CN114232090A - Diamond, and optical property improving method and manufacturing method thereof - Google Patents
Diamond, and optical property improving method and manufacturing method thereof Download PDFInfo
- Publication number
- CN114232090A CN114232090A CN202111575391.6A CN202111575391A CN114232090A CN 114232090 A CN114232090 A CN 114232090A CN 202111575391 A CN202111575391 A CN 202111575391A CN 114232090 A CN114232090 A CN 114232090A
- Authority
- CN
- China
- Prior art keywords
- diamond
- optical
- coating
- single crystal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Laser Beam Processing (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a diamond, an optical property improving method and a manufacturing method thereof. The optical property improvement method includes: coating an optical modification coating on at least part of the surface of the diamond to be treated so as to form an optical modification film on the surface of the diamond, wherein the light transmittance of the optical modification film is lower than 50%; and cutting at least a partial region of the diamond not covered by the optical modification film with laser. Coating on the diamond surface can prevent the laser because of the inhomogeneous phenomenon that leads to of diamond refractive index, avoided the energy transfer of laser to the defect department or the stress concentration department of diamond, and then effectively stopped the fracture phenomenon, the optics modified film still has heat conduction, toughened function, can in time conduct the local heat on diamond surface for the diamond is promoted by the temperature uniformity degree on cutting surface, the toughening of optics modified film makes the micro crack can not enlarge into the macrocrack, further avoided the fracture of diamond.
Description
Technical Field
The invention relates to the technical field of diamond material manufacturing, in particular to a diamond, an optical property improving method and a manufacturing method thereof.
Background
Diamond is the hardest naturally occurring substance in nature, a mineral composed of carbon elements, and is an allotrope of graphite. The method has wide application in the fields of grinding tool grinding materials, semiconductors, new materials and the like.
Due to the limited reserves of natural diamond, the diamond is mainly prepared by an artificial synthesis method in the industry at present, and the artificial synthesis method of the diamond has various methods, including an ultrahigh pressure method, a chemical vapor deposition method, a physical vapor deposition method and the like. Among them, Microwave Plasma Chemical Vapor Deposition (MPCVD) is the preferred method for producing high quality diamond. The microwave excited plasma has the advantages of high controllability, high plasma density, no electrode pollution, etc.
In practical application, the diamond needs to be cut, and common cutting methods include laser cutting, linear cutting and the like, wherein the laser cutting has the advantages of high cutting speed, good economy, convenience in use and the like.
In the prior art, a plurality of laser cutting devices for diamond cutting are available, and no matter red light, green light and other laser cutting devices are available, even a plurality of devices are automatically operated, however, the diamond laser cutting device and the diamond laser cutting method in the prior art can not effectively avoid the diamond cracking phenomenon generated in the cutting process.
Disclosure of Invention
In view of the deficiencies of the prior art, it is an object of the present invention to provide a diamond, a method of improving optical properties thereof and a method of manufacturing the same.
In order to achieve the purpose, the technical scheme adopted by the invention comprises the following steps:
in a first aspect, the present invention provides a method of improving optical properties of diamond, comprising:
coating an optical modification coating on at least part of the surface of the diamond to be treated so as to form an optical modification film on the surface of the diamond, wherein the light transmittance of the optical modification film is lower than 50%; and
and cutting at least partial area of the diamond which is not covered by the optical modification film by laser.
In a second aspect, the present invention also provides a method of manufacturing diamond, comprising:
growing diamond using a chemical vapor method, the diamond including single crystal diamond and polycrystalline bonded to the single crystal diamond;
the polycrystalline body bonded to the single crystal diamond is cut and removed by the above method.
In some preferred embodiments, the single crystal diamond is preferably prepared by an MPCVD method, which has the advantages of fast growth speed, low cost and good consistency, but polycrystalline bodies are easily generated around the MPCVD method, which affects the purity of the single crystal diamond, so that the polycrystalline bodies grown around the single crystal diamond need to be cut off.
In a third aspect, the present invention also provides diamond obtained by the above method.
Based on the technical scheme, compared with the prior art, the invention has the beneficial effects that at least:
the method for improving the optical property of the diamond reduces the light transmittance and the refractive index of the diamond by using the optical modified film, has the functions of heat conduction and toughening, and reduces the stress caused by laser cutting, thereby avoiding the cracking problem during the laser cutting.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to enable those skilled in the art to more clearly understand the technical solutions of the present invention and to implement them according to the content of the description, the following description is made with reference to the preferred embodiments of the present invention and the detailed drawings.
Drawings
FIG. 1 is an image of diamond cracking during a cutting process provided by an exemplary embodiment of the present invention;
FIG. 2 is an image of diamond cracking during a cutting process provided by an exemplary embodiment of the present invention;
FIG. 3 is an image of diamond cracking during a cutting process provided by an exemplary embodiment of the present invention;
fig. 4 is an image of a cut diamond product provided in accordance with an exemplary embodiment of the present invention.
Detailed Description
In view of the deficiencies in the prior art, the inventors of the present invention have made extensive studies and extensive practices to provide technical solutions of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein, and thus the scope of the present invention is not limited by the specific embodiments disclosed below.
The embodiment of the invention provides a method for improving the optical property of diamond, which comprises the following steps:
coating an optical modification coating on at least part of the surface of the diamond to be treated so as to form an optical modification film on the surface of the diamond, wherein the light transmittance of the optical modification film is lower than 50%; and cutting at least a partial region of the diamond not covered by the optical modification film with laser.
Because the optical modified film has the shading characteristic, the optical modified film coated on the surface of the diamond can prevent laser from diffusing due to uneven refractive index of the diamond, avoid the energy of the laser from being transmitted to the defect or stress concentration of the diamond, and further effectively avoid the cracking phenomenon of the diamond in the laser cutting process.
The diamond to be cut can be prepared by a physical or chemical vapor deposition method or a high-temperature and high-pressure growth process. For example, for MPCVD grown diamond, which includes single crystal diamond and polycrystalline diamond attached around the single crystal diamond, the primary purpose of the cutting may typically be to cut away the polycrystalline diamond around the single crystal diamond to obtain pure single crystal diamond. In the case of diamond grown at high temperature and high pressure, various defects are liable to be generated in its body during the growth, and the main purpose of its cutting is to remove the edge portion including the defects to obtain a core portion having as large a size as possible and as high a quality as possible.
In some embodiments, the diamond comprises single crystal diamond and polycrystalline bonded to the single crystal diamond, the method comprising: coating the optical modified film on the surface of the single crystal diamond by taking the interface of the single crystal diamond and the polycrystal as a boundary; the polycrystalline body bonded to the single crystal diamond is cut away along the boundary using a laser.
In some embodiments, the diamond may comprise CVD diamond or high temperature high pressure diamond.
In some embodiments, the CVD diamond may comprise CVD single crystal diamond.
In some embodiments, the optically modified coating comprises 20 to 45 wt% polymeric film-forming material, 20 to 30 wt% inorganic pigment, 0 to 5 wt% dispersant, and 30 to 50 wt% solvent, wherein the polymeric film-forming material comprises: any one or a combination of two or more of polyurethane, polyacrylic resin, and epoxy resin, and not limited thereto, the inorganic pigment includes: any one or a combination of two or more of titanium dioxide, lithopone, zinc oxide, and antimony white, but not limited thereto.
The optical modified film formed by the components can improve the optical characteristics of the diamond, is more suitable for laser cutting, has the functions of heat conduction and toughening, can timely conduct local heat on the surface of the diamond, and can improve the temperature uniformity of the cut surface of the diamond.
In some embodiments, the optically modified coating further comprises 2 to 4 wt% carbon nanotubes and/or nanowires.
By adding the carbon nano tubes or the nano metal wires in the optical modified coating, on one hand, the blocking capability of the coating on laser can be further improved, on the other hand, the heat conduction capability of the coating can be remarkably improved, and the carbon nano tubes or the nano metal wires can be interwoven in the coating to form a network structure, so that the flexibility of the coating and the like can be improved, and the stress generated inside the single crystal diamond when the single crystal diamond is cut by the laser can be better offset.
In some embodiments, the carbon nanotubes have a diameter of 10 to 50nm and a length of 1 to 10 microns, and the nanowires have a diameter of 5 to 50nm and a length of 1 to 10 microns.
In some embodiments, the laser cutting method specifically comprises:
cleaning the surface of the diamond;
coating the optical modified coating on at least part of the surface of the diamond after being cleaned;
and (3) drying the diamond coated with the optical modified coating at 50-70 ℃ for 2-10min to form the optical modified film.
The optical modified coating can be coated on the surface of the diamond in various ways such as brushing, spin coating, spraying, printing and the like.
In some embodiments, the optically modifying coating completely covers the growth surface of the diamond.
In some embodiments, the optically modified film has a thickness of 0.01 to 0.2 μm.
In some embodiments, the laser has a power of 5-15W and a beam diameter of 4-5 mm.
In some embodiments, the duration of the cleavage is less than 15 min.
The embodiment of the invention also provides a manufacturing method of the diamond, which comprises the following steps:
growing diamond using a chemical vapor method, the diamond including single crystal diamond and polycrystalline bonded to the single crystal diamond;
the polycrystalline body bonded to the single crystal diamond is cut and removed by the above method.
In some embodiments, the chemical vapor deposition process comprises a microwave plasma chemical vapor deposition process.
In some exemplary embodiments of the invention, a method of preventing cracking of a single crystal diamond when cutting away polycrystalline around a CVD grown single crystal diamond is disclosed. The method is mainly characterized in that before the cutting operation is carried out by laser, an optical modified coating is coated on the surface of the single crystal diamond to form an optical modified coating, so that the single crystal diamond is effectively prevented from cracking caused by refraction and stress of the diamond.
The embodiment of the invention also provides the diamond cut or manufactured by the laser cutting method or the manufacturing method.
The technical scheme of the invention is further explained in detail by a plurality of embodiments and the accompanying drawings. However, the examples are chosen only for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.
Example 1
A method of improving the optical properties of diamond by using MPCVD grown diamond as the diamond to be cut with the purpose of removing polycrystalline bodies bonded around the single crystal diamond. The method comprises the following steps:
coating an optical modified coating on the surface of the single crystal diamond in the diamond to be cut by taking the interface of the single crystal diamond and the polycrystal as a boundary, wherein the optical modified coating contains titanium dioxide, polyacrylic acid and benzene in a mass ratio of 1: 1.2, and then drying/curing the coating for 5min at 60 ℃ to form an optical modified film with the light transmittance of 40%;
setting the laser power to be 10W, the beam diameter to be 4mm and the continuous working time of the laser, and carrying out laser cutting on the diamond to be cut along the boundary, wherein the cutting time is 2min, so as to obtain finished single crystal diamonds, and the shape of one of the finished single crystal diamonds is shown in figure 4. The average cracking rate of a plurality of finished single crystal diamonds statistically obtained in this example is shown in table 1.
Example 2
A method for improving optical properties of diamond, which uses diamond grown at high temperature and high pressure as a diamond to be cut, with the aim of removing an edge portion or a defective portion of the diamond to maximize the quality of a finished diamond product. The method comprises the following steps:
coating optical modified paint on the surface of a defect-free area of the diamond to be cut by taking the edge of the defect as a boundary, wherein the optical modified paint contains zinc oxide, epoxy resin, Lubo moist 32500 and acetone in a mass ratio of 1: 0.5: 0.6: 0.1; then, drying/curing the coating at 50 ℃ for 10min to form an optical modified film with 20% of light transmittance;
setting the laser power at 15W, the beam diameter at 5mm and the laser continuous working time at 15min, carrying out laser cutting along the defect edge to obtain finished diamonds, and obtaining the average cracking rate of a plurality of finished diamonds through statistics as shown in Table 1.
Example 3
A method of improving optical properties of diamond, substantially the same as in example 1, except that:
setting the laser power to be 15W, the beam diameter to be 5mm and the continuous working time of the laser to be 10min to obtain finished diamond products, and counting the cracking rates of a plurality of finished single crystal diamond products as shown in table 1.
Example 4
A method of improving optical properties of diamond, substantially the same as in example 1, except that:
drying/curing the coating at 70 ℃ for 2min to form an optical modified film;
finished diamonds were obtained and the statistical cracking rates of a number of finished single crystal diamonds are shown in table 1.
Example 5
A method of improving the optical properties of diamond comprising the steps of:
coating an optical modified coating on the surface of the diamond, wherein the optical modified coating contains antimony white, polyurethane, toluene and Lubo moist 32500 in a mass ratio of 1: 2: 1.5: 0.2, and completely coating the surface;
drying/curing the coating at 65 ℃ to form an optical modified film;
the finished diamonds were obtained and the statistical number of average finished diamond cracking rates are shown in table 1.
Example 6
A method of improving optical properties of diamond, substantially the same as in example 5, except that:
the optical modified coating comprises antimony white, polyurethane, toluene, Lubo moist 32500 and silver nanowires with the average diameter of 50nm and the average length of 1800nm in a mass ratio of 1: 2: 1.5: 0.2.
The average cracking rate of a plurality of finished diamonds is shown in table 1.
Example 7
A method of improving optical properties of diamond, substantially the same as in example 5, except that:
the optical modified coating comprises antimony white, polyurethane, toluene, Luborun 32500 and carbon nano-tubes with the average diameter of 40nm and the average length of 1000nm in a mass ratio of 1: 2: 1.5: 0.2.
The average cracking rate of a plurality of finished diamonds is shown in table 1.
Comparative example 1
This comparative example is essentially the same as example 1, except that:
the operation of coating the optical modified coating on the surface of the diamond to be cut is omitted, the diamond to be cut is directly cut, and photos of a plurality of finished single crystal diamonds are shown in figures 1-3, wherein black linear parts are cracks generated by cracking. The average cracking rates statistically obtained in the comparative example for a plurality of finished single crystal diamonds are shown in table 1.
Comparative example 2
This comparative example is essentially the same as example 2, except that:
the laser cutting power was set to 20W, the beam diameter was 6mm, and the statistical cracking rate was as shown in Table 1.
TABLE 1 cracking rates of cutting diamonds of examples and comparative examples
Based on the statistical result, the optical property improvement method provided by the invention can effectively reduce the cracking rate of the diamond in the laser cutting process; the optical modified film formed by the optical property improving method provided by the invention needs to be cut by matching with laser cutting parameters, and the improper laser cutting parameters can also cause the increase of the cracking rate.
It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the present invention, which are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and therefore, the protection scope of the present invention is not limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. A method of modifying an optical property of diamond, comprising:
coating an optical modification coating on at least part of the surface of the diamond to be treated so as to form an optical modification film on the surface of the diamond, wherein the light transmittance of the optical modification film is lower than 50%; and
and cutting at least partial area of the diamond which is not covered by the optical modification film by laser.
2. A method of improving optical properties according to claim 1, wherein the diamond comprises single crystal diamond and polycrystal bonded to the single crystal diamond, the method comprising:
coating the optical modified film on the surface of the single crystal diamond by taking the interface of the single crystal diamond and the polycrystal as a boundary;
the polycrystalline body bonded to the single crystal diamond is cut away along the boundary using a laser.
3. The optical property improvement method according to claim 1,
the diamond comprises chemical vapor deposition diamond or high-temperature high-pressure growth diamond;
and/or, the optical modified coating comprises 20-45 wt% of high molecular film-forming substance, 20-30 wt% of inorganic pigment, 0-5 wt% of dispersant and 30-50 wt% of solvent, wherein the high molecular film-forming substance comprises: any one or a combination of two or more of polyurethane, polyacrylic resin and epoxy resin, wherein the inorganic pigment comprises: any one or combination of more than two of titanium dioxide, lithopone, zinc oxide and antimony white;
preferably, the optically modified coating further comprises 2-4 wt% of carbon nanotubes and/or metal nanowires, wherein the carbon nanotubes have a diameter of 10-50nm and a length of 1-10 microns, and the metal nanowires have a diameter of 5-50nm and a length of 1-10 microns.
4. The method for improving optical properties according to claim 3, comprising in particular:
cleaning the surface of the diamond;
coating the optical modified coating on at least part of the surface of the diamond after being cleaned;
and (3) drying the diamond coated with the optical modified coating at 50-70 ℃ for 2-10min to form the optical modified film.
5. The optical property improvement method according to claim 4, characterized by comprising: and enabling the optical modified film to completely cover the growth surface of the diamond.
6. The method of claim 1, wherein the thickness of the optically modified film is 0.01 to 0.2 μm.
7. The method of claim 1, wherein the laser has a power of 5-15W and a beam diameter of 4-5 mm.
8. Method for optical property improvement according to claim 7, characterized in that the duration of the cutting is less than 15 min.
9. A method of manufacturing diamond, comprising:
growing diamond using a chemical vapor method, the diamond including single crystal diamond and polycrystalline bonded to the single crystal diamond;
cutting away polycrystalline bodies bonded to the single crystal diamond using the method of any one of claims 1 to 8;
preferably, the chemical vapor deposition method comprises a microwave plasma chemical vapor deposition method.
10. Diamond obtainable by a method according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111575391.6A CN114232090B (en) | 2021-12-21 | 2021-12-21 | Diamond, optical property improvement method and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111575391.6A CN114232090B (en) | 2021-12-21 | 2021-12-21 | Diamond, optical property improvement method and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114232090A true CN114232090A (en) | 2022-03-25 |
| CN114232090B CN114232090B (en) | 2023-10-10 |
Family
ID=80760818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111575391.6A Active CN114232090B (en) | 2021-12-21 | 2021-12-21 | Diamond, optical property improvement method and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114232090B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030131787A1 (en) * | 1998-05-15 | 2003-07-17 | Linares Robert C. | Tunable CVD diamond structures |
| JP2012176889A (en) * | 2012-05-10 | 2012-09-13 | Apollo Diamond Inc | System and method for producing synthetic diamond |
| US20130264124A1 (en) * | 2011-12-30 | 2013-10-10 | Smith International, Inc. | Thermally stable materials, cutter elements with such thermally stable materials, and methods of forming the same |
| CN110281142A (en) * | 2019-06-20 | 2019-09-27 | 山东大学 | Diamond seed preparation method, diamond seed and monocrystalline |
| CN111733454A (en) * | 2020-05-20 | 2020-10-02 | 西南科技大学 | Separation method of CVD homoepitaxy diamond large single crystal based on boron-doped transition layer |
| CN112025530A (en) * | 2020-11-06 | 2020-12-04 | 苏州香榭轩表面工程技术咨询有限公司 | Nano-diamond cutter and preparation method and application thereof |
| KR20210048950A (en) * | 2019-10-24 | 2021-05-04 | (주)엠티아이 | Coating composition protecting wafer and method of dicing wafer using the same |
-
2021
- 2021-12-21 CN CN202111575391.6A patent/CN114232090B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030131787A1 (en) * | 1998-05-15 | 2003-07-17 | Linares Robert C. | Tunable CVD diamond structures |
| US20130264124A1 (en) * | 2011-12-30 | 2013-10-10 | Smith International, Inc. | Thermally stable materials, cutter elements with such thermally stable materials, and methods of forming the same |
| JP2012176889A (en) * | 2012-05-10 | 2012-09-13 | Apollo Diamond Inc | System and method for producing synthetic diamond |
| CN110281142A (en) * | 2019-06-20 | 2019-09-27 | 山东大学 | Diamond seed preparation method, diamond seed and monocrystalline |
| KR20210048950A (en) * | 2019-10-24 | 2021-05-04 | (주)엠티아이 | Coating composition protecting wafer and method of dicing wafer using the same |
| CN111733454A (en) * | 2020-05-20 | 2020-10-02 | 西南科技大学 | Separation method of CVD homoepitaxy diamond large single crystal based on boron-doped transition layer |
| CN112025530A (en) * | 2020-11-06 | 2020-12-04 | 苏州香榭轩表面工程技术咨询有限公司 | Nano-diamond cutter and preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114232090B (en) | 2023-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101921584B1 (en) | Transparent conductive articles | |
| CN108023017B (en) | Single crystal film of organic-inorganic composite perovskite material and preparation method and application thereof | |
| CN206828679U (en) | MPCVD method grows the deposition table of single-crystal diamond | |
| CN106448923A (en) | Preparation method of composite transparent electrode with metal membrane wrapped by in-situ growth graphene | |
| CN1890792A (en) | Carrier for receiving an object and method for the production of a carrier | |
| CN110453214A (en) | A kind of laser cladding method of nickel-base alloy laser cladding powder | |
| CN110534555A (en) | Based on the face r Al2O3β-the Ga of graph substrate2O3Film manufacturing method | |
| WO2016013588A1 (en) | Single-crystal diamond and method for manufacturing same, tool including single-crystal diamond, and component including single-crystal diamond | |
| CN111300918B (en) | Optical nano cellulose membrane and preparation method and application thereof | |
| CN114232090A (en) | Diamond, and optical property improving method and manufacturing method thereof | |
| JP2002265296A (en) | Diamond thin film and manufacturing method therefor | |
| DE102005058819A1 (en) | Coating a glass component with a high silicic acid content, comprises applying a layer which contains silicon dioxide | |
| CN108091415B (en) | Transparent conductive film with triple light trapping structure and preparation thereof | |
| CN108147403A (en) | A kind of preparation method of graphene oxide quantum dot and products thereof | |
| US3867191A (en) | Carbon-boron surfaced carbon filament | |
| US5221501A (en) | Method of producing a smooth plate of diamond | |
| Yoshida et al. | Exfoliation of vapor-grown graphite fibers as studied by scanning electron microscope | |
| CN106746725A (en) | A kind of preparation method of new ZnO nano laminated structure coating | |
| JP3758755B2 (en) | Pyrolytic boron nitride container and manufacturing method thereof | |
| KR101233239B1 (en) | Recycling method of CMP pad conditioner having end of life and recycled CMP pad conditioner treated thereby | |
| KR101662993B1 (en) | Preparation Method of Zn(O,S) Thin Film Using Sputtering Deposition | |
| Song et al. | Fabrication of a hybrid structure of diamond nanopits infilled with a gold nanoparticle | |
| Al-Taay et al. | Optical and structural properties of synthesized ZnO nanorods through chemical bath deposition on various substrates | |
| CN109574691A (en) | A kind of production method of silicon carbide ceramics cladding element end plug | |
| CN114318287B (en) | Preparation method of diamond self-supporting film and diamond self-supporting film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20230826 Address after: Room 13, 3rd Floor, No. 232 Yuanfeng Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province, 215347 Applicant after: Suzhou Beilaike Diamond Technology Co.,Ltd. Address before: Room 5-4, building 4, No. 55, Tingdong Road, Suzhou Industrial Park, Jiangsu 215000 Applicant before: SUZHOU BEILAIKE JINGZUAN TECHNOLOGY Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |