CN114182328A - Cathode edge conductive mechanism and cathode conductive module of horizontal electroplating equipment - Google Patents
Cathode edge conductive mechanism and cathode conductive module of horizontal electroplating equipment Download PDFInfo
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- CN114182328A CN114182328A CN202210015167.XA CN202210015167A CN114182328A CN 114182328 A CN114182328 A CN 114182328A CN 202210015167 A CN202210015167 A CN 202210015167A CN 114182328 A CN114182328 A CN 114182328A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 39
- 238000009713 electroplating Methods 0.000 title claims abstract description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 19
- 229910052802 copper Inorganic materials 0.000 claims description 19
- 239000010949 copper Substances 0.000 claims description 19
- 230000000149 penetrating effect Effects 0.000 claims description 18
- 238000007747 plating Methods 0.000 claims description 17
- 239000002245 particle Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- 230000002146 bilateral effect Effects 0.000 claims description 3
- 230000006835 compression Effects 0.000 abstract description 3
- 238000007906 compression Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 56
- 238000000034 method Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 3
- 238000010073 coating (rubber) Methods 0.000 description 3
- 229910001431 copper ion Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention discloses a cathode edge conductive mechanism and a cathode conductive module of horizontal electroplating equipment, wherein the cathode edge conductive mechanism comprises an upper conductive belt, a lower conductive belt, an upper conductive belt driving component, a lower conductive belt driving component, an upper conductive belt pressing component and a lower conductive belt pressing component, the upper conductive belt and the lower conductive belt are oppositely arranged up and down, the upper conductive belt driving component is connected with the upper conductive belt and drives the upper conductive belt to rotate, the upper conductive belt pressing component drives the lower end of the upper conductive belt to move downwards, the edge of a film is pressed to the lower conductive belt and tensions the upper conductive belt, the lower conductive belt driving component is connected with the lower conductive belt and drives the lower conductive belt to rotate, and the lower conductive belt pressing component drives the lower end of the lower conductive belt to move downwards and tensions the lower conductive belt. The invention can effectively solve the problems of more holes and larger hole diameter of the product by a mode of edge compression and electric conduction.
Description
Technical Field
The invention relates to the technical field of electroplating equipment, in particular to a cathode edge conducting mechanism and a cathode conducting module of horizontal electroplating equipment.
Background
Electroplating is a process of plating a thin layer of metal or alloy on the surface of metal by using the principle of electrolysis, and is a process of attaching a layer of metal film on the surface of a metal or other material workpiece by using the action of electrolysis so as to play a role in preventing metal oxidation (such as corrosion), improving wear resistance, conductivity and light reflection, enhancing the appearance and the like. With the development of modern industrial technology, the demand for film coating on the surface of a film substrate is increasing, and the film substrate is widely applied to the fields of high-performance automobile films, plasma television flat panel displays, touch screens, solar cells, flexible printed circuit boards (FPCs), Chip On Films (COFs) and the like.
In the existing electroplating equipment, electroplating is mostly carried out by adopting a mode of adding a cathode conductive roller and a plating solution tank. The method has the defects that the film base material is thin, the roll surface of the cathode conductive roll is easy to be plated with point-loaded particles in the electroplating process, the particles grow continuously under the action of current and are easy to pierce the film surface, so that the holes of the product are numerous, the diameter of the holes is large, and the quality of the product is influenced.
The above drawbacks are to be improved.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a cathode edge conducting mechanism and a cathode conducting module of horizontal electroplating equipment.
The technical scheme of the invention is as follows:
on one hand, the invention provides a cathode edge conductive mechanism which comprises an upper conductive belt, a lower conductive belt, an upper conductive belt driving assembly, a lower conductive belt driving assembly, an upper conductive belt pressing assembly and a lower conductive belt pressing assembly, wherein the upper conductive belt and the lower conductive belt are arranged oppositely up and down, the upper conductive belt driving assembly is connected with the upper conductive belt and drives the upper conductive belt to rotate, the upper conductive belt pressing assembly drives the lower end of the upper conductive belt to move downwards, the edge of a film is pressed to the lower conductive belt and tensions the upper conductive belt, the lower conductive belt driving assembly is connected with the lower conductive belt and drives the lower conductive belt to rotate, and the lower conductive belt pressing assembly drives the lower end of the lower conductive belt to move downwards and tensions the lower conductive belt.
According to the invention of the above scheme, the upper conductive belt driving assembly comprises an upper conductive belt driving motor and upper and lower rows of upper conductive belt pulleys, the upper conductive belt pulley in the upper row is mounted on the first fixing plate, the upper conductive belt pulley in the lower row is mounted on the second fixing plate, the upper conductive belt is sleeved on the upper conductive belt pulleys in the upper and lower rows, and the upper conductive belt driving motor is connected with any one of the upper conductive belt pulleys.
Further, the lower conductive belt driving assembly comprises a lower conductive belt driving motor and upper and lower rows of lower conductive belt pulleys, the upper row of lower conductive belt pulleys is mounted on the third fixing plate, the lower row of lower conductive belt pulleys is mounted on the fourth fixing plate, the lower conductive belt is sleeved on the upper and lower rows of lower conductive belt pulleys, and the lower conductive belt driving motor is connected with any one of the lower conductive belt pulleys.
Furthermore, the upper conductive belt pressing assembly comprises an upper pressing cylinder and a plurality of upper rubber coating pressing wheels which are arranged between the lower row of upper conductive belt pulleys side by side, the upper pressing cylinder is installed on the first fixing plate, the plurality of upper rubber coating pressing wheels are installed on the second fixing plate, and the movable end of the upper pressing cylinder is connected with the second fixing plate and drives the second fixing plate to move up and down.
Furthermore, the lower conductive belt pressing assembly comprises a lower pressing cylinder and a plurality of lower rubber-coated pressing wheels arranged between the upper row of lower conductive belt pulleys side by side, the lower pressing cylinder is installed on a fifth fixing plate, the plurality of lower rubber-coated pressing wheels are installed on the third fixing plate, and the movable end of the lower pressing cylinder is connected with the fourth fixing plate and drives the fourth fixing plate to move up and down.
Furthermore, the film penetrating device further comprises a film penetrating lifting assembly, wherein the lifting end of the film penetrating lifting assembly is connected with the upper conductive belt, the upper conductive belt driving assembly and the upper conductive belt pressing assembly, and drives the upper conductive belt, the upper conductive belt driving assembly and the upper conductive belt pressing assembly to move up and down.
Furthermore, the membrane penetrating lifting assembly comprises a membrane penetrating lifting cylinder, the membrane penetrating lifting cylinder is installed on a sixth fixing plate, and the movable end of the membrane penetrating lifting cylinder is connected with the first fixing plate and drives the first fixing plate to move up and down.
The device further comprises an upper auxiliary cathode slot and a lower auxiliary cathode slot, wherein the upper auxiliary cathode slot is arranged on the first fixing plate, openings for the upper conductive belt to pass through are formed in two sides of the upper auxiliary cathode slot, and an upper copper etching mechanism for eliminating copper plating particles on the surface of a conductive layer of the upper conductive belt is arranged in the upper auxiliary cathode slot; the lower auxiliary cathode slot is installed on the fourth fixing plate, openings for the lower conductive belt to pass through are formed in two sides of the upper auxiliary cathode slot, and a lower copper etching mechanism for eliminating copper plating particles on the surface of the conductive layer of the lower conductive belt is arranged in the upper auxiliary cathode slot.
The belt type power transmission device further comprises a plurality of upper conductive slip rings and a plurality of lower conductive slip rings, wherein the upper conductive slip rings are connected with the upper conductive wheels through upper conductive rotating shafts, the upper conductive wheels are in contact with the conductive layers of the upper conductive belts, the lower conductive slip rings are connected with the lower conductive wheels through lower conductive rotating shafts, and the lower conductive wheels are in contact with the conductive layers of the lower conductive belts.
Furthermore, the film clamping device further comprises a clamping mechanism used for clamping the film, and the clamping mechanism is arranged at the film inlet of the upper conductive belt and the film inlet of the lower conductive belt.
On the other hand, the invention provides a cathode conductive module of horizontal electroplating equipment, which comprises two cathode edge conductive mechanisms which are arranged in a bilateral symmetry mode.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the cathode current is transmitted to the film through the upper and lower conductive belts in a manner of edge compression conduction and drives the film to move, so that the cathode current is transmitted to the plating solution to form a conductive closed ring body with the anode conductive titanium basket, and copper ions in the plating solution are uniformly covered on the film through the current, so that the problems of more holes and larger hole diameter of a product can be effectively solved;
2. the upper conductive belt pressing component and the lower conductive belt pressing component can play a role in pressing the edge of the film, uniformly transmitting the negative current to the film and horizontally and stably driving the film to operate in the film operation process;
3. through the film penetrating lifting assembly, when the film is broken or the film is penetrated for the first time, the upper conductive belt driving assembly and the upper conductive belt pressing assembly can be integrally lifted, so that workers can conveniently finish the penetrated film;
4. the negative current is transmitted to the conducting layer of the upper conducting belt through the upper conducting slip ring, the negative current is transmitted to the conducting layer of the lower conducting belt through the lower conducting slip ring, and then the negative current is transmitted to the film through the conducting layers of the upper conducting belt and the lower conducting belt;
5. the upper auxiliary cathode tank is arranged on the travelling path of the upper conductive belt, and the upper auxiliary cathode tank and the lower auxiliary cathode tank are arranged on the travelling path of the lower conductive belt, so that copper plating particles on the surfaces of the conductive layers of the upper conductive belt and the lower conductive belt can be eliminated in time, the copper plating particles are prevented from growing continuously under the action of current and piercing the film surface at the edge of the film;
6. through set up fixture at last conductive belt and conductive belt's income membrane mouth down, can prevent the bad problem that the swift current area arouses behind the film, play the taut effect of film.
Drawings
FIG. 1 is a schematic structural view of a cathode edge conduction mechanism according to the present invention;
FIG. 2 is a front view of a cathode edge conduction mechanism in the present invention;
fig. 3 is a side view of the cathode edge conduction mechanism of the present invention.
In the context of the figures, it is,
1. a cathode edge conduction mechanism; 101. an upper conductive belt; 102. a lower conductive belt; 103. an upper conductive pulley; 104. an upper conductive belt driving motor; 105. a first fixing plate; 106. a second fixing plate; 107. a lower conductive pulley; 108. the lower conductive belt drives the motor; 109. a third fixing plate; 110. a fourth fixing plate; 111. an upper pressing cylinder; 112. coating a rubber-coated pinch roller; 113. a lower pressing cylinder; 114. lower rubber coating pinch roller; 115. a fifth fixing plate; 116. a first linear guide; 117. a first linear bearing; 118. a film-penetrating lifting cylinder; 119. a sixth fixing plate; 120. a second linear guide; 121. a second linear bearing; 122. a third linear bearing; 123. an upper conductive slip ring; 124. an upper conductive rotating shaft; 125. an upper conductive wheel; 126. a lower conductive slip ring; 127. a lower conductive rotating shaft; 128. a lower conductive wheel; 129. an upper auxiliary cathode channel; 130. a lower auxiliary cathode channel; 131. a clamping mechanism.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
It will be understood that when an element is referred to as being "disposed on" or "secured to" or "mounted on" another element, it can be directly or indirectly disposed on the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element. The terms "upper", "lower", "left", "right", "front", "rear", "inner", "outer", and the like indicate orientations or positions based on the orientations or positions shown in the drawings, and are for convenience of description only and not to be construed as limiting the technical solution. The terms "first", "second", "third", "fourth", "fifth", "sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "plurality" is two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
Referring to fig. 1 to 3, an embodiment of the invention provides a cathode conductive module of a horizontal electroplating apparatus, which includes two cathode edge conductive mechanisms 1 arranged in bilateral symmetry. The cathode edge conducting mechanism 1 comprises an upper conducting belt 101, a lower conducting belt 102, an upper conducting belt driving assembly, a lower conducting belt driving assembly, an upper conducting belt pressing assembly and a lower conducting belt pressing assembly, wherein the upper conducting belt 101 and the lower conducting belt 102 are arranged up and down oppositely, the upper conducting belt driving assembly is connected with the upper conducting belt 101 and drives the upper conducting belt 101 to rotate, the upper conducting belt pressing assembly drives the lower end of the upper conducting belt 101 to move downwards, the edge of the film 17 is pressed against the lower conducting belt 102 and tensions the upper conducting belt 101, the lower conducting belt driving assembly is connected with the lower conducting belt 102 and drives the lower conducting belt 102 to rotate, and the lower conducting belt pressing assembly drives the lower end of the lower conducting belt 102 to move downwards and tensions the lower conducting belt 102. According to the invention, the cathode current is transmitted to the film 17 through the upper and lower conductive belts in a manner of edge compression conduction and drives the film to move, so that the cathode current is transmitted to the plating solution to form a conductive closed ring body with the anode conductive titanium basket, and copper ions in the plating solution are uniformly covered on the film through the current, so that the problems of more holes and larger hole diameter of a product can be effectively solved; through last electrically conductive belt compress tightly subassembly and electrically conductive belt compress tightly the subassembly down, can play in the operation of film 17 and compress tightly film 17 edge, evenly transmit the effect that the negative pole electric current moved on film 17 and level and steady drive film 17 operation.
Referring to fig. 1 to 3, the upper conductive belt driving assembly includes an upper conductive belt driving motor 104 and upper and lower rows of upper conductive belt pulleys 103, the upper conductive belt pulley 103 and the upper conductive belt driving motor 104 in the upper row are mounted on a first fixing plate 105, the upper conductive belt pulley 103 in the lower row is mounted on a second fixing plate 106, the upper conductive belt 101 is sleeved on the upper conductive belt pulley 103 in the upper and lower rows, and the upper conductive belt driving motor 104 is connected to any one upper conductive belt pulley 103 in the upper row and drives the upper conductive belt pulley 103 to rotate, so as to drive the upper conductive belt 101 to rotate.
Referring to fig. 1 to 3, the lower conductive belt driving assembly includes a lower conductive belt driving motor 108 and upper and lower rows of lower conductive belt pulleys 107, the upper row of lower conductive belt pulleys 107 is mounted on a third fixing plate 109, the lower row of lower conductive belt pulleys 107 and the lower conductive belt driving motor 108 are mounted on a fourth fixing plate 110, the lower conductive belt 102 is sleeved on the upper and lower rows of lower conductive belt pulleys 107, and the lower conductive belt driving motor 108 is connected with any lower conductive belt pulley 107 in the lower row and drives the lower conductive belt pulley 107 to rotate, so as to drive the lower conductive belt 102 to rotate.
Referring to fig. 1 to 3, the upper conductive belt pressing assembly includes an upper pressing cylinder 111 and a plurality of upper rubber-coated pressing rollers 112 uniformly arranged side by side between the lower row of upper conductive pulleys 103, the upper pressing cylinder 111 is mounted on the first fixing plate 105, the plurality of upper rubber-coated pressing rollers 112 are mounted on the second fixing plate 106, and a movable end of the upper pressing cylinder 111 is connected with the second fixing plate 106 and drives the second fixing plate 106 to move up and down. After the upper pressing cylinder 111 is started, the lower row of the upper conductive belt pulley 103 and the upper rubber-covered pressing wheel 112 are driven to move downwards by the second fixing plate 106, so that the lower end of the upper conductive belt 101 is driven to move downwards, press the lower conductive belt 102 and tension the upper conductive belt 101.
Referring to fig. 1 to 3, the lower conductive belt pressing assembly includes a lower pressing cylinder 113 and a plurality of lower rubber-covered pressing rollers 114 disposed between the upper conductive pulleys 107, the lower pressing cylinder 113 is mounted on a fifth fixing plate 115, the plurality of lower rubber-covered pressing rollers 114 are mounted on a third fixing plate 109, and a movable end of the lower pressing cylinder 113 is connected to a fourth fixing plate 110 and drives the fourth fixing plate 110 to move up and down. After the lower pressing cylinder 113 is started, the lower conductive belt pulley 107 on the lower row is driven to move downwards by the fourth fixing plate 110, so that the lower end of the lower conductive belt 102 is driven to move downwards to tension the lower conductive belt 102. Because the upper rubber-coated pinch roller 112 and the lower rubber-coated pinch roller 114 are softer in texture, the edges of the thin film 17 can be uniformly pressed by the upper conductive belt 101 and the lower conductive belt 102, and a buffering effect can be achieved, so that the thin film 17 is prevented from being crushed.
Referring to fig. 1 to 3, in order to enable the lower pressing cylinder 113 to smoothly drive the fourth fixing plate 110 to move down, a first linear guide rod 116 is disposed at the bottom of the fifth fixing plate 115, a first linear bearing 117 is disposed on the fourth fixing plate 110, and the first linear bearing 117 is sleeved outside the first linear guide rod 116, so that the fourth fixing plate 110 can move up and down along the first linear guide rod 116.
Referring to fig. 1 to 3, the cathode edge conductive mechanism 1 further includes a through film lifting assembly, and a lifting end of the through film lifting assembly is connected to the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly, and drives the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly to move up and down. When the film 17 is broken or is threaded for the first time, the upper conductive belt 101 and the lower conductive belt 102 are used for passing the film 17, and then the film threading lifting assembly integrally lifts the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly, so that a worker can finish the threaded film 17.
Referring to fig. 1 to 3, the penetrating film lifting assembly includes a penetrating film lifting cylinder 118, the penetrating film lifting cylinder 118 is mounted on a sixth fixing plate 119, and a movable end of the penetrating film lifting cylinder 118 is connected to the first fixing plate 105 and drives the first fixing plate 105 to move up and down, so as to drive the second fixing plate 106 to move up and down, thereby driving the upper conductive belt 101, the upper conductive belt driving assembly, and the upper conductive belt pressing assembly to move up and down.
Referring to fig. 1 to 3, in order to enable the membrane-penetrating lifting cylinder 118 to stably drive the first fixing plate 105 to move up and down, the upper pressing cylinder 111 to stably drive the second fixing plate 106 to move up and down, a second linear guide rod 120 is disposed between the sixth fixing plate 119 and the third fixing plate 109, a second linear bearing 121 is disposed on the first fixing plate 105, a third linear bearing 122 is disposed on the second fixing plate 106, and both the second linear bearing 121 and the third linear bearing 122 are sleeved outside the second linear guide rod 120, so that the first fixing plate 105 and the second fixing plate 106 can move up and down along the second linear guide rod 120.
Referring to fig. 1 and 2, the cathode edge conductive mechanism 1 further includes a plurality of upper conductive slip rings 123 and a plurality of lower conductive slip rings 126, the plurality of upper conductive slip rings 123 are mounted on the first fixing plate 105, the upper conductive slip rings 123 are connected to the upper conductive wheel 125 through the upper conductive rotating shaft 124, and the upper conductive wheel 125 contacts with the conductive layer of the upper conductive belt 101; a plurality of lower conductive slip rings 126 are installed under the fourth fixing plate 110, the lower conductive slip rings 126 are connected to lower conductive wheels 128 through lower conductive rotating shafts 127, and the lower conductive wheels 128 are in contact with the conductive layer of the lower conductive belt 102. The upper conductive slip ring 123 transfers the negative current to the conductive layer of the upper conductive belt 101 through the upper conductive rotating shaft 124 and the upper conductive wheel 125, and the lower conductive slip ring 126 transfers the negative current to the conductive layer of the lower conductive belt 102 through the lower conductive rotating shaft 127 and the lower conductive wheel 128, so that the negative current is transferred to the film 17 through the conductive layers of the upper conductive belt 101 and the lower conductive belt 102.
Preferably, the conductive layer of the upper conductive belt 101 is located at the outer surface inner side edge of the upper conductive belt 101, and the conductive layer of the upper conductive belt 101 is located at the outer surface inner side edge of the lower conductive belt 102, so that the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 are in contact with only the edge of the film 17.
Referring to fig. 1 and 2, the cathode edge conductive mechanism 1 further includes an upper auxiliary cathode slot 129 and a lower auxiliary cathode slot 130, the upper auxiliary cathode slot 129 is mounted on the first fixing plate 105, openings for the upper conductive belt 101 to pass through are disposed on two sides of the upper auxiliary cathode slot 129, and an upper copper etching mechanism/copper etching liquid for removing copper plating particles on the conductive layer surface of the upper conductive belt 101 is disposed in the upper auxiliary cathode slot 129; the lower auxiliary cathode slot 130 is installed on the fourth fixing plate 110, openings through which the lower conductive belt 102 passes are provided at both sides of the upper auxiliary cathode slot 129, and a lower copper etching mechanism/copper etching liquid for removing copper plating particles on the surface of the conductive layer of the lower conductive belt 102 is provided in the upper auxiliary cathode slot 129. In the electroplating process, the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 attract copper ions, copper plating particles are plated on the conductive layers, the copper plating particles grow continuously under the action of current and easily pierce the film surface at the edge of the film 17, and therefore the upper auxiliary cathode slot 129 is arranged on the traveling path of the upper conductive belt 101, the lower auxiliary cathode slot 130 is arranged on the traveling path of the lower conductive belt 102, and the copper plating particles on the surfaces of the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 can be eliminated in time.
Referring to fig. 1 to 3, the cathode edge conductive mechanism 1 further includes a clamping mechanism 131 for clamping the thin film 17, the clamping mechanism 131 is disposed at the film inlet of the upper conductive belt 101 and the lower conductive belt 102, and the film surface of the thin film 17 is clamped by the film inlet of the upper conductive belt 101 and the lower conductive belt 102, so that the bad problem caused by the backward sliding of the thin film 17 can be prevented, and the thin film 17 is tensioned.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
The invention is described above with reference to the accompanying drawings, which are illustrative, and it is obvious that the implementation of the invention is not limited in the above manner, and it is within the scope of the invention to adopt various modifications of the inventive method concept and technical solution, or to apply the inventive concept and technical solution to other fields without modification.
Claims (10)
1. The utility model provides a negative pole edge electrically conductive mechanism, its characterized in that includes last conductive belt, lower conductive belt, goes up conductive belt drive assembly, lower conductive belt drive assembly, goes up conductive belt compress tightly the subassembly and compress tightly the subassembly down conductive belt, go up conductive belt with lower conductive belt sets up relatively from top to bottom, go up conductive belt drive assembly with go up conductive belt and connect and drive go up conductive belt and rotate, it compresses tightly the subassembly and drives to go up conductive belt's lower extreme moves down, presses the edge of film to lower conductive belt and tensioning go up conductive belt, lower conductive belt drive assembly with lower conductive belt connects and drives lower conductive belt rotates, lower conductive belt compresses tightly the subassembly and drives lower conductive belt's lower extreme moves down, the tensioning down conductive belt.
2. The cathode edge conduction mechanism according to claim 1, wherein the upper conductive belt driving assembly includes an upper conductive belt driving motor and upper and lower rows of upper conductive belt pulleys, the upper conductive belt pulley of the upper row is mounted on the first fixing plate, the upper conductive belt pulley of the lower row is mounted on the second fixing plate, the upper conductive belt is sleeved on the upper conductive belt pulleys of the upper and lower rows, and the upper conductive belt driving motor is connected to any one of the upper conductive belt pulleys.
3. The cathode edge conduction mechanism according to claim 2, wherein the lower conduction belt driving assembly comprises a lower conduction belt driving motor and upper and lower rows of lower conduction belt pulleys, the upper row of lower conduction belt pulleys is mounted on the third fixing plate, the lower row of lower conduction belt pulleys is mounted on the fourth fixing plate, the lower conduction belt is sleeved on the upper and lower rows of lower conduction belt pulleys, and the lower conduction belt driving motor is connected with any one of the lower conduction belt pulleys.
4. The cathode edge conduction mechanism according to claim 3, wherein the upper conductive belt pressing assembly comprises an upper pressing cylinder and a plurality of upper rubber-coated pressing wheels arranged between the upper conductive belt pulleys in the lower row side by side, the upper pressing cylinder is mounted on the first fixing plate, the plurality of upper rubber-coated pressing wheels are mounted on the second fixing plate, and the movable end of the upper pressing cylinder is connected with the second fixing plate and drives the second fixing plate to move up and down.
5. The cathode edge conduction mechanism according to claim 4, wherein the lower conductive belt pressing assembly comprises a lower pressing cylinder and a plurality of lower encapsulated rollers arranged side by side between the upper row of the lower conductive pulleys, the lower pressing cylinder is mounted on a fifth fixing plate, the plurality of lower encapsulated rollers are mounted on the third fixing plate, and a movable end of the lower pressing cylinder is connected with the fourth fixing plate and drives the fourth fixing plate to move up and down.
6. The cathode edge conduction mechanism according to claim 4, further comprising a penetrating film lifting assembly, wherein a lifting end of the penetrating film lifting assembly is connected with the upper conductive belt, the upper conductive belt driving assembly and the upper conductive belt pressing assembly and drives the upper conductive belt, the upper conductive belt driving assembly and the upper conductive belt pressing assembly to move up and down.
7. The cathode edge conducting mechanism according to claim 6, wherein the membrane penetrating lifting assembly comprises a membrane penetrating lifting cylinder, the membrane penetrating lifting cylinder is mounted on a sixth fixing plate, and a movable end of the membrane penetrating lifting cylinder is connected with the first fixing plate and drives the first fixing plate to move up and down.
8. The cathode edge conduction mechanism according to claim 3, further comprising an upper auxiliary cathode slot and a lower auxiliary cathode slot, wherein the upper auxiliary cathode slot is mounted on the first fixing plate, openings for the upper conduction belt to pass through are provided on both sides of the upper auxiliary cathode slot, and an upper copper etching mechanism for removing copper plating particles on the surface of the conduction layer of the upper conduction belt is provided in the upper auxiliary cathode slot; the lower auxiliary cathode slot is installed on the fourth fixing plate, openings for the lower conductive belt to pass through are formed in two sides of the upper auxiliary cathode slot, and a lower copper etching mechanism for eliminating copper plating particles on the surface of the conductive layer of the lower conductive belt is arranged in the upper auxiliary cathode slot.
9. The cathode edge conduction mechanism according to claim 1, further comprising a plurality of upper conductive slip rings and a plurality of lower conductive slip rings, wherein the upper conductive slip rings are connected to the upper conductive wheel through an upper conductive rotation shaft, the upper conductive wheel is in contact with the conductive layer of the upper conductive belt, the lower conductive slip rings are connected to the lower conductive wheel through a lower conductive rotation shaft, and the lower conductive wheels are in contact with the conductive layer of the lower conductive belt.
10. A cathode conductive module of a horizontal electroplating device, which is characterized by comprising two cathode edge conductive mechanisms according to any one of claims 1 to 9, which are arranged in bilateral symmetry.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210015167.XA CN114182328A (en) | 2022-01-07 | 2022-01-07 | Cathode edge conductive mechanism and cathode conductive module of horizontal electroplating equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210015167.XA CN114182328A (en) | 2022-01-07 | 2022-01-07 | Cathode edge conductive mechanism and cathode conductive module of horizontal electroplating equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024082493A1 (en) | 2022-10-19 | 2024-04-25 | 重庆金美新材料科技有限公司 | Cathode conductive mechanism, and electroplating system |
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