CN114279625B - Vacuum degree detection circuit, vacuum degree detection method and vacuum gauge - Google Patents
Vacuum degree detection circuit, vacuum degree detection method and vacuum gauge Download PDFInfo
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Abstract
The invention provides a vacuum degree detection circuit, a vacuum degree detection method and a vacuum gauge, wherein the vacuum degree detection circuit comprises: the device comprises a microprocessor module, a signal driving module and a signal detection module, wherein the input end of the signal detection module is connected with the output end of the signal driving module, the output end of the signal detection module is connected with the input end of the microprocessor module, and the output end of the microprocessor module is connected with the input end of the signal driving module; the signal driving module is used for receiving a first carrier wave sent by the microprocessor module and transmitting the first carrier wave to the signal detection module; the signal detection module is used for detecting the vacuum degree and sending the detection result of the vacuum degree to the microprocessor module. The vacuum degree detection circuit realizes that the requirements on the vacuum degree measurement sensitivity and the signal to noise ratio can be met through a digital circuit with a simple structure.
Description
Technical Field
The invention relates to the technical field of vacuum detection, in particular to a vacuum degree detection circuit, a vacuum degree detection method and a vacuum gauge.
Background
The related art shows that the vacuum gauge can be equivalent to a variable parallel plate capacitor. It is composed of a central polar plate and a peripheral fixedly supported film outer ring electrode plate. Because the high vacuum is arranged between the central electrode plate and the outer ring electrode plate, when different absolute pressures act on the central electrode plate during vacuum degree measurement, the distance between the central electrode plate and the outer ring electrode plate also changes correspondingly, namely, the capacitance changes. Since the capacitance change value is proportional to the pressure, the change value of the vacuum pressure can be reflected based on the capacitance change value.
The capacitance change range of the capacitance film vacuum gauge is of the pF magnitude, the capacitance film vacuum gauge is easy to be interfered by stray capacitance, and the capacitance change in the vacuum gauge is nonlinear, so that the nonlinearity must be compensated for to obtain high accuracy. The current measurement circuit design is mainly based on an LC oscillation circuit or an RC oscillation circuit, and the sensitivity of the measurement by the method is high, but the conversion is nonlinear, so that the burden of subsequent signal processing is increased.
Disclosure of Invention
The invention provides a vacuum degree detection circuit, a vacuum degree detection method and a vacuum gauge, which are used for solving the defect that in the prior art, the follow-up signal processing is required to be added in order to improve the measurement sensitivity due to the nonlinearity of the internal capacitance of the vacuum gauge, and the requirements on the vacuum degree measurement sensitivity and the signal to noise ratio can be met through a digital circuit with a simple structure.
The invention provides a vacuum degree detection circuit, which comprises: the device comprises a microprocessor module, a signal driving module and a signal detection module, wherein the input end of the signal detection module is connected with the output end of the signal driving module, the output end of the signal detection module is connected with the input end of the microprocessor module, and the output end of the microprocessor module is connected with the input end of the signal driving module; the signal driving module is used for receiving a first carrier wave sent by the microprocessor module and transmitting the first carrier wave to the signal detection module; the signal detection module is used for detecting the vacuum degree and sending the detection result of the vacuum degree to the microprocessor module.
According to the vacuum degree detection circuit provided by the invention, the signal detection module comprises a vacuum gauge capacitor, a blocking capacitor, a first operational amplifier circuit, a second operational amplifier circuit and an operational amplifier, wherein the negative input end of the first operational amplifier circuit is connected with the vacuum gauge capacitor, the positive input end of the first operational amplifier circuit and the positive input end of the second operational amplifier circuit are respectively connected with the blocking capacitor, the output end of the first operational amplifier circuit and the output end of the second operational amplifier circuit are respectively connected with the operational amplifier, and the blocking capacitor is used for dividing the first carrier into two paths of identical second carrier waves and inputting the second carrier waves into the first operational amplifier circuit and the second operational amplifier circuit respectively; the first operational amplifier circuit and the second operational amplifier circuit are used for respectively obtaining two paths of output waveforms based on the second carrier wave; the operational amplifier is used for carrying out difference amplification on the two paths of output waveforms to obtain capacitance information about the vacuum gauge capacitor, wherein the capacitance information of the vacuum gauge capacitor corresponds to the detection result of the vacuum degree.
According to the vacuum degree detection circuit provided by the invention, the signal detection module is further provided with the cancellation capacitor, wherein the cancellation capacitor is connected with the negative input end of the second operational amplifier circuit.
According to the vacuum degree detection circuit provided by the invention, the vacuum degree detection circuit further comprises a power supply module, wherein the power supply module is respectively connected with the signal driving module, the signal detection module and the microprocessor module, and the power supply module is used for providing power supply voltage for the signal driving module, the signal detection module and the microprocessor module.
According to the vacuum degree detection circuit provided by the invention, the microprocessor module is provided with the temperature control module, and the temperature control module is used for controlling the temperature of the vacuum degree detection circuit.
The invention also provides a vacuum degree detection method, which is applied to the vacuum degree detection circuit, and comprises the following steps: sampling based on a signal detection module to obtain a detection signal; processing the detection signal to obtain a detection result corresponding to the detection signal; and sending the detection result to the client based on communication transmission.
According to the vacuum degree detection method provided by the invention, before the detection result is sent to the client based on communication transmission, the method further comprises the following steps: the detection result is sent to a microprocessor module, and multiplication demodulation processing is carried out on the detection result based on the microprocessor module, so that a processed detection result is obtained; the sending the detection result to the client based on communication transmission includes: and sending the processed detection result to the client based on communication transmission.
According to the vacuum degree detection method provided by the invention, the signal detection module comprises a vacuum gauge capacitor, the detection signal is processed to obtain a detection result corresponding to the detection signal, and the method comprises the following steps: based on a signal driving module, excitation is applied to the vacuum gauge capacitor to obtain a detection capacitance corresponding to the detection signal, wherein the excitation is a first carrier wave sent by the signal driving module to the signal detection module, and the first carrier wave is used for driving the signal detection module to sample; and determining the detection vacuum degree corresponding to the detection capacitance based on the corresponding relation between the capacitance and the environmental vacuum degree, and taking the detection vacuum degree as the detection result.
The invention also provides a vacuum gauge comprising the vacuum degree detection circuit.
The vacuum degree detection circuit provided by the invention forms a digital circuit with a simple structure through the microprocessor module, the signal driving module and the signal detection module, overcomes the defect that the subsequent signal is required to be processed in order to improve the measurement sensitivity due to the nonlinearity of the change of the internal capacitance of the vacuum gauge, and can meet the requirements on the measurement sensitivity and the signal to noise ratio when the vacuum degree is measured through the vacuum degree detection circuit with a simple structure.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a vacuum level detection circuit according to the present invention;
FIG. 2 is a schematic circuit diagram of a signal detection module according to the present invention;
fig. 3 shows a signal noise result diagram of acquiring a detection result based on two different carriers;
fig. 4 shows a signal noise result diagram of a detection result obtained based on the same carrier;
FIG. 5 is a schematic diagram of the working structure of the power module according to the present invention;
FIG. 6 is a schematic diagram illustrating a microprocessor module according to the present invention;
fig. 7 is a schematic diagram of an application scenario of the vacuum degree detection circuit provided by the invention;
FIG. 8 is a schematic flow chart of a vacuum degree detection method according to the present invention;
FIG. 9 is a second flow chart of the vacuum level detecting method according to the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The capacitance film vacuum gauge is a sensor for measuring vacuum degree, and is widely applied to the fields of chemical industry, aerospace and the like due to the factors of high measurement precision, strong stability and the like. In particular, in a semiconductor process, such a sensor is used in a large amount in a semiconductor device because many process steps require high-precision vacuum degree control.
The vacuum gauge can be equivalently a variable parallel plate capacitor. It is composed of a central polar plate and a peripheral fixedly supported film outer ring electrode plate. Because the high vacuum is arranged between the central electrode plate and the outer ring electrode plate, when different absolute pressures act on the central electrode plate during vacuum measurement, the distance between the central electrode plate and the outer ring electrode plate also changes correspondingly, namely, the capacitance changes. Since the capacitance change value is proportional to the pressure, the change value of the vacuum pressure can be reflected based on the capacitance change value.
The invention provides a detection scheme based on a digital circuit (also called a vacuum detection circuit), and the digital circuit has a simple structure and high measurement accuracy. The capacitance change of the vacuum gauge detected by introducing the cancellation capacitance is far greater than that of the vacuum gauge detected by the differential mode, so that the sensitivity of vacuum degree test is improved, noise is reduced, and the signal to noise ratio is improved.
The structure of the vacuum degree detection circuit will be described in connection with the following embodiments.
Fig. 1 is a schematic diagram of a vacuum degree detection circuit according to the present invention.
In an exemplary embodiment of the present invention, as shown in fig. 1, the vacuum degree detection circuit may include a microprocessor module 110, a signal driving module 120, and a signal detection module 130, which will be described below, respectively.
An input of the signal detection module 130 may be connected to an output of the signal driving module 120. An output of the signal detection module 130 may be connected to an input of the microprocessor module 110. An output of the microprocessor module 110 may be connected to an input of the signal driving module 120. The signal driving module 120 may be configured to receive the first carrier sent by the microprocessor module 110, and transmit the first carrier to the signal detecting module 130. The signal detection module 130 may be used to detect the vacuum degree and transmit the detection result of the vacuum degree to the microprocessor module 110.
In one embodiment, the microprocessor module 110 may issue a first carrier wave to the signal driving module 120. The signal driving module 120 may transmit the first carrier to the signal detecting module 130. Based on the first carrier, the signal detection module 130 may be driven to sample a signal, resulting in a detection signal. In one example, the main frequency of the microprocessor module 110 may reach 168M, and a Floating Point Unit (FPU) is built in, enabling fast floating Point operations.
In the application process, the signal detection module 130 may process the detection signal to obtain the vacuum degree corresponding to the detection signal, and send the detection result of the vacuum degree to the microprocessor module 110. It will be appreciated that when different absolute pressures are applied to the central electrode plate, the distance between the central electrode plate and the outer ring electrode plate will vary accordingly. In an example, the detection signal may be a distance change signal between the central electrode plate and the outer ring electrode plate of the thin film capacitance meter, and because of the correspondence between the distance signal and the capacitance value, the pressure acting on the central electrode plate may be calculated according to the capacitance change value of the capacitance to be detected in the signal detection module 130, i.e. the vacuum degree value of the current environment may be determined.
The vacuum degree detection circuit provided by the invention forms a digital circuit with a simple structure through the microprocessor module, the signal driving module and the signal detection module, overcomes the defect that the subsequent signal is required to be processed in order to improve the measurement sensitivity due to the nonlinearity of the change of the internal capacitance of the vacuum gauge, and can meet the requirements on the measurement sensitivity and the signal to noise ratio when the vacuum degree is measured through the vacuum degree detection circuit with a simple structure.
In order to further describe the vacuum degree detection circuit provided by the invention, a signal detection module will be described in connection with the following embodiments.
Fig. 2 is a schematic circuit diagram of a signal detection module according to the present invention.
In an exemplary embodiment of the present invention, as shown in fig. 2, the signal detection module may be provided with a cancellation capacitor. In yet another example, the signal detection module may further include a vacuum gauge capacitance, a blocking capacitance, a first operational amplifier circuit, a second operational amplifier circuit, and an operational amplifier. The negative input end of the first operational amplifier circuit is connected with the vacuum gauge capacitor, the negative input end of the second operational amplifier circuit is connected with the offset capacitor, the positive input end of the first operational amplifier circuit and the positive input end of the second operational amplifier circuit are respectively connected with the blocking capacitor, and the output end of the first operational amplifier circuit and the output end of the second operational amplifier circuit are respectively connected with the operational amplifier. The blocking capacitor is used for dividing the first carrier into two paths of same second carriers and inputting the second carriers into the first operational amplifier circuit and the second operational amplifier circuit respectively. The first operational amplifier circuit and the second operational amplifier circuit are used for respectively obtaining two paths of output waveforms based on the second carrier wave; the operational amplifier is used for carrying out difference amplification on the two paths of output waveforms to obtain capacitance information about the vacuum gauge capacitor, wherein the capacitance information of the vacuum gauge capacitor corresponds to a detection result of the vacuum degree.
As shown in fig. 2, the cancellation capacitance may be represented in the illustration as capacitance C2 and capacitance C3. In this embodiment, cam_comp is a capacitance to be measured, that is, a vacuum gauge capacitance, and cam_comp can be understood as a parallel inner and outer ring capacitance formed by a central electrode plate and an outer ring electrode plate of the film vacuum gauge.
In the application process, when the first carrier enters from the blocking capacitor C5 and is blocked by the blocking capacitor C5, the first carrier may be divided into two identical paths of second carriers. The second carrier wave enters the first operational amplifier circuit N1 and the second operational amplifier circuit N2 respectively. Because the two paths of second carriers are the same path of carriers, in the application process, the same modulation is carried out on the inner ring and the outer ring respectively, and the first path of output waveform is output at the OutP based on the first operational amplifier circuit N1, and the second path of output waveform is output at the OutN based on the second operational amplifier circuit N2. Furthermore, the difference amplification can be performed on the first path of output waveform and the second path of output waveform based on the operational amplifier, so as to obtain a corresponding detection result. It can be understood that the first output waveform and the second output waveform which are respectively obtained based on the second carrier wave, because the two paths of second carrier waves are identical and the noise is identical, when the two paths of output waveforms are subjected to difference, the noise can be mutually counteracted, so that the noise of a detection result can be reduced, and the signal to noise ratio of the detection result is improved. As can be seen from fig. 3 and fig. 4, the signal noise obtained from the same carrier wave is smaller, and the signal-to-noise ratio of the detection result is larger.
In yet another example, the capacitances C1 and C4 are feedback leg capacitances in the signal detection module. In the current vacuum degree detection process, the difference value between the inner ring capacitance and the outer ring capacitance is detected in a differential mode. The basic starting point is that the inner ring capacitance and the outer ring capacitance values are the same along with the changes of temperature, stress, etching, gravity and the like, and are common mode changes. During application, common mode variations can be eliminated by differencing. Further, the capacitance difference is inversely proportional to the vacuum pressure. Therefore, in the current vacuum degree detection process, only the capacitance signal that varies with the air pressure is detected with respect to the vacuum degree detection method. However, in practical situations, the capacitance values of the inner ring and the outer ring are different along with the changes of temperature, stress, etching, gravity and the like, and also different along with the influences of factors other than air pressure, and the influenced matching error or consistency error is equivalent to air pressure output. The capacitance values of the inner ring and the outer ring are increased along with the increase of the air pressure, the difference value of the capacitance values of the inner ring and the outer ring is not obvious relative to the increase value, and the difference value of the capacitance change of the inner ring and the outer ring is generally smaller than the change value of the capacitance per se. In this embodiment, the influence of the variation of the inner ring capacitance and the outer ring capacitance with temperature, stress, etching, gravity and the like can be eliminated by introducing the cancellation capacitance C2 and the cancellation capacitance C3. Further, in order to reduce the burden of the post signal processing as much as possible, a hardware matching manner may be adopted, so that the capacitance cam_comp+c1=c2+c3+c4, and c1=c4, that is, the offset capacitance C2 and the offset capacitance C3 completely simulate the influence that the internal and external ring values of the capacitance cam_comp to be tested are different along with the changes of temperature, stress, etching, gravity and the like. It should be noted that, under the constant temperature state, the capacitance values of the cancellation capacitor C2 and the cancellation capacitor C3 are kept unchanged (typically, the temperature coefficient is smaller than 30 ppm/DEG C), so that the capacitance variation of the detected vacuum gauge capacitor is far greater than that of the differential mode, which is beneficial to improving the sensitivity of the detection result, reducing noise and improving the signal to noise ratio of the detection result.
In an exemplary embodiment of the present invention, the vacuum degree detection circuit may further include a power module, wherein the power module may be connected to the signal driving module, the signal detection module, and the microprocessor module, respectively, and the power module may be used to provide corresponding power supply voltages to the signal driving module, the signal detection module, and the microprocessor module. It will be appreciated that the voltage supply requirements required for different discrete modules are not the same. In one embodiment, the power module may be provided with an integrated circuit, and the supply voltage of the power module is regulated by the integrated circuit, so that the voltage output by the power module may be used to satisfy different modules, such as a signal driving module, a signal detecting module, and a microprocessor module.
Fig. 5 shows a process of the power supply module supplying power to the operational amplifier circuit in the signal detection module. In the application process, the output voltage of the power supply module can be adjusted from 15V to the power supply voltage value required by the operational amplifier circuit through an integrated circuit in the power supply module.
In an exemplary embodiment of the present invention, the microprocessor module may be further provided with a temperature control module. Through the control by temperature change module, microprocessor module can control and ensure that whole vacuum degree detection circuit is in constant temperature environment to reduce the temperature fluctuation of the inside electronic component of different sensors in the vacuum degree detection circuit, further increase the precision of detected signal, in order to obtain more accurate testing result.
The present invention will be described with reference to the following embodiments of the working structure of a microprocessor module.
FIG. 6 is a schematic diagram illustrating a microprocessor module according to the present invention.
In an exemplary embodiment of the present invention, as shown in fig. 6, the microprocessor module may include a plurality of connection interfaces. The SPI1 interface can be used for connecting with the signal driving module and outputting carrier waves. The output carrier wave can be transmitted to the signal detection module and drives the signal detection module to sample. The microprocessor module can also be connected with each module in the vacuum degree detection circuit through the connection interface so as to acquire the temperature of the module. For example, a chip and a circuit board may be connected by an Analog-to-Digital Converter (also known as an ADC) interface and the chip temperature and the circuit board temperature may be obtained. The capacitor can be connected through an SPI2 interface, and the temperature of the capacitor body can be obtained. The temperature of each module is regulated based on the temperature control module in the microprocessor module by acquiring the temperature of each module, so that the regulated temperature accords with the working temperature of each module. And further, temperature fluctuation of different modules and electronic elements inside the sensor in the vacuum degree detection circuit is reduced, and the accuracy of detected signals is increased, so that a more accurate detection result is obtained. In yet another example, the microprocessor module may also send the obtained detection result regarding the vacuum degree to the client through the UART interface and the RS422 transmission protocol, for example, the obtained detection result regarding the vacuum degree may be sent to the upper computer.
In order to further explain the vacuum degree detection circuit of the present invention, an application scenario process of the vacuum degree detection circuit will be described in connection with the following embodiments.
Fig. 7 is a schematic diagram of an application scenario of the vacuum degree detection circuit provided by the invention.
In an exemplary embodiment of the present invention, as shown in fig. 7, the microprocessor module 110 may issue a carrier wave to the signal driving module 120. The signal driving module 120 may transmit the carrier wave to the signal detecting module 130. Based on the carrier wave, the signal detection module 130 may be driven to sample the signal, resulting in a detection signal. In the application process, the signal detection module 130 may process the detection signal to obtain the vacuum degree corresponding to the detection signal, and send the detection result of the vacuum degree to the microprocessor module 110. The microprocessor module 110 may transmit the vacuum corresponding to the detection signal to the client based on the communication transmission. For example, the vacuum level corresponding to the detection signal may be transmitted to the upper computer 140. It is understood that the upper computer 140 and the microprocessor 110 may also perform information mutual transmission based on a communication transmission manner. The upper computer 140 may also transmit information to the microprocessor 110 during the application process.
It can be understood that the vacuum degree detection circuit provided by the invention can overcome the defects of high cost, complex test and inaccurate test parameters caused by the current analog test circuit by adopting the digital test circuit, greatly saves the cost, simplifies the test operation and can obtain more accurate test parameters.
Based on the same conception, the invention also provides a vacuum degree detection method. The vacuum degree detection method can be applied to the vacuum degree detection circuit.
The present invention will be described with reference to the following examples of the procedure of the vacuum degree detection method.
Fig. 8 is a schematic flow chart of the vacuum degree detection method provided by the invention.
In an exemplary embodiment of the present invention, as shown in fig. 8, the vacuum degree detection method may include steps 810 to 830, and each step will be described separately.
In step 810, sampling is performed based on the signal detection module to obtain a detection signal.
In step 820, the detection signal is processed to obtain a detection result corresponding to the detection signal.
In step 830, the detection result is sent to the client based on the communication transmission.
In one embodiment, the detection signal may be obtained by sampling based on a signal detection module. In one example, the client sends a request for measuring the vacuum degree of the object to be measured, and in the application process, the request can be sent to the microprocessor module, and the microprocessor module sends a carrier wave to the signal driving module and transmits the carrier wave to the signal detection module. The signal detection module samples based on the carrier wave to obtain a detection signal. The detection signal may correspond to a capacitance value or a capacitance change value of the vacuum gauge capacitor. During application, the excitation can be applied to the vacuum gauge capacitance of the signal detection module via the signal driving module. The circuit of the vacuum gauge capacitor can change along with the vacuum degree of the environment where the circuit is located, so that an output signal (corresponding to the detection result) is formed, and the detection result is transmitted through communication, for example, based on the communication module, and is sent to the client. By the embodiment, the detection result with high sensitivity and high signal-to-noise ratio can be provided for the user.
The procedure of another vacuum degree detection method will be described with reference to the following examples.
FIG. 9 is a second flow chart of the vacuum level detecting method according to the present invention.
In an exemplary embodiment of the present invention, as shown in fig. 9, the vacuum degree detection method may include steps 910 to 940, where steps 910 to 920 are the same as or similar to steps 910 to 920, and the detailed description and the beneficial effects thereof are referred to above, and in this embodiment, step 930 and step 940 will be described separately.
In step 930, the detection result is sent to the microprocessor module, and multiplication and demodulation are performed on the detection result based on the microprocessor module, so as to obtain a processed detection result.
In step 940, the processed detection result is sent to the client based on the communication transmission.
In one embodiment, continuing with the description of the previous embodiment, the resulting output signal (corresponding to the detection result) may be sent to the microprocessor module via the signal detection module. The microprocessor module performs scale conversion on the detection result to obtain a vacuum degree value related to the environment where the vacuum gauge capacitor is located. In an example, the vacuum level value of the environment where the vacuum gauge capacitor is located may exist in the form of a sine wave, and the microprocessor module may perform multiplication and demodulation processing on the vacuum level value to obtain a volt value corresponding to the vacuum level value, and send the volt value to the client.
The present invention will be described with reference to the following examples, in which a process is performed based on a detection signal to obtain a detection result corresponding to the detection signal.
In an exemplary embodiment of the present invention, the signal detection module may include a vacuum gauge capacitor, where the processing of the detection signal to obtain a detection result corresponding to the detection signal may be implemented in the following manner:
and applying excitation to the vacuum gauge capacitor based on the signal driving module to obtain a detection capacitance corresponding to the detection signal, wherein the excitation is a first carrier wave sent to the signal detection module by the signal driving module, and the first carrier wave is used for driving the signal detection module to sample.
And determining the detection vacuum degree corresponding to the detection capacitance based on the corresponding relation between the capacitance and the environmental vacuum degree, and taking the detection vacuum degree as a detection result.
In one embodiment, the stimulus may be applied to the vacuum gauge capacitance based on a signal driving module. Because the capacitance of the vacuum gauge capacitor can change along with the vacuum degree of the environment where the vacuum gauge capacitor is positioned, the detection capacitance corresponding to the detection signal can be obtained. It should be noted that, the excitation is a first carrier wave sent by the signal driving module to the signal detecting module, where the first carrier wave may be used to drive the signal detecting module to sample, so as to obtain a detection signal. Further, the detected vacuum level corresponding to the detected capacitance may be determined based on the correspondence between the capacitance and the ambient vacuum level, and the detected vacuum level may be used as a detection result. By the embodiment, the detection result with high sensitivity and high signal-to-noise ratio can be obtained.
Based on the same conception, the invention also provides a vacuum gauge. The vacuum gauge may include the vacuum level detection circuit described above.
According to the vacuum degree detection circuit provided by the invention, the microprocessor module, the signal driving module and the signal detection module form a digital circuit with a simple structure, so that the defect that the subsequent signals need to be processed in order to improve the measurement sensitivity due to the nonlinearity of the change of the internal capacitance of the vacuum gauge is overcome, and the requirements on the measurement sensitivity and the signal to noise ratio can be met when the vacuum degree is measured by the vacuum degree detection circuit with a simple structure.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on this understanding, the foregoing technical solution may be embodied essentially or in a part contributing to the prior art in the form of a software product, which may be stored in a computer readable storage medium, such as a ROM/RAM, a magnetic disk, an optical disk, etc., and may include several instructions to cause a computer device (which may be a personal computer, a server, or a network device, etc.) to perform the method described in the respective embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. A vacuum degree detection circuit, characterized in that the vacuum degree detection circuit comprises: a microprocessor module, a signal driving module and a signal detecting module, wherein,
The input end of the signal detection module is connected with the output end of the signal driving module, the output end of the signal detection module is connected with the input end of the microprocessor module, and the output end of the microprocessor module is connected with the input end of the signal driving module;
The signal driving module is used for receiving a first carrier wave sent by the microprocessor module and transmitting the first carrier wave to the signal detection module;
The signal detection module is used for detecting the vacuum degree and sending the detection result of the vacuum degree to the microprocessor module, wherein the signal detection module comprises a vacuum gauge capacitor, a blocking capacitor, a first operational amplifier circuit, a second operational amplifier circuit and an operational amplifier,
The negative input end of the first operational amplifier circuit is connected with the vacuum gauge capacitor, the positive input end of the first operational amplifier circuit and the positive input end of the second operational amplifier circuit are respectively connected with the blocking capacitor, and the output end of the first operational amplifier circuit and the output end of the second operational amplifier circuit are respectively connected with the operational amplifier;
The blocking capacitor is used for dividing the first carrier into two paths of same second carriers and respectively inputting the second carriers into the first operational amplifier circuit and the second operational amplifier circuit;
the first operational amplifier circuit and the second operational amplifier circuit are used for respectively obtaining two paths of output waveforms based on the second carrier wave;
The operational amplifier is used for carrying out difference amplification on the two paths of output waveforms to obtain capacitance information about the vacuum gauge capacitor, wherein the capacitance information of the vacuum gauge capacitor corresponds to the detection result of the vacuum degree.
2. The vacuum level detection circuit of claim 1, wherein the signal detection module is further provided with a cancellation capacitor, wherein the cancellation capacitor is connected to a negative input of the second op-amp circuit.
3. The vacuum level detection circuit of claim 1, further comprising a power module, wherein the power module is connected to the signal driving module, the signal detection module, and the microprocessor module, respectively, and the power module is configured to provide a supply voltage to the signal driving module, the signal detection module, and the microprocessor module.
4. The vacuum level detection circuit of claim 1, wherein the microprocessor module is provided with a temperature control module for controlling the temperature of the vacuum level detection circuit.
5. A vacuum degree detection method, characterized in that the method is applied to the vacuum degree detection circuit according to any one of claims 1 to 4, comprising:
sampling based on a signal detection module to obtain a detection signal;
Processing the detection signal to obtain a detection result corresponding to the detection signal;
And sending the detection result to the client based on communication transmission.
6. The vacuum degree detection method according to claim 5, wherein before transmitting the detection result to a client based on communication transmission, the method further comprises:
The detection result is sent to a microprocessor module, and multiplication demodulation processing is carried out on the detection result based on the microprocessor module, so that a processed detection result is obtained;
The sending the detection result to the client based on communication transmission includes:
And sending the processed detection result to the client based on communication transmission.
7. The vacuum degree detection method according to claim 5, wherein the signal detection module includes a vacuum gauge capacitor, and the processing the detection signal to obtain a detection result corresponding to the detection signal includes:
Based on a signal driving module, excitation is applied to the vacuum gauge capacitor to obtain a detection capacitance corresponding to the detection signal, wherein the excitation is a first carrier wave sent by the signal driving module to the signal detection module, and the first carrier wave is used for driving the signal detection module to sample;
and determining the detection vacuum degree corresponding to the detection capacitance based on the corresponding relation between the capacitance and the environmental vacuum degree, and taking the detection vacuum degree as the detection result.
8. A vacuum gauge comprising the vacuum degree detection circuit according to any one of claims 1 to 4.
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