CN114192485A - Automatic change development piece cleaning equipment - Google Patents
Automatic change development piece cleaning equipment Download PDFInfo
- Publication number
- CN114192485A CN114192485A CN202111492914.0A CN202111492914A CN114192485A CN 114192485 A CN114192485 A CN 114192485A CN 202111492914 A CN202111492914 A CN 202111492914A CN 114192485 A CN114192485 A CN 114192485A
- Authority
- CN
- China
- Prior art keywords
- cleaning
- basket
- developing sheet
- sets
- box body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 105
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 230000002457 bidirectional effect Effects 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
Abstract
The invention discloses automatic developing sheet cleaning equipment, which comprises a cleaning box body and a cleaning upright post which are arranged side by side, wherein cleaning liquid for degumming and cleaning a developing sheet is arranged in the cleaning box body, and a box cover assembly which can be automatically opened and closed is arranged at an inlet of the cleaning box body; the cleaning device comprises a cleaning upright post, a cleaning device and a cleaning device, wherein a lifting driving assembly is arranged on the cleaning upright post, a lifting seat capable of lifting and moving is arranged on the lifting driving assembly, a supporting arm is fixedly connected to the lifting seat, a cleaning basket is connected to the supporting arm, and the cleaning basket is used for containing a developing sheet to be cleaned; the lifting driving device can realize the lifting driving of the supporting arm, so that the cleaning basket is driven to be circularly immersed into the cleaning box body, the developing sheet is cleaned through the cleaning liquid in the cleaning box body, the manual operation of workers is not needed, the cleaning effect and the cleaning quality of the developing sheet are improved, the workers only take charge of taking and placing the sheet, and meanwhile, the shaking mode is fixed, and the product quality is ensured.
Description
Technical Field
The invention relates to the technical field of developing equipment, in particular to automatic developing sheet cleaning equipment.
Background
In the manufacturing process of the liquid crystal display device, the substrate is required to be subjected to a photolithography process of coating a photoresist, exposing, and developing. The development aims at removing the photoresist which is subjected to optical reaction in the exposure process, so that a photoresist pattern corresponding to an exposure mask plate is formed on the substrate, the position of the photoresist is covered on the substrate after the development, and a metal or nonmetal film at the corresponding position cannot be damaged due to the protection of the photoresist in the etching process of the next procedure, so that the aim of forming a TFT (thin film transistor) circuit on the substrate is fulfilled finally.
After the development, the developed photoresist and the residual developing solution on the glass substrate need to be cleaned, and if the cleaning is not thorough, the chemical solution and the photoresist particles are remained on the substrate, and finally the substrate is poor.
The existing developing equipment needs manual shaking to remove floating glue on the surface of the wafer.
This mode of operation has certain problems:
1. occupying special personnel to carry out manual operation;
2. the different operators have different manipulations, which results in different cleaning effects.
Disclosure of Invention
The invention aims to provide automatic developing sheet cleaning equipment which can realize that personnel only take charge of taking and placing sheets, and meanwhile, the shaking mode is fixed, so that the product quality is ensured.
The purpose of the invention can be realized by the following technical scheme:
an automatic developing sheet cleaning device comprises a cleaning box body and a cleaning upright column which are arranged side by side, wherein a cleaning liquid for degumming and cleaning the developing sheet is arranged in the cleaning box body, and a box cover assembly which can be automatically opened and closed is arranged at an inlet of the cleaning box body;
the cleaning device is characterized in that a lifting driving assembly is installed on the cleaning stand column, a lifting seat capable of moving up and down is arranged on the lifting driving assembly, a supporting arm is fixedly connected onto the lifting seat, a cleaning basket is connected onto the supporting arm, and the cleaning basket is used for containing the to-be-cleaned developing sheets.
As a further scheme of the invention: the case lid subassembly includes apron and two sets of racks, and two sets of rack fixed mounting are in wasing the box inside wall, and the apron lower extreme is fixed and is provided with two-way motor, two-way motor's output fixedly connected with connecting axle, and the tip fixed mounting of connecting axle has drive gear, and the drive gear meshing is connected on the rack.
As a further scheme of the invention: the cleaning basket comprises a basket body used for containing the developing sheets, a basket frame is arranged at the upper end of the basket body, and a connecting sleeve which is sleeved with the supporting arm is fixedly arranged at the upper end of the basket frame.
As a further scheme of the invention: the support arm comprises an arm rod, the arm rod is fixedly mounted on the lifting seat through a connecting plate, and a groove for preventing the cleaning basket from falling off is formed in the arm rod.
As a further scheme of the invention: the supporting plate is connected in the groove in a sliding mode, a plurality of groups of springs are fixedly arranged at the bottom of the groove, and the upper ends of the springs are fixedly connected to the supporting plate.
As a further scheme of the invention: the lifting driving assembly comprises two groups of mounting plates fixedly mounted on the cleaning stand column, two groups of guide rods fixedly connected between the two groups of mounting plates, and a lifting seat is connected to the guide rods through two groups of guide seats in a sliding manner.
As a further scheme of the invention: the screw rod is rotatably arranged between the two groups of mounting plates, a driving motor used for driving the screw rod to rotate is fixedly mounted on one group of mounting plates, a threaded seat is connected to the screw rod in a threaded mode, and the threaded seat is fixedly connected with the lifting seat.
As a further scheme of the invention: the cleaning upright post is fixedly provided with a protection link which is positioned between the connecting plate and the lifting seat.
As a further scheme of the invention: wash the stand front end and install the protection casing that plays the guard action to lift drive assembly, be provided with on the protection casing and supply the gliding logical groove of support arm.
As a further scheme of the invention: an exhaust fan is arranged behind the cleaning upright post, and an air inlet of the exhaust fan is communicated with the protective cover through an exhaust pipe.
The invention has the beneficial effects that:
(1) drive screw through driving motor and rotate, utilize the cooperation of drive screw and screw thread seat to drive the seat that goes up and down to carry out the lift removal along the guide bar, can realize the lift drive to the support arm to drive the washing basket circulation and dip in and wash the box, wash the development piece through the washing liquid that washs in the box, need not staff manual operation, improve cleaning performance and the cleaning quality to the development piece.
(2) The supporting plate is pressed downwards through the connecting sleeve, so that the connecting sleeve falls into the groove, the connecting sleeve is ensured not to slide on the arm rod to cause falling, and the stability of the developing sheet in cleaning is effectively ensured.
(3) The setting of protection antithetical couplet can prevent that the greasy dirt on the drive screw from taking place to leak to fall into and wash the basket and wash the box and in causing the pollution to the development piece.
(4) Set up the PP material protection casing, this protection casing links to each other with air exhauster and exhaust column, makes the inside negative pressure state that is of protection casing, avoids inside greasy dirt to leak.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic structural view of the present invention as a whole;
FIG. 2 is a schematic side view of the cleaning column of the present invention;
FIG. 3 is a schematic view of the lift drive assembly of the present invention;
FIG. 4 is a schematic structural view of the lift base of the present invention;
fig. 5 is an enlarged schematic view of the invention at a in fig. 1.
In the figure: 1. cleaning the box body; 2. a case lid assembly; 21. a cover plate; 22. a bi-directional motor; 23. a connecting shaft; 24. a bearing seat; 25. a drive gear; 26. a rack; 3. cleaning the upright post; 4. a protective cover; 5. a support arm; 51. an arm lever; 52. a groove; 53. a support plate; 54. a spring; 55. connecting plates; 6. cleaning the basket; 61. a basket body; 62. a basket frame; 63. connecting sleeves; 7. a lift drive assembly; 71. mounting a plate; 72. a drive motor; 73. a screw; 74. a guide bar; 75. a lifting seat; 76. a threaded seat; 77. a guide seat; 8. an exhaust fan; 9. an exhaust pipe; 10. and (4) a protection link.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention is an automated developing sheet cleaning apparatus, comprising a cleaning tank 1 and a cleaning column 3 arranged side by side, wherein a cleaning liquid for degumming and cleaning a developing sheet is filled in the cleaning tank 1, and a tank cover assembly 2 which can be automatically opened and closed is installed at an inlet of the cleaning tank 1; install lift drive assembly 7 on wasing stand 3, be provided with the lift seat 75 of liftable removal on the lift drive assembly 7, fixedly connected with support arm 5 on the lift seat 75, be connected with on the support arm 5 and wash basket 6, wash basket 6 and be used for the splendid attire to treat abluent development piece.
Referring to fig. 1, the box cover assembly 2 includes a cover plate 21 and two sets of racks 26, the two sets of racks 26 are fixedly installed on the inner side wall of the cleaning box 1, the two-way motor 22 is fixedly installed at the lower end of the cover plate 21, the output end of the two-way motor 22 is fixedly connected with a connecting shaft 23, bearing seats 24 are fixedly installed at both ends of the cover plate 21, the connecting shaft 23 is fixedly connected to the inner bearing ring of the bearing seat 24, a driving gear 25 is fixedly installed at the end of the connecting shaft 23, the driving gear 25 is engaged with the racks 26, when the developing sheet needs to be cleaned, the bidirectional motor 22 drives the connecting shaft 23 to rotate, the connecting shaft 23 drives the driving gear 25 to rotate, thereby utilizing the driving principle of a gear rack to drive the cover plate 21 to slide, realizing the automatic opening of the tank cover of the cleaning tank body 1, when the cleaning equipment does not work, the bidirectional motor 22 drives the cover plate 21 to move so as to clean the cover of the box body 1.
The cleaning basket 6 comprises a basket body 61 for containing the developing sheet, a basket frame 62 is arranged at the upper end of the basket body 61, and a connecting sleeve 63 which is sleeved with the supporting arm 5 is fixedly arranged at the upper end of the basket frame 62.
Referring to fig. 1 and 5, the supporting arm 5 includes an arm rod 51, the arm rod 51 is fixedly mounted on the lifting seat 75 through a connecting plate 55, and the arm rod 51 is provided with a groove 52 for preventing the cleaning basket 6 from falling off. A supporting plate 53 is slidably connected in the groove 52, a plurality of groups of springs 54 are fixedly arranged at the bottom of the groove 52, and the upper ends of the springs 54 are fixedly connected on the supporting plate 53.
When the connecting sleeve 63 is sleeved on the arm rod 51 of the supporting arm 5, when the connecting sleeve 63 slides to the groove 52, the connecting sleeve 63 presses the supporting plate 53 under the action of the self weight of the cleaning basket 6, so that the connecting sleeve 63 falls into the groove 52, the connecting sleeve 63 is ensured not to slide on the arm rod 51 to cause falling off, and the stability of the developing sheet in cleaning is effectively ensured.
Referring to fig. 2 and 3, the lifting driving assembly 7 includes two sets of mounting plates 71 fixedly mounted on the cleaning upright 3, two sets of guide rods 74 fixedly connected between the two sets of mounting plates 71, and a lifting seat 75 slidably connected to the guide rods 74 through two sets of guide seats 77.
Referring to fig. 3 and 4, a screw 73 is rotatably disposed between the two sets of mounting plates 71, wherein a driving motor 72 for driving the screw 73 to rotate is fixedly mounted on one set of mounting plates 71, a threaded seat 76 is connected to the screw 73 in a threaded manner, and the threaded seat 76 is fixedly connected to a lifting seat 75.
Drive screw 73 through driving motor 72 and rotate, utilize drive screw 73 and screw thread seat 76's cooperation to drive lift seat 75 and carry out the elevating movement along guide bar 74, can realize the lift drive to support arm 5 to drive cleaning basket 6 circulation and dip in and wash the box 1, wash the development piece through the washing liquid that washs in the box 1, need not staff's manual operation, improve cleaning performance and the cleaning quality to the development piece.
The fixed protection that is provided with allies oneself with 10 on the washing stand 3, the protection allies oneself with 10 and is located even between board 55 and the lift seat 75, and the setting of protection allies oneself with 10 can prevent that the greasy dirt on the drive screw 73 from taking place to leak to fall into and wash basket 6 and wash and cause the pollution to the development piece in the box 1.
The protection casing 4 that plays the guard action to lift drive assembly 7 is installed to wash stand 3 front end, is provided with on the protection casing 4 to supply the gliding logical groove of support arm 5. Wash 3 rear of stand and be provided with air exhauster 8, 8 air intakes of air exhauster are linked together through exhaust column 9 and protection casing 4, and protection casing 4 is PP material protection casing, and this protection casing 4 links to each other with air exhauster 8 and exhaust column 9, makes the inside negative pressure state that is of protection casing 4, avoids inside greasy dirt to leak.
The working principle of the invention is as follows: cleaning solution is filled in the cleaning box body 1, a developing sheet to be cleaned is placed in the basket body 61 of the cleaning basket 6, then the cleaning basket 6 is installed on the supporting arm 5, the connecting sleeve 63 is sleeved on the arm rod 51 of the supporting arm 5, when the connecting sleeve 63 slides to the groove 52, under the action of the self weight of the cleaning basket 6, the connecting sleeve 63 presses the supporting plate 53 downwards, so that the connecting sleeve 63 falls into the groove 52, thereby ensuring that the connecting sleeve 63 cannot slide on the arm rod 51 to cause falling off, thereby effectively ensuring the stability during cleaning the developing sheet, after the cleaning basket 6 is installed, the connecting shaft 23 is driven to rotate by the bidirectional motor 22, the driving gear 25 is driven to rotate by the connecting shaft 23, thereby the cover plate 21 is driven to slide by the driving principle of a gear rack, the automatic opening of the box cover of the cleaning box body 1 is realized, and then the driving screw 73 is driven to rotate by the driving motor 72, utilize the cooperation of drive screw 73 and screw thread seat 76 to drive lift seat 75 and carry out the lift removal along guide bar 74, can realize the lift drive to support arm 5 to drive cleaning basket 6 and circulate and dip in and wash box 1, wash the development piece through the washing liquid that washs in the box 1, need not staff's manual operation, improve cleaning performance and the cleaning quality to the development piece.
While one embodiment of the present invention has been described in detail, the description is only a preferred embodiment of the present invention and should not be taken as limiting the scope of the invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Claims (10)
1. An automatic developing sheet cleaning device is characterized by comprising a cleaning box body (1) and a cleaning upright post (3) which are arranged side by side, wherein a cleaning liquid for degumming and cleaning a developing sheet is filled in the cleaning box body (1), and a box cover assembly (2) which can be automatically opened and closed is arranged at an inlet of the cleaning box body (1);
the cleaning device is characterized in that a lifting driving assembly (7) is installed on the cleaning upright post (3), a lifting seat (75) capable of moving up and down is arranged on the lifting driving assembly (7), a supporting arm (5) is fixedly connected onto the lifting seat (75), a cleaning basket (6) is connected onto the supporting arm (5), and the cleaning basket (6) is used for containing the to-be-cleaned developing sheets.
2. The automated developing sheet cleaning apparatus according to claim 1, wherein the cover assembly (2) comprises a cover plate (21) and two sets of racks (26), the two sets of racks (26) are fixedly installed on the inner side wall of the cleaning box body (1), a bidirectional motor (22) is fixedly arranged at the lower end of the cover plate (21), a connecting shaft (23) is fixedly connected to the output end of the bidirectional motor (22), a driving gear (25) is fixedly installed at the end of the connecting shaft (23), and the driving gear (25) is engaged and connected to the racks (26).
3. The automated developing sheet cleaning apparatus according to claim 1, wherein the cleaning basket (6) comprises a basket body (61) for containing the developing sheet, a basket frame (62) is disposed at an upper end of the basket body (61), and a connecting sleeve (63) sleeved with the supporting arm (5) is fixedly disposed at an upper end of the basket frame (62).
4. The automated developer sheet cleaning apparatus according to claim 1, wherein the support arm (5) comprises an arm lever (51), the arm lever (51) is fixedly mounted on the lift seat (75) via a connecting plate (55), and a groove (52) for preventing the cleaning basket (6) from falling off is provided on the arm lever (51).
5. The automated developer sheet cleaning apparatus according to claim 4, wherein a support plate (53) is slidably coupled within the recess (52), a plurality of sets of springs (54) are fixedly disposed at a bottom of the recess (52), and an upper end of the springs (54) is fixedly coupled to the support plate (53).
6. The automated developer sheet cleaning apparatus according to claim 1, wherein the lift drive assembly (7) comprises two sets of mounting plates (71) fixedly mounted on the cleaning column (3), two sets of guide rods (74) are fixedly connected between the two sets of mounting plates (71), and the lift base (75) is slidably connected to the guide rods (74) through two sets of guide bases (77).
7. The automated developing sheet cleaning apparatus according to claim 6, wherein a screw (73) is rotatably disposed between two sets of mounting plates (71), wherein a driving motor (72) for driving the screw (73) to rotate is fixedly mounted on one set of mounting plates (71), a threaded base (76) is threadedly connected to the screw (73), and the threaded base (76) is fixedly connected to the lifting base (75).
8. The automated developer sheet cleaning apparatus according to claim 4, wherein the cleaning column (3) is fixedly provided with a protection unit (10), and the protection unit (10) is located between the connecting plate (55) and the lifting seat (75).
9. The automated developing sheet cleaning apparatus according to claim 1, wherein a protective cover (4) for protecting the lift driving assembly (7) is installed at the front end of the cleaning column (3), and a through slot for the support arm (5) to slide is provided on the protective cover (4).
10. The automated developing sheet cleaning apparatus according to claim 9, wherein an exhaust fan (8) is disposed behind the cleaning column (3), and an air inlet of the exhaust fan (8) is in communication with the protective cover (4) via an exhaust duct (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111492914.0A CN114192485A (en) | 2021-12-08 | 2021-12-08 | Automatic change development piece cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111492914.0A CN114192485A (en) | 2021-12-08 | 2021-12-08 | Automatic change development piece cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114192485A true CN114192485A (en) | 2022-03-18 |
Family
ID=80651335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111492914.0A Pending CN114192485A (en) | 2021-12-08 | 2021-12-08 | Automatic change development piece cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114192485A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115903396A (en) * | 2022-11-15 | 2023-04-04 | 江苏华兴激光科技有限公司 | Micro-nano structure and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201507468U (en) * | 2009-09-17 | 2010-06-16 | 江西铜业股份有限公司 | Negative pressure anti-oil leakage device of blower bearing box |
| CN104014501A (en) * | 2014-06-11 | 2014-09-03 | 山东鸿民轧辊模具有限公司 | Roller vacuum heat treatment cleaning equipment |
| CN108389813A (en) * | 2018-02-26 | 2018-08-10 | 上海提牛机电设备有限公司 | A kind of makeup of Wafer Cleaning drying integrated is set and its cleaning method |
| CN108772360A (en) * | 2018-06-29 | 2018-11-09 | 苏州邦威数控机床有限公司 | Automatic cleaning apparatus and clean method |
| CN213223529U (en) * | 2020-08-21 | 2021-05-18 | 泛星(上海)信息科技有限公司 | Instrument cleaning device for environment detection |
-
2021
- 2021-12-08 CN CN202111492914.0A patent/CN114192485A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201507468U (en) * | 2009-09-17 | 2010-06-16 | 江西铜业股份有限公司 | Negative pressure anti-oil leakage device of blower bearing box |
| CN104014501A (en) * | 2014-06-11 | 2014-09-03 | 山东鸿民轧辊模具有限公司 | Roller vacuum heat treatment cleaning equipment |
| CN108389813A (en) * | 2018-02-26 | 2018-08-10 | 上海提牛机电设备有限公司 | A kind of makeup of Wafer Cleaning drying integrated is set and its cleaning method |
| CN108772360A (en) * | 2018-06-29 | 2018-11-09 | 苏州邦威数控机床有限公司 | Automatic cleaning apparatus and clean method |
| CN213223529U (en) * | 2020-08-21 | 2021-05-18 | 泛星(上海)信息科技有限公司 | Instrument cleaning device for environment detection |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115903396A (en) * | 2022-11-15 | 2023-04-04 | 江苏华兴激光科技有限公司 | Micro-nano structure and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114192485A (en) | Automatic change development piece cleaning equipment | |
| KR20090056809A (en) | Immersion cleaner for print rollers | |
| CN105607414B (en) | Mask plate cleaning device and cleaning method | |
| CN111681978B (en) | Wafer cleaning device | |
| CN211914811U (en) | Surface cleaning device for optical lens processing | |
| KR100500169B1 (en) | Docking-type system for transporting and treating works and the method of the same | |
| CN107442518B (en) | Automatic cleaning device and method for workpiece table of photoetching machine | |
| CN109894432B (en) | Dry-type non-contact cleaning device | |
| CN215576093U (en) | Mask plate cleaning agent spraying equipment | |
| CN112774345B (en) | Double-filter-screen type air filtering device | |
| CN215296875U (en) | Automatic slide dyeing machine | |
| CN210680104U (en) | Ceramic anilox roller ink deposit laser cleaning machine | |
| CN115415229B (en) | Medical instrument flushing device | |
| CN217312196U (en) | Copper etching liquid waste liquid filter equipment | |
| CN110441996B (en) | Immersion lithography machine for semiconductor chip production and method thereof | |
| CN218283080U (en) | Printing ink bucket belt cleaning device | |
| CN112327585B (en) | Equipment for photoetching, developing and etching semiconductor wafer | |
| CN220596306U (en) | PCB detects transfer mechanism | |
| CN214441639U (en) | Clamping and conveying device of container cleaning machine | |
| CN220671807U (en) | Precise screen exposure device | |
| CN220346743U (en) | Cleaning device for optical glass lens | |
| CN215314330U (en) | Ammeter non-setting adhesive, oily marker remain processing apparatus | |
| CN218890932U (en) | Automatic cleaning equipment convenient for salvaging articles | |
| CN213149467U (en) | Printing down device with dustproof effect | |
| CN220526186U (en) | Printing-down machine for label printing plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20220318 |