CN114150253A - Erosion-resistant thermal barrier coating and preparation method and application thereof - Google Patents

Erosion-resistant thermal barrier coating and preparation method and application thereof Download PDF

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Publication number
CN114150253A
CN114150253A CN202111528877.4A CN202111528877A CN114150253A CN 114150253 A CN114150253 A CN 114150253A CN 202111528877 A CN202111528877 A CN 202111528877A CN 114150253 A CN114150253 A CN 114150253A
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thermal barrier
barrier coating
bonding layer
metal bonding
erosion
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肖逸奇
彭小敏
魏克湘
黄中华
朱旺
关汗青
刘志伟
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Hunan Institute of Engineering
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Hunan Institute of Engineering
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    • C23C4/134Plasma spraying
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades

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Abstract

The invention discloses an erosion-resistant thermal barrier coating and a preparation method and application thereof. The thermal barrier coating comprises a metal bonding layer and a ceramic heat insulation layer, wherein the metal bonding layer is deposited on the surface of a base body, and the ceramic heat insulation layer is deposited on the surface of one side, away from the base body, of the metal bonding layer; the ceramic heat insulation layer is divided into three areas, namely a root area, a top area and a middle area, along the thickness direction, columnar crystals in the root area grow perpendicular to the interface, and the columnar crystals in the middle area or/and the top area do not grow perpendicular to the interface, so that a bent columnar crystal structure is formed. The specific microstructure improves the erosion resistance of the coating, is applied to a thermal barrier coating of an aeroengine, and can obviously prolong the service life of the aeroengine.

Description

Erosion-resistant thermal barrier coating and preparation method and application thereof
Technical Field
The invention relates to the technical field of thermal barrier coatings, in particular to an erosion-resistant thermal barrier coating and a preparation method and application thereof.
Background
At present, the physical vapor deposition (including electron beam physical vapor deposition EB-PVD and plasma spraying physical vapor deposition PS-PVD) technology has the advantages of easy and accurate control of chemical components of a coating, capability of obtaining a columnar crystal structure, high required volume limit, high bonding strength of the coating and a substrate and the like, and is widely applied to preparation of high-temperature protective coatings of hot end components of aero-engines and gas turbines, the prepared thermal barrier coating obviously improves the high-temperature oxidation resistance, corrosion resistance and high-temperature resistance of the hot end components, and the service life of the engine is prolonged.
However, the working environment of the hot-end component is extremely severe, especially the turbine blade, which rotates at high speed and simultaneously bears the high-speed scouring of high-temperature and high-pressure airflow, and sand dust particles, carbon black particles and metal debris are inevitably present in the airflow, so that the thermal barrier coating deposited on the surface of the turbine blade is seriously eroded and damaged. If the erosion resistance of the coating is poor, the coating is eroded and thinned after service and even completely peeled off, thereby causing the failure of the coating and the turbine blade.
FIG. 1 reveals the failure mechanism of a thermal barrier coating 14 possessing a columnar grain structure 16 deposited on a substrate 10 and a bond coat 12 upon impact of solid particles 20. The thermal barrier coating illustrated has a conventional vertical columnar grain structure such that there are gaps 18 between the columnar grains, and the interface 26 is located between the thermal barrier coating 14 and the bond coat 12, and typically there is also a very thin layer of aluminum oxide (not shown in FIG. 1) between the thermal barrier coating 14 and the bond coat 12. A stress wave 22 generated by solid particles 20 striking the coating surface will propagate down the columnar grains and be reflected to generate an echo 24 after reaching an interface 26. The propagation of stress waves results in compressive stresses in the columnar grains near the impact region and tensile stresses in the columnar grains relatively far from the impact region. When significant tensile stresses propagate to the interface 26, they can cause the thermal barrier coating 14 to spall directly from the interface and the coating fails.
If the deposition process of the thermal barrier coating is adjusted to prepare the thermal barrier coating with the bent columnar crystal structure, stress waves generated by particle impact are more difficult to propagate to the interface or are more seriously attenuated when the stress waves propagate to the interface, so that the tensile stress generated when the stress waves propagate to the interface is smaller, and finally the probability that the thermal barrier coating is directly stripped from the interface is smaller, thereby improving the erosion resistance of the thermal barrier coating.
Disclosure of Invention
The invention aims to provide an erosion-resistant thermal barrier coating, a preparation method and application thereof, wherein the thermal barrier coating is prepared by a specific physical vapor deposition method, has a curved columnar crystal structure, and can remarkably improve the erosion resistance of the coating to solid particles without changing other properties; the preparation method has the advantages of simple process, strong applicability, good repeatability and easy operation; the obtained thermal barrier coating can be used as a thermal insulation protective coating to be applied to an aeroengine.
The technical scheme of the invention is as follows:
an erosion-resistant thermal barrier coating comprises a metal bonding layer and a ceramic thermal insulation layer, wherein the metal bonding layer is deposited on the surface of a base body, and the ceramic thermal insulation layer is deposited on the surface of one side, away from the base body, of the metal bonding layer; the ceramic heat insulation layer is divided into three areas along the thickness direction, namely a root area close to the bonding layer, a top area close to the surface and the rest middle area, wherein columnar crystals in the root area grow perpendicular to the interface, and the columnar crystals in the middle area or/and the top area do not grow perpendicular to the interface, namely a bent columnar crystal structure is formed. Therefore, the continuity of the whole columnar crystal is ensured, and the tensile stress generated when the stress wave is propagated to the vicinity of the interface can be reduced. Thus, the thermal barrier coating with the special microstructure has lower probability of generating cracks in the root area when being subjected to particle impact, thereby improving the erosion resistance of the thermal barrier coating.
The preparation method of the erosion-resistant thermal barrier coating comprises the steps of depositing a metal bonding layer on the surface of a base body, and depositing a ceramic thermal insulation layer on the surface of one side, away from the base body, of the metal bonding layer, wherein the deposition is prepared by adopting a physical vapor deposition method and is realized by continuously rotating or positively and negatively rotating a blade and simultaneously swinging a rotating shaft of the blade during deposition.
Preferably, the axis of rotation of the blade is perpendicular to the streamlines of the vapor flow from the central source when depositing the columnar crystal root region; the rotation axis of the blade is oscillated back and forth relative to the steam streamline as the columnar crystal middle and top regions are deposited.
In an alternative embodiment, the composition of the ceramic thermal barrier layer comprises a composition comprising 6 to 8 wt% of Y2O3Stabilized ZrO2Abbreviated as YSZ.
Preferably, the thickness of the ceramic heat-insulating layer is 100-400 μm, preferably 150-300 μm.
In an alternative embodiment, the composition of the metallic bond layer comprises PtAl or MCrAlYX; wherein M in MCrAlYX is Ni and/or Co; x in the MCrAlYX is a trace additive element, and Y is yttrium element.
Preferably, the trace additive element includes at least one of Ta, Si, and Hf.
Preferably, the thickness of the metal adhesive layer is 40 to 150 μm, preferably 60 to 120 μm.
In alternative embodiments, the metal bonding layer is prepared by atmospheric plasma spraying, arc ion plating deposition or pack cementation.
Preferably, the ceramic thermal insulation layer is prepared by plasma spraying-physical vapor deposition or electron beam physical vapor deposition.
In an alternative embodiment, the substrate is ground prior to depositing the metal bond layer, followed by ultrasonic cleaning.
Preferably, the metal bonding layer is polished and then ultrasonically cleaned before the ceramic thermal insulation layer is deposited.
Preferably, the grinding mesh number of the base body and the metal bonding layer is 80-1000 meshes.
The erosion-resistant thermal barrier coating can be applied to an aeroengine as a thermal insulation protective coating.
The invention has the following beneficial effects:
the thermal barrier coating has high solid particle erosion resistance, and the preparation method has the advantages of simple process, strong applicability, good repeatability and easy operation. The thermal barrier coating can be used as a thermal barrier coating of an aeroengine, and the service life of the aeroengine can be obviously prolonged.
Drawings
FIG. 1 is a diagram of an erosion mechanism for a vertical columnar crystalline thermal barrier coating.
Fig. 2 and 3 are diagrams of exemplary erosion resistant thermal barrier coatings of the present invention having an improved microstructure.
FIG. 4 is a scanning electron microscope image of a cross section of a conventional vertical columnar crystal thermal barrier coating after being impacted by particles.
FIGS. 5 and 6 are sectional scanning electron micrographs of thermal barrier coatings prepared in examples 1 and 5, respectively, after being impacted by particles.
FIG. 7 is a schematic diagram of a physical vapor deposition process for a thermal barrier coating according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but the present invention is not limited thereto.
A typical erosion resistant thermal barrier coating with an improved microstructure of the present invention is shown in fig. 2 and 3. The erosion-resistant thermal barrier coating comprises a metal bonding layer and a ceramic heat insulation layer; the metal bonding layer is used for being deposited on the surface of the base body, and the ceramic heat insulation layer is deposited on the surface of one side, away from the base body, of the metal bonding layer; the ceramic heat insulation layer is divided into a root area close to the bonding layer, a top area close to the surface and the rest middle area along the thickness direction; the columnar crystal in the root area grows perpendicular to the interface, and the columnar crystal in the middle area or/and the top area does not grow perpendicular to the interface, namely bending occurs, so that the continuity of the whole columnar crystal is ensured, and the tensile stress generated when the stress wave is spread to the vicinity of the interface can be reduced. Thus, when the thermal barrier coating with the special microstructure is impacted by particles, the probability of generating cracks in the root area is lower, and the erosion resistance of the thermal barrier coating is improved.
The above-described microstructure of the thermal barrier coating can be prepared by line-of-sight vapor deposition techniques, i.e., by continuously rotating or counter-rotating the blades while oscillating the rotating shaft of the blades during deposition. Preferably, the axis of rotation of the blade is perpendicular to the streamlines of the vapor flow from the central source when depositing the columnar crystal root region; the rotation axis of the blade is oscillated back and forth relative to the steam streamline as the columnar crystal middle and top regions are deposited.
In an alternative embodiment, the composition of the ceramic thermal barrier layer comprises YSZ (containing 6-8 wt% Y)2O3Stabilized ZrO2)。
Preferably, the thickness of the ceramic heat-insulating layer is 100-400 μm, preferably 150-300 μm;
in an alternative embodiment, the composition of the metallic bond layer comprises PtAl or MCrAlYX; wherein M in MCrAlYX is Ni and/or Co; x in MCrAlYX is a trace additive element;
preferably, the trace additive element includes at least one of Ta, Si, and Hf.
Preferably, the thickness of the metal adhesive layer is 40 to 150 μm, preferably 60 to 120 μm.
In a second aspect, the invention provides a preparation method of the thermal barrier coating, wherein a metal bonding layer is deposited on the surface of a substrate, and a ceramic thermal insulation layer is deposited on the surface of one side, far away from the substrate, of the metal bonding layer, the ceramic thermal insulation layer has a columnar crystal structure, the columnar crystal structure can be divided into three areas, namely a root area, a middle area and a top area, in the thickness direction, the columnar crystal in the root area grows perpendicular to the surface of the metal bonding layer, and the columnar crystal in at least one area of the middle area and the top area does not grow perpendicular to the surface of the metal bonding layer.
The erosion resistant thermal barrier coating is prepared by a physical vapor deposition method to obtain the above microstructure as shown in fig. 7, i.e., by continuously rotating the blade 60 about the rotation axis 64 or by oscillating the forward and reverse rotations while being deposited. The oscillation is a constant change in the angle between the axis of rotation 60 of the blades and the steam streamline 66 from the central source 62. Generally, various combinations of continuous rotation, forward and reverse rotation and swinging of the blade can realize preparation of the thermal barrier coating of the microstructure.
Example 1 preparation of thermal barrier coating by constant speed rotation plus rocking
Depositing a metal bonding layer on the surface of the base body, depositing a ceramic heat insulation layer on the surface of one side, far away from the base body, of the metal bonding layer, and during physical vapor deposition, rotating the blades at a constant speed and swinging back and forth, wherein the specific steps are as follows:
(1) the rotating shaft of the blade is arranged horizontally, the rotating speed is 14r/min, and the deposition lasts 120 s;
(2) enabling the rotating shaft of the blade to swing back and forth between the horizontal direction and the downward inclination of the blade tip by 40 degrees, and simultaneously maintaining the rotating speed of the blade to be 14r/min and depositing for 400 s;
(3) stopping swinging, keeping the rotating shaft horizontal, rotating at the speed of 14r/min, and depositing for 150 s;
(4) repeating the step (2);
(5) repeating the step (3);
(6) and (4) repeating the step (2).
Example 2 preparation of thermal Barrier coatings by Forward reverse rotation plus Back-and-forth Oscillating
Depositing a metal bonding layer on the surface of the base body, depositing a ceramic heat insulation layer on the surface of one side, far away from the base body, of the metal bonding layer, and during physical vapor deposition, rotating the blade forward and backward and swinging the blade back and forth, wherein the specific steps are as follows:
(1) the rotating shaft of the blade is arranged horizontally, the rotating speed is 14r/min, and the deposition lasts 120 s;
(2) enabling the rotating shaft of the blade to swing back and forth between the horizontal direction and the downward inclination of the blade tip by 40 degrees, and simultaneously maintaining the rotating speed of the blade to be 14r/min and depositing for 400 s;
(3) stopping swinging, keeping the rotating shaft horizontal, rotating the blades around the rotating shaft in a forward and reverse direction from +90 to-90 degrees at a rotating speed of 14r/min, and depositing for 150 s;
(4) repeating the step (2);
(5) repeating the step (3);
(6) repeating the step (2);
example 390 degree autorotation swing-free preparation of thermal barrier coating
Depositing a metal bonding layer on the surface of the substrate, and depositing a ceramic heat-insulating layer on the surface of one side, far away from the substrate, of the metal bonding layer, wherein during physical vapor deposition, the blades rotate by 90 degrees without swinging, and the method specifically comprises the following steps:
(1) keeping the axis of the blade horizontal without rotating, and depositing for 50 s;
(2) rotating the blade around the axis by 90 degrees, keeping the blade still, and depositing for 50 s;
(3) and (4) continuously repeating the step (2).
Example 4 preparation of thermal Barrier coatings with constant speed rotation plus Up-Down deflection
Depositing a metal bonding layer on the surface of the substrate, depositing a ceramic heat-insulating layer on the surface of one side, far away from the substrate, of the metal bonding layer, and rotating the blades at a constant speed and deflecting the blades up and down during physical vapor deposition, wherein the specific steps are as follows:
(1) the rotating shaft of the blade is arranged horizontally, the rotating speed is 14r/min, and the deposition lasts for 100 s;
(2) the tip of a rotating shaft of the blade is deflected downwards by 40 degrees, the rotating speed is kept at 14r/min, and 50s are deposited;
(3) enabling the blade tip of a rotating shaft of the blade to deflect 40 degrees upwards, keeping the rotating speed at 14r/min, and depositing for 50 s;
(4) repeating the step (2);
(5) repeating the step (3);
example 5 preparation of thermal Barrier coatings with timed spin plus intermittent Up and Down deflection
Depositing a metal bonding layer on the surface of the substrate, depositing a ceramic heat-insulating layer on the surface of one side, far away from the substrate, of the metal bonding layer, and rotating the blades at regular time and intermittently deflecting the blades up and down during physical vapor deposition, wherein the specific steps are as follows:
(1) the rotating shaft of the blade is arranged horizontally, the rotating speed is 14r/min, and the deposition lasts for 100 s;
(2) the tip of a rotating shaft of the blade is deflected downwards by 40 degrees, the rotating speed is kept at 14r/min, and 50s are deposited;
(3) the rotating shaft of the blade returns to the horizontal state, the rotating speed is 14r/min, and 50s of deposition is carried out;
(4) enabling the blade tip of a rotating shaft of the blade to deflect 40 degrees upwards, keeping the rotating speed at 14r/min, and depositing for 50 s;
(5) repeating the step (2);
(6) repeating the step (3);
(7) repeating the step (4);
example 6 preparation of thermal Barrier coatings with constant speed rotation and Slow Oscillating
Depositing a metal bonding layer on the surface of the base body, depositing a ceramic heat insulation layer on the surface of one side, far away from the base body, of the metal bonding layer, and during physical vapor deposition, enabling the blades to rotate at a constant speed and swing slowly, wherein the specific steps are as follows:
(1) the rotating shaft of the blade is arranged horizontally, the rotating speed is 14r/min, and the deposition lasts for 100 s;
(2) slowly deflecting the blade axis of rotation from horizontal down to 40 degrees for 30s while the blade maintains 14r/min of rotation during which coating deposition continues;
(3) keeping the downward deflection of the blade tip of a rotating shaft of the blade for 40 degrees, rotating speed of 14r/min and depositing for 100 s;
(4) slowly rotating the rotating shaft of the blade to the horizontal within 30s, and simultaneously keeping the rotation of the blade at 14r/min, wherein the deposition of the coating continues;
(5) keeping the rotating shaft of the blade in the horizontal direction, rotating at 14r/min and depositing for 100 s;
(6) slowly deflecting the blade axis of rotation from horizontal up to 40 degrees for 30s while the blade maintains 14r/min of rotation during which the coating deposition continues;
(7) keeping the upward deflection of the blade tip of the rotating shaft of the blade for 40 degrees, rotating speed of 14r/min and depositing for 100 s;
(8) slowly rotating the rotating shaft of the blade to the horizontal within 30s, and simultaneously keeping the rotation of the blade at 14r/min, wherein the deposition of the coating continues;
(9) keeping the rotating shaft of the blade in the horizontal direction, rotating at 14r/min and depositing for 100 s;
(10) and (5) repeating the steps (2) to (9).
The thermal barrier coatings prepared in the above examples all have good erosion resistance. From the above, the thermal barrier coating with good erosion resistance can be prepared by partially improving the traditional physical vapor deposition equipment of the thermal barrier coating or only improving the clamping device of the equipment. FIG. 4 is a 7YSZ thermal barrier coating prepared by a conventional physical vapor deposition process, and it can be seen that it suffers from erosion damage by cracking directly from the interface under the erosion conditions. Fig. 5 and 6 are 7YSZ thermal barrier coatings prepared by the improved pvd method introduced in the present invention, wherein the thermal barrier coating in fig. 5 is prepared by the process of example 1 and the thermal barrier coating in fig. 6 is prepared by the process of example 5. In a high-temperature erosion test (temperature 1220 ℃, particle diameter 560 μm, particle speed 10m/s), the erosion resistance of the conventional thermal barrier coating is 4.2g/μm, i.e. 4.2g of erosion particles are consumed on average when the erosion of the coating is reduced by 1 μm, and the erosion resistance of the coating in FIG. 5 under the same condition is 4.8g/μm, which is improved by 14% compared with the conventional thermal barrier coating; the erosion resistance of the coating in fig. 6 under the same conditions was 5.8g/μm, which is a 38% improvement over conventional thermal barrier coatings. Therefore, the erosion resistance of the thermal barrier coating can be obviously improved. Meanwhile, experiments also show that the thermal barrier coating provided by the invention is applied to an aeroengine, and the service life of the aeroengine can be obviously prolonged.
The present invention lists only the 6 exemplary combinations described above, and the line-of-sight electron beam physical vapor deposition method used in the schemes, it is contemplated that other physical vapor deposition methods may be suitable. In addition, some parameters in the embodiment, such as the rotating speed of the blade, the swing angle of the axis, the time length and the like are all values in an applicable interval, for example, the rotating speed is 2-20r/min, and the total deposition time length is 600-3000 s.

Claims (10)

1. The erosion-resistant thermal barrier coating is characterized by comprising a metal bonding layer and a ceramic thermal insulation layer, wherein the metal bonding layer is deposited on the surface of a base body, and the ceramic thermal insulation layer is deposited on the surface of one side, away from the base body, of the metal bonding layer; the ceramic heat insulation layer is divided into three areas along the thickness direction, namely a root area close to the bonding layer, a top area close to the surface and the rest middle area, wherein columnar crystals in the root area grow perpendicular to the interface, and the columnar crystals in the middle area or/and the top area do not grow perpendicular to the interface, namely a bent columnar crystal structure is formed.
2. The method for preparing an erosion-resistant thermal barrier coating according to claim 1, wherein a metal bonding layer is deposited on the surface of the substrate, and a ceramic thermal insulation layer is deposited on the surface of the metal bonding layer on the side away from the substrate, and the deposition is performed by a physical vapor deposition method by continuously rotating or forward and backward rotating the blades while swinging the rotating shaft of the blades during deposition.
3. The method of claim 2, wherein the axis of rotation of the blade is perpendicular to the streamlines of the steam flow from the central source when depositing the columnar grain root region; the rotation axis of the blade is oscillated back and forth relative to the steam streamline as the columnar crystal middle and top regions are deposited.
4. The method of claim 2, wherein the ceramic thermal barrier coating comprises a composition comprising 6-8 wt% Y2O3Stabilized ZrO2Abbreviated as YSZ.
5. The method for preparing an erosion-resistant thermal barrier coating according to claim 2, wherein the thickness of the ceramic thermal insulation layer is 100-400 μm; the thickness of the metal bonding layer is 40-150 mu m.
6. The method of claim 2, wherein the composition of the metallic bond coat comprises PtAl or MCrAlYX; wherein M in MCrAlYX is Ni and/or Co; x in MCrAlYX is a trace additive element.
7. The method of claim 6, wherein the minor additive elements comprise at least one of Ta, Si and Hf.
8. The method for preparing the erosion-resistant thermal barrier coating according to claim 2, wherein the metal bonding layer is prepared by an atmospheric plasma spraying method, an electric arc ion plating deposition method or an embedding infiltration method; the ceramic thermal insulation layer is prepared by adopting plasma spraying-physical vapor deposition or electron beam physical vapor deposition.
9. The method for preparing an erosion-resistant thermal barrier coating according to claim 2, wherein the substrate is ground prior to depositing the metallic bond layer, followed by ultrasonic cleaning; before the ceramic heat insulation layer is deposited, the metal bonding layer is polished and then ultrasonically cleaned.
10. Use of the erosion-resistant thermal barrier coating of claim 1 in an aircraft engine thermal barrier protective coating.
CN202111528877.4A 2021-12-14 2021-12-14 Erosion-resistant thermal barrier coating and preparation method and application thereof Pending CN114150253A (en)

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Citations (6)

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US5876860A (en) * 1997-12-09 1999-03-02 N.V. Interturbine Thermal barrier coating ceramic structure
CN102596485A (en) * 2009-11-04 2012-07-18 西门子公司 Single crystal welding of directionally solidified materials
CN105755537A (en) * 2016-04-14 2016-07-13 江西赛维Ldk太阳能高科技有限公司 Polycrystalline silicon ingot and production method thereof
CN106244977A (en) * 2016-08-30 2016-12-21 北京航空航天大学 Plasma evaporation deposits a kind of quasi-column structure heat-barrier coating ceramic layer and preparation method thereof
CN107699840A (en) * 2017-10-25 2018-02-16 河北工业大学 The preparation method of porous zirconia thermal barrier coating
CN108018522A (en) * 2017-12-08 2018-05-11 广东省新材料研究所 A kind of heat-barrier coating ceramic layer of complications column structure and preparation method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5876860A (en) * 1997-12-09 1999-03-02 N.V. Interturbine Thermal barrier coating ceramic structure
CN102596485A (en) * 2009-11-04 2012-07-18 西门子公司 Single crystal welding of directionally solidified materials
CN105755537A (en) * 2016-04-14 2016-07-13 江西赛维Ldk太阳能高科技有限公司 Polycrystalline silicon ingot and production method thereof
CN106244977A (en) * 2016-08-30 2016-12-21 北京航空航天大学 Plasma evaporation deposits a kind of quasi-column structure heat-barrier coating ceramic layer and preparation method thereof
CN107699840A (en) * 2017-10-25 2018-02-16 河北工业大学 The preparation method of porous zirconia thermal barrier coating
CN108018522A (en) * 2017-12-08 2018-05-11 广东省新材料研究所 A kind of heat-barrier coating ceramic layer of complications column structure and preparation method thereof

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