CN114235942A - Vacuum ultraviolet lamp structure, preparation method thereof and photoionization sensor - Google Patents

Vacuum ultraviolet lamp structure, preparation method thereof and photoionization sensor Download PDF

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Publication number
CN114235942A
CN114235942A CN202111667910.1A CN202111667910A CN114235942A CN 114235942 A CN114235942 A CN 114235942A CN 202111667910 A CN202111667910 A CN 202111667910A CN 114235942 A CN114235942 A CN 114235942A
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vacuum ultraviolet
electrode
contact
ultraviolet lamp
contact member
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王辰
刘凤俊
刘洋
吴涛
袁丁
吴红彦
夏征
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Ht Nova Co ltd
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Ht Nova Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • G01N27/66—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber and measuring current or voltage

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Abstract

The invention relates to the technical field of photoionization gas detection, in particular to a vacuum ultraviolet lamp structure, a preparation method thereof and a photoionization sensor, wherein a vacuum ultraviolet window is arranged at an opening at one end of a glass shell of the vacuum ultraviolet lamp, a closed cavity is formed inside the glass shell of the vacuum ultraviolet lamp, and working gas is filled in the cavity; the surface of the vacuum ultraviolet window is fixedly provided with a first contact member, a second contact member and a collecting electrode structure, the collecting electrode structure comprises at least two groups of mutually insulated electrode structures, and the first contact member and the second contact member are respectively electrically connected with the two groups of electrode structures. The invention has the beneficial effects that: the ionization chamber, the collecting electrode structure and the vacuum ultraviolet lamp glass shell are combined into a whole, so that the ionization and the collection of chemical gas in situ are realized, the photoionization and ion collection structures of the photoionization sensor are greatly simplified, and the structural quantity and the complexity of parts of the ionization chamber are reduced.

Description

Vacuum ultraviolet lamp structure, preparation method thereof and photoionization sensor
Technical Field
The invention relates to the technical field of photoionization gas detection, in particular to a vacuum ultraviolet lamp structure, a preparation method thereof and a photoionization sensor.
Background
A photoionization detector (PID) is a sensor for detecting a variety of chemical gases. The core principle is that the detected gas absorbs photons higher than the ionization energy of gas molecules in an ionization region in the PID sensor and is ionized into positive ions and electrons, the positive ions and the electrons directionally migrate to a collecting electrode under the action of an external electric field to form weak ion current, and the current can be output as a voltage signal after being further amplified. In a certain concentration range, the gas concentration is in positive correlation with the ion current, so that the gas can be detected through the amplified voltage value.
The gas detection method has the advantages of quasi-real-time response, nondestructive detection, multiple detectable gas types and the like, and becomes a common gas chromatography post-stage detector in the last 80-90 years. In recent years, the principle is applied to independent detection equipment by the American RAE company to perform online or on-site inspection, personnel safety protection and other works, so that a relatively ideal detection effect is realized. Further, the volume and weight of the Baseline series micro-sensors of Ion Science and Ametek Mocon are further reduced, and the micro PID sensor is developed into a plug-in type sensor compatible with various devices.
A typical PID device comprises a power supply input module, a vacuum ultraviolet lamp, an exciting circuit, an ion collecting electrode and a signal amplifying module. The main processes are respectively ultraviolet light generation process and ion collection and detection process. The ionization energy of common organic gas molecules is generally concentrated between 8-11eV, so that vacuum ultraviolet light with photon energy exceeding 10eV is selected to ionize the detected gas. While the emission spectrum of Kr atom has two bright lines (123.6 nm and 118.0nm respectively) at 10.0eV and 10.6eV, the energy cannot ionize molecules such as water, oxygen, nitrogen, carbon dioxide, etc. in the air, but can effectively ionize most organic substances and part of inorganic substances, and thus is suitable for being used as an ultraviolet light source. In addition, ultraviolet light output can be realized by triggering plasma transition of Kr gas of the package through high-frequency alternating current without an additional pin, so that the method is suitable for equipment miniaturization.
Although the current micro PID sensor is widely applied, because the internal space is small and the structure is complex, the penetration distance of vacuum ultraviolet light in the air is only several millimeters, the diameter is also only several millimeters, and the molecules to be detected need to be fully ionized in the space range, migrate under the action of an electric field and be collected by an ion collecting electrode, and meanwhile, the ion current is only in the picoampere level, so that the ion collecting electrode is required to have extremely low leakage current, and the response reliability to low-concentration gas is improved.
At present, a common design method is to process a tiny electrode plate to serve as a collecting electrode, fix the collecting electrode by using a non-conductive structural member, and construct a voltage difference in a spatial horizontal or vertical ultraviolet light emitting direction so as to directly collect charged particles under the action of an electric field after gas molecules are ionized. The design needs to use a plurality of fine structures as electrodes, each electrode needs to be connected with an external pin, and the structure manufacturing, the assembly and the like are complex.
Disclosure of Invention
The invention aims to provide a vacuum ultraviolet lamp structure, a preparation method and a photoionization sensor, which greatly simplify the structure of the vacuum ultraviolet lamp and meet the design requirements of an ionization cavity and a collecting electrode of the miniature photoionization sensor.
The technical scheme for solving the technical problems is as follows: a vacuum ultraviolet lamp structure comprises a vacuum ultraviolet lamp glass shell, wherein one end of the vacuum ultraviolet lamp glass shell is provided with an opening, a vacuum ultraviolet window used for sealing the opening is arranged at the opening, the vacuum ultraviolet window is hermetically connected with the vacuum ultraviolet lamp glass shell, so that a closed cavity is formed inside the vacuum ultraviolet lamp glass shell, and working gas is filled in the cavity; the vacuum ultraviolet window is characterized in that a first contact, a second contact and a collecting electrode structure are fixedly arranged on the surface of the vacuum ultraviolet window, the collecting electrode structure comprises at least two groups of electrode structures which are insulated from each other, the first contact and the second contact are arranged in an insulated manner, and the first contact and the second contact are respectively and electrically connected with the two groups of electrode structures.
The invention has the beneficial effects that: the ionization chamber and the collecting electrode structure are directly arranged on the vacuum ultraviolet window, and the ionization chamber, the collecting electrode structure and the vacuum ultraviolet lamp glass shell are combined into a whole, so that in-situ ionization and collection of chemical gas are realized, the photoionization and ion collecting structure of the photoionization sensor is greatly simplified, the design and assembly of the ionization chamber and the collecting electrode structure are greatly simplified, and the number and complexity of part structures of the ionization chamber are efficiently reduced.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the collecting electrode structure includes a first electrode structure and a second electrode structure, the first electrode structure and the second electrode structure are disposed between the first contact and the second contact, the first electrode structure is electrically connected to the first contact, and the second electrode structure is electrically connected to the second contact.
Furthermore, the first electrode structure comprises a plurality of first electrode strips arranged in parallel, the second electrode structure comprises a plurality of second electrode strips arranged in parallel, one end of each first electrode strip is electrically connected with the first contact element, the other end of each second electrode strip is electrically connected with the second contact element, the first electrode strips and the second electrode strips are arranged in a parallel interdigital mode, and the first electrode strips and the second electrode strips are arranged adjacently at intervals.
The beneficial effect of adopting the further scheme is that: by providing a plurality of first electrode stripes and a plurality of second electrode stripes, the greater the number of first electrode stripes and second electrode stripes, the longer the length, the longer the charge collection area, and thus the higher sensitivity, so that adjustment of sensitivity can be achieved by changing the number and length of first electrode stripes and second electrode stripes.
Further, first electrode structure is including being curved first electrode arc, second electrode structure is including being curved second electrode arc and electrode ring, the electrode ring first electrode arc and second electrode arc from inside to outside concentric setting, first electrode arc with first contact electricity is connected, the electrode ring and second electrode arc with the second contact electricity is connected.
The beneficial effect of adopting the further scheme is that: the longer the lengths of the first and second electrode arcs, the longer the circumference of the electrode ring, the longer the charge collection area, and thus the higher the sensitivity, so that the adjustment of the sensitivity is achieved by changing the lengths of the first and second electrode arcs and the circumference of the electrode ring.
Furthermore, the vacuum ultraviolet window is made of MgF2Or CaF2Or LiF.
Further, the collecting electrode structure, the first contact member and the second contact member are metal film structures fixed on the vacuum ultraviolet window in a chemical plating or thermal evaporation mode.
The beneficial effect of adopting the further scheme is that: a layer of metal film structure is plated on the vacuum ultraviolet window by adopting a chemical plating or thermal evaporation method, so that the manufacturing is convenient, and the stability of fixing the collecting electrode structure can be ensured.
The invention also provides the following technical scheme for solving the technical problems: the preparation method of the vacuum ultraviolet lamp structure comprises the following steps:
firstly, manufacturing a first contact member, a second contact member and a collecting electrode structure on one side surface of a vacuum ultraviolet window through chemical plating or thermal evaporation;
step two, bonding the vacuum ultraviolet window obtained in the step one on one end of a glass tube used as a glass shell of the vacuum ultraviolet lamp to seal and fix the vacuum ultraviolet window and the glass tube;
and step three, communicating the other end of the glass tube with a vacuum pump, pumping air in the inner cavity of the glass tube into working gas after pumping the air out, and then burning and softening one end of the glass tube far away from the vacuum ultraviolet window by using high-temperature flame and then sealing the glass tube to manufacture the vacuum ultraviolet lamp structure with the ion collecting electrode.
The beneficial effects of the above technical scheme are: the method directly constructs the electrode in the vacuum ultraviolet window, can greatly simplify the procedures of design, structure, assembly and the like of the ionization cavity and the ion collecting electrode, and is favorable for further optimizing the weight, the volume, the usability and the durability of the equipment.
Further, the method for manufacturing the first contact, the second contact and the collecting electrode structure on the surface of one side of the vacuum ultraviolet window through chemical plating or thermal evaporation in the first step comprises the following steps: forming a metal film by chemical plating or thermal evaporation; and then manufacturing the metal film into a first contact piece, a second contact piece and a collecting electrode structure through an etching process.
The beneficial effect of adopting the further scheme is that: a layer of metal film structure is plated on the vacuum ultraviolet window by adopting a chemical plating or thermal evaporation method, so that the manufacturing is convenient, and the stability of fixing the collecting electrode structure can be ensured.
Further, the method for manufacturing the first contact, the second contact and the collecting electrode structure on one side surface of the vacuum ultraviolet window by thermal evaporation in the first step comprises the following steps: directly covering one side surface of the vacuum ultraviolet window by using a mask plate in the structural shape of the first contact, the second contact and the collecting electrode; the gold plating solution was then evaporated onto the vacuum ultraviolet window.
The beneficial effect of adopting the further scheme is that: the first contact, the second contact and the collecting electrode structure are manufactured by a method of vapor plating after mask plate covering, so that the corresponding structure with the required shape can be directly manufactured without additional etching.
The invention also provides the following technical scheme for solving the technical problems: a photoionization sensor comprises the vacuum ultraviolet lamp structure, a bias circuit, an amplifying circuit, an exciting circuit, a voltage output circuit and a power module, wherein the output end of the bias circuit is electrically connected with a first contact piece, the output end of the amplifying circuit is electrically connected with a second contact piece, the output end of the voltage output circuit is electrically connected with the input end of the amplifying circuit, the output end of the exciting circuit is electrically connected with an exciting coil arranged on the outer side of a glass shell of the vacuum ultraviolet lamp, and the output end of the power module is respectively electrically connected with the input end of the amplifying circuit and the input end of the exciting circuit.
The beneficial effect who adopts above-mentioned scheme is: the invention combines the ionization cavity, the collecting electrode structure and the vacuum ultraviolet lamp glass shell into a whole, greatly simplifies the structure of the photoionization sensor, is convenient to manufacture, and can optimize the weight, the volume, the usability and the durability of the photoionization sensor.
Drawings
FIG. 1 is a schematic structural view of a vacuum ultraviolet lamp according to the present invention;
FIG. 2 is a schematic view of a collecting electrode structure of a vacuum ultraviolet window arrangement according to a first embodiment of the present invention;
FIG. 3 is a schematic view of a collecting electrode structure of a vacuum ultraviolet window arrangement in a second embodiment of the present invention;
FIG. 4 is a schematic diagram of the structure of a photoionization sensor of the present invention;
FIG. 5 is a circuit diagram of the excitation circuit in the photoionization sensor of the present invention;
FIG. 6 is a circuit diagram of an amplification circuit in the photoionization sensor of the invention;
FIG. 7 is a graph of a concentration-response curve for a first electrode strip of two different lengths according to the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1. a glass shell of a vacuum ultraviolet lamp; 2. a vacuum ultraviolet window; 3. a chamber; 4. a first contact member; 5. a second contact member; 6. a collecting electrode structure; 61. a first electrode strip; 62. a first electrode arc; 71. a second electrode strip; 72. a second electrode arc; 73. an electrode ring; 8. a bias circuit; 9. an amplifying circuit; 10. an excitation circuit; 11. a voltage output circuit; 12. a power supply module; 13. the coil is excited.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
As shown in fig. 1, an embodiment of a vacuum ultraviolet lamp structure in the present invention includes a vacuum ultraviolet lamp glass housing 1, an opening is disposed at one end of the vacuum ultraviolet lamp glass housing 1, a vacuum ultraviolet window 2 for sealing the opening is disposed at the opening, and the vacuum ultraviolet window 2 is made of MgF2Or CaF2Or LiF, the vacuum ultraviolet window 2 is hermetically connected with the vacuum ultraviolet lamp glass shell 1, so that a closed chamber 3 is formed inside the vacuum ultraviolet lamp glass shell 1, working gas is filled in the chamber 3, the working gas can be selected from Kr, Ar and the like, and the pressure in the chamber 3 is 10-5000 Pa; the vacuum ultraviolet window 2 is fixed at the opening of the vacuum ultraviolet lamp glass shell 1 through low-temperature molten glassy substances; the fixed first contact 4, second contact 5 and collection electrode structure 6 that are equipped with on the surface of vacuum ultraviolet window 2, collection electrode structure 6 includes at least two sets of mutual insulating electrode structure, first contact 4 with second contact 5 sets up insulating each other, first contact 4 with second contact 5 is connected with two sets of electrode structure electricity respectively, the vacuum ultraviolet window 2 and the 6 outsides of collection electrode structure are open ionization region.
As shown in fig. 2, in the first embodiment of a vacuum ultraviolet lamp structure according to the present invention, the collecting electrode structure 6 includes a first electrode structure and a second electrode structure, the first electrode structure and the second electrode structure are disposed between the first contact 4 and the second contact 5, the first electrode structure is electrically connected to the first contact 4, the second electrode structure is electrically connected to the second contact 5, specifically, the first electrode structure includes a plurality of first electrode strips 61 disposed in parallel, the second electrode structure includes a plurality of second electrode strips 71 disposed in parallel, one end of the plurality of first electrode strips 61 is electrically connected to the first contact 4, one end of the plurality of second electrode strips 71 is electrically connected to the second contact 5, the plurality of first electrode strips 61 and the plurality of second electrode strips 71 are disposed in parallel and interdigitated, the adjacent first electrode stripes 61 and the second electrode stripes 71 are arranged at intervals. By providing a plurality of first electrode stripes 61 and a plurality of second electrode stripes 71, the greater the number of first electrode stripes 61 and second electrode stripes 71, the longer the length, the longer the charge collection area, and thus the higher the sensitivity, so that adjustment of the sensitivity can be achieved by changing the number and length of first electrode stripes 61 and second electrode stripes 71.
As shown in fig. 3, in a second embodiment of a vacuum ultraviolet lamp structure according to the present invention, the collecting electrode structure 6 comprises a first electrode structure and a second electrode structure, the first electrode structure and the second electrode structure are disposed between the first contact member 4 and the second contact member 5, the first electrode structure is electrically connected to the first contact member 4, the second electrode structure is electrically connected to the second contact member 5, specifically, the first electrode structure comprises a first arc 62 having an arc shape, the second electrode structure comprises a second arc 72 having an arc shape and an electrode ring 73, the first arc 62 and the second arc 72 are concentrically disposed from inside to outside, the first arc 62 is electrically connected to the first contact member 4, the electrode ring 73 and the second arc 72 are electrically connected to the second contact member 5, the longer the lengths of the first and second electrode arcs 62 and 72 and the longer the circumference of the electrode ring 73, the longer the charge collection area and thus the higher the sensitivity, so that the adjustment of the sensitivity is achieved by changing the lengths of the first and second electrode arcs 62 and 72 and the circumference of the electrode ring 73.
The preparation method of the vacuum ultraviolet lamp structure comprises the following steps:
firstly, manufacturing a first contact element 4, a second contact element 5 and a collecting electrode structure 6 on one side surface of a vacuum ultraviolet window 2 through chemical plating or thermal evaporation;
step two, bonding the vacuum ultraviolet window 2 subjected to the step one on one end of a glass tube used as a glass shell 1 of the vacuum ultraviolet lamp to seal and fix the two;
and step three, communicating the other end of the glass tube with a vacuum pump, pumping air in the inner cavity of the glass tube into working gas after pumping the air out, and then burning and softening one end of the glass tube far away from the vacuum ultraviolet window 2 by using high-temperature flame and then sealing the glass tube to manufacture the vacuum ultraviolet lamp structure with the ion collecting electrode.
In an embodiment of the above method of the present invention, the first step of manufacturing the first contact 4, the second contact 5 and the collecting electrode structure 6 on one side surface of the vacuum ultraviolet window 2 by electroless plating or thermal evaporation comprises: forming a metal film by chemical plating or thermal evaporation; the metal film is then fabricated into a first contact 4, a second contact 5 and a collecting electrode structure 6 by an etching process. A layer of metal film structure is plated on the vacuum ultraviolet window 2 by adopting a chemical plating or thermal evaporation method, so that the manufacturing is convenient, and the stability of fixing the collecting electrode structure 6 can be ensured.
In another embodiment of the above method of the present invention, the first contact 4, the second contact 5 and the collecting electrode structure 6 are fabricated on one side surface of the vacuum ultraviolet window 2 by thermal evaporation in the first step by a method comprising: directly covering one side surface of the vacuum ultraviolet window 2 by using a mask in the shape of a first contact 4, a second contact 5 and a collecting electrode structure 6; the gold plating solution is then evaporated onto the vacuum uv window 2. The first contact 4, the second contact 5 and the collecting electrode structure 6 are manufactured by a method of vapor deposition after mask plate covering, so that the corresponding structures with required shapes can be directly manufactured without additional etching.
In the method of the embodiment, the electrode is directly constructed on the vacuum ultraviolet window 2, so that the design, structure, assembly and other procedures of the ionization chamber and the ion collecting electrode can be greatly simplified, and the weight, volume, usability and durability of the equipment can be further optimized.
As shown in fig. 4, the photoionization sensor of the present invention includes the vacuum ultraviolet lamp structure, a bias circuit 8, an amplifier circuit 9, an excitation circuit 10, a voltage output circuit 11, and a power module 12, wherein an output terminal of the bias circuit 8 is electrically connected to the first contact 4, an output terminal of the amplifier circuit 9 is electrically connected to the second contact 5, an output terminal of the voltage output circuit 11 is electrically connected to an input terminal of the amplifier circuit 9, an output terminal of the excitation circuit 10 is electrically connected to an excitation coil 13 disposed outside the glass envelope 1 of the vacuum ultraviolet lamp, and an output terminal of the power module 12 is electrically connected to an input terminal of the amplifier circuit 9 and an input terminal of the excitation circuit 10, respectively. The ionization chamber, the collecting electrode structure 6 and the vacuum ultraviolet lamp glass shell 1 are combined into a whole, so that the structure of the photoionization sensor is greatly simplified, the manufacturing is convenient, and the weight, the volume, the usability and the durability of the photoionization sensor can be optimized.
As shown in fig. 5, the excitation circuit 10 adopts a Royer circuit architecture, also called a push-pull self-oscillation circuit, drives the excitation coil 13 through a switching transistor, controls the switching tube to be alternately conducted by using a feedback winding to realize self-oscillation, so that an alternating current is generated on a primary side, and a required alternating voltage is generated on a secondary side according to a transformer turn ratio. As shown in fig. 6, the amplifying circuit 9 converts the charges collected on the ion collecting electrode into the output voltage of the operational amplifier by using the transimpedance amplifier, the point a in fig. 6 is connected to the second contact member 5, the charges collected on the electrode generate pA-level current, the pA-level current flows through the gain resistor Rf of G Ω level, and the voltage is generated at the point B of the output of the operational amplifier, i.e. the quantity of the charges ionized by the ultraviolet lamp can be represented.
The photo-ionization sensor provided with the first electrode strip 61 of two different lengths was tested as follows: (1) the material of the long first electrode strips 61 group and the vacuum ultraviolet window 2 is MgF2The working gas is Kr, the diameter of the window material is 8mm, the outer diameter of the vacuum ultraviolet lamp glass shell 1 is 6mm, the inner diameter is 5mm, and the ultraviolet window is circular and concentric with the cylinder of the vacuum ultraviolet lamp glass shell 1. The metal film is selected to be Au, a mask evaporation process is adopted, the width of the metal layers of the first contact element 4 and the second contact element 5 is 1mm, and the first electrode strips 61 and the second electrode stripsThe width of the second electrode stripes 71 is 0.1 mm. Specifically, as shown in fig. 2, each electrode stripe is separated by 1/3 radii, one end of the first electrode strip 61 contacts the first contact 4, and the total length is about 2/3 of the intersection line of the straight line and the circle, so that the length of the left 3 electrode lines is 4mm, 5.3mm, 4mm, the length of the right 2 electrode lines is 5mm, and the left second electrode line passes through the center of the circle.
(2) The short first electrode stripes 61 of the group are reduced in length to 1/3 on the basis of the size of (1).
A vacuum ultraviolet lamp with Kr gas as working gas was excited by 1100V and 125khz high-frequency high-voltage electricity to operate normally and its sensitivity was tested. Isobutene (IBE) is adopted as the detection gas, the ionization energy of the gas is 9.43eV, and the gas can be effectively ionized by a Kr ultraviolet light source. The response curve is shown in fig. 7, where the long first electrode stripes 61 have longer charge collection areas and therefore higher sensitivity, but saturate at higher concentrations due to the operational amplifier output capability being limited by the input voltage. Whereas the short first electrode stripes 61 have a lower sensitivity and reach saturation at a concentration of about 2 times the saturation concentration of the long electrodes.
The embodiment proves that the structure can be used for the high-efficiency micro photoionization sensor with a simple structure, the sensitivity of the photoionization sensor can be flexibly adjusted based on the shape of the electrode constructed on the vacuum ultraviolet window 2, and the practical value is high.
In the description of the present invention, it is to be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "inner", "outer", "peripheral side", "circumferential", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and simplicity of description, and do not indicate or imply that the system or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (10)

1. The vacuum ultraviolet lamp structure is characterized by comprising a vacuum ultraviolet lamp glass shell (1), wherein one end of the vacuum ultraviolet lamp glass shell (1) is provided with an opening, the opening is provided with a vacuum ultraviolet window (2) used for sealing the opening, the vacuum ultraviolet window (2) is hermetically connected with the vacuum ultraviolet lamp glass shell (1) to enable a closed cavity (3) to be formed inside the vacuum ultraviolet lamp glass shell (1), and working gas is filled in the cavity (3); the vacuum ultraviolet window is characterized in that a first contact member (4), a second contact member (5) and a collecting electrode structure (6) are fixedly arranged on the surface of the vacuum ultraviolet window (2), the collecting electrode structure (6) comprises at least two groups of mutually insulated electrode structures, the first contact member (4) and the second contact member (5) are arranged in an insulated mode, and the first contact member (4) and the second contact member (5) are respectively electrically connected with the two groups of electrode structures.
2. A vacuum ultraviolet lamp construction according to claim 1, characterized in that the collecting electrode structure (6) comprises a first electrode structure and a second electrode structure, which are arranged between the first contact (4) and the second contact (5), which first electrode structure is electrically connected to the first contact (4), and which second electrode structure is electrically connected to the second contact (5).
3. A vacuum ultraviolet lamp structure according to claim 2, characterized in that the first electrode structure comprises a plurality of first electrode strips (61) arranged parallel to each other, the second electrode structure comprises a plurality of second electrode strips (71) arranged parallel to each other, one ends of the plurality of first electrode strips (61) are electrically connected to the first contact member (4), one ends of the plurality of second electrode strips (71) are electrically connected to the second contact member (5), the plurality of first electrode strips (61) and the plurality of second electrode strips (71) are arranged in parallel interdigitated arrangement, and the adjacent first electrode strips (61) and the adjacent second electrode strips (71) are arranged at intervals.
4. A vacuum ultraviolet lamp structure according to claim 2, characterized in that the first electrode structure comprises a first arc of electrodes (62) in the shape of an arc, the second electrode structure comprises a second arc of electrodes (73) (72) in the shape of an arc and an electrode ring, the first arc of electrodes (62) and the second arc of electrodes (73) (72) being concentrically arranged from inside to outside, the first arc of electrodes (62) being electrically connected with the first contact member (4), the electrode ring and the second arc of electrodes (73) (72) being electrically connected with the second contact member (5).
5. A vacuum UV lamp structure according to any one of claims 1 to 4, characterized in that the material of the vacuum UV window (2) is MgF2Or CaF2Or LiF.
6. A vacuum UV lamp arrangement according to any one of claims 1 to 4, wherein the collecting electrode arrangement (6), the first contact member (4) and the second contact member (5) are metal film structures fixed to the vacuum UV window (2) by electroless plating or thermal evaporation.
7. A method of manufacturing a vacuum ultraviolet lamp structure according to any one of claims 1 to 6, comprising the steps of:
firstly, manufacturing a first contact element (4), a second contact element (5) and a collecting electrode structure (6) on one side surface of a vacuum ultraviolet window (2) through chemical plating or thermal evaporation;
step two, bonding the vacuum ultraviolet window (2) obtained in the step one on one end of a glass tube used as a glass shell (1) of the vacuum ultraviolet lamp to seal and fix the two;
and thirdly, communicating the other end of the glass tube with a vacuum pump, pumping air in the inner cavity of the glass tube into working gas after pumping the air out, and then burning and softening one end of the glass tube far away from the vacuum ultraviolet window (2) by using high-temperature flame and then sealing the glass tube to manufacture the vacuum ultraviolet lamp structure with the ion collecting electrode.
8. The method for preparing a vacuum ultraviolet lamp structure according to claim 7, wherein the first contact member (4), the second contact member (5) and the collecting electrode structure (6) are prepared on one side surface of the vacuum ultraviolet window (2) by chemical plating or thermal evaporation in the first step by the method comprising the steps of: forming a metal film by chemical plating or thermal evaporation; and then manufacturing the metal film into a first contact (4), a second contact (5) and a collecting electrode structure (6) through an etching process.
9. A method for manufacturing a vacuum ultraviolet lamp structure according to claim 7, wherein the first contact member (4), the second contact member (5) and the collecting electrode structure (6) on one side surface of the vacuum ultraviolet window (2) in the first step by thermal evaporation comprises: directly covering one side surface of the vacuum ultraviolet window (2) by using a mask plate in the shapes of a first contact (4), a second contact (5) and a collecting electrode structure (6); the gold plating solution is then evaporated onto the vacuum ultraviolet window (2).
10. Photoionization sensor, comprising a vacuum ultraviolet lamp arrangement according to any of claims 1 to 6, together with a bias circuit (8), an amplifier circuit (9), an excitation circuit (10), a voltage output circuit (11) and a power supply module (12), the output of the bias circuit (8) is electrically connected to the first contact (4), the output end of the amplifying circuit (9) is electrically connected with the second contact piece (5), the output end of the voltage output circuit (11) is electrically connected with the input end of the amplifying circuit (9), the output end of the excitation circuit (10) is electrically connected with an excitation coil (13) arranged on the outer side of the vacuum ultraviolet lamp glass shell (1), the output end of the power supply module (12) is electrically connected with the input end of the amplifying circuit (9) and the input end of the exciting circuit (10) respectively.
CN202111667910.1A 2021-12-31 2021-12-31 Vacuum ultraviolet lamp structure, preparation method thereof and photoionization sensor Pending CN114235942A (en)

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