CN114227956B - High-efficient lobe of a leaf device of silicon chip - Google Patents
High-efficient lobe of a leaf device of silicon chip Download PDFInfo
- Publication number
- CN114227956B CN114227956B CN202111496719.5A CN202111496719A CN114227956B CN 114227956 B CN114227956 B CN 114227956B CN 202111496719 A CN202111496719 A CN 202111496719A CN 114227956 B CN114227956 B CN 114227956B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 58
- 239000010703 silicon Substances 0.000 title claims abstract description 58
- 230000007246 mechanism Effects 0.000 claims abstract description 80
- 230000005540 biological transmission Effects 0.000 claims description 22
- 238000005096 rolling process Methods 0.000 claims description 13
- 230000000087 stabilizing effect Effects 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 3
- 238000005336 cracking Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 47
- 238000007906 compression Methods 0.000 description 12
- 230000006835 compression Effects 0.000 description 11
- 230000009471 action Effects 0.000 description 3
- 206010044048 Tooth missing Diseases 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 206010041662 Splinter Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0052—Means for supporting or holding work during breaking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The invention relates to a splitting device, in particular to a high-efficiency splitting device for a silicon wafer. The invention provides the efficient wafer splitting device for the silicon wafer, which can save manpower during operation and reduce the physical consumption during manual operation, thereby ensuring the working efficiency. The invention provides a high-efficiency splitting device for a silicon wafer, which comprises: chassis, support, extension board, guide frame and lobe of a leaf mechanism, chassis bottom left and right sides all are connected with two supports, and chassis top left and right sides all is connected with two extension boards, is connected with the guide frame between four extension boards, is equipped with lobe of a leaf mechanism on the chassis. The silicon wafer is placed through the guide frame, and after the placement is finished, the silicon wafer is cracked through the cracking mechanism, so that the effect of cracking the silicon wafer is achieved.
Description
Technical Field
The invention relates to a splitting device, in particular to a high-efficiency splitting device for a silicon wafer.
Background
Silicon wafers are an important raw material for manufacturing transistors and integrated circuits in modern society, and when the silicon wafers are manufactured, the silicon wafers are usually required to be subjected to splitting treatment in order to be better processed into the transistors and the integrated circuits.
At present, a mode of splitting a silicon wafer is usually that scratches are carved on specific positions by laser firstly by manpower, then the silicon wafer is manually knocked according to the positions of the scratches, so that the effect of splitting the silicon wafer is achieved.
Therefore, it is necessary to develop a high-efficiency wafer breaking device capable of saving manpower during operation and reducing physical effort during manual operation, thereby ensuring working efficiency.
Disclosure of Invention
(1) Technical problem to be solved
The invention aims to overcome the defects that the mode needs to be frequently knocked manually during operation, labor is consumed, the manual labor is consumed more physically during operation, fatigue is easy to occur, and the work efficiency is easy to reduce during fatigue operation.
(2) Technical proposal
In order to solve the technical problems, the invention provides a high-efficiency wafer splitting device which comprises a chassis, supports, support plates, guide frames and splitting mechanisms, wherein the left side and the right side of the bottom of the chassis are respectively connected with two supports, the left side and the right side of the top of the chassis are respectively connected with two support plates, the guide frames are connected between the four support plates, and the splitting mechanisms are arranged on the chassis.
Preferably, the lobe of a leaf mechanism is including ring bracket, L shape pole, the fixed axle, the pendulum rod, the gag lever post, compression spring, the driving lever, driving wheel and carousel, chassis top rear side is connected with the ring bracket, ring bracket top is connected with L shape pole, L shape pole front side lower part is connected with the fixed axle, fixed axle rear side rotation is connected with two pendulum rods, the fixed axle rear side is connected with two gag lever posts, be connected with two compression springs between two pendulum rods, two pendulum rod tops all are connected with the driving lever, L shape pole front side upper portion rotation is connected with the driving wheel, driving wheel upper portion is connected with the carousel.
Preferably, the device also comprises a receiving mechanism and a magnetic attraction mechanism, the annular support is provided with the receiving mechanism, and the magnetic attraction mechanism is arranged among the receiving mechanism, the annular support and the chassis.
Preferably, connect and draw mechanism to be connected with two sliding sleeves including sliding sleeve, draw-in groove post, pin and connecting rod, rotation type on the ring support is connected with two sliding sleeves, and two sliding sleeves are upper and lower symmetry setting, and one side that two sliding sleeves are close to each other all rotates to be connected with the draw-in groove post, and the draw-in groove post is located the guide frame rear side, is connected with the pin between two draw-in groove post rear sides, all is connected with the connecting rod between two sliding sleeve left and right sides.
Preferably, the magnetic attraction mechanism comprises a limiting magnetic block, a magnetic column, a magnetic plate and a stabilizing magnetic block, wherein the rear part of one side, away from each other, of each clamping groove column at two sides is connected with the limiting magnetic block, the rear side of the top of the chassis is connected with the magnetic column, the left side and the right side of the annular support are both connected with the magnetic plate, and the rear sides of the two sliding sleeves are both connected with the stabilizing magnetic block.
Preferably, the device also comprises a driving mechanism and a transmission mechanism, wherein the driving mechanism is arranged between the sliding sleeve and the chassis, and the transmission mechanism is arranged between the sliding sleeve and the L-shaped rod.
Preferably, the actuating mechanism is including gear motor, lack tooth gear, the sliding seat, the ring gear, the connecting rod, the compression roller, the butt pole, the inclined seat, accessory plate and side lever, gear motor is installed to the chassis rear side, be connected with lack tooth gear on gear motor's the output shaft, the sliding sleeve left and right sides of top all is connected with the sliding seat, sliding connection has the ring gear between two sliding seats, the ring gear meshes with lack tooth gear, the left and right sides of below sliding sleeve all is connected with the connecting rod, rotationally be connected with the compression roller on the connecting rod, the compression roller contacts with the intrados of ring gear, be connected with the butt pole on the connecting rod, the butt pole is located the compression roller front side, both sides all open the spout around the ring gear, butt pole and the spout sliding fit of front side, the chassis top front side is connected with the inclined seat, the left and right sides of below sliding sleeve all is connected with the side lever, the spout sliding fit with the rear side lever, chassis bottom front side is connected with the accessory plate, the accessory plate is located inclined seat front side below.
Preferably, the transmission mechanism comprises a main shaft, a mounting plate, wedge-shaped sliding seats, clamping rods, reset springs, a transmission disc, cams, arc-shaped push plates, reset rods, belt pulleys and flat belts, wherein the middle part of the front side of the sliding sleeve above is connected with the mounting plate, the top of the mounting plate is connected with the wedge-shaped sliding seats in a sliding manner, the clamping rods are connected between the upper parts of the two sliding seats in a sliding manner, the left side and the right side of each clamping rod are sleeved with the reset springs, the two ends of each reset spring are respectively connected to the left side and the right side of each clamping rod and the top of each two sliding seats, the rear sides of the L-shaped rods are rotatably connected with the main shaft, the upper parts of the main shaft are connected with the cams, the bottoms of the main shaft are connected with the transmission disc, the left side and the right side of the annular support are all connected with the reset rods, the arc-shaped push plates are connected with the four arc-shaped push plates at uniform intervals along the circumferential direction, the main shaft and the deflector pulley are connected with the flat belts in a winding manner.
Preferably, the device further comprises frame rods, rolling balls and torsion springs, wherein a plurality of frame rods are connected to the front parts of the sides, away from each other, of the clamping groove columns on the two sides, the rolling balls are connected between the insides of the frame rods on the same side in a sliding mode, and the torsion springs are connected between the clamping groove columns and the sliding sleeves.
Preferably, the novel sliding sleeve is characterized by further comprising guide rings, a pulling seat and a pulling wire, wherein the front side and the rear side of the top of the L-shaped rod are respectively connected with the guide rings, the rear side of the L-shaped rod is also connected with the guide rings, the top of the guide frame is connected with the pulling seat in a sliding manner, the pulling seat is connected with the pulling wire, and the pulling wire sequentially penetrates through the three guide rings to be connected with the top of the upper sliding sleeve.
(3) The beneficial effects are that:
1. The silicon wafer is placed through the guide frame, and after the placement is finished, the silicon wafer is cracked through the cracking mechanism, so that the effect of cracking the silicon wafer is achieved.
2. The silicon wafer is supported through the connecting mechanism and the magnetic attraction mechanism, so that the silicon wafer is prevented from being broken due to direct falling after splitting, and the silicon wafer is supported.
3. The sliding sleeve in the guiding mechanism is assisted to rotate through the cooperation of the transmission mechanism and the driving mechanism, and the sliding sleeve in the guiding mechanism does not need to be manually operated to rotate, so that the manual operation is more convenient.
4. The clamping groove column in the guiding mechanism is assisted to incline through the ball, the clamping groove column is not required to be pulled to incline manually, and the labor is effectively saved.
5. In the operation process, only the silicon wafer needs to be pushed to move, so that labor is saved during operation, manual physical consumption can be reduced, fatigue is not easy to occur, and working efficiency is guaranteed.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic perspective view of a splinter mechanism according to the present invention.
Fig. 3 is an enlarged view of the invention at a.
Fig. 4 is an exploded view of the breaking mechanism of the present invention.
Fig. 5 is a schematic perspective view of the guiding mechanism of the present invention.
Fig. 6 is a schematic perspective view of a magnetic attraction mechanism of the present invention.
Fig. 7 is a schematic perspective view of a driving mechanism according to the present invention.
Fig. 8 is an enlarged view of the invention at B.
Fig. 9 is an exploded view of the drive mechanism of the present invention.
Fig. 10 is a schematic perspective view of a first part of the transmission mechanism of the present invention.
Fig. 11 is an enlarged view of the present invention at C.
Fig. 12 is a schematic perspective view of a second part of the transmission mechanism of the present invention.
Fig. 13 is a schematic partial perspective view of a first embodiment of the present invention.
Fig. 14 is a schematic partial perspective view of a second embodiment of the present invention.
The marks in the drawings are: the device comprises a chassis, a 2-support, a 3-support plate, a 4-guide frame, a 5-lobe mechanism, a 51-annular bracket, a 52-L-shaped rod, a 53-fixed shaft, a 54-swing rod, a 55-limit rod, a 56-pressurizing spring, a 57-deflector rod, a 58-deflector wheel, a 59-turntable, a 6-receiving mechanism, a 61-sliding sleeve, a 62-slot column, a 63-stop rod, a 64-connecting rod, a 7-magnetic attraction mechanism, a 71-limit magnet, a 72-magnetic column, a 73-magnetic plate, a 74-stabilizing magnet, a 8-driving mechanism, a 81-reducing motor, a 82-tooth missing gear, a 83-sliding seat, a 84-toothed ring, a 85-connecting rod, a 86-compression roller, a 87-supporting rod, a 88-sliding groove, a 89-inclined seat, a 80-auxiliary plate, a 811-side rod, a 9-driving mechanism, a 90-main shaft, a 91-mounting plate, a 92-wedge-sliding seat, a 93-clamping rod, a 94-reset spring, a 95-driving disc, a 96-cam, a 97-arc-shaped push plate, a 98-reset rod, a belt pulley, a 912-sliding seat, a flat frame, a 11-flat-toothed bar, a 21-annular spring, a rolling seat and a 20-rolling wire.
Detailed Description
The invention is further described below with reference to the drawings and examples.
Example 1
The utility model provides a high-efficient lobe of a leaf device of silicon chip, as shown in fig. 1-4, including chassis 1, support 2, extension board 3, leading truck 4 and lobe of a leaf mechanism 5, chassis 1 bottom left and right sides all is connected with two supports 2, and chassis 1 top left and right sides all is connected with two extension boards 3, is connected with leading truck 4 between four extension boards 3, and leading truck 4 is used for leading the silicon chip, is equipped with lobe of a leaf mechanism 5 on the chassis 1, and lobe of a leaf mechanism 5 is used for carrying out the lobe of a leaf to the silicon chip.
The splitting mechanism 5 comprises an annular support 51, an L-shaped rod 52, a fixed shaft 53, a swinging rod 54, a limiting rod 55, a compression spring 56, a deflector rod 57, a deflector rod 58 and a rotary table 59, wherein the rear side of the top of the chassis 1 is connected with the annular support 51, the top of the annular support 51 is connected with the L-shaped rod 52, the lower part of the front side of the L-shaped rod 52 is connected with the fixed shaft 53, the rear side of the fixed shaft 53 is rotationally connected with the two swinging rods 54, the swinging rods 54 are used for splitting silicon wafers, the rear side of the fixed shaft 53 is connected with the two limiting rods 55, the limiting rods 55 can limit the swinging rods 54, two compression springs 56 are connected between the two swinging rods 54, the top of the two swinging rods 54 is connected with the deflector rod 57, the upper part of the front side of the L-shaped rod 52 is rotationally connected with the deflector rod 58, the deflector rod 57 can be extruded, and the upper part of the deflector rod 58 is connected with the rotary table 59.
Firstly, a user can plug a silicon wafer with scratches carved by laser into the guide frame 4 and push the silicon wafer to move backwards until the part carved with scratches on the silicon wafer is positioned between the two swing rods 54, then the user can twist the rotary table 59 to drive the poking wheel 58 to rotate, after the poking wheel 58 rotates to be in contact with the poking rods 57, the poking wheel 58 continuously rotates to push the two poking rods 57 to be close to each other, the two poking rods 57 are close to each other to drive the two swing rods 54 to swing, the two compression springs 56 are compressed, the limiting rod 55 can play a limiting role, after the poking wheel 58 rotates to be out of contact with the poking rods 57, the swing rods 54 reversely swing under the action of self gravity, the compression springs 56 are reset along with the swing rods 54, at the moment, the compression springs 56 also exert pressure on the swing rods 54 reversely, the silicon wafer can be beaten, so that the silicon wafer is cracked along with the scratches carved out by manual work after the silicon wafer is cracked, and then the silicon wafer is pushed backwards again, if the silicon wafer is cracked repeatedly, and the effect of cracking the silicon wafer can be achieved.
Example 2
On the basis of the embodiment 1, as shown in fig. 1, 5 and 6, the device further comprises a receiving mechanism 6 and a magnetic attraction mechanism 7, the annular bracket 51 is provided with the receiving mechanism 6, the receiving mechanism 6 is used for supporting the silicon wafer, the magnetic attraction mechanism 7 is arranged between the receiving mechanism 6, the annular bracket 51 and the chassis 1, and the magnetic attraction mechanism 7 is used for positioning the receiving mechanism 6.
Connect and draw mechanism 6 including sliding sleeve 61, draw-in groove post 62, pin 63 and connecting rod 64, the last rotation of annular support 51 is connected with two sliding sleeves 61, two sliding sleeves 61 are the upper and lower symmetry setting, the equal rotation in one side that two sliding sleeves 61 are close to each other is connected with draw-in groove post 62, draw-in groove post 62 is used for supporting the silicon chip, draw-in groove post 62 is located guide frame 4 rear side, be connected with pin 63 between two draw-in groove post 62 rear sides, pin 63 is used for blocking the silicon chip, all be connected with connecting rod 64 between two sliding sleeves 61 left and right sides.
The magnetic attraction mechanism 7 comprises a limiting magnetic block 71, magnetic columns 72, magnetic plates 73 and stabilizing magnetic blocks 74, wherein the rear parts of one sides, far away from each other, of the clamping groove columns 62 on the two sides are respectively connected with the limiting magnetic block 71, the rear sides of the tops of the chassis 1 are respectively connected with the magnetic columns 72, the magnetic columns 72 can attract the limiting magnetic blocks 71, the left side and the right side of the annular support 51 are respectively connected with the magnetic plates 73, the rear sides of the two sliding sleeves 61 are respectively connected with the stabilizing magnetic blocks 74, and the magnetic plates 73 can attract the stabilizing magnetic blocks 74.
When the device does not operate yet, the limiting magnetic block 71 on the lower clamping groove column 62 is sucked by the magnetic column 72, so that the clamping groove column 62 is limited, when the silicon wafer is pushed to move backwards, the silicon wafer can pass through the guide frame 4, after the silicon wafer passes through the guide frame 4, the silicon wafer continues to move backwards and can be plugged between the two clamping groove columns 62, when the silicon wafer moves backwards to be in contact with the stop lever 63, the stop lever 63 can limit the silicon wafer, at the moment, the position of the silicon wafer, where scratches are carved out by laser, is also positioned between the two swing rods 54, then the silicon wafer can be operated to split, after splitting is finished, a user can pull the connecting rod 64 to drive the sliding sleeve 61 to rotate along the annular bracket 51 by ten degrees, the sliding sleeve 61 drives the stabilizing magnetic block 74 and the clamping groove column 62 to rotate together during rotation, the limiting magnetic block 71 on the lower clamping groove column 62 is separated from the magnetic column 72 after the silicon wafer rotates, the stabilizing magnetic block 74 is sucked with the magnetic plate 73 during rotation, the clamping groove column 62 is also driven to rotate during rotation, the clamping groove column 62 is pulled to rotate, then the silicon wafer is pulled forwards by the user to cut the clamping groove 62 to slide down, the sliding sleeve is inclined by the sliding sleeve 62, and then the silicon wafer can be inclined by the sliding sleeve 62 is rotated, and then the sliding sleeve is rotated to rotate by the sliding sleeve after the silicon wafer is inclined by the sliding sleeve to rotate by the sliding sleeve, and then the silicon wafer is completely, after the silicon wafer is inclined by the sliding sleeve 62 and the silicon wafer is completely and then finished.
Example 3
On the basis of embodiment 2, as shown in fig. 1, 7, 8, 9, 10, 11, 12, 13 and 14, the device further comprises a driving mechanism 8 and a transmission mechanism 9, wherein the driving mechanism 8 is arranged between the sliding sleeve 61 and the chassis 1, the driving mechanism 8 is used for providing driving force, the transmission mechanism 9 is arranged between the sliding sleeve 61 and the L-shaped rod 52, and the transmission mechanism 9 is used for transmitting the operation of the connecting mechanism 6 and the splitting mechanism 5.
The driving mechanism 8 comprises a gear motor 81, a gear-missing gear 82, sliding seats 83, a toothed ring 84, a connecting rod 85, press rollers 86, a supporting rod 87, an inclined seat 89, an auxiliary plate 80 and side rods 811, wherein the gear motor 81 is arranged at the rear side of the chassis 1, the gear-missing gear 82 is connected to an output shaft of the gear motor 81, the sliding seats 83 are connected to the left side and the right side of the upper sliding sleeve 61, the toothed ring 84 is connected between the two sliding seats 83 in a sliding mode, the toothed ring 84 is meshed with the gear-missing gear 82, the connecting rods 85 are connected to the left side and the right side of the lower sliding sleeve 61, the press rollers 86 are connected to the press rollers 86 in a rotating mode, the pressing rollers 86 are in contact with the intrados of the toothed ring 84, the supporting rod 85 is connected with the supporting rod 87, the supporting rod 87 is located at the front side of the press rollers 86, the front side and the rear side of the toothed ring 84 are provided with sliding grooves 88, the supporting rod 87 is in sliding fit with the front side sliding grooves 88, the front side rods 1 are connected to the front side of the front side sliding grooves 89, the lower sliding seats 89 are located below the front side of the clamping groove columns 62, the left side and the right side and the lower sliding seats 61 are connected to the connecting rods 85, the upper side and the auxiliary plate 80 are in sliding fit with the front side 80.
The transmission mechanism 9 comprises a main shaft 90, a mounting plate 91, a wedge slide 92, a clamping rod 93, a reset spring 94, a transmission disc 95, a cam 96, an arc push plate 97, a reset rod 98, a belt pulley 911 and a flat belt 912, wherein the middle part of the front side of the upper slide sleeve 61 is connected with the mounting plate 91, the top of the mounting plate 91 is connected with the wedge slide 92 in a sliding manner, the clamping rods 93 are connected between the upper parts of the two slide seats 83 in a sliding manner, the left side and the right side of the clamping rod 93 are sleeved with the reset spring 94, the two ends of the two reset springs 94 are respectively connected to the left side and the right side of the clamping rod 93 and the top of the two slide seats 83, the wedge slide 92 can squeeze the clamping rod 93 to move, the rear side of the L-shaped rod 52 is rotatably connected with the main shaft 90, the upper part of the main shaft 90 is connected with the cam 96, the cam 96 can squeeze the wedge slide 92 to move, the left side and the right side of the annular bracket 51 is connected with the reset rod 98, the reset rod 98 can squeeze the wedge slide 92, the inner cambered surfaces 84 are uniformly and alternately connected with four arc push plates 97 in the circumferential direction, the arc push plates 97 can push the drive the transmission disc 95 to rotate, the belt pulley 911 and the flat belt 912 can be driven to rotate about the flat belt 912, and the flat belt 912 can be matched with the belt 911.
When the gear 82 rotates to be meshed with the toothed ring 84, the gear 82 continuously rotates to drive the toothed ring 84 to rotate, the sliding seat 83 plays a guiding role, the press roller 86 can press the toothed ring 84, the supporting rod 87 and the side rod 811 slide along the sliding groove 88 to play a guiding role, the toothed ring 84 drives the arc push plate 97 to rotate when rotating, when the arc push plate 97 rotates to be contacted with the transmission disc 95, the arc push plate 97 continuously rotates to drive the transmission disc 95 to rotate, the transmission disc 95 rotates to drive the main shaft 90 to rotate, the main shaft 90 rotates to drive the driving wheel 58 to rotate through the belt pulley 911 and the flat belt 912, the driving wheel 58 can drive the swing rod 54 to split, the main shaft 90 also drives the cam 96 to rotate when rotating, the cam 96 continuously rotates to press the wedge slide 92 to move backwards after rotating to be matched with the wedge slide 92, the wedge slide 92 will push the clamping rod 93 to move downwards through its upper inclined surface when moving backwards, the return spring 94 is compressed, the clamping rod 93 moves downwards and then clamps on the toothed ring 84, then the plane at the bottom of the wedge slide 92 contacts with the clamping rod 93, so as to clamp the clamping rod 93, then the toothed ring 84 continues to rotate and drive the clamping rod 93 to rotate together, the clamping rod 93 drives the wedge slide 92 to rotate when rotating, the wedge slide 92 rotates and drives the mounting plate 91 to rotate, the mounting plate 91 rotates and drives the two sliding sleeves 61 to rotate together through the two connecting rods 64, at this time, the wafer splitting is just completed, after the wedge slide 92 rotates to contact with the return rod 98, the wedge slide 92 continues to rotate and moves forwards through the return rod 98, the wedge slide 92 does not squeeze the clamping rod 93 any more, at this time, the upward movement of the clamping rod 93 under the action of the return spring 94 resets so as not to clamp the toothed ring 84, the tooth-missing gear 82 is disengaged from the toothed ring 84, the toothed ring 84 is not rotated any more, and at this time, the sliding sleeve 61 is just rotated ninety degrees, then the clamping groove column 62 can be operated to discharge the silicon wafer, the discharged silicon wafer can slide in the inclined seat 89 and slide on the auxiliary plate 80 through the inclined seat 89, so that the sliding sleeve 61 does not need to be rotated manually, the labor is effectively saved, and after the silicon wafer is discharged, the sliding sleeve 61 is reversely rotated by the manual work to reset.
The novel rolling ball type torsion spring comprises a frame rod 10, rolling balls 11 and torsion springs 12, wherein a plurality of frame rods 10 are connected to the front portions of the sides, far away from each other, of two side clamping groove columns 62, the rolling balls 11 are connected between the interiors of the frame rods 10 on the same side in a sliding mode, and the torsion springs 12 are connected between the clamping groove columns 62 and sliding sleeves 61.
When the sliding sleeve 61 rotates ninety degrees, the rolling ball 11 slides forwards under the action of gravity, the clamping groove column 62 inclines forwards and downwards along with the forward sliding of the rolling ball 11, the torsion spring 12 is compressed, the clamping groove column 62 inclines forwards and downwards and then the silicon wafer is detached, so that the clamping groove column 62 does not need to be manually inclined, the labor is effectively saved, when the sliding sleeve 61 is pulled to reset, the clamping groove column 62 swings back and forth, the clamping groove column 62 can drive the rolling ball 11 to move together when swinging, after the sliding sleeve 61 resets, the clamping groove column 62 below continuously swings to enable the limiting magnetic block 71 on the limiting magnetic block to be attracted by the magnetic column 72, the limiting magnetic block 71 can drive the two clamping groove columns 62 to reset through the stop lever 63 when being attracted by the magnetic column 72, and the torsion spring 12 can assist in resetting.
The novel sliding sleeve 61 is characterized by further comprising guide rings 20, a pulling seat 21 and a pulling wire 22, wherein the front side and the rear side of the top of the L-shaped rod 52 are respectively connected with the guide rings 20, the rear side of the L-shaped rod 52 is also connected with the guide rings 20, the top of the guide frame 4 is connected with the pulling seat 21 in a sliding manner, the pulling seat 21 is connected with the pulling wire 22, and the pulling wire 22 sequentially penetrates through the three guide rings 20 to be connected with the top of the upper sliding sleeve 61, so that the pulling wire 22 is convenient for pulling the sliding sleeve 61 to reset.
The sliding sleeve 61 drives the pull wire 22 to move when rotating, the pull wire 22 drives the pull seat 21 to move forward when moving, when the sliding sleeve 61 needs to be reset, the pull seat 21 is pulled to move backwards for reset, the pull seat 21 can pull the pull wire 22 to move backwards when moving backwards, and the pull wire 22 can drive the sliding sleeve 61 to reset when moving, so that the sliding sleeve 61 can be operated more conveniently for reset.
The foregoing examples have shown only the preferred embodiments of the invention, which are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that modifications, improvements and substitutions can be made by those skilled in the art without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (1)
1. The high-efficiency splitting device for the silicon wafer is characterized by comprising a chassis (1), support seats (2), support plates (3), guide frames (4) and splitting mechanisms (5), wherein the left side and the right side of the bottom of the chassis (1) are connected with the two support seats (2), the left side and the right side of the top of the chassis (1) are connected with the two support plates (3), the guide frames (4) are connected between the four support plates (3), and the splitting mechanisms (5) are arranged on the chassis (1);
The splitting mechanism (5) comprises an annular bracket (51), an L-shaped rod (52), a fixed shaft (53), swing rods (54), limiting rods (55), a pressurizing spring (56), a deflector rod (57), a deflector wheel (58) and a rotary table (59), wherein the annular bracket (51) is connected to the rear side of the top of the chassis (1), the L-shaped rod (52) is connected to the top of the annular bracket (51), the fixed shaft (53) is connected to the lower portion of the front side of the L-shaped rod (52), two swing rods (54) are rotatably connected to the rear side of the fixed shaft (53), two limiting rods (55) are connected to the rear side of the fixed shaft (53), two pressurizing springs (56) are connected between the two swing rods (54), the deflector rod (57) is connected to the top of the two swing rods (54), the deflector wheel (58) is rotatably connected to the upper portion of the front side of the L-shaped rod (52), and the rotary table (59) is connected to the upper portion of the deflector wheel (58).
The device also comprises a connecting mechanism (6) and a magnetic attraction mechanism (7), wherein the annular bracket (51) is provided with the connecting mechanism (6), and the magnetic attraction mechanism (7) is arranged among the connecting mechanism (6), the annular bracket (51) and the chassis (1);
The guiding mechanism (6) comprises sliding sleeves (61), clamping groove columns (62), stop rods (63) and connecting rods (64), wherein the two sliding sleeves (61) are rotationally connected to the annular support (51), the two sliding sleeves (61) are symmetrically arranged up and down, the clamping groove columns (62) are rotationally connected to one sides, close to each other, of the two sliding sleeves (61), the clamping groove columns (62) are located at the rear sides of the guide frames (4), the stop rods (63) are connected between the rear sides of the two clamping groove columns (62), and the connecting rods (64) are connected between the left sides and the right sides of the two sliding sleeves (61);
The magnetic attraction mechanism (7) comprises limiting magnetic blocks (71), magnetic columns (72), magnetic plates (73) and stabilizing magnetic blocks (74), wherein the rear parts of one sides, far away from each other, of the clamping groove columns (62) on two sides are respectively connected with the limiting magnetic blocks (71), the rear sides of the tops of the chassis (1) are respectively connected with the magnetic columns (72), the left side and the right side of the annular support (51) are respectively connected with the magnetic plates (73), and the rear sides of the two sliding sleeves (61) are respectively connected with the stabilizing magnetic blocks (74);
The novel lifting device also comprises a driving mechanism (8) and a transmission mechanism (9), wherein the driving mechanism (8) is arranged between the sliding sleeve (61) and the chassis (1), and the transmission mechanism (9) is arranged between the sliding sleeve (61) and the L-shaped rod (52);
The driving mechanism (8) comprises a gear motor (81), a gear-missing gear (82), a sliding seat (83), a toothed ring (84), a connecting rod (85), a press roller (86), a supporting rod (87), an inclined seat (89), an auxiliary plate (80) and a side rod (811), wherein the gear-missing gear (82) is connected to the output shaft of the gear motor (81), sliding seats (83) are connected to the left side and the right side of the upper sliding sleeve (61), the toothed ring (84) is connected between the two sliding seats (83) in a sliding manner, the toothed ring (84) is meshed with the gear-missing gear (82), the connecting rod (85) is connected to the left side and the right side of the lower sliding sleeve (61), the pressing rod (86) is connected to the inner arc surface of the toothed ring (84) in a contact manner, the supporting rod (85) is connected with the supporting rod (87), the supporting rod (87) is positioned at the front side of the pressing rod (86), sliding grooves (88) are respectively arranged on the front side and the rear side of the toothed ring (84), sliding grooves (87) are respectively matched with the sliding grooves (88) on the front side of the front side, the sliding grooves (88) on the left side and the right side of the lower sliding sleeve (61) are respectively connected to the lower sliding seat (62), the side rod (811) is in sliding fit with the sliding groove (88) at the rear side, the front side of the bottom of the chassis (1) is connected with the auxiliary plate (80), and the auxiliary plate (80) is positioned below the front side of the inclined seat (89);
The transmission mechanism (9) comprises a main shaft (90), a mounting plate (91), a wedge-shaped sliding seat (92), clamping rods (93), a reset spring (94), a transmission disc (95), a cam (96), an arc-shaped push plate (97), a reset rod (98), a belt pulley (911) and a flat belt (912), wherein the middle part of the front side of the upper sliding sleeve (61) is connected with the mounting plate (91), the top of the mounting plate (91) is slidably connected with the wedge-shaped sliding seat (92), the clamping rods (93) are slidably connected between the upper parts of the two sliding seats (83), the left side and the right side of the clamping rods (93) are respectively sleeved with the reset spring (94), two ends of each reset spring (94) are respectively connected to the left side and the right side of the clamping rods (93) and the top of the two sliding seats (83), the rear side of the L-shaped rod (52) is rotatably connected with the main shaft (90), the upper part of the main shaft (90) is connected with the cam (96), the bottom of the main shaft (90) is connected with the transmission disc (95), the left side and the right side of the annular bracket (51) is respectively connected with the reset rod (98), the inner cambered surfaces of the toothed ring (84) are uniformly and are connected with four arc-shaped push plates (97) at intervals along the circumferential direction, and the left side and the right side of the belt pulley (911) is connected with the flat belt pulley (911); the novel rolling ball device is characterized by further comprising frame rods (10), rolling balls (11) and torsion springs (12), wherein a plurality of frame rods (10) are connected to the front parts of the sides, away from each other, of the clamping groove columns (62) on the two sides, the rolling balls (11) are connected between the interiors of the frame rods (10) on the same side in a sliding mode, and the torsion springs (12) are connected between the clamping groove columns (62) and the sliding sleeves (61);
The novel guide ring structure is characterized by further comprising guide rings (20), a pulling seat (21) and a pulling wire (22), wherein the guide rings (20) are connected to the front side and the rear side of the top of the L-shaped rod (52), the guide rings (20) are also connected to the rear side of the L-shaped rod (52), the pulling seat (21) is connected to the top of the guide frame (4) in a sliding manner, the pulling wire (22) is connected to the pulling seat (21), and the pulling wire (22) sequentially penetrates through the three guide rings (20) to be connected with the top of the upper sliding sleeve (61).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111496719.5A CN114227956B (en) | 2021-12-09 | 2021-12-09 | High-efficient lobe of a leaf device of silicon chip |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111496719.5A CN114227956B (en) | 2021-12-09 | 2021-12-09 | High-efficient lobe of a leaf device of silicon chip |
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| Publication Number | Publication Date |
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| CN114227956A CN114227956A (en) | 2022-03-25 |
| CN114227956B true CN114227956B (en) | 2024-04-19 |
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| CN202111496719.5A Active CN114227956B (en) | 2021-12-09 | 2021-12-09 | High-efficient lobe of a leaf device of silicon chip |
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| GB376726A (en) * | 1930-01-21 | 1932-07-14 | Agustin Plana | Improvements to machines for testing metals by shock |
| GB430669A (en) * | 1933-12-27 | 1935-06-24 | Brecknell Munro & Rogers 1928 | Improvements in or relating to coin freed amusement apparatus |
| JP2000156396A (en) * | 1998-06-23 | 2000-06-06 | Nippei Toyama Corp | Wafer separating carrier |
| JP2005106970A (en) * | 2003-09-29 | 2005-04-21 | Nidec Copal Corp | Exposure adjustment device for camera |
| CN107718331A (en) * | 2017-10-10 | 2018-02-23 | 覃其伦 | A kind of sliver apparatus of silicon chip |
| CN108818969A (en) * | 2018-06-22 | 2018-11-16 | 贵州荣兴新型建材科技有限公司 | Calcium-plastic board process equipment |
| CN212421827U (en) * | 2020-04-08 | 2021-01-29 | 西安奕斯伟硅片技术有限公司 | Wafer cutting and splitting device |
-
2021
- 2021-12-09 CN CN202111496719.5A patent/CN114227956B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB376726A (en) * | 1930-01-21 | 1932-07-14 | Agustin Plana | Improvements to machines for testing metals by shock |
| GB430669A (en) * | 1933-12-27 | 1935-06-24 | Brecknell Munro & Rogers 1928 | Improvements in or relating to coin freed amusement apparatus |
| JP2000156396A (en) * | 1998-06-23 | 2000-06-06 | Nippei Toyama Corp | Wafer separating carrier |
| JP2005106970A (en) * | 2003-09-29 | 2005-04-21 | Nidec Copal Corp | Exposure adjustment device for camera |
| CN107718331A (en) * | 2017-10-10 | 2018-02-23 | 覃其伦 | A kind of sliver apparatus of silicon chip |
| CN108818969A (en) * | 2018-06-22 | 2018-11-16 | 贵州荣兴新型建材科技有限公司 | Calcium-plastic board process equipment |
| CN212421827U (en) * | 2020-04-08 | 2021-01-29 | 西安奕斯伟硅片技术有限公司 | Wafer cutting and splitting device |
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|---|---|
| CN114227956A (en) | 2022-03-25 |
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Effective date of registration: 20240419 Address after: 317000, Room 1706, 17th Floor, Science and Technology Innovation Center, No. 695 Linhai Avenue, Dayang Street, Linhai City, Taizhou City, Zhejiang Province Patentee after: Zhejiang Ebi Semiconductor Equipment Co.,Ltd. Country or region after: China Address before: 518017 room 611, 6 / F, building a, No. 713, Xintian Avenue, Fuyong street, Bao'an District, Shenzhen, Guangdong Province Patentee before: Pan Zhenzhen Country or region before: China |
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