CN114192342A - High-uniformity coating head device for slit coating equipment and using method thereof - Google Patents
High-uniformity coating head device for slit coating equipment and using method thereof Download PDFInfo
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- CN114192342A CN114192342A CN202111540091.4A CN202111540091A CN114192342A CN 114192342 A CN114192342 A CN 114192342A CN 202111540091 A CN202111540091 A CN 202111540091A CN 114192342 A CN114192342 A CN 114192342A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/0813—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by means for supplying liquid or other fluent material to the roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/0808—Details thereof, e.g. surface characteristics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/0826—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/086—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line a pool of coating material being formed between a roller, e.g. a dosing roller and an element cooperating therewith
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/002—Pretreatement
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention provides a high-uniformity coating head device for slit coating equipment and a using method thereof. The first coating head device mainly comprises a corrosion-resistant half coating head made of an undeformed material, a cylindrical roller made of a smooth corrosion-resistant undeformed material, a corrosion-resistant spring tube made of an undeformed material and a precisely adjustable pressure gauge. In the working process, the lifting of the coating head device is realized through the support, the outer surface of the bottom of the roller is in full contact with the surface of the substrate, the running platform drives the substrate to move horizontally, the target solution flows to the outer surface of the roller through the containing chamber, and the target solution is continuously and uniformly coated on the surface of the substrate by the rolling of the roller to form a film. The invention can coat solution with large area, continuity and high uniformity, and has lower cost.
Description
Technical Field
The invention relates to the technical field of slit coating equipment, thin film deposition preparation and solar cell preparation, in particular to a high-uniformity coating head device for the slit coating equipment and a using method thereof.
Background
The certification efficiency of Perovskite solar cells (Perovskite solar cells) reaches 25.5%, but the Perovskite solar cells have a huge gap from industrial application, wherein high-quality large-area production and stability are still main limiting factors. The current large area fabrication methods are very diverse, like vacuum deposition, blade coating, slot coating, inkjet printing, etc. Among them, slit coating has the great advantages of sustainable liquid supply and continuous production, and is one of the most suitable technologies for industrial production. However, the problems of the current devices are also significant, and on one hand, the knockout device is needed, and on the other hand, the gap distance between the coating head and the substrate needs to be adjusted. The adjustment of the slit pitch imposes extremely high requirements on the flatness of the running base, because small disturbances during running can seriously affect the uniformity of solution application and thus the crystallization and film formation quality.
The prior art has the following defects:
(1) the coating head and the knockout system which are necessary for the current slot coating are separated. The material is usually pumped by a pump to regulate the flow of the solution and is connected to the applicator head by a catheter, requiring more space and requiring a precise motor to control the pump.
(2) The head typically employs two half-chip pad holders with a fluid bath in the middle. When in use, the slit between the coating head and the base station needs to be adjusted so as to control the thickness of the solution coating. The flatness of the base is extremely high during the coating process. And requires less disturbance of the slit width during operation, which would otherwise affect the thickness uniformity of the coated film. This causes an increase in equipment cost.
Based on the above background, the present invention is directed to a head coating apparatus for functional writing type slit coating without a knock-out auxiliary part, based on a head structure.
Disclosure of Invention
The coating head and the material beating system which are necessary to be adopted according to the current slit coating proposed above are separated, the material beating is usually realized by adopting a material beating pump to adjust the flow rate of the solution, and the material beating pump is connected to the coating head through a liquid guide pipe, so that larger space is needed, and an accurate motor is needed to control the material beating pump; the coating head generally adopts two half piece clamping gaskets, a liquid groove is arranged in the middle, when the coating head is used, a slit between the coating head and a base platform needs to be adjusted so as to control the coating thickness of a solution, the requirement on the flatness of the base platform in the coating process is extremely high, the disturbance on the width of the slit in the running process is required to be small, otherwise, the thickness uniformity of a coated film is influenced, the technical problem of increasing the equipment cost is caused, and the high-uniformity coating head device for the slit coating equipment and the using method thereof are provided. The invention mainly utilizes a first coating head device of a knockout-free pump system or a second coating head device with the knockout pump system consisting of a half coating head, a roller and a solution feed inlet to continuously and uniformly coat the target solution on the surface of the substrate to form a film. The coating head device can be used for slot coating equipment of a knockout-free pump system and can also be used for conventional slot coating equipment with a knockout pump system. When the first coating head device is used, the required solution is injected after the first coating head device is assembled, then the liquid injection port is closed, and the pressure gauge is adjusted to press the roller; and then, the adjusted coating head is hung on the bracket, the roller part of the coating head is contacted with the surface of the substrate, the roller rolls along with the movement of the equipment platform, and the solution is driven to the surface of the substrate along with the roller to realize uniform coating. The second coating head device is installed on a bracket of the slit coating equipment after being assembled, and the target solution is added into a knockout pump system and then is connected to the coating head of the invention through a transfusion pipeline; and then hanging the coating head on the support, wherein the roller part of the coating head is contacted with the surface of the substrate, and the solution is driven by the roller to deposit on the surface of the substrate along with the movement of the equipment platform to form a film.
The technical means adopted by the invention are as follows:
a high-uniformity coating head device for slit coating equipment is arranged on a lifting support of the slit coating equipment and is a first coating head device of a knockout-free pump system or a second coating head device with the knockout pump system, wherein the first coating head device is composed of a half coating head, rollers and a solution feed inlet; the half coating head consists of a first half coating head and a second half coating head, the first half coating head and the second half coating head form a containing chamber, and a target solution injected through a solution feed port is contained and stored in the containing chamber; the roller is arranged at the bottom of the half piece coating head, is communicated with the accommodating chamber and is positioned above the substrate placed on the slit coating equipment; in the working process, the lifting of the coating head device is realized through the support, the outer surface of the bottom of the roller is in full contact with the surface of the substrate, the slit coating equipment drives the substrate to move horizontally, the target solution flows to the outer surface of the roller through the containing chamber, and the target solution is continuously and uniformly coated on the surface of the substrate by the rolling of the roller to form a film.
Furthermore, in the first head coating device, the tops of the first half head coating and the second half head coating are jointly and hermetically connected with a top plate, a solution feed port is formed in the top plate, a solution discharge port communicated with the containing chamber and a pressure gauge which is arranged outside and can be precisely adjusted are further formed in the top plate, a pressure gauge adjusting knob is connected to the upper portion of the pressure gauge, a plurality of adjustable pressure spring pipes are connected to the lower portion of the pressure gauge, and the plurality of adjustable pressure spring pipes are jointly connected with the roller; the pressure of the pressure-adjustable spring tube to the roller is changed by adjusting the pressure gauge moment through the pressure gauge adjusting knob, so that the flowing speed of the target solution is adjusted, and the purpose of controlling the thickness of the coating film through adjusting the roller and the flow of the coating head is achieved.
Furthermore, in the second head coating device, the solution feed port is arranged at the top of the second half coating head, an L-shaped through hole is formed in the second half coating head and used for accommodating an L-shaped pipeline, the upper end of the L-shaped pipeline is connected with the solution feed port, and the lower end of the L-shaped pipeline is communicated with the accommodating chamber; the outside of the solution feed port is connected with a material-beating pump system through a liquid-conveying pipeline, the target solution is conveyed to the accommodating chamber of the second coating head device through the material-beating pump system through a pipeline, and the liquid flow is adjusted to control the thickness of the coated film.
Furthermore, the first half coating head and the second half coating head are the same in structure and are symmetrically arranged, and the formed accommodating chamber is of a symmetrical structure.
Furthermore, arc-shaped grooves are formed in the bottoms of the first half coating head and the second half coating head, the upper portion of the roller is embedded into the two buckled arc-shaped grooves, the lower portion of the roller is exposed to the outside of the two half coating heads, and the exposed portion of the roller is in contact with the surface of the substrate in the working process; micron-sized fine gaps are formed between the roller and the two arc-shaped grooves, and the target solution can be written on the substrate along with the rolling of the roller;
the first half coating head and the second half coating head are fixed into a whole through screws.
Furthermore, the half coating heads are made of corrosion-resistant non-deformable materials, and the deformation rate is less than 5%; the roller is a cylindrical roller which is smooth and corrosion-resistant and is made of a non-deformable material, and the deformation rate is less than 5%; the outer wall of the roller contains a special coating, so that the solution can smoothly circulate;
the inner wall of the accommodating chamber is subjected to special coating treatment for reducing the retention of a target solution;
the adjustable pressure spring pipe of the first coating head device is made of a corrosion-resistant non-deformable material, and the deformation rate is less than 5%; one end of the adjustable pressure spring tube is supported on the roller, the other end of the adjustable pressure spring tube is supported on the precision pressure gauge, the effect of the elastic stable roller is achieved, and fine adjustment of gaps between the roller and the groove can be achieved simultaneously.
Further, the non-deformable material having a deformation rate of less than 5% is a metal, ceramic, special polymer material, or the like.
Furthermore, the coating head device is installed on a support of an adjustable rolling device with a micrometer gauge, a spring is arranged at the bottom of the support, the coating head moves up and down along with the support, a rolling roller structure is arranged at the lower part of the adjustable rolling device, and a knob capable of finely adjusting the height is arranged at the upper part of the adjustable rolling device and used for finely adjusting the pressure of the coating head and the support and finely adjusting the height of the coating head device.
The slit coating equipment further comprises a base, wherein the base is made of materials with larger weight, a substrate transmission device arranged on the base is divided into a rigid substrate transmission device and a flexible substrate transmission device, a running platform of the rigid substrate transmission device is a movable horizontal platform, and the surface of the running platform is provided with small adsorption holes for fixing the rigid substrate; the flexible substrate conveying device is a large roll-to-roll roller device and comprises a discharging roller and a receiving roller, one end of the flexible substrate is wound on the discharging roller, and the other end of the flexible substrate is wound on the receiving roller.
The invention also provides a using method of the high-uniformity coating head device for the slit coating equipment, which comprises the following steps:
step one, substrate cleaning: firstly, ultrasonically cleaning a rigid substrate in deionized water for 30 minutes, then ultrasonically cleaning the rigid substrate in an ethanol solution for 30 minutes, finally ultrasonically cleaning the rigid substrate in a mixed solution of ethanol and isopropanol for 30 minutes and the like, and drying the rigid substrate by using nitrogen after the ultrasonic cleaning is finished;
assembling the head coating device, and then injecting a target solution to be used through a solution feed port; hanging the assembled coating head device on a bracket of slit coating equipment, and adjusting the coating head device to enable a roller of the coating head device to contact the surface of the substrate, wherein the height of the coating head device is finely adjusted through an adjustable rolling device to enable the roller to fully contact the surface of the substrate;
starting a base station running system, observing the coating amount of the target solution on the surface of the substrate, and adjusting the liquid flow of a roller and a coating head by a first coating head device of the non-material-mixing pump through adjusting a pressure gauge so as to control the thickness of a coating film; the second coating head device controls the thickness of the film by adjusting a knockout pump system of the slit coating equipment;
and step four, after the film coating is finished, carrying out subsequent drying, curing, crystallizing and other processes.
Compared with the prior art, the invention has the following advantages:
1. the high-uniformity coating head device for the slit coating equipment and the using method thereof can be used for coating solution with large area, continuity and high uniformity, and have lower cost.
2. According to the high-uniformity coating head device for the slit coating equipment and the using method thereof, the roller can be directly contacted on the substrate, the gap between the substrate and the coating head does not need to be adjusted with high precision, and the requirement for operating a base station is reduced.
3. The high-uniformity coating head device for the slit coating equipment and the using method thereof provided by the invention can change along with the change of the substrate, and compared with the traditional coating head coating process, the high-uniformity coating head device is not influenced by the width of the slit and is more beneficial to improving the uniformity.
In conclusion, the technical scheme of the invention can solve the problems that the coating head and the material beating system which are required to be adopted by the current slit coating are separated, the material beating is usually realized by adopting the material beating pump to adjust the flow rate of the solution, and the material beating pump is connected to the coating head through the liquid guide pipe, needs larger space and needs an accurate motor to control the material beating pump; the coating head usually adopts two half piece clamping gaskets, the middle part is provided with a liquid groove, when in use, a slit between the coating head and a base platform needs to be adjusted so as to control the coating thickness of the solution, the requirement on the flatness of the base platform in the coating process is extremely high, the disturbance on the width of the slit in the operation process is required to be small, otherwise, the thickness uniformity of a coating film can be influenced, and the problem of increasing the equipment cost is caused.
Based on the reasons, the invention can be widely popularized in the fields of slit coating equipment, thin film deposition preparation, solar cell preparation and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a transverse cross-sectional structure of a coating head for slot coating without a knockout pump according to the present invention.
Fig. 2 is a schematic perspective view of a coating head for slit coating without a knockout pump according to the present invention.
FIG. 3 is a schematic cross-sectional view of a coating head for slit coating according to the present invention.
Fig. 4 is an example of the application of the present invention to a rigid substrate device, where (a) is a side view of the device and (b) is a front view of the device.
Fig. 5 is an example of the application of the present invention to a flexible substrate device.
In the figure: 101. a pressure gauge; 102. the pressure spring tube can be adjusted; 103. the right half piece coating head I; 104. a cylindrical roller I; 105. a left half piece of coating head I; 106. a pressure gauge adjusting knob; 107. a solution feeding port I; 108. a solution discharge port;
201. a solution feed port II; 202. a pipeline; 203. a right half piece coating head II; 204. a roller II; 205. a left half piece coating head II;
301. an adjustable rolling device I; 302. a first head coating device I; 303. a rolling roller I; 304. a platform; 305. a bracket system I;
401. an adjustable rolling device II; 402. a first head coating device II; 403. a rolling roller II; 404. a bracket system II; 405. a flexible substrate deposition roller; 406. the flexible substrate receiving roller.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in the figure, the invention provides a high-uniformity coating head device for a slot coating device, which is a device for coating and depositing by a solution method for the slot coating device, relates to the technical field of thin film deposition devices by the solution method, and is based on the slot coating device.
The high-uniformity coating head device for the slit coating equipment is arranged on a lifting support of the slit coating equipment and is a first coating head device of a knockout-free pump system or a second coating head device with the knockout pump system, wherein the first coating head device is composed of a half coating head, rollers and a solution feed inlet; the half coating head consists of a first half coating head and a second half coating head which are oppositely buckled, a containing chamber is formed inside the first half coating head and the second half coating head, and a target solution injected through a solution feed port is contained and stored in the containing chamber; the roller is arranged at the bottom of the half piece coating head, is communicated with the accommodating chamber and is positioned above the substrate placed on the slit coating equipment; in the working process, the lifting of the coating head device is realized through the support, the outer surface of the bottom of the roller is in full contact with the surface of the substrate, the slit coating equipment drives the substrate to move horizontally, the target solution flows to the outer surface of the roller through the containing chamber, and the target solution is continuously and uniformly coated on the surface of the substrate by the rolling of the roller to form a film.
In the first coating head device, the tops of a first half coating head and a second half coating head are jointly and hermetically connected with a top plate, a solution feed inlet is arranged on the top plate, the top plate is also provided with a solution discharge outlet (when the solution needs to be replaced, a discharge outlet is needed; in addition, a cleaning inner cavity needs to be filled with solvent through the feed inlet and flows out of the discharge outlet; the solution is replaced without disassembly) and a pressure gauge which is arranged outside and can be precisely adjusted, a pressure gauge adjusting knob is connected above the pressure gauge, a plurality of adjustable pressure spring pipes are connected below the pressure gauge, and the plurality of adjustable pressure spring pipes are jointly connected with a roller; the pressure of the pressure-adjustable spring tube to the roller is changed by adjusting the pressure gauge moment through the pressure gauge adjusting knob, so that the flowing speed of the target solution is adjusted, and the purpose of controlling the thickness of the coating film through adjusting the roller and the flow of the coating head is achieved.
In a preferred embodiment, in the second head coating device, the solution feed port is arranged at the top of the second half coating head, an L-shaped through hole is formed in the second half coating head and is used for accommodating an L-shaped pipeline, the upper end of the L-shaped pipeline is connected with the solution feed port, and the lower end of the L-shaped pipeline is communicated with the accommodating chamber; the outside of the solution feed port is connected with a material-beating pump system through a liquid-conveying pipeline, the target solution is conveyed to the accommodating chamber of the second coating head device through the material-beating pump system through a pipeline, and the liquid flow is adjusted to control the thickness of the coated film.
In a preferred embodiment, the first half coating head and the second half coating head have the same structure and are symmetrically arranged, and the formed accommodating chamber has a symmetrical structure.
As a preferred embodiment, the bottom of each of the first half coating head and the second half coating head is provided with an arc-shaped groove, the upper part of each roller is embedded into the two symmetrically-arranged buckled arc-shaped grooves, the lower part of each roller is exposed to the outside of the two half coating heads, and the exposed part of each roller is in contact with the surface of the substrate in the working process; micron-sized fine gaps are formed between the roller and the two arc-shaped grooves, and the target solution can be written on the substrate along with the rolling of the roller;
the first half coating head and the second half coating head are fixed into a whole through screws.
In a preferred embodiment, the half piece of coating head is made of a corrosion-resistant non-deformable material, and the deformation rate is less than 5%; the roller is a cylindrical roller which is smooth and corrosion-resistant and is made of a non-deformable material, and the deformation rate is less than 5%; the outer wall of the roller contains a special coating, so that the solution can smoothly circulate;
the inner wall of the accommodating chamber is subjected to special coating treatment for reducing the retention of a target solution;
the adjustable pressure spring pipe of the first coating head device is made of a corrosion-resistant non-deformable material, and the deformation rate is less than 5%; one end of the adjustable pressure spring tube is supported on the roller, the other end of the adjustable pressure spring tube is supported on the precision pressure gauge, the effect of the elastic stable roller is achieved, and fine adjustment of gaps between the roller and the groove can be achieved simultaneously.
In a preferred embodiment, the non-deformable material having a deformation ratio of less than 5% is a metal, a ceramic, a special polymer material, or the like.
As a preferred embodiment, the head coating device is mounted on a support of an adjustable rolling device with a micrometer gauge, a spring is arranged at the bottom of the support, the coating head moves up and down along with the support, a rolling roller structure is arranged at the lower part of the adjustable rolling device, and a knob capable of finely adjusting the height is arranged at the upper part of the adjustable rolling device and used for finely adjusting the pressure of the coating head and the support to finely adjust the height of the head coating device.
As a preferred embodiment, the slit coating equipment further comprises a base, wherein the base is made of a material with a relatively large weight, a substrate transmission device arranged on the base is divided into a rigid substrate transmission device and a flexible substrate transmission device, a running platform of the rigid substrate transmission device is a movable horizontal platform, and the surface of the running platform is provided with small adsorption holes for fixing a rigid substrate; the flexible substrate conveying device is a large roll-to-roll roller device and comprises a discharging roller and a receiving roller, one end of the flexible substrate is wound on the discharging roller, and the other end of the flexible substrate is wound on the receiving roller.
The invention also provides a using method of the high-uniformity coating head device for the slit coating equipment, which comprises the following steps:
step one, substrate cleaning: firstly, ultrasonically cleaning a rigid substrate in deionized water for 30 minutes, then ultrasonically cleaning the rigid substrate in an ethanol solution for 30 minutes, finally ultrasonically cleaning the rigid substrate in a mixed solution of ethanol and isopropanol for 30 minutes and the like, and drying the rigid substrate by using nitrogen after the ultrasonic cleaning is finished;
assembling the head coating device, and then injecting a target solution to be used through a solution feed port; hanging the assembled coating head device on a bracket of slit coating equipment, and adjusting the coating head device to enable a roller of the coating head device to contact the surface of the substrate, wherein the height of the coating head device is finely adjusted through an adjustable rolling device to enable the roller to fully contact the surface of the substrate;
starting a base station running system, observing the coating amount of the target solution on the surface of the substrate, and adjusting the liquid flow of a roller and a coating head by a first coating head device of the non-material-mixing pump through adjusting a pressure gauge so as to control the thickness of a coating film; the second coating head device controls the thickness of the film by adjusting a knockout pump system of the slit coating equipment;
and step four, after the film coating is finished, carrying out subsequent drying, curing, crystallizing and other processes.
Specifically, the use of the coating head device for the knockout-free pump slot coating device is realized by the following ways in combination with the following figures 1 and 2: in the using process, after the coating head is assembled according to the schematic diagrams of fig. 1 and fig. 2, firstly, the required solution is injected from the feed inlet 107, then, the liquid injection port is closed, the pressure gauge 101 is adjusted to press the roller, the adjusted coating head is hung on the bracket, the roller part of the coating head is contacted with the surface of the substrate, the roller is rolled along with the movement of the equipment platform, and the solution is driven to the surface of the substrate along with the roller to realize uniform coating.
The application of the coating head device for the slot coating device with the knockout pump system, namely the coating head of the universal slot coating device, is realized by the following technology in combination with the figure 3: the applicator head is assembled according to the schematic of fig. 3, then mounted on the stand of a slot coating apparatus, and the target solution is fed into the knockout pump system and then connected to the applicator head of the present invention through the infusion tubing. And then hanging the coating head on the support, wherein the roller part of the coating head is contacted with the surface of the substrate, and the solution is driven by the roller to deposit on the surface of the substrate along with the movement of the equipment platform to form a film.
Example 1
The invention aims to solve the problems that:
1. the coating head and the knockout system which are necessary for the current slot coating are separated. The knockout pump, which is commonly used for knockout, regulates the flow rate of the solution and is connected to the applicator head through a liquid guide tube, requires more space and requires a precise motor to control the knockout pump.
2. The head typically employs two half-chip pad holders with a fluid bath in the middle. When in use, the slit between the coating head and the base station needs to be adjusted so as to control the thickness of the solution coating. The flatness of the base is extremely high during the coating process. And requires less disturbance of the slit width during operation, which would otherwise affect the thickness uniformity of the coated film. This causes an increase in equipment cost.
The invention provides a high-uniformity coating head device for a slit coating device based on the problems and combined with the use of the slit coating device, and the high-uniformity coating head device is a coating head device for slit coating, which has high stability and high performance and can uniformly deposit perovskite solution.
As shown in fig. 1 and fig. 2 (fig. 2 is a three-dimensional structure of fig. 1, which highlights the adjusting effect of the spring tube on the cylindrical roller), the first coating head device for slit coating of the slit coating apparatus is a first coating head device for slit coating of a knockout-free pump system, and comprises two half coating heads with intermediate concave tanks, a cylindrical roller i 104 with polished surface, three spring columns (adjustable pressure spring tubes 102) arranged at intervals, a pressure gauge 101 (both mechanical and electronic) capable of being precisely adjusted, a solution inlet i 107 and a solution outlet 108. The construction and combination thereof are illustrated in detail in the accompanying drawings. The half coating heads are made of corrosion-resistant and non-deformation materials (the deformation rate is less than 5%), the cylindrical roller is made of smooth and corrosion-resistant and non-deformation materials (the deformation rate is less than 5%), and the adjustable pressure spring tube is made of corrosion-resistant and non-deformation materials (the deformation rate is less than 5%).
The half coating head is divided into two parts, namely a left half coating head I105 and a right half coating head I103, which can be fixed into a whole by screws and the like, a groove for storing solution is arranged in the half coating head, and the groove part is treated by a special coating to reduce the retention of the solution. The upper part of the coating head is provided with a solution inlet I107 and a solution outlet 108.
The cylindrical roller is embedded in the groove formed by combining the two half coating heads, and the outer wall of the cylindrical roller contains a special coating, so that the solution can smoothly circulate. Most of the cylindrical roller is embedded in the groove of the coating head, and a small part of the cylindrical roller can be in contact with the surface of the external substrate. A fine space (in the order of micrometers) exists between the cylindrical roller and the groove, and the target solution can be written on the target substrate as the roller rolls.
The one end top of spring pipe is on the cylinder gyro wheel, and the other end top plays the effect of the firm gyro wheel of elasticity on the one hand on the precision pressure gauge, and on the other hand can realize the fine adjustment to the gap between gyro wheel and the recess.
The pressure gauge can change the pressure of the spring tube to the cylindrical roller by adjusting the moment through a pressure gauge adjusting knob 106 arranged at the top of the pressure gauge, and then the flowing speed of the solution is adjusted.
The non-deformable material (deformation ratio < 5%) may be metal, ceramic, special polymer material, etc.
The slit coating equipment is the basis of the application of the invention and comprises a base, a substrate running platform and a lifting coating head bracket. The base is usually made of a material with a larger weight, the substrate transmission device is different from a rigid substrate and a flexible substrate, the rigid substrate transmission system is a horizontal platform, and the surface of the rigid substrate transmission system can be provided with adsorption pores for fixing the rigid substrate. The flexible substrate transmission system is a large reel-to-reel roller device, one end of the flexible substrate is wound on the discharging roller, and the other end of the flexible substrate is wound on the receiving roller. The lifting coating head support is a device for carrying a coating head, and is convenient for the lifting of the coating head. Furthermore, the invention is also applicable to slot coating apparatuses with knockout pump systems.
As shown in fig. 4, a first applicator head device i 302 of the present invention is hung on a bracket system i 305 with a spring, the bracket system i 305 is mounted on an adjustable rolling device i 301 with a micrometer (the adjustable rolling device i 301 is a conventional device), the applicator head moves up and down along with the bracket system i 305, the lower part of the adjustable rolling device i 301 is provided with a rollable roller structure, and the upper part is a knob capable of finely adjusting the height, so as to finely adjust the pressure of the applicator head and the base bracket. A roller I303 (namely a cylindrical roller I104) with a rolling key part in the invention is arranged at the bottom of a first coating head device I302. The rigid substrate is placed on a movable platform 304 and the rollable rollers i 303 are in full contact with the surface of the rigid substrate.
This example will be described in detail with reference to fig. 4, in which a slot coating apparatus based on a rigid substrate is used to apply the invention:
1. and (5) cleaning the substrate. Firstly, the rigid substrate is ultrasonically cleaned in deionized water for 30 minutes, then ultrasonically cleaned in an ethanol solution for 30 minutes, finally ultrasonically cleaned in a mixed solution of ethanol and isopropanol for 30 minutes and the like, and then is dried by nitrogen.
2. The attached figures 1-2 are schematic structural diagrams of the invention, the coating head device main body is composed of two half coating heads and a cylindrical roller, and the discharging between the roller and the coating head can be adjusted by a built-in pressure-adjustable spring pressure gauge of a knockout-free pump system.
3. Fig. 4 (a) is a side view of the apparatus, and fig. (b) is a front view of the apparatus. The head coating device is firstly assembled according to the structure in the figure, and then the target solution to be used is injected. The assembled coating head device is hung on the equipment support shown in fig. 4, the coating head is adjusted to be in contact with the substrate of the operation platform, and the height is finely adjusted through the adjustable rolling device I301, so that the rolling cylindrical roller of the coating head is in full contact with the substrate.
4. The base station running system is started to observe the coating amount of the solution on the surface of the substrate, and the coating head device of the material-free pump controls the thickness of the coating film by adjusting the liquid flow of the roller and the coating head by adjusting the pressure gauge 101 in fig. 1 (while the universal coating head, namely the second coating head device adjusts the material-pumping pump system of the slit coating equipment to control the thickness of the film).
5. After the film coating is finished, the subsequent drying, solidification, crystallization and other processes are carried out.
Example 2
As shown in fig. 5, a first coating head device ii 402 (i.e. a first coating head device i 302) of the present invention is hung on a support system ii 404 (i.e. a support system i 305) with a spring, the support system ii 404 is mounted on an adjustable rolling device ii 401 with a micrometer (i.e. an adjustable rolling device i 301, which is a conventional device), the lower part of the adjustable rolling device ii 401 is provided with a rollable roller structure, and the upper part is provided with a knob capable of finely adjusting the height, so as to finely adjust the pressure of the coating head and the base support. A roller II 403 (namely, a cylindrical roller I104) with a rolling key part in the invention is arranged at the bottom of the first coating head device II 402. The flexible substrate is placed on a flexible substrate deposition roller 405 and a flexible substrate take-up roller 406. The rollable roller II 403 is in full contact with the surface of the flexible substrate.
Unlike example 1, this example details the application of the invention in connection with fig. 5 by a slot coating apparatus based on a flexible substrate:
1. and (5) cleaning. The flexible substrate is similar to the rigid substrate, and is ultrasonically cleaned in deionized water for 30 minutes, then ultrasonically cleaned in an ethanol solution for 30 minutes, finally ultrasonically cleaned in a mixed solution of ethanol and isopropanol for 30 minutes and the like, and finally dried by adopting nitrogen after the ultrasonic cleaning is finished.
2. The coating head device main body is composed of two half pieces and a cylindrical roller, and discharging between the coating head and a built-in pressure-adjustable spring pressure gauge adjustable roller of a material-free pump system is realized in the same way as rigid substrate preparation.
3. Fig. 5 is a flexible deposition apparatus. The coating head is firstly assembled according to the structure in the figure, and then the target solution to be used is injected. The assembled coating head device is hung on the equipment support shown in fig. 5, the coating head is adjusted, so that the contact of the roller of the coating head and the rolling device of the equipment is realized by an excircle, and then the height is finely adjusted through an adjustable rolling device II 401, so that the rolling cylinder of the coating head is fully contacted with the flexible substrate.
4. The flexible substrate transport system is started to realize the coating of the solution on the surface of the substrate along with the rolling of the flexible substrate receiving roller 406. The coating amount of the solution on the surface of the substrate is observed, and the coating head device of the material-free pump controls the thickness of the coating film by adjusting the liquid flow of the roller and the coating head through adjusting the pressure gauge 101 in fig. 1. And the universal coating head adjusts the knockout of the slit coating equipment to control the thickness of the film.
5. After coating is finished, the film is subjected to subsequent procedures of drying, curing, crystallizing and the like before the flexible substrate receiving roller receives the substrate to form the required film.
Example 3
As shown in fig. 3, unlike embodiments 1 and 2, the second coating head device for a slot coating apparatus provided in this embodiment is a second coating head device for a slot coating apparatus with a knockout pump system, and includes a solution feed port ii 201, a pipe 202 connecting the coating head with the feed port and a built-in chamber, a right half coating head ii 203, a rollable roller ii 204, and a left half coating head ii 205. The solution feeding hole II 201 is formed in the top of the right half piece coating head II 203, a through hole is formed in the right half piece coating head II 203 and used for accommodating an L-shaped pipeline 202, the upper end of the pipeline 202 is connected with the solution feeding hole II 201, and the lower end of the pipeline 202 is communicated with an accommodating cavity between the left half piece coating head II 205 and the right half piece coating head II 203; the outside of the solution feed port II 201 is connected with a material-beating pump system through a liquid-conveying pipeline, a target solution is conveyed into an accommodating chamber of the second coating head device through the material-beating pump system through a pipeline, and the liquid flow is adjusted to control the thickness of a coated film.
The invention provides a novel coating head for a large-area solution coating machine based on a slit coating technology capable of realizing large-area continuous production. The method is simple and controllable, and is suitable for preparing rigid and flexible batteries. Several alternatives or modifications, similar in performance or use, which are not departed from the inventive concept should be considered as falling within the scope of the invention.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A high-uniformity coating head device for slit coating equipment is characterized by being arranged on a lifting support of the slit coating equipment, and comprising a half coating head, a roller and a solution feed port, wherein the half coating head is a first coating head device of a material-beating-free pump system or a second coating head device with the material-beating pump system; the half coating head consists of a first half coating head and a second half coating head, the first half coating head and the second half coating head form a containing chamber, and a target solution injected through a solution feed port is contained and stored in the containing chamber; the roller is arranged at the bottom of the half piece coating head, is communicated with the accommodating chamber and is positioned above the substrate placed on the slit coating equipment; in the working process, the lifting of the coating head device is realized through the support, the outer surface of the bottom of the roller is in full contact with the surface of the substrate, the slit coating equipment drives the substrate to move horizontally, the target solution flows to the outer surface of the roller through the containing chamber, and the target solution is continuously and uniformly coated on the surface of the substrate by the rolling of the roller to form a film.
2. The high-uniformity coating head device for the slit coating equipment as claimed in claim 1, wherein in the first coating head device, the top of the first half coating head and the top of the second half coating head are connected with a top plate together, the solution feed port is arranged on the top plate, the top plate is further provided with a solution discharge port communicated with the containing chamber and a pressure gauge which is arranged outside and can be precisely adjusted, a pressure gauge adjusting knob is connected above the pressure gauge, a plurality of adjustable pressure spring pipes are connected below the pressure gauge, and the plurality of adjustable pressure spring pipes are connected with the roller wheel together; the pressure of the pressure-adjustable spring tube to the roller is changed by adjusting the pressure gauge moment through the pressure gauge adjusting knob, so that the flowing speed of the target solution is adjusted, and the purpose of controlling the thickness of the coating film through adjusting the roller and the flow of the coating head is achieved.
3. The high-uniformity coating head device for the slot coating equipment according to claim 1, wherein in the second coating head device, the solution feed port is arranged at the top of the second half coating head, an L-shaped through hole is formed in the second half coating head and is used for accommodating an L-shaped pipeline, the upper end of the L-shaped pipeline is connected with the solution feed port, and the lower end of the L-shaped pipeline is communicated with the accommodating chamber; the outside of the solution feed port is connected with a material-beating pump system through a liquid-conveying pipeline, the target solution is conveyed to the accommodating chamber of the second coating head device through the material-beating pump system through a pipeline, and the liquid flow is adjusted to control the thickness of the coated film.
4. The high-uniformity coating head device for the slot coating equipment according to claim 2, wherein the first half coating head and the second half coating head are identical in structure and are symmetrically arranged, and the formed accommodating chamber is symmetrically structured.
5. The high-uniformity coating head device for the slit coating equipment as claimed in any one of claims 2 to 4, wherein the bottom parts of the first half coating head and the second half coating head are both provided with circular arc grooves, the upper parts of the rollers are embedded in the two buckled circular arc grooves, the lower parts of the rollers are exposed to the outside of the two half coating heads, and the exposed parts are contacted with the surface of the substrate in the working process; micron-sized fine gaps are formed between the roller and the two arc-shaped grooves, and the target solution can be written on the substrate along with the rolling of the roller;
the first half coating head and the second half coating head are fixed into a whole through screws.
6. The high-uniformity coating head device for the slot coating equipment according to claim 5, wherein the half piece of coating head is made of a corrosion-resistant non-deformable material, and the deformation rate is less than 5%; the roller is a cylindrical roller which is smooth and corrosion-resistant and is made of a non-deformable material, and the deformation rate is less than 5%; the outer wall of the roller contains a special coating, so that the solution can smoothly circulate;
the inner wall of the accommodating chamber is subjected to special coating treatment for reducing the retention of a target solution;
the adjustable pressure spring pipe of the first coating head device is made of a corrosion-resistant non-deformable material, and the deformation rate is less than 5%; one end of the adjustable pressure spring tube is supported on the roller, the other end of the adjustable pressure spring tube is supported on the precision pressure gauge, the effect of the elastic stable roller is achieved, and fine adjustment of gaps between the roller and the groove can be achieved simultaneously.
7. The high-uniformity head device for a slot coating apparatus according to claim 6, wherein the non-deformable material with a deformation rate of less than 5% is metal, ceramic or special polymer material.
8. The high-uniformity head coating device for the slit coating equipment as claimed in claim 1, wherein the head coating device is mounted on a support of an adjustable rolling device with a micrometer gauge, a spring is arranged at the bottom of the support, the coating head moves up and down along with the support, a rollable roller structure is arranged at the lower part of the adjustable rolling device, and a knob capable of finely adjusting the height is arranged at the upper part of the adjustable rolling device and is used for finely adjusting the pressure of the coating head and the support to finely adjust the height of the head coating device.
9. The high-uniformity coating head device for the slot coating equipment according to claim 1, wherein the slot coating equipment further comprises a base, the base is made of a material with a relatively large weight, the substrate transmission device mounted on the base is divided into a rigid substrate transmission device and a flexible substrate transmission device, the operation platform of the rigid substrate transmission device is a movable horizontal platform, and the surface of the operation platform is provided with small adsorption holes for fixing a rigid substrate; the flexible substrate conveying device is a large roll-to-roll roller device and comprises a discharging roller and a receiving roller, one end of the flexible substrate is wound on the discharging roller, and the other end of the flexible substrate is wound on the receiving roller.
10. A method of using a high uniformity head assembly for a slot coating apparatus as claimed in any one of claims 1 to 9, comprising the steps of:
step one, substrate cleaning: firstly, ultrasonically cleaning a rigid substrate in deionized water for 30 minutes, then ultrasonically cleaning the rigid substrate in an ethanol solution for 30 minutes, finally ultrasonically cleaning the rigid substrate in a mixed solution of ethanol and isopropanol for 30 minutes and the like, and drying the rigid substrate by using nitrogen after the ultrasonic cleaning is finished;
assembling the head coating device, and then injecting a target solution to be used through a solution feed port; hanging the assembled coating head device on a bracket of slit coating equipment, and adjusting the coating head device to enable a roller of the coating head device to contact the surface of the substrate, wherein the height of the coating head device is finely adjusted through an adjustable rolling device to enable the roller to fully contact the surface of the substrate;
starting a base station running system, observing the coating amount of the target solution on the surface of the substrate, and adjusting the liquid flow of a roller and a coating head by a first coating head device of the non-material-mixing pump through adjusting a pressure gauge so as to control the thickness of a coating film; the second coating head device controls the thickness of the film by adjusting a knockout pump system of the slit coating equipment;
and step four, after the film coating is finished, carrying out a subsequent drying, curing and crystallizing process.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040084549A1 (en) * | 2001-12-19 | 2004-05-06 | Teruo Maruyama | Method and apparatus of applying fluid |
| US20090202730A1 (en) * | 2008-01-28 | 2009-08-13 | Seiko Epson Corporation | Application apparatus, application method and method of the manufacturing of coated material |
| CN204320588U (en) * | 2014-12-01 | 2015-05-13 | 深圳市旭合盛科技有限公司 | A kind of slot coated head for the ultra-thin coating of low viscosity fluid |
| CN204586917U (en) * | 2015-03-31 | 2015-08-26 | 北京天捷优越科技有限公司 | A kind of instrument for applying rail antifriction agent |
| CN205797652U (en) * | 2016-06-23 | 2016-12-14 | 东莞市德瑞精密设备有限公司 | Extrusion coated head and there is the coating machine of this extrusion coated head |
| CN112536180A (en) * | 2019-09-20 | 2021-03-23 | 青岛中科华联新材料股份有限公司 | Coating system |
| CN213078998U (en) * | 2020-07-31 | 2021-04-30 | 大正(江苏)微纳科技有限公司 | Leveling device used between slit coating die head and slide glass platform |
| CN113118006A (en) * | 2021-03-04 | 2021-07-16 | 南昌大学 | Surface treatment method of slit coating head |
-
2021
- 2021-12-15 CN CN202111540091.4A patent/CN114192342B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040084549A1 (en) * | 2001-12-19 | 2004-05-06 | Teruo Maruyama | Method and apparatus of applying fluid |
| US20090202730A1 (en) * | 2008-01-28 | 2009-08-13 | Seiko Epson Corporation | Application apparatus, application method and method of the manufacturing of coated material |
| CN204320588U (en) * | 2014-12-01 | 2015-05-13 | 深圳市旭合盛科技有限公司 | A kind of slot coated head for the ultra-thin coating of low viscosity fluid |
| CN204586917U (en) * | 2015-03-31 | 2015-08-26 | 北京天捷优越科技有限公司 | A kind of instrument for applying rail antifriction agent |
| CN205797652U (en) * | 2016-06-23 | 2016-12-14 | 东莞市德瑞精密设备有限公司 | Extrusion coated head and there is the coating machine of this extrusion coated head |
| CN112536180A (en) * | 2019-09-20 | 2021-03-23 | 青岛中科华联新材料股份有限公司 | Coating system |
| CN213078998U (en) * | 2020-07-31 | 2021-04-30 | 大正(江苏)微纳科技有限公司 | Leveling device used between slit coating die head and slide glass platform |
| CN113118006A (en) * | 2021-03-04 | 2021-07-16 | 南昌大学 | Surface treatment method of slit coating head |
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| CN114192342B (en) | 2022-09-09 |
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Application publication date: 20220318 Assignee: CHINA NATIONAL NUCLEAR POWER Co.,Ltd. Assignor: DALIAN INSTITUTE OF CHEMICAL PHYSICS, CHINESE ACADEMY OF SCIENCES Contract record no.: X2023210000071 Denomination of invention: A high uniformity coating head device for narrow seam coating equipment and its usage method Granted publication date: 20220909 License type: Exclusive License Record date: 20230808 |
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