (53), a groove (592) is arranged on the limiting block (591), and a third spring (594) connected with the limiting block (591) is arranged in the opening groove (59).

10. The apparatus for testing the spacer for semiconductor packages as claimed in claim 9, wherein the slide holes (52) are engaged with the slide bars (17), the engagement blocks (561) are engaged with the vertical slide grooves (15), the guide bars (16) are engaged with the pressure plates (576), and the grooves (592) are engaged with the pressure plates (576).