CN114204844B - Hollow rotary traveling wave ultrasonic motor - Google Patents

Hollow rotary traveling wave ultrasonic motor Download PDF

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Publication number
CN114204844B
CN114204844B CN202111504110.8A CN202111504110A CN114204844B CN 114204844 B CN114204844 B CN 114204844B CN 202111504110 A CN202111504110 A CN 202111504110A CN 114204844 B CN114204844 B CN 114204844B
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ring
inner ring
fixing
piezoelectric ceramic
disc
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CN114204844A (en
Inventor
杨颖�
马欣驰
邱建敏
皮奥特沃尔·瓦西尔耶夫
达柳斯·马泽卡
谢尔盖·鲍罗庭
金家楣
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention discloses a hollow rotary traveling wave ultrasonic motor, which comprises a stator, a rotor, an upper shell, a lower shell, first to second bearings and a disc spring, wherein the rotor is arranged on the upper shell; the stator comprises a piezoelectric vibration mechanism, an amplitude amplifying mechanism, a pre-tightening ring and a fixing seat; the piezoelectric vibration mechanism comprises an electrode plate and a piezoelectric ceramic module; the electrode plate comprises an inner ring, an outer ring and 2m fan-shaped protruding pieces; the amplitude amplifying mechanism comprises a base plate, a driving plate and a plurality of Langevin vibrators; the pre-tightening ring is in a ring shape, and a plurality of fixing holes which are in one-to-one correspondence with the fixing holes on the substrate are arranged on the pre-tightening ring. The invention fully utilizes the piezoelectric ceramics d 33 The hollow rotary traveling wave ultrasonic motor capable of realizing high-torque and high-efficiency transmission is designed and can be widely applied to aerospace equipment.

Description

Hollow rotary traveling wave ultrasonic motor
Technical Field
The invention relates to the technical field of ultrasonic motors, in particular to a hollow rotary traveling wave ultrasonic motor.
Background
Unlike electromagnetic motor with space mechanism, the ultrasonic motor produces controllable microscopic vibration via piezoelectric ceramic exciting stator and converts the frictional force between stator and rotor into macroscopic rotation of rotor. Based on the working principle, the ultrasonic motor can fully show the advantages of light weight, large torque, quick response, self locking and the like in the strict volume and weight constraint range of the space mechanism, and can better realize the system weight reduction and remarkably improve the response characteristic when applied to the space mechanism. Meanwhile, the ultrasonic motor has larger positioning rigidity at any position through friction transmission, so that the micro-shaking problem of the space mechanism in the space microgravity environment caused by the weak rigidity of the electromagnetic motor at the balance position can be avoided, and the ultrasonic motor is more beneficial to realizing the clear, accurate aiming and stable following of a space ultra-long-distance target. Therefore, research on the ultrasonic motor for the space mechanism has important application value.
In recent years, the application research of an ultrasonic motor in a space institution is widely focused by domestic and foreign scientific research teams. The ultrasonic motor is developed in the U.S. JPL laboratory in the "curiosity" Mars vehicle project as a sampling joint driving component to achieve good effects, and the ultrasonic motor is successfully applied in short time and intermittent in the goddess three/four detectors and quantum science experimental satellites in China. The current on-orbit application is mainly oriented to short-time and low-precision working conditions, and no long-life and high-precision on-orbit application case exists. Towards long-life, high accuracy space mechanism's application demand, ultrasonic motor still needs to span two threshold: firstly, adapting to a long-term harsh space environment; secondly, the requirements of long service life, high performance and high reliability are met. At present, an ultrasonic motor applied to a space mechanism mainly uses a patch type annular partition polarized piezoelectric ceramic plate, and the problem that piezoelectric ceramic is easy to crack due to the aggravation of a vacuum heat aggregation effect under the experimental working condition of a simulated space environment is found; when the ultrasonic motor operates for a long time in a thermal vacuum environment, the driving load performance of the ultrasonic motor is reduced due to the drift of the performance of the piezoelectric ceramic and the like. From the above phenomena, it can be seen that for the application requirements of long service life, high performance and high reliability of the space mechanism, the ultrasonic motor at the present stage cannot realize stable and long-acting service.
Disclosure of Invention
The invention aims to solve the technical problems that the existing patch type traveling wave ultrasonic motor in the background art is low in electromechanical coupling efficiency, difficult to improve mechanical output capability and easy to crack when the motor runs for a long time due to the d31 working mode of the adopted circular ring partition polarized piezoelectric ceramic, and provides a hollow rotary traveling wave ultrasonic motor.
The invention adopts the following technical scheme for solving the technical problems:
a hollow rotary traveling wave ultrasonic motor comprises a stator, a rotor, an upper shell, a lower shell, first to second bearings and a disc spring;
the stator comprises a piezoelectric vibration mechanism, an amplitude amplifying mechanism, a pre-tightening ring and a fixing seat;
the piezoelectric vibration mechanism comprises an electrode plate and a piezoelectric ceramic module;
the electrode plate comprises an inner ring, an outer ring and 2m fan-shaped protruding pieces, wherein m is a natural number greater than or equal to 2, the inner ring and the outer ring are both circular ring plates, and the inner ring is arranged in the outer ring coaxially and positioned on the same plane; the fan-shaped lugs on the outer ring and the fan-shaped lugs on the inner ring are orderly staggered, and gaps are reserved between the adjacent fan-shaped lugs and the included angles are equal; a plurality of fixing holes are uniformly formed in the circumferential direction of the inner edge of the inner ring;
the piezoelectric ceramic module comprises 4m piezoelectric ceramic plates with the same shape as the fan-shaped convex pieces, wherein 2m piezoelectric ceramic plates are stuck to the upper end faces of 2m fan-shaped convex pieces in a one-to-one correspondence manner, and the other 2m piezoelectric ceramic plates are stuck to the lower end faces of 2m fan-shaped convex pieces in a one-to-one correspondence manner; the 4m piezoelectric ceramic plates are polarized along the thickness direction, the polarization directions of the piezoelectric ceramic plates on the upper end face and the lower end face of the same sector lug are opposite, the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the inner ring are opposite, and the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the outer ring are also opposite;
the amplitude amplifying mechanism comprises a base plate, a driving plate and a plurality of Langevin vibrators, wherein the base plate and the driving plate are annular; the Langevin vibrators are circumferentially and uniformly arranged between the base plate and the driving plate respectively, one end of each of the Langevin vibrators is fixedly connected with the base plate, and the other end of each Langevin vibrator is fixedly connected with the driving plate, so that the base plate and the driving plate are coaxial; a plurality of driving teeth are uniformly arranged on the end face of the driving plate, which is far away from the substrate, in the circumferential direction; a plurality of fixing holes are circumferentially formed in the substrate;
the pre-tightening ring is in a circular ring shape, and a plurality of fixing holes which are in one-to-one correspondence with the fixing holes on the substrate are formed in the pre-tightening ring;
the piezoelectric vibration mechanism is arranged between the base plate and the pre-tightening ring, the fixing holes on the base plate and the fixing holes on the pre-tightening ring are correspondingly connected one by one through bolts penetrating through gaps between the fan-shaped lugs on the electrode plates, so that the piezoelectric ceramic plates on two sides of the 2m fan-shaped lugs are pressed by the base plate and the pre-tightening ring, and the inner ring of the electrode plates, the base plate and the pre-tightening ring are coaxial;
the fixing seat is a hollow cylinder with two open ends, and a plurality of fixing through holes which correspond to the fixing holes on the inner ring of the electrode slice one by one and are parallel to the axis of the fixing holes are circumferentially arranged on the fixing seat;
the upper shell is a hollow cylinder with the upper end closed and the lower end open, and a through hole is arranged in the center of the upper end face of the upper shell;
the first bearing is arranged in a through hole in the center of the upper end face of the upper shell, and the outer ring of the first bearing is coaxially and fixedly connected with the upper shell;
the lower shell is a hollow cylinder with an opening at the upper end and a closed lower end, and a blind hole for installing the second bearing is arranged in the center of the lower end face of the lower shell;
the second bearing is arranged in a blind hole on the lower end surface of the lower shell, and the outer ring of the second bearing is coaxially and fixedly connected with the lower shell;
the lower end of the upper shell is coaxially and fixedly connected with the upper end of the lower shell, and the stator and the rotor are contained in the upper shell;
a plurality of fixing threaded holes which are in one-to-one correspondence with the fixing through holes on the fixing seat are circumferentially arranged on the inner wall of the lower end face of the lower shell; the fixing holes on the inner ring of the electrode sheet, the fixing through holes on the fixing base and the fixing threaded holes on the lower end surface of the lower shell are fixedly connected in a one-to-one correspondence manner through bolts, so that the inner ring of the electrode sheet, the fixing base and the lower shell are coaxially and fixedly connected;
the rotor comprises a turntable and an output shaft;
the output shaft comprises an output part and a connecting part, wherein the output part and the connecting part are both cylinders, and the diameter of the output part is smaller than that of the connecting part;
the turntable is disc-shaped, and a through hole for the connecting part to pass through is formed in the center of the turntable;
one end of the connecting part is coaxially and fixedly connected with the output part, the other end of the connecting part sequentially penetrates through the rotary table, the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat and then is coaxially and fixedly connected with the inner ring of the second bearing, the connecting part is coaxially and fixedly connected with the rotary table at a central through hole of the rotary table, and the connecting part is not contacted with the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat;
the disc spring is sleeved on the output part between the inner ring of the first bearing and the connecting part, one end of the disc spring abuts against the inner ring of the first bearing, and the other end of the disc spring abuts against the output part, so that the turntable abuts against each driving tooth on the driving plate.
As a further optimization scheme of the hollow rotary traveling wave ultrasonic motor, a plurality of arc-shaped through grooves are uniformly formed in the circumference of the inner ring between the fixing hole of the inner ring and the upper fan-shaped lug, so that dissipation of vibration energy on the inner ring of the electrode plate is reduced.
As a further optimization scheme of the hollow rotary traveling wave ultrasonic motor, the piezoelectric ceramic plates are adhered to the sector-shaped lug through epoxy resin glue.
As a further optimization scheme of the hollow rotary traveling wave ultrasonic motor, the turntable comprises a rigid disk, an elastic disk and a contact disk;
the rigid disc, the elastic disc and the contact disc are all in a circular ring shape and are coaxially arranged in sequence from inside to outside;
the thicknesses of the contact disc, the rigid disc and the elastic disc are sequentially reduced;
grooves are correspondingly formed on the inner wall and the outer wall of the contact disc, so that the contact disc forms a flexible structure with an I-shaped cross section;
the inner wall of the upper part of the contact disc is coaxially and fixedly connected with the outer wall of the elastic disc, and the inner wall of the elastic disc is coaxially and fixedly connected with the outer wall of the rigid disc.
As a further optimization scheme of the hollow rotary traveling wave ultrasonic motor, the turntable is made of aviation aluminum alloy 7075 material, and the surface of the turntable is anodized to enhance the wear resistance of the contact surface of the turntable.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
according to the invention, by utilizing the amplitude amplification characteristic of the Langevin vibrator, the longitudinal amplitude of the stator can be effectively increased, and when the same pre-pressure is applied, the friction force between the stator and the rotor is larger, and the motor can output larger torque; the invention replaces the traditional annular partition polarization piezoelectric ceramic plate with the sector ceramic plate with larger thickness, changes the form of the patch into the sandwich form, and fully utilizes the piezoelectric ceramic d 33 The advantage of larger constant is further improved, so that the electromechanical coupling efficiency of the motor is further improved, and the mechanical output capacity of the motor is enhanced; and the stress concentration generated when the independent piezoelectric ceramic plates vibrate is much smaller than that generated when the annular piezoelectric ceramic plates vibrate in different polarization partitions, so that the probability of piezoelectric ceramic fragmentation is reduced, and the service life of the piezoelectric ceramic of the motor under the thermal vacuum running condition can be greatly prolonged. In view of the points, the invention not only improves the problem of fragmentation of the traditional patch type traveling wave type rotary ultrasonic motor caused by long-time running of piezoelectric ceramics, but also can improve the electromechanical conversion efficiency of the ultrasonic motor and enhance the output performance.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is a schematic view of the stator structure of the present invention;
FIG. 3 is a schematic view of the structure of an electrode sheet in the present invention;
fig. 4 (a) and fig. 4 (b) are schematic diagrams of the arrangement mode and excitation principle of piezoelectric ceramic plates in the present invention, respectively;
FIG. 5 is a schematic diagram of the amplitude amplifying mechanism of the present invention;
FIG. 6 is a schematic view of the structure of the rotor disc of the present invention;
fig. 7 is a schematic diagram showing comparison of nine-order flexural vibration mode B09 excited by piezoelectric ceramic groups, wherein the two spatial and temporal phase differences are both 90 °.
In the figure, 1: upper housing, 2: lower casing, 3: output shaft, 4: electrode sheet, 5: second bearing, 6: disc spring, 7: carousel, 8: drive plate, 9: langeven vibrator, 10: substrate, 11: first bearing, 12: pretightening ring, 13: fixing base, 14: inner ring, 15: outer ring, 16: fan-shaped tab, 17: fixing holes on the inner ring, 18: arc through groove on the inner ring, 19: drive teeth, 20: fixing holes on the substrate, 21: rigid disk, 22: elastic disc, 23: contact the disc.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components and/or sections, these elements, components and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, and/or section from another. Accordingly, a first element, component, and/or section discussed below could be termed a second element, component, or section without departing from the teachings of the present invention.
As shown in fig. 1, the present invention discloses a hollow rotary traveling wave ultrasonic motor, comprising a stator, a rotor, an upper housing, a lower housing, first to second bearings, and a disc spring;
as shown in fig. 2, the stator comprises a piezoelectric vibration mechanism, an amplitude amplifying mechanism, a pre-tightening ring and a fixing seat;
the piezoelectric vibration mechanism comprises an electrode plate and a piezoelectric ceramic module;
as shown in fig. 3, the electrode plate comprises an inner ring, an outer ring and 2m fan-shaped protruding pieces, wherein m is a natural number greater than or equal to 2, the inner ring and the outer ring are both circular ring plates, and the inner ring and the outer ring are coaxially arranged in the outer ring and are positioned on the same plane; the fan-shaped lugs on the outer ring and the fan-shaped lugs on the inner ring are orderly staggered, and gaps are reserved between the adjacent fan-shaped lugs and the included angles are equal; a plurality of fixing holes are uniformly formed in the circumferential direction of the inner edge of the inner ring;
as shown in fig. 4 (a), the piezoelectric ceramic module includes 4m piezoelectric ceramic pieces with the same shape as the fan-shaped protruding pieces, wherein 2m piezoelectric ceramic pieces are adhered to the upper end surfaces of 2m fan-shaped protruding pieces in a one-to-one correspondence manner, and the other 2m piezoelectric ceramic pieces are adhered to the lower end surfaces of 2m fan-shaped protruding pieces in a one-to-one correspondence manner; the 4m piezoelectric ceramic plates are polarized along the thickness direction, the polarization directions of the piezoelectric ceramic plates on the upper end face and the lower end face of the same sector lug are opposite, the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the inner ring are opposite, and the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the outer ring are also opposite, as shown in fig. 4 (b), and the piezoelectric ceramic plates on the upper end face and the lower end face of each sector lug form a piezoelectric ceramic group, so that 4-1 to 4-12 in fig. 4 (b) are respectively 12 piezoelectric ceramic groups corresponding to 12 sector lugs;
as shown in fig. 5, the amplitude amplifying mechanism includes a base plate, a driving plate and a plurality of langevin oscillators, wherein the base plate and the driving plate are annular; the Langevin vibrators are circumferentially and uniformly distributed between the base plate and the driving plate, one end of each Langevin vibrator is fixedly connected with the base plate, and the other end of each Langevin vibrator is fixedly connected with the driving plate, so that the base plate and the driving plate are coaxial; a plurality of driving teeth are uniformly arranged on the end face of the driving plate, which is far away from the substrate, in the circumferential direction; a plurality of fixing holes are circumferentially formed in the substrate;
the pre-tightening ring is in a circular ring shape, and a plurality of fixing holes which are in one-to-one correspondence with the fixing holes on the substrate are formed in the pre-tightening ring;
the piezoelectric vibration mechanism is arranged between the base plate and the pre-tightening ring, the fixing holes on the base plate and the fixing holes on the pre-tightening ring are correspondingly connected one by one through bolts penetrating through gaps between the fan-shaped lugs on the electrode plates, so that the piezoelectric ceramic plates on two sides of the 2m fan-shaped lugs are pressed by the base plate and the pre-tightening ring, and the inner ring of the electrode plates, the base plate and the pre-tightening ring are coaxial;
the fixing seat is a hollow cylinder with two open ends, and a plurality of fixing through holes which correspond to the fixing holes on the inner ring of the electrode slice one by one and are parallel to the axis of the fixing holes are circumferentially arranged on the fixing seat;
the upper shell is a hollow cylinder with the upper end closed and the lower end open, and a through hole is arranged in the center of the upper end face of the upper shell;
the first bearing is arranged in a through hole in the center of the upper end face of the upper shell, and the outer ring of the first bearing is coaxially and fixedly connected with the upper shell;
the lower shell is a hollow cylinder with an opening at the upper end and a closed lower end, and a blind hole for installing the second bearing is arranged in the center of the lower end face of the lower shell;
the second bearing is arranged in a blind hole on the lower end surface of the lower shell, and the outer ring of the second bearing is coaxially and fixedly connected with the lower shell;
the lower end of the upper shell is coaxially and fixedly connected with the upper end of the lower shell, and the stator and the rotor are contained in the upper shell;
a plurality of fixing threaded holes which are in one-to-one correspondence with the fixing through holes on the fixing seat are circumferentially arranged on the inner wall of the lower end face of the lower shell; the fixing holes on the inner ring of the electrode sheet, the fixing through holes on the fixing base and the fixing threaded holes on the lower end surface of the lower shell are fixedly connected in a one-to-one correspondence manner through bolts, so that the inner ring of the electrode sheet, the fixing base and the lower shell are coaxially and fixedly connected;
the rotor comprises a turntable and an output shaft;
the output shaft comprises an output part and a connecting part, wherein the output part and the connecting part are both cylinders, and the diameter of the output part is smaller than that of the connecting part;
the turntable is disc-shaped, and a through hole for the connecting part to pass through is formed in the center of the turntable;
one end of the connecting part is coaxially and fixedly connected with the output part, the other end of the connecting part sequentially penetrates through the rotary table, the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat and then is coaxially and fixedly connected with the inner ring of the second bearing, the connecting part is coaxially and fixedly connected with the rotary table at a central through hole of the rotary table, and the connecting part is not contacted with the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat;
the disc spring is sleeved on the output part between the inner ring of the first bearing and the connecting part, one end of the disc spring abuts against the inner ring of the first bearing, and the other end of the disc spring abuts against the output part, so that the turntable abuts against each driving tooth on the driving plate.
A plurality of arc-shaped through grooves are uniformly formed in the circumference of the inner ring between the fixing hole of the inner ring and the upper fan-shaped lug plate of the inner ring, so that dissipation of vibration energy on the inner ring of the electrode plate is reduced.
The piezoelectric ceramic plates are adhered to the fan-shaped lug through epoxy resin glue.
As shown in fig. 6, the turntable comprises a rigid disk, an elastic disk and a contact disk;
the rigid disc, the elastic disc and the contact disc are all in a circular ring shape and are coaxially arranged in sequence from inside to outside;
the thicknesses of the contact disc, the rigid disc and the elastic disc are sequentially reduced;
grooves are correspondingly formed on the inner wall and the outer wall of the contact disc, so that the contact disc forms a flexible structure with an I-shaped cross section;
the inner wall of the upper part of the contact disc is coaxially and fixedly connected with the outer wall of the elastic disc, and the inner wall of the elastic disc is coaxially and fixedly connected with the outer wall of the rigid disc.
The turntable is made of aviation aluminum alloy 7075 material, and the surface of the turntable is anodized to enhance the wear resistance of the contact surface of the turntable.
The 4m piezoelectric ceramic plates are all made of PZT-8, the output shaft is made of stainless steel, and the rest parts are made of phosphor bronze.
As shown in fig. 4 (b), a cosine excitation signal is applied to the piezoelectric ceramic group on the inner ring of the electrode plate, a sine excitation signal is applied to the piezoelectric ceramic group on the outer ring of the electrode plate, and the stator matrix is directly grounded; because the polarization directions of the upper piezoelectric ceramic and the lower piezoelectric ceramic of the same piezoelectric ceramic group are opposite, when an excitation signal is applied between the electrode plates, the deformation of the upper piezoelectric ceramic and the lower piezoelectric ceramic is the same, and the same stretching and shrinking motions can be generated; the electrode plate which is unfolded into a straight line is taken as a balance position, the upper part of the balance position represents tensile deformation, the lower part of the balance position represents compression deformation, and for piezoelectric ceramic groups on the inner ring of the electrode plate, the ceramic groups are arranged between the groupsWhen cosine excitation voltage is applied, the extension and contraction directions of the piezoelectric ceramic groups 4-1, 4-5 and 4-9 and the piezoelectric ceramic groups 4-3, 4-7 and 4-11 are opposite; similarly, for the piezoelectric ceramic groups on the outer ring of the electrode plate, the polarization directions of the groups are opposite, so that when sinusoidal excitation voltage is applied, the stretching directions of the piezoelectric ceramic groups 4-2, 4-6 and 4-10 are opposite to those of the piezoelectric ceramic groups 4-4, 4-8 and 4-12; the piezoelectric ceramic groups on the inner ring and the outer ring of the electrode plate have the same vibration mode excited on the substrate, and the vibration waveform is standing waves of which the two phases are different by 90 degrees in time and space; modal analysis shows that the substrate is excited to form a third-order bending vibration mode B03; simultaneously applying sine and cosine excitation voltages to the piezoelectric ceramic groups on the inner and outer rings of the electrode plate, and generating rotary traveling waves on the substrate when the frequency of an excitation voltage signal is 56.9 kHz; such a piezoelectric ceramic d 33 The longitudinal telescopic vibration alternately generated in the working mode is further amplified by the Langerhans vibrator structure of the amplitude amplifying mechanism, the longitudinal vibration is amplified and output to the driving teeth of the driving plate, the high-order bending vibration mode of the driving teeth is excited, and the mode analysis result shows that the driving teeth are excited to form two nine-order bending vibration modes B09 with similar frequencies and mutually orthogonal spaces, and a comparison chart is shown in figure 7; meanwhile, positive and cosine excitation voltages are respectively applied to the piezoelectric ceramics on the inner and outer rings of the electrode plate, and when the frequency of an excitation voltage signal is 56.9kHz, the driving plate is excited to generate rotary traveling waves, so that the turntable is effectively driven to drive the output shaft to rotate.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.

Claims (5)

1. The hollow rotary traveling wave ultrasonic motor is characterized by comprising a stator, a rotor, an upper shell, a lower shell, first to second bearings and a disc spring;
the stator comprises a piezoelectric vibration mechanism, an amplitude amplifying mechanism, a pre-tightening ring and a fixing seat;
the piezoelectric vibration mechanism comprises an electrode plate and a piezoelectric ceramic module;
the electrode plate comprises an inner ring, an outer ring and 2m fan-shaped protruding pieces, wherein m is a natural number greater than or equal to 2, the inner ring and the outer ring are both circular ring plates, and the inner ring is arranged in the outer ring coaxially and positioned on the same plane; the fan-shaped lugs on the outer ring and the fan-shaped lugs on the inner ring are orderly staggered, and gaps are reserved between the adjacent fan-shaped lugs and the included angles are equal; a plurality of fixing holes are uniformly formed in the circumferential direction of the inner edge of the inner ring;
the piezoelectric ceramic module comprises 4m piezoelectric ceramic plates with the same shape as the fan-shaped convex pieces, wherein 2m piezoelectric ceramic plates are stuck to the upper end faces of 2m fan-shaped convex pieces in a one-to-one correspondence manner, and the other 2m piezoelectric ceramic plates are stuck to the lower end faces of 2m fan-shaped convex pieces in a one-to-one correspondence manner; the 4m piezoelectric ceramic plates are polarized along the thickness direction, the polarization directions of the piezoelectric ceramic plates on the upper end face and the lower end face of the same sector lug are opposite, the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the inner ring are opposite, and the polarization directions of the piezoelectric ceramic plates on the upper end face of the adjacent sector lug on the outer ring are also opposite;
the amplitude amplifying mechanism comprises a base plate, a driving plate and a plurality of Langevin vibrators, wherein the base plate and the driving plate are annular; the Langevin vibrators are circumferentially and uniformly arranged between the base plate and the driving plate respectively, one end of each of the Langevin vibrators is fixedly connected with the base plate, and the other end of each Langevin vibrator is fixedly connected with the driving plate, so that the base plate and the driving plate are coaxial; a plurality of driving teeth are uniformly arranged on the end face of the driving plate, which is far away from the substrate, in the circumferential direction; a plurality of fixing holes are circumferentially formed in the substrate;
the pre-tightening ring is in a circular ring shape, and a plurality of fixing holes which are in one-to-one correspondence with the fixing holes on the substrate are formed in the pre-tightening ring;
the piezoelectric vibration mechanism is arranged between the base plate and the pre-tightening ring, the fixing holes on the base plate and the fixing holes on the pre-tightening ring are correspondingly connected one by one through bolts penetrating through gaps between the fan-shaped lugs on the electrode plates, so that the piezoelectric ceramic plates on two sides of the 2m fan-shaped lugs are pressed by the base plate and the pre-tightening ring, and the inner ring of the electrode plates, the base plate and the pre-tightening ring are coaxial;
the fixing seat is a hollow cylinder with two open ends, and a plurality of fixing through holes which correspond to the fixing holes on the inner ring of the electrode slice one by one and are parallel to the axis of the fixing holes are circumferentially arranged on the fixing seat;
the upper shell is a hollow cylinder with the upper end closed and the lower end open, and a through hole is arranged in the center of the upper end face of the upper shell;
the first bearing is arranged in a through hole in the center of the upper end face of the upper shell, and the outer ring of the first bearing is coaxially and fixedly connected with the upper shell;
the lower shell is a hollow cylinder with an opening at the upper end and a closed lower end, and a blind hole for installing the second bearing is arranged in the center of the lower end face of the lower shell;
the second bearing is arranged in a blind hole on the lower end surface of the lower shell, and the outer ring of the second bearing is coaxially and fixedly connected with the lower shell;
the lower end of the upper shell is coaxially and fixedly connected with the upper end of the lower shell, and the stator and the rotor are contained in the upper shell;
a plurality of fixing threaded holes which are in one-to-one correspondence with the fixing through holes on the fixing seat are circumferentially arranged on the inner wall of the lower end face of the lower shell; the fixing holes on the inner ring of the electrode sheet, the fixing through holes on the fixing base and the fixing threaded holes on the lower end surface of the lower shell are fixedly connected in a one-to-one correspondence manner through bolts, so that the inner ring of the electrode sheet, the fixing base and the lower shell are coaxially and fixedly connected;
the rotor comprises a turntable and an output shaft;
the output shaft comprises an output part and a connecting part, wherein the output part and the connecting part are both cylinders, and the diameter of the output part is smaller than that of the connecting part;
the turntable is disc-shaped, and a through hole for the connecting part to pass through is formed in the center of the turntable;
one end of the connecting part is coaxially and fixedly connected with the output part, the other end of the connecting part sequentially penetrates through the rotary table, the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat and then is coaxially and fixedly connected with the inner ring of the second bearing, the connecting part is coaxially and fixedly connected with the rotary table at a central through hole of the rotary table, and the connecting part is not contacted with the driving plate, the substrate, the electrode plate inner ring, the pre-tightening ring and the fixing seat;
the disc spring is sleeved on the output part between the inner ring of the first bearing and the connecting part, one end of the disc spring abuts against the inner ring of the first bearing, and the other end of the disc spring abuts against the output part, so that the turntable abuts against each driving tooth on the driving plate.
2. The hollow rotary traveling wave ultrasonic motor according to claim 1, wherein the inner ring is provided with a plurality of arc-shaped through grooves uniformly along the circumferential direction between the fixing hole and the upper fan-shaped lug so as to reduce the dissipation of vibration energy on the inner ring of the electrode plate.
3. The hollow rotary traveling wave ultrasonic motor according to claim 1, wherein the piezoelectric ceramic plates are adhered to the sector tabs by epoxy glue.
4. The hollow-rotating traveling wave ultrasonic motor according to claim 1, characterized in that the turntable includes a rigid disk, an elastic disk, and a contact disk;
the rigid disc, the elastic disc and the contact disc are all in a circular ring shape and are coaxially arranged in sequence from inside to outside;
the thicknesses of the contact disc, the rigid disc and the elastic disc are sequentially reduced;
grooves are correspondingly formed on the inner wall and the outer wall of the contact disc, so that the contact disc forms a flexible structure with an I-shaped cross section;
the inner wall of the upper part of the contact disc is coaxially and fixedly connected with the outer wall of the elastic disc, and the inner wall of the elastic disc is coaxially and fixedly connected with the outer wall of the rigid disc.
5. The hollow rotary traveling wave ultrasonic motor according to claim 1, wherein the turntable is made of an aviation aluminum alloy 7075 material, and the surface is anodized to enhance the wear resistance of the contact surface of the turntable.
CN202111504110.8A 2021-12-10 2021-12-10 Hollow rotary traveling wave ultrasonic motor Active CN114204844B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004107554A2 (en) * 2003-05-27 2004-12-09 The Penn State Research Foundation Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor
CN201918918U (en) * 2010-11-25 2011-08-03 南京航空航天大学 Linear ultrasonic motor based on alternating force

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004107554A2 (en) * 2003-05-27 2004-12-09 The Penn State Research Foundation Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor
CN201918918U (en) * 2010-11-25 2011-08-03 南京航空航天大学 Linear ultrasonic motor based on alternating force

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