CN114207767B - 多站半导体处理中的可独立调整流路传导性 - Google Patents
多站半导体处理中的可独立调整流路传导性 Download PDFInfo
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- CN114207767B CN114207767B CN202080055744.7A CN202080055744A CN114207767B CN 114207767 B CN114207767 B CN 114207767B CN 202080055744 A CN202080055744 A CN 202080055744A CN 114207767 B CN114207767 B CN 114207767B
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US62/858,570 | 2019-06-07 | ||
PCT/US2020/070072 WO2020247966A1 (en) | 2019-06-07 | 2020-05-22 | Independently adjustable flowpath conductance in multi-station semiconductor processing |
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CN112908902B (zh) * | 2021-02-10 | 2024-04-09 | 长江存储科技有限责任公司 | 半导体器件处理设备及处理方法 |
KR20240063981A (ko) * | 2021-09-21 | 2024-05-10 | 램 리써치 코포레이션 | 플로우 제한기들의 업스트림의 가열기들을 사용하는 복수의 스테이션들로의 가스 플로우 밸런싱 |
CN113862647A (zh) * | 2021-09-28 | 2021-12-31 | 长江存储科技有限责任公司 | 一种薄膜沉积设备及方法 |
WO2023102325A1 (en) * | 2021-12-01 | 2023-06-08 | Lam Research Corporation | Dry process tool with adjustable flow valve |
WO2023114067A1 (en) * | 2021-12-13 | 2023-06-22 | Lam Research Corporation | Valve systems for balancing gas flow to multiple stations of a substrate processing system |
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CN1950545A (zh) * | 2004-04-30 | 2007-04-18 | 兰姆研究公司 | 包括喷头电极和加热器的用于等离子处理的设备 |
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KR20220018591A (ko) | 2022-02-15 |
CN114207767A (zh) | 2022-03-18 |
US20220228263A1 (en) | 2022-07-21 |
TW202114095A (zh) | 2021-04-01 |
WO2020247966A1 (en) | 2020-12-10 |
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