CN114178680A - Synchronous monitoring device for femtosecond laser micromachining - Google Patents
Synchronous monitoring device for femtosecond laser micromachining Download PDFInfo
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- CN114178680A CN114178680A CN202111294523.8A CN202111294523A CN114178680A CN 114178680 A CN114178680 A CN 114178680A CN 202111294523 A CN202111294523 A CN 202111294523A CN 114178680 A CN114178680 A CN 114178680A
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- assembly
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- femtosecond laser
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- 238000012806 monitoring device Methods 0.000 title claims abstract description 23
- 238000005459 micromachining Methods 0.000 title claims abstract description 22
- 230000001360 synchronised effect Effects 0.000 title claims abstract description 21
- 238000012544 monitoring process Methods 0.000 claims abstract description 32
- 230000005540 biological transmission Effects 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000000725 suspension Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 230000002940 repellent Effects 0.000 claims description 2
- 239000005871 repellent Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000005489 elastic deformation Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention is suitable for the technical field of femtosecond laser micromachining, and provides a synchronous monitoring device for femtosecond laser micromachining, which comprises a base plate, a top plate, a femtosecond laser, an adjusting component, a stretching component and a gear transmission component, wherein the top plate and the base plate are arranged in parallel and are connected with the base plate through a supporting piece; the adjusting component is hinged with the gear transmission component, the tail end of the adjusting component is provided with a monitoring head, and the swinging angle of the monitoring head is adjusted under the driving of the gear transmission component; the stretching component is arranged at the tail end of the adjusting component; the gear transmission assembly is arranged at one end of the adjusting assembly, and a clamping assembly is arranged on the gear transmission assembly and used for adjusting the workpiece to be machined and controlling the working process of the adjusting assembly; this monitoring devices is at the in-process that uses, can treat the course of working of machined part to the laser that femto second laser instrument sent and carry out real-time supervision, drives the adjusting part work through setting up gear drive subassembly, and the position of control monitoring head carries out the omnidirectional real-time supervision of multi-angle to the processing position.
Description
Technical Field
The invention belongs to the technical field of femtosecond laser micromachining, and particularly relates to a synchronous monitoring device for femtosecond laser micromachining.
Background
Femtosecond is a measurement unit for calibrating the time, femtosecond laser is a technical means which can obtain the shortest pulse and realize commercial application under the laboratory condition at present, and the femtosecond laser has the advantages of high energy concentration, small heat affected zone, no splashing, no slag, no special gas environment, no subsequent process, high processing precision and the like, so great progress is made in the aspects of microstructure processing application and fine processing.
Need carry out real-time supervision to the course of working carrying out femto second laser beam machining in-process, traditional monitoring devices carry out single-point monitoring mostly, are not convenient for adjust when the processing position changes, lead to the scope of monitoring limited.
Disclosure of Invention
The embodiment of the invention aims to provide a synchronous monitoring device for femtosecond laser micromachining, and aims to solve the technical problems of small monitoring range and incomplete coverage in the femtosecond laser micromachining process.
The embodiment of the invention is realized in such a way that the synchronous monitoring device for femtosecond laser micromachining comprises a chassis and a femtosecond laser, and also comprises:
the top disc is arranged in parallel with the base disc, the top disc is connected with the base disc through a supporting piece, and a channel is arranged between the base disc and the top disc so as to facilitate the processing of a workpiece to be processed by laser;
the adjusting assembly is arranged at the top end of the top disc and is hinged with a gear transmission assembly arranged at one end of the adjusting assembly, a monitoring head is arranged at the tail end of the adjusting assembly, and the swinging angle of the monitoring head is adjusted under the driving of the gear transmission assembly;
the stretching assembly is arranged at the tail end of the adjusting assembly and used for adjusting the position of the monitoring head at the tail end of the adjusting assembly;
the gear transmission assembly is installed at one end of the adjusting assembly, and the gear transmission assembly is evenly provided with the clamping assembly and used for adjusting the workpiece to be machined and controlling the working process of the adjusting assembly.
Preferably, the adjusting assembly comprises a fixed column rotatably mounted on the top disc, a first side plate and a second side plate which are distributed on the side surface of the fixed column, a sliding block slidably mounted on the first side plate and the second side plate, and a supporting rod arranged on the side surface of the sliding block;
the first side plate and the second side plate are provided with sliding grooves for the sliding of the sliding blocks;
the suspension rod is installed on the side face of the fixed column, the first telescopic piece is hinged to the suspension rod, the free end of the first telescopic piece is provided with a limiting block, and the limiting block is connected with a limiting groove formed in the supporting rod in a sliding mode.
Preferably, the stretching assembly comprises a drawing rod which is slidably mounted on the support rod, a magnetic pole which is mounted at one end of the drawing rod and matched with the limiting block, and a first elastic part which is mounted at the other end of the drawing rod;
a second magnetic pole which is magnetically repellent with the magnetic pole is arranged in the limiting block;
the monitoring head is arranged on the pull rod and is in sliding connection with a groove formed at the tail end of the support rod.
Preferably, the gear transmission assembly comprises inner gear rings arranged at free ends of the first side plate and the second side plate, a driving wheel meshed with the inner gear rings, and an outer gear ring meshed with the driving wheel;
the outer gear ring and the workpiece to be machined are coaxially arranged.
Preferably, the driving wheel is in transmission connection with an external motor through a transmission shaft.
Preferably, the clamping assembly comprises a sleeve which is distributed in the outer gear ring at an equal angle, a guide rod which is connected with the sleeve in a sliding manner, and a clamping jaw which is arranged at one end of the guide rod;
an elastic part II is sleeved on the guide rod, and two ends of the elastic part II are connected with the sleeve and the clamping jaw respectively.
Preferably, a protective layer is arranged on the working surface of the clamping jaw and made of a rubber material.
According to the synchronous monitoring device for femtosecond laser micromachining provided by the embodiment of the invention, in the using process, the processing process of a workpiece to be machined by laser emitted by a femtosecond laser can be monitored in real time, and the gear transmission assembly is arranged to drive the adjusting assembly to work, so that the position of the monitoring head is controlled, and the processing position is monitored in real time in a multi-angle and all-around manner.
Drawings
Fig. 1 is a schematic structural diagram of a femtosecond laser micromachining synchronous monitoring device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an adjusting component in a femtosecond laser micro-machining synchronous monitoring device according to an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a tensile assembly in a femtosecond laser micromachining synchronous monitoring device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a gear transmission assembly in a femtosecond laser micro-machining synchronous monitoring device provided by the embodiment of the invention;
FIG. 5 is an enlarged view of a portion A of FIG. 1;
fig. 6 is a perspective view of a clamping jaw in a femtosecond laser micro-machining synchronous monitoring device according to an embodiment of the invention.
In the drawings: 1. a chassis; 2. a top tray; 3. a femtosecond laser; 4. a channel; 5. a support member; 6. a workpiece to be processed; 7. fixing a column; 8. a first side plate; 9. a second side plate; 10. a chute; 11. a slider; 12. a support bar; 13. a limiting groove; 14. a limiting block; 15. a suspension rod; 16. a first telescopic part; 17. drawing a rod; 18. a magnetic pole; 19. a monitoring head; 20. a first elastic part; 21. a driving wheel; 22. an outer ring gear; 23. an inner gear ring; 24. a drive shaft; 25. a sleeve; 26. a guide bar; 27. a second elastic piece; 28. a clamping jaw; 100. an adjustment assembly; 200. a stretching assembly; 300. a clamping assembly; 400. a gear assembly.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Specific implementations of the present invention are described in detail below with reference to specific embodiments.
As shown in fig. 1 to 6, a structure diagram of a femtosecond laser micromachining synchronous monitoring device provided in an embodiment of the present invention includes a base plate 1, a top plate 2, a femtosecond laser 3, an adjusting assembly 100, a stretching assembly 200, and a gear transmission assembly 400, where the top plate 2 is arranged in parallel with the base plate 1 and is connected to the base plate 1 through a supporting member 5, and a channel 4 is provided between the base plate 1 and the top plate 2 to facilitate laser machining of a workpiece 6 to be machined; the adjusting component 100 is arranged at the top end of the top disc 2, the adjusting component 100 is hinged with a gear transmission component 400 arranged at one end of the adjusting component 100, the tail end of the adjusting component 100 is provided with a monitoring head 19, and the swinging angle of the monitoring head 19 is adjusted under the driving of the gear transmission component 400; the stretching assembly 200 is arranged at the tail end of the adjusting assembly 100 and is used for adjusting the position of the monitoring head 19 at the tail end of the adjusting assembly 100; the gear transmission assembly 400 is installed at one end of the adjusting assembly 100, and the gear transmission assembly 400 is uniformly provided with the clamping assemblies 300 for controlling the working process of the adjusting assembly 100 while adjusting the workpiece 6 to be processed.
In the specific in-process of implementing of this embodiment, this monitoring devices is the in-process that uses, can treat the course of working of machined part 6 to the laser that femtosecond laser 3 sent and carry out real-time supervision, drives the work of adjusting part 100 through setting up gear drive subassembly 400, and the position of control monitoring head 19 carries out the omnidirectional real-time supervision of multi-angle to the processing position.
In an example of the present invention, the number of the monitoring heads 19 in the present application is adjusted according to the monitoring requirement, the position of the workpiece 6 to be processed is fixed by the clamping assembly 300 during operation, the femtosecond laser 3 operates, and when the processing position needs to be adjusted, the external motor operates to drive the gear transmission assembly 400 to operate, change the position of the workpiece 6 to be processed, and simultaneously adjust the inclination angle of the adjusting assembly 100, thereby driving the adjusting assembly 100 to operate, and adjusting the position of the monitoring heads 19 by matching with the stretching assembly 200.
As shown in fig. 1 and 2, as a preferred embodiment of the present invention, the adjusting assembly 100 includes a fixed column 7 rotatably mounted on the top plate 2, a first side plate 8 and a second side plate 9 disposed on the lateral sides of the fixed column 7, a sliding block 11 slidably mounted on the first side plate 8 and the second side plate 9, and a support rod 12 disposed on the lateral side of the sliding block 11;
the first side plate 8 and the second side plate 9 are provided with sliding grooves 10 for the sliding of the sliding blocks 11;
a hanging rod 15 is installed on the side face of the fixed column 7, a first telescopic piece 16 is hinged to the hanging rod 15, a limiting block 14 is installed at the free end of the first telescopic piece 16, and the limiting block 14 is in sliding connection with a limiting groove 13 formed in the supporting rod 12.
In the specific implementation process of this embodiment, this application can install pushing equipment in spout 10 as necessary, like linear drive equipment such as cylinder, electric telescopic handle, promote slider 11 and slide along spout 10, when curb plate one 8 and curb plate two 9 along with the swing of gear drive subassembly 400, adjust the position of stopper 14 in spacing groove 13 through the extension of control extensible member one 16 in the wobbling process, and then the position of adjustment bracing piece 12 to the swing angle of adjustment monitoring head 19.
As shown in fig. 3, as another preferred embodiment of the present invention, the stretching assembly 200 includes a pulling rod 17 slidably mounted on the supporting rod 12, a magnetic pole 18 mounted at one end of the pulling rod 17 and cooperating with the stopper 14, and a first elastic member 20 mounted at the other end of the pulling rod 17;
a second magnetic pole magnetically repulsive to the magnetic pole 18 is arranged in the limiting block 14;
the monitoring head 19 is arranged on the drawing rod 17 and is connected with a groove arranged at the tail end of the supporting rod 12 in a sliding way.
In the specific implementation process of this embodiment, the elastic component can select the spring when using, and when stopper 14 slided along spacing groove 13, stopper 14 passed through magnetic pole 18 and promoted the pole 17 and slide, and in this process, elastic component 20 atress takes place elastic deformation, and simultaneously, monitoring head 19 slides along the groove of seting up on bracing piece 12 to the scope of monitoring head 19 of adjustment.
As shown in fig. 1 and 4, as another preferred embodiment of the present invention, the gear assembly 400 includes an inner gear 23 mounted at the free ends of the first side plate 8 and the second side plate 9, a driving wheel 21 engaged with the inner gear 23, and an outer gear 22 engaged with the driving wheel 21;
the driving wheel 21 is in transmission connection with an external motor through a transmission shaft 24.
In the specific implementation process of this embodiment, in this application, the change of displacement can be realized to drive wheel 21 under the effect of external lifting equipment like electric telescopic handle, the adjustment and the cooperation of outer ring gear 22 and ring gear 23 also can work alone in coordination, external motor work drives drive wheel 21 through transmission shaft 24 and rotates, outer ring gear 22 work, changes the position of treating machined part 6, and ring gear 23 synchronous working controls the swing angle of adjusting part 100.
As shown in fig. 5 and 6, as another preferred embodiment of the present invention, the clamping assembly 300 includes a sleeve 25 disposed at an equal angle inside the outer gear 22, a guide rod 26 slidably connected to the sleeve 25, and a clamping jaw 28 mounted at one end of the guide rod 26;
an elastic member II 27 is sleeved on the guide rod 26, and two ends of the elastic member II 27 are respectively connected with the sleeve 25 and the clamping jaw 28;
the working surface of the clamping jaw 28 is provided with a protective layer made of rubber material.
In the specific implementation process of this embodiment, the number that the centre gripping subassembly 300 set up in this application is adjusted according to the type of treating machined part 6, guarantees to satisfy the fixed centre gripping work that the machined part 6 was treated to the different grade type to set up the inoxidizing coating at the working face, avoid treating machined part 6 at the in-process damage of centre gripping, can also change different clamping jaws 28 according to the type of treating machined part 6 simultaneously.
To sum up, in the actual use process, the workpiece 6 to be machined is mounted on the clamping jaw 28 in advance, the clamping jaw 28 pushes the guide rod 26 to slide along the sleeve 25, the elastic member two 27 is stressed to generate elastic deformation in the process, after the installation and clamping, the femtosecond laser 3 works, the laser passes through the channel 4, when passing through the support member 5, the support member 5 at the corresponding position rises, the external motor works to drive the driving wheel 21 to rotate through the transmission shaft 24, the external gear ring 22 works to change the position of the workpiece 6 to be machined, the internal gear ring 23 works synchronously to control the swing angles of the side plates one 8 and two 9, the position of the limit block 14 in the limit groove 13 is adjusted by controlling the elongation of the telescopic member one 16 in the swing process, and then the position of the support rod 12 is adjusted, so as to adjust the swing angle of the monitoring head 19, and meanwhile, the limit block 14 pushes the drawing rod 17 to slide through the magnetic pole 18, in the process, the elastic part I20 is stressed to generate elastic deformation, and the monitoring head 19 slides along the groove formed in the supporting rod 12, so that the monitoring range of the monitoring head 19 can be adjusted conveniently, and the position of the monitoring head 19 is controlled, so that the machining position can be monitored in real time in a multi-angle and all-directional mode.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. The utility model provides a synchronous monitoring devices of femto second laser micro-processing, includes chassis and femto second laser instrument, its characterized in that still includes:
the top disc is arranged in parallel with the base disc, the top disc is connected with the base disc through a supporting piece, and a channel is arranged between the base disc and the top disc so as to facilitate the processing of a workpiece to be processed by laser;
the adjusting assembly is arranged at the top end of the top disc and is hinged with a gear transmission assembly arranged at one end of the adjusting assembly, a monitoring head is arranged at the tail end of the adjusting assembly, and the swinging angle of the monitoring head is adjusted under the driving of the gear transmission assembly;
the stretching assembly is arranged at the tail end of the adjusting assembly and used for adjusting the position of the monitoring head at the tail end of the adjusting assembly;
the gear transmission assembly is installed at one end of the adjusting assembly, and the gear transmission assembly is evenly provided with the clamping assembly and used for adjusting the workpiece to be machined and controlling the working process of the adjusting assembly.
2. The femtosecond laser micromachining synchronous monitoring device according to claim 1, wherein the adjusting component comprises a fixed column rotatably mounted on the top disc, a first side plate and a second side plate arranged on the side surfaces of the fixed column, a sliding block slidably mounted on the first side plate and the second side plate, and a supporting rod arranged on the side surface of the sliding block;
the first side plate and the second side plate are provided with sliding grooves for the sliding of the sliding blocks;
the suspension rod is installed on the side face of the fixed column, the first telescopic piece is hinged to the suspension rod, the free end of the first telescopic piece is provided with a limiting block, and the limiting block is connected with a limiting groove formed in the supporting rod in a sliding mode.
3. The femtosecond laser micro-machining synchronous monitoring device according to claim 2, wherein the stretching assembly comprises a drawing rod which is slidably arranged on the supporting rod, a magnetic pole which is arranged at one end of the drawing rod and matched with the limiting block, and a first elastic part which is arranged at the other end of the drawing rod;
a second magnetic pole which is magnetically repellent with the magnetic pole is arranged in the limiting block;
the monitoring head is arranged on the pull rod and is in sliding connection with a groove formed at the tail end of the support rod.
4. The femtosecond laser micro-machining synchronous monitoring device according to claim 2, wherein the gear transmission component comprises inner gear rings arranged at the free ends of the first side plate and the second side plate, driving wheels meshed with the inner gear rings, and outer gear rings meshed with the driving wheels;
the outer gear ring and the workpiece to be machined are coaxially arranged.
5. The femtosecond laser micromachining synchronous monitoring device according to claim 4, wherein the driving wheel is in transmission connection with an external motor through a transmission shaft.
6. The femtosecond laser micro-machining synchronous monitoring device according to claim 4, wherein the clamping assembly comprises a sleeve which is distributed in the outer gear ring at equal angles, a guide rod which is connected with the sleeve in a sliding way, and a clamping jaw which is arranged at one end of the guide rod;
an elastic part II is sleeved on the guide rod, and two ends of the elastic part II are connected with the sleeve and the clamping jaw respectively.
7. The femtosecond laser micro-machining synchronous monitoring device according to claim 6, wherein a protective layer is arranged on the working surface of the clamping jaw and made of rubber material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111294523.8A CN114178680B (en) | 2021-11-03 | 2021-11-03 | Synchronous monitoring device for femtosecond laser micromachining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111294523.8A CN114178680B (en) | 2021-11-03 | 2021-11-03 | Synchronous monitoring device for femtosecond laser micromachining |
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| Publication Number | Publication Date |
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| CN114178680A true CN114178680A (en) | 2022-03-15 |
| CN114178680B CN114178680B (en) | 2024-01-26 |
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| CN205764469U (en) * | 2016-05-31 | 2016-12-07 | 温州大学 | A kind of device that on-line monitoring device is installed on laser Machining head |
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| CN111992871A (en) * | 2019-11-08 | 2020-11-27 | 济南金威刻科技发展有限公司 | Synchronous monitoring device for femtosecond laser micromachining |
| CN212156309U (en) * | 2020-01-19 | 2020-12-15 | 张楠松 | Course teaching device for computer science department |
| CN214236736U (en) * | 2020-12-04 | 2021-09-21 | 西安莱克斯光电科技有限公司 | Laser equipment key part operating condition remote monitoring device |
-
2021
- 2021-11-03 CN CN202111294523.8A patent/CN114178680B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030075246A (en) * | 2002-03-18 | 2003-09-26 | (주) 포코 | A precision processing tool and method by use of femtosecond laser |
| KR20090084136A (en) * | 2008-01-31 | 2009-08-05 | 광주과학기술원 | Laser apparatus of monitoring processing status by using optical coherence tomography |
| CN103317228A (en) * | 2013-07-09 | 2013-09-25 | 北京工业大学 | Simultaneous monitoring device for femtosecond laser micromachining |
| CN205764469U (en) * | 2016-05-31 | 2016-12-07 | 温州大学 | A kind of device that on-line monitoring device is installed on laser Machining head |
| DE102016215050A1 (en) * | 2016-08-12 | 2018-02-15 | Trumpf Laser- Und Systemtechnik Gmbh | Method for observing and / or monitoring a laser processing process and observation device |
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| CN114178680B (en) | 2024-01-26 |
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