CN114178680B - Synchronous monitoring device for femtosecond laser micromachining - Google Patents
Synchronous monitoring device for femtosecond laser micromachining Download PDFInfo
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- CN114178680B CN114178680B CN202111294523.8A CN202111294523A CN114178680B CN 114178680 B CN114178680 B CN 114178680B CN 202111294523 A CN202111294523 A CN 202111294523A CN 114178680 B CN114178680 B CN 114178680B
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- Prior art keywords
- adjusting
- assembly
- femtosecond laser
- gear transmission
- rod
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- 238000005459 micromachining Methods 0.000 title claims abstract description 19
- 238000012806 monitoring device Methods 0.000 title claims abstract description 19
- 230000001360 synchronised effect Effects 0.000 title claims abstract description 16
- 238000012544 monitoring process Methods 0.000 claims abstract description 33
- 230000005540 biological transmission Effects 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000011241 protective layer Substances 0.000 claims description 6
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention is suitable for the technical field of femtosecond laser micromachining, and provides a synchronous monitoring device for femtosecond laser micromachining, which comprises a chassis, a top disc, a femtosecond laser, an adjusting component, a stretching component and a gear transmission component, wherein the top disc is arranged in parallel with the chassis and is connected with the chassis through a supporting piece; the adjusting component is hinged with the gear transmission component, the tail end of the adjusting component is provided with a monitoring head, and the swinging angle of the monitoring head is adjusted under the drive of the gear transmission component; the stretching assembly is arranged at the tail end of the adjusting assembly; the gear transmission assembly is arranged at one end of the adjusting assembly, and a clamping assembly is arranged on the gear transmission assembly and used for adjusting a workpiece to be processed and controlling the working process of the adjusting assembly; this monitoring devices can treat the course of working of machined part to the laser that femtosecond laser sent and carry out real-time supervision at the in-process that uses, drive the work of adjusting part through setting up gear drive subassembly, control the position of monitoring head, carries out the all-round real-time supervision of multi-angle to the processing position.
Description
Technical Field
The invention belongs to the technical field of femtosecond laser micromachining, and particularly relates to a synchronous monitoring device for femtosecond laser micromachining.
Background
Femtosecond is a measuring unit with long scale time, and femtosecond laser is a technical means that the shortest pulse can be obtained and commercialized application can be realized under laboratory conditions for human at present, and the femtosecond laser has the advantages of high concentration of energy, small heat affected zone, no splashing and slag, no special gas environment, no subsequent process, high processing precision and the like, so that great progress is made in the aspects of microstructure processing application and fine processing.
The processing process needs to be monitored in real time in the femtosecond laser processing process, and the traditional monitoring device is used for single-point monitoring, so that adjustment is inconvenient when the processing position is changed, and the monitoring range is limited.
Disclosure of Invention
The embodiment of the invention aims to provide a synchronous monitoring device for femtosecond laser micromachining, which aims to solve the technical problems of small monitoring range and incomplete coverage in the femtosecond laser micromachining process.
The embodiment of the invention is realized in such a way that the synchronous monitoring device for the femtosecond laser micromachining comprises a chassis and a femtosecond laser, and further comprises:
the top plate is arranged in parallel with the bottom plate, the top plate is connected with the bottom plate through a supporting piece, and a channel is arranged between the bottom plate and the top plate so as to facilitate laser processing of a workpiece to be processed;
the adjusting component is arranged at the top end of the top disc, the adjusting component is hinged with the gear transmission component arranged at one end of the adjusting component, the end of the adjusting component is provided with a monitoring head, and the swinging angle of the monitoring head is adjusted under the driving of the gear transmission component;
the stretching assembly is arranged at the tail end of the adjusting assembly and used for adjusting the position of the monitoring head at the tail end of the adjusting assembly;
the gear transmission assembly is arranged at one end of the adjusting assembly, and clamping assemblies are uniformly arranged on the gear transmission assembly and used for controlling the working process of the adjusting assembly while adjusting the workpiece to be processed.
Preferably, the adjusting component comprises a fixed column rotatably arranged on the top disc, a first side plate and a second side plate which are arranged on the side surfaces of the fixed column, a sliding block which is slidably arranged on the first side plate and the second side plate, and a supporting rod which is arranged on the side surfaces of the sliding block;
the side plates I and II are provided with sliding grooves for the sliding blocks to slide;
the side face of the fixed column is provided with a hanging rod, the hanging rod is hinged with a first telescopic piece, the free end of the first telescopic piece is provided with a limiting block, and the limiting block is in sliding connection with a limiting groove formed in the supporting rod.
Preferably, the stretching assembly comprises a drawing rod which is slidably arranged on the supporting rod, a magnetic pole which is arranged at one end of the drawing rod and matched with the limiting block, and an elastic piece I which is arranged at the other end of the drawing rod;
a second magnetic pole which is magnetically repulsed with the magnetic pole is arranged in the limiting block;
the monitoring head is arranged on the drawing rod and is in sliding connection with a groove formed in the tail end of the supporting rod.
Preferably, the gear transmission assembly comprises an inner gear ring arranged at the free ends of the first side plate and the second side plate, a driving wheel meshed with the inner gear ring, and an outer gear ring meshed with the driving wheel;
the outer gear ring and the workpiece to be machined are arranged coaxially.
Preferably, the driving wheel is in transmission connection with an external motor through a transmission shaft.
Preferably, the clamping assembly comprises a sleeve which is distributed in the outer gear at equal angles, a guide rod which is connected with the sleeve in a sliding manner, and a clamping jaw which is arranged at one end of the guide rod;
the guide rod is sleeved with a second elastic piece, and two ends of the second elastic piece are respectively connected with the sleeve and the clamping jaw.
Preferably, a protective layer is arranged on the working surface of the clamping jaw, and the protective layer is made of rubber materials.
According to the synchronous monitoring device for the femtosecond laser micromachining, which is provided by the embodiment of the invention, laser emitted by the femtosecond laser can be monitored in real time in the machining process of a workpiece to be machined in the use process, the gear transmission assembly is arranged to drive the adjusting assembly to work, the position of the monitoring head is controlled, and the machining position is monitored in a multi-angle and all-around manner.
Drawings
Fig. 1 is a schematic structural diagram of a synchronous monitoring device for femtosecond laser micromachining according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an adjusting component in a synchronous monitoring device for femtosecond laser micromachining according to an embodiment of the invention;
fig. 3 is a schematic structural diagram of a stretching assembly in a synchronous monitoring device for femtosecond laser micromachining according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a gear transmission assembly in a synchronous monitoring device for femtosecond laser micromachining according to an embodiment of the present invention;
FIG. 5 is an enlarged view of a portion of FIG. 1 at A;
fig. 6 is a perspective view of a clamping jaw in a synchronous monitoring device for femtosecond laser micromachining according to an embodiment of the present invention.
In the accompanying drawings: 1. a chassis; 2. a top plate; 3. a femtosecond laser; 4. a channel; 5. a support; 6. a workpiece to be machined; 7. fixing the column; 8. a first side plate; 9. a second side plate; 10. a chute; 11. a slide block; 12. a support rod; 13. a limit groove; 14. a limiting block; 15. a hanging rod; 16. a first telescopic piece; 17. a rod is pulled out; 18. a magnetic pole; 19. a monitoring head; 20. an elastic piece I; 21. a driving wheel; 22. an outer ring gear; 23. an inner gear ring; 24. a transmission shaft; 25. a sleeve; 26. a guide rod; 27. an elastic piece II; 28. a clamping jaw; 100. an adjustment assembly; 200. a stretching assembly; 300. a clamping assembly; 400. a gear assembly.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Specific implementations of the invention are described in detail below in connection with specific embodiments.
1-6, a structure diagram of a synchronous monitoring device for femtosecond laser micromachining provided by an embodiment of the invention comprises a chassis 1, a top disc 2, a femtosecond laser 3, an adjusting assembly 100, a stretching assembly 200 and a gear transmission assembly 400, wherein the top disc 2 is arranged in parallel with the chassis 1 and is connected with the chassis 1 through a supporting piece 5, and a channel 4 is arranged between the chassis 1 and the top disc 2 so as to facilitate machining of a workpiece 6 to be machined by laser; the adjusting component 100 is arranged at the top end of the top disc 2, the adjusting component 100 is hinged with a gear transmission component 400 arranged at one end of the adjusting component 100, the tail end of the adjusting component 100 is provided with a monitoring head 19, and the swinging angle of the monitoring head 19 is adjusted under the driving of the gear transmission component 400; the stretching assembly 200 is disposed at the end of the adjusting assembly 100, and is used for adjusting the position of the monitoring head 19 at the end of the adjusting assembly 100; the gear assembly 400 is mounted at one end of the adjusting assembly 100, and the clamping assemblies 300 are uniformly arranged on the gear assembly 400, so as to control the working process of the adjusting assembly 100 while adjusting the workpiece 6.
In the process of implementing the embodiment, the monitoring device can monitor the processing process of the workpiece 6 to be processed by the laser emitted by the femtosecond laser 3 in real time in the using process, and drive the adjusting assembly 100 to work by arranging the gear transmission assembly 400, so as to control the position of the monitoring head 19 and monitor the processing position in a multi-angle and omnibearing manner in real time.
In an example of the present invention, the number of the monitoring heads 19 is adjusted according to the monitoring requirement, the clamping assembly 300 is used for fixing the position of the workpiece 6 during operation, the femtosecond laser 3 is operated, when the machining position needs to be adjusted, the external motor is operated to drive the gear transmission assembly 400 to operate, the position of the workpiece 6 is changed, the inclination angle of the adjusting assembly 100 is adjusted, the adjusting assembly 100 is driven to operate, and the stretching assembly 200 is matched to adjust the position of the monitoring heads 19.
As shown in fig. 1 and 2, as a preferred embodiment of the present invention, the adjusting assembly 100 includes a fixed column 7 rotatably installed on the top plate 2, a first side plate 8 and a second side plate 9 disposed on the sides of the fixed column 7, a sliding block 11 slidably installed on the first side plate 8 and the second side plate 9, and a supporting rod 12 disposed on the sides of the sliding block 11;
the side plates I8 and II 9 are provided with sliding grooves 10 for the sliding blocks 11 to slide;
the side face of the fixed column 7 is provided with a hanging rod 15, the hanging rod 15 is hinged with a first telescopic part 16, the free end of the first telescopic part 16 is provided with a limiting block 14, and the limiting block 14 is in sliding connection with a limiting groove 13 formed in the supporting rod 12.
In the process of implementing the embodiment, the present application may install a pushing device, such as a cylinder, an electric telescopic rod, or a linear driving device, in the chute 10, to push the slider 11 to slide along the chute 10, and when the first side plate 8 and the second side plate 9 swing along with the gear transmission assembly 400, the position of the limiting block 14 in the limiting groove 13 is adjusted by controlling the elongation of the first telescopic member 16 in the swinging process, so as to adjust the position of the supporting rod 12, so as to adjust the swinging angle of the monitoring head 19.
As shown in fig. 3, as another preferred embodiment of the present invention, the stretching assembly 200 includes a pull rod 17 slidably mounted on the support rod 12, a magnetic pole 18 mounted on one end of the pull rod 17 and matched with the stopper 14, and an elastic member one 20 mounted on the other end of the pull rod 17;
a second magnetic pole which is magnetically repulsed with the magnetic pole 18 is arranged in the limiting block 14;
the monitoring head 19 is mounted on the drawing rod 17 and is in sliding connection with a groove formed in the tail end of the supporting rod 12.
In the process of implementing the embodiment, the elastic member may be a spring when in use, when the limiting block 14 slides along the limiting groove 13, the limiting block 14 pushes the drawing rod 17 to slide through the magnetic pole 18, in this process, the elastic member one 20 is stressed to elastically deform, and meanwhile, the monitoring head 19 slides along the groove formed on the supporting rod 12, so as to adjust the monitoring range of the monitoring head 19.
As shown in fig. 1 and 4, as another preferred embodiment of the present invention, the gear assembly 400 includes an inner gear ring 23 mounted on the free ends of the first side plate 8 and the second side plate 9, a driving wheel 21 engaged with the inner gear ring 23, and an outer gear ring 22 engaged with the driving wheel 21;
the driving wheel 21 is in transmission connection with an external motor through a transmission shaft 24.
In the process of implementing the embodiment, the driving wheel 21 in the present application can realize the change of displacement under the action of external lifting equipment such as an electric telescopic rod, adjust the matching relationship with the outer gear ring 22 and the inner gear ring 23, and can work independently or cooperatively, and the external motor works to drive the driving wheel 21 to rotate through the transmission shaft 24, so that the outer gear ring 22 works, the position of the workpiece 6 to be machined is changed, the inner gear ring 23 synchronously works, and the swing angle of the adjusting assembly 100 is controlled.
As shown in fig. 5 and 6, as another preferred embodiment of the present invention, the clamping assembly 300 includes a sleeve 25 equally angularly disposed inside the outer gear 22, a guide bar 26 slidably connected to the sleeve 25, and a clamping jaw 28 mounted at one end of the guide bar 26;
the guide rod 26 is sleeved with a second elastic piece 27, and two ends of the second elastic piece 27 are respectively connected with the sleeve 25 and the clamping jaw 28;
the working surface of the clamping jaw 28 is provided with a protective layer which is made of rubber material.
In the process of the embodiment, the number of the clamping assemblies 300 is adjusted according to the type of the workpiece 6 to be processed, so that the fixed clamping work of the workpiece 6 to be processed in different types can be met, a protective layer is arranged on the working surface, the workpiece 6 to be processed is prevented from being damaged in the clamping process, and meanwhile, different clamping jaws 28 can be replaced according to the type of the workpiece 6 to be processed.
In summary, in the actual use process, the workpiece 6 to be processed is mounted on the clamping jaw 28 in advance, the clamping jaw 28 pushes the guide rod 26 to slide along the sleeve 25, the elastic piece two 27 is stressed to elastically deform in the process, after mounting and clamping, the femto-second laser 3 works, the laser passes through the channel 4, when passing through the supporting piece 5, the supporting piece 5 at the corresponding position rises, the external motor works to drive the driving wheel 21 to rotate through the transmission shaft 24, the outer ring gear 22 works to change the position of the workpiece 6, the inner ring gear 23 synchronously works, the swinging angles of the side plate one 8 and the side plate two 9 are controlled, the position of the limiting block 14 in the limiting groove 13 is adjusted by controlling the elongation of the telescopic piece one 16 in the swinging process, so as to adjust the position of the supporting rod 12, so as to adjust the swinging angle of the monitoring head 19, meanwhile, the limiting block 14 pushes the pumping rod 17 to slide through the magnetic pole 18, in the process, the elastic piece one 20 is stressed to elastically deform, the monitoring head 19 slides along the groove formed on the supporting rod 12, so as to adjust the monitoring range of the monitoring head 19, and the position of the monitoring head 19 is controlled, so as to monitor the processing position in a plurality of angles in real time.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (3)
1. The utility model provides a synchronous monitoring device of femtosecond laser micromachining, includes chassis and femtosecond laser, its characterized in that still includes:
the top plate is arranged in parallel with the bottom plate, the top plate is connected with the bottom plate through a supporting piece, and a channel is arranged between the bottom plate and the top plate so as to facilitate laser processing of a workpiece to be processed;
the adjusting component is arranged at the top end of the top disc, the adjusting component is hinged with the gear transmission component arranged at one end of the adjusting component, the end of the adjusting component is provided with a monitoring head, and the swinging angle of the monitoring head is adjusted under the driving of the gear transmission component;
the adjusting component comprises a fixed column rotatably arranged on the top disc, a first side plate and a second side plate which are arranged on the side surfaces of the fixed column, a sliding block which is slidably arranged on the first side plate and the second side plate, and a supporting rod which is arranged on the side surfaces of the sliding block;
the side plates I and II are provided with sliding grooves for the sliding blocks to slide;
a hanging rod is arranged on the side face of the fixed column, a first telescopic piece is hinged to the hanging rod, a limiting block is arranged at the free end of the first telescopic piece, and the limiting block is in sliding connection with a limiting groove formed in the supporting rod;
the stretching assembly is arranged at the tail end of the adjusting assembly and used for adjusting the position of the monitoring head at the tail end of the adjusting assembly;
the stretching assembly comprises a drawing rod which is slidably arranged on the supporting rod, a magnetic pole which is arranged at one end of the drawing rod and matched with the limiting block, and an elastic piece I which is arranged at the other end of the drawing rod;
a second magnetic pole which is magnetically repulsed with the magnetic pole is arranged in the limiting block;
the monitoring head is arranged on the drawing rod and is in sliding connection with a groove formed in the tail end of the supporting rod;
the gear transmission assembly is arranged at one end of the adjusting assembly, and clamping assemblies are uniformly arranged on the gear transmission assembly and used for controlling the working process of the adjusting assembly while adjusting a workpiece to be processed;
the gear transmission assembly comprises an annular gear arranged at the free ends of the first side plate and the second side plate, a driving wheel meshed with the annular gear, and an outer annular gear meshed with the driving wheel;
the outer gear ring and the workpiece to be machined are coaxially arranged;
the clamping assembly comprises a sleeve which is distributed in the outer gear ring at equal angles, a guide rod which is connected with the sleeve in a sliding manner, and a clamping jaw which is arranged at one end of the guide rod;
the guide rod is sleeved with a second elastic piece, and two ends of the second elastic piece are respectively connected with the sleeve and the clamping jaw.
2. The synchronous monitoring device for femtosecond laser micromachining according to claim 1, wherein the driving wheel is in driving connection with an external motor through a driving shaft.
3. The synchronous monitoring device for femtosecond laser micromachining according to claim 1, wherein a protective layer is provided on a working surface of the jaw, the protective layer being made of a rubber material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111294523.8A CN114178680B (en) | 2021-11-03 | 2021-11-03 | Synchronous monitoring device for femtosecond laser micromachining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111294523.8A CN114178680B (en) | 2021-11-03 | 2021-11-03 | Synchronous monitoring device for femtosecond laser micromachining |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114178680A CN114178680A (en) | 2022-03-15 |
| CN114178680B true CN114178680B (en) | 2024-01-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111294523.8A Active CN114178680B (en) | 2021-11-03 | 2021-11-03 | Synchronous monitoring device for femtosecond laser micromachining |
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| Country | Link |
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| CN (1) | CN114178680B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030075246A (en) * | 2002-03-18 | 2003-09-26 | (주) 포코 | A precision processing tool and method by use of femtosecond laser |
| KR20090084136A (en) * | 2008-01-31 | 2009-08-05 | 광주과학기술원 | Laser apparatus of monitoring processing status by using optical coherence tomography |
| CN103317228A (en) * | 2013-07-09 | 2013-09-25 | 北京工业大学 | Simultaneous monitoring device for femtosecond laser micromachining |
| CN205764469U (en) * | 2016-05-31 | 2016-12-07 | 温州大学 | A kind of device that on-line monitoring device is installed on laser Machining head |
| CN206114129U (en) * | 2016-09-23 | 2017-04-19 | 安徽鲲鹏装备模具制造有限公司 | Thermoscope installation mechanism convenient to thermoscope is clean |
| DE102016215050A1 (en) * | 2016-08-12 | 2018-02-15 | Trumpf Laser- Und Systemtechnik Gmbh | Method for observing and / or monitoring a laser processing process and observation device |
| CN107953027A (en) * | 2018-01-15 | 2018-04-24 | 哈尔滨工业大学 | A kind of femtosecond of pulse combined-nanosecond laser system of processing and processing method |
| CN111992871A (en) * | 2019-11-08 | 2020-11-27 | 济南金威刻科技发展有限公司 | Synchronous monitoring device for femtosecond laser micromachining |
| CN212156309U (en) * | 2020-01-19 | 2020-12-15 | 张楠松 | Course teaching device for computer science department |
| CN214236736U (en) * | 2020-12-04 | 2021-09-21 | 西安莱克斯光电科技有限公司 | Laser equipment key part operating condition remote monitoring device |
-
2021
- 2021-11-03 CN CN202111294523.8A patent/CN114178680B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030075246A (en) * | 2002-03-18 | 2003-09-26 | (주) 포코 | A precision processing tool and method by use of femtosecond laser |
| KR20090084136A (en) * | 2008-01-31 | 2009-08-05 | 광주과학기술원 | Laser apparatus of monitoring processing status by using optical coherence tomography |
| CN103317228A (en) * | 2013-07-09 | 2013-09-25 | 北京工业大学 | Simultaneous monitoring device for femtosecond laser micromachining |
| CN205764469U (en) * | 2016-05-31 | 2016-12-07 | 温州大学 | A kind of device that on-line monitoring device is installed on laser Machining head |
| DE102016215050A1 (en) * | 2016-08-12 | 2018-02-15 | Trumpf Laser- Und Systemtechnik Gmbh | Method for observing and / or monitoring a laser processing process and observation device |
| CN206114129U (en) * | 2016-09-23 | 2017-04-19 | 安徽鲲鹏装备模具制造有限公司 | Thermoscope installation mechanism convenient to thermoscope is clean |
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| CN212156309U (en) * | 2020-01-19 | 2020-12-15 | 张楠松 | Course teaching device for computer science department |
| CN214236736U (en) * | 2020-12-04 | 2021-09-21 | 西安莱克斯光电科技有限公司 | Laser equipment key part operating condition remote monitoring device |
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| CN114178680A (en) | 2022-03-15 |
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