CN114207826A - 图像传感器及其制作方法、成像装置和终端设备 - Google Patents

图像传感器及其制作方法、成像装置和终端设备 Download PDF

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Publication number
CN114207826A
CN114207826A CN202080035420.7A CN202080035420A CN114207826A CN 114207826 A CN114207826 A CN 114207826A CN 202080035420 A CN202080035420 A CN 202080035420A CN 114207826 A CN114207826 A CN 114207826A
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pixel
groove
light
substrate layer
filter
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CN202080035420.7A
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姚国峰
沈健
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Shenzhen Goodix Technology Co Ltd
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Shenzhen Goodix Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

一种图像传感器(20),其包括具有多个基本单元的像素阵列,基本单元包括第一像素(111)、第二像素(112)和第三像素(113),第一像素(111)为短波段光像素,第二像素(112)为中波段光像素;所述像素阵列在垂直方向上包括彩色滤光层(120)、第一衬底层(130)、介质层(140)和第二衬底层(150);在第一衬底层(130)的正面形成有向第一衬底层(130)延伸的且与第一像素(111)相对应的第一凹槽(137)以及与第二像素(112)相对应的第二凹槽(138),且第一凹槽(137)的深度大于第二凹槽(138)的深度。该图像传感器可以提高彩色图像成像的精确性。

Description

PCT国内申请,说明书已公开。

Claims (12)

  1. PCT国内申请,权利要求书已公开。
CN202080035420.7A 2020-06-28 2020-06-28 图像传感器及其制作方法、成像装置和终端设备 Pending CN114207826A (zh)

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PCT/CN2020/098604 WO2022000142A1 (zh) 2020-06-28 2020-06-28 图像传感器及其制作方法、成像装置和终端设备

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CN114207826A true CN114207826A (zh) 2022-03-18

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CN (1) CN114207826A (zh)
WO (1) WO2022000142A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100563018C (zh) * 2006-05-09 2009-11-25 台湾积体电路制造股份有限公司 背照式传感器及其形成方法
KR101844952B1 (ko) * 2011-04-15 2018-04-04 삼성전자주식회사 이미지 센서
CN102723349B (zh) * 2012-06-26 2015-01-21 中国科学院上海高等研究院 带有隔离层的cmos图像传感器及其制作方法
CN108281435A (zh) * 2018-01-04 2018-07-13 德淮半导体有限公司 一种图像传感器及其形成方法

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