CN114109752A - Shape memory alloy driving element - Google Patents

Shape memory alloy driving element Download PDF

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Publication number
CN114109752A
CN114109752A CN202111313598.6A CN202111313598A CN114109752A CN 114109752 A CN114109752 A CN 114109752A CN 202111313598 A CN202111313598 A CN 202111313598A CN 114109752 A CN114109752 A CN 114109752A
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shape memory
memory alloy
section
annealing treatment
driving
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CN114109752B (en
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金明江
李雅
陈琦文
田文迪
金学军
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/006Resulting in heat recoverable alloys with a memory effect
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • C22F1/183High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon

Abstract

The invention provides a shape memory alloy driving element which is made of a shape memory alloy material and comprises a driving execution section and a constraint section, wherein the shape memory alloy in the driving execution section has a crystal structure, and the shape memory alloy in the constraint section has an amorphous/crystal complex phase structure. The invention further provides a processing technology of the shape memory alloy driving element. The shape memory alloy driving element provided by the invention has a dual microstructure, can be used for intelligent execution devices such as a thermostatic valve and a high-temperature alarm, realizes accurate control from millimeter level to micron level, and provides a key element material for microelectronic devices, minimally invasive surgery instruments and micro/nano medical robots.

Description

Shape memory alloy driving element
Technical Field
The invention belongs to the field of alloy materials, relates to a shape memory alloy driving element, and particularly relates to a shape memory alloy driving element and a processing technology thereof.
Background
With the increasing demand for miniaturization of sensing and executing devices in the fields of aerospace, precision machinery, consumer electronics, medical instruments, robots and the like, a series of mechanical-functional integrated intelligent materials are developed for miniature executing elements. Among them, shape memory alloys integrate displacement & temperature sensing and large strain actuation functions, and shape memory alloy torsion springs and linear motion actuators are now effective alternatives to electric motors in terms of motoring and braking because they have the inherent potential to achieve mass and volume savings not achievable by traditional actuators.
The shape memory alloy intelligent executive device is used for realizing continuous and reciprocating multi-cycle work and structurally comprises a shape memory alloy executive element and a restraining unit. The shape memory alloy actuating element is usually in the form of a spring or a wire, has shape memory effect, and sets the working temperature T0When the temperature is higher than T0When the shape memory alloy element is in the martensite reverse phase transformation state, the stress/strain is output; when the temperature is reduced to T0Thereafter, the shape memory alloy element material undergoes a martensitic transformation and re-enters the martensitic soft state, at which point a restraining force is required to restore the shape memory alloy element to its pre-operative state and position. Existing actuators typically use a spring or reed to provide the restraining force.
However, in the design process of the shape memory alloy intelligent executive device, the design and selection of the spring or the reed often cause troubles, and have several problems: 1) the volume of the intelligent executive device system cannot be further reduced, and the maximum advantage of the shape memory alloy intelligent executive device is weakened; 2) the corresponding form of mechanics of the spring has fundamental defects, and particularly, in a low strain mode, the stress and the displacement are not linear; when the strain exceeds a certain value, the spring is easy to fatigue, the mechanical behavior of the spring is correspondingly attenuated, and the attenuation cannot be matched with the million-level cycle life of the shape memory alloy element, so that the action precision of the actuator is influenced; 3) the structural design of the reed is very complex, and the cost is high; 4) the connection of the shape memory alloy element to the spring or reed, i.e. the connection of the foreign element, presents a huge bottleneck, especially in the field of micro-actuators.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a shape memory alloy actuator having a dual microstructure and capable of functioning as a thermally driven smart actuator.
To achieve the above and other related objects, a first aspect of the present invention provides a shape memory alloy actuator element made of a Shape Memory Alloy (SMA) material, including an actuator section in which the shape memory alloy has a crystalline structure and a constraining section in which the shape memory alloy has an amorphous/crystalline complex phase structure.
Preferably, the shape memory alloy material is one of a titanium-nickel based shape memory alloy or a titanium-nickel-copper based shape memory alloy.
More preferably, the titanium content in the titanium-nickel based shape memory alloy is 48.5-51.5%.
More preferably, the titanium content in the titanium-nickel-copper-based shape memory alloy is 48.5-51.5%, and the copper content is less than or equal to 8%.
Preferably, the driving execution section and the constraint section are sequentially arranged along a straight line direction, and the length ratio of the driving execution section to the constraint section is 1: 2-1: 5.
Preferably, the elastic modulus of the crystal structure is 75-90 GPa.
Preferably, the effective effect of the crystal structure becomes 7-9%. More preferably, the effective strain of the crystal structure is 8%.
Preferably, the amorphous/crystalline complex phase structure has an elastic modulus of 40 to 65 GPa.
Preferably, the amorphous/crystalline complex phase structure has an effective strain of 4-5%. More preferably, the amorphous/crystalline complex phase structure has an effective strain of 4%.
In a second aspect, the present invention provides a process for manufacturing a shape memory alloy driving element, comprising the following steps:
1) carrying out continuous cold drawing on the shape memory alloy wire to obtain shape memory alloy fiber, wherein in a plurality of cold drawing processes, the first annealing treatment is carried out between two adjacent processes so as to enable the shape memory alloy fiber to form an amorphous/crystal complex phase structure;
2) and then dividing the shape memory alloy fiber into a driving execution section and a constraint section, carrying out gradient heat treatment, carrying out secondary annealing treatment on the driving execution section to form a crystal structure, and carrying out water cooling treatment on the constraint section to keep an amorphous/crystal complex phase structure, thus obtaining the shape memory alloy driving element.
Preferably, in step 1), the continuous cold drawing reduces the diameter of the wire into fibers by cold drawing before the continuous cold drawing.
Preferably, in step 1), the diameter of the shape memory alloy fiber is less than or equal to 2 mm.
Preferably, in the step 1), the number of times of processing in a single cold drawing process is 3-6.
Preferably, in the step 1), in the continuous cold drawing, the reduction ratio of the last cold drawing process is 7-12%, and the reduction ratios of the cold drawing processes except the last cold drawing process are 4-9%.
More preferably, the first annealing treatment is not performed after the last cold drawing step.
Preferably, in step 1), the first annealing treatment is an annealing treatment under a protective atmosphere. The protective atmosphere is argon.
Preferably, in the step 1), the temperature of the first annealing treatment is 350-550 ℃.
Preferably, in the step 1), the time of the first annealing treatment is 20-50 s. More preferably, the time of the first annealing treatment is 30 to 40 s.
Preferably, in step 1), the strength of the amorphous/crystalline complex phase structure is more than or equal to 1800 MPa.
Preferably, in the step 1), the strain amount of the amorphous/crystalline complex phase structure is more than or equal to 4%.
Preferably, in the step 2), the temperature of the second annealing treatment is 450-750 ℃, and the time of the second annealing treatment is 30 minutes to 12 hours.
Preferably, in step 2), the second annealing treatment is an annealing treatment under a protective atmosphere. The protective atmosphere is argon.
Preferably, in the step 2), the water cooling treatment temperature is less than or equal to 120 ℃.
The third aspect of the present invention provides the use of the shape memory alloy driving element described above in the manufacture of a smart actuator device.
Preferably, the intelligent execution device is a thermostatic valve or a high-temperature alarm.
Preferably, in the intelligent executing device, the length of the shape memory alloy driving element is more than or equal to 2 cm.
Preferably, in the intelligent actuator, the prestrain amount of the shape memory alloy driving element is 2-6% of the whole length of the shape memory alloy driving element.
Preferably, in the intelligent actuator, the stroke of the driving actuating section of the shape memory alloy driving element is 0.5-3% of the whole length of the driving actuating section.
Preferably, in the intelligent executing device, the positioning displacement precision of the driving executing section of the shape memory alloy driving element is more than or equal to 90%.
Preferably, in the intelligent execution device, the energization amount of the shape memory alloy driving element is 1-3Hz pulse energization, the energization time is 0.07-0.10s, and the current value is 50-300 mA.
As described above, the shape memory alloy driving element provided by the present invention has the following beneficial effects:
(1) the shape memory alloy driving element provided by the invention is used as a shape memory alloy fiber, a complex phase structure is obtained by precision cold processing, and a dual microstructure is obtained by gradient heat treatment, wherein the driving execution section is of a traditional polycrystalline structure, has a shape memory effect and plays a role in temperature sensing execution; the restraint section is of an amorphous/nanocrystalline complex phase structure, has high strength and linear elasticity, and plays a role in restraining and restoring as well as strain sensing and feedback.
(2) The shape memory alloy driving element provided by the invention sets the working temperature through the driving execution section, and can be used for monitoring the displacement change through the constraint section having single resistance-strain correlation, namely, the displacement-resistance single linear relation.
(3) The shape memory alloy driving element provided by the invention can be used for thermal driving intelligent execution devices such as a thermostatic valve, a high-temperature alarm and the like, realizes accurate control from millimeter level to micron level, and provides a key element material for microelectronic devices, minimally invasive surgical instruments and micro/nano medical robots.
Drawings
FIG. 1 is a photograph showing the texture of an amorphous/crystalline complex phase structure obtained by cold drawing in the present invention.
FIG. 2 is a schematic diagram of a gradient heat treatment of a shape memory alloy actuator according to the present invention.
FIG. 3 is a diagram showing the driving effect of the shape memory alloy driving element according to the present invention.
FIG. 4 is a graph showing the effect of drawing a shape memory alloy wire of the present invention on reducing the diameter of the wire.
FIG. 5 is a diagram showing the unit output power of the shape memory alloy driving device according to the present invention.
Detailed Description
The present invention is further illustrated below with reference to specific examples, which are intended to be illustrative only and not to limit the scope of the invention.
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
A first aspect of the invention provides a shape memory alloy drive element made from a shape memory alloy material, comprising a drive actuation section in which the shape memory alloy has a crystalline structure and a constraining section in which the shape memory alloy has an amorphous/crystalline complex phase structure.
In a preferred embodiment, the shape memory alloy material is one of a titanium nickel based shape memory alloy or a titanium nickel copper based shape memory alloy. The shape memory alloy has a heat driving function.
Further, the titanium content in the titanium-nickel-based shape memory alloy is 48.5-51.5%.
Furthermore, the titanium content in the titanium-nickel-copper-based shape memory alloy is 48.5-51.5%, and the copper content is less than or equal to 8%.
In a preferred embodiment, as shown in fig. 3, the driving execution section and the constraint section are sequentially arranged along a straight line direction, and the length ratio of the driving execution section to the constraint section is 1:2 to 1: 5.
In a preferred embodiment, the crystal structure is a perfect crystal structure with a grain size between 0.1 and 30 microns. The crystal structure has shape memory effect and plays a role in temperature sensing execution.
In a preferred embodiment, the elastic modulus of the crystal structure is 75-90 GPa.
In a preferred embodiment, the effective variation of the crystal structure is 7-9%, preferably 8%.
In a preferred embodiment, as shown in fig. 1, the amorphous/crystalline complex phase structure refers to two configurations of a crystalline structure whose microstructure includes an amorphous matrix and dispersed grains, wherein the grains are nanocrystalline with a size below 50 nm. The amorphous/crystalline complex phase structure has high strength and linear elasticity, and plays a role in restraining and recovering, and also plays a role in strain sensing and feedback. In addition, the amorphous/crystal complex phase structure has a single linear displacement-resistance relation and can be used for monitoring displacement change.
In a preferred embodiment, the amorphous/crystalline complex phase structure has an elastic modulus of 40 to 65 GPa.
In a preferred embodiment, the amorphous/crystalline complex phase structure has an effective strain of 4-5%, preferably 4%.
As shown in FIG. 2, a second aspect of the present invention provides a process for manufacturing a shape memory alloy actuator, comprising the steps of:
1) carrying out continuous cold drawing on the shape memory alloy wire to obtain shape memory alloy fiber, wherein in a plurality of cold drawing processes, the first annealing treatment is carried out between two adjacent processes so as to enable the shape memory alloy fiber to form an amorphous/crystal complex phase structure;
2) and then dividing the shape memory alloy fiber into a driving execution section and a constraint section, carrying out gradient heat treatment, carrying out secondary annealing treatment on the driving execution section to form a crystal structure, and carrying out water cooling treatment on the constraint section to keep an amorphous/crystal complex phase structure, thus obtaining the shape memory alloy driving element.
In a preferred embodiment, step 1) the continuous cold drawing reduces the diameter of the wire into fibers by cold drawing prior to the continuous cold drawing. The cold drawing is shown in FIG. 4, the shape memory alloy wire is passed through a special die, and the diameter of the wire is gradually reduced.
In a preferred embodiment, in step 1), the diameter of the shape memory alloy fiber is less than or equal to 2 mm.
In a preferred embodiment, in the step 1), the number of times of processing of a single cold drawing process is 3-6.
In a preferred embodiment, in step 1), the number of the continuous cold drawing steps is adjusted according to requirements.
In a preferred embodiment, in the step 1), in the continuous cold drawing, the reduction ratio of the last cold drawing process is 7-12%, and the reduction ratio of the cold drawing processes except the last cold drawing process is 4-9%. The continuous cold drawing ensures that the plastic deformation rate is not lower than a threshold value while ensuring the forming rate. The area reduction rate refers to the deformation of the wire in cold drawing deformation and is used for explaining the reduction of the area of the wire at the outlet end compared with the area of the wire at the inlet, the efficiency is low when the numerical value is too small, and the wire breakage phenomenon is easy to occur when the numerical value is too high.
Further, the first annealing treatment is not performed after the last cold drawing process.
In a preferred embodiment, in step 1), the first annealing treatment is an annealing treatment under a protective atmosphere. The protective atmosphere is argon.
In a preferred embodiment, in step 1), the temperature of the first annealing treatment is 350-550 ℃. The first annealing treatment ensures the texture and grain size of the fiber.
In a preferred embodiment, in step 1), the time of the first annealing treatment is 20 to 50s, preferably 30 to 40 s.
In a preferred embodiment, in step 1), the strength of the amorphous/crystalline complex phase structure is 1800MPa or more.
In a preferred embodiment, in step 1), the strain amount of the amorphous/crystalline complex phase structure is not less than 4%. The amorphous/crystalline complex phase structure has linear elastic characteristics.
In a preferred embodiment, in step 2), as shown in fig. 2, the length ratio of the driving execution segment to the constraint segment is 1:2 to 1: 5.
In a preferred embodiment, in step 2), as shown in fig. 2, the temperature of the second annealing treatment is 450 to 750 ℃, and the time of the second annealing treatment is 30 minutes to 12 hours. The heating time of the second annealing treatment is reduced along with the temperature rise, and the time is matched with the temperature.
In a preferred embodiment, in step 2), as shown in fig. 2, the second annealing treatment is an annealing treatment under a protective atmosphere. The protective atmosphere is argon.
In a preferred embodiment, in step 2), as shown in FIG. 2, the water cooling treatment temperature is less than or equal to 120 ℃. The confinement section is required to be kept at a low temperature so as to maintain an amorphous/crystalline complex phase structure.
In a preferred embodiment, in step 2), as shown in fig. 2, the water cooling treatment is to put the shape memory alloy material in the constrained segment into a low-temperature liquid, so that the temperature is not increased sharply and is kept at 120 ℃ or less. Specifically, the water cooling treatment may be performed in a cold water bath.
The third aspect of the present invention provides the use of the shape memory alloy driving element described above in the manufacture of a smart actuator device. As shown in fig. 3, the intelligent actuator is a temperature-controlled deformation device having intelligent sensing and executing functions in the fields of aerospace, precision machinery, consumer electronics, medical instruments, robots, and the like, and specifically, the intelligent actuator is a thermostatic valve or a high-temperature alarm.
In a preferred embodiment, in the intelligent actuating device, the length of the shape memory alloy driving element is more than or equal to 2 cm. The length of the shape memory alloy driving element is set according to the stroke requirement of the intelligent executing device.
In a preferred embodiment, the pre-strained amount of the shape memory alloy actuation element is 2-6% of its overall length in the smart actuator.
In a preferred embodiment, in the intelligent actuator, the stroke of the driving actuating section of the shape memory alloy driving element is 0.5-3% of the whole length of the driving actuating section.
In a preferred embodiment, in the intelligent executing device, the positioning displacement precision of the driving executing section of the shape memory alloy driving element is more than or equal to 90 percent. The length of the driving execution section can be regulated and controlled to reach a micron level; the drive stroke of the drive performing section may be as low as a nanometer scale.
In a preferred embodiment, in the intelligent execution device, the energization amount of the shape memory alloy driving element is 1-3Hz pulse energization, the energization time is 0.07-0.10s, and the current value is 50-300 mA.
Example 1
Selecting Ni50.2Ti49.8And (3) carrying out continuous cold drawing on the shape memory alloy wire, and reducing the diameter of the wire to form fibers, wherein the diameter of the fibers is 1 mm. And in the multiple cold drawing processes, the first annealing treatment is carried out between every two adjacent processes. Processing other cold drawing processes except the last cold drawing process at a reduction rate of 7%, processing by 3 dies in a single cold drawing process, heating in the presence of argon as a protective atmosphere in the first annealing process, and processing in the first annealing processThe annealing temperature was 450 ℃ for 30 seconds, and the wire was drawn to a fiber having a diameter of 0.2 mm. And after the final cold drawing process is carried out at the reduction ratio of 9%, the first annealing treatment is not carried out, and only the obtained shape memory alloy fiber is straightened to obtain the amorphous/crystalline complex phase structure. The strength of the amorphous/crystal complex phase structure is more than or equal to 1800MPa, and the strain is more than or equal to 4 percent.
Then, the shape memory alloy fiber is divided into a driving execution section and a restraint section, and gradient heat treatment is carried out. The driving execution section is annealed for the second time under the protection atmosphere of argon, the annealing temperature is 600 ℃, the annealing time is 1 hour, the driving execution section is crystallized, the crystal grains grow up, the crystal structure is presented, the shape memory effect is realized, and the measured phase transition temperature from the martensite to the parent phase is 62 ℃. The restraint section is placed in a cold water bath, the temperature of the restraint section is less than or equal to 120 ℃, and an amorphous/crystalline complex phase structure is kept. Thus obtaining the desired shape memory alloy drive element sample # 1. Among them, the elastic modulus of the crystal structure was 80GPa, and the effect became 8%. The amorphous/crystalline complex phase structure has an elastic modulus of 50GPa and an effective strain of 4%.
Sample 1# of the shape memory alloy driving element is intercepted, and the ratio of the lengths of the driving execution section and the constraint section is set to be 1:3. And the amount of prestrain was set to 5% of the overall length. And then connecting and fixing the shape memory alloy driving element sample No. 1 with a power supply, wherein the length of the driving execution section is 3cm, the length of the restraint section is 9cm, and the length of the pre-strain is 0.6cm (which is 5% of the whole length). And a power supply is loaded at two ends, specifically 1Hz pulse power, the power-on time is 0.1s, the current value is 300mA, the circuit is interrupted at the rest time, and the material dissipates heat and cools. The connection part of the driving execution section and the constraint section is observed to generate reciprocating motion, the cycle is performed for 100 times, the total stroke of the execution process reaches 0.12cm (which is 1 percent of the whole length), and the displacement precision reaches 91.8 percent. The details are shown in Table 1.
Example 2
Selecting Ni50.2Ti49.8And (3) carrying out continuous cold drawing on the shape memory alloy wire, and reducing the diameter of the wire to form fibers, wherein the diameter of the fibers is 1 mm. Then two adjacent cold drawing processesThe first annealing treatment is carried out between the working procedures. The other cold drawing processes except the last cold drawing process are processed at 6 percent of area reduction rate, the single cold drawing process is processed by 3 dies, the first annealing treatment is carried out by heating under the protective atmosphere of argon, the temperature of the first annealing treatment is 400 ℃, the time is 40 seconds, and the wire is drawn to the fiber with the diameter of 0.03 mm. And after the final cold drawing process is carried out at the reduction ratio of 7%, the first annealing treatment is not carried out, and only the obtained shape memory alloy fiber is straightened to obtain the amorphous/crystalline complex phase structure. The strength of the amorphous/crystal complex phase structure is more than or equal to 1800MPa, and the strain is more than or equal to 4 percent.
Then, the shape memory alloy fiber is divided into a driving execution section and a restraint section, and gradient heat treatment is carried out. The driving execution section is annealed for the second time under the protection atmosphere of argon, the annealing temperature is 560 ℃, the annealing time is 40 minutes, the driving execution section is crystallized, the crystal grains grow up, the crystal structure is presented, the shape memory effect is realized, and the measured phase transition temperature from the martensite to the parent phase is 60 ℃. The restraint section is placed in a cold water bath, the temperature of the restraint section is less than or equal to 120 ℃, and an amorphous/crystalline complex phase structure is kept. Thus obtaining the desired shape memory alloy drive element sample # 2. Wherein the elastic modulus of the crystal structure is 85GPa, and the effective strain is 9%. The amorphous/crystalline complex phase structure has an elastic modulus of 60GPa, with an effect of 5%.
Sample 2# of the shape memory alloy driving element was taken and set at a ratio of the lengths of the driving execution section and the constraining section of 1: 4. And the amount of prestrain was set to 5% of the overall length. After connecting and fixing the shape memory alloy driving element sample 2# with the power supply, the length of the driving execution section is 5mm, the length of the constraint section is 20mm, and the length of the pre-strain amount is 1.25mm (5% of the whole length). And a power supply is loaded at two ends, specifically 3Hz pulse power, the power-on time is 0.08s, the current value is 70mA, the circuit is interrupted at the rest time, and the material is cooled. The joint of the driving execution section and the constraint section is observed, the reciprocating motion is generated after 100 times of circulation, the total stroke of the execution process reaches 0.23mm (which is 0.92 percent of the whole length), and the displacement precision reaches 98.4 percent. The details are shown in Table 1.
Example 3
Selecting Ni45Ti50Cu5And carrying out continuous cold drawing on the shape memory alloy wire to reduce the diameter of the wire into fiber, wherein the diameter of the fiber is 1.5 mm. And in the multiple cold drawing processes, the first annealing treatment is carried out between every two adjacent processes. The other cold drawing processes except the last cold drawing process are processed at 6% reduction rate, the single cold drawing process is processed by 3 dies, the first annealing treatment is carried out by heating under the protective atmosphere of argon, the temperature of the first annealing treatment is 550 ℃, the time is 30 seconds, and the wire is drawn to the fiber with the diameter of 0.1 mm. And after the final cold drawing process is carried out at the reduction ratio of 8%, the first annealing treatment is not carried out, and only the obtained shape memory alloy fiber is straightened to obtain the amorphous/crystalline complex phase structure. The strength of the amorphous/crystal complex phase structure is more than or equal to 1800MPa, and the strain is more than or equal to 4 percent.
Then, the shape memory alloy fiber is divided into a driving execution section and a restraint section, and gradient heat treatment is carried out. The driving execution section is annealed for the second time under the protection atmosphere of argon, the annealing temperature is 600 ℃, the annealing time is 30 minutes, the driving execution section is crystallized, crystal grains grow up, the crystal structure is presented, the shape memory effect is realized, and the measured phase transition temperature from martensite to the parent phase is 71 ℃. The restraint section is placed in a cold water bath, the temperature of the restraint section is less than or equal to 120 ℃, and an amorphous/crystalline complex phase structure is kept. Thus obtaining the desired shape memory alloy drive element sample # 3. Wherein the elastic modulus of the crystal structure is 75GPa, and the effective strain is 7%. The amorphous/crystalline complex phase structure has an elastic modulus of 40GPa and an effective strain of 4%.
Sample 3# of the shape memory alloy driving element is intercepted, and the ratio of the lengths of the driving execution section and the constraint section is set to be 1: 3.5. And the amount of prestrain was set to 4% of the overall length. And connecting and fixing the shape memory alloy driving element sample No. 3 with a power supply, wherein the length of the driving execution section is 2cm, the length of the constraint section is 7cm, and the length of the pre-strain is 0.18cm (2% of the whole length). And a power supply is loaded at two ends, specifically 1Hz pulse power, the power-on time is 0.1s, the current value is 120mA, the circuit is interrupted at the rest time, and the material dissipates heat and cools. The connection part of the driving execution section and the constraint section is observed to generate reciprocating motion, the cycle is 100 times, the total stroke of the execution process reaches 0.07cm (which is 0.78 percent of the whole length), and the displacement precision reaches 95.9 percent. The details are shown in Table 1.
Example 4
Selecting Ni45Ti50Cu5And carrying out continuous cold drawing on the shape memory alloy wire to reduce the diameter of the wire into fiber, wherein the diameter of the fiber is 1.5 mm. And in the multiple cold drawing processes, the first annealing treatment is carried out between every two adjacent processes. The other cold drawing processes except the last cold drawing process are processed at 6% reduction rate, the single cold drawing process is processed by 3 dies, the first annealing treatment is carried out by heating under the protective atmosphere of argon, the temperature of the first annealing treatment is 550 ℃, the time is 30 seconds, and the wire is drawn to the fiber with the diameter of 0.02 mm. And after the final cold drawing process is carried out at the reduction ratio of 10%, the first annealing treatment is not carried out, and only the obtained shape memory alloy fiber is straightened to obtain the amorphous/crystalline complex phase structure. The strength of the amorphous/crystal complex phase structure is more than or equal to 1800MPa, and the strain is more than or equal to 4 percent.
Then, the shape memory alloy fiber is divided into a driving execution section and a restraint section, and gradient heat treatment is carried out. The second annealing treatment is carried out on the driving execution section under the protective atmosphere of argon, the annealing temperature is 450 ℃, the annealing time is 60 minutes, the driving execution section is crystallized, crystal grains grow up, the crystal structure is presented, the shape memory effect is achieved, and the measured phase transition temperature from the martensite to the parent phase is 70 ℃. The restraint section is placed in a cold water bath, the temperature of the restraint section is less than or equal to 120 ℃, and an amorphous/crystalline complex phase structure is kept. Thus obtaining the desired shape memory alloy drive element sample # 4. Wherein the elastic modulus of the crystal structure is 90GPa, and the effective strain is 9%. The amorphous/crystalline complex phase structure has an elastic modulus of 65GPa, with an effect of 5%.
Sample 4# of the shape memory alloy driving element is intercepted, and the ratio of the lengths of the driving execution section and the constraint section is set to be 1: 2. And the amount of prestrain was set to 6% of the overall length. And then, after the shape memory alloy driving element sample No. 4 is connected and fixed with a power supply, the length of the driving execution section is 0.4mm, the length of the constraint section is 0.8mm, and the length of the pre-strain is 0.07mm (which is 5.83% of the whole length). And a power supply is loaded at two ends, specifically 3Hz pulse power, the power-on time is 0.07s, the current value is 50mA, the circuit is interrupted at the rest time, and the material dissipates heat and cools. The joint of the driving execution section and the constraint section is observed, the reciprocating motion is generated after 100 times of circulation, the total stroke of the execution process reaches 0.02mm (1.67 percent of the whole length), and the displacement precision reaches 99.0 percent. The details are shown in Table 1.
As can be seen from table 1, the invention is based on that the shape memory alloy fiber material with amorphous/crystalline complex phase structure obtained by cold drawing deformation regulation is used as the matrix of the driving element, and researches show that, as shown in fig. 5, the shape memory alloy driving element in the invention has higher unit output work compared with the traditional shape memory alloy phase change driving element. The material has the linear elastic characteristic and the shape memory super-large recoverable strain characteristic of amorphous alloy in the strain process, has low modulus, presents spring type mechanical property, and is very suitable for being applied to the application scene of large elastic strain; meanwhile, the resistance-strain of the material is in a single linear relation, and the material has a special displacement monitoring function. After heat treatment crystallization, the material has typical heat execution/driving properties. The invention obtains the double microstructure fiber material through a unique creative process, and realizes the integration of driving and restraining. The embodiment proves that the displacement drive device is flexible in design, can realize displacement drive execution functions from millimeter to micron, has the displacement control precision of more than 90 percent, and has the advantages of higher response frequency and correspondingly higher precision as the scale of the drive element is smaller. The driving element of the invention does not need to add an additional displacement monitoring element, the volume and the cost are greatly reduced compared with the traditional device, the displacement sensing and the driving are integrated, and the material, namely the device, is really realized.
TABLE 1
Figure BDA0003342807840000101
While the invention has been described with respect to a preferred embodiment, it will be understood by those skilled in the art that the foregoing and other changes, omissions and deviations in the form and detail thereof may be made without departing from the scope of this invention. Those skilled in the art can make various changes, modifications and equivalent arrangements, which are equivalent to the embodiments of the present invention, without departing from the spirit and scope of the present invention, and which may be made by utilizing the techniques disclosed above; meanwhile, any changes, modifications and variations of the above-described embodiments, which are equivalent to those of the technical spirit of the present invention, are within the scope of the technical solution of the present invention.

Claims (10)

1. A drive element formed from a shape memory alloy material comprising a drive actuation section in which the shape memory alloy has a crystalline structure and a constraining section in which the shape memory alloy has an amorphous/crystalline complex phase structure.
2. A drive element as claimed in claim 1, wherein the shape memory alloy material is one of a titanium nickel based shape memory alloy or a titanium nickel copper based shape memory alloy.
3. The driving element according to claim 1, wherein the driving execution section and the constraint section are arranged in sequence along a straight line, and the length ratio of the driving execution section to the constraint section is 1: 2-1: 5.
4. A driving element according to claim 1, wherein said crystal structure has an elastic modulus of 75 to 90GPa, and an effective ratio of said crystal structure is 7 to 9%; the elastic modulus of the amorphous/crystalline complex phase structure is 40-65 GPa, and the effective strain of the amorphous/crystalline complex phase structure is 4-5%.
5. A process for manufacturing a drive element according to any one of claims 1 to 4, comprising the steps of:
1) carrying out continuous cold drawing on the shape memory alloy wire to obtain shape memory alloy fiber, wherein in a plurality of cold drawing processes, the first annealing treatment is carried out between two adjacent processes so as to enable the shape memory alloy fiber to form an amorphous/crystal complex phase structure;
2) and then dividing the shape memory alloy fiber into a driving execution section and a constraint section, carrying out gradient heat treatment, carrying out secondary annealing treatment on the driving execution section to form a crystal structure, and carrying out water cooling treatment on the constraint section to keep an amorphous/crystal complex phase structure, thus obtaining the shape memory alloy driving element.
6. The process for manufacturing a driving element according to claim 5, wherein in the step 1), in the continuous cold drawing, the reduction ratio of the last cold drawing step is 7-12%, and the reduction ratio of the cold drawing steps except the last cold drawing step is 4-9%.
7. The process for manufacturing a driving element according to claim 5, wherein in step 1) or 2), the first annealing treatment and/or the second annealing treatment is/are annealing treatment under a protective atmosphere, and the protective atmosphere is argon.
8. The process for manufacturing a driving element according to claim 5, wherein in the step 1), the temperature of the first annealing treatment is 350 to 550 ℃, and the time of the first annealing treatment is 20 to 50 s.
9. The process for manufacturing a driving element according to claim 5, wherein in the step 2), the temperature of the second annealing treatment is 450 to 750 ℃, and the time of the second annealing treatment is 30 minutes to 12 hours.
10. Use of a drive element according to any of claims 1-4 for the preparation of a smart actuator.
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