CN114242853A - Preparation method of LED device, LED device and display device - Google Patents
Preparation method of LED device, LED device and display device Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
Abstract
The disclosure provides a preparation method of an LED device, the LED device and a display device. The preparation method of the LED device comprises the following steps: arranging a luminous area and a non-luminous area on a substrate of the LED device, wherein the luminous area is a complete table top, and the non-luminous area comprises a first semiconductor layer; arranging a transparent conductive layer according to a preset pattern on one side of the light emitting area far away from the substrate to define a plurality of light emitting units; the plurality of light emitting units each include a transparent conductive layer; and arranging an electrode layer on one sides of the transparent conducting layer and the first semiconductor layer far away from the substrate. According to the technical scheme disclosed by the invention, the pixel position is defined by the graphical transparent conducting layer, so that on one hand, the damage of etching to the side wall of the Mesa is effectively avoided, and the performance of a device is improved; on the other hand, the distance between the Micro-LED chips can be small, so that the pixel density of the device is further improved.
Description
Technical Field
The disclosure relates to the technical field of LEDs, in particular to a preparation method of an LED device, the LED device and a display device.
Background
The Micro Light-Emitting Diode (hereinafter referred to as Micro-LED) has self-luminous display characteristics, is an all-solid-state Light-Emitting Diode, has long service life, high brightness, low power consumption, small volume and ultrahigh resolution, and can be applied to extreme environments such as high temperature or radiation. Compared with the OLED technology which is self-luminous, the Micro-LED has the advantages of high efficiency, long service life, relative stability due to the fact that the material is not easily influenced by the environment, and the phenomenon of ghost shadow can be avoided.
The Micro-LED display technology is a display technology which is used for carrying out Micro-reduction and array on a traditional LED structure and manufacturing a driving circuit by adopting a CMOS integrated circuit process so as to realize addressing control and independent driving on each pixel point. Since various indexes of brightness, contrast, lifetime, response time, viewing angle and resolution of Micro-LEDs are stronger than those of LCD and OLED display technologies, many manufacturers consider them as next generation display technologies and start to be actively laid out.
Micro-LED is along with the continuous diminish of size, and its pixel density (PPI) constantly improves, and traditional Micro-LED technology defines the light emitting area of every pixel through sculpture Mesa structure, and the etched Mesa lateral wall can have certain defect, forms the electric leakage channel easily and increases the leakage current, reduces the device performance, and the channel of sculpture Mesa also lets the distance increase between the pixel, hardly reaches higher pixel density.
Disclosure of Invention
In order to solve at least one of the technical problems mentioned in the background art, the present disclosure provides a method for manufacturing an LED device, and a display apparatus.
According to one aspect of the present disclosure, there is provided a method of manufacturing an LED device, wherein the method includes: arranging a luminous area and a non-luminous area on a substrate of the LED device, wherein the luminous area is a complete table top, and the non-luminous area comprises a first semiconductor layer; arranging a transparent conductive layer according to a preset pattern on one side of the light emitting area far away from the substrate to define a plurality of light emitting units; the plurality of light emitting units each include a transparent conductive layer; and arranging an electrode layer on one sides of the transparent conducting layer and the first semiconductor layer far away from the substrate. The LED device is preferably a Micro-LED device. According to the technical scheme, the pixel position is defined through the graphical transparent conducting layer, so that the influence of Mesa side wall defects caused by etching on the performance of the device is avoided.
Optionally, the transparent conductive layer comprises a nickel/gold double-layer metal layer or an indium tin oxide layer.
Optionally, before the transparent conductive layer is disposed in a preset pattern on a side of the light emitting region away from the substrate, the method further includes: and adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the preset pattern to obtain a plurality of high doping concentration sub-regions, wherein the plurality of high doping concentration sub-regions correspond to the transparent conductive layers of the plurality of light emitting units one to one. According to the technical scheme, the doping concentration of the second semiconductor layer of the light-emitting unit is improved, and the resistance of the second semiconductor layer of the light-emitting unit is reduced, so that current transmission is facilitated, and crosstalk between the light-emitting units is effectively reduced.
Optionally, adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the preset pattern includes: and carrying out laser annealing on the second semiconductor layer of the light-emitting region according to the preset pattern so as to adjust the doping concentration of the second semiconductor layer of the light-emitting region, thereby obtaining a plurality of high-doping-concentration sub-regions. According to the technical scheme, acceptor impurities of the second semiconductor layer of the light-emitting unit are activated through laser annealing, so that the doping concentration of the second semiconductor layer of the light-emitting unit is increased.
Optionally, adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the preset pattern includes: and performing ion implantation on the second semiconductor layer of the light emitting region according to a preset pattern so as to adjust the doping concentration of the second semiconductor layer of the light emitting region, thereby obtaining a plurality of high-doping-concentration sub-regions.
Optionally, the performing ion implantation on the second semiconductor layer of the light emitting region according to the preset pattern includes: and injecting acceptor impurities into the second semiconductor layer of the light emitting region according to the preset pattern. According to the technical scheme, acceptor impurities are injected into the second semiconductor layer of the light-emitting unit, so that the doping concentration of the second semiconductor layer of the light-emitting unit is further improved, and the resistance of the second semiconductor layer of the light-emitting unit is reduced.
Optionally, adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the preset pattern further includes: a rapid anneal is performed after the ion implantation. The rapid annealing is beneficial to repairing damaged crystal lattices, and the performance of the device is further improved.
Optionally, the rapid annealing comprises: annealing at 600-1000 deg.C for 1-30 min.
Optionally, the disposing a transparent conductive layer according to a preset pattern on a side of the light emitting region away from the substrate includes: and arranging the transparent conducting layer on one side of the high-doping-concentration subarea far away from the substrate.
Optionally, after the transparent conductive layer is disposed in a preset pattern on a side of the light emitting region away from the substrate, the method further includes: and performing ion implantation on the second semiconductor layer in the light emitting area by taking the transparent conductive layers as masks so as to improve the resistance of the second semiconductor layer between the transparent conductive layers.
Optionally, after providing the electrode layers on the sides of the transparent conductive layer and the first semiconductor layer away from the substrate, the method further includes: and performing ion implantation on the second semiconductor layer in the light emitting region by taking the transparent conducting layer or the electrode layer as a mask so as to improve the resistance of the second semiconductor layer between the transparent conducting layer and the electrode layer. According to the technical scheme, the resistance of the second semiconductor layer between the light emitting units is increased through ion implantation, so that current transmission is further improved, and crosstalk between the light emitting units is effectively reduced.
Optionally, the ion implanting the second semiconductor layer of the light emitting region includes: and injecting any one or more of He, C, N, O and F into the second semiconductor layer between the light emitting units.
Optionally, after providing the electrode layers on the sides of the transparent conductive layer and the first semiconductor layer away from the substrate, the method further includes: and arranging a passivation layer on one side of the electrode layer far away from the substrate. The passivation layer can protect the electrode layer on one hand, and can protect the side face of the light emitting area on the other hand, and can effectively prevent the first electrode from being electrically connected with the side face of the light emitting area to cause short circuit.
Optionally, after disposing a passivation layer on a side of the electrode layer away from the substrate, the method further includes: and arranging an electrode contact hole on the passivation layer to expose part of the electrode layer. According to the technical scheme, the electrode contact hole is formed in the passivation layer, so that the bonding layer is arranged in the electrode contact hole subsequently, the effective connection between the bonding layer and the electrode layer is guaranteed, and the reduction of the contact area between the bonding layer and the electrode layer is facilitated.
Optionally, after providing an electrode contact hole on the passivation layer to expose a portion of the electrode layer, the method further includes: and arranging a bonding layer in the electrode contact hole so as to enable the bonding layer to be electrically connected with the electrode layer. The bonding layer includes solder. According to the technical scheme, the solder is arranged in the electrode contact holes, so that the solder can be effectively prevented from overflowing in the backflow process, the large-area permeation of the solder to the electrode layer can be avoided, particularly for the public first electrode, the electrode contact holes are selectively formed in the passivation layer on the first electrode, the contact area of the solder and the first electrode is limited, and the influence on the performance of a device due to the fact that the solder permeates to the electrode layer is effectively avoided.
Optionally, after disposing a bonding layer in the electrode contact hole, the method further includes: and bonding the electrode layer and a circuit substrate through the bonding layer, and stripping the substrate.
According to another aspect of the disclosed embodiment, an LED device is also provided. The LED device comprises a light emitting area and a non-light emitting area, wherein the light emitting area comprises a plurality of LED chips, and the LED chips are mutually connected through a semiconductor layer. Wherein, the LED chip is preferably a Micro-LED chip.
Optionally, the semiconductor layer includes a first semiconductor layer, a light emitting layer, and a second semiconductor layer.
Optionally, the resistance of the second semiconductor layer of the LED chip is lower than the resistance of the second semiconductor layer between adjacent LED chips.
Optionally, the doping concentration of the second semiconductor layer of the LED chip is higher than the doping concentration of the second semiconductor layer between adjacent LED chips.
Optionally, the doping concentration of the second semiconductor layer of the LED chip is increased by means of laser annealing.
Optionally, the doping concentration of the second semiconductor layer of the LED chip is increased by means of ion implantation.
Optionally, the ion implantation comprises implanting acceptor impurities into the second semiconductor layer of the LED chip.
Optionally, the resistance of the second semiconductor layer between adjacent LED chips is increased by means of ion implantation.
Optionally, the ion implantation includes implanting any one or more of He, C, N, O, and F into the second semiconductor layer between adjacent LED chips.
Optionally, the LED chip includes a transparent conductive layer and a second electrode, and the transparent conductive layer is disposed between the semiconductor layer and the second electrode.
Optionally, the LED device further includes a first electrode disposed in the non-light emitting region, and the plurality of LED chips are electrically connected to the first electrode through the semiconductor layer.
Optionally, the LED device further comprises a passivation layer disposed on a side of the first and second electrodes away from the semiconductor layer.
Optionally, an electrode contact hole is formed in the passivation layer, and a bonding layer is disposed in the electrode contact hole.
Optionally, the LED device further includes a circuit substrate bonded to the LED chip through the bonding layer.
Optionally, the LED device is prepared by the method for preparing the LED device disclosed by the present disclosure.
According to still another aspect of the disclosed embodiments, there is also provided a display device. The display device comprises the LED device.
According to the preparation method of the LED device and the LED device, the pixel position is defined through the graphical transparent conducting layer, on one hand, damage to the side wall of the Mesa due to etching is effectively avoided, and the performance of the device is improved; on the other hand, the distance between the Micro-LED chips can be small, so that the pixel density of the device is further improved.
In addition, according to the technical scheme, the resistance of the second semiconductor layer of the light-emitting unit is reduced by increasing the doping concentration of the second semiconductor layer, and/or the resistance of the second semiconductor layer between the LED chips is increased by ion implantation, so that the current transmission is effectively improved, the crosstalk between the adjacent LED chips is avoided, and the device performance is improved.
Drawings
The above and other objects, features and advantages of exemplary embodiments of the present disclosure will become readily apparent from the following detailed description read in conjunction with the accompanying drawings. Several embodiments of the present disclosure are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar or corresponding parts and in which:
fig. 1 is a flow chart illustrating a method of making an LED device according to one embodiment of the present disclosure;
2 a-2 d are schematic diagrams illustrating a process flow for the fabrication of an LED device according to one embodiment of the present disclosure;
fig. 3 is a schematic view illustrating a sectional structure of an LED device according to one embodiment of the present disclosure.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may also be oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.
Exemplary embodiments according to the present disclosure will now be described in more detail with reference to the accompanying drawings. These exemplary embodiments may, however, be embodied in many different forms and should not be construed as limited to only the embodiments set forth herein. It is to be understood that these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art, in the drawings, the thicknesses of layers and regions are exaggerated for clarity, and the same devices are denoted by the same reference numerals, and thus the description thereof will be omitted.
The present disclosure provides a method of fabricating an LED device. Referring to fig. 1, fig. 1 is a flowchart illustrating a method of manufacturing an LED device according to one embodiment of the present disclosure. As shown in fig. 1, the method for manufacturing the LED device includes the following steps S101 to S103:
step S101: arranging a luminous area and a non-luminous area on a substrate of the LED device, wherein the luminous area is a complete table top, and the non-luminous area comprises a first semiconductor layer;
step S102: arranging a transparent conductive layer according to a preset pattern on one side of the light emitting area far away from the substrate to define a plurality of light emitting units; the plurality of light emitting units each include a transparent conductive layer;
step S103: and arranging an electrode layer on one sides of the transparent conducting layer and the first semiconductor layer far away from the substrate.
According to the preparation method of the LED device, the pixel position is defined through the graphical transparent conducting layer, so that damage to the side wall of the Mesa caused by etching is avoided, and the performance of the device is effectively improved. In addition, the distance between the Micro-LED chips is controlled by reasonably controlling the distance between the transparent conducting layers, and higher pixel density is obtained while crosstalk between the adjacent Micro-LED chips is reduced.
In step S101, a light emitting region and a non-light emitting region may be disposed on a substrate of the LED device, wherein the light emitting region is a complete mesa, and the non-light emitting region includes a first semiconductor layer.
According to the embodiment of the disclosure, the light emitting region and the non-light emitting region are arranged on the substrate, an epitaxial structure can be obtained by growing on the substrate through an epitaxial growth method, and then the light emitting region and the non-light emitting region are distinguished through etching; or the standard epitaxial wafer is etched to distinguish a light emitting area and a non-light emitting area, wherein the light emitting area comprises a complete table top, the non-light emitting area comprises a first semiconductor layer, and the light emitting area is connected with the non-light emitting area through the first semiconductor layer.
Specifically, the epitaxial layer is grown on the substrate by an epitaxial growth method, for example, an N-type semiconductor layer, a light emitting layer, and a P-type semiconductor layer may be sequentially grown on the substrate by any one of liquid phase epitaxy, metal organic vapor phase epitaxy, and molecular beam epitaxy, thereby obtaining an epitaxial structure. The substrate of the LED device may be any one of a sapphire substrate, a silicon carbide substrate, a gallium arsenide substrate, an aluminum nitride substrate, and a zinc oxide substrate, and a sapphire substrate is preferred in the embodiments of the present disclosure. The sapphire substrate, namely the aluminum oxide substrate, has the advantages of good chemical stability, no absorption of visible light and the like, is low in price, mature in preparation technology, suitable for industrial mass production, and beneficial to reduction of the manufacturing cost of the display substrate.
The standard epitaxial wafer can be obtained by external collection, and preferably, the standard epitaxial wafer with the multiple quantum well structure comprises a substrate, an N-type semiconductor layer, the multiple quantum well structure and a P-type semiconductor layer which are sequentially stacked from bottom to top.
The material of the semiconductor layer may be any suitable semiconductor material, such as gallium nitride (GaN) -based material, or aluminum gallium indium phosphide (AlGaInP) -based material, and is not particularly limited herein. In the embodiment of the present disclosure, the first semiconductor layer is preferably an N-type semiconductor layer, and the second semiconductor layer is preferably a P-type semiconductor layer. Preferably, an undoped semiconductor layer can be added between the substrate and the N-type semiconductor layer to reduce lattice mismatch and thermal stress mismatch between the N-type semiconductor layer and the substrate and facilitate substrate stripping; a carrier limiting layer can be added between the P-type semiconductor layer and the light-emitting layer so as to improve the carrier transmission capability and improve the light-emitting efficiency of the device. Taking GaN-based semiconductor materials as an example, the substrate can be a sapphire substrate, the undoped semiconductor layer can be a U-GaN layer, the N-type semiconductor layer can be an N-GaN layer, the light emitting layer can be a multiple quantum well structure, the carrier confining layer can be a P-type Al-doped GaN layer, and the P-type semiconductor layer can be a P-GaN layer, wherein the P-GaN layer can be a Mg-doped GaN layer.
The epitaxial structure or the standard epitaxial wafer is etched to distinguish a light emitting region from a non-light emitting region, for example, a large light emitting mesa, i.e., the light emitting region, is obtained by etching the middle of the substrate by using photoresist or silicon dioxide as a mask through an Inductively Coupled Plasma (ICP) etching method, wherein the non-light emitting region is located at the periphery of the light emitting region. Wherein the etching gas may include Cl2、BCl3Ar, the etching depth can extend to the interface of the first semiconductor layer and the light-emitting layer, so that the light-emitting region comprises an N-type semiconductor layer, the light-emitting layer (for example, a multi-quantum well structure) and a P-type semiconductor layer, and the non-light-emitting region comprises the N-type semiconductor layer; the area ratio of the light emitting region to the non-light emitting region can be set according to actual needs, and the shape of the top view projection of the light emitting region can be square, circular, oval, polygonal, and the like, and is not particularly limited herein. It is understood that the light emitting region and the non-light emitting region are in phase with each other through the N-type semiconductor layerAnd the etching depth is slightly lower than the interface between the N-type semiconductor layer and the light-emitting layer, so that the technical scheme of the disclosure can be realized.
Referring to fig. 2a, a standard epitaxial wafer 100 includes a substrate 101, an undoped semiconductor layer 102, an N-type semiconductor layer 103, a light emitting layer 104, and a P-type semiconductor layer 105; the standard epitaxial wafer 100 is etched to obtain a light emitting region 200 (shown by a dotted line frame), wherein the etching depth extends to the N-type semiconductor layer 103; the non-light emitting region 300 is located at the periphery of the light emitting region 200, and includes the exposed N-type semiconductor layer 103.
In step S102, a transparent conductive layer may be disposed in a predetermined pattern on a side of the light emitting region away from the substrate to define a plurality of light emitting cells; the plurality of light emitting cells each include a transparent conductive layer.
According to the embodiment of the disclosure, the transparent conductive layer is arranged in a preset pattern on one side of the light emitting area far away from the substrate, so that the pixel position is defined through the transparent conductive layer. The preset pattern may be a pattern in which light emitting units (i.e., pixels) are disposed in the light emitting region, which is preset according to actual needs, and includes information such as the number, size, position, pitch, and shape of the top-view projection of the light emitting units.
Specifically, a photoresist may be disposed in a predetermined pattern in a light emitting region, and then a transparent conductive layer may be deposited on the second semiconductor layer by using electron beam evaporation, plasma sputtering, thermal evaporation, or the like. The transparent conductive layer may be selected from any suitable transparent conductive material, for example, a nickel/gold double metal layer or an Indium Tin Oxide (ITO) layer, which is preferred in embodiments of the present disclosure.
Preferably, after the transparent conductive layer is deposited, the transparent conductive layer may be annealed by a rapid annealing method to make the transparent conductive layer in ohmic contact with the second semiconductor layer.
Specifically, under the condition that the transparent conductive layer is a nickel/gold double-layer structure metal layer, at the temperature of 550-580 ℃, N is carried out2Treating in gas environment for 4-6min, and placing in N2And O2Treating in mixed gas environment for 4-8min, wherein N2And O2In a volume ratio of 3-5:1, at mostThen quickly cooling; under the condition that the transparent conductive layer is ITO, the transparent conductive layer is placed in O at the temperature of 550-650 DEG C2Treating for 200-400s in a gas environment to oxidize the ITO, and then placing the ITO at the temperature of 700-800 ℃ in N2And treating for 25-35s in a gas environment to obtain the ITO alloy. The transparent conducting layer is annealed, so that the conductivity of the transparent conducting layer can be further improved, and ohmic contact between the transparent conducting layer and the P-type semiconductor layer is realized, so that current transmission is further improved, and crosstalk among the light-emitting units is reduced; in addition, the annealing treatment can reduce the resistance of the N-type semiconductor layer, and is beneficial to improving the photoelectric performance of the LED device.
Referring to fig. 2b, a transparent conductive layer 106 is deposited over the P-type semiconductor layer 105 according to a preset pattern, wherein the transparent conductive layer 106 may be an ITO layer, and includes a plurality of small ITO regions constituting an ITO array, and the ITO covered portion forms a light emitting cell, i.e., the light emitting region 200 is divided into a plurality of light emitting cells each including an ITO layer according to the pattern of the ITO array. It should be understood that the number of the light emitting units shown in fig. 2b is merely exemplary and is not limited thereto.
In order to further avoid crosstalk between adjacent light emitting cells, the embodiments of the present disclosure reduce the resistance of the second semiconductor layer of the light emitting cells and/or increase the resistance of the second semiconductor layer between the light emitting cells, so that the lateral resistance is relatively increased, thereby allowing current to be vertically transmitted from the transparent conductive layer to the first semiconductor layer, effectively improving current transmission, and reducing crosstalk between the light emitting cells. In the embodiment of the present disclosure, the doping concentration of the second semiconductor layer in the light emitting region is adjusted according to the preset pattern to obtain a plurality of high doping concentration sub-regions, which are pixel regions, and the resistance of the second semiconductor layer of the light emitting unit is reduced by increasing the doping concentration of the second semiconductor layer in the pixel regions (i.e., light emitting unit regions); and/or performing ion implantation on the second semiconductor layer between the transparent conductive layers or the electrode layers to improve the resistance of the second semiconductor layer between the light emitting units. And the doping concentration of the second semiconductor layer in the pixel region can be increased by laser annealing and ion implantation. As described in detail below.
In a specific embodiment, before the transparent conductive layer is disposed, laser annealing is performed on the second semiconductor layer of the light emitting region according to a preset pattern, so as to obtain a plurality of high doping concentration sub-regions. Specifically, according to a preset pattern, selective area laser annealing is performed only on the second semiconductor layer of the pixel area (i.e., the area of the light emitting unit), so that doping of acceptor impurities is activated, the doping concentration of the second semiconductor layer of the pixel area is increased, and the resistance is reduced, thereby facilitating guiding current to vertically transmit and avoiding crosstalk between pixels (i.e., the light emitting units).
In another specific embodiment, before the transparent conductive layer is disposed, ion implantation is performed on the second semiconductor layer in the light emitting region according to a preset pattern, that is, acceptor impurities are implanted into the second semiconductor layer in the light emitting region according to the preset pattern, so that the doping concentration of the second semiconductor layer in the pixel region is increased. Specifically, according to a preset pattern, acceptor impurities are additionally injected only for the second semiconductor layer of the pixel region, so that the doping concentration of the second semiconductor layer of the pixel region is increased, the resistance of the second semiconductor layer of the pixel region is reduced, and further, the vertical transmission of current is guided, and crosstalk between pixels is avoided.
It is understood that acceptor impurities differ for different semiconductor materials. In the embodiment of the present disclosure, the second semiconductor layer is a P-type semiconductor layer, and the acceptor impurity is an impurity atom having fewer valence electrons than the main semiconductor material. After the semiconductor is doped with the acceptor impurities, the acceptor impurities are ionized, so that the number of conductive holes in a valence band is increased, and the conductivity of the semiconductor is enhanced. Taking P-GaN as an example, the acceptor impurity may be Mg atoms, the Mg atom doping concentration increases, and the resistance of P-GaN decreases. In the two specific embodiments, the Mg atoms of the P-GaN layer in the pixel region may be activated by selective region laser annealing, and/or the Mg doping concentration of the P-GaN layer in the pixel region may be further increased by selective region ion implantation, so that the resistance of the P-GaN layer in the pixel region is reduced, the lateral resistance is increased, the vertical transmission of current is promoted, and crosstalk between pixels is avoided.
Specifically, in the case where Mg atoms of the P-GaN layer of the pixel region are activated by selective area laser annealing, the doping concentration of the P-GaN layer can be controlled by controlling parameters such as laser energy, laser annealing time, and the like; in the case where the Mg doping concentration of the P-GaN layer of the pixel region is further increased by the selective area ion implantation, the depth of the ion implantation and the doping concentration in the P-GaN layer can be controlled by controlling the energy, time, etc. of the ion implantation, for example, when the thickness of the P-GaN is 0.1 to 20 μm and the implantation depth is the thickness of the P-GaN, the energy of the ion implantation is preferably 10 to 500keV and the time of the ion implantation is preferably 1 to 10 min. After ion implantation is completed, the damaged crystal lattice can be repaired by rapid annealing, wherein the annealing temperature is preferably 600-1000 ℃, and the annealing time is preferably 1-30 min. According to the embodiment of the disclosure, by optimizing parameters such as temperature and time of rapid annealing, not only can the crystal lattice be self-recombined in a thermal environment to repair ion implantation damage, but also decomposition of GaN at a high temperature can be effectively inhibited, and acceptors can be effectively activated and are favorable for uniform distribution of the acceptors.
After the resistance of the second semiconductor layer of the pixel region is reduced by adopting one or two of the two modes, the transparent conductive layer is arranged at the corresponding position on the second semiconductor layer, and then a plurality of light-emitting units which accord with the preset pattern are obtained.
In another specific embodiment, after the transparent conductive layer is disposed, ion implantation may be performed on the second semiconductor layer between the light emitting units by using the transparent conductive layer as a mask to increase the resistance thereof, so as to promote vertical current transmission and prevent crosstalk between pixels. Specifically, any one or more materials that can increase the resistance thereof, for example, any one or more of He, C, N, O, and F, may be implanted into the second semiconductor layer between the light emitting cells; the depth and doping concentration of the ion implantation in the second semiconductor layer can be controlled by controlling the energy, time, etc. of the ion implantation, for example, when the second semiconductor layer is a P-GaN layer, the energy of the ion implantation is preferably 10-500keV and the time of the ion implantation is preferably 3-10min when the thickness of the P-GaN layer is 0.1-20 μm and the implantation depth is P-GaN.
It will be appreciated that the increase in resistance of the second semiconductor layer between the pixel regions by selective area ion implantation may also be performed before the transparent conductive layer is provided, for example a suitable mask may be selected to selectively implant ions into the second semiconductor layer between the pixel regions. The specific ion implantation method may be similar, and is not described herein again. In addition, the above solutions do not conflict with each other, that is, before the transparent conductive layer is disposed, selective area laser annealing is performed on the second semiconductor layer of the pixel area, and/or the doping concentration of the second semiconductor layer of the pixel area is further increased by selective area ion implantation, and/or the resistance of the second semiconductor layer between the pixel areas is increased by selective area ion implantation; and/or after the transparent conductive layer is arranged, the resistance of the second semiconductor layer between the pixel regions is improved through selective region ion implantation, and the technical scheme of the application can be realized.
In step S103, an electrode layer may be provided on a side of the transparent conductive layer and the first semiconductor layer away from the substrate.
According to the embodiments of the present disclosure, the electrode layers may be deposited on the transparent conductive layer of the light emitting cell and the first semiconductor layer of the non-light emitting region as the second electrode and the first electrode, respectively, by one deposition process; the second electrode and the first electrode may also be deposited on the transparent conductive layer of the light emitting unit and the first semiconductor layer of the non-light emitting region, respectively, by two deposition processes. In the embodiment of the disclosure, the first semiconductor layer is an N-type semiconductor layer, the first electrode is an N-electrode, and the second electrode is a P-electrode.
Specifically, an electrode layer is disposed on the transparent conductive layer of the light emitting unit and the first semiconductor layer of the non-light emitting region, and an electrode material may be evaporated onto the transparent conductive layer of the light emitting unit and the first semiconductor layer of the non-light emitting region by, for example, electron beam evaporation, plasma sputtering, or thermal evaporation, so as to form P electrodes and common N electrodes corresponding to the light emitting units one to one. The electrode material may be one or more of metals such as titanium, aluminum, gold, chromium, nickel, platinum, palladium, iron, and the like. The light emitting unit is electrically connected with the common N electrode through a semiconductor layer, wherein the semiconductor layer comprises an N-type semiconductor layer, a light emitting layer (which can be of a multi-quantum well structure) and a P-type semiconductor layer.
Referring to fig. 2c, a P electrode 107 is disposed on the transparent conductive layer 106 of the light emitting unit, and an N electrode 108 is disposed on the N-type semiconductor layer 103 of the non-light emitting region 300, wherein the P electrode 107 and the transparent conductive layer 106 correspond to each other one by one, and the top view projection shapes of the P electrode 107 and the N electrode 108 can be set according to actual needs, for example, the top view projection shape of the P electrode 107 can be square, circular, square with rounded corners, polygonal, etc., and the top view projection shape of the N electrode 108 can be strip, oblong, etc. The P-electrode 107 and the N-electrode 108 can be made of any suitable electrode material, and the materials of the two can be the same or different, and can be a single metal layer or a plurality of metal layers.
In an alternative embodiment, in order to effectively avoid crosstalk between pixels, after the electrode layer is disposed, the transparent conductive layer and/or the electrode layer is used as a mask to perform ion implantation on the second semiconductor layer between the light emitting units, so as to increase the resistance thereof, thereby promoting vertical transmission of current. Specifically, any one or more materials that can increase the resistance thereof, for example, any one or more of He, C, N, O, and F, may be implanted into the second semiconductor layer between the light emitting cells; the depth of ion implantation and the doping concentration in the second semiconductor layer can be controlled by controlling the energy, time, etc. of ion implantation, for example, when the second semiconductor layer is a P-GaN layer, the energy of ion implantation is preferably 10-500keV when the thickness of P-GaN is 0.1-20 μm and the implantation depth is the thickness of P-GaN, the time of ion implantation is preferably 3-10min, and the implantation width is limited by the interval of the electrode layer and/or the transparent conductive layer. It should be understood that the sizes of the transparent conductive layer and the electrode layer may be the same or different, in general, the size of the electrode layer is slightly smaller than that of the transparent conductive layer, and the overlooking projection shape of the electrode layer may also be set according to actual needs, in this case, the transparent conductive layer may be used as a mask to perform ion implantation on the second semiconductor layer between the light emitting units, or other masks may also be additionally provided, which is not limited in this disclosure.
It is to be understood that, in the embodiments of the present disclosure, one of several schemes used for reducing crosstalk between pixels may be optionally implemented, and two or more schemes may also be optionally implemented in combination, and the present disclosure is not particularly limited.
As an optional embodiment, the method for manufacturing an LED device further comprises: arranging a passivation layer on one side of the electrode layer far away from the substrate; an electrode contact hole is formed in the passivation layer, and a part of the electrode layer is exposed; a bonding layer is arranged in the electrode contact hole; and bonding the electrode layer and a circuit substrate through the bonding layer, and stripping the substrate.
Specifically, a passivation layer is deposited on the electrode layer by using a Plasma Enhanced Chemical Vapor Deposition (PECVD) method or an Atomic Layer Deposition (ALD) method to protect the electrode layer, wherein the passivation layer may be made of silicon dioxide, silicon nitride, aluminum oxide, or other materials; then, etching an electrode contact hole on the passivation layer by adopting a dry etching and/or wet etching mode to expose part of the P electrode and the N electrode, wherein the position, the overlooking projection shape, the number and the like of the electrode contact hole can be set according to actual requirements, and are not particularly limited; and finally, depositing a bonding layer at the electrode contact hole by adopting a photoetching stripping method, wherein the bonding layer can adopt one or more of metals such as indium, titanium, aluminum, nickel, gold, chromium, platinum and the like. The embodiment of the disclosure adopts the mode of arranging the passivation layer and selectively opening holes on the passivation layer, thereby not only being beneficial to protecting the electrode layer and the light emitting area, but also limiting the contact area of the solder and the electrode layer and avoiding the influence of the permeation of the solder and the electrode layer on the conductivity of the electrode layer. In addition, the bonding layer arranged in the electrode contact hole can effectively prevent the solder from overflowing in the reflow process, so that the solder is promoted to form spherical or hemispherical salient points, and the subsequent bonding with the circuit substrate is facilitated.
Further, after the electrode layer is bonded to the circuit board via the bonding layer, the substrate is peeled off. The substrate stripping method can adopt any one of the prior art, including but not limited to laser stripping, dry etching, wet etching and the like, and laser stripping is preferred.
It is understood that any other suitable bonding technique may be used in the present disclosure, for example, bonding an electrode layer to a bonding region of a circuit substrate.
As shown in fig. 2d, a passivation layer 109 is provided on the sides of the P-electrode 107 and the N-electrode 108 facing away from the substrate; selectively opening electrode contact holes 110 on the passivation layer 109, arranging indium solder in the electrode contact holes 110, and forming bumps 111 from the indium solder through a reflow process; the P-electrode 107 and the N-electrode 108 are bonded to the circuit board 400 through the bumps 111, respectively, and the substrate is peeled off. It should be understood that the number of the light emitting units in fig. 2d is only exemplary and is not limited herein.
According to the preparation method of the LED device, the pixel position is defined through the graphical transparent conducting layer, on one hand, damage to the side wall of the Mesa due to etching is effectively avoided, and the performance of the device is improved; on the other hand, the distance between the Micro-LED chips can be small, so that the pixel density of the device is further improved. In addition, the present disclosure increases the resistance of the second semiconductor layer between the LED chips by increasing the doping concentration of the second semiconductor layer of the light emitting unit to reduce the resistance thereof, and/or increases the resistance of the second semiconductor layer between the LED chips by ion implantation, thereby effectively improving current transmission, avoiding crosstalk between adjacent LED chips, and improving device performance.
The present disclosure also provides an LED device. The LED device can be prepared by the preparation method of the LED device or any other suitable method.
As shown in fig. 3, the LED device 500 includes a light emitting region 200 and a non-light emitting region 300, wherein the light emitting region 200 includes a plurality of LED chips connected to each other through a semiconductor layer. Wherein the semiconductor layers include an N-type semiconductor layer 103 (i.e., a first semiconductor layer), a light emitting layer 104 (which may be, for example, a multiple quantum well structure), and a P-type semiconductor layer 105 (i.e., a second semiconductor layer); the LED chip is preferably a Micro-LED chip. It should be understood that the number of LED chips in fig. 3 is merely exemplary and not limiting. Preferably, the semiconductor layer may further include an undoped semiconductor layer 102 to reduce lattice mismatch and thermal stress mismatch between the N-type semiconductor layer and the substrate and facilitate substrate lift-off.
According to the LED device, the Micro-LED chips are formed without etching and are mutually connected through the semiconductor layer, so that the damage of etching to the side wall of the Mesa is effectively avoided, and the performance of the device is improved; and the distance between the Micro-LED chips can be small, so that the pixel density of the device is further improved.
Further, the resistance of the second semiconductor layer of the LED chip is smaller than that of the second semiconductor layer between adjacent LED chips, so that the lateral resistance is larger, the current is promoted to be vertically transmitted, and crosstalk between pixels (i.e., Micro-LED chips) is effectively prevented.
In an alternative embodiment, the doping concentration of the second semiconductor layer of the LED chip is higher than that of the second semiconductor layer between adjacent LED chips. The doping concentration refers to the doping concentration of acceptor impurities in the second semiconductor layer, the resistance of the second semiconductor layer of the LED chip is reduced by improving the doping concentration of the second semiconductor layer, so that the resistance of the second semiconductor layer is lower than that of the second semiconductor layer between adjacent LED chips, the current is easier to vertically transmit, and the crosstalk between the adjacent LED chips is effectively prevented. The doping concentration of the second semiconductor layer of the LED chip may be increased by means of laser annealing and/or ion implantation.
In one mode, before the transparent conductive layer is arranged, laser annealing is performed on the second semiconductor layer of the light emitting region according to a preset pattern, so that a plurality of high-doping-concentration sub-regions are obtained. Specifically, according to a preset pattern, selective area laser annealing is performed only on the second semiconductor layer of the pixel area (i.e., the area of the light emitting unit), so that doping of acceptor impurities is activated, the doping concentration of the second semiconductor layer of the pixel area is increased, and the resistance is reduced, thereby facilitating guiding current to vertically transmit and avoiding crosstalk between pixels (i.e., the light emitting units).
In another mode, before the transparent conductive layer is disposed, ion implantation is performed on the second semiconductor layer in the light emitting region according to a preset pattern, that is, acceptor impurities are implanted into the second semiconductor layer in the light emitting region according to the preset pattern, so that the doping concentration of the second semiconductor layer in the pixel region is increased. Specifically, according to a preset pattern, acceptor impurities are additionally injected only for the second semiconductor layer of the pixel region, so that the doping concentration of the second semiconductor layer of the pixel region is increased, the resistance of the second semiconductor layer of the pixel region is reduced, and further, the vertical transmission of current is guided, and crosstalk between pixels is avoided.
The preset pattern may be a pattern preset according to actual needs, where the light emitting units are disposed in the light emitting region, and includes information such as the number, size, position, spacing, and shape of the top-view projection of the light emitting units. The acceptor impurity of the P-type semiconductor layer is an impurity atom having a smaller number of valence electrons than the main semiconductor material. After the semiconductor is doped with the acceptor impurities, the acceptor impurities are ionized, so that the number of conductive holes in a valence band is increased, and the conductivity of the semiconductor is enhanced. Taking P-GaN as an example, the acceptor impurity may be Mg atoms, the Mg atom doping concentration increases, and the resistance of P-GaN decreases. In the two modes, the Mg atoms of the P-GaN layer of the pixel region can be activated through selective region laser annealing, and/or the Mg doping concentration of the P-GaN layer of the pixel region is further improved through selective region ion implantation, so that the resistance of the P-GaN layer of the pixel region is reduced, the transverse resistance is increased, the vertical transmission of current is promoted, and the crosstalk between pixels is avoided.
In another alternative embodiment, the resistance of the second semiconductor layer between the adjacent LED chips is increased by ion implantation, so that the lateral resistance is increased, the current is more easily vertically transmitted from the LED chips, and crosstalk between the adjacent LED chips is avoided.
Specifically, any one or more materials capable of increasing the resistance of the second semiconductor layer between the LED chips can be implanted by means of ion implantation, for example, one or more of He, C, N, O, and F; the depth and doping concentration of the ion implantation in the second semiconductor layer can be controlled by controlling the energy, time and the like of the ion implantation, so that the resistance of the second semiconductor layer between the light emitting units is reasonably controlled, the vertical transmission of current is promoted, and the crosstalk between pixels is prevented. The process can be carried out before and/or after the transparent conducting layer and/or the electrode layer is arranged, and if the process is carried out after the transparent conducting layer and/or the electrode layer is arranged, the transparent conducting layer or the electrode layer can be used as a mask, other extra masks are not needed, so that the process can be saved, and the preparation cost can be reduced.
It is to be understood that, in the embodiments of the present disclosure, one of several schemes used for reducing crosstalk between pixels may be optionally implemented, and two or more schemes may also be optionally implemented in combination, and the present disclosure is not particularly limited.
Further, the LED chip includes a transparent conductive layer 106 and a P-electrode 107 (i.e., a second electrode), wherein the transparent conductive layer 106 is disposed between the P-type semiconductor layer 105 and the P-electrode 107.
Further, the LED device 500 further includes an N-electrode 108 (i.e., a first electrode), the N-electrode 108 is disposed in the non-light emitting region 300, and the plurality of LED chips are electrically connected to the N-electrode 108 through the semiconductor layer.
Further, the LED device 500 further includes a passivation layer 109, where the passivation layer 109 is disposed on a side of the N electrode 108 and the P electrode 107 away from the semiconductor layer to protect the N electrode 108 and the P electrode 107; the passivation layer 109 is provided with an electrode contact hole 110, and a bump 111 is disposed in the electrode contact hole 110.
Further, the LED device 500 further includes a circuit substrate 400, and the circuit substrate 400 is bonded to the LED chip through the bump 111.
The present disclosure also provides a display device. The display device comprises the above LED device, which may comprise an array of Micro-LED chips. The display device may be, for example, a display screen applied to an electronic apparatus. The electronic device may include: any equipment with a display screen, such as a smart phone, a smart watch, a notebook computer, a tablet computer, a vehicle event data recorder, a navigator and the like.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
Claims (23)
1. A method of making an LED device, wherein the method comprises:
arranging a luminous area and a non-luminous area on a substrate of the LED device, wherein the luminous area is a complete table top, and the non-luminous area comprises a first semiconductor layer;
arranging a transparent conductive layer according to a preset pattern on one side of the light emitting area far away from the substrate to define a plurality of light emitting units; the plurality of light emitting units each include a transparent conductive layer;
and arranging an electrode layer on one sides of the transparent conducting layer and the first semiconductor layer far away from the substrate.
2. The method for manufacturing an LED device according to claim 1, wherein before the transparent conductive layer is provided in a preset pattern on a side of the light emitting region away from the substrate, the method further comprises:
and adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the preset pattern to obtain a plurality of high doping concentration sub-regions, wherein the plurality of high doping concentration sub-regions correspond to the transparent conductive layers of the plurality of light emitting units one to one.
3. The method for manufacturing an LED device according to claim 2, wherein adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the predetermined pattern comprises:
and carrying out laser annealing on the second semiconductor layer of the light-emitting region according to the preset pattern so as to adjust the doping concentration of the second semiconductor layer of the light-emitting region, thereby obtaining a plurality of high-doping-concentration sub-regions.
4. The method for manufacturing an LED device according to claim 2, wherein adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the predetermined pattern comprises:
and performing ion implantation on the second semiconductor layer of the light emitting region according to the preset pattern so as to adjust the doping concentration of the second semiconductor layer of the light emitting region, thereby obtaining a plurality of high-doping-concentration sub-regions.
5. The method for manufacturing an LED device according to claim 4, wherein the ion implantation of the second semiconductor layer of the light emitting region according to the predetermined pattern comprises:
and injecting acceptor impurities into the second semiconductor layer of the light emitting region according to the preset pattern.
6. The method for manufacturing an LED device according to claim 4, wherein adjusting the doping concentration of the second semiconductor layer of the light emitting region according to the predetermined pattern further comprises:
a rapid anneal is performed after the ion implantation.
7. The method of manufacturing an LED device according to claim 6, wherein said rapid annealing comprises:
annealing at 600-1000 deg.C for 1-30 min.
8. The method for manufacturing an LED device according to any one of claims 2 to 7, wherein providing a transparent conductive layer in a preset pattern on a side of the light emitting region remote from the substrate comprises:
and arranging the transparent conducting layer on one side of the high-doping-concentration subarea far away from the substrate.
9. The method for manufacturing an LED device according to claim 1, wherein after providing an electrode layer on a side of the transparent conductive layer and the first semiconductor layer away from the substrate, the method further comprises:
and performing ion implantation on the second semiconductor layer in the light emitting region by taking the transparent conducting layer or the electrode layer as a mask so as to improve the resistance of the second semiconductor layer between the transparent conducting layer and the electrode layer.
10. The method for manufacturing an LED device according to claim 9, wherein the ion implantation of the second semiconductor layer of the light emitting region comprises:
and injecting any one or more of He, C, N, O and F into the transparent conductive layer or the second semiconductor layer between the electrode layers.
11. The method for manufacturing an LED device according to claim 1, wherein after providing an electrode layer on a side of the transparent conductive layer and the first semiconductor layer away from the substrate, the method further comprises:
and arranging a passivation layer on one side of the electrode layer far away from the substrate.
12. The method of making an LED device according to claim 11, wherein after disposing a passivation layer on a side of the electrode layer remote from the substrate, the method further comprises:
an electrode contact hole is formed in the passivation layer, and a part of the electrode layer is exposed;
and arranging a bonding layer in the electrode contact hole so as to enable the bonding layer to be electrically connected with the electrode layer.
13. The method for manufacturing an LED device according to claim 12, wherein after providing a bonding layer within the electrode contact hole, the method further comprises:
and bonding the electrode layer and a circuit substrate through the bonding layer, and stripping the substrate.
14. An LED device, wherein the LED device is prepared by the method of any one of claims 1 to 13.
15. The LED device of claim 14, wherein said LED device comprises a light emitting region and a non-light emitting region, said light emitting region comprising a plurality of LED chips, said plurality of LED chips being interconnected by a semiconductor layer.
16. The LED device of claim 15, wherein the semiconductor layers comprise a first semiconductor layer, a light emitting layer, and a second semiconductor layer.
17. The LED device of claim 16, wherein the second semiconductor layers of said LED chips have a lower resistance than the second semiconductor layers between adjacent said LED chips.
18. The LED device of claim 17, wherein the doping concentration of the second semiconductor layers of the LED chips is higher than the doping concentration of the second semiconductor layers between adjacent LED chips.
19. The LED device of claim 18, wherein the doping concentration of the second semiconductor layer of the LED chip is increased by means of laser annealing or ion implantation.
20. The LED device of claim 17 wherein the resistance of the second semiconductor layer between adjacent LED chips is increased by means of ion implantation.
21. The LED device of claim 15, wherein said LED chip comprises a transparent conductive layer and a second electrode, said transparent conductive layer disposed between said semiconductor layer and said second electrode.
22. The LED device of claim 21, wherein said LED device further comprises a first electrode disposed in said non-light emitting region, said plurality of LED chips being electrically connected to said first electrode through said semiconductor layer.
23. A display apparatus, wherein the display apparatus comprises the LED device of any one of claims 14 to 22.
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