CN114182353A - Quartz diffusion tube with built-in flow balancing structure and method thereof - Google Patents
Quartz diffusion tube with built-in flow balancing structure and method thereof Download PDFInfo
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- CN114182353A CN114182353A CN202111511712.6A CN202111511712A CN114182353A CN 114182353 A CN114182353 A CN 114182353A CN 202111511712 A CN202111511712 A CN 202111511712A CN 114182353 A CN114182353 A CN 114182353A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/18—Controlling or regulating
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Abstract
The invention discloses a quartz diffusion tube with an internal balance flow structure and a method thereof, belonging to the technical field of quartz diffusion tubes. In order to solve the problems of difficult flow balancing and incomplete mixing of the dispersed gas, the rotating blade component is arranged at the tail end inside the quartz tube main body and can drive the fan blade to rotate when the mixed gas arrives, thereby improving the diffusion strength, simultaneously stirring the gas, improving the full mixing of different gases, connecting a diversion channel between the gas inlet hole and the gas outlet hole, leading different gases to enter the gas outlet hole from the gas inlet hole and be discharged under pressure, the adjusting mechanism comprises a passage component and an adjusting component, the size of the opening between the flow blocking blocks can be adjusted by rotating a knob, therefore, the balance adjustment of the flow inside the quartz tube main body can be carried out, and the operation adjustment can be carried out according to the actual requirement and the condition in the sintering process.
Description
Technical Field
The invention relates to the technical field of quartz diffusion tubes, in particular to a quartz diffusion tube with a built-in flow balancing structure and a method thereof.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.
The control system of the more advanced diffusion furnace is updated or upgraded to be controlled by a microcomputer, and the pipe machine is communicated with the host machine through a serial port RS232 or a network cable. The software of the control system is mostly based on a Windows system, the practicability and operability are greatly improved, and various functions such as log recording, curve recording, program editing, remote control and the like can be realized. The quartz tube for the diffusion furnace is arranged in a cavity of the diffusion furnace and is heated by heating the diffusion furnace, wherein one end of the quartz tube is provided with a plurality of air inlets respectively used for introducing various high-purity gases, and the other end of the quartz tube is provided with an exhaust port used for exhausting redundant gases. The existing quartz diffusion tube often has the following defects in the diffusion process:
1. the prior quartz diffusion tube can not successfully guide different gases after the different gases enter the tube, so that the gases are difficult to be automatically and fully mixed.
2. The existing quartz diffusion tube is often fixed in size of a mixing outlet, so that a larger diffusion effect is difficult to realize, and the diffusion effect is poor.
3. The existing quartz diffusion tube is often lack of a certain flow balancing structure, so that the flow of the internal mixed gas is difficult to control, adjust and balance in the sintering process of the quartz tube, and the sintering effect and degree of a processed original piece are difficult to adjust according to actual requirements.
Disclosure of Invention
The invention aims to provide a quartz diffusion tube with an internal flow balancing structure and a method thereof, which have the advantages of improving diffusion effect, balancing flow and fully mixing gas and solve the problems in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: the quartz diffusion tube comprises a quartz tube main body, wherein a flow guide mechanism, a mixing bin, an adjusting mechanism and a rotary vane assembly are arranged inside the quartz tube main body, the flow guide mechanism is arranged at the front end inside the quartz tube main body, the adjusting mechanism is arranged behind the flow guide mechanism, the flow guide mechanism and the adjusting mechanism are communicated through the mixing bin, and the rotary vane assembly is arranged at the tail end inside the quartz tube main body.
Further, the quartz capsule main part is including the intake pipe, the outlet duct, the shower, the installation cavity, chassis and mixed export, the top middle part of quartz capsule main part is provided with the intake pipe, the left and right sides of intake pipe is provided with outlet duct and shower respectively, the intake pipe, the installation cavity has all been seted up with the inside that the inside of quartz capsule main part is linked together to outlet duct and shower, water conservancy diversion mechanism, mix the storehouse, adjustment mechanism and commentaries on classics leaf subassembly all set up in the inside of installation cavity, the tail end of quartz capsule main part is provided with the chassis, mixed export has been seted up at the middle part on chassis.
Further, the inside of quartz capsule main part is provided with supporting component, supporting component sets up between installation cavity and mixed export, supporting component is including first support ring, the second support ring, first support frame, the second support frame, even axle and support branch, the first support frame of inside fixedly connected with of first support ring, the inside fixedly connected with second support frame of second support ring, first support ring, the equal fixed connection of second support ring is on the inner wall of quartz capsule main part, first support ring is connected in the inside one side that is close to adjustment mechanism of quartz capsule main part, the second support ring is connected in the inside one side that is close to the rotating vane subassembly of quartz capsule main part, be connected with even axle between first support frame and the second support frame, the outside of even axle is provided with support branch, support branch keeps away from the one end fixed connection of even axle on the inner wall of quartz capsule main part.
Further, the water conservancy diversion mechanism is including water conservancy diversion piece, water conservancy diversion inclined plane, the face of admitting air, go into the gas pocket, go out the gas face, venthole and water conservancy diversion passageway, the front of water conservancy diversion piece is provided with the water conservancy diversion inclined plane, the middle part on water conservancy diversion inclined plane is provided with the face of admitting air, it has seted up the gas pocket on the face of admitting air, the back of water conservancy diversion piece is provided with the face of admitting air, the venthole has been seted up on the face of admitting air, the external diameter of the face of admitting air is greater than the external diameter of the face of admitting air, the quantity and the position of going into the gas pocket all with the venthole one-to-one, be connected with the water conservancy diversion passageway between gas pocket and the venthole.
Furthermore, the adjusting mechanism comprises a passage component and an adjusting component, the adjusting component is arranged inside the passage component, the passage component comprises an opening, a flow guide cavity, a first movable cavity, a thread groove, a second movable cavity, a fixed cavity and a clamping groove, the opening is formed in the front surface and the back surface of the adjusting mechanism, the flow guide cavity is arranged inside the opening, the second movable cavity is arranged between the two flow guide cavities, the first movable cavity is arranged at the top of the second movable cavity, the thread groove is formed in the top of the first movable cavity, the fixed cavity is formed in the bottom of the second movable cavity, the clamping groove is formed in the bottom of the fixed cavity, the adjusting component comprises a screw rod, a knob, a first flow blocking block, a slide rail, a second flow blocking block and a fixed base, the knob is fixedly connected to the top of the screw rod, the bottom of the screw rod is rotatably connected to the top of the first flow blocking block, the slide rails are arranged on two sides of the first flow blocking block, but first choked flow piece sliding connection is in the inside in first activity chamber and second activity chamber, and the bottom of the choked flow piece of second is provided with unable adjustment base, and unable adjustment base fixed connection is in the inside in joint groove, and the choked flow piece of second sets up in the inside in fixed chamber.
Further, mix the storehouse including mixing the storehouse entry and mixing the storehouse export, mix the storehouse entry and mix the storehouse export and be linked together, mix the storehouse entry and be connected with guiding mechanism, mix the storehouse export and be connected with adjustment mechanism.
Further, the rotating blade assembly comprises a fixing ring, a reinforcing rod, a rotating shaft and blades, the fixing ring is fixedly connected to the mixed outlet, the reinforcing rod is arranged on the inner side of the fixing ring, the rotating shaft is arranged in the middle of the reinforcing rod, and the blades are rotatably connected to the rotating shaft.
Further, be provided with the diffusion room between installation cavity and the mixing outlet, the through-hole has been seted up to the front end of diffusion room, and the through-hole is linked together with the installation cavity, and the rear end and the mixing outlet of diffusion room are linked together, and the inside of diffusion room is provided with the skew wall, and the internal diameter of through-hole is less than the internal diameter of mixing outlet, and the diffusion room is whole to be the loudspeaker form of enlargiing gradually from the through-hole to mixing outlet.
Another technical problem to be solved by the present invention is to provide a method for balancing a quartz diffusion tube with a built-in flow balancing structure, comprising the following steps:
the method comprises the following steps: injecting different gases or pressure water into the quartz tube main body through the gas inlet tube, the gas outlet tube and the spray tube;
step two: different gases are guided by the flow guide inclined plane, the gases pass through the gas inlet holes, the gases are discharged from the gas outlet holes, and the gases enter the mixing bin;
step three: the mixed gas is discharged from the outlet of the mixing bin to enter the inside of the adjusting mechanism, the opening size between the first flow blocking block and the second flow blocking block is adjusted by rotating the knob, and the gas is discharged from the mixing outlet after passing through the adjusting mechanism to enter the rotating blade assembly.
Further, the method also comprises the following steps:
the method comprises the following steps: injecting different gases or pressure water into the quartz tube main body through the gas inlet tube, the gas outlet tube and the spray tube;
step two: different gases are guided by the flow guide inclined plane, the gases pass through the gas inlet holes, the gases are discharged from the gas outlet holes, and the gases enter the mixing bin;
step three: the mixed gas is discharged from an outlet of the mixing bin and enters the inside of the adjusting mechanism, the size of an opening between the first flow blocking block and the second flow blocking block is adjusted by rotating the knob, the gas passes through the adjusting mechanism and enters the diffusion chamber, and the gas is guided by the inclined wall in the diffusion chamber;
step four: the gas passes through the diffusion chamber and enters the rotating blade assembly, and then is discharged from the mixing outlet.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the quartz diffusion tube with the built-in balance flow structure and the method thereof, the rotating blade assembly is arranged at the tail end of the inner part of the quartz tube main body, and the rotating blade assembly can drive the fan blade to rotate when mixed gas arrives, so that the diffusion strength is improved, and meanwhile, the rotating blade assembly stirs the gas, so that the full mixing of different gases is improved.
2. The invention provides a quartz diffusion tube with an internal balance flow structure and a method thereof.A flow guide channel is connected between an air inlet and an air outlet, and different gases enter from the air inlet and are discharged from the air outlet under pressure, so that the dispersed gases are converged on an air outlet surface, and the mixing speed of the different gases in a dispersion furnace is improved.
3. The adjusting mechanism comprises a passage component and an adjusting component, and can drive a first flow choking block to move by rotating a knob, so that the size of an opening between the first flow choking block and a second flow choking block is adjusted, the internal flow of the quartz tube main body is balanced and adjusted, operation and adjustment can be performed according to actual requirements and conditions in a sintering process, and the operation is simple.
4. The invention provides a quartz diffusion tube with an internal balance flow structure and a method thereof.A diffusion chamber is arranged between an installation cavity and a mixing outlet, the whole diffusion chamber is in a horn shape which is gradually enlarged from a through hole to the mixing outlet, and compared with the condition that gas is directly discharged by an adjusting mechanism for diffusion, the diffusion chamber and an inclined wall can guide the gas in an induction way, thereby realizing large-caliber diffusion and improving the diffusion effect of a quartz tube main body.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of an internal structure of an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a quartz tube according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a support assembly of the present invention;
FIG. 5 is a schematic view of the structure of the flow guide mechanism of the present invention;
FIG. 6 is a schematic view of the internal structure of the flow guide mechanism of the present invention;
FIG. 7 is a schematic view of an adjustment mechanism of the present invention;
FIG. 8 is a schematic view of the internal structure of the adjusting mechanism of the present invention;
FIG. 9 is a schematic view of a mixing silo configuration of the present invention;
FIG. 10 is a schematic view of a rotary vane assembly of the present invention;
FIG. 11 is a schematic diagram of the internal structure of the second embodiment of the present invention;
FIG. 12 is a schematic structural diagram of a second quartz tube according to an embodiment of the invention.
In the figure: 1. a quartz tube body; 11. an air inlet pipe; 12. an air outlet pipe; 13. a shower pipe; 14. a mounting cavity; 15. a through hole; 16. a diffusion chamber; 17. a sloped wall; 18. a chassis; 19. a mixing outlet; 2. a flow guide mechanism; 21. a flow guide block; 22. a diversion bevel; 23. a gas inlet surface; 24. air inlet holes; 25. a gas outlet surface; 26. an air outlet; 27. a flow guide channel; 3. a mixing bin; 31. a mixing bin inlet; 32. an outlet of the mixing bin; 4. an adjustment mechanism; 41. a pathway component; 4101. a port; 4102. a flow guide cavity; 4103. a first movable chamber; 4104. a thread groove; 4105. a second movable chamber; 4106. a fixed cavity; 4107. a clamping groove; 42. an adjustment assembly; 4201. a screw; 4202. a knob; 4203. a first flow choking block; 4204. a slide rail; 4205. a second flow choking block; 4206. a fixed base; 5. a rotating blade assembly; 51. a stationary ring; 52. a reinforcing bar; 53. a rotating shaft; 54. a blade; 6. a support assembly; 61. a first support ring; 62. a second support ring; 63. a first support frame; 64. a second support frame; 65. a connecting shaft; 66. and supporting the supporting rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1-2, a quartz diffusion tube with an internal balance flow structure comprises a quartz tube body 1, a flow guide mechanism 2, a mixing bin 3, an adjusting mechanism 4 and a rotating blade assembly 5 are arranged inside the quartz tube body 1, the flow guide mechanism 2 is arranged at the front end inside the quartz tube body 1, the adjusting mechanism 4 is arranged behind the flow guide mechanism 2, the flow guide mechanism 2 and the adjusting mechanism 4 are communicated through the mixing bin 3, the rotating blade assembly 5 is arranged at the tail end inside the quartz tube body 1, the rotating blade assembly 5 can drive a blade to rotate when mixed gas arrives, so that the diffusion strength is improved, meanwhile, the rotating blade assembly 5 stirs the gas, and the sufficient mixing of different gases is improved.
Referring to fig. 3, the quartz tube main body 1 includes an air inlet tube 11, an air outlet tube 12, a spraying tube 13, an installation cavity 14, a chassis 18 and a mixed outlet 19, the air inlet tube 11 is disposed in the middle of the top end of the quartz tube main body 1, the air outlet tube 12 and the spraying tube 13 are disposed on the left and right sides of the air inlet tube 11, the air outlet tube 12 and the spraying tube 13 are communicated with the inside of the quartz tube main body 1, the installation cavity 14 is disposed inside the quartz tube main body 1, the flow guide mechanism 2, the mixing chamber 3, the adjusting mechanism 4 and the rotating vane assembly 5 are disposed inside the installation cavity 14, the chassis 18 is disposed at the tail end of the quartz tube main body 1, and the mixed outlet 19 is disposed in the middle of the chassis 18.
Referring to fig. 4, a support assembly 6 is disposed inside the quartz tube main body 1, the support assembly 6 is disposed between the installation cavity 14 and the mixing outlet 19, the support assembly 6 includes a first support ring 61, a second support ring 62, a first support frame 63, a second support frame 64, a connecting shaft 65 and a support rod 66, the first support frame 63 is fixedly connected inside the first support ring 61, the second support frame 64 is fixedly connected inside the second support ring 62, both the first support ring 61 and the second support ring 62 are fixedly connected to the inner wall of the quartz tube main body 1, the first support ring 61 is connected to one side of the quartz tube main body 1 close to the adjusting mechanism 4, the second support ring 62 is connected to one side of the quartz tube main body 1 close to the rotary vane assembly 5, the connecting shaft 65 is connected between the first support frame 63 and the second support frame 64, the support rod 66 is disposed outside the connecting shaft 65, one end of the supporting strut 66 far away from the connecting shaft 65 is fixedly connected to the inner wall of the quartz tube main body 1, and the supporting component is arranged to improve the overall strength of the quartz tube main body 1, improve the durability and prolong the service life.
Referring to fig. 5-6, the flow guiding mechanism 2 includes a flow guiding block 21, a flow guiding inclined plane 22, an air inlet surface 23, an air inlet hole 24, an air outlet surface 25, an air outlet hole 26 and a flow guiding channel 27, the front surface of the flow guiding block 21 is provided with the flow guiding inclined plane 22, the middle part of the flow guiding inclined plane 22 is provided with the air inlet surface 23, the air inlet hole 24 is formed on the air inlet surface 23, the back surface of the flow guiding block 21 is provided with the air outlet surface 25, the air outlet surface 25 is provided with the air outlet hole 26, the outer diameter of the air inlet surface 23 is larger than that of the air outlet surface 25, the number and the positions of the air inlet holes 24 are in one-to-one correspondence with the air outlet holes 26, the flow guiding channel 27 is connected between the air inlet hole 24 and the air outlet hole 26, different gases enter from the air inlet hole 24 and are discharged from the air outlet hole 26 under pressure, so that the dispersed gases intersect at the air outlet surface 25, thereby increasing the mixing speed of different gases in the dispersion furnace.
Referring to fig. 7-8, the adjusting mechanism 4 includes a passage component 41 and an adjusting component 42, the adjusting component 42 is disposed inside the passage component 41, the passage component 41 includes a through port 4101, a flow guiding cavity 4102, a first movable cavity 4103, a threaded groove 4104, a second movable cavity 4105, a fixed cavity 4106 and a clamping groove 4107, the front and back of the adjusting mechanism 4 are both opened with the through port 4101, the flow guiding cavity 4102 is disposed inside the through port 4101, a second movable cavity 4105 is disposed between the two flow guiding cavities 4102, the top of the second movable cavity 4105 is disposed with the first movable cavity 4103, the top of the first movable cavity 4103 is opened with the threaded groove 4104, the bottom of the second movable cavity 4105 is opened with the fixed cavity 4106, the bottom of the fixed cavity 4106 is opened with the clamping groove 4107, the adjusting component 42 includes a screw 4201, a knob 4202, a first flow blocking block 4203, a slide rail 4204, a second flow blocking block 4205 and a fixed base 4206, the knob 4202 is fixedly connected to the top of the screw 4201, the bottom of the screw 4201 is rotatably connected to the top of the first block 4203, two sides of the first block 4203 are provided with slide rails 4204, the first block 4203 is slidably connected to the inside of the first movable chamber 4103 and the inside of the second movable chamber 4105, the bottom of the second block 4205 is provided with a fixed base 4206, the fixed base 4206 is fixedly connected to the inside of the clamping groove 4107, the second block 4205 is provided inside the fixed chamber 4106, and the first block 4203 can be driven to move by rotating the knob 4202, so that the size of the opening between the first block 4203 and the second block 4205 can be adjusted, thereby balancing and adjusting the flow inside the quartz tube body 1, and the adjustment can be performed according to actual needs and conditions during sintering, and the operation is simple.
Referring to fig. 9, the mixing chamber 3 includes a mixing chamber inlet 31 and a mixing chamber outlet 32, the mixing chamber inlet 31 is communicated with the mixing chamber outlet 32, the mixing chamber inlet 31 is connected with the flow guide mechanism 2, the mixing chamber outlet 32 is connected with the adjusting mechanism 4, and different gases are concentrated and mixed in the mixing chamber 3.
Referring to fig. 10, the rotating blade assembly 5 includes a fixed ring 51, a reinforcing rod 52, a rotating shaft 53 and blades 54, the fixed ring 51 is fixedly connected to the mixing outlet 19, the reinforcing rod 52 is disposed on the inner side of the fixed ring 51, the rotating shaft 53 is disposed in the middle of the reinforcing rod 52, the blades 54 are rotatably connected to the rotating shaft 53, and the rotating blade assembly 5 can drive the blades to rotate when the mixed gas reaches the blades 54, so that the blades 54 are used to improve the diffusion strength, and the rotating blades 54 stir the gas, thereby improving the sufficient mixing of different gases.
In order to better show the balance method of the quartz diffusion tube with the built-in balance flow structure, the embodiment now proposes a balance method of the quartz diffusion tube with the built-in balance flow structure, which includes the following steps:
the method comprises the following steps: injecting different gases or pressurized water into the quartz tube main body 1 through the gas inlet tube 11, the gas outlet tube 12 and the shower tube 13;
step two: different gases are guided by the diversion inclined plane 22, the gases pass through the gas inlet hole 24, the gases are discharged from the gas outlet hole 26, and the gases enter the interior of the mixing bin 3;
step three: the mixed gas is discharged into the adjusting mechanism 4 through the mixing chamber outlet 32, the opening size between the first flow blocking block 4203 and the second flow blocking block 4205 is adjusted by rotating the knob 4202, and the gas is discharged from the mixing outlet 19 after passing through the adjusting mechanism 4 into the rotary vane assembly 5.
Example two:
referring to fig. 11 to 12, in comparison with the first embodiment, the support assembly 6 is removed from the inside of the quartz tube main body 1, a diffusion chamber 16 is disposed between the installation cavity 14 and the mixing outlet 19, a through hole 15 is formed at the front end of the diffusion chamber 16, the through hole 15 is communicated with the installation cavity 14, the rear end of the diffusion chamber 16 is communicated with the mixing outlet 19, an inclined wall 17 is disposed inside the diffusion chamber 16, the inner diameter of the through hole 15 is smaller than the inner diameter of the mixing outlet 19, the diffusion chamber 16 is integrally in a horn shape gradually enlarged from the through hole 15 to the mixing outlet 19, and compared with the case that gas is directly discharged from the adjusting mechanism 4 for diffusion, the diffusion chamber 16 and the inclined wall 17 can guide the gas in an inducing manner, so that large-diameter diffusion is achieved, and the diffusion effect of the quartz tube main body 1 is improved.
In order to better show the balance method of the quartz diffusion tube with the built-in balance flow structure, the embodiment now proposes a balance method of the quartz diffusion tube with the built-in balance flow structure, which includes the following steps:
the method comprises the following steps: injecting different gases or pressurized water into the quartz tube main body 1 through the gas inlet tube 11, the gas outlet tube 12 and the shower tube 13;
step two: different gases are guided by the diversion inclined plane 22, the gases pass through the gas inlet hole 24, the gases are discharged from the gas outlet hole 26, and the gases enter the interior of the mixing bin 3;
step three: the mixed gas is discharged into the adjusting mechanism 4 through the outlet 32 of the mixing bin, the opening size between the first flow blocking block 4203 and the second flow blocking block 4205 is adjusted by rotating the knob 4202, the gas passes through the adjusting mechanism 4 and enters the diffusion chamber 16, and the gas is guided by the inclined wall 17 in the diffusion chamber 16;
step four: after passing through the diffusion chamber 16 into the rotary vane assembly 5, the gas exits through the mixing outlet 19.
In summary, in the quartz diffusion tube with a flow balancing structure and the method thereof, the rotating blade assembly 5 can drive the blades to rotate when the mixed gas arrives, so as to improve the diffusion strength, meanwhile, the rotating blade assembly 5 stirs the gas, so as to improve the sufficient mixing of different gases, different gases enter from the gas inlet hole 24 and are discharged from the gas outlet hole 26 under pressure, so that the dispersed gases are converged on the gas outlet surface 25, so as to improve the mixing speed of different gases in the dispersion furnace, the first flow blocking block 4203 can be driven to move by rotating the knob 4202, so as to adjust the opening size between the first flow blocking block 4203 and the second flow blocking block 4205, so as to balance and adjust the flow inside the quartz tube main body 1, so as to perform operation and adjustment according to actual needs and conditions in the sintering process, the operation is simple, compared with the case where the gas is directly discharged by the adjusting mechanism 4 for diffusion, the diffusion chamber 16 and the inclined wall 17 can guide the gas in an inducing way, so that large-caliber diffusion is realized, and the diffusion effect of the quartz tube body 1 is improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to cover the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.
Claims (10)
1. The utility model provides an interior quartz diffusion tube of establishing balanced flow structure, includes quartz capsule main part (1), its characterized in that: the quartz tube comprises a quartz tube main body (1), and is characterized in that a flow guide mechanism (2), a mixing bin (3), an adjusting mechanism (4) and a rotating blade assembly (5) are arranged inside the quartz tube main body (1), the flow guide mechanism (2) is arranged at the front end inside the quartz tube main body (1), the adjusting mechanism (4) is arranged at the rear of the flow guide mechanism (2), the flow guide mechanism (2) and the adjusting mechanism (4) are communicated through the mixing bin (3), and the rotating blade assembly (5) is arranged at the tail end inside the quartz tube main body (1).
2. A quartz diffuser tube with built-in flow balance structure as claimed in claim 1, wherein: the quartz tube comprises a quartz tube main body (1) and is characterized in that the quartz tube main body (1) comprises an air inlet tube (11), an air outlet tube (12), a spray tube (13), an installation cavity (14), a chassis (18) and a mixed outlet (19), the air inlet tube (11) is arranged in the middle of the top end of the quartz tube main body (1), the air outlet tube (12) and the spray tube (13) are respectively arranged on the left side and the right side of the air inlet tube (11), the installation cavity (14) is formed in the portion, communicated with the inside of the quartz tube main body (1), of the air inlet tube (11), the air outlet tube (12) and the spray tube (13), the installation cavity (14) is formed in the portion, communicated with the inside of the quartz tube main body (1), a flow guide mechanism (2), a mixing bin (3), an adjusting mechanism (4) and a rotary blade assembly (5) are arranged in the portion of the installation cavity (14), the tail end of the quartz tube main body (1) is provided with the chassis (18), and the mixed outlet (19) is formed in the middle of the chassis (18).
3. A quartz diffuser tube with built-in flow balance structure as claimed in claim 2, wherein: the inner part of the quartz tube main body (1) is provided with a supporting component (6), the supporting component (6) is arranged between the installation cavity (14) and the mixing outlet (19), the supporting component (6) comprises a first supporting ring (61), a second supporting ring (62), a first supporting frame (63), a second supporting frame (64), a connecting shaft (65) and a supporting support rod (66), the inner part of the first supporting ring (61) is fixedly connected with the first supporting frame (63), the inner part of the second supporting ring (62) is fixedly connected with the second supporting frame (64), the first supporting ring (61) and the second supporting ring (62) are fixedly connected on the inner wall of the quartz tube main body (1), the first supporting ring (61) is connected on one side of the inner part of the quartz tube main body (1) close to the adjusting mechanism (4), the second supporting ring (62) is connected on one side of the inner part of the quartz tube main body (1) close to the rotary vane component (5), a connecting shaft (65) is connected between the first support frame (63) and the second support frame (64), a support supporting rod (66) is arranged outside the connecting shaft (65), and one end, far away from the connecting shaft (65), of the support supporting rod (66) is fixedly connected to the inner wall of the quartz tube main body (1).
4. A quartz diffuser tube with built-in flow balance structure as claimed in claim 1, wherein: the flow guide mechanism (2) comprises a flow guide block (21), a flow guide inclined plane (22), a gas inlet surface (23), a gas inlet hole (24), a gas outlet surface (25), a gas outlet hole (26) and a flow guide channel (27), wherein the flow guide inclined plane (22) is arranged on the front surface of the flow guide block (21), the gas inlet surface (23) is arranged in the middle of the flow guide inclined plane (22), the gas inlet hole (24) is formed in the gas inlet surface (23), the gas outlet surface (25) is arranged on the back surface of the flow guide block (21), the gas outlet hole (26) is formed in the gas outlet surface (25), the outer diameter of the gas inlet surface (23) is larger than that of the gas outlet surface (25), the number and the positions of the gas inlet holes (24) are in one-to-one correspondence with the gas outlet holes (26), and the flow guide channel (27) is connected between the gas inlet hole (24) and the gas outlet hole (26).
5. A quartz diffuser tube with built-in flow balance structure as claimed in claim 1, wherein: the adjusting mechanism (4) comprises a passage component (41) and an adjusting component (42), the adjusting component (42) is arranged in the passage component (41), the passage component (41) comprises a through opening (4101), a flow guide cavity (4102), a first movable cavity (4103), a thread groove (4104), a second movable cavity (4105), a fixed cavity (4106) and a clamping groove (4107), the through opening (4101) is respectively arranged on the front and the back of the adjusting mechanism (4), the flow guide cavity (4102) is arranged on the inner side of the through opening (4101), the second movable cavity (4105) is arranged between the two flow guide cavities (4102), the first movable cavity (4103) is arranged on the top of the second movable cavity (4105), the thread groove (4104) is arranged on the top of the first movable cavity (4103), the fixed cavity (4106) is arranged on the bottom of the second movable cavity (4105), the clamping groove (4107) is arranged on the bottom of the fixed cavity (4106), the adjusting assembly (42) comprises a screw rod (4201), a knob (4202), a first flow blocking block (4203), a sliding rail (4204), a second flow blocking block (4205) and a fixed base (4206), wherein the knob (4202) is fixedly connected to the top of the screw rod (4201), the bottom of the screw rod (4201) is rotatably connected to the top of the first flow blocking block (4203), the sliding rail (4204) is arranged on two sides of the first flow blocking block (4203), the first flow blocking block (4203) is slidably connected to the inside of the first movable cavity (4103) and the inside of the second movable cavity (4105), the fixed base (4206) is arranged on the bottom of the second flow blocking block (4205), the fixed base (4206) is fixedly connected to the inside of the clamping groove (4107), and the second flow blocking block (4205) is arranged inside of the fixed cavity (4106).
6. A quartz diffuser tube with built-in flow balance structure as claimed in claim 1, wherein: the mixing bin (3) comprises a mixing bin inlet (31) and a mixing bin outlet (32), the mixing bin inlet (31) is communicated with the mixing bin outlet (32), the mixing bin inlet (31) is connected with the flow guide mechanism (2), and the mixing bin outlet (32) is connected with the adjusting mechanism (4).
7. A quartz diffuser tube with built-in flow balance structure as claimed in claim 1, wherein: the rotating vane assembly (5) comprises a fixed ring (51), a reinforcing rod (52), a rotating shaft (53) and vanes (54), the fixed ring (51) is fixedly connected to the mixing outlet (19), the reinforcing rod (52) is arranged on the inner side of the fixed ring (51), the rotating shaft (53) is arranged in the middle of the reinforcing rod (52), and the vanes (54) are rotatably connected to the rotating shaft (53).
8. A quartz diffuser tube with built-in flow balance structure as claimed in claim 2, wherein: be provided with diffusion chamber (16) between installation cavity (14) and mixed export (19), through-hole (15) have been seted up to the front end of diffusion chamber (16), through-hole (15) are linked together with installation cavity (14), the rear end and the mixed export (19) of diffusion chamber (16) are linked together, the inside of diffusion chamber (16) is provided with skew wall (17), the internal diameter of through-hole (15) is less than the internal diameter of mixed export (19), diffusion chamber (16) are whole to be the loudspeaker form by through-hole (15) to mixed export (19) enlargies gradually.
9. A method of balancing a quartz diffuser tube with built-in flow balancing structure according to any one of claims 1 to 8, wherein: the method comprises the following steps:
the method comprises the following steps: injecting different gases or pressure water into the quartz tube main body (1) through an air inlet pipe (11), an air outlet pipe (12) and a spray pipe (13);
step two: different gases are guided by the flow guide inclined plane (22), the gases pass through the gas inlet holes (24), the gases are discharged from the gas outlet holes (26), and the gases enter the mixing bin (3);
step three: the mixed gas is discharged into the adjusting mechanism (4) through the outlet (32) of the mixing bin, the opening size between the first flow blocking block (4203) and the second flow blocking block (4205) is adjusted by rotating the knob (4202), and the gas is discharged from the mixing outlet (19) after passing through the adjusting mechanism (4) and entering the rotary vane assembly (5).
10. The method of claim 9, wherein the quartz diffuser tube with the built-in flow balance structure comprises: also comprises the following steps:
the method comprises the following steps: injecting different gases or pressure water into the quartz tube main body (1) through an air inlet pipe (11), an air outlet pipe (12) and a spray pipe (13);
step two: different gases are guided by the flow guide inclined plane (22), the gases pass through the gas inlet holes (24), the gases are discharged from the gas outlet holes (26), and the gases enter the mixing bin (3);
step three: the mixed gas is discharged into the interior of the adjusting mechanism (4) through the outlet (32) of the mixing bin, the opening size between the first flow blocking block (4203) and the second flow blocking block (4205) is adjusted by rotating the knob (4202), the gas enters the diffusion chamber (16) through the adjusting mechanism (4), and the gas is guided by the inclined wall (17) in the diffusion chamber (16);
step four: the gas passes through the diffusion chamber (16) and enters the rotating blade assembly (5) and is discharged from the mixing outlet (19).
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| CN202111511712.6A CN114182353B (en) | 2021-12-06 | 2021-12-06 | Quartz diffusion tube with built-in flow balancing structure and method thereof |
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| CN114182353B (en) | 2022-10-18 |
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