CN114141540A - Method for manufacturing uniform corrosion hole of high-voltage aluminum foil mask for aluminum electrolytic capacitor - Google Patents
Method for manufacturing uniform corrosion hole of high-voltage aluminum foil mask for aluminum electrolytic capacitor Download PDFInfo
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- CN114141540A CN114141540A CN202111497046.5A CN202111497046A CN114141540A CN 114141540 A CN114141540 A CN 114141540A CN 202111497046 A CN202111497046 A CN 202111497046A CN 114141540 A CN114141540 A CN 114141540A
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- aluminum foil
- mask
- corrosion
- aluminum
- uniform
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 103
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 103
- 239000011888 foil Substances 0.000 title claims abstract description 90
- 238000005260 corrosion Methods 0.000 title claims abstract description 44
- 230000007797 corrosion Effects 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000003990 capacitor Substances 0.000 title claims abstract description 19
- 238000001035 drying Methods 0.000 claims abstract description 38
- 230000000873 masking effect Effects 0.000 claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 239000011148 porous material Substances 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 claims abstract description 5
- 238000006056 electrooxidation reaction Methods 0.000 claims abstract description 5
- 238000004381 surface treatment Methods 0.000 claims abstract description 5
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 239000003513 alkali Substances 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000003085 diluting agent Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 4
- 238000009827 uniform distribution Methods 0.000 abstract description 4
- 238000005187 foaming Methods 0.000 abstract 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002061 nanopillar Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material
- H01G9/045—Electrodes or formation of dielectric layers thereon characterised by the material based on aluminium
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- ing And Chemical Polishing (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
The invention discloses a method for manufacturing uniform corrosion holes on a high-voltage aluminum foil mask for an aluminum electrolytic capacitor, which belongs to the technical field of manufacturing high-voltage aluminum foils for aluminum electrolytic capacitors and comprises the following specific steps: 1) carrying out surface treatment on the aluminum foil plain foil to improve the surface activity of the plain foil; 2) the pretreated aluminum foil enters a liquid masking agent groove, and the aluminum foil is pulled out of the masking agent groove under the action of transmission, so that the masking agent is attached to the surface of the aluminum foil to form a masking layer; 3) drying the aluminum foil covered with the masking agent to form a masking dry film on the surface; 4) exposing the mask dry film surface by using a preset pattern to form a uniform round hole shape; 5) exposing the uniform porous aluminum foil surface after development; 6) and (4) sending the developed aluminum foil into a corrosion tank, and forming uniformly distributed corrosion pores on the front surface and the back surface of the aluminum foil through electrochemical corrosion. The manufacturing method can effectively control the uniform distribution of the later-stage electro-corrosion foaming holes, is easy to process in a large area, and is suitable for continuous operation of a production line.
Description
Technical Field
The invention relates to the technical field of manufacturing of high-voltage aluminum foils for aluminum electrolytic capacitors, in particular to a manufacturing method for uniform corrosion hole formation of a high-voltage aluminum foil mask for an aluminum electrolytic capacitor.
Background
The traditional high-voltage corrosion foil is formed by directly adding direct current to a smooth foil for electrochemical corrosion, and a cavity is formed on the surface of an aluminum foil and vertically extends inwards, so that the surface area of the aluminum foil is increased, the high-voltage corrosion foil is used for the anode of an aluminum electrolytic capacitor, and the capacity of the capacitor is increased. However, the surface holes obtained by the method are not uniform, and holes are easily formed due to too close corrosion distance, so that the surface utilization rate is reduced. Chinese patent publication No. CN103137403A discloses a porous aluminum foil mesh for transmission microscopy and scanning microscopy analysis, which can form uniform corrosion holes on a single surface of an aluminum foil, wherein the thickness of the aluminum foil used is 10-50 μm. Chinese patent application No. 201510495250.1 discloses a method for preparing uniformly distributed nano-pillar arrays on the surface of an aluminum foil by using a mask technology, and an aluminum foil for aluminum-plastic non-adhesive composite with a single-sided surface structure of a nano-pillar array structure can be formed after acid corrosion. Although the above patent technologies can realize uniform distribution of holes on the surface of the aluminum foil, the coating method is limited to form a microstructure on only one surface, and the application field is limited, and the method is slightly insufficient in the aspect of continuous batch production.
Disclosure of Invention
The invention aims to solve the technical problems of reducing hole merging caused by irregular corrosion of the high-voltage positive electrode foil and realizing uniform distribution of corrosion holes, thereby improving the utilization rate of the aluminum foil and increasing the surface area of the electrode foil. The exposure imaging and developing technology is mainly used for the step of manufacturing circuit patterns of a circuit board in a semiconductor manufacturing process, the method is combined with the high-voltage aluminum foil manufacturing technology for the aluminum electrolytic capacitor, uniform distribution of corrosion holes can be effectively realized, and the method is used for double-sided corrosion, is easy to process in a large area and is suitable for continuous operation of a production line.
The technical scheme adopted by the invention for solving the technical problems is as follows: the method for manufacturing the high-voltage aluminum foil for the aluminum electrolytic capacitor with the mask uniformly corroded and perforated comprises the following steps:
and (1) carrying out surface treatment on the aluminum foil plain foil to remove surface oil stains and improve the surface activity of the plain foil.
And (3) putting the pretreated aluminum foil into a liquid masking agent groove, pulling the aluminum foil out of the masking agent groove under the action of transmission, and simultaneously attaching a layer of masking agent on the surface of the aluminum foil, wherein the masking agent is attached to the surface of the aluminum foil to form a masking layer.
And (4) feeding the aluminum foil covered with the masking agent in the step (3) into drying equipment, and drying to form a masking dry film on the surface.
And (4) exposing the mask dry film by using a preset pattern to enable the mask dry film surface to form a uniform round hole shape.
And (5) developing the exposed mask dry film in the step (4) by using a developer, and washing off the round hole shape on the mask dry film to expose the uniform hole-shaped aluminum foil surface.
And (6) sending the aluminum foil obtained in the step (5) into a corrosion tank, and forming uniformly distributed corrosion pores on the front and back surfaces of the aluminum foil through electrochemical corrosion by adopting direct current corrosion.
Preferably, the thickness range of the aluminum foil is 50-150 μm.
Preferably, in the step (1), the surface oil stain is removed by using a dilute sulfuric acid solution, and the concentration of the dilute sulfuric acid solution is 2-5%.
Preferably, the thickness of the mask layer in the step (2) is 1-2 μm.
Preferably, the mask agent in the step (2) is liquid acid and alkali resistant photosensitive resist ink.
Preferably, in the step (2), the viscosity of the liquid acid and alkali resistant photosensitive resist ink is 20mpa.s to 40 mpa.s; the liquid acid and alkali resistant photosensitive corrosion resistant ink is added with an organic diluent to adjust the viscosity.
Preferably, the drying device in the step (3) comprises a vertical drying device and a horizontal drying device, the vertical drying device pre-dries the aluminum foil, and the aluminum foil is pre-dried and then enters the horizontal drying device filled with nitrogen for circulation protection to dry the aluminum foil.
Preferably, the drying temperature of the vertical drying equipment is 90 ℃, and the drying time is 30 s; the drying temperature of the horizontal drying equipment is 100-200 ℃, and the drying time is 1-2 min.
Preferably, in the step (4), the exposure precision is 1 to 5 μm, and the exposure energy is 500mJ to 2000 mJ.
Preferably, the DC electric corrosion in the step (6) has a corrosion current density of 0.05A/cm2～0.5A/cm2。
Compared with the prior art, the invention has the beneficial effects that: according to the invention, the mask layer is attached to the surface of the aluminum foil, the aluminum foil attached with the mask dry film is exposed by utilizing the prefabricated dot-shaped pattern after drying, the aluminum foil with uniform dot-shaped exposure is formed, and the corrosion hair holes are formed on the front surface and the back surface of the aluminum foil after electrochemical corrosion. The method has the advantages of simple process steps, convenient operation, easy batch production and good application value.
Drawings
FIG. 1 is a schematic flow chart of the manufacturing method of the present invention.
FIG. 2 is a schematic view of the surface state of the aluminum foil in steps 4-6 of the manufacturing method of the present invention.
Detailed Description
The invention is further described below with reference to the drawings and specific preferred embodiments of the description, without thereby limiting the scope of protection of the invention.
Example 1
A method for manufacturing a high-voltage aluminum foil for an aluminum electrolytic capacitor with uniformly corroded and perforated mask comprises the following steps:
step 1: and (3) carrying out surface treatment on the aluminum foil by using 2-5% dilute sulfuric acid solution, removing surface oil stains and oxides, exposing a fresh aluminum layer, and improving the surface activity of the aluminum foil.
Step 2: preparing a liquid masking agent, wherein the masking agent is liquid acid-alkali-resistant photosensitive and corrosion-resistant ink, adding a proper amount of organic diluent such as alcohol and acetone to adjust the viscosity of the liquid acid-alkali-resistant photosensitive and corrosion-resistant ink to 20-40 mpa.s, and taking the pretreated aluminum foil out of a masking agent groove to cover a layer of masking layer on the surface of the aluminum foil, wherein the thickness of the masking layer is 1-2 mu m.
And step 3: drying the mask layer for 30s at 90 ℃ by using vertical drying equipment, and then, feeding the mask layer into horizontal drying equipment, wherein the drying temperature is 100-200 ℃, and the drying time is 1-2 min; and forming a mask dry film on the surface of the dried aluminum foil.
And 4, step 4: and exposing the mask dry film through a film with a designed dot pattern, wherein the exposure precision is 1-5 mu m, and the exposure energy is 1000-2000 mJ.
And 5: and developing the exposed mask dry film by using a developer to expose the point-like array of aluminum materials under the mask dry film, wherein the point-like diameter of the aluminum materials is 2-10 mu m.
Step 6: performing direct-current corrosion on the aluminum foil obtained in the step 5, wherein uniform pre-corrosion pits appear on the surface of the aluminum foil, and the corrosion current density is 0.1A/cm2～0.5A/cm2And obtaining corrosion pores with uniformly distributed surfaces, wherein the pore diameter of the pores is 2-6 mu m, and the pore distance is 4-10 mu m.
Example 2
A method for manufacturing a high-voltage aluminum foil for an aluminum electrolytic capacitor with uniformly corroded and perforated mask comprises the following steps:
step 1: and (3) carrying out surface treatment on the aluminum foil by using 2-5% dilute sulfuric acid solution, removing surface oil stains and oxides, exposing a fresh aluminum layer, and improving the surface activity of the aluminum foil.
Step 2: preparing a liquid masking agent, wherein the masking agent is liquid acid-alkali-resistant photosensitive and corrosion-resistant ink, adding a proper amount of organic diluent such as alcohol and acetone to adjust the viscosity of the liquid acid-alkali-resistant photosensitive and corrosion-resistant ink to 20-40 mpa.s, and taking the pretreated aluminum foil out of a masking agent groove to cover a layer of masking layer on the surface of the aluminum foil, wherein the thickness of the masking layer is 1-2 mu m.
And step 3: drying the mask layer for 30s at 90 ℃ by using vertical drying equipment, and then, feeding the mask layer into horizontal drying equipment, wherein the drying temperature is 100-200 ℃, and the drying time is 1-2 min; and forming a mask dry film on the surface of the dried aluminum foil.
And 4, step 4: and exposing the mask dry film through a laser scanning program, wherein the exposure precision is 1-2 mu m, and the exposure energy is 500-1000 mJ.
And 5: and developing the exposed mask dry film by using a developer to expose the point-like array of aluminum materials under the mask dry film, wherein the point-like diameter of the aluminum materials is 2-4 mu m.
Step 6: performing direct-current corrosion on the aluminum foil obtained in the step 5, wherein uniform pre-corrosion pits appear on the surface of the aluminum foil, and the corrosion current density is 0.05A/cm2～0.3A/cm2And obtaining corrosion pores with uniformly distributed surfaces, wherein the pore diameter of the pores is 2-4 mu m, and the pore distance is 4-6 mu m.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-described embodiments. All technical schemes belonging to the idea of the invention belong to the protection scope of the invention. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the basic concept of the invention, and such modifications and adaptations are intended to be within the scope of the invention.
Claims (9)
1. A method for manufacturing uniform corrosion holing of a high-voltage aluminum foil mask for an aluminum electrolytic capacitor is characterized by comprising the following steps:
the method comprises the following steps of (1) carrying out surface treatment on the aluminum foil plain foil, removing surface oil stains, and improving the surface activity of the plain foil;
the aluminum foil pretreated in the step (2) enters a liquid masking agent groove, the aluminum foil is pulled out from the masking agent groove under the action of transmission, a layer of masking agent is attached to the surface of the aluminum foil, and the masking agent is attached to the surface of the aluminum foil to form a masking layer;
the aluminum foil covered with the masking agent in the step (3) enters drying equipment, and a masking dry film is formed on the surface after drying;
exposing the mask dry film by using a preset pattern to form a uniform circular hole shape on the surface of the mask dry film;
step (5) developing the exposed mask dry film in the step (4) by using a developer, washing off the round hole shape on the mask dry film, and exposing the uniform hole-shaped aluminum foil surface;
and (6) sending the aluminum foil obtained in the step (5) into a corrosion tank, and forming uniformly distributed corrosion pores on the front and back surfaces of the aluminum foil through electrochemical corrosion by adopting direct current corrosion.
2. The method as claimed in claim 1, wherein the aluminum foil has a thickness of 50-150 μm.
3. The method for manufacturing high-voltage aluminum foil mask uniform corrosion perforation for aluminum electrolytic capacitors as claimed in claim 1, wherein the thickness of said mask layer in step (2) is 1-2 μm.
4. The method for manufacturing the high-voltage aluminum foil mask uniform corrosion hole for the aluminum electrolytic capacitor as claimed in claim 1, wherein the mask agent in the step (2) is liquid acid and alkali resistant photosensitive resist ink.
5. The method for manufacturing the uniform corrosion perforation of the high-voltage aluminum foil mask for the aluminum electrolytic capacitor as claimed in claim 4, wherein the viscosity of the liquid acid and alkali resistant photosensitive resist ink is 20mpa.s to 40 mpa.s; the liquid acid and alkali resistant photosensitive corrosion resistant ink is added with an organic diluent to adjust the viscosity.
6. The method as claimed in claim 1, wherein the drying device in step (3) comprises a vertical drying device and a horizontal drying device, the vertical drying device pre-dries the aluminum foil, and the aluminum foil is pre-dried and then enters the horizontal drying device filled with nitrogen circulation protection to dry the aluminum foil.
7. The method for manufacturing uniform corrosion perforation of high voltage aluminum foil mask for aluminum electrolytic capacitor as claimed in claim 8, wherein the drying temperature of said vertical drying device is 90 ℃ and the drying time is 30 s; the drying temperature of the horizontal drying equipment is 100-200 ℃, and the drying time is 1-2 min.
8. The method for manufacturing uniform etching of the via hole in the high voltage aluminum foil mask for the aluminum electrolytic capacitor as set forth in claim 1, wherein the exposure precision is 1 to 5 μm and the exposure energy is 500 to 2000mJ in the step (4).
9. The method for manufacturing uniform-etching holes on a high-voltage aluminum foil mask for an aluminum electrolytic capacitor as set forth in claim 1, wherein said DC etching in said step (6) has an etching current density of 0.05A/cm2～0.5A/cm2。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111497046.5A CN114141540B (en) | 2021-12-09 | 2021-12-09 | Manufacturing method of high-voltage aluminum foil mask uniform corrosion hole for aluminum electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111497046.5A CN114141540B (en) | 2021-12-09 | 2021-12-09 | Manufacturing method of high-voltage aluminum foil mask uniform corrosion hole for aluminum electrolytic capacitor |
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| Publication Number | Publication Date |
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| CN114141540A true CN114141540A (en) | 2022-03-04 |
| CN114141540B CN114141540B (en) | 2023-12-22 |
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| CN202111497046.5A Active CN114141540B (en) | 2021-12-09 | 2021-12-09 | Manufacturing method of high-voltage aluminum foil mask uniform corrosion hole for aluminum electrolytic capacitor |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362890A (en) * | 1986-09-03 | 1988-03-19 | Showa Alum Corp | Aluminum electrode material for electrolytic capacitor |
| JPH01189907A (en) * | 1988-01-25 | 1989-07-31 | Showa Alum Corp | Manufacture of aluminum electrode foil for electrolytic capacitor |
| JPH02241015A (en) * | 1989-03-15 | 1990-09-25 | Elna Co Ltd | Manufacture of aluminum electrode material for electrolytic capacitor |
| JP2006124805A (en) * | 2004-10-29 | 2006-05-18 | Japan Science & Technology Agency | Foil and its production method |
| WO2013019084A2 (en) * | 2011-08-03 | 2013-02-07 | 솔브레인 주식회사 | Apparatus for manufacturing current collector for electrochemical device and current collector for electrochemical device manufactured thereby, and method for manufacturing current collector electrochemical device and current collector for electrochemical device manufactured thereby |
| CN103476204A (en) * | 2013-10-08 | 2013-12-25 | 复旦大学 | Addition preparation method for double-side boards |
| CN103531815A (en) * | 2013-10-25 | 2014-01-22 | 深圳清华大学研究院 | Perforated foil used for current collector and its making method |
| CN111223620A (en) * | 2020-01-10 | 2020-06-02 | 广东风华高新科技股份有限公司 | Sheet type precision film exclusion and manufacturing method thereof |
-
2021
- 2021-12-09 CN CN202111497046.5A patent/CN114141540B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362890A (en) * | 1986-09-03 | 1988-03-19 | Showa Alum Corp | Aluminum electrode material for electrolytic capacitor |
| JPH01189907A (en) * | 1988-01-25 | 1989-07-31 | Showa Alum Corp | Manufacture of aluminum electrode foil for electrolytic capacitor |
| JPH02241015A (en) * | 1989-03-15 | 1990-09-25 | Elna Co Ltd | Manufacture of aluminum electrode material for electrolytic capacitor |
| JP2006124805A (en) * | 2004-10-29 | 2006-05-18 | Japan Science & Technology Agency | Foil and its production method |
| WO2013019084A2 (en) * | 2011-08-03 | 2013-02-07 | 솔브레인 주식회사 | Apparatus for manufacturing current collector for electrochemical device and current collector for electrochemical device manufactured thereby, and method for manufacturing current collector electrochemical device and current collector for electrochemical device manufactured thereby |
| CN103476204A (en) * | 2013-10-08 | 2013-12-25 | 复旦大学 | Addition preparation method for double-side boards |
| CN103531815A (en) * | 2013-10-25 | 2014-01-22 | 深圳清华大学研究院 | Perforated foil used for current collector and its making method |
| CN111223620A (en) * | 2020-01-10 | 2020-06-02 | 广东风华高新科技股份有限公司 | Sheet type precision film exclusion and manufacturing method thereof |
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| CN114141540B (en) | 2023-12-22 |
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