CN114124013A - Upset tool of crystal syntonizer suitable for ceramic base of no kovar ring - Google Patents

Upset tool of crystal syntonizer suitable for ceramic base of no kovar ring Download PDF

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CN114124013A
CN114124013A CN202111387164.0A CN202111387164A CN114124013A CN 114124013 A CN114124013 A CN 114124013A CN 202111387164 A CN202111387164 A CN 202111387164A CN 114124013 A CN114124013 A CN 114124013A
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anisotropic permanent
permanent magnets
ferrite anisotropic
ceramic base
magnetic
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CN114124013B (en
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李俊峰
郭正江
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Hongxing Technology (Group) Co.,Ltd.
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Hangzhou Hosonic Electronics Co ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The invention discloses a turnover jig suitable for a crystal resonator of a ceramic base without a Kovar ring, which belongs to the technical field of high-performance crystal resonators for communication base stations and is technically characterized in that a ferrite anisotropic permanent magnet and a neodymium iron boron magnet are arranged on a magnetic Tray; grooves are formed in the inner part and the edge part of the magnetic Tray disc, and ferrite anisotropic permanent magnets are filled in the grooves in the inner part; the magnetic flux density of the ferrite anisotropic permanent magnet is 240 mT-270 mT. Adopt the upset tool of the ceramic base's that is applicable to of this application does not have kovar ring crystal resonator, can improve the production efficiency that the ceramic base crystal resonator of no kovar ring seals the butt joint of welding the board.

Description

Upset tool of crystal syntonizer suitable for ceramic base of no kovar ring
Technical Field
The invention relates to the technical field of high-performance crystal resonators for communication base stations, in particular to a turnover jig for a crystal resonator of a ceramic base without a Kovar ring.
Background
The ceramic base is a basic component of a high-performance quartz crystal resonator for communication (cao singmei, basic knowledge of quartz crystal resonator and its application [ J ] chinese scientific and technical information, 2012 (11)).
The crystal resonator packaging base has two parts, as shown in the figure 1-2, namely a ceramic base with a Kovar ring (see https:// www.doc88.com/p-8651796996995.html) (which is characterized by the ceramic base + the Kovar ring + a metal upper cover), and a ceramic base without the Kovar ring (see https:// www.docin.com/p-1182470129.html) (which is characterized by the ceramic base without the Kovar ring + an adhesive and the ceramic upper cover).
The ceramic base without the kovar ring is generally sealed and packaged by matching with a GLASS GLASS cement ceramic upper cover. The problem that the kovar-ring-free ceramic base needs to be integrally turned over on a whole Tray disc is solved, and the ceramic base is in butt joint with a sealing and welding plate; and the problem of transferring and transferring the ceramic base without the Kovar ring in the sealing and welding process can be solved.
No relevant research has been recorded in the prior art for the inversion of a ceramic base without a kovar ring.
For the large field of turning over jigs, the applicant finds, through search, that CN209199892U discloses a Tray turning over jig, which comprises a chip Tray, a plurality of crystal cavities are arranged on the upper side of the chip Tray, a bottom pad is arranged on the lower side of the chip Tray, the chip Tray is rectangular, and a turning frame, wherein 1 chip Tray is arranged right under the turning frame, and the positioning unfilled corners of the chip Tray are arranged corresponding to the lower positioning bulges; 1 chip tray has been put to upset frame upside, and the location unfilled corner of chip tray sets up with last location arch is corresponding.
However, the above-mentioned turning jig is for a chip, but is not practically applicable to the quartz crystal resonator of the ceramic base without the kovar ring because the volume of the quartz crystal resonator of the ceramic base without the kovar ring is very small, and it is very difficult to insert hundreds of objects into the grooves on the upper side of the tray; meanwhile, the prior art does not have a tray for a quartz crystal resonator of a ceramic base without a Kovar ring (hundreds of mounting grooves are difficult to arrange on the tray).
Therefore, how to provide an overturning jig suitable for the crystal resonator of the ceramic base without the kovar ring so as to improve the production efficiency of butt joint of the sealing and welding plates of the crystal resonator of the ceramic base without the kovar ring is a key problem to be solved urgently.
Disclosure of Invention
The invention aims to provide an overturning jig suitable for a crystal resonator of a ceramic base without a Kovar ring, so as to solve the defects in the prior art.
The technical scheme of the application is as follows:
the utility model provides a upset tool that crystal resonator suitable for ceramic base that does not have kovar ring, is a magnetism upset tool frock suitable for crystal resonator of ceramic base that does not have kovar ring, includes from last to down in proper order: a fine tuning Tray, a patch, a magnetic Tray and a magnetic shielding case;
the magnetic Tray is provided with a ferrite anisotropic permanent magnet and a neodymium iron boron magnet;
grooves are formed in the inner part and the edge part of the magnetic Tray disc, and ferrite anisotropic permanent magnets are filled in the grooves in the inner part; neodymium iron boron magnets are filled in the grooves on the edges;
the bottom of the fine tuning Tray disc is connected with the patch into a whole, the patch has magnetism, the patch corresponds to four sides of the magnetic Tray disc, namely the patch is correspondingly attracted by the neodymium iron boron magnet of the magnetic Tray disc, and the fine tuning Tray disc is fixed on the magnetic Tray disc;
wherein, a magnetic shielding cover is arranged at the lower part of the magnetic Tray disc;
the magnetic flux density of the ferrite anisotropic permanent magnet is 240 mT-270 mT.
Further, the magnetic flux density of the single NdFeB magnet is 330 mT-380 mT.
Furthermore, the size of each ferrite anisotropic permanent magnet is 1-4 mm in diameter, and the distance is 3-5 mm.
Furthermore, the arrangement mode of the single ferrite anisotropic permanent magnet adopts a matrix mode.
Further, the arrangement mode of the ferrite anisotropic permanent magnets is as follows: the ferrite anisotropic permanent magnets in the first row are arranged in the same direction (i.e., the N-pole is directed in the same direction to the S-pole), and the ferrite anisotropic permanent magnets in the other rows are arranged in the same direction as the ferrite anisotropic permanent magnets in the first row.
Further, the arrangement mode of the ferrite anisotropic permanent magnets is as follows: the rows of the ferrite anisotropic permanent magnets in the even-numbered rows are in the same direction (i.e., the N-pole is in the same direction toward the S-pole); the rows of the ferrite anisotropic permanent magnets in the odd-numbered rows are in the same direction (i.e., the direction in which the N pole points to the S pole is the same); the ferrite anisotropic permanent magnets in the even-numbered rows are arranged in the opposite direction to the ferrite anisotropic permanent magnets in the odd-numbered rows.
Further, the arrangement mode of the ferrite anisotropic permanent magnets is as follows: the first row of ferrite anisotropic permanent magnets is oriented; the adjacent ferrite anisotropic permanent magnets are arranged in opposite directions. The ferrite anisotropic permanent magnets of the other rows are arranged in the same direction as the ferrite anisotropic permanent magnets of the first row.
Further, the arrangement mode of the ferrite anisotropic permanent magnets is as follows: the rows of the odd columns are the same, and the rows of the even columns are the same; the row direction of the odd columns is vertical to that of the even columns.
The beneficial effect of this application lies in:
first, a first invention of the present application is: as is well known, ceramic bases with a Kovar ring are magnetic, while ceramic bases without a Kovar ring are non-magnetic. However, in the actual working process, a new phenomenon is found: the ceramic base without the kovar ring also has weak magnetism. The discovery of this phenomenon is the original of the applicant.
Meanwhile, the ceramic base without the Kovar ring is generally matched with a GLASS GLASS cement ceramic upper cover for sealing and packaging. The problem that the kovar-ring-free ceramic base needs to be integrally turned over on a whole Tray disc is solved, and the ceramic base is in butt joint with a sealing and welding plate; and the transfer and transfer problem of the ceramic base without the Kovar ring in the sealing and welding process can be solved (the ceramic base without the Kovar ring is integrally turned over on a whole track disk, and the method also belongs to the original creation of the applicant).
Based on the two basic knowledge, the research and development of the application become possible.
Second, the second invention of the present application is: how to prevent the quartz crystal resonator from shifting, tilting, overturning, jumping and deviating from the original position: this problem is the difficulty and focus of the present application.
Two core problems: selecting what magnet; magnet size, spacing, how distributed. These two core problems need to be considered together. For the quartz crystal resonator, there is no precedent for selecting what kind of magnet is, and the selection of the kind of magnet is also related to the distribution and spacing of the magnets. That is, this is a multivariable problem.
Applicants have tried various combinations and found that: ferrite anisotropic permanent magnets are the best magnets, i.e. magnets of this type are the most suitable for tuning quartz crystal resonators.
Thus, the following two core configurations result:
2-1, key construction one: the magnets are ferrite anisotropic permanent magnets and are arranged and installed according to different arrangement combinations.
2-2, key structure two: the magnetic flux density of the ferrite anisotropic permanent magnet is 240 mT-270 mT. If the attraction force of the single ferrite anisotropic permanent magnet is less than 240mT is insufficient, the ferrite anisotropic permanent magnet is not firmly attracted; if the sizes of the single ferrite anisotropic permanent magnets are larger than 270mT, magnetic induction lines mutually influence, and products between adjacent ferrite anisotropic permanent magnets are disturbed.
2-3 Key construction III:
third, the third invention of the present application is: the paster is connected with the magnetic Tray disc 3 through the neodymium iron boron magnet 5, and the assembly of the Tray disc 1 and the paster 2 can be conveniently combined and separated in a fine tuning mode.
For neodymium-iron-boron magnets (powerful magnets), the magnetic flux density should be between 330mT and 380 mT:
these two criteria are mainly determined according to the following two points:
1) the magnetic flux density of a single neodymium iron boron magnet is referred to herein, and the design concept requires that the overall attraction force (the resultant force of the attraction forces of a plurality of magnets) of the neodymium iron boron magnets is far greater than the gravity of the small assembly formed by the fine tuning Tray 1 and the patch 2, which is a hard standard, and therefore, the magnetic flux density cannot be too small.
2) Of course, the magnetic flux density is not too large from a design and economic point of view.
Third, the third invention of the present application is: the present application demonstrates the arrangement of ferrite anisotropic permanent magnets. In practical application, the corresponding magnet arrangement combination mode can be adjusted and selected according to the size of the product, different series and the like, so that the multi-directional force applied to the product is balanced; that is, FIG. 7 is a few arrangements that applicants have verified, and others are generally less suitable. It should be noted that the latter 4 types of fig. 7 are substantially obtained by the first 4 types of rotation, and the reason for this rotation is: because the geometric center of a single product, the gravity center of the single product and the received magnetic field force cannot be on the same action point, the product is unstable to place, and the phenomena of deviation, tilting, standing and the like can be avoided only by rotating the product.
Fourth, a fourth invention of the present application is: "design of the magnetic shield 6". Because the bottom surface of the jig is placed on the table top of the operation table at ordinary times, in case that some magnetic dust or iron particles exist on the table top of the operation table or metal tweezers used by operators are adsorbed to the top surface, the risk that the impurity particle dust is adsorbed to the back surface is solved by adding the magnetic shielding cover.
Drawings
The invention will be further described in detail with reference to examples of embodiments shown in the drawings to which, however, the invention is not restricted.
Fig. 1 is a diagram showing the appearance effect of a quartz crystal resonator of a GLASS packaging type (a quartz crystal resonator belonging to a ceramic base without a Kovar ring).
FIG. 2 is a schematic diagram showing the difference between the shapes of a ceramic susceptor with a Kovar ring and a ceramic susceptor without a Kovar ring (the left side is a ceramic susceptor with a Kovar ring, and the right side is a ceramic susceptor without a Kovar ring).
Fig. 3 is a schematic three-dimensional design diagram of the turning jig of the present application.
Fig. 4 is a top view of the inversion fixture of the present application.
Fig. 5 is a schematic diagram showing the distribution of magnetic induction lines of a ferrite anisotropic permanent magnet used in the present application.
Fig. 6 is a schematic diagram showing the distribution of magnetic induction lines of a neodymium iron boron magnet (strong magnet) used in the present application.
Fig. 7 is a diagram showing 8 kinds of arrangements of the anisotropic permanent magnet of ferrite of the present application (the arrangement combinations are determined according to different quartz crystal resonators, light color indicates N-pole, and dark color indicates S-pole).
The reference numerals of fig. 1-7 are explained as follows:
the micro-adjusting Tray disc 1, the patch 2, the magnetic Tray disc 3, the ferrite anisotropic permanent magnet 4, the neodymium iron boron magnet 5 and the magnetic shielding cover 6.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings, however, the present disclosure may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. These embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. In the drawings, the shape and size of elements may be exaggerated for clarity, and the same reference numerals and signs will be used throughout to designate the same or similar elements.
Example one
< first, New discovery >
As is well known, ceramic bases with a Kovar ring are magnetic, while ceramic bases without a Kovar ring are non-magnetic. However, the team of inventors found that: the fact that the ceramic base without the kovar ring also has weak magnetism is a phenomenon which has not been found before and is unknown.
Second, research and development thought >
Based on the knowledge, the inventor wants to 'utilize the discovered ceramic base without the kovar ring to have weak magnetism, skillfully design and utilize the weak magnetism, and design a set of overturning and transferring jigs'.
In order to achieve the above object, the team of inventors conducted several studies, through search: CN210655231U proposes a magnetic product tray turnover jig, which utilizes: set up the recess in the magnetism suction disc and put into magnet, then magnetism suction disc cup joints with the locating plate, and the through-hole on the locating plate is corresponding with the product compartment on the tray again, overturns through magnet to magnetic metal material's attraction.
However, the above solution is not suitable for use mainly because: the scheme of CN210655231U is essentially magnet, and is suitable for large-volume and large-volume products. The magnetic force of the CN210655231U is difficult to balance in the range of the area with the suction force on the whole jig disc (although the arrangement of the magnets is balanced, the magnetic force is not balanced for the quartz crystal resonator), and the force of each product is definitely different in hundreds of products. The quartz crystal resonator has a small product weight, which is in the order of a few tenths of milligrams, and the product shifts, tilts, overturns, jumps and deviates from the original position (for example, the quartz crystal resonator is placed in a tray and can be 'standing' under the action of a magnetic field). Therefore, from CN210655231U, the scheme is known as follows: the use of a magnetic flip fixture to package a GLASS type crystal resonator is not feasible.
< III, structural design >
After a period of research and development, the following technical scheme is proposed.
The utility model provides a upset tool suitable for ceramic base's of no kovar ring crystal syntonizer includes from last to down in proper order: a fine tuning Tray disk 1, a patch 2, a magnetic Tray disk 3 and a magnetic shielding case 6;
the magnetic Tray 3 is provided with a ferrite anisotropic permanent magnet 4 and a neodymium iron boron magnet 5;
grooves are formed in the inner part and the edge part of the magnetic Tray disk 3, and ferrite anisotropic permanent magnets 4 are filled in the grooves in the inner part; the groove at the edge part is filled with a neodymium iron boron magnet 5;
the bottom of the fine tuning Tray disc 1 is connected with the patch 2 into a whole, the patch 2 has magnetism, the patch 2 corresponds to four sides of the magnetic Tray disc 3, namely the patch 2 is correspondingly attracted by the neodymium iron boron magnet 5 of the magnetic Tray disc 3, and the fine tuning Tray disc is fixed on the magnetic Tray disc 3;
a magnetic shield 6 is provided below the magnetic Tray 3.
The breakthrough design of the application is as follows:
1) design of the magnetic shield 6: because the bottom surface of the jig is placed on the table top of the operation table at ordinary times, in case that some magnetic dust or iron particles exist on the table top of the operation table or metal tweezers used by operators are adsorbed to the top surface, the risk that the impurity particle dust is adsorbed to the back surface is solved by adding the magnetic shielding cover.
2) How to prevent the quartz crystal resonator from shifting, tilting, overturning, jumping and deviating from the original position: this problem is a core issue.
2-1, the selection of the type of the used magnet is very important for the magnetic overturning and transferring jig designed at this time. In order to keep the magnetic flux density on each work site on the whole magnetic overturning and transferring jig balanced and consistent, the magnets on each work site are set and installed according to different arrangement combinations by adopting 'ferrite anisotropic permanent magnets'.
2-2, for the magnetic overturning and transferring jig designed at this time, the size of the adopted single ferrite anisotropic permanent magnet is 1mm, the magnetic flux density is 240 mT-270 mT, and the distance is 3-5 mm.
The key data of the ferrite anisotropic permanent magnet are as follows:
if the attraction force of the single ferrite anisotropic permanent magnet is less than 240mT is insufficient, the ferrite anisotropic permanent magnet is not firmly attracted;
if the sizes of the single ferrite anisotropic permanent magnets are larger than 270mT, magnetic induction lines mutually influence, and products between adjacent ferrite anisotropic permanent magnets are disturbed.
Fig. 5 shows the distribution of the magnetic poles of the ferrite anisotropic permanent magnet.
In fact, 2-1 and 2-2 are considered together. There is no precedent for selecting what kind of magnet for quartz crystal resonators, and it is also related to the distribution and spacing of the magnets. That is, this is a multivariable problem.
The applicant has tried various combinations and found (this is the most central knowledge of the present application): ferrite anisotropic permanent magnets are the best magnets (if neodymium iron boron magnets (strong magnets) or weak magnets are chosen, it is very difficult to control); secondly, the ferrite anisotropic permanent magnet is selected, and various tests show that the magnetic flux density of a single ferrite anisotropic permanent magnet is 240 mT-270 mT, so that the requirements of different quartz crystal resonators are met.
In addition, the arrangement design of the ferrite anisotropic permanent magnets is also an important point, which can be seen in fig. 7.
2-3, the magnet of the edge adsorption patch adopts a neodymium iron boron magnet (strong magnet). For the magnetic overturning and transferring jig designed this time, the magnetic flux density of the adopted neodymium iron boron magnet (strong magnet) is between 330mT and 380 mT:
these two criteria are mainly determined according to the following two points:
1) the magnetic flux density of a single neodymium iron boron magnet is referred to herein, and the design concept requires that the overall attraction force (the resultant force of the attraction forces of a plurality of magnets) of the neodymium iron boron magnets is far greater than the gravity of the small assembly formed by the fine tuning Tray 1 and the patch 2, which is a hard standard.
2) Of course, from the viewpoint of design and economy, it is in principle sufficient to use as few magnets as possible.
Fig. 6 shows the distribution of the magnetic poles of the ndfeb magnet.
3) Design of the patch: the design of the patch is central. In designing, bolt connection and the like are also conceivable. However, these connection modes are excluded one by one. The reason is that: first, the vernier Tray 1 and the patch 2 are small assemblies that cannot be separated from each other in use, and the small assemblies and the magnetic Tray 3 are required to be combined and separated at any time in use, and for convenience, are not connected by bolts.
< IV, mode of use >
When the fixture is used, the steps are as follows:
firstly, integrally fixing a quartz crystal resonator without a Kovar ring ceramic base on a Tray disc by using the overturning jig;
then, overturning and butting to the seal welding plate;
and then, sequentially taking down the overturning jig and the Tray disc to finish a complete butt joint transfer action.
The above-mentioned embodiments are only for convenience of description, and are not intended to limit the present invention in any way, and those skilled in the art will understand that the technical features of the present invention can be modified or changed by other equivalent embodiments without departing from the scope of the present invention.

Claims (8)

1. The utility model provides a upset tool suitable for ceramic base's of no kovar ring crystal resonator which characterized in that includes from last to down in proper order: a fine tuning Tray, a patch, a magnetic Tray and a magnetic shielding case;
the magnetic Tray is provided with a ferrite anisotropic permanent magnet and a neodymium iron boron magnet;
grooves are formed in the inner part and the edge part of the magnetic Tray disc, and ferrite anisotropic permanent magnets are filled in the grooves in the inner part; neodymium iron boron magnets are filled in the grooves on the edges;
the bottom of the fine tuning Tray disc is connected with the patch into a whole, the patch has magnetism, the patch corresponds to four sides of the magnetic Tray disc, namely the patch is correspondingly attracted by the neodymium iron boron magnet of the magnetic Tray disc, and the fine tuning Tray disc is fixed on the magnetic Tray disc;
wherein, a magnetic shielding cover is arranged at the lower part of the magnetic Tray disc;
the magnetic flux density of the ferrite anisotropic permanent magnet is 240 mT-270 mT.
2. The turning jig for the crystal resonator of the ceramic base without the Kovar ring as in claim 1, wherein the flux density of the single NdFeB magnet is 330 mT-380 mT.
3. The turning jig for the crystal resonator of the ceramic base without the Kovar ring as in claim 1, wherein the size of the single ferrite anisotropic permanent magnet is 1-4 mm in diameter and the distance is 3-5 mm.
4. The crystal resonator turning jig for a ceramic base without a kovar ring as in claim 1, wherein the arrangement of the individual ferrite anisotropic permanent magnets is arranged in a matrix.
5. The turning jig for the crystal resonator of the ceramic base without the Kovar ring as in claim 4, wherein the ferrite anisotropic permanent magnets are arranged in a way that: the ferrite anisotropic permanent magnets in the first row are arranged in the same direction, and the ferrite anisotropic permanent magnets in the other rows are arranged in the same direction as the ferrite anisotropic permanent magnets in the first row.
6. The turning jig for the crystal resonator of the ceramic base without the kovar ring as claimed in claim 1, wherein the ferrite anisotropic permanent magnets are arranged in a manner that: the ferrite anisotropic permanent magnets in the even-numbered rows are arranged in opposite directions; the ferrite anisotropic permanent magnets in the odd rows are arranged in the same direction; the ferrite anisotropic permanent magnets in the even-numbered rows are arranged in the opposite direction to the ferrite anisotropic permanent magnets in the odd-numbered rows.
7. The turning jig for the crystal resonator of the ceramic base without the kovar ring as claimed in claim 1, wherein the ferrite anisotropic permanent magnets are arranged in a manner that: the first row of ferrite anisotropic permanent magnets is oriented; the adjacent ferrite anisotropic permanent magnets are arranged in opposite directions. The ferrite anisotropic permanent magnets of the other rows are arranged in the same direction as the ferrite anisotropic permanent magnets of the first row.
8. The turning jig for the crystal resonator of the ceramic base without the kovar ring as claimed in claim 1, wherein the ferrite anisotropic permanent magnets are arranged in a manner that: the rows of the odd columns are the same, and the rows of the even columns are the same; the row direction of the odd columns is vertical to that of the even columns.
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