CN114206755B

CN114206755B - Test body, diagnostic system using the same, and article inspection device

Info

Publication number: CN114206755B
Application number: CN202080037710.5A
Authority: CN
Inventors: 田村淳一; 安斋裕贵; 込山仁
Original assignee: Anritsu Corp
Current assignee: Anritsu Corp
Priority date: 2019-05-22
Filing date: 2020-05-18
Publication date: 2023-12-05
Anticipated expiration: 2040-05-18
Also published as: US20220242676A1; CN114206755A; WO2020235525A1; DE112020002456T5

Abstract

Provided is an article inspection device capable of easily diagnosing an inspection function failure caused by dynamic behavior of an article generated by a conveyance system of an inspection line. An article inspection device (1) for inspecting articles conveyed on an inspection line is provided with a diagnosis unit (25 c), wherein the diagnosis unit (25 c) diagnoses a conveyance system of the inspection line based on acceleration and angular velocity data in each axis direction obtained from a test body (2) when the test body (2) is conveyed, and the test body (2) is provided with a motion sensor (12) for detecting acceleration and angular velocity in each axis direction in three dimensions.

Description

Test body, diagnostic system using the same, and article inspection device

Technical Field

The present invention relates to an article inspection apparatus for inspecting articles conveyed by a conveyance apparatus on an inspection line, a test body used for diagnosis of a conveyance system of the inspection line, a diagnosis system using the test body, and an article inspection apparatus.

Background

Conventionally, as an article inspection apparatus for inspecting articles conveyed on an inspection line by a conveying apparatus, for example, a metal detection apparatus for detecting foreign matters in articles, an X-ray foreign matter detection apparatus, a weight screening machine for screening articles by weight, and the like have been known.

In such an article inspection apparatus, in order to reduce false detection and ensure detection accuracy, an operation of confirming the operation of the article inspection apparatus using a test body is performed before the inspection of the article is performed. For example, patent document 1 discloses a foreign matter detection device using a test piece (test piece).

In the test piece of patent document 1, the test foreign matter sheet is stored in the storage member, and the test foreign matter sheet has an information recording unit that records identification information for identifying the test foreign matter sheet as optically readable information. In the foreign matter detection device of patent document 1, the test piece is conveyed on the inspection line by the conveying device, the identification information is optically read from the test piece, the identification of the test piece is performed based on the read identification information, and the operation is confirmed based on the identification result.

As described above, conventionally, there are a test body having a predetermined size of a foreign matter (a test foreign matter sheet disclosed in patent document 1) and a test body composed of a predetermined weight as a test body for confirming the operation of an article inspection apparatus.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2010-107357

Disclosure of Invention

Problems to be solved by the invention

However, with respect to a test body used in a conventional article inspection apparatus, there is no test body in which the test body itself is provided with a sensor. Therefore, for example, there are the following problems regarding an inspection function failure caused by a dynamic behavior of an article being conveyed at the time of transfer in a conveyor: the skilled service personnel must diagnose and adjust the transport system of the article inspection apparatus at the actual production site, and it is not easy to diagnose the inspection malfunction due to the dynamic behavior of the articles generated by the transport system of the article inspection apparatus. Here, the conveyance system refers to a mechanism portion related to conveyance of an article in an inspection line (a series of apparatus groups including an article inspection apparatus and conveyance apparatuses provided upstream and downstream thereof).

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a test body capable of easily diagnosing an inspection failure caused by a dynamic behavior of an article generated by a conveyance system of an inspection line, a diagnostic system using the test body, and an article inspection apparatus.

Solution for solving the problem

In order to achieve the above object, according to claim 1 of the present invention, there is provided a test body 2 to be conveyed by a conveying unit 21 for diagnosing a conveying system of an article inspection apparatus 1 for inspecting articles conveyed by the conveying unit, comprising:

A motion sensor 12 that detects acceleration and angular velocity in each axis direction in three dimensions;

a holding member 11 that holds the motion sensor; and

an external interface unit 15 for outputting data including the acceleration and the angular velocity to the outside.

The test body according to claim 2, wherein, in the test body according to claim 1,

there is also a storage section 14 storing the data,

the external interface unit 15 outputs the data in the storage unit at a predetermined timing.

The test body according to claim 3, wherein in the test body according to claim 1 or 2,

the external interface unit 15 outputs the data to the outside by wireless transmission.

The test body according to claim 4, wherein, in any one of the test bodies according to claims 1 to 3,

further provided with a sensor 13 for environmental diagnosis,

the external interface unit 15 outputs data obtained by the environmental diagnosis sensor to the outside.

The diagnostic system according to claim 5 is characterized by comprising:

the test body 2 according to any one of aspects 1 to 4; and

and a diagnostic device 5 for acquiring data outputted from the test body and diagnosing the conveyance system of the article inspection device 1 that conveys the test body based on the generated diagnostic data obtained by time-series of the three-dimensional axis directions.

The diagnostic system according to claim 6 is characterized in that, in the diagnostic system according to claim 5,

the diagnostic device 5 generates a waveform from the diagnostic data.

An article inspection apparatus according to claim 7 is an article inspection apparatus 1 for inspecting an article conveyed on an inspection line, comprising:

a data acquisition unit 25a that acquires data of acceleration and angular velocity in each axial direction obtained from the test body 2 according to any one of aspects 1 to 4 when the test body is conveyed on the inspection line; and

and a diagnosis unit 25c that diagnoses the conveyance system of the inspection line based on the data.

The article inspection device according to claim 8 is characterized in that, in the article inspection device according to claim 7,

the data acquisition unit 25a acquires the data stored in the storage unit 14 included in the test body 2 via a medium.

The article inspection device according to claim 9 is characterized in that, in the article inspection device according to claim 7,

the data acquisition unit 25a acquires the data via wireless transmission by the communication unit 15 included in the test body 2.

The article inspection device according to claim 10 is characterized in that, in any one of claims 7 to 9,

Further comprises a conveying part 21 for conveying the articles,

the diagnostic unit 25c determines whether or not the displacement amount of the data in the transit section between the conveying unit and the conveying device 3 provided upstream or downstream of the conveying unit is within a predetermined range.

The article inspection device according to claim 11 is characterized in that, in any one of claims 7 to 9,

the diagnostic unit 25c determines whether or not the displacement amount of the data in the inspection area obtained when the main workpiece to which the motion sensor 12 is attached is conveyed as the test body 2 is within a predetermined range.

The article inspection device according to claim 12 is characterized in that, in any one of claims 7 to 9,

the diagnosis unit 25c includes a storage unit 25b for storing the diagnosis result, and the diagnosis unit 25c includes a predictive maintenance function for monitoring the progress of the diagnosis result stored in the storage unit to estimate the performance degradation or deterioration.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, it is possible to easily diagnose an inspection function failure caused by a dynamic behavior of an article generated by an inspection line or a conveying system of an article inspection apparatus.

Drawings

Fig. 1 is a block diagram showing an outline configuration of an article inspection apparatus according to the present invention.

Fig. 2 is a block diagram showing a schematic configuration of a test body and a diagnostic system according to the present invention.

Fig. 3A is a schematic perspective view of a test body conveyed by the conveying device toward the article inspection device according to the present invention.

Fig. 3B is a block diagram showing a schematic structure of the test body.

Fig. 4 is an explanatory view of each axis of the test body on the conveying device.

Fig. 5A is a view showing an example of an inspection object of a packaged product.

Fig. 5B is a diagram showing an example of a holding member of the test body corresponding to the test object of fig. 5A.

Fig. 5C is a diagram showing an example of an object to be inspected in a container product.

Fig. 5D is a diagram showing an example of a holding member of the test body corresponding to the test object of fig. 5C.

Fig. 6A is an explanatory diagram of an example of the transfer of the test body between the conveyance devices on the inspection line, viewed from the side.

Fig. 6B is an explanatory view of an example of the transfer of the test body between the transporting devices on the inspection line in a plan view.

Fig. 7A is a waveform diagram showing an example of a change in the rotation angle per unit time in the Y-axis direction.

Fig. 7B is a waveform diagram showing an example of a change in the rotation angle per unit time in the Z-axis direction.

Fig. 8A is a diagram showing a state of conveyance of a test body in the case where there is no shutter in the X-ray inspection apparatus.

Fig. 8B is a diagram showing a state of conveyance of the test body in the case where the X-ray inspection apparatus has a shutter.

Fig. 9 is a diagram showing an example of a waveform of acceleration of the sample in the conveyance direction in fig. 8B.

Fig. 10 is a diagram showing an example of a waveform of the conveying speed obtained from the waveform of the acceleration of fig. 9.

Fig. 11 is a diagram showing an example of the actual elapsed time of the sample in fig. 8B corresponding to the target elapsed time and the target conveyance distance.

Fig. 12 is an explanatory view of the case where the conveyance speed of the test body falls within the allowable range.

Fig. 13 is an explanatory view of the case where the conveyance speed of the test body is out of the allowable range.

Fig. 14 is a diagram showing an example of a change in acceleration in the Z-axis direction.

Fig. 15 is a diagram showing an example of a change in angular velocity in the pitch axis direction.

Fig. 16 is an explanatory view of a case where a test object formed by providing a motion sensor on an object to be inspected is conveyed by a conveying device.

Fig. 17 is a diagram showing an example of tilt detection data for correcting data in each axial direction of a test body formed by providing a motion sensor to an object to be inspected.

Detailed Description

The mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 1, the article inspection apparatus 1 of the present embodiment is configured by, for example, a metal detection apparatus that inspects an article (an object to be inspected) conveyed upstream from an inspection line, a foreign matter detection apparatus that uses X-rays, a weight screening machine, and the like, and has a function of acquiring data from a test body 2 to diagnose a conveying system of the inspection line.

As shown in fig. 2, the diagnostic system 4 of the present embodiment is generally configured to include: a test body 2 used in the article inspection apparatus 1 (for example, a metal detection apparatus, a foreign matter detection apparatus using X-rays, a weight screening machine, etc.); and a diagnostic device 5 that acquires data from the test body 2 and diagnoses a conveyance system on which the inspection line of the article inspection device 1 is disposed. The following describes the structures of the test body 2, the article inspection apparatus 1, and the diagnostic apparatus 5.

[ Structure of test body ]

The test body 2 is used for diagnosis of a conveyance system of an inspection line of the article inspection apparatus 1 in which a metal detection apparatus, a foreign matter detection apparatus using X-rays, a weight screening machine, or the like is disposed, for example, for inspecting an object (article) to be inspected, and a conveyance system of the article inspection apparatus 1. In the case of diagnosing the conveyance system of the inspection line as shown in fig. 3A, the test body 2 houses the motion sensor 12, the environmental diagnosis sensor 13, the storage unit 14, and the communication unit 15 of fig. 3B in the holding member 11, and the holding member 11 has a surface that contacts the conveyance surface 3A of the conveyance device 3, such as a belt conveyor, that conveys the article toward the article inspection device 1 on the inspection line, as a bottom surface.

As shown in fig. 3A and 4, an identifier 11a, for example, constituted by an arrow mark, is attached to one surface of the holding member 11 to convey the test body 2 in a regular arrangement. In the case of normal arrangement of the test bodies 2, the test bodies 2 are arranged on the conveying surface 3a of the conveying device 3 such that the surface to which the identifier 11a is attached faces upward and the arrow mark of the identifier 11a coincides with the conveying direction a. This prevents the test body 2 from being conveyed in the wrong direction on the conveying surface 3a of the conveying device 3 when the user performs diagnosis using the test body 2.

The holding member 11 is preferably formed of a shape and a material that simulate structural/physical characteristics of an object (article) to be inspected.

The structural/physical characteristics include, for example, the position of the center of gravity, the degree of freedom of the position of the center of gravity, mechanical stability, the shape and area of the reference surface in contact with the conveying surface 3a of the conveying device 3, the hardness of the reference surface, the coefficient of friction of the reference surface, and the like.

Specifically, for example, when the packaged product shown in fig. 5A is the object W to be inspected, the holding member 11 shown in fig. 5B is used. The holding member 11 in fig. 5B is made of a metal or a resin having a substantially rectangular parallelepiped shape, and the center of gravity G of the metal or the resin having a substantially rectangular parallelepiped shape is located at the same height as the center of gravity G of the object W in fig. 5A, and the bottom surface side is cut out to form a reference surface 11B (a hatched portion in the drawing) having the same shape and area as the reference surface Wa (a hatched portion in the drawing) of the object W in contact with the conveying surface 3a of the conveying device 3.

In addition, for example, when the container product shown in fig. 5C is the inspection object W, the holding member 11 shown in fig. 5D is used. The holding member 11 shown in fig. 5D is made of a metal or a resin having a substantially cylindrical shape, and the center of gravity G of the metal or the resin is located at the same height as the center of gravity G of the object W shown in fig. 5C, and the bottom surface side is cut out to form a reference surface 11b (a diagonally hatched portion in the figure) having the same shape and area as the reference surface Wa (diagonally hatched portion in the figure) of the object W in contact with the conveying surface 3a of the conveying device 3.

The object W to be actually inspected can be used as the holding member 11, and the motion sensor 12, the storage unit 14, and the communication unit 15 can be provided in the object W to constitute the test body 2. The main workpiece, whose representative characteristics such as size, shape, and density are defined so as to correspond to the object W to be inspected actually, may be used as the holding member 11, and the motion sensor 12, the storage unit 14, and the communication unit 15 may be provided in the main workpiece to construct the test body 2. In this case, the environmental diagnosis sensor 13 can be provided as needed.

The motion sensor 12 is constituted by a three-axis acceleration sensor and a three-axis angular velocity sensor, and outputs six-axis data. The three-axis acceleration sensor detects accelerations in the X-axis (the conveying direction a of the conveying surface 3 a), the Y-axis (the direction perpendicular to the X-axis of the conveying surface 3 a), and the Z-axis (the vertical direction of the conveying surface 3 a) of fig. 4. The three-axis angular velocity sensor detects angular velocities in respective axial directions of a roll (Rolling) axis (conveying direction a of the conveying surface 3 a), a Pitch (Pitch) axis (a direction of the conveying surface 3a at right angles to the X axis), and a Yaw (Yaw) axis (a vertical direction of the conveying surface 3 a) of fig. 4. The motion sensor 12 digitizes a voltage proportional to the acceleration detected by the triaxial acceleration sensor and a voltage value proportional to the angular velocity detected by the triaxial angular velocity sensor to output detected data.

The motion sensor 12 is disposed at a predetermined position in the holding member 11 according to the purpose of detection. For example, in the case of detecting an impact during transfer, the motion sensor 12 is disposed at a position of the holding member 11 close to the bottom surface close to the conveying surface 3a of the conveying device 3. At this time, the motion sensor 12 is preferably disposed at a center of a position near the bottom surface of the holding member 11 or at a plurality of positions in the front-rear, left-right in the conveying direction a.

In the case of aiming at detection stability, the motion sensor 12 is disposed near the center of gravity of the holding member 11.

In the case of detecting shake, the motion sensor 12 is disposed at a position near the upper surface of the holding member 11. At this time, the motion sensor 12 is preferably disposed at a center of a position near the upper surface of the holding member 11 or at a plurality of positions in the front-rear, left-right direction in the conveying direction a.

The environmental diagnosis sensor 13 is a sensor that detects physical quantities of the surrounding environment of the test body 2, such as temperature, humidity, air pressure, wind speed, microphone (sound), magnetism, and the like. For example, the abnormal sound diagnosis during transportation can be performed using the sound data, and the air pressure and air volume data can be applied to environmental diagnosis such as wind. The environmental diagnosis sensor 13 is provided with one or a plurality of sensors as necessary inside the holding member 11. The values (voltages) detected and outputted by the respective sensors are digitized to output data detected by the environmental diagnosis sensor 13.

In the case where the environmental diagnosis sensor 13 can be provided in the holding member 11 together with the motion sensor 12, it is preferable to arrange the sensor after obtaining an optimal position where information (for example, impact, stability, shake, etc. at the time of transfer) to be detected by the motion sensor 12 can be obtained by an experiment or the like.

The storage unit 14 acquires and stores data output from the motion sensor 12 in time series at a predetermined cycle (for example, a cycle of 5ms, 200 Hz), and the storage unit 14 has a FIFO structure for storing data for a predetermined period.

The storage unit 14 stores data output from the environmental diagnosis sensor 13 in association with the time axis of the motion sensor 12.

The communication unit 15 as an external interface unit wirelessly transmits the data in the storage unit 14 to the outside at a predetermined timing together with information for identifying the own test body 2. The communication unit 15 can perform wireless communication of short-range wireless communication such as industrial specific low-power wireless or Bluetooth (registered trademark) wireless LAN, for example, such as the international wireless communication standard "Wi-SUN (Wireless Smarty Utility Network: wireless intelligent application network)".

The communication unit 15 may perform wired communication of various wired communication methods via a communication cable (USB cable) such as a USB (Universal Serial Bus: universal serial bus) standard, for example, which transfers data from the storage unit 14 in bulk, or may transfer data as an external interface unit via a medium such as a USB memory.

In addition, regarding the storage and transfer of data, the storage and transfer of data may be resumed after the transfer of the test body 2 is detected (the acceleration in the X-axis direction (transfer direction a) is detected), or the test body 2 may be provided with an operation switch, and the storage and transfer of data may be performed when the operation switch is turned on (resumed).

[ Structure of article inspection device ]

As shown in fig. 1, the article inspection apparatus 1 is generally configured to include a conveying unit 21, an inspection unit 22, a display operation unit 23, a determination unit 24, and an inspection control unit 25.

The conveying unit 21 sequentially conveys, as the inspection object W, articles of various kinds set in advance by the display operation unit 23 from among various kinds of kinds such as raw meat, fish, processed foods, and medicines, and the conveying unit 21 is constituted by, for example, a belt conveyor disposed horizontally with respect to the apparatus main body.

The conveying unit 21 is driven by a driving motor (not shown), and conveys the object W conveyed from the conveying device 3 (3A) upstream of the inspection line to the conveying surface 21a at a predetermined conveying speed (right direction: conveying direction a) shown in fig. 1, and conveys the object W downstream of the inspection line to the conveying device 3 (3B).

The inspection unit 22 outputs a detection signal according to the type or size of the foreign matter contained in the object W, a detection signal according to the weight of the object W, or the like as a signal indicating the type state of the object W.

Further, the inspection unit 22 in the case where the article inspection apparatus 1 is configured as a metal detection apparatus has the following structure: an alternating magnetic field of a predetermined frequency is generated, and a signal whose amplitude and phase change in accordance with a change in the magnetic field due to the subject W passing through the alternating magnetic field is output.

The following structure may be used: the metal contained in the object W is magnetized by a magnet or the like, and the residual magnetism of the magnetized metal is detected by a magnetic sensor.

In addition, the inspection unit 22 in the case where the article inspection apparatus 1 is configured as an X-ray inspection apparatus has the following configuration: the inspection unit 22 is configured by an X-ray generation source and an X-ray detector, and the X-ray detector detects X-rays transmitted through the object W to be inspected when X-rays are irradiated from the X-ray generation source and outputs a detection signal corresponding to the transmission amount.

As the X-ray detector, for example, an array-shaped line sensor is used, which includes: a plurality of photodiodes arranged in a line in a direction orthogonal to the conveying direction a of the object W conveyed by the conveying section 21; and a scintillator disposed on the photodiode. Such a scintillator for an X-ray detector receives X-rays transmitted through the object W to be inspected, converts the X-rays into light, and converts the light into an electrical signal by a photodiode disposed below the scintillator to output the electrical signal. That is, an electrical signal corresponding to the transmission amount of X-rays is output.

In addition, the inspection unit 22 in the case where the article inspection apparatus 1 is configured as a weight measuring apparatus has the following configuration: a part of the conveying unit 21 is a weighing table, and a load of the object W placed on the weighing table is measured by a load sensor composed of a weighing mechanism such as an electromagnetic balance mechanism disposed below the weighing table, and a signal corresponding to the load is output.

The load sensor may be any weight measuring mechanism capable of measuring a weight, and may be configured by a differential transformer mechanism, a strain gauge mechanism, or the like.

A carry-in sensor 26 for detecting the passage of the object W conveyed by the conveying unit 21 is provided on the upstream side of the inspection unit 22. The carry-in sensors 26 are each constituted by a transmission type photoelectric sensor constituted by a pair of light emitting portions and light receiving portions, not shown, which are disposed so as to face each other across the conveying portion 21 in the width direction (the front and depth directions in fig. 1).

When the object W passes between the light projecting section and the light receiving section, the light receiving section is blocked by the object W, and therefore the carry-in sensor 26 detects that the object W passes and starts to be carried into the inspection section 22. The detection signal from the carry-in sensor 26 is output to the inspection control unit 25.

The display operation unit 23 is constituted by a touch panel having both an input operation function and a display function. As input operations of the display operation unit 23, various setting operations or instruction operations concerning the type of the inspection object W conveyed by the conveying unit 21, foreign matter detection, measurement, and operation confirmation of the inspection object W are received.

As a display function of the display operation unit 23, the following various displays are performed: the setting value at the time of setting the type of the object W, the instruction value at the time of instruction operation, various determination results, individual display or history display of the data of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 acquired by the data acquisition unit 25a, display of the diagnosis result or graph obtained by the diagnosis unit 25c, and the like are performed.

The display operation unit 23 may have a configuration in which the input operation function and the display function are independent. In this case, the following structure can be adopted: in order to realize the input operation function, a plurality of keys, switches, etc. for accepting input operations such as setting or instruction are provided, and in order to realize the display function, a liquid crystal display, etc. is provided.

The determination unit 24 determines whether or not the object W contains foreign matter, whether or not the weight of the object W is within a predetermined range, and the like based on the detection signal from the inspection unit 22, and causes the display operation unit 23 to display a screen including the determination result.

The inspection control unit 25 controls the entire article inspection apparatus 1, and includes a data acquisition unit 25a, a storage unit 25b, a diagnosis unit 25c, an axis correction unit 25d, and a control unit 25e.

The data acquisition unit 25a acquires data of the motion sensor 12 and the environmental diagnosis sensor 13 wirelessly output from the test body 2 via a network such as a wireless LAN.

The data acquisition from the test body 2 may be performed by, for example, short-range wireless communication such as Bluetooth (registered trademark) or industrial specific low-power wireless such as the international wireless communication standard "Wi-SUN (Wireless Smarty Utility Network)", or may be performed by acquiring data from a server or a PC connected to a network and acquiring the data acquired from the server or the PC via a medium such as a USB memory. In addition, if the test body 2 has a port of the USB standard, it may be acquired from the USB port of the test body 2 via a wire or a medium.

The storage unit 25b stores various programs for controlling the article inspection device 1 by the control unit 25e, various parameters for determining whether the inspected object W is good or bad by the determination unit 24, data acquired from the motion sensor 12 of the test body 2 and the environmental diagnosis sensor 13, diagnosis results, and the like.

The diagnostic unit 25c performs diagnosis of the conveyance system of the inspection line based on the data (also referred to as "diagnostic data" respectively) of the motion sensor 12 of the test body 2 acquired by the data acquisition unit 25 a. For example, the measurement values of the axes of the motion sensor 12 of the test body 2 are compared with the standard values of the axes of the motion sensor 12 measured in advance under the optimum setting conditions, and it is diagnosed whether or not the height of the conveying surface 3a of the conveying device 3 or the conveying surface 21a of the conveying unit 21 and the gap between the conveying unit 21 (the gap between the conveying plate) are properly adjusted. The test body 2 obtained by attaching the motion sensor 12 (including the environmental diagnosis sensor 13 as needed) to the inspection master workpiece of a size defined for each model of the article inspection apparatus 1 is conveyed by the conveying apparatus 3, the displacement amount (peak value if a waveform is used) with respect to the reference in the inspection area is obtained from the data acquired from the test body 2, and whether or not the displacement amount is within a predetermined range is diagnosed, and the conveying characteristics of the respective axes are compared with the standard value to diagnose whether or not the inspection master workpiece is acceptable. A specific example of the diagnosis by the diagnosis unit 25c will be described later.

In addition, when the data acquired by the data acquisition unit 25a includes the data of the environmental diagnosis sensor 13, the diagnosis unit 25c diagnoses the inspection accuracy and characteristics of the inspection unit 22 based on the data of the environmental diagnosis sensor 13. The diagnostic unit 25c also forms data (diagnostic data) of the motion sensor 12 and the environmental diagnostic sensor 13 of the test body 2 stored in the storage unit 25b in time series into a graph, and generates a waveform showing the time-dependent change of the data. In the graph, various thresholds stored in the storage unit 25b can be plotted together. If the diagnosis result or the graph obtained by the diagnosis unit 25c is displayed on the display operation unit 23, the user can visually confirm the diagnosis result and the status thereof.

The control unit 25e executes the program stored in the storage unit 25b to change the parameters of the determination unit 24, and to control the various types of the article inspection apparatus 1.

The axis correction unit 25d is a structure necessary for the case where the object W to be inspected is used as the holding member 11, the motion sensor 12 is mounted later, and an object obtained by holding the motion sensor 12 on the object W to be inspected is used as the test body 2, as will be described later, and the processing contents thereof will be described later.

[ Structure of diagnostic device ]

The diagnostic device 5 is constituted by a personal computer having a storage device such as CPU, RAM, ROM or a hard disk device, for example, and executes a program stored in advance to realize various functions.

The diagnostic device 5 is the following device: the diagnostic device 5 performs diagnosis of the conveyance system of the article inspection device 1 in which the test body 2 is conveyed, based on time-series data of each axis included in the acquired data of the test body 2, that is, diagnosis data for diagnosis, and includes an input unit 31, a control unit 32, and a display unit 33 as shown in fig. 2.

The input unit 31 is configured by an input device such as a keyboard or a mouse, and is used to input and set various information (for example, a conveyance speed of the conveyance device 3, an allowable range of conveyance time, a threshold value of acceleration detected by the motion sensor 12 of the test body 2 in each axis (X-axis, Y-axis, Z-axis), a threshold value of angular velocity in each axis (roll axis, pitch axis, yaw axis), a threshold value of physical quantity (for example, temperature, humidity, air pressure, wind speed, microphone (sound), magnetism, etc.) detected by the environmental diagnosis sensor 13 of the test body 2, and the like, which are required for diagnosis of the conveyance system of the article inspection device 1.

The control unit 32 controls the diagnostic device 5 in a unified manner, and includes a data acquisition unit 32a, a storage unit 32b, a diagnostic unit 32c, and an axis correction unit 32d.

The data acquisition unit 32a is connected to a network to communicate with the test body 2, and acquires data of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2.

The storage unit 32b is configured by, for example, a hard disk device or the like, and stores the data of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 acquired by the data acquisition unit 32 a. The storage unit 32b stores standard values or threshold values of the axes (X-axis, Y-axis, Z-axis, roll axis, pitch axis, yaw axis) of the motion sensor 12, threshold values of the physical quantities of the environmental diagnosis sensor 13, calculation formulas required for diagnosis of the conveyance system of the article inspection device 1, diagnosis results obtained by the diagnosis unit 32c, and the like.

The diagnostic unit 32c performs diagnosis of the conveyance system of the article inspection device 1 based on the data (also referred to as "diagnostic data" respectively) of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 stored in the storage unit 32 b. For example, the measurement values of the axes of the motion sensor 12 of the test body 2 are compared with the standard values of the axes of the motion sensor 12 measured in advance under the optimum setting conditions, and it is diagnosed whether or not the height of the conveying surface 3a of the conveying device 3 and the gap between the conveying devices (the gap between the conveying surface and the transfer plate) are properly adjusted. The test body 2 obtained by attaching the motion sensor 12 (including the environmental diagnosis sensor 13 as needed) to the inspection master workpiece of a size defined for each model of the article inspection apparatus 1 is conveyed by the conveyance apparatus 3, and whether or not the sensor data in the inspection area is a value within a predetermined range is diagnosed, and whether or not the conveyance characteristics of the respective axes are qualified is compared with the standard value. A specific example of the diagnosis by the diagnosis unit 32c will be described later.

The diagnostic unit 32c also forms data (diagnostic data) of the motion sensor 12 and the environmental diagnostic sensor 13 of the test body 2 stored in the storage unit 32b in time series into a graph, and generates a waveform showing the time-dependent change of the data. In the graph, the graph can also be formed together with various thresholds stored in the storage unit 32 b. The diagnosis result or the graph obtained by the diagnosis unit 32c is output to the outside as needed. For example, if the diagnosis result or the graph is output to the article inspection device 1 and displayed on the display unit 33, the user can visually confirm the diagnosis result and the status thereof.

The axis correction unit 32d is a structure necessary for the case where the object W to be inspected is used as the holding member 11, and the object W to be inspected is held by the motion sensor 12 after the motion sensor 12 is mounted thereon, as in the axis correction unit 25d of the object inspection apparatus 1, and the processing content thereof will be described later.

The display unit 33 is configured by a display such as a liquid crystal display, for example, and is configured to display the data of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 acquired by the data acquisition unit 32a, and display the diagnostic result and the graph obtained by the diagnostic unit 32c, individually or in a history.

[ diagnosis of conveying System ]

In the case where the inspection line conveyance system is diagnosed by using the test body 2 in the article inspection apparatus 1 configured as described above, or in the case where the inspection line conveyance system of the article inspection apparatus 1 is diagnosed by using the test body 2 in the diagnosis system 4, the test body 2 prepared in accordance with the inspection object W to be inspected in the article inspection apparatus 1 is placed on the conveyance surface 3a of the conveyance apparatus 3 and conveyed in the conveyance direction a.

When the test body 2 is placed on the conveyance surface 3A of the conveyance device 3, as shown in fig. 3A and 4, the test body 2 is placed on the conveyance surface 3A of the conveyance device 3 such that the surface to which the identifier 11a is attached faces upward and the arrow mark of the identifier 11a matches the conveyance direction a.

When the test body 2 is conveyed in the conveyance direction a by the conveyance device 3, the three-axis acceleration sensor of the motion sensor 12 detects accelerations in the respective axis directions of the X axis, the Y axis, and the Z axis in fig. 4, and the three-axis angular velocity sensor detects angular velocities in the respective axis directions of the roll axis, the pitch axis, and the yaw axis in fig. 4, in accordance with the conveyance.

In the case where the environmental diagnosis sensor 13 is provided in the test body 2, the physical quantity of the surrounding environment of the test body 2 such as temperature, humidity, air pressure, wind speed, microphone (sound), and magnetism is detected along with the conveyance in the conveyance direction a by the conveyance device 3.

Then, the diagnostic unit 25c of the article inspection device 1 or the diagnostic device 5 of the diagnostic system 4 acquires data obtained by detection of the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 through communication with the test body 2, and analyzes the acquired data to diagnose the transport system.

[ specific example of diagnosis ]

Next, examples 1 to 3 will be described as specific examples of diagnosis of the inspection line using the test body 2 and the conveyance system of the article inspection apparatus 1. In the following description, a graph (fig. 7, 9 to 15) of waveforms generated from diagnostic data by the diagnostic unit 25c of the article inspection device 1 or the diagnostic unit 32c of the diagnostic device 5 will be described.

Example 1: posture change at the time of transfer between the transporting devices

The posture change at the time of transferring the test body 2 from the conveyor 3A to the conveyor 21 while the upstream conveyor 3A and the conveyor 21 of the downstream article inspection device 1 are arranged side by side along the conveying direction a as shown in fig. 6A and 6B will be described.

The article inspection device 1 or the diagnostic device 5 determines the change in posture based on whether or not the waveform in the transfer section in which the test body 2 is transferred from the transfer device 3A to the transfer section 21 is a peak value (displacement amount) in a predetermined range. Specifically, if there is no rotation based on the angular velocity Gy in the Y-axis direction when transferring the test body 2 from the conveyor 3A to the conveyor 21 with respect to the change in the angular velocity in the Y-axis direction with respect to the data obtained by the detection of the motion sensor 12 of the test body 2, a waveform with small amplitude shown by the solid line in fig. 7A is obtained, and therefore it is determined that there is almost no change in the posture of the test body 2 due to the rotation in the Y-axis direction. In contrast, if there is a rotation based on the angular velocity Gy in the Y-axis direction when the test body 2 is transferred from the conveyor 3A to the conveyor 21, as indicated by an arrow C in fig. 6A, a waveform having a larger amplitude than that in the case where there is no rotation based on the angular velocity Gy in the Y-axis direction is obtained as indicated by a broken line in fig. 7A, and therefore it is determined that there is a change in the posture of the test body 2 due to the rotation in the Y-axis direction.

In addition, with respect to the change in the angular velocity in the Z-axis direction with respect to the data obtained by the detection of the motion sensor 12 of the test body 2, if there is no rotation based on the angular velocity Gz in the Z-axis direction when the test body 2 is transferred from the conveyance device 3A to the conveyance section 21, the article inspection device 1 or the diagnostic device 5 obtains a waveform in which the amplitude is hardly changed as shown by the solid line in fig. 7B, and therefore it is determined that there is almost no change in the posture of the test body 2 due to the rotation in the Z-axis direction. On the other hand, if there is a rotation based on the angular velocity Gz in the Z-axis direction when transferring the test body 2 from the conveyor 3A to the conveyor 21, a waveform whose amplitude changes in accordance with the transfer of the test body 2 from the conveyor 3A to the conveyor 21 is obtained as shown by the broken line in fig. 7B, and therefore it is determined that there is a change in the posture of the test body 2 due to the rotation in the Z-axis direction.

In this way, the change in the posture of the test body 2 at the time of transit between the conveying device 3A and the conveying section 21 can be diagnosed from the data obtained by the detection of the motion sensor 12 of the test body 2, that is, the magnitude (displacement amount) of the amplitude of the waveform generated with the rotation of the angular velocity Gy in the Y-axis direction and the angular velocity Gz in the Z-axis direction. Further, for example, a tension state of the conveying belt of the conveying device 3A or the conveying unit 21, an adjustment state of the levelness of the conveying belt of the conveying device 3A or the conveying unit 21, or the like can be diagnosed based on the diagnosis result, and the adjustment operation at the time of setting or maintenance of the article inspection device 1 can be assisted.

Example 2: disorder of transportation when passing through the curtain of the X-ray inspection apparatus

As shown in fig. 8A and 8B, the conveyance disorder in the case where the shadow curtain 1a is not present and the case where the shadow curtain 1a is present in the X-ray inspection apparatus as the article inspection apparatus 1 will be described.

In the case where the X-ray inspection apparatus 1 does not have the shielding curtain 1a, as shown in fig. 8A, when the conveyor belt of the conveyor unit 21 is driven at the speed Vc, the test body 2 positioned at the entrance P0 of the conveyor unit 21 is conveyed in the conveying direction a to the exit P1 of the conveyor unit 21 while maintaining the speed V0.

In contrast, in the case where the X-ray inspection apparatus 1 includes the shutter 1a, as shown in fig. 8B, when the conveyor belt of the conveyor unit 21 is driven at the speed Vc, the test body 2 located at the entrance P0 of the conveyor unit 21 is conveyed in the conveying direction a at the holding speed V0 until reaching the shutter 1 a. However, the test body 2 is subjected to resistance when passing through the shade 1a, and its speed is reduced to V1 (< V0), and is conveyed to the outlet P1 of the conveying section 21 in a state delayed by passing through the shade 1 a.

When the X-ray inspection apparatus 1 or the diagnostic apparatus 5 has the shutter 1a, as shown in fig. 9, data in which the acceleration Ax fluctuates in the conveyance direction a is acquired, and the conveyance speed of the test body 2 is calculated from the integral value of the acceleration (the area of the acceleration waveform) of the acquired data. At this time, fig. 10 shows waveforms of the transport speed of the test body 2 calculated (generated) from the data of the acceleration of fig. 9.

Then, as shown by a broken line in fig. 11, the X-ray inspection apparatus 1 or the diagnostic apparatus 5 calculates the conveyance distance Lx of the test body 2 from the inlet P0 to the outlet P1 based on the data of the conveyance speed of the test body 2 in fig. 10.

Here, if the test body 2 does not have a fluctuation in acceleration, the time required for the test body 2 to move a distance (the conveying distance L1 in fig. 11) from the entrance P0 to the exit P1 of the conveying unit 21 is T1, as shown by the solid line in fig. 11.

On the other hand, if the acceleration of the sample 2 fluctuates as shown in fig. 9, the time required for the sample 2 to reach the distance from the entrance P0 to the exit P1 of the conveying unit 21 (the conveying distance L1 of fig. 11) is calculated as indicated by the broken line of fig. 11, and a delay time (displacement amount) T is generated with respect to the time T1 when the acceleration of the sample 2 does not fluctuate.

When the delay time (displacement amount) t is within the allowable upper limit and the allowable lower limit (allowable range) as shown in fig. 12, the X-ray inspection apparatus 1 or the diagnostic apparatus 5 diagnoses that the conveyance delay (conveyance disorder) when the test body 2 passes through the shadow curtain 1a is within the allowable range.

In contrast, when the delay time (displacement amount) t does not fall between the allowable upper limit and the allowable lower limit (allowable range) as shown in fig. 13, the X-ray inspection apparatus 1 or the diagnostic apparatus 5 diagnoses that the conveyance delay (conveyance disturbance) when the test body 2 passes through the shadow curtain 1a is out of the allowable range.

In this way, the fluctuation of the actual speed of the test body 2 with respect to the target conveyance speed V0 can be calculated, the cause of the conveyance delay (conveyance disturbance) can be determined in which section of the conveyance unit 21 is generated, and it can be diagnosed whether the conveyance delay falls within the allowable range.

Example 3: predictive maintenance ]

The description will be given of a case where the conveyance system of the article inspection apparatus 1 is periodically monitored based on data from the test body 2 and predictive maintenance is performed.

The article inspection device 1 or the diagnostic device 5 has the following functions: the data and the diagnosis results obtained from the motion sensor 12 and the environmental diagnosis sensor 13 of the test body 2 are stored in the storage units 25b and 32b, and predictive maintenance is performed based on the stored data and diagnosis results.

Specifically, the test for transporting the test body 2 is periodically performed on a daily basis, and at this time, the data acquired from the motion sensor 12 of the test body 2 is stored in the storage units 25b and 32b in advance. Then, the article inspection device 1 reads out the acceleration in the Z-axis direction for each date from the data stored in the storage sections 25b, 32b, and displays the history of the acceleration in the Z-axis direction on the display operation section 23 or the display section 33 together with the threshold value (Z-axis: broken line in the figure) as shown in fig. 14. Knowledge is found in the display example of fig. 14: the acceleration in the Z-axis direction gradually increases with the passage of the date and approaches the threshold value.

Further, the article inspection device 1 or the diagnostic device 5 reads out the angular velocity in the pitch axis direction for each date from the data stored in the storage units 25b and 32b, and as shown in fig. 15, displays the history of the angular velocity in the pitch axis direction on the display operation unit 23 or the display unit 33 together with the threshold value (pitch axis: broken line in the figure). Knowledge is found in the display example of fig. 15: the angular velocity in the pitch axis direction increases with the passage of the date, and exceeds the threshold value at a certain date t 1.

In this way, the data of the motion sensor 12 (including the environmental diagnosis sensor 13) of the test body 2 stored in the storage units 25b and 32b and the transition of the diagnosis result can be monitored, and the degradation or deterioration of the performance accompanying the conveyance system of the article inspection apparatus 1 can be estimated from the results, thereby performing predictive maintenance.

[ concerning modification ]

As a modification, as shown in fig. 16, the specimen W to be actually inspected can be used as the holding member 11, and the motion sensor unit in which the communication unit 15 and the motion sensor 12 are integrated can be attached (stuck) to and held by the specimen W to constitute the test body 2. If the test body 2 is used, in the case where the article inspection device 1 is a weight screening machine, not only the flatness or levelness of the conveyor 3 or the weighing conveyor but also the shake at the time of transfer between the conveyor 3 and the weighing conveyor and the vibration or fluctuation value of each axis of the motion sensor 12 can be measured, and the correlation with the weight waveform can be determined from the frequency, amplitude, and waveform shape, so that the proportion of the transfer factor to the measurement accuracy can be obtained to perform diagnosis.

However, in the case of performing diagnosis using the test body 2 obtained by attaching the motion sensor 12 to the test object W, as shown in fig. 16, each axis of the motion sensor 12 is different from the axis in the case of using the conveyance surface 3A of the conveyance device 3 and the conveyance direction a as the reference of the holding member 11 in which the motion sensor 12 is housed in fig. 3A. Accordingly, the inspection control unit 25 of the article inspection apparatus 1 includes an axis correction unit 25d, and the axis correction unit 25d corrects the axis of each axis direction of the data of each axis direction obtained from the test body 2 formed by attaching the motion sensor 12 to the object W to be inspected, to be diagnostic data. Similarly, the control unit 32 of the diagnostic device 5 includes an axis correction unit 32d, and the axis correction unit 32d corrects the axis of each axis direction of data obtained from the test body 2 formed by attaching the motion sensor 12 to the test object W, as diagnostic data.

When the motion sensor 12 attached to the object W detects the DC component and outputs data, the axis correction units 25d and 32d grasp the attachment direction of the motion sensor 12 attached to the object W using the inclination detection data (data of fig. 17) of the acceleration sensor (DC detection type) of the motion sensor 12 housed in the holding member 11 to correct the axes in the respective axis directions. That is, the gravitational acceleration component when the object W is placed on the conveyance surface 3a of the conveyance device 3 in the stopped state after the motion sensor 12 is attached is detected and corrected. For example, in fig. 16, when the flow direction of the test body 2 obtained by attaching the motion sensor 12 to the object W is z+, the gravity acceleration component in the Y-axis direction of the acceleration sensor is corrected to +1g as shown in the inclination detection data of fig. 17.

When the motion sensor 12 attached to the object W detects the AC component and outputs data, the axis correction units 25d and 32d normally place the motion sensor 12 having acquired data in advance on the conveyance surface 3a of the conveyance device 3 in the stopped state. Then, as for the acceleration data in the X-axis direction when the conveyor 3 is operated at a predetermined speed from the stopped state, three-axis decomposition data obtained by slightly shifting the XY angle and the XZ angle by a predetermined angle and decomposing the XY angle and the XZ angle are obtained. Then, in the three-axis decomposition data, the test body 2 obtained by attaching the motion sensor 12 to the test object W is placed on the conveyance surface 3a of the conveyance device 3 in the stopped state, and the conveyance device 3 is operated under the same conveyance condition. Thus, the XY angle and the XZ angle at which the obtained acceleration data in the respective axial directions are closest to each other are obtained as correction amounts to correct the axes.

As described above, according to the present embodiment, by acquiring the sensing result (data) during conveyance of the test body 2 having the sensors (the motion sensor 12 and the environmental diagnosis sensor 13), it is possible to easily diagnose the inspection function failure caused by the dynamic behavior of the article generated by the conveyance system of the inspection line and the conveyance system of the article inspection apparatus 1. Further, by converting the sensing result of the environmental diagnosis sensor 13 into data, it is possible to analyze the stress fluctuation (temperature, vibration, wind, sound, etc.) received by the article inspection device 1 from the installation environment. Then, based on these sensing results, the static characteristics and the dynamic characteristics can be individually verified and confirmed (validated) for the inspection performance of the article inspection apparatus 1, respectively.

Further, by analyzing the data acquired from the test body 2 as diagnostic data by the article inspection device 1, the state of the conveyance system of the article inspection device 1 (the state of the transfer adjustment between the conveyance device 3 and the conveyance unit 21, the state of adjustment of the levelness of the conveyance surface of the conveyance belt, and the like) can be diagnosed, and the adjustment operation at the time of setting or maintenance of the article inspection device 1 can be assisted.

Thus, even if the user or a maintenance person in an overseas agent shop is not a skilled service person but a person with a low device or maintenance skill, the user or the maintenance person can perform the setting and adjustment accurately. In addition, the accuracy impeding factor can be determined at the time of the accuracy failure, whereby the effect of reduction in the downtime can be anticipated.

Further, by comparing the result of inspection performance in the case where the test body 2 is used with the result of actual production, it is possible to grasp the variation in structural/physical characteristics of the actually produced inspected article.

Further, if the test body 2 is used as the operation confirmation master, the change in the conveyance state of the conveyance device 3 or the conveyance unit 21 from the time of installation can be confirmed, and the deterioration or deterioration of the performance can be found in advance, so that the test body can be used as a predictive maintenance function.

Further, it is possible to determine, based on the data of the sensors (the motion sensor 12 and the environmental diagnosis sensor 13) of the test body 2, that the test body 2 is discharged as an NG workpiece when the operation confirmation of the test body 2 is used, and to confirm whether or not the test body 2 is screened on the article inspection apparatus 1 side based on the confirmation of the person, thereby enabling the unmanned production line to be realized.

Further, if a storage place dedicated to the test body 2 is provided in advance in the article inspection device 1, it can be used as a sensor for sensing set environmental characteristics (for example, temperature, humidity, vibration, wind speed, etc.) prepared for the article inspection device 1 in operation.

The best mode of the test body, the diagnostic system using the test body, and the article inspection device according to the present invention has been described above, but the present invention is not limited to the description of the mode and the drawings. That is, other modes, embodiments, operation techniques, etc. which are obtained by those skilled in the art based on this mode are, of course, included in the scope of the present invention.

Description of the reference numerals

1: an article inspection device; 2: a test body; 3 (3A, 3B): a conveying device; 3a: a conveying surface; 4: a diagnostic system; 5: a diagnostic device; 11: a holding member; 11a: an identifier; 11b: a reference surface; 12: a motion sensor; 13: a sensor for environmental diagnosis; 14: a storage unit; 15: a communication unit; 21: a conveying section; 21a: a conveying surface; 22: an inspection unit; 23: a display operation unit; 24: a determination unit; 25: an inspection control unit; 25a: a data acquisition unit; 25b: a storage unit; 25c: a diagnosis unit; 25d: a shaft correction unit; 25e: a control unit; 26: a carry-in sensor; 31: an input unit; 32: a control unit; 32a: a data acquisition unit; 32b: a storage unit; 32c: a diagnosis unit; 32d: a shaft correction unit; 33: a display unit; a: a conveying direction; w: an object (article) to be inspected; wa: a reference surface; t: delay time.

Claims

1. A test body (2) to be conveyed by a conveying section (21) for use in a conveying system of a diagnostic article inspection apparatus (1) for inspecting articles conveyed by the conveying section, the test body comprising:

a motion sensor (12) that detects acceleration and angular velocity in each axis direction in three dimensions;

a holding member (11) to which an identifier (11 a) indicating the conveyance direction of the test body is attached and which holds the motion sensor; and

an external interface unit (15) for outputting data including the acceleration and the angular velocity to the outside,

the motion sensor detects the acceleration and the angular velocity when the test object is conveyed in the conveyance direction indicated by the identifier.

2. The test body according to claim 1, wherein,

also has a storage unit (14) for storing the data,

the external interface unit (15) outputs the data in the storage unit at a predetermined timing.

3. The test body according to claim 1 or 2, wherein,

the external interface unit (15) outputs the data to the outside by wireless transmission.

4. The test body according to claim 1 or 2, wherein,

Further comprises an environmental diagnosis sensor (13),

the external interface unit (15) outputs data obtained by the environmental diagnosis sensor to the outside.

5. A diagnostic system, comprising:

the test body (2) according to any one of claims 1 to 4; and

and a diagnostic device (5) for acquiring data output from the test body and diagnosing a conveyance system of the article inspection device (1) that conveys the test body based on the generated diagnostic data obtained by time-series of the three-dimensional axis directions.

6. The diagnostic system of claim 5, wherein the diagnostic device comprises,

the diagnostic device (5) generates a waveform from the diagnostic data.

7. An article inspection apparatus (1) for inspecting articles conveyed on an inspection line, the apparatus comprising:

a data acquisition unit (25 a) that acquires data of acceleration and angular velocity in the respective axial directions obtained from the test body (2) according to any one of claims 1 to 4 when the test body is conveyed on the inspection line; and

and a diagnosis unit (25 c) for diagnosing the conveyance system of the inspection line based on the data.

8. The article inspection unit of claim 7, wherein,

the data acquisition unit (25 a) acquires the data stored in the storage unit (14) of the test body (2) via a medium.

9. The article inspection unit of claim 7, wherein,

the data acquisition unit (25 a) acquires the data via wireless transmission by a communication unit (15) of the test body (2).

10. The article inspection device according to any one of claims 7 to 9, wherein,

further comprises a conveying part (21) for conveying the articles,

the diagnosis unit (25 c) judges whether or not the displacement amount of the data in a transit section between the conveyance unit and a conveyance device (3) provided upstream or downstream of the conveyance unit is within a predetermined range.

11. The article inspection device according to any one of claims 7 to 9, wherein,

the diagnosis unit (25 c) determines whether or not the displacement of the data in the inspection area obtained when the main workpiece to which the motion sensor (12) is attached is conveyed as the test body (2) is within a predetermined range.

12. The article inspection device according to any one of claims 7 to 9, wherein,

The diagnosis unit (25 c) has a storage unit (25 b) for storing the diagnosis results, and the diagnosis unit (25 c) has a predictive maintenance function for monitoring the transition of the diagnosis results stored in the storage unit to estimate the performance degradation or deterioration.