CN114275743A - Method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid - Google Patents
Method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid Download PDFInfo
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Abstract
The invention discloses a method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, wherein sulfur trioxide is pumped to a de-weighting tower to obtain gaseous sulfur trioxide at a constant boiling point, and the sulfur trioxide is extracted after being sequentially filtered and cooled; the extracted sulfur trioxide enters the middle part of the lightness-removing tower in a gaseous state, the gaseous sulfur trioxide carries out countercurrent heat exchange with liquid sulfur trioxide after being heated by the filler and the tower kettle from the middle part of the lightness-removing tower, the sulfur trioxide gas is condensed into a liquid state, and the outlet of the self-lightness-removing circulating pump continuously extracts. The industrial-grade sulfur trioxide is pumped to a heavy-duty removal tower for boiling point rectification, sulfur trioxide for removing fuming sulfuric acid enters a sulfur trioxide lightness-removing tower in a gaseous form, the sulfur trioxide and liquid sulfur trioxide perform countercurrent heat exchange, the sulfur trioxide is condensed into liquid, gaseous sulfur dioxide enters a tail gas system from the top of the tower, the liquid sulfur trioxide after lightness removal is extracted from an outlet of a lightness-removing circulating pump, the content of the prepared high-purity liquid sulfur trioxide is 99.999 percent, the content of the sulfur dioxide is lower than 2ppm, and the total impurity content is controlled within 5 mu g/g.
Description
Technical Field
The invention belongs to the field of electronic chemicals, and particularly relates to a device and a method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid.
Background
Electronic grade sulfuric acid, also known as ultra-pure sulfuric acid, belongs to ultra-clean high-purity reagents. Is the wet electronic chemistry with the largest industrial use amount, is mainly used for cleaning, photoetching and corrosion of silicon wafers and corrosion and cleaning of printed circuit boards, and can effectively remove magazine particles, inorganic residues and carbon deposits on the wafers. Electronic grade sulfuric acid has been used for cleaning silicon wafers for over 40 years. Are indispensable key basic chemical reagents in the semiconductor industry. The purity of which directly affects the yield of integrated circuits.
Electronic grade chemicals in China start late, research on electronic grade sulfuric acid processes and industrial application are slow to develop, and the electronic grade sulfuric acid is monopolized and blocked by international and transnational chemical enterprises in countries such as Europe, America, Japan and Korean for a long time, the electronic grade sulfuric acid produced in China is mainly a low-end product and can only meet the requirements of semiconductor field processes, and the electronic grade sulfuric acid with the size of 28nm and high-level semiconductor processes completely depends on import. Therefore, the development of key technologies for high-end electronic-grade sulfuric acid production to realize localization is a necessary trend of development. The main production method of the electronic-grade sulfuric acid is a sulfur trioxide gas absorption method; the quality of the sulfur trioxide is mainly determined by impurities introduced by raw material sulfur trioxide and corrosion of production devices, and the impurities mainly comprise metal ions, easily-oxidized substances, granularity and the like, and directly influence the quality of electronic-grade sulfuric acid and the use of the electronic-grade sulfuric acid in a semiconductor manufacturing process. In the domestic report, industrial sulfur trioxide or nicotinic acid is mainly adopted for producing the electronic-grade sulfuric acid, and metal ions, easily-oxidized substances, particles and other impurities in the sulfur trioxide are difficult to remove, so that the electronic-grade sulfuric acid cannot meet the requirement of a high-end semiconductor manufacturing process. The invention is characterized in that production equipment and a production and control method are innovated, the problems of purity difference of raw materials and difficulty in impurity separation are solved, the problem of corrosion of the sulfur trioxide acidic environment to the equipment is solved, and the high-purity sulfur trioxide is prepared to prepare the ultra-high-purity electronic grade sulfuric acid.
Disclosure of Invention
The invention aims to provide a method for preparing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, which has the advantages of simple and easily controlled process, low production cost and stable product quality, takes industrial sulfur trioxide as a raw material, is innovated from production equipment and a production and control method, solves the problems of purity difference of the raw material and difficulty in impurity separation, and simultaneously solves the problem of corrosion of the equipment by the acidic environment of the sulfur trioxide. The brief device flow of the invention is shown in the attached figure 1.
In order to realize the aim, the production method of the high-purity liquid sulfur trioxide for the electronic-grade sulfuric acid comprises the following steps:
(1) pumping sulfur trioxide to a heavy component removal tower, obtaining gaseous sulfur trioxide at a constant boiling point, and filtering and cooling the sulfur trioxide in sequence to obtain the gaseous sulfur trioxide;
the sulfur trioxide in the raw material storage tank is conveyed to the de-weighting tower through the raw material pump, and because the boiling point of the sulfur trioxide is higher than the boiling point of fuming sulfuric acid, the constant boiling point of the sulfur trioxide is evaporated through the boiling point difference, under the condition, the sulfur trioxide is changed into a gas state, and the fuming acid is in a liquid state, so that the purpose of de-weighting is achieved; the upper part of the de-weighting tower is provided with a mould pressing micropore filter screen and a cooler for further removing fuming sulfuric acid in sulfur trioxide gas; the fuming acid is continuously extracted from the outlet of the de-heavy circulating pump.
(2) The extracted sulfur trioxide enters the middle part of the lightness-removing tower in a gaseous state, the gaseous sulfur trioxide performs countercurrent heat exchange with liquid sulfur trioxide heated by a filler and a tower kettle from the middle part of the lightness-removing tower, the sulfur trioxide gas is condensed into a liquid state, and the outlet of the lightness-removing circulating pump continuously extracts the sulfur trioxide, namely the high-purity liquid sulfur trioxide for the electronic-grade sulfuric acid.
The sulfur trioxide without heavy components enters a light component removal tower in a gaseous state, the gaseous sulfur trioxide passes through a filler from the middle part of the light component removal tower and carries out countercurrent heat exchange with liquid sulfur trioxide heated by a tower kettle, under the combined action of the filler, the sulfur trioxide gas is condensed into a liquid state, and sulfur dioxide with a low boiling point enters a tail gas absorption tower in a gaseous state; the finished product of sulfur trioxide is continuously extracted from the outlet of the lightness-removing circulating pump.
Preheating sulfur trioxide to 30-40 ℃ before entering a de-weighting tower in the step (1); firstly, the sulfur trioxide is ensured to be in a liquid state, and secondly, the optimal working feeding temperature of the de-heavy tower is ensured.
The filtration is the filtration of a mould pressing microporous filter screen arranged at the upper part of the de-weighting tower, the material of the mould pressing microporous filter screen is PFA or PTFE, and the aperture of the filter screen is 0.5-20 μm.
The liquid level of a tower kettle of the sulfur trioxide de-weighting tower in the step (1) is controlled to be 50-80 percent;
the tower kettle of the heavy component removal tower is provided with a reboiler, one part of the liquid phase in the heavy component removal tower extracts heavy components, and the other part of the liquid phase is circulated by the reboiler to control the temperature of a gas outlet at the top of the heavy component removal tower to be 44-46 ℃. Wherein, 30-50% of heavy components are extracted, and the rest is heated by a reboiler and then is fed into a heavy component removing tower.
The liquid level of a tower kettle of a sulfur trioxide heavy-duty tower is controlled to be 50-80 percent, the outlet temperature of a reboiler is controlled to be 44-50 ℃ optimal working feeding temperature, the outlet temperature of gas at the top of the heavy-duty tower is controlled to be 44-46 ℃, sulfur trioxide in the heavy-duty tower is subjected to azeotropic evaporation through a heater, the sulfur trioxide is converted into a gas state, heavy components fall back to the bottom of the tower in a liquid state, the sulfur trioxide at the top of the heavy-duty tower is subjected to light-duty tower removal at dew-point temperature, and impurities introduced by metal corrosion are further reduced by the heavy-duty tower with a lining of tetrafluoroplastic;
in the step (2), the liquid level of the tower kettle of the light trioxide removal tower is controlled to be 50-80 percent;
in the step (1), the heavy component extraction ratio in the heavy component removal tower is 20-45%, and the rest is heated by the reboiler again and then enters the heavy component removal tower.
And (3) simultaneously extracting a material with the volume fraction of 30-60% from the light component removal tower in the step (2) as high-purity sulfur trioxide, and heating the rest by the heater again and then feeding the rest into the light component removal tower.
The tower kettle of the light component removal tower is provided with a heater, one part of high-purity liquid sulfur trioxide for electronic-grade sulfuric acid is extracted from the liquid phase in the light component removal tower, and the other part of high-purity liquid sulfur trioxide is circulated by the heater (the outlet temperature of the heater is controlled to be 35-43 ℃) to control the outlet temperature of the gas at the top of the light component removal tower to be 30-40 ℃ so as to ensure that the light component removal tower is fed at the dew point.
30-50% of the liquid phase in the light component removal tower is extracted as high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, and the rest is heated by a heater and then is injected into the upper part of the light component removal tower.
The filler is modified PFTE, the surface of the filler is treated by O2 or O3, then hydrophobic treatment is carried out on NH3 or PH3, finally surface passivation is carried out by adopting 98% concentrated sulfuric acid, and the corrosion resistance, strength and water cleaning performance of the PTFE filler to sulfur trioxide are greatly improved after modification.
And (3) obtaining sulfur dioxide with a low boiling point in a gas phase obtained by the countercurrent heat exchange in the step (2), and circularly reacting the sulfur dioxide with the oxidizing solution and the dilute sulfuric acid to obtain sulfuric acid with the concentration higher than 98%.
The oxidizing solution is a mixture of dilute sulfuric acid with the mass concentration of 55-75% and hydrogen peroxide with the mass concentration of 25-30% according to the volume ratio of 1: 1-2; the mass concentration of the dilute sulfuric acid is 55-75%.
In the preferred scheme, the sulfur dioxide oxidation solution is prepared by mixing 70% of dilute sulfuric acid and 30% of hydrogen peroxide according to the ratio of 1:1, and the feeding speed of the oxidation solution is 0.5L/h-2L/h.
The material of the sulfur trioxide storage tank, the light component removal tower and the heater is 316L, 316 or 304 stainless steel, and the material of the heavy component removal tower and the reboiler is 316L, 316 or 304 lining PFA or PTFE.
The bottom of the sulfur dioxide absorption tower is provided with a 55-75% dilute sulfuric acid inlet pipe, a dilute sulfuric acid inlet regulating valve is intelligently interlocked with the liquid level at the bottom of the absorption tower and the sulfuric acid concentration, the target value of the liquid level of the tower kettle is 70%, and the target value of the sulfuric acid concentration is 98%.
The invention discloses a method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, which comprises the following steps: industrial grade sulfur trioxide is unloaded to the raw materials storage tank, carry to the heavy tower of taking off through the raw materials pump and carry out boiling point rectification, the sulfur trioxide of desorption fuming sulfuric acid gets into sulfur trioxide lightness-removing tower with gaseous form, with through the homothermal liquid sulfur trioxide countercurrent flow heat transfer of heat circulation exchanger, the sulfur trioxide condensation is liquid, gaseous sulfur dioxide gets into exhaust system from the top of the tower, liquid sulfur trioxide after the lightness-removing is taken out from lightness-removing circulation pump export, it is 99.999% to make high-purity liquid sulfur trioxide content, sulfur dioxide content is less than 2ppm, total impurity content control is within 5 mu g/g.
Drawings
FIG. 1 is a diagram of an apparatus for producing electronic-grade sulfuric acid according to the present invention. The system comprises a sulfur trioxide storage tank 1, a raw material pump 2, a heavy component removal tower 3, a heavy component removal tower kettle liquid level meter 4, a packing layer 5, a heavy component removal cooler 6, an online thermometer I7, a mould pressing microporous filter screen 8, a heavy component removal circulating pump 9, a reboiler 10, an online thermometer II 11, a light component removal tower 12, a light component removal tower kettle liquid level meter 13, a light component removal circulating pump 14, a heater 15 and a tail gas absorption tower 16.
Detailed Description
The present invention is further illustrated by the following examples, but it should not be construed that the scope of the above-described subject matter is limited to the following examples. Various substitutions and alterations can be made without departing from the technical idea of the invention and the scope of the invention is covered by the present invention according to the common technical knowledge and the conventional means in the field.
Example 1
Industrial sulfur trioxide with 99.5 percent, metal ion content (calculated by Fe) more than 0.05 percent and sulfur dioxide content more than 0.4 percent is used as a raw material and enters a heavy component removal tower at 35 ℃, the liquid level of a tower kettle of the heavy component removal tower is controlled at 53 percent, the outlet temperature of a reboiler is controlled at the optimum working feeding temperature of 44 ℃, the outlet temperature of gas at the top of the heavy component removal tower is controlled at 44 ℃, sulfur trioxide in the heavy component removal tower is subjected to azeotropic evaporation through a heater, the sulfur trioxide is converted into a gas state, the heavy component falls back to the bottom of the tower in a liquid state, the liquid in the heavy component is extracted with the volume fraction of 35 percent, the rest is heated by the reboiler again and then enters the heavy component removal tower, and the sulfur trioxide at the top of the heavy component removal tower enters the light component removal tower at the dew point temperature. The liquid level of a tower kettle of the lightness-removing tower is controlled to be 54 percent, the outlet temperature of a heater is controlled to be 35 ℃, the outlet temperature of gas at the top of the lightness-removing tower is controlled to be 30 ℃, sulfur trioxide fed at a dew point is subjected to countercurrent heat exchange with sulfur trioxide heated by the heater in the tower, sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid state and falls back to the tower kettle, meanwhile, a material with the volume fraction of 40 percent is extracted to serve as high-purity sulfur trioxide, and the rest is heated by the heater again and then enters the lightness-removing tower. The gas sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to perform absorption reaction with sulfur dioxide oxidation liquid (prepared by 55% of dilute sulfuric acid and 30% of hydrogen peroxide according to the proportion of 1: 1), 55% of dilute sulfuric acid is continuously supplemented at the same time, the sulfur dioxide is converted into sulfuric acid, 98% of sulfuric acid is stably extracted, and the sulfuric acid is circulated to an industrial device for use. The detection result of the extracted high-purity sulfur trioxide is 99.999 percent, the sulfur dioxide content is 1.8ppm, and the metal content is within 2.2 mu g/g.
Example 2
Industrial sulfur trioxide with 99.4 percent, metal ion content (calculated by Fe) more than 0.06 percent and sulfur dioxide content more than 0.5 percent is used as a raw material, the raw material enters a heavy component removal tower at 36 ℃, the liquid level of a tower kettle of the heavy component removal tower is controlled at 63 percent, the outlet temperature of a reboiler is controlled at 46 percent, the outlet temperature of gas at the top of the heavy component removal tower is controlled at 45 ℃, sulfur trioxide in the heavy component removal tower is subjected to azeotropic evaporation through a heater, the sulfur trioxide is converted into a gas state, the heavy component falls back to the bottom of the tower in a liquid state, the liquid in the heavy component is extracted with the volume fraction of 36 percent, the rest is heated through the reboiler again and then enters the heavy component removal tower, and the sulfur trioxide at the top of the heavy component removal tower enters the light component removal tower at the dew point temperature. The liquid level of a tower kettle of the lightness-removing tower is controlled to be 65 percent, the outlet temperature of a heater is controlled to be 38 ℃, the outlet temperature of gas at the top of the lightness-removing tower is controlled to be 35 ℃, sulfur trioxide fed at a dew point is subjected to countercurrent heat exchange with sulfur trioxide heated by the heater in the tower, sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid state and falls back to the tower kettle, meanwhile, a material with the volume fraction of 45 percent is extracted as high-purity sulfur trioxide, and the rest is heated by the heater again and then enters the lightness-removing tower. The gas sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to perform absorption reaction with sulfur dioxide oxidation liquid (formed by 65 percent of dilute sulfuric acid and 30 percent of hydrogen peroxide according to the proportion of 1: 1), 65 percent of dilute sulfuric acid is continuously supplemented at the same time, the sulfur dioxide is converted into sulfuric acid, 98 percent of sulfuric acid is stably extracted and circulated to an industrial device for use. The detection result of the extracted high-purity sulfur trioxide is 99.999 percent, the sulfur dioxide content is 1.0ppm, and the metal content is within 1.1 mu g/g.
Example 3
Industrial sulfur trioxide with 99.3 percent, metal ion content (calculated by Fe) more than 0.07 percent and sulfur dioxide content more than 0.5 percent is used as a raw material and enters a heavy component removal tower at 36 ℃, the liquid level of a tower kettle of the heavy component removal tower is controlled at 75 percent, the outlet temperature of a reboiler is controlled at 48 ℃, the outlet temperature of gas at the top of the heavy component removal tower is controlled at 46 ℃, sulfur trioxide in the heavy component removal tower is subjected to azeotropic evaporation through a heater, the sulfur trioxide is converted into a gaseous state, the heavy component falls back to the bottom of the tower in a liquid state, the liquid in the heavy component is extracted with the volume fraction of 45 percent, the rest is heated by the reboiler again and then enters the heavy component removal tower, and the sulfur trioxide at the top of the heavy component removal tower enters the light component removal tower at the dew point temperature. The liquid level of the tower kettle of the lightness-removing tower is controlled to be 76 percent, the outlet temperature of the heater is controlled to be 41 ℃, the outlet temperature of the gas at the top of the lightness-removing tower is controlled to be 38 ℃, the sulfur trioxide fed at the dew point is subjected to countercurrent heat exchange with the sulfur trioxide heated by the heater in the tower, the sulfur dioxide gas enters a gas phase, the sulfur trioxide is condensed into a liquid state and falls back to the tower kettle, meanwhile, the material with the volume fraction of 50 percent is extracted as high-purity sulfur trioxide, and the rest is heated by the heater again and then enters the lightness-removing tower. The gas sulfur dioxide extracted from the tower top enters a sulfur dioxide absorption tower to perform absorption reaction with sulfur dioxide oxidation liquid (formed by dilute sulfuric acid at the temperature of 75 ℃ and 30% hydrogen peroxide according to the proportion of 1: 1), meanwhile, the dilute sulfuric acid at the temperature of 75 ℃ is continuously supplemented, the sulfur dioxide is converted into sulfuric acid, 98% sulfuric acid is stably extracted, and the sulfuric acid is circulated to an industrial device for use. The detection result of the extracted high-purity sulfur trioxide is 99.999 percent, the sulfur dioxide content is 1.9ppm, and the metal content is within 1.3 mu g/g.
Example 4
The method and the steps are the same as those of the example 1, only the temperature of the gas outlet at the top of the de-weighting tower is controlled at 42 ℃, the detection result of the finally extracted high-purity sulfur trioxide is 99.999 percent, the content of sulfur dioxide is 2.1ppm, the content of metal is 0.8 mu g/g, and the yield of the sulfur trioxide is reduced by 30 percent.
Example 5
The method and the steps are the same as those of the example 1, only the temperature of the gas outlet at the top of the de-weighting tower is controlled at 49 ℃, the detection result of the finally extracted high-purity sulfur trioxide is 99.912%, the sulfur dioxide content is 2.3ppm, and the metal content is 1.5 mug/g.
Example 6
The method and the steps are the same as those of the example 1, only the outlet temperature of the sulfur trioxide heater of the light component removal tower is controlled at 25 ℃, the detection result of the finally extracted high-purity sulfur trioxide is 99.983 percent, the content of the sulfur dioxide is 11ppm, and the content of the metal is 1.1 mu g/g.
Example 7
The method and the steps are the same as those of the embodiment 1, only the outlet temperature of a sulfur trioxide heater of the light component removal tower is controlled at 45 ℃, the detection result of the finally extracted high-purity sulfur trioxide is 99.995 percent, the content of sulfur dioxide is 0.9ppm, the content of metal is 1.2 mug/g, the yield of the sulfur trioxide is reduced by 25 percent, and the lost sulfur trioxide enters a tail gas system.
Example 8
The method and the steps are the same as the example 2, only 20% of heavy components are extracted in the step (1), the rest 80% of heavy components are heated by a reboiler and then are fed into a heavy component removal tower, the detection result of the finally extracted high-purity sulfur trioxide is 99.812%, the sulfur dioxide content is 1.5ppm, and the metal content is 5.2 mug/g.
Example 9
The method and the steps are the same as the example 2, only 70% of the heavy components are extracted in the step (1), the rest 30% of the heavy components are heated by a reboiler and then are fed into a heavy component removal tower, the detection result of the finally extracted high-purity sulfur trioxide is 99.999%, the sulfur dioxide content is 1.3ppm, the metal content is 0.7 mu g/g, and the sulfur trioxide yield is reduced by 38%.
Example 10
The method and the steps are the same as the example 2, only 20% of the light components are extracted in the step (2), the rest 80% of the light components are heated by a heater and then are injected into a de-weighting tower, the detection result of the finally extracted high-purity sulfur trioxide is 99.999%, the content of sulfur dioxide is 0.5ppm, the content of metal is 1.4 mu g/g, and the yield of the high-purity sulfur trioxide is reduced by 53%.
Example 11
The method and the steps are the same as the example 2, only 70% of the light components are extracted in the step (2), the rest 30% of the light components are heated by a heater and then are driven into a de-weighting tower, and the detection result of the finally extracted high-purity sulfur trioxide is 99.995%, the content of sulfur dioxide is 6.8ppm, and the content of metals is 1.2 mu g/g.
Claims (10)
1. A production method of high-purity liquid sulfur trioxide for electronic-grade sulfuric acid is characterized by comprising the following steps:
(1) pumping sulfur trioxide to a heavy component removal tower, obtaining gaseous sulfur trioxide at a constant boiling point, and filtering and cooling the sulfur trioxide in sequence to obtain the gaseous sulfur trioxide;
(2) the extracted sulfur trioxide enters the middle part of the lightness-removing tower in a gaseous state, the gaseous sulfur trioxide performs countercurrent heat exchange with liquid sulfur trioxide heated by a filler and a tower kettle from the middle part of the lightness-removing tower, the sulfur trioxide gas is condensed into a liquid state, and the outlet of the lightness-removing circulating pump continuously extracts the sulfur trioxide, namely the high-purity liquid sulfur trioxide for the electronic-grade sulfuric acid.
2. The process for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1, wherein the sulfur trioxide of step (1) is preheated to 30 ℃ to 40 ℃ before entering the de-weighting tower.
3. The method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid according to claim 1, wherein the filtration is a molded microporous filter screen arranged at the upper part of the de-weighting tower, the molded microporous filter screen is made of PFA or PTFE, and the pore diameter of the filter screen is 0.5-20 μm.
4. The method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid according to claim 1, wherein the liquid level of the tower kettle of the sulfur trioxide de-weighting tower in the step (1) is controlled to be 50-80%;
the tower kettle of the heavy component removal tower is provided with a reboiler, one part of the liquid phase in the heavy component removal tower extracts heavy components, and the other part of the liquid phase is circulated by the reboiler to control the temperature of a gas outlet at the top of the heavy component removal tower to be 44-46 ℃.
5. The process for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 4, wherein 30 to 50% of heavy components are withdrawn, and the remainder is heated in a reboiler and fed into a de-weighting tower.
6. The method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid according to claim 1, wherein the liquid level in the tower bottom of the light trioxide removal tower in the step (2) is controlled to be 50-80%;
the tower kettle of the light component removal tower is provided with a heater, one part of high-purity liquid sulfur trioxide for electronic-grade sulfuric acid is extracted from the liquid phase in the light component removal tower, and the other part of high-purity liquid sulfur trioxide is circularly pumped by the heater to control the temperature of a gas outlet at the top of the light component removal tower to be 30-40 ℃.
7. The method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid as claimed in claim 6, wherein 30-50% of the liquid phase in the lightness-removing tower is extracted as high-purity liquid sulfur trioxide for electronic-grade sulfuric acid, and the rest is heated by a heater and then is injected into the upper part of the lightness-removing tower.
8. The process for producing high purity liquid sulfur trioxide for electronic grade sulfuric acid according to claim 1 wherein the filler is modified PFTE, the surface is treated with O2 or O3, then subjected to hydrophobic treatment with NH3 or PH3, and finally subjected to surface passivation with 98% concentrated sulfuric acid.
9. The process for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid according to claim 1, wherein the production ratio of heavy components in the de-weighting tower is 20 to 45 percent, and the rest is heated again by the reboiler and then enters the de-weighting tower.
10. The method for producing high-purity liquid sulfur trioxide for electronic-grade sulfuric acid according to claim 1, wherein the lightness-removing tower simultaneously produces 30 to 60 volume percent of material as high-purity sulfur trioxide, and the rest is heated by the heater again and then enters the lightness-removing tower;
gas phase obtained by the countercurrent heat exchange in the step (2) is low boiling point to obtain sulfur dioxide, the sulfur dioxide circularly reacts with oxidizing solution and dilute sulfuric acid to obtain sulfuric acid with the concentration higher than 98%, and the oxidizing solution is a mixture of the dilute sulfuric acid with the mass concentration of 55-75% and hydrogen peroxide with the mass concentration of 25-30% according to the volume ratio of 1: 1-2; the mass concentration of the dilute sulfuric acid is 55-75%.
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