CN114112039B - Spectral imaging system and method based on DMD and linear micromirror array - Google Patents
Spectral imaging system and method based on DMD and linear micromirror array Download PDFInfo
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Abstract
The invention relates to a spectrum imaging system and a method based on DMD and a linear micro-mirror array, wherein a linear micro-mirror array is added between the DMD and a light splitting subsystem, and each linear micro-mirror unit is controlled to deflect a certain angle, so that emergent light reflected by the linear micro-mirror array can enter the light splitting subsystem at the same position, and therefore, a dispersion spectrum generated by the DMD micro-mirror according to column scanning is not offset along one direction but distributed at a fixed position on a detector working surface, thereby greatly reducing the total length of the dispersion spectrum and reducing the requirement of the system on the large aspect ratio detector working surface.
Description
Technical Field
The invention relates to the technical field of spectral imaging, in particular to a spectral imaging system and method based on a DMD and a linear micro-mirror array.
Background
Spectral resolution is one of the important performance indicators of a spectral imaging system and can be used for measuring the capability of the system to distinguish and identify physical and chemical properties and constituent components of a target. Generally, the higher the spectral resolution, the more the number of spectral bands acquired by the system, the narrower the spectral band width, the easier the information of the target is distinguished and identified, and the stronger the pertinence. In particular, in the hyperspectral remote sensing field, only a sufficiently high spectral resolution is obtained, and abundant spectral information is provided, so that surface materials with similar spectral characteristics can be distinguished more easily. Thus, obtaining high spectral resolution is important to enhance the detection capabilities of the spectral imaging system.
In conventional spectral imaging systems, slit push-broom is a large class of spectral imaging systems that are currently in common use. Compared with spectrum scanning type, snapshot type and other systems, the slit push-broom type spectrum imaging system can provide higher spectrum resolution and spatial resolution, but the slit push-broom type spectrum imaging system can realize push-broom on a target in one-dimensional direction only by means of movement of an internal or external mechanical slit, so that a complete three-dimensional data cube of the target is obtained, and the three-dimensional data cube comprises two-dimensional space information and one-dimensional spectrum information, so that the problems of large whole machine mass, high energy consumption and the like can be caused.
Devices fabricated based on microelectromechanical systems (Micro-electro-mechanical systems, MEMS) technology have the advantages of small volume, light weight, low power consumption, customizable, etc., and their representative products digital micromirror devices (Digital Micromirorr Device, DMD) have been used in the field of spectral imaging. The working surface of the DMD consists of hundreds of thousands or even millions of micromirrors with the side length of micrometers, and each micromirror has positive and negative deflection states with the same deflection angle and opposite directions. The mechanical slit push-broom function (CN 105527021A, CN110132412A, etc.) in the traditional spectrum imaging system can be replaced by the row-by-row scanning of the micromirrors, and the method can greatly reduce the volume and the quality of the system, reduce the complexity of the system and make the system more compact and compact. However, since column-wise deflection of DMD micromirrors causes the corresponding dispersive spectrum to shift in one direction on the detector, a detector with a large aspect ratio of the working surface is required to accommodate all of the dispersive spectrum, so that higher spectral resolution can be obtained. However, most detector facets currently in the market are square or rectangular with a small aspect ratio, and thus do not facilitate obtaining high spectral resolution with DMD-based scanning spectral imaging systems. Although a working surface with a larger length-width ratio can be obtained by splicing a plurality of detectors, the cost of the system can be greatly increased, and the popularization and the use of the system are not facilitated. To solve this problem, a new DMD-based spectral imaging system is proposed, with the application publication No. CN112484857a, in which all micromirrors on the DMD working surface are divided into two parts, and the image turning subsystem can change the position of the optical axis of each part of outgoing light, so that the dispersion spectrum reaching the detector is not shifted in only one direction but in two directions, as shown in fig. 1, and compared with the DMD-based scanning spectral imaging system of the invention with the application publication No. CN105527021 a, this method can reduce the requirement of the system for the surface type of the high aspect ratio detector; at the same time, the method allows the dispersion spectrum generated by deflection of each row of micromirrors to be spread wider under the condition of using the same detector, and the spectral resolution provided by the system is improved. However, the total length of the dispersion spectrum is still limited to be reduced to half, and the two parts of dispersion spectrum are shifted in parallel, so that the length requirement on the non-spectral shift direction on the working surface of the detector is higher, namely, the length is not smaller than the height of the parallel arrangement of the two parts of spectrum, therefore, the method still has special requirements on the selection of the working surface of the detector, and the spectral resolution of the system cannot be greatly improved.
In addition to the DMD, MEMS micromirrors also include many kinds, wherein scanning micromirrors have been widely used in various fields of laser radar, optical communication, scanning imaging, 3D imaging, and the like by virtue of their excellent scanning ability. Compared with two fixed deflection angles of the DMD, the deflection angle of the scanning micro mirror is adjustable within a certain range, so that the deflection angle is richer; in addition, the micromirror units of the DMD are square, and the scanning micromirror units have strong customization capability, so that micromirror arrays with different sizes, surface shapes and numbers can be developed according to actual requirements. The introduction of scanning micro-mirror arrays based on MEMS technology is expected to provide a new solution for the spectrum imaging system to obtain high spectrum resolution.
Disclosure of Invention
The invention aims to solve the technical problem of providing a spectrum imaging system and a method based on a DMD and a linear micro-mirror array, which can obtain wider dispersion spectrum and higher spectrum resolution only by using a conventional detector surface type without splicing a plurality of detectors and can effectively reduce the system cost.
The technical scheme adopted by the invention is that the spectrum imaging system based on the DMD and the linear micromirror array comprises a target, an imaging subsystem, a DMD working surface, a plurality of micromirror scanning units positioned on the DMD working surface, a linear micromirror array, a fixed point M, a light splitting subsystem and a detector working surface, wherein the linear micromirror array comprises a plurality of linear micromirror units, and the number of the linear micromirror units is the same as that of the micromirror scanning units, wherein the linear micromirror scanning units are arranged on the DMD working surface in sequence, and the linear micromirror array comprises the following components:
the object and the imaging subsystem are respectively positioned at the object plane and the image plane of the DMD working surface, and an object image formed by the object passing through the imaging subsystem is divided by a micromirror scanning unit of the DMD working surface according to columns;
the linear micro-mirror array is positioned on the DMD working surface in the emergent direction of light rays when each micro-mirror scanning unit is in a deflection working state, the target images of the corresponding columns must be reflected to the corresponding linear micro-mirror units in the linear micro-mirror array when each micro-mirror scanning unit is in the deflection working state, and the light rays passing through the center of each micro-mirror scanning unit on the DMD working surface also pass through the center of the corresponding linear micro-mirror unit in the linear micro-mirror array;
the outgoing light passing through the center of each linear micro-mirror unit is converged to a fixed point M and enters a light splitting subsystem by changing the deflection angle of each linear micro-mirror unit in the linear micro-mirror array;
and the light entering the sub-system is collimated, dispersed and focused, and finally the obtained dispersed spectrum is imaged at the same position of the working surface of the detector.
The beneficial effects of the invention are as follows: compared with the existing scanning type spectrum imaging method based on the DMD, the method has the advantages that the dispersion spectrum offset phenomenon caused by the column deflection of the DMD micro-mirror is eliminated, and the obtained dispersion spectrum position is fixed and unchanged in the period that the DMD finishes scanning the target image; the invention overcomes the excessive dependence of the optical system on the surface type of the detector with a large length-width ratio, and improves the resolution of the spectrum; the invention can greatly reduce the total length of the dispersion spectrum, allow the dispersion spectrum to be unfolded wider and obtain higher spectrum resolution; the invention does not need to customize a large-length-width ratio surface type detector, greatly increases the universality of the scanning type spectrum imaging system based on MEMS, can effectively reduce the cost of the system, and promotes the application and development of the system to civil and commercial fields with limited cost.
Preferably, the imaging subsystem is a telescope lens or a microscope lens, and is used for converging an image of a target reduced or enlarged on a working surface of the DMD;
preferably, the DMD working surface is rectangular, the DMD working surface is composed of DMD micro-mirror arrays, the column number and the row number of the DMD micro-mirror arrays are a and b respectively, each DMD micro-mirror array is composed of a plurality of micro-mirrorsThe mirror scanning units are formed, each micro mirror scanning unit comprises m rows of micro mirrors, the width of each micro mirror is d, an image of a target is divided into 2N+1 rows (N is a positive integer) by the micro mirror scanning units of the DMD working surface according to the rows, each micro mirror scanning unit comprises m rows of micro mirrors (m is a positive integer), the width of each micro mirror scanning unit is md, and m (2N+1) is less than or equal to a; the center of the (n+1) th micro mirror scanning unit is the point P, and the center of the (i) th micro mirror scanning unit is the point P i (i is a positive integer, i.e. [1, 2N+1)]) The method comprises the steps of carrying out a first treatment on the surface of the Each micromirror only has positive and negative deflection states with the same deflection angle and opposite directions, and the deflection angles are mostly +/-12 degrees, and are +/-10 degrees, +/-17 degrees and the like; one of the deflection states is arbitrarily selected as an ON working state, and a micromirror scanning unit in the ON working state can reflect a selected target image to the linear micromirror array; the other deflection state is referred to as the "OFF" state, in which the micromirror scanning unit is responsible for reflecting the selected target image out of the spectral imaging system.
Preferably, the linear micromirror array is a long-strip scanning micromirror array based on MEMS technology.
Preferably, the optical splitting subsystem comprises a collimating element, a dispersing element and a focusing element for collimating, dispersing and focusing the incoming light, the optical axis of the optical splitting subsystem passing through the fixed point M.
Preferably, the working surface of the detector is located at the image surface position of the sub-optical system and is used for collecting the dispersion spectrum emitted by the sub-optical system, and the surface type of the working surface of the detector is a common surface type of the detector in the market.
A method of spectral imaging based on a DMD and a linear micromirror array, the method comprising the steps of:
step 1: the 1 st micro mirror scanning unit and the 1 st linear micro mirror unit of the corresponding linear micro mirror array ON the DMD working surface are controlled to be in an ON working state at the same time, the rest micro mirror scanning units ON the DMD working surface and the rest linear micro mirror units of the linear micro mirror array are in an OFF working state, light rays of the 1 st target image are reflected by the 1 st micro mirror scanning unit and the 1 st linear micro mirror unit in sequence, then converged to a fixed point M and enter a light splitting subsystem, the obtained dispersion spectrum is converged ON a detector working surface, the detector working surface records and stores a dispersion spectrum chart at the moment, deflection work of the 1 st micro mirror scanning unit and the 1 st linear micro mirror unit is finished, and spectral imaging of the 1 st target image is completed;
step 2: the 2 nd micro-mirror scanning unit of the DMD working surface and the 2 nd linear micro-mirror unit of the corresponding linear micro-mirror array are controlled to be in an ON working state at the same time, the other micro-mirror scanning units and the other linear micro-mirror units are in an OFF working state, the light of the 2 nd row of target images is reflected by the 2 nd micro-mirror scanning unit and the 2 nd linear micro-mirror unit in sequence, finally, the light enters the light splitting subsystem through a fixed point M5, the obtained dispersion spectrum is converged ON the detector working surface, the detector working surface records and stores the dispersion spectrum graph at the moment, and the deflection work of the 2 nd micro-mirror scanning unit and the 2 nd linear micro-mirror unit is finished, so that the spectral imaging of the 2 nd row of target images is completed;
step 3: the 3 rd and 4 … … th micro mirror scanning units of the DMD working face and the 3 rd and 4 … … th linear micro mirror units of the corresponding linear micro mirror array are respectively controlled to be simultaneously in an ON working state in sequence, the detector working face synchronously records and stores corresponding dispersion spectrograms, and the spectral imaging of the 3 rd and 4 … … th column target images is completed;
step 4: the 2N+1th micro mirror scanning unit of the DMD working surface and the 2N+1th linear micro mirror unit of the corresponding linear micro mirror array are controlled to be in an ON working state at the same time, other micro mirror scanning units and other linear micro mirror units are in an OFF working state, light rays of the 2N+1th target image are reflected by the 2N+1th micro mirror scanning unit and the 2N+1th linear micro mirror unit in sequence, finally, the light rays enter a light splitting subsystem through a fixed point M, the obtained dispersion spectrum is converged ON a detector working surface, the detector working surface records and stores a dispersion spectrum graph at the moment, deflection work of the 2N+1th micro mirror scanning unit and the 2N+1th linear micro mirror unit is finished, and spectral imaging of the 2N+1th target image is completed;
step 5: and carrying out data processing on 2N+1 dispersion spectrograms acquired by the detector working face to obtain two-dimensional space scene and one-dimensional spectrum information of the target, namely a complete three-dimensional data cube.
By adopting the spectrum imaging method based on the DMD and the linear micromirror array, the method eliminates the phenomenon of dispersion spectrum deviation caused by column deflection of the DMD micromirrors, and compared with the traditional scanning spectrum imaging method based on the DMD, the method has the advantages that the dispersion spectrum position obtained by the method is fixed and unchanged in the period of the completion of the scanning of the target image by the DMD, and the method overcomes the excessive dependence of an optical system on the surface type of the detector with a large length-width ratio, and improves the resolution of the spectrum; the method can also greatly reduce the total length of the dispersion spectrum, allow the dispersion spectrum to be unfolded wider, and obtain higher spectrum resolution; the method does not need to customize a large-length-width ratio surface type detector, greatly increases the universality of the scanning type spectrum imaging system based on MEMS, can effectively reduce the cost of the system, and promotes the application and development of the system to civil and commercial fields with limited cost.
Drawings
FIG. 1 is a graph showing the comparison of the variation of the dispersion spectrum position in two prior art DMD-based scanning spectral imaging methods;
FIG. 2 is a schematic diagram of a spectral imaging system based on a DMD and a linear micromirror array according to the present invention;
FIG. 3 is a schematic diagram of the object image of the present invention divided by the micromirror scanning unit of the working surface of the DMD according to the column;
FIG. 4 is a schematic diagram showing the composition of a linear micromirror array according to the present invention;
FIG. 5 is a schematic diagram showing the relative position distribution of the working surface of the DMD, the linear micromirror array and the fixed point M according to the present invention;
FIG. 6 is an enlarged view at A in FIG. 5;
FIG. 7 is a schematic diagram of the spectrum acquisition principle of a spectrum imaging method based on DMD and linear micromirror array according to the present invention;
FIG. 8 is a schematic diagram of the spectrum acquisition principle of the 1 st column of the target image in the invention;
FIG. 9 is a schematic diagram of the spectrum acquisition principle of the 2 nd column of the target image in the invention;
FIG. 10 is a schematic diagram of a 2N+1st column of the present invention for spectral acquisition of a target image;
FIG. 11 is a diagram showing the relative position distribution of the working surface of the DMD, the linear micromirror array and the fixed point M according to the second embodiment of the invention;
FIG. 12 is an enlarged view at B in FIG. 11;
as shown in the figure: 1. a target; 2. an imaging subsystem; 3. DMD working face; 3-0, a micromirror scanning unit; 3-1, a 1 st micro mirror scanning unit of the DMD working surface; 3-2, a DMD working face middle micromirror scanning unit; 3-3, last 1 micromirror scanning units of DMD working face; 4. a linear micromirror array; 4-0, linear micromirror units; 4-1, the 1 st linear micromirror unit of the linear micromirror array; 4-2, a linear micromirror unit in the middle of the linear micromirror array; 4-3, the last 1 linear micromirror units of the linear micromirror array; 5. a fixed point M; 6. a light splitting subsystem; 7. a detector working surface; 8. light passing through the center of a scanning unit of a 1 st micro mirror of the working surface of the DMD; 9. light passing through the center of the micromirror scanning unit in the middle of the working surface of the DMD; 10. light passing through the center of the last 1 micromirror scanning unit of the DMD working surface.
Detailed Description
The invention is further described below with reference to the accompanying drawings in combination with specific embodiments to enable one skilled in the art to practice the invention by reference to the specification, the scope of the invention being limited to the specific embodiments.
It will be appreciated by those skilled in the art that in the present disclosure, the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," etc. refer to an orientation or positional relationship based on that shown in the drawings, which is merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore the above terms should not be construed as limiting the present invention.
The invention aims to provide a spectrum imaging system and a method based on a DMD and a linear micro-mirror array, wherein a linear micro-mirror array is added between the DMD and a light splitting subsystem, and each linear micro-mirror unit is controlled to deflect a certain angle, so that emergent light rays reflected by the linear micro-mirror array can enter the light splitting subsystem at the same position, and therefore, a dispersion spectrum generated by the DMD micro-mirror according to column scanning is not shifted along one direction but distributed at a fixed position on a detector working surface, thereby greatly reducing the total length of the dispersion spectrum and reducing the requirement of the system on the large aspect ratio detector working surface.
Embodiment one:
referring to fig. 2, the spectral imaging system based on the DMD and the linear micromirror array according to the present embodiment includes a target 1, an imaging subsystem 2, a DMD working surface 3, a DMD working surface 1 st micromirror scanning unit 3-1, a DMD working surface middle micromirror scanning unit 3-2, a DMD working surface last 1 micromirror scanning unit 3-3, a linear micromirror array 4, a linear micromirror array 1 st linear micromirror unit 4-1, a linear micromirror array middle linear micromirror unit 4-2, a linear micromirror array last 1 linear micromirror unit 4-3, a fixed point M5, a beam splitting subsystem 6, a detector working surface 7, a light ray 8 passing through the DMD working surface 1 st micromirror scanning unit center, a light ray 9 passing through the DMD working surface middle micromirror scanning unit center, and a light ray 10 passing through the DMD working surface last 1 micromirror scanning unit center. The selected DMD working face 3 in the system comprises three micro-mirror scanning units 3-0, namely a 1 st micro-mirror scanning unit 3-1 of the DMD working face, a middle micro-mirror scanning unit 3-2 of the DMD working face and a last 1 micro-mirror scanning unit 3-3 of the DMD working face; the selected linear micromirror array 4 includes three linear micromirror units 4-0, namely, the 1 st linear micromirror unit 4-1 of the linear micromirror array, the middle linear micromirror unit 4-2 of the linear micromirror array, and the last 1 linear micromirror unit 4-3 of the linear micromirror array. The object 1 and the DMD working surface 3 are respectively arranged at the object plane and the image plane of the imaging subsystem 2, and the object image formed by the object 1 passing through the imaging subsystem 2 is divided by the micromirror scanning units of the DMD working surface 3 according to columns. The linear micromirror array 4 is located in the light emitting direction when the micromirror scanning units of the DMD working surface 3 are in the deflection working state, the number of the linear micromirror units in the linear micromirror array 4 is the same as that of the micromirror scanning units of the DMD working surface 3, when each micromirror scanning unit of the DMD working surface 3 is in the deflection working state, the target image of the corresponding column must be reflected to the corresponding linear micromirror unit in the linear micromirror array 4, and meanwhile, the light passing through the center of each micromirror scanning unit of the DMD working surface 3 is required to pass through the center of the corresponding linear micromirror unit in the linear micromirror array 4, for example, the light 8 passing through the center of the 1 st micromirror scanning unit of the DMD working surface, the light 9 passing through the center of the middle micromirror scanning unit of the DMD working surface and the light 10 passing through the center of the last 1 st micromirror scanning unit of the DMD working surface pass through the centers of the 1 st linear micromirror unit 4-1, the middle linear micromirror unit 4-2 and the last 1 linear micromirror unit 4-3, respectively. By changing the deflection angle of each linear micromirror unit in the linear micromirror array 4, the outgoing light passing through the center of each linear micromirror unit can enter the spectroscopic subsystem 6 at the same position, i.e. the fixed point M5. The light entering the beam splitting subsystem 6 will be collimated, dispersed and focused and the resulting dispersed spectrum will be imaged at the same location on the detector face 7.
In fig. 2, the imaging subsystem 2 employs telescopic lenses responsible for converging the reduced image of the target 1 on the DMD working surface 3.
The DMD working surface 3 is rectangular, referring to fig. 3, and is formed by a DMD micromirror array, the column number and the row number of the DMD micromirror array are a=1024 and b=768, the width of each micromirror is d=13.68 μm, the image of the object 1 is divided into 341 columns by the micromirror scanning units of the DMD working surface 3, n=170, each micromirror scanning unit comprises m=3 columns of micromirrors, the width of each micromirror scanning unit is md=41.04 μm, and m (2n+1) is less than or equal to a. The center of the 171 th micro mirror scanning unit is the point P, then the center of the i th micro mirror scanning unit is the point P i (i is a positive integer, i.e. [1,341 ]]). Each micromirror only has positive and negative deflection states with the same deflection angle and opposite directions, and the deflection angle is +/-12 degrees. Selecting a deflection state with a deflection angle of 12 degrees as an ON working state, wherein a micromirror scanning unit in the ON working state can reflect a selected target image to the linear micromirror array 4; the other deflection state is referred to as the "OFF" state, in which the micromirror scanning unit is responsible for reflecting the selected target image out of the spectral imaging system.
The linear micromirror array 4 is a MEMS-technology-based elongated scanning micromirror array, referring to fig. 4, the linear micromirror array 4 includes 341 linear micromirror units, n=170, each linear micromirror unit has a width of t=90 μm, the center of the 171 th linear micromirror unit is point Q, and the center of the i-th linear micromirror unit is point Q i (i is a positive integer, i.e. [1,341 ]]). Referring to fig. 5, the extension line of the plane where the dmd working surface 3 and the linear micromirror array 4 are located intersects with the O point, so that an included angle is α=40°, the length of OP is p=188 cm, and the length of oq is q=141 cm; when the ith linear micro mirror unit in the linear micro mirror array 4 is in an ON working state, the deflection angle is theta i Light from the center of an ith micro mirror scanning unit in the working surface 3 of the DMD is reflected to a fixed point M5, an included angle formed by MP and PO is beta=25 degrees, and the length of MP is l=109 cm; according to the five known parameters, an intermediate variable OP is introduced i Q i ＝ω i 、Sum +.P i Q i M＝γ i Then theta is i The solving method of (2) is as follows:
wherein:
the fixed point M5 is the intersection point of all outgoing rays passing through the center of the linear micromirror unit in the ON state in the linear micromirror array 4.
The optical splitting subsystem 6 comprises a collimating element, a dispersing element and a focusing element, and is responsible for collimating, dispersing and focusing incoming light rays, and the optical axis of the optical splitting subsystem 6 is required to pass through the fixed point M5.
The detector working face 7 is located at the image plane position of the light splitting subsystem 6 and is responsible for collecting the dispersion spectrum emitted by the light splitting subsystem 6, and the surface type of the detector working face 7 is a common detector surface type in the market.
The light ray 8 passing through the center of the 1 st micro mirror scanning unit of the DMD working surface passes through the center of the 1 st micro mirror scanning unit 3-1 of the DMD working surface 3, the center of the 1 st linear micro mirror unit 4-1 of the linear micro mirror array 4 and the fixed point M5 respectively.
The light 9 passing through the center of the middle micromirror scanning unit of the DMD working surface passes through the center of the middle micromirror scanning unit 3-2 of the DMD working surface 3, the center of the middle linear micromirror unit 4-2 of the linear micromirror array 4 and the fixed point M5, respectively.
The light 10 passing through the center of the last 1 micro mirror scanning unit of the DMD working surface passes through the center of the last 1 micro mirror scanning unit 3-3 of the DMD working surface 3, the center of the last 1 linear micro mirror unit 4-3 of the linear micro mirror array 4 and the fixed point M5 respectively.
The spectrum acquisition principle of the spectrum imaging method based on the DMD and the linear micro mirror array is shown in figure 6. By controlling 341 micromirror scanning units and 341 linear micromirror units to be in an ON working state in sequence at the same time, the column scanning of the target image is realized, 341 dispersion spectrograms are obtained at the same position of the detector working face 7, and the acquisition of the target three-dimensional data cube is completed. The invention provides a spectrum acquisition principle process of a spectrum imaging method based on a DMD, which specifically comprises the following steps:
step 1: referring to fig. 6, the 1 st micromirror scanning unit of the DMD working surface 3 and the 1 st linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON working state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the 1 st line of light of the target image is reflected by the 1 st micromirror scanning unit and the 1 st linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 through the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7; referring to fig. 7, a direction of spectral dispersion is defined as an X-axis direction, and a Y-axis direction perpendicular to the direction is a spatial position direction; the spectrum of the 1 st column of target image is sequentially unfolded along the X-axis direction according to different wavelengths, and spectrum components corresponding to different space positions are obtained in the Y-axis direction; the detector working face 7 records and stores a dispersion spectrogram of the 1 st column of target image, deflection work of the 1 st micro mirror scanning unit and the 1 st line type micro mirror unit is finished, and spectral imaging of the 1 st column of target image is completed;
step 2: referring to fig. 6, the 2 nd micromirror scanning unit of the DMD working surface 3 and the 2 nd linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON working state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the light of the 2 nd target image is reflected by the 2 nd micromirror scanning unit and the 2 nd linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 through the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7; referring to fig. 8, although the target image is shifted in the horizontal direction, the position of the dispersion spectrum on the detector working surface 7 is not changed; the detector working face 7 records and stores the dispersion spectrogram at the moment, the deflection work of the 2 nd micro-mirror scanning unit and the 2 nd linear micro-mirror unit is finished, and the spectral imaging of the 2 nd column of target images is completed;
step 3: the 3 rd and 4 … … th micro mirror scanning units of the DMD working face 3 and the 3 rd and 4 … … th linear micro mirror units of the linear micro mirror array 4 are controlled to be simultaneously in an ON working state in sequence, the detector working face 7 synchronously records and stores corresponding dispersion spectrograms, and the spectral imaging of the 3 rd and 4 … … th target images is completed;
step 4: referring to fig. 6, the 2n+1 th micromirror scanning unit of the DMD working surface 3 and the 341 th linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON working state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the light of the 341 th target image is reflected by the 341 th micromirror scanning unit and the 341 th linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 from the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7; referring to fig. 9, since the spatial positions of the target images in different columns are unchanged in the spectral position in the X-axis direction, spectral imaging of the whole target can be completed as long as the detector working surface 7 is ensured to completely collect the dispersion spectrum of any one column of target image; the detector working face 7 records and stores the dispersion spectrogram at the moment, the deflection work of the 341 th micro mirror scanning unit and the 341 th linear micro mirror unit is finished, and the spectrum imaging of the 341 th target image is completed;
step 5: the 341 dispersion spectrograms collected by the detector working face 7 are subjected to data processing to obtain two-dimensional space scene and one-dimensional spectrum information of the target 1, namely a complete three-dimensional data cube, and the spectrum collection process of the spectrum imaging method based on the DMD and the linear micro mirror array provided by the invention is finished.
Embodiment two:
referring to fig. 2, the spectral imaging system based on the DMD and the linear micromirror array provided in this embodiment mainly includes a target 1, an imaging subsystem 2, a DMD working surface 3, a DMD working surface 1 st micromirror scanning unit 3-1, a DMD working surface middle micromirror scanning unit 3-2, a DMD working surface last 1 micromirror scanning unit 3-3, a linear micromirror array 4, a linear micromirror array 1 st linear micromirror unit 4-1, a linear micromirror array middle linear micromirror unit 4-2, a linear micromirror array last 1 linear micromirror unit 4-3, a fixed point M5, a beam splitting subsystem 6, a detector working surface 7, a light ray 8 passing through the DMD working surface 1 st micromirror scanning unit center, a light ray 9 passing through the DMD working surface middle micromirror scanning unit center, and a light ray 10 passing through the DMD working surface last 1 micromirror scanning unit center. The object 1 and the DMD working surface 3 are respectively arranged at the object plane and the image plane of the imaging subsystem 2, and the object image formed by the object 1 passing through the imaging subsystem 2 is divided by the micromirror scanning units of the DMD working surface 3 according to columns. The linear micromirror array 4 is located in the light emitting direction when the micromirror scanning units of the DMD working surface 3 are in the deflection working state, the number of the linear micromirror units in the linear micromirror array 4 is the same as that of the micromirror scanning units of the DMD working surface 3, when each micromirror scanning unit of the DMD working surface 3 is in the deflection working state, the target image of the corresponding column must be reflected to the corresponding linear micromirror unit in the linear micromirror array 4, and meanwhile, the light passing through the center of each micromirror scanning unit of the DMD working surface 3 is required to pass through the center of the corresponding linear micromirror unit in the linear micromirror array 4, for example, the light 8 passing through the center of the 1 st micromirror scanning unit of the DMD working surface, the light 9 passing through the center of the middle micromirror scanning unit of the DMD working surface and the light 10 passing through the center of the last 1 st micromirror scanning unit of the DMD working surface pass through the centers of the 1 st linear micromirror unit 4-1, the middle linear micromirror unit 4-2 and the last 1 linear micromirror unit 4-3, respectively. By changing the deflection angle of each linear micromirror unit in the linear micromirror array 4, the outgoing light passing through the center of each linear micromirror unit can enter the spectroscopic subsystem 6 at the same position, i.e. the fixed point M5. The light entering the beam splitting subsystem 6 will be collimated, dispersed and focused and the resulting dispersed spectrum will be imaged at the same location on the detector face 7.
The imaging subsystem 2 is a microscope lens and is responsible for converging the amplified image of the target 1 on the DMD working surface 3.
The DMD working surface 3 is rectangular, referring to fig. 3, and is formed by a micromirror array, wherein the columns and rows of the micromirror array are a=1024 and b=768, the width of each micromirror is d=13.68 μm, the image of the object 1 is divided into 511 columns by the micromirror scanning units of the DMD working surface 3, n=255, each micromirror scanning unit comprises m=2 columns of micromirrors, the width of each micromirror scanning unit is md=27.36 μm, and m (2n+1) is less than or equal to a. The center of the 256 th micro mirror scanning unit is point P, and the center of the i th micro mirror scanning unit is P i (i is a positive integer, i.e. [1,511 ]]). Each micromirror only has positive and negative deflection states with the same deflection angle and opposite directions, and the deflection angle is +/-12 degrees. Selecting a deflection state with a deflection angle of 12 degrees as an ON working state, wherein a micromirror scanning unit in the ON working state can reflect a selected target image to the linear micromirror array 4; the other deflection state is referred to as the "OFF" state, in which the micromirror scanning unit is responsible for reflecting the selected target image out of the system.
The linear micromirror array 4 is a MEMS-technology-based elongated scanning micromirror array, referring to fig. 4, the linear micromirror array 4 includes 511 linear micromirror units, n=255, each linear micromirror unit has a width of t=20 μm, the center of the 256 th linear micromirror unit is a point Q, and the center of the i th linear micromirror unit is Q i (i is a positive integer, i.e. [1,511 ]]). Referring to fig. 10, the extending line of the plane where the dmd working surface 3 and the linear micromirror array 4 are located intersects with the O point, so that an included angle is α= -14 °, the length of the OP is p=95.6cm, and the length of the oq is q=127.5 cm. When the ith linear micro mirror unit in the linear micro mirror array 4 is in an ON working state, the deflection angle is theta i Light from the center of the ith micro mirror scanning unit in the DMD working surface 3 is reflected to a fixed point M5, an included angle formed by MP and PO is β= 152.85 °, and the length of MP is l=35 cm. According to the five known parameters, an intermediate variable OP is introduced i Q i ＝ω i 、Sum +.P i Q i M＝γ i ，θ i Solution to (2)The method comprises the following steps:
wherein:
the fixed point M5 is the intersection point of all outgoing light rays passing through the center of the linear micromirror unit in the ON state in the linear micromirror array 4.
The optical splitting subsystem 6 comprises a collimating element, a dispersing element and a focusing element, and is responsible for collimating, dispersing and focusing incoming light rays, and the optical axis of the optical splitting subsystem 6 is required to pass through the fixed point M5.
The detector working face 7 is located at the image plane position of the light splitting subsystem 6 and is responsible for collecting the dispersion spectrum emitted by the light splitting subsystem 6, and the surface type of the detector working face 7 is a common detector surface type in the market.
The light ray 8 passing through the center of the 1 st micro mirror scanning unit of the DMD working surface passes through the center of the 1 st micro mirror scanning unit 3-1 of the DMD working surface 3, the center of the 1 st linear micro mirror unit 4-1 of the linear micro mirror array 4 and the fixed point M5 respectively.
The light 9 passing through the center of the middle micromirror scanning unit of the DMD working surface passes through the center of the middle micromirror scanning unit 3-2 of the DMD working surface 3, the center of the middle linear micromirror unit 4-2 of the linear micromirror array 4 and the fixed point M5, respectively.
The light 10 passing through the center of the last 1 micro mirror scanning unit of the DMD working surface passes through the center of the last 1 micro mirror scanning unit 3-3 of the DMD working surface 3, the center of the last 1 linear micro mirror unit 4-3 of the linear micro mirror array 4 and the fixed point M5 respectively.
The spectrum acquisition principle of the spectrum imaging method based on the DMD and the linear micro mirror array is shown in figure 6. By controlling 511 micromirror scanning units and 511 linear micromirror units to be in an ON working state in sequence at the same time, the column scanning of the target image is realized, 511 dispersion spectrograms are obtained at the same position of the detector working face 7, and the acquisition of the target three-dimensional data cube is completed. The invention provides a spectrum acquisition principle process of a spectrum imaging method based on a DMD, which specifically comprises the following steps:
step 1: referring to fig. 6, the 1 st micromirror scanning unit of the DMD working surface 3 and the 1 st linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON working state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the 1 st line of light of the target image is reflected by the 1 st micromirror scanning unit and the 1 st linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 through the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7. Referring to fig. 7, the direction of spectral dispersion is defined as the X-axis direction, and the Y-axis direction perpendicular to this direction is the spatial position direction. The spectrum of the 1 st column of target image is sequentially unfolded along the X-axis direction according to different wavelengths, and spectrum components corresponding to different space positions are obtained in the Y-axis direction. The detector working face 7 records and stores a dispersion spectrogram of the 1 st column of target image, deflection work of the 1 st micro mirror scanning unit and the 1 st line type micro mirror unit is finished, and spectral imaging of the 1 st column of target image is completed;
step 2: referring to fig. 6, the 2 nd micromirror scanning unit of the DMD working surface 3 and the 2 nd linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the light of the 2 nd target image is reflected by the 2 nd micromirror scanning unit and the 2 nd linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 through the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7. Referring to fig. 8, although the target image is shifted in the horizontal direction, the position of the dispersion spectrum on the detector working surface 7 is not changed. The detector working face 7 records and stores the dispersion spectrogram at the moment, the deflection work of the 2 nd micro-mirror scanning unit and the 2 nd linear micro-mirror unit is finished, and the spectral imaging of the 2 nd column of target images is completed;
step 3: the 3 rd and 4 … … th micro mirror scanning units of the DMD working face 3 and the 3 rd and 4 … … th linear micro mirror units of the linear micro mirror array 4 are controlled to be simultaneously in an ON working state in sequence, the detector working face 7 synchronously records and stores corresponding dispersion spectrograms, and the spectral imaging of the 3 rd and 4 … … th column target images is completed;
step 4: referring to fig. 6, the 511 th micromirror scanning unit of the DMD working surface 3 and the 511 th linear micromirror unit of the linear micromirror array 4 are controlled to be in an ON working state at the same time, the other micromirror scanning units and the other linear micromirror units are in an OFF state, the 511 th light of the target image is reflected by the 511 th micromirror scanning unit and the 511 th linear micromirror unit in sequence, and finally enters the spectroscopic subsystem 6 through the fixed point M5, and the obtained dispersion spectrum is converged ON the detector working surface 7. Referring to fig. 9, since the spatial positions of the target images in different columns are unchanged in the spectral position in the X-axis direction, spectral imaging of the entire target can be completed as long as the detector working surface 7 is ensured to be able to completely collect the dispersion spectrum of any one column of the target image. The detector working face 7 records and stores the dispersion spectrogram at the moment, the deflection work of the 511 th micro-mirror scanning unit and the 511 th linear micro-mirror unit is finished, and the spectrum imaging of the 511 th column target image is completed;
step 5: the 511 dispersion spectrograms collected by the detector working face 7 are subjected to data processing to obtain two-dimensional space scene and one-dimensional spectrum information of the target 1, namely a complete three-dimensional data cube, and the spectrum collection process of the spectrum imaging method based on the DMD and the linear micro mirror array provided by the invention is finished.
Claims (7)
1. A spectral imaging system based on a DMD and a linear micromirror array, characterized in that: the system comprises a target (1), an imaging subsystem (2), a DMD working surface (3), a plurality of micromirror scanning units (3-0) positioned on the DMD working surface (3), a linear micromirror array (4), a fixed point M (5), a light splitting subsystem (6) and a detector working surface (7), wherein the linear micromirror array (4) comprises a plurality of linear micromirror units (4-0), and the number of the linear micromirror units (4-0) is the same as that of the micromirror scanning units (3-0), wherein:
the object (1) and the imaging subsystem (2) are respectively positioned at the object plane and the image plane of the DMD working surface (3), and the object (1) formed by the object (1) passing through the imaging subsystem (2) is divided by the micro mirror scanning units (3-0) of the DMD working surface (3) according to the rows;
the linear micro mirror array (4) is positioned on the DMD working surface (3) in the emergent direction of light rays when each micro mirror scanning unit (3-0) is in a deflection working state, when each micro mirror scanning unit (3-0) on the DMD working surface (3) is in a deflection working state, an object (1) image of a corresponding column must be reflected to a corresponding linear micro mirror unit in the linear micro mirror array (4), and the light rays passing through the center of each micro mirror scanning unit (3-0) on the DMD working surface (3) also pass through the center of a corresponding linear micro mirror unit (4-0) in the linear micro mirror array (4);
by changing the deflection angle of each linear micro mirror unit (4-0) in the linear micro mirror array (4), the emergent light passing through the center of each linear micro mirror unit (4-0) is converged to a fixed point M (5) and enters into a light splitting subsystem (6);
the light entering the sub-system (6) is collimated, dispersed and focused, and finally the obtained dispersed spectrum is imaged at the same position of the detector working surface (7).
2. A DMD and linear micromirror array based spectral imaging system as in claim 1 wherein: the imaging subsystem (2) is a telescope lens or a microscope lens.
3. A spectral imaging system based on a DMD and a linear micromirror array according to claim 1 or claim 2, characterized in that: the DMD working face (3) is formed by a DMD micro-mirror array, the column number and the row number of the DMD micro-mirror array are respectively a and b, each DMD micro-mirror array is formed by a plurality of micro-mirror scanning units (3-0), each micro-mirror scanning unit (3-0) comprises m rows of micro-mirrors, the width of each row of micro-mirrors is d, and the width of each row of micro-mirror scanning units (3-0) is md and meets the requirements; each row of micromirrors only has two deflection states of positive and negative with the same deflection angle and opposite directions, one deflection state is selected as an ON working state, and a micromirror scanning unit (3-0) in the ON working state can reflect a selected target (1) image to a linear micromirror array (4); the other deflection state is referred to as the "OFF" state, in which the micromirror scanning unit (3-0) is responsible for reflecting the selected image of the target (1) out of the spectral imaging system.
4. A DMD and linear micromirror array based spectral imaging system as in claim 1 wherein: the linear micromirror array (4) is a long-strip scanning micromirror array based on MEMS technology.
5. A DMD and linear micromirror array based spectral imaging system as in claim 1 wherein: the spectroscopic subsystem (6) comprises a collimating element, a dispersing element and a focusing element.
6. A DMD and linear micromirror array based spectral imaging system as in claim 1 wherein: the detector working face (7) is located at the image plane position of the light splitting subsystem (6) and is used for collecting the dispersion spectrum emitted by the light splitting subsystem (6).
7. A spectrum imaging method based on DMD and linear micro mirror array is characterized in that: the method comprises the following steps:
step 1: the 1 st micro mirror scanning unit (3-0) and the 1 st linear micro mirror unit (4-0) of the corresponding linear micro mirror array (4) ON the DMD working surface (3) are controlled to be in an ON working state at the same time, the rest micro mirror scanning units (3-0) and the rest linear micro mirror units (4-0) of the linear micro mirror array (4) ON the DMD working surface (3) are controlled to be in an OFF state, light rays of the 1 st column of target images are reflected by the 1 st micro mirror scanning unit (3-0) and the 1 st linear micro mirror unit (4-0) in sequence, then converged to a fixed point M (5) and enter a light splitting subsystem (6), the obtained dispersion spectrum is converged ON a detector working surface (7), the detector working surface (7) records and stores a dispersion spectrum chart at the moment, and the deflection work of the 1 st micro mirror scanning unit (3-0) and the 1 st linear micro mirror unit (4-0) is finished, so that the spectral imaging of the 1 st column of target images is completed;
step 2: the 2 nd micro mirror scanning unit (3-0) of the DMD working surface (3) and the 2 nd linear micro mirror unit (4-0) of the corresponding linear micro mirror array (4) are controlled to be in an ON working state simultaneously, the other micro mirror scanning units (3-0) and the other linear micro mirror units (4-0) are in an OFF working state, light rays of the 2 nd row of target images are reflected by the 2 nd micro mirror scanning unit (3-0) and the 2 nd linear micro mirror unit (4-0) in sequence, finally, the obtained dispersion spectrum enters the light splitting subsystem (6) through the fixed point M (5), the obtained dispersion spectrum is converged ON the detector working surface (7), the dispersion spectrum at the moment is recorded and stored by the detector working surface (7), and the deflection working of the 2 nd micro mirror scanning unit (3-0) and the 2 nd linear micro mirror unit (4-0) is finished, so that the spectrum imaging of the 2 nd row of target images is completed;
step 3: the 3 rd and 4 … … N micro mirror scanning units (3-0) of the DMD working face (3) and the 3 rd and 4 … … N linear micro mirror units (4-0) of the corresponding linear micro mirror array (4) are respectively controlled to be simultaneously in an ON working state in sequence, and the detector working face (7) synchronously records and stores corresponding dispersion spectrograms to finish spectral imaging of 3 rd and 4 … … 2N column target images;
step 4: the 2N+1st micro mirror scanning unit (3-0) of the DMD working surface (3) and the 2N+1st linear micro mirror unit (4-0) of the corresponding linear micro mirror array (4) are controlled to be in an ON working state at the same time, other micro mirror scanning units (3-0) and other linear micro mirror units (4-0) are in an OFF working state, light rays of 2N+1st column target images are reflected by the 2N+1st micro mirror scanning unit (3-0) and the 2N+1st linear micro mirror unit (4-0) in sequence, finally, the obtained dispersion spectrum enters the beam splitting subsystem (6) from the fixed point M (5) and is converged ON the detector working surface (7), the dispersion spectrum images recorded and stored ON the detector working surface (7), and the deflection work of the 2N+1st micro mirror scanning unit (3-0) and the 2N+1st linear micro mirror unit (4-0) is finished, and imaging of the 2N+1st column target images is completed;
step 5: and carrying out data processing on 2N+1 dispersion spectrograms acquired by the detector working face (7) to obtain two-dimensional space scene and one-dimensional spectrum information of the target (1), namely a complete three-dimensional data cube.
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