CN114275743B - Method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid - Google Patents
Method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid Download PDFInfo
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Abstract
The invention discloses a method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, which comprises the steps of pumping the sulfur trioxide into a heavy-duty removal tower, obtaining gaseous sulfur trioxide under a constant boiling point, and sequentially filtering and cooling the sulfur trioxide and then extracting the sulfur trioxide; the produced sulfur trioxide enters the middle part of the light component removal tower in a gaseous state, the gaseous sulfur trioxide is subjected to countercurrent heat exchange with the liquid sulfur trioxide heated by the tower kettle through the filler from the middle part of the light component removal tower, the sulfur trioxide gas is condensed into a liquid state, and the liquid sulfur trioxide is continuously produced from the light component removal circulating pump. The technical grade sulfur trioxide is pumped to a heavy removal tower for boiling point rectification, the sulfur trioxide of the removed fuming sulfuric acid enters a sulfur trioxide light removal tower in a gaseous form, countercurrent heat exchange is carried out on the sulfur trioxide and the liquid sulfur trioxide, the sulfur trioxide is condensed into liquid, the gaseous sulfur dioxide enters an exhaust system from the top of the tower, the liquid sulfur trioxide after light removal is extracted from an outlet of a light removal circulating pump, the content of the high-purity liquid sulfur trioxide is 99.999%, the content of the sulfur dioxide is lower than 2ppm, and the total impurity content is controlled within 5 mug/g.
Description
Technical Field
The invention belongs to the field of electronic chemicals, and particularly relates to a device and a method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid.
Background
The electronic grade sulfuric acid is also called as ultra-pure sulfuric acid, and belongs to ultra-clean high-purity reagent. The wet electron chemistry with the largest industrial dosage is mainly used for cleaning, photoetching and corroding silicon wafers, corroding printed circuit boards and cleaning, and can effectively remove magazine particles, inorganic residues and carbon deposits on the wafers. Electronic grade sulfuric acid has been used for cleaning silicon wafers for over 40 years. Is an indispensable key basic chemical in the semiconductor industry. The purity directly affects the yield of integrated circuits.
Development of key technologies for producing high-end electronic grade sulfuric acid to realize localization is a necessary trend of development. The main production method of the electronic grade sulfuric acid is a sulfur trioxide gas absorption method; the quality of the sulfur trioxide mainly depends on the raw material sulfur trioxide and impurities introduced by corrosion of production devices, mainly comprises metal ions, easily oxidized substances, granularity and the like, and the impurities directly influence the quality of electronic grade sulfuric acid and the use of the electronic grade sulfuric acid in the semiconductor manufacturing process. The domestic report that electronic grade sulfuric acid is mainly produced by industrial sulfur trioxide or nicotinic acid, and impurities such as metal ions, easy oxides, particulate matters and the like in the sulfur trioxide are difficult to remove, so that the electronic grade sulfuric acid finally cannot meet the requirement of a semiconductor high-end process. The invention focuses on innovation from production equipment and production and control methods, solves the problems of difference of raw material purity and difficulty in impurity separation, and solves the problem of equipment corrosion caused by sulfur trioxide acid environment, and prepares high-purity sulfur trioxide to prepare ultra-high-purity electronic grade sulfuric acid.
Disclosure of Invention
The invention aims to provide the high-purity liquid sulfur trioxide for preparing the electronic grade sulfuric acid by using the method with simple and easily controlled process, low production cost and stable product quality, industrial sulfur trioxide is used as a raw material, innovation is carried out from production equipment, production and control methods, the problems of raw material purity difference and impurity separation difficulty are solved, and meanwhile, the problem of equipment corrosion caused by the sulfur trioxide acidic environment is solved. The flow of the device is shown in figure 1.
In order to achieve the above object, a method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid is provided, comprising the following steps:
(1) Pumping sulfur trioxide into a heavy-duty removal tower, obtaining gaseous sulfur trioxide at a constant boiling point, and sequentially filtering and cooling the sulfur trioxide and then extracting the sulfur trioxide;
the sulfur trioxide in the raw material storage tank is conveyed to a heavy-removal tower through a raw material pump, and the constant boiling point of the sulfur trioxide is evaporated through the boiling point difference because the boiling point of the sulfur trioxide is higher than that of fuming sulfuric acid, under the condition, the sulfur trioxide becomes gas, and the nicotinic acid is liquid, so that the heavy-removal purpose is achieved; the upper part of the weight removing tower is provided with a mould pressing microporous filter screen and a cooler for further removing fuming sulfuric acid in the sulfur trioxide gas state; the nicotinic acid is continuously extracted from the pump outlet of the de-recirculation pump.
(2) The extracted sulfur trioxide enters the middle part of the light component removal tower in a gaseous state, the gaseous sulfur trioxide is subjected to countercurrent heat exchange with the liquid sulfur trioxide heated by the tower kettle through the filler from the middle part of the light component removal tower, the sulfur trioxide gas is condensed into a liquid state, and the liquid sulfur trioxide is continuously extracted from the light component removal circulating pump outlet, namely the high-purity liquid sulfur trioxide for the electronic-grade sulfuric acid.
The sulfur trioxide of which the heavy components are removed enters a light component removal tower in a gaseous state, the gaseous sulfur trioxide passes through a filler from the middle part of the light component removal tower and exchanges heat with liquid sulfur trioxide heated by a tower kettle in a countercurrent way, under the combined action of the filler, the sulfur trioxide gas is condensed into a liquid state, and sulfur dioxide with a low boiling point enters a tail gas absorption tower in a gaseous state; the sulfur trioxide finished product is continuously extracted from the light-removal circulating pump.
The sulfur trioxide in the step (1) is preheated to 30-40 ℃ before entering a weight removing tower; firstly, the sulfur trioxide is guaranteed to be in a liquid state, and secondly, the optimal working feeding temperature of the heavy-duty removal tower is guaranteed.
The filtering is carried out by a mould pressing microporous filter screen arranged at the upper part of the weight removing tower, the mould pressing microporous filter screen is made of PFA or PTFE, and the pore diameter of the filter screen is 0.5-20 mu m.
In the step (1), the liquid level of the tower bottom of the sulfur trioxide heavy-duty removal tower is controlled to be 50% -80%;
the tower bottom of the heavy-removal tower is provided with a reboiler, a part of liquid phase in the heavy-removal tower is used for extracting heavy components, and the temperature of a gas outlet at the top of the heavy-removal tower is controlled to be 44-46 ℃ through the circulation of the reboiler. Wherein, 30-50% of the heavy components are extracted, and the rest is heated by a reboiler and then is injected into a heavy removal tower.
The method comprises the steps that (1) the liquid level of a tower bottom of a sulfur trioxide heavy-removal tower is controlled to be 50% -80%, the outlet temperature of a reboiler is controlled to be 44 ℃ -50 ℃ and the optimal working feeding temperature, the outlet temperature of gas at the top of the heavy-removal tower is controlled to be 44 ℃ -46 ℃, sulfur trioxide in the heavy-removal tower is subjected to constant boiling evaporation through a heater, the sulfur trioxide is converted into a gas state, heavy components fall back to the tower bottom in a liquid state, the sulfur trioxide at the top of the heavy-removal tower is subjected to light-removal tower at a dew point temperature, and impurities introduced by metal corrosion are further reduced in the heavy-removal tower with a tetrafluoroplastic lining;
in the step (2), the liquid level of the tower bottom of the light component removal tower is controlled to be 50-80 percent;
in the step (1), the extraction ratio of heavy components in the heavy component removal tower is 20% -45%, and the rest is heated by a reboiler again and then enters the heavy component removal tower.
And (3) in the step (2), the material with the volume fraction of 30% -60% is simultaneously extracted from the light component removing tower to serve as high-purity sulfur trioxide, and the rest material is heated by a heater again and then enters the light component removing tower.
The bottom of the light component removal tower is provided with a heater, a part of liquid phase in the light component removal tower is used for extracting high-purity liquid sulfur trioxide for electronic grade sulfuric acid, and the other part of the liquid phase is used for circularly controlling the temperature of a gas outlet at the top of the light component removal tower to be 30-40 ℃ through the heater (the outlet temperature of the heater is controlled to be 35-43 ℃), so that the light component removal tower is ensured to be dew point feeding.
30-50% of liquid phase in the light component removal tower is extracted to be used as high-purity liquid sulfur trioxide for electronic grade sulfuric acid, and the rest is heated by a heater and then is injected into the upper part of the light component removal tower.
The filler is modified PFTE, O2 or O3 is adopted for treatment after the surface of the filler, NH3 or PH3 is adopted for hydrophilic treatment, 98% concentrated sulfuric acid is adopted for surface passivation at last, and the corrosion resistance, the strength and the hydrophilicity of the PTFE filler to sulfur trioxide are greatly improved after the PTFE filler is modified.
And (3) carrying out countercurrent heat exchange to obtain a gas phase with a low boiling point to obtain sulfur dioxide, and carrying out cyclic reaction on the sulfur dioxide and an oxidizing solution as well as dilute sulfuric acid to obtain sulfuric acid with the concentration higher than 98%.
The oxidation solution is a mixture of dilute sulfuric acid with the mass concentration of 55-75% and hydrogen peroxide with the mass concentration of 25-30% according to the volume ratio of 1:1-2; the mass concentration of the dilute sulfuric acid is 55% -75%.
In the preferred scheme, the sulfur dioxide oxidizing solution is prepared from 70% of dilute sulfuric acid and 30% of hydrogen peroxide according to a ratio of 1:1, and the feeding speed of the oxidizing solution is 0.5L/h-2L/h.
The sulfur trioxide storage tank, the light component removing tower and the heater are made of 316L, 316 or 304 stainless steel, and the heavy component removing tower and the reboiler are made of 316L, 316 or 304 PFA or PTFE lining.
The bottom of the sulfur dioxide absorption tower is provided with a dilute sulfuric acid liquid inlet pipe with the concentration of 55-75%, the dilute sulfuric acid feed regulating valve is intelligently interlocked with the liquid level and the sulfuric acid concentration at the bottom of the absorption tower, the liquid level target value at the tower bottom is 70%, and the sulfuric acid concentration target value is 98%.
The invention discloses a method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid, which comprises the following steps: the industrial grade sulfur trioxide is discharged to a raw material storage tank, is conveyed to a heavy removal tower through a raw material pump to carry out boiling point rectification, the sulfur trioxide of the removed fuming sulfuric acid enters a sulfur trioxide light removal tower in a gaseous form, and is subjected to countercurrent heat exchange with liquid sulfur trioxide at constant temperature through a circulating heat exchanger, the sulfur trioxide is condensed into liquid, gaseous sulfur dioxide enters an exhaust system from the top of the tower, the liquid sulfur trioxide after light removal is extracted from an outlet of the light removal circulating pump, the content of the high-purity liquid sulfur trioxide is 99.999%, the content of the sulfur dioxide is lower than 2ppm, and the total impurity content is controlled within 5 mug/g.
Drawings
FIG. 1 is a schematic diagram of an apparatus for producing electronic grade sulfuric acid according to the present invention. The device comprises a sulfur trioxide storage tank 1, a raw material pump 2, a weight removing tower 3, a weight removing tower kettle liquid level meter 4, a packing layer 5, a weight removing cooler 6, an online thermometer I7, a mould pressing microporous filter screen 8, a weight removing circulating pump 9, a reboiler 10, an online thermometer II 11, a weight removing tower 12, a weight removing tower kettle liquid level meter 13, a weight removing circulating pump 14, a heater 15 and a tail gas absorbing tower 16.
Detailed Description
The present invention is further described below with reference to examples, but it should not be construed that the scope of the above subject matter of the present invention is limited to the following examples. Various substitutions and alterations are made according to the ordinary skill and familiar means of the art without departing from the technical spirit of the invention, and all such substitutions and alterations are intended to be included in the scope of the invention.
Example 1
The method comprises the steps of taking industrial sulfur trioxide with the metal ion content (Fe) of more than 0.05 percent and the sulfur dioxide content of more than 0.4 percent as raw materials, feeding the raw materials into a heavy-removal tower at 35 ℃, controlling the liquid level of the tower bottom of the heavy-removal tower at 53 percent, controlling the outlet temperature of a reboiler at 44 ℃ to perform optimal working feeding temperature, controlling the outlet temperature of gas at the top of the heavy-removal tower at 44 ℃, performing constant boiling evaporation on the sulfur trioxide in the heavy-removal tower through a heater, converting the sulfur trioxide into a gas state, allowing heavy components to fall back to the tower bottom in a liquid state, extracting the liquid state in the heavy components in a volume fraction of 35 percent, heating the rest of the heavy components again through the reboiler, and feeding the sulfur trioxide at the top of the heavy-removal tower into a light-removal tower at a dew point temperature. The liquid level of the tower bottom of the light component removal tower is controlled at 54%, the temperature of the outlet of the heater is controlled at 35 ℃, the temperature of the gas outlet at the top of the light component removal tower is controlled at 30 ℃, sulfur trioxide fed at the dew point is subjected to countercurrent heat exchange with sulfur trioxide heated by the heater in the tower, sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid falling tower bottom, and meanwhile, 40% of materials are extracted as high-purity sulfur trioxide, and the rest materials enter the light component removal tower after being heated by the heater again. The gas sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to carry out absorption reaction with sulfur dioxide oxidation liquid (formed by 55% of dilute sulfuric acid and 30% of hydrogen peroxide according to the proportion of 1:1), and meanwhile, 55% of dilute sulfuric acid is continuously supplemented, sulfur dioxide is converted into sulfuric acid, 98% of sulfuric acid is stably extracted, and the sulfuric acid is recycled to an industrial device. The detection result of the extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 1.8ppm, and the metal content is within 2.2 mug/g.
Example 2
The method comprises the steps of taking industrial sulfur trioxide with the metal ion content (Fe) of more than 0.06 percent and the sulfur dioxide content of more than 0.5 percent as raw materials, feeding the raw materials into a heavy-removal tower at 36 ℃, controlling the liquid level of the tower bottom of the heavy-removal tower at 63 percent, controlling the outlet temperature of a reboiler at 46 ℃, controlling the outlet temperature of gas at the top of the heavy-removal tower at 45 ℃, constant boiling and evaporating sulfur trioxide in the heavy-removal tower through a heater, converting the sulfur trioxide into a gas state, allowing heavy components to fall back to the tower bottom in a liquid state, extracting the liquid state in the heavy components at the volume fraction of 36 percent, heating the rest of the liquid sulfur trioxide by the reboiler again, and feeding the sulfur trioxide at the top of the heavy-removal tower into a light-removal tower at the dew point temperature. The liquid level of the tower bottom of the light component removing tower is controlled at 65%, the temperature of the outlet of the heater is controlled at 38 ℃, the temperature of the gas outlet at the top of the light component removing tower is controlled at 35 ℃, sulfur trioxide fed at the dew point is subjected to countercurrent heat exchange with sulfur trioxide heated by the heater in the tower, sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid falling tower bottom, 45% of materials are extracted as high-purity sulfur trioxide, and the rest materials enter the light component removing tower after being heated by the heater again. The gaseous sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to carry out absorption reaction with sulfur dioxide oxidation liquid (formed by 65% of dilute sulfuric acid and 30% of hydrogen peroxide according to the proportion of 1:1), and meanwhile, 65% of dilute sulfuric acid is continuously supplemented, sulfur dioxide is converted into sulfuric acid, 98% of sulfuric acid is stably extracted, and the sulfuric acid is recycled to an industrial device. The detection result of the extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 1.0ppm, and the metal content is within 1.1 mug/g.
Example 3
The method comprises the steps of taking industrial sulfur trioxide with the metal ion content (Fe) of more than 0.07 percent and the sulfur dioxide content of more than 0.5 percent as raw materials, feeding the raw materials into a heavy-removal tower at 36 ℃, controlling the liquid level of the tower bottom of the heavy-removal tower at 75 ℃, controlling the outlet temperature of a reboiler at 48 ℃, controlling the outlet temperature of gas at the top of the heavy-removal tower at 46 ℃, enabling sulfur trioxide in the heavy-removal tower to be subjected to constant boiling evaporation through a heater, converting the sulfur trioxide into a gas state, enabling heavy components to fall back to the tower bottom in a liquid state, simultaneously taking out the liquid state in the heavy components in a volume fraction of 45 percent, feeding the rest of the liquid sulfur trioxide into the heavy-removal tower after being heated by the reboiler, and feeding the sulfur trioxide at the top of the heavy-removal tower into a light-removal tower at a dew point temperature. The liquid level of the tower bottom of the light component removal tower is controlled at 76%, the temperature of the outlet of the heater is controlled at 41 ℃, the temperature of the gas outlet at the top of the light component removal tower is controlled at 38 ℃, sulfur trioxide fed at the dew point is subjected to countercurrent heat exchange with sulfur trioxide heated by the heater in the tower, sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid falling tower bottom, and meanwhile, 50% of materials are extracted as high-purity sulfur trioxide, and the rest materials enter the light component removal tower after being heated by the heater again. The gas sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to carry out absorption reaction with sulfur dioxide oxidation liquid (the dilute sulfuric acid at 75 ℃ and 30% hydrogen peroxide are mixed according to the ratio of 1:1), meanwhile, the dilute sulfuric acid at 75 ℃ is continuously supplemented, the sulfur dioxide is converted into sulfuric acid, 98% sulfuric acid is stably extracted, and the sulfuric acid is recycled to an industrial device. The detection result of the extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 1.9ppm, and the metal content is within 1.3 mug/g.
Example 4
The method and the steps are the same as those in the embodiment 1, and only the temperature of the gas outlet at the top of the heavy-removal tower is controlled at 42 ℃, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 2.1ppm, the metal content is 0.8 mug/g, and the yield of the sulfur trioxide is reduced by 30%.
Example 5
The method and the steps are the same as those in the embodiment 1, and only the temperature of the gas outlet at the top of the heavy-removal tower is controlled at 49 ℃, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.912%, the sulfur dioxide content is 2.3ppm, and the metal content is 1.5 mug/g.
Example 6
The method and the steps are the same as those in the embodiment 1, and only the outlet temperature of a sulfur trioxide heater of the light component removal tower is controlled at 25 ℃, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.983%, the sulfur dioxide content is 11ppm, and the metal content is 1.1 mug/g.
Example 7
The method and the steps are the same as those in the embodiment 1, and the outlet temperature of the sulfur trioxide heater of the light component removal tower is controlled at 45 ℃, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.995%, the sulfur dioxide content is 0.9ppm, the metal content is 1.2 mug/g, the yield of the sulfur trioxide is reduced by 25%, and the lost sulfur trioxide enters the tail gas system.
Example 8
The method and the steps are the same as those in the example 2, only 20% of heavy components in the step (1) are extracted, and the rest 80% are heated by a reboiler and then are fed into a weight-removing tower, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.812%, the sulfur dioxide content is 1.5ppm, and the metal content is 5.2 mug/g.
Example 9
The method and the steps are the same as those in the example 2, only 70% of heavy components in the step (1) are extracted, and the rest 30% are heated by a reboiler and then are fed into a heavy-removal tower, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 1.3ppm, the metal content is 0.7 mug/g, and the yield of the sulfur trioxide is reduced by 38%.
Example 10
The method and the steps are the same as those in the example 2, only 20% of the light components in the step (2) are extracted, and the rest 80% of the light components are heated by a heater and then are fed into a heavy-removal tower, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 0.5ppm, the metal content is 1.4 mug/g, and the yield of the high-purity sulfur trioxide is reduced by 53%.
Example 11
The method and the steps are the same as those in the example 2, only 70% of the light components in the step (2) are extracted, and the rest 30% are heated by a heater and then are fed into a heavy-removal tower, so that the detection result of the finally extracted high-purity sulfur trioxide is 99.995%, the sulfur dioxide content is 6.8ppm, and the metal content is 1.2 mug/g.
Claims (10)
1. The production method of the high-purity liquid sulfur trioxide for the electronic grade sulfuric acid is characterized by comprising the following steps of:
(1) Pumping sulfur trioxide into a heavy-duty removal tower, obtaining gaseous sulfur trioxide at a constant boiling point, and sequentially filtering and cooling the sulfur trioxide and then extracting the sulfur trioxide;
(2) The extracted sulfur trioxide enters the middle part of the light component removal tower in a gaseous state, the gaseous sulfur trioxide fed at the dew point is subjected to countercurrent heat exchange with the liquid sulfur trioxide heated by the tower kettle through the filler from the middle part of the light component removal tower, the sulfur trioxide gas is condensed into a liquid state, the self-light component removal circulating pump is continuously extracted, namely the high-purity liquid sulfur trioxide for electronic grade sulfuric acid, the heating temperature is controlled at 35-43 ℃, and the gas outlet temperature is controlled at 30-40 ℃;
the filler is modified PFTE, and the surface adopts O 2 Or O 3 Treatment with NH 3 Or pH of 3 Hydrophilic treatment is carried out, and finally 98% concentrated sulfuric acid is adopted for surface passivation.
2. The method for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that the sulfur trioxide in step (1) is preheated to 30 ℃ to 40 ℃ before entering the weight removal tower.
3. The method for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that said filtration is a molding microporous filter screen disposed at the upper part of the de-weight tower, the molding microporous filter screen is made of PFA or PTFE, and the pore diameter of the filter screen is 0.5-20 μm.
4. The method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that the liquid level of the sulfur trioxide weight-reducing tower bottom in the step (1) is controlled to be 50% -80%;
the tower bottom of the heavy-removal tower is provided with a reboiler, a part of liquid phase in the heavy-removal tower is used for extracting heavy components, and the temperature of a gas outlet at the top of the heavy-removal tower is controlled to be 44-46 ℃ through the circulation of the reboiler.
5. The method for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 4, characterized in that 30-50% of the heavy components are recovered, and the remainder is fed into a weight removing column after being heated by a reboiler.
6. The method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that the liquid level of the tower bottom of the light component removal tower in the step (2) is controlled to be 50% -80%;
the bottom of the light component removing tower is provided with a heater, a part of liquid phase in the light component removing tower is used for extracting high-purity liquid sulfur trioxide for electronic grade sulfuric acid, and the other part of liquid phase is used for circulating and controlling the temperature of a gas outlet at the top of the light component removing tower to be 30-40 ℃ through the heater.
7. The method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 6, characterized in that 30% -50% of the liquid phase in the light component removal tower is extracted as high-purity liquid sulfur trioxide for electronic grade sulfuric acid, and the remainder is heated by a heater and then is injected into the upper part of the light component removal tower.
8. The method for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that the recovery ratio of the heavy components in said weight removal tower is 20% -45%, and the remainder is heated again by reboiler and then enters the weight removal tower.
9. The method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, characterized in that said light component removal tower simultaneously extracts 30% -60% by volume of material as high-purity sulfur trioxide, and the remainder is heated again by a heater and then enters the light component removal tower.
10. The method for producing high-purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 9, characterized in that the gas phase obtained by countercurrent heat exchange in the step (2) is sulfur dioxide with low boiling point, sulfuric acid with concentration higher than 98% is obtained by circulating reaction of sulfur dioxide with oxidizing solution and dilute sulfuric acid, and the oxidizing solution is a mixture of dilute sulfuric acid with mass concentration of 55% -75% and hydrogen peroxide with mass concentration of 25-30% according to volume ratio of 1:1-2; the mass concentration of the dilute sulfuric acid is 55% -75%.
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