CN114261097A - Composite sealing assembly and manufacturing method thereof - Google Patents
Composite sealing assembly and manufacturing method thereof Download PDFInfo
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- CN114261097A CN114261097A CN202111613825.7A CN202111613825A CN114261097A CN 114261097 A CN114261097 A CN 114261097A CN 202111613825 A CN202111613825 A CN 202111613825A CN 114261097 A CN114261097 A CN 114261097A
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Images
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- Adhesives Or Adhesive Processes (AREA)
Abstract
The invention discloses a composite sealing component and a manufacturing method thereof, wherein the manufacturing method of the composite sealing component comprises the following steps: providing a base material; performing pretreatment and roughening treatment on the surface of the substrate; placing an elastomer on the treated side of the substrate and heating the substrate and the elastomer to a predetermined temperature; and consolidating the elastomer with the substrate to form a composite seal assembly. The composite sealing assembly and the manufacturing method thereof provided by the invention can simplify the process and improve the performance of the composite sealing assembly.
Description
Technical Field
The invention relates to the field of semiconductor equipment sealing, in particular to a composite sealing assembly and a manufacturing method thereof.
Background
In semiconductor equipment, because a sealing assembly is often exposed in the environment of high temperature, high pressure and plasma corrosion, adhesives in the sealing assembly are easy to decompose, so that the sealing assembly is layered or even completely separated, the sealing assembly is invalid, the sealing performance of the equipment is reduced, and devices processed by the semiconductor equipment are scrapped. The adhesion of each elastomer to the substrate requires the development of a specific adhesive, which increases the development period and the experimental cost of the project.
Therefore, how to obtain a composite sealing assembly with good performance and low cost becomes a problem to be solved urgently.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention provides a composite sealing assembly and a method for manufacturing the same, which has the advantages of simple manufacturing process, easy operation and large adhesion between the substrate and the elastomer.
In order to achieve the above objects and other related objects, the present invention adopts the following technical solutions:
a method of making a composite seal assembly is provided, comprising:
providing a base material;
performing pretreatment and roughening treatment on the surface of the substrate;
placing an elastomer on the treated side of the substrate and heating the substrate and the elastomer to a predetermined temperature; and
consolidating the elastomer with the substrate to form a composite seal assembly.
In some embodiments of the invention, the substrate comprises a metal substrate and a polymer substrate.
In some embodiments of the invention, the pre-treatment of the metal substrate comprises at least one of degreasing, water washing, acid washing, alkali washing, neutralization, and drying treatment.
In some embodiments of the invention, the metal substrate roughening treatment comprises at least one of grit blasting, sanding, anodizing, or electrical discharge treatment.
In some embodiments of the present invention, the substrate has an average roughness of 10 to 100 μm.
In some embodiments of the invention, the elastomer is a crosslinked elastomer, and the predetermined temperature of the substrate and the elastomer is 50 to 150 ℃.
In some embodiments of the invention, the consolidating of the elastomer with the substrate comprises the steps of:
placing the elastomer on the substrate; and
applying ultrasound and stress to the elastomer.
In some embodiments of the present invention, the stress is 10 to 200N.
In some embodiments of the present invention, the frequency of the ultrasonic wave is 10 to 100 KHZ.
The present invention also provides a composite seal assembly comprising:
a substrate, wherein one side surface of the substrate is provided as a roughened surface; and
an elastomer, and the elastomer is consolidated on the roughened surface of the substrate.
The invention provides a composite sealing component and a manufacturing method thereof, wherein the elastomer and a base material are firmly combined to obtain the high-bonding composite sealing component, and the layering phenomenon is reduced. And the composite sealing component does not use chemical adhesives, so that the bonding mode is simple, the working procedures are few, the period is short and the cost is reduced. In summary, the composite sealing assembly and the manufacturing method thereof provided by the invention can improve the performance of the composite sealing assembly and reduce the cost.
Drawings
FIG. 1 is a schematic diagram of an ultrasonic apparatus in one embodiment.
FIG. 2 is a schematic view of an embodiment of an elastomer completely covering a substrate.
FIG. 3 is a schematic diagram of the bonding of the metal substrate and the elastomer according to an embodiment.
FIG. 4 is a schematic view of the bonding of a polymer substrate to an elastomer in one embodiment.
FIG. 5 is a schematic illustration of the in-elastomer failure in a 180 peel test in one embodiment
FIG. 6 is a schematic representation of elastomer delamination occurring in a 180 peel test in one embodiment
Description of reference numerals:
1, an ultrasonic device; 2, an ultrasonic wave region; 3, an elastomer; 4 a substrate; 5, heating the area by an ultrasonic device; 6 bonding surfaces.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
It is to be understood that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not used to limit the scope of the present invention, and the relative relationship between the terms may be changed or adjusted without substantial technical change.
The invention provides a composite sealing assembly and a manufacturing method thereof. The surface of the base material and the elastic contact surface are mutually fused, the combination is firm, the elastomer is not easy to delaminate and fall off, and the elastomer has good mechanical and acid and alkali corrosion resistance. The sealing assembly does not contain adhesive, and the sealing assembly cannot lose efficacy due to adhesive failure. The composite sealing component can be widely applied to various semiconductor devices, such as an etching system, a cleaning system, an exposure system, a polishing system, a film forming system, an ion implantation system or an ion diffusion system.
Referring to fig. 1, in one embodiment of the present invention, a substrate 4 is placed on a heating zone 5 of an ultrasonic device, and an elastomer 3 is placed on the substrate 4. Heating the base material 4 and the elastomer 3 to a preset temperature, presetting stress on the elastomer 3 by the ultrasonic device 1, and solidifying the elastomer 3 and the base material 4 under the preset ultrasonic frequency, the preset ultrasonic time and the preset ultrasonic power to form the composite sealing assembly. In this process, the ultrasonic device 1 is swept across the surface of the elastic body 3 and stays for a preset time.
Referring to fig. 1, in one embodiment of the present invention, the elastomer 3 and the substrate 4 are subjected to stress and ultrasonic waves to generate material flow between the interfaces. The bonding process may include four stages using stress and ultrasound to create the bond. The pre-deformation and interface vibration phases, i.e. the plastic deformation of the polymer due to the presence of stress. And (3) an interface mutual friction stage, namely the interface is activated due to ultrasonic vibration, when the amplitude is small, the polymer and the metal base material are contacted with each other, the amplitude exceeds a certain value, and the friction between the polymer and the metal base material is started. In the interface softening stage, continuous plastic deformation occurs to form a tiny interconnecting interface. And in the interface mutual diffusion stage, namely under the action of stress and ultrasonic waves, substances between the interfaces continuously flow, and the interfaces continuously diffuse. So that the elastomer 3 and the base material 4 are fitted to each other to obtain a high-viscosity composite seal assembly.
Referring to FIG. 1, in one embodiment of the present invention, the substrate 4 is a metal substrate, and the metal substrate includes, but is not limited to, metal substrates such as aluminum substrate, cadmium substrate, beryllium substrate, steel substrate, zinc substrate, magnesium substrate, chromium substrate, copper substrate, iron substrate, gold substrate, or alloy substrate. In other embodiments, the substrate 4 is, for example, a polymer substrate, and the polymer substrate includes, but is not limited to, a tetrafluoroethylene substrate, a polyetherketone substrate, a perfluoroalkoxyalkane substrate, a polyetheretherketone substrate, a polyimide substrate, or a composite substrate of several polymers thereof. In actual use, different base materials can be selected according to the use scene.
Referring to fig. 1, in an embodiment of the present invention, when the substrate 4 is a metal substrate, the metal substrate may be subjected to an oiling process or an oxidation process, for example, during the shipping process, so as to prevent corrosion of the metal substrate. Since the grease or oxide on the surface affects the bonding between the metal substrate and the elastomer, the metal substrate needs to be pretreated before use, for example, at least one of degreasing, water washing, acid washing, alkali washing, neutralization and baking treatments is performed on the metal substrate. Wherein, the degreasing treatment can remove grease on the surface of the metal substrate, and prevent the elastomer 3 and the substrate 4 from layering after bonding. The acid washing and alkali washing treatment is beneficial to removing oxides on the metal surface, such as a metal aluminum substrate, and preventing the oxides from causing the phenomena of voids at a bonding interface and delamination of the elastomer and the substrate. Neutralization and drying treatment ensure that the surface of the base material 4 is dry and free of impurities, and the combination of the base material 4 and the elastomer 3 is increased.
Referring to fig. 1, in an embodiment of the present invention, the bonding surface 6 of the substrate 4 and the elastic body 3 is roughened, and the invention is not limited to the manner of roughening the substrate 4. For example, the metal substrate may be at least one of sand blasted, sanded, anodized, or spark treated, and the like, and the polymer substrate may be, for example, corona treated, and the like. After the roughening treatment of the base material 4 is completed, the average roughness of the bonding surface 6 is measured by, for example, a 3D microscope, and in this embodiment, the average roughness of the surface of the bonding surface 6 is, for example, 10 to 100 μm. By roughening the surface of the substrate, mutual friction between the contact interface of the substrate 4 and the elastomer 3 in the ultrasonic bonding process is facilitated, and the adhesion force between the elastomer 3 and the substrate 4 is increased.
Referring to fig. 1 to 4, in an embodiment of the present invention, the substrate 4 may be a planar substrate, or grooves may be formed on the surface of the planar substrate, and the planar substrate or the substrate with the grooves is roughened to obtain a highly adhesive composite sealing assembly, which can be processed by the processing requirements of the substrate 4. The present invention is not limited to the position of the elastic body 3 on the base material 4, for example, the elastic body 3 can completely cover the base material 4, and for example, the elastic body 3 can be disposed on the base material 4 at the position of the groove, which can be selected according to the use requirement.
Referring to fig. 1, in an embodiment of the present invention, elastomer 3 is selected from perfluoroether elastomers, for example, and elastomer 3 can also be a fluorine-containing elastomer, including but not limited to vinylidene fluoride type fluoroelastomers, tetrafluoroethylene/propylene/vinylidene fluoride type fluoroelastomers, ethylene/hexafluoropropylene/vinylidene fluoride type fluoroelastomers, ethylene/hexafluoropropylene/tetrafluoroethylene type fluoroelastomers, fluorosilicone type fluoroelastomers or phosphorus-nitrogen-fluorine-coupled fluoroelastomers. Different from the requirement of bonding an uncrosslinked elastomer and other metal or polymer substrates, the ultrasonic bonding process is still applicable to the crosslinked elastomer, especially to the bonding of the elastomer and a metal material, so that the application range of the bonding process is widened, the production process is simplified, and the utilization rate of the material is improved. The perfluoroether elastomer is selected, for example, to be sufficiently crosslinked, so that it is advantageous that the perfluoroether elastomer maintains high elasticity during the ultrasonic bonding stage, ensuring the final dimensional accuracy and interfacial adhesion of the ultrasonic bonded product. In other embodiments, the elastic bodies 2 can be selected from other kinds of elastic bodies according to the use scene.
Referring to fig. 1, in an embodiment of the present invention, the elastomer 3 is, for example, a perfluoroether elastomer, and the perfluoroether elastomer includes perfluoromethyl vinyl ether, polytetrafluoroethylene, and a crosslinking point containing a cyano group. The perfluoroether crude rubber system also comprises one or a combination of crosslinking agents of 2, 2-bis (3-amino-4-hydroxyphenyl) hexafluoropropane, 2, 5-dimethyl-2, 5-bis (tert-butylperoxy) hexane or triallyl isocyanurate. The perfluoroether elastomer may further contain an auxiliary agent such as a reinforcing agent, for example, one or a mixture of inorganic fillers such as silicon nitride, silica, silicon carbide, alumina, magnesia, titanium oxide, aluminum trifluoride and magnesium fluoride. By adding various additives, the comprehensive performance of the sealing assembly can be improved, so that the sealing assembly is suitable for wider application fields, such as switch valve scenes with requirements on the wear resistance of the sealing element.
Referring to fig. 1, in one embodiment of the present invention, a substrate 4 is placed on a heating area 5 of an ultrasonic device, and an elastomer 3 is placed on the substrate 4. In this embodiment, the elastomer 3 is, for example, an elongated perfluoroether elastomer, and in other embodiments, the shape of the elastomer 3 may be selected according to the shape of the seal assembly. The substrate 4 and the elastomer 3 are heated to a predetermined temperature, for example, 50 to 150 ℃, for example, 60 to 100 ℃. The preheating of the elastomer 3 and the substrate 4 is beneficial to softening the contact interface of the elastomer 3 and the substrate 4 in the ultrasonic process, and the elastomer and the substrate are mutually fused on a micro scale to finally form a bonding area with stronger adhesive force.
Referring to fig. 1, in an embodiment of the present invention, an ultrasonic device 1 is disposed on an elastic body 3, and the ultrasonic device 1 has a predetermined stress on the elastic body 3, and the predetermined stress is, for example, 10 to 200N, further, for example, 10 to 100N, further, for example, 10 to 50N. In the stress interval, the pre-deformation of the contact interface of the elastomer 3 and the base material 4 in the initial stage is facilitated, meanwhile, the dislocation of the elastomer 3 on the base material 4 is not caused, and the size control of the final product is facilitated
Referring to fig. 1, in an embodiment of the present invention, an ultrasonic apparatus 1 solidifies an elastomer 3 and a substrate 4 under a predetermined ultrasonic frequency, a predetermined ultrasonic time and a predetermined ultrasonic power to form a composite sealing assembly. In the present embodiment, the predetermined ultrasonic frequency is, for example, 10 to 100KHz, for example, 10 to 80KHz, and for example, 20 to 60 KHz. By setting the ultrasonic frequency within this range, it is ensured that each stage of ultrasonic bonding has a good interfacial interaction, and finally the interface between the elastomer 3 and the substrate 4 has a good bonding force. The preset ultrasonic time is, for example, 1 to 10 seconds, and is, for example, 1 to 5 seconds, and when the ultrasonic time is within the range, the interface between the base material 4 and the elastic body 3 can be ensured to be fully bonded, and meanwhile, the bonding efficiency is considered. During the ultrasonic bonding process, the ultrasonic device 1 is swept across the surface of the elastomer 3 and is left for a predetermined time to ensure good adhesion of the substrate and the elastomer in each region of the composite seal assembly. The preset ultrasonic power is, for example, 1-100W, further, for example, 1-50W, further, for example, 1-20W, and when the ultrasonic power is within the power range, the ultrasonic bonding is ensured to have better interface interaction in each stage. In other embodiments, the preset ultrasonic frequency, the preset ultrasonic time and the preset ultrasonic power can be adjusted according to different selected base materials and elastomers. The peel strength performance of the prepared seal assembly was tested according to standard GB/T15254-2014.
Referring to fig. 3 and 5, in one embodiment of the present invention, the substrate 4 is a metal aluminum substrate, and a groove with a depth of 5mm and a width of 4mm is formed on the metal aluminum substrate by a Numerical Control (CNC) process. Then, the metal aluminum substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then is roughened by sand blasting, and the surface roughness of the metal aluminum substrate is, for example, 60 μm. The crosslinked perfluoroether elastomer is placed in the groove of the aluminum metal substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 50 c to form a composite sealing assembly. The applied stress is, for example, 180N, the ultrasonic frequency is, for example, 30KHZ, the ultrasonic time is, for example, 4s, and the ultrasonic power is, for example, 100W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal elastomer damage and does not have a delamination phenomenon, which indicates that the adhesion force of the elastomer 3 and the substrate 4 is good, and the elastomer 3 is embedded in the substrate 4.
Referring to fig. 3 and 6, in one embodiment of the present invention, the substrate 4 is a metal aluminum substrate, and a groove with a depth of 5mm and a width of 4mm is formed on the metal aluminum substrate by a CNC process. Then, the metal aluminum substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then is roughened by sand blasting, and the surface roughness of the metal aluminum substrate is, for example, 60 μm. And coating a layer of polyurethane crosslinking agent on the crosslinked perfluoroether elastomer for bonding, and then bonding with the metal aluminum substrate to form the composite sealing component. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing assembly prepared under the condition has a layering phenomenon, which shows that the composite sealing assembly is easy to have the layering phenomenon when the adhesive composite elastomer 3 and the base material 4 are adopted, and further shows that the composite sealing assembly with high cohesiveness can be obtained through an ultrasonic mode after comparison.
Referring to fig. 3 and 5, in an embodiment of the present invention, the substrate 4 is a metal stainless steel substrate, and the metal stainless steel substrate is processed into a plane by a CNC process. Then, the metal stainless steel base material is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then is subjected to anodic oxidation treatment to roughen the metal stainless steel base material, wherein the surface roughness of the metal stainless steel base material is 100 microns for example. The crosslinked perfluoroether elastomer is placed on the roughened surface of the metal stainless steel substrate and perfluoroether elastomer are heated to, for example, 120 ℃ and ultrasonically bonded to form a composite seal assembly. The applied stress is, for example, 100N, the ultrasonic frequency is, for example, 70KHZ, the ultrasonic time is, for example, 10s, and the ultrasonic power is, for example, 50W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and has no delamination phenomenon, and the grooves on the substrate do not influence the adhesion of the elastomer 3 and the substrate 4.
Referring to fig. 3 and 6, in an embodiment of the present invention, the substrate 4 is a metal stainless steel substrate, and the metal stainless steel substrate is processed into a plane by a CNC process. Then, the metal stainless steel base material is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then is subjected to anodic oxidation treatment to roughen the metal stainless steel base material, wherein the surface roughness of the metal stainless steel base material is 100 microns for example. And coating a layer of polyurethane crosslinking agent on the crosslinked perfluoroether elastomer for bonding with the metal aluminum substrate to form the composite sealing component. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing assembly prepared under the condition has a layering phenomenon, which shows that when the adhesive is used for compounding the elastomer 3 and the base material 4, the grooves on the base material 4 can not improve the bonding force between the elastomer 3 and the base material 4.
Referring to fig. 3 and 5, in an embodiment of the present invention, a substrate 4 is made of a metal iron substrate, and a groove with a depth of 3mm and a width of 3mm is formed on the metal iron substrate by a CNC process. Then, the metallic iron base material is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then the metallic iron base material is roughened by anodic oxidation treatment, and the surface roughness of the metallic iron base material is, for example, 30 μm. The crosslinked perfluoroether elastomer is placed in the groove of the metallic iron substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 60 ℃ to form a composite seal assembly. The applied stress is, for example, 80N, the ultrasonic frequency is, for example, 20KHZ, the ultrasonic time is, for example, 2s, and the ultrasonic power is, for example, 30W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. The composite seal assembly prepared under this condition exhibited in-elastomer failure and no delamination under the 180 ° peel test, indicating that the adhesion of the elastomer 3 to the substrate 4 was good over this range of ultrasonic conditions.
Referring to fig. 3 and 6, in an embodiment of the present invention, a substrate 4 is made of a metal iron substrate, and a groove with a depth of 3mm and a width of 3mm is formed on the metal iron substrate by a CNC process. Then, the metallic iron base material is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then the metallic iron base material is roughened by anodic oxidation treatment, and the surface roughness of the metallic iron base material is, for example, 30 μm. And coating a layer of polyurethane crosslinking agent on the crosslinked perfluoroether elasticity for bonding, and then bonding with the metal iron substrate to form the composite sealing assembly. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing assembly prepared under the condition has a layering phenomenon, which shows that when the adhesive sealing assembly is used, the adhesion of the material of the base material 4 to the sealing assembly is not greatly improved.
Referring to fig. 3 and 5, in an embodiment of the present invention, the substrate 4 is, for example, a copper substrate, and the copper substrate is processed into a plane by a CNC process. Then, the metallic copper substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then is roughened by sand blasting, and the surface roughness of the metallic copper substrate is 10 μm, for example. The crosslinked perfluoroether elastomer is placed on the roughened side surface of the metallic copper substrate, and the metallic copper substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 150 ℃ to form a composite seal assembly. The applied stress is, for example, 10N, the ultrasonic frequency is, for example, 10KHZ, the ultrasonic time is, for example, 1s, and the ultrasonic power is, for example, 5W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree stripping test, the composite sealing assembly prepared under the condition is damaged in the elastomer and is not layered, the sealing assembly is prepared through ultrasonic waves, adhesives are not needed, and the cost is saved.
Referring to fig. 3 and 6, in an embodiment of the present invention, the substrate 4 is, for example, a copper substrate, and the copper substrate is processed into a plane by a CNC process. Then, the metallic copper substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then is roughened by sand blasting, and the surface roughness of the metallic copper substrate is 10 μm, for example. And coating a layer of polyurethane crosslinking agent on the crosslinked perfluoroether elasticity for bonding, and then bonding with the metal copper substrate to form the composite sealing assembly. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing component prepared under the condition has a delamination phenomenon, which indicates that the performance of the adhesive sealing component is not improved by roughening the surface of the substrate 4.
Referring to fig. 3 and 5, in an embodiment of the present invention, the substrate 4 is, for example, a magnesium-aluminum alloy substrate, and the magnesium-aluminum alloy substrate is processed into a plane by a CNC process. Then, after the magnesium-aluminum alloy substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, the magnesium-aluminum alloy substrate is roughened by sand blasting, and the surface roughness of the magnesium-aluminum alloy substrate is 20 μm, for example. The crosslinked perfluoroether elastomer is placed on the roughened side surface of the magnesium aluminum alloy substrate, and the magnesium aluminum alloy substrate and perfluoroether elastomer are heated to, for example, 100 ℃ and bonded using ultrasonic waves to form a composite seal assembly. The applied stress is, for example, 200N, the ultrasonic frequency is, for example, 80KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 80W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing assembly prepared under the condition has internal damage of the elastomer and has no layering phenomenon, and through the ultrasonic composite sealing assembly, the adhesion between the elastomer 3 and the substrate 4 is good, the manufacturing process is simple, and the operation is safe.
Referring to fig. 3 and 6, in one embodiment of the present invention, the substrate 4 is made of, for example, a magnesium-aluminum alloy substrate, and the crosslinked perfluoro ether elastomer and the magnesium-aluminum alloy substrate are heated to, for example, 100 ℃, and bonded by ultrasonic waves to form the composite sealing assembly. The applied stress is, for example, 200N, the ultrasonic frequency is, for example, 80KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 80W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under 180 degree peel test, peel strength is 7.2KN/m, and the elastomer does not have internal damage, show through the ultrasonic sealing subassembly, compare with using the gluing agent, can improve the adhesive force between substrate 4 and elastomer 3, but be weaker than the adhesive force of substrate 4 surface treatment and ultrasonic combined action.
Referring to fig. 3 and 5, in an embodiment of the present invention, a chromium metal substrate is used as the substrate 4, and a groove with a depth of 4mm and a width of 6mm is formed on the chromium metal substrate by a CNC process. Then, the metal chromium substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other steps, and then is subjected to anodic oxidation treatment to roughen the metal chromium substrate, wherein the surface roughness of the metal chromium substrate is 30 μm, for example. The crosslinked perfluoroether elastomer is placed in the groove of the chromium metal substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 80 ℃ to form a composite seal assembly. The applied stress is 130N, the ultrasonic frequency is 50KHZ, the ultrasonic time is 6s, and the ultrasonic power is 15W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the conditions has internal elastomer damage and no delamination phenomenon, which shows that the elastomer 3 can be well adhered to various metal substrates and the elastomer 3 can be embedded in the substrate 4 under the action of ultrasonic waves.
Referring to fig. 3 and 6, in one embodiment of the present invention, the substrate 4 is a metal chromium substrate, for example, and the crosslinked perfluoro ether elastomer and the metal chromium substrate are heated to 80 ℃, for example, and bonded by ultrasonic waves to form the composite sealing assembly. The applied stress is 130N, the ultrasonic frequency is 50KHZ, the ultrasonic time is 6s, and the ultrasonic power is 15W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under 180 DEG peel test, the peel strength is 9.4KN/m, the elastomer 3 has no internal damage, and the adhesive force between the substrate 4 and the elastomer 3 can be improved by selecting different substrates 4 and ultrasonic conditions, but is weaker than the adhesive force of the surface treatment of the substrate 4 and the combined action of ultrasonic waves.
Referring to fig. 3 and 5, in an embodiment of the present invention, a substrate 4 is, for example, a zinc metal substrate, and a groove with a depth of, for example, 3.5mm and a width of, for example, 5mm is formed on the zinc metal substrate by a CNC process. Then, the metal zinc base material is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then the metal zinc base material is roughened by electroplating and sand blasting, and the surface roughness of the metal zinc base material is 70 μm for example. The crosslinked perfluoroether elastomer is placed in the groove of the metallic zinc substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 70 ℃ to form a composite seal assembly. The applied stress is, for example, 160N, the ultrasonic frequency is, for example, 40KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 10W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180 DEG peel test, the composite seal assembly prepared under the conditions showed in-elastomer failure and no delamination, indicating that the elastomer 3 and the substrate 4 were well bonded.
Referring to fig. 3 and 6, in one embodiment of the present invention, the substrate 4 is a metal zinc substrate, for example, and the crosslinked perfluoro ether elastomer and the metal zinc substrate are ultrasonically bonded to form the composite sealing assembly. The heating temperature is 70 ℃ for example, the applied stress is 160N for example, the ultrasonic frequency is 40KHZ for example, the ultrasonic time is 3s for example, and the ultrasonic power is 10W for example. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under 180 DEG peel test, the peel strength is 11.6KN/m, the elastomer 3 has no internal damage, and the adhesive force between the substrate 4 and the elastomer 3 can be improved by selecting different substrates 4 and ultrasonic conditions, but is weaker than the adhesive force of the surface treatment of the substrate 4 and the combined action of ultrasonic waves.
Referring to fig. 4 to 5, in an embodiment of the invention, the substrate 4 is, for example, a teflon substrate, and a groove with a depth of, for example, 4mm and a width of, for example, 3mm is processed on the teflon substrate by a 3D printing process. The polytetrafluoroethylene substrate is then roughened by corona treatment, and the surface roughness of the polytetrafluoroethylene substrate is, for example, 60 μm. The crosslinked perfluoroether elastomer is placed in the groove of the polytetrafluoroethylene substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 70 c to form a composite seal assembly. The applied stress is, for example, 170N, the ultrasonic frequency is, for example, 30KHZ, the ultrasonic time is, for example, 2s, and the ultrasonic power is, for example, 20W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180 DEG peel test, the composite seal assembly prepared under the conditions has internal elastomer damage and no delamination phenomenon, which indicates that the elastomer 3 is well adhered to the polymer substrate, and the elastomer 3 is embedded in the polymer substrate.
Referring to fig. 4 and 6, in one embodiment of the present invention, a substrate 4 is made of teflon, for example, and the crosslinked perfluoro ether elastomer and the teflon substrate are heated to 70 ℃, for example, and bonded by ultrasonic waves to form a composite sealing assembly. The applied stress is, for example, 170N, the ultrasonic frequency is, for example, 30KHZ, the ultrasonic time is, for example, 2s, and the ultrasonic power is, for example, 20W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under 180 DEG peel test, the peel strength is 6.8KN/m, the elastomer has no internal damage, and the adhesion between the polymer substrate and the elastomer 3 can be improved by ultrasonic compounding, but is weaker than the adhesion under the combined action of the surface treatment of the substrate 4 and the ultrasonic.
Referring to fig. 4 to 5, in an embodiment of the invention, the substrate 4 is, for example, a peek substrate, and the peek substrate is processed into a planar substrate by a 3D printing process. The polyetheretherketone substrate is then roughened with a corona treatment and has a surface roughness of, for example, 100 μm. The crosslinked perfluoroether elastomer is placed on a roughened planar surface of a polyetheretherketone substrate and the polyetheretherketone substrate and perfluoroether elastomer are bonded using ultrasound by heating to, for example, 90 ℃ to form a composite seal assembly. The applied stress is, for example, 180N, the ultrasonic frequency is, for example, 60KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 10W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing assembly prepared under the condition has internal damage of the elastomer and has no layering phenomenon, and the crosslinked elastomer 3 is used, so that the preparation of the sealing assembly is facilitated, the production flow is optimized, and the production yield of the composite sealing assembly is improved.
Referring to fig. 4 to 5, in an embodiment of the invention, a polyimide substrate is selected as the substrate 4, and a groove with a depth of 2mm and a width of 3mm is processed on the polyimide substrate by a 3D printing process. The polyimide substrate is then roughened using corona treatment, and the surface roughness of the polyimide substrate is, for example, 30 μm. The crosslinked perfluoroether elastomer is placed in the groove of the polyimide substrate and perfluoroether elastomer are heated, for example to 100 ℃, and ultrasonically bonded to form the composite seal assembly. The applied stress is, for example, 50N, the ultrasonic frequency is, for example, 40KHZ, the ultrasonic time is, for example, 4s, and the ultrasonic power is, for example, 70W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180 DEG peel test, the composite seal assembly prepared under the conditions showed in-elastomer failure and no delamination, indicating that the elastomer 3 and the substrate 4 were well bonded.
Referring to fig. 3 and 5, in one embodiment of the present invention, the substrate 4 is a metal aluminum substrate, and the metal aluminum substrate is processed into a plane by a CNC process. Then, the metal aluminum substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then is roughened by sand blasting, and the surface roughness of the metal aluminum substrate is 40 μm, for example. The crosslinked perfluoroether elastomer is placed on the roughened surface of the metal aluminum substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 60 c to form a composite sealing assembly. The applied stress is 40N, the ultrasonic frequency is 50KHZ, the ultrasonic time is 1s, and the ultrasonic power is 15W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and has no layering phenomenon, and the base material 4 made of the same material can be well bonded with the elastomer 3 by adopting different processing modes, so that the layering phenomenon of the sealing component is reduced.
Referring to fig. 3 and 5, in an embodiment of the present invention, a substrate 4 is made of a zinc-iron alloy, and a groove with a depth of 4mm and a width of 6mm is formed on the zinc-iron alloy substrate by a CNC process. Then, the zinc-iron alloy substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other steps, and then is subjected to anodic oxidation treatment to roughen the zinc-iron alloy substrate, wherein the surface roughness of the zinc-iron alloy substrate is 60 μm, for example. The crosslinked perfluoroether elastomer is placed in the groove of the zinc-iron alloy substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 70 ℃ to form a composite seal assembly. The applied stress is, for example, 10N, the ultrasonic frequency is, for example, 30KHZ, the ultrasonic time is, for example, 5s, and the ultrasonic power is, for example, 10W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and does not have delamination phenomenon, which indicates that the adhesion between the elastomer and the substrate is better.
Referring to fig. 4 to 5, in an embodiment of the invention, a substrate 4 is, for example, a peek substrate, and a groove with a depth of, for example, 2mm and a width of, for example, 4mm is processed on the peek substrate by a 3D printing process. The polyetheretherketone substrate is then roughened with a corona treatment and has a surface roughness of, for example, 30 μm. The crosslinked perfluoroether elastomer is placed in the channel of the polyetheretherketone substrate and perfluoroether elastomer are bonded using ultrasound by heating to, for example, 100 ℃ to form a composite seal assembly. The applied stress is, for example, 50N, the ultrasonic frequency is, for example, 60KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 15W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing assembly prepared under the condition has internal damage of the elastomer and has no layering phenomenon, and the adhesion between the elastomer 3 and the polymer base material is improved and the layering phenomenon of the sealing assembly is reduced by processing the polymer base material.
Referring to fig. 3 and 5, in one embodiment of the present invention, the substrate 4 is, for example, a cdte substrate, and the cdte substrate is processed into a plane by a CNC process. Then, the cadmium-iron alloy base material is subjected to procedures of degreasing, water washing, acid washing, alkali washing, neutralization, drying and the like, and then the cadmium-iron alloy base material is roughened by sand blasting, and the surface roughness of the cadmium-iron alloy base material is 90 μm for example. The crosslinked perfluoroether elastomer is placed on the matte side of the cadmium-iron alloy substrate, and the cadmium-iron alloy substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 70 ℃ to form a composite seal assembly. The applied stress is, for example, 30N, the ultrasonic frequency is, for example, 50KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 2W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under a 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and has no delamination phenomenon, and the adhesion between the substrate 4 and the elastomer 3 is improved through pretreatment and roughening treatment.
Referring to fig. 3 and 5, in one embodiment of the present invention, the substrate 4 is a metal aluminum substrate, and the metal aluminum substrate is processed into a plane by a CNC process. Then, the metal aluminum substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, baking, and the like, and then is roughened by sand blasting, and the surface roughness of the metal aluminum substrate is, for example, 10 μm. The crosslinked perfluoroether elastomer is placed on the roughened surface of the metal aluminum substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 100 c to form a composite sealing assembly. The applied stress is, for example, 20N, the ultrasonic frequency is, for example, 30KHZ, the ultrasonic time is, for example, 1s, and the ultrasonic power is, for example, 1W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and does not have the delamination phenomenon, and the elastomer 3 and the substrate 4 are firmly bonded under the action of ultrasonic waves.
Referring to fig. 3 and 5, in an embodiment of the present invention, the substrate 4 is an al-fe alloy substrate, and a CNC process is used to machine a groove with a depth of 4mm, for example, and a width of 6mm, for example. Then, the aluminum-iron alloy substrate is subjected to degreasing, water washing, acid washing, alkali washing, neutralization, drying and other processes, and then is subjected to sand blasting to roughen the aluminum-iron alloy substrate, wherein the surface roughness of the aluminum-iron alloy substrate is 30 μm, for example. The crosslinked perfluoroether elastomer is placed in the groove of the aluminum-iron alloy substrate and perfluoroether elastomer are bonded using ultrasonic waves by heating to, for example, 60 ℃ to form a composite seal assembly. The applied stress is, for example, 30N, the ultrasonic frequency is, for example, 60KHZ, the ultrasonic time is, for example, 3s, and the ultrasonic power is, for example, 15W. After the composite seal assembly is formed, a peel test is performed on the composite seal assembly. Under the 180-degree peeling test, the composite sealing component prepared under the condition has internal damage of the elastomer and does not have the delamination phenomenon, which shows that under the condition, the adhesive force of the elastomer 3 and the substrate 4 is larger, and the elastomer 3 is embedded in the substrate 4, so that the delamination phenomenon of the composite sealing component is reduced.
In summary, the invention provides a composite sealing assembly and a manufacturing method thereof, wherein the elastomer and the substrate are physically bonded in an ultrasonic manner, so that the mechanical property of the composite sealing assembly is improved, and the composite sealing assembly is simple in process, safe to operate and low in cost. When the composite sealing assembly is applied to semiconductor equipment, sealing failure caused by delamination of the elastomer and the substrate can be avoided, and the reliability of a semiconductor manufacturing process is improved.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. A method of making a composite seal assembly, comprising:
providing a base material;
performing pretreatment and roughening treatment on the surface of the substrate;
placing an elastomer on the treated side of the substrate and heating the substrate and the elastomer to a predetermined temperature; and
consolidating the elastomer with the substrate to form a composite seal assembly.
2. The method of making a composite seal assembly of claim 1, wherein the substrate comprises a metal substrate and a polymer substrate.
3. The method of making a composite seal assembly of claim 2, wherein the pre-treatment of the metal substrate includes at least one of degreasing, water washing, acid washing, base washing, neutralization, and baking.
4. The method of making a composite seal assembly of claim 2, wherein the metal substrate is roughened by at least one of sand blasting, sanding, anodizing, or electrical discharge.
5. The method of making a composite seal assembly of claim 1, wherein the substrate has an average roughness of 10 to 100 μm.
6. The method of making a composite seal assembly of claim 1, wherein the elastomer is a cross-linked elastomer and the predetermined temperature of the substrate and the elastomer is 50-150 ℃.
7. The method of making a composite seal assembly of claim 1, wherein the elastomer curing the substrate includes the steps of:
placing the elastomer on the substrate; and
applying ultrasound and stress to the elastomer.
8. The method of making a composite seal assembly of claim 7, wherein said stress is 10-200N.
9. The method of making a composite seal assembly of claim 7, wherein the ultrasonic waves have a frequency of 10 to 100 KHZ.
10. A composite seal assembly, comprising:
a substrate, wherein one side surface of the substrate is provided as a roughened surface; and
an elastomer, and the elastomer is consolidated on the roughened surface of the substrate.
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| CN112592547A (en) * | 2020-12-16 | 2021-04-02 | 江苏赛尔密封科技股份有限公司 | Anti-aging rubber sealing composite board and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20200009834A1 (en) * | 2017-03-30 | 2020-01-09 | Valqua, Ltd. | Laminate, its manufacturing method, and gate seal |
| CN107599299A (en) * | 2017-08-31 | 2018-01-19 | 歌尔股份有限公司 | A kind of stainless steel of high-bond and the engaging member of plastics and its processing method |
| CN112592547A (en) * | 2020-12-16 | 2021-04-02 | 江苏赛尔密封科技股份有限公司 | Anti-aging rubber sealing composite board and preparation method thereof |
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