CN114105679B - Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same - Google Patents
Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same Download PDFInfo
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- CN114105679B CN114105679B CN202111412169.4A CN202111412169A CN114105679B CN 114105679 B CN114105679 B CN 114105679B CN 202111412169 A CN202111412169 A CN 202111412169A CN 114105679 B CN114105679 B CN 114105679B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 61
- 239000002131 composite material Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000007789 gas Substances 0.000 claims description 38
- 210000001503 joint Anatomy 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/4529—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/457—Non-superficial impregnation or infiltration of the substrate
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
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- Engineering & Computer Science (AREA)
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- Organic Chemistry (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
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Abstract
The invention relates to chemical vapor infiltration diversion equipment and a method for preparing a ceramic composite pipe fitting by using the same. The problems of density gradient, uneven performance, residual stress and the like of the ceramic composite slender pipe fitting prepared by adopting the existing chemical vapor deposition process are solved. The diversion equipment comprises a gas mixing chamber and a diversion pipe; the top of the air mixing chamber is provided with an air inlet, and the bottom of the air mixing chamber is provided with a honeycomb duct mounting hole; a plurality of first diversion holes are formed in the side wall close to the bottom of the gas mixing chamber; one end of the flow guide pipe is fixed in a flow guide pipe mounting hole of the gas mixing chamber; the duct wall is provided with a plurality of second diversion holes. The invention combines the diversion equipment with the chemical vapor infiltration furnace, can obviously improve the density uniformity of the ceramic composite material slender pipe fitting, further improve the performance uniformity and eliminate the residual stress.
Description
Technical Field
The invention relates to chemical vapor infiltration diversion equipment and a using method thereof, in particular to chemical vapor infiltration diversion equipment for preparing a ceramic composite material slender pipe fitting and a method for preparing the ceramic composite material slender pipe fitting by using the same.
Background
The chemical vapor infiltration process is a material preparation method in which one or more gaseous compounds are decomposed at high temperature and then combined, and then solid products are deposited inside a porous medium. Through decades of technical development, chemical vapor infiltration is internationally recognized as one of the best methods for continuous fiber reinforced ceramic matrix composites (hereinafter referred to as "ceramic composites").
The ceramic composite material has the comprehensive performance advantages of low density, high temperature resistance, high strength and toughness, oxidation resistance, corrosion resistance, radiation resistance and the like, so that the ceramic composite material is gradually widely applied to the technical fields of thermal protection of aviation, aerospace, nuclear power and the like. The ceramic composite slender pipe fitting is a typical heat protection structural member, such as a hypersonic aircraft rudder shaft, an aeroengine fuel atomizer protection sleeve, a pulse detonation engine detonation combustion chamber, a nuclear reactor core fuel cladding pipe, a control rod cladding pipe, a high-temperature furnace thermocouple protection sleeve and the like, and has a large number of applications in military and civil equipment. The inner diameter of the ceramic composite slender pipe fitting is generally 7-80mm, and the length-diameter ratio can be generally more than 30.
However, in the process of preparing by adopting the chemical vapor infiltration process, the flow flux of the inner space of the pipe fitting is far smaller than that of the outer space due to the interference of the slender pipe fitting on the flow field, so that the deposition amount of the outer wall of the pipe fitting is overlarge, and the deposition amount of the inner wall is insufficient. The existence of the phenomena generally causes the pipe to present obvious density gradient along the wall thickness direction, so that the prepared pipe has the problems of uneven performance, residual stress in the pipe and the like.
Disclosure of Invention
The invention aims to provide chemical vapor infiltration diversion equipment and a method for preparing a ceramic composite pipe fitting by using the same, so as to solve the problems of density gradient, uneven performance, residual stress and the like of a ceramic composite slender pipe fitting prepared by adopting the existing chemical vapor deposition process. The equipment provided by the invention is combined with a chemical vapor infiltration furnace, so that the density uniformity of the ceramic composite material slender pipe fitting can be obviously improved, the performance uniformity is further improved, and the residual stress is eliminated.
The technical scheme of the invention is as follows:
the chemical vapor infiltration diversion equipment is characterized in that: comprises a gas mixing chamber and a flow guide pipe; the gas mixing chamber is used for uniformly mixing chemical gas phase reaction gases; the top of the gas mixing chamber is provided with an air inlet which is used for being connected with an air inlet of the chemical vapor infiltration furnace in the furnace body; the bottom of the air mixing chamber is provided with a honeycomb duct mounting hole; a plurality of first diversion holes are formed in the side wall close to the bottom of the gas mixing chamber, and the first diversion holes are used for communicating the inner cavity of the gas mixing chamber with the hearth of the chemical vapor infiltration furnace;
one end of the flow guide pipe is fixed in a flow guide pipe mounting hole of the gas mixing chamber; the pipe wall of the flow guide pipe is provided with a plurality of second flow guide holes for communicating the inner cavity of the flow guide pipe with the inner cavity of the long and thin ceramic composite pipe to be processed; the axial length of the flow guide pipe is 0.7-1.0 times of that of the ceramic composite material slender pipe fitting to be processed; the outer diameter of the honeycomb duct is 0.3-0.7 times of the inner diameter of the long and thin ceramic composite pipe fitting to be processed; the wall thickness of the flow guide pipe is 1-5mm; the diameter of the second diversion hole is 2-8mm, and the included angle between the central axis of the second diversion hole and the central axis of the chemical vapor infiltration furnace is 10-45 degrees.
Further, in order to ensure that the distribution ratio of the air flow entering the outer part and the inner part of the long and thin ceramic composite pipe to be processed is equal, the sum of the opening areas of the first diversion holes is the same as the inner sectional area of the diversion pipe.
Further, the second diversion holes are uniformly distributed on the wall of the diversion pipe.
Further, the length of the honeycomb duct is 0.75 time of the axial length of the ceramic composite slender pipe fitting, the outer diameter is 0.4 time of the inner diameter of the ceramic composite slender pipe fitting, and the wall thickness is 2.5mm; the diameter of the second diversion hole is 3mm, and the included angle between the central axis of the second diversion hole and the central axis of the chemical vapor infiltration furnace is 45 degrees.
Further, in order to ensure uniform mixing of the air flows, the inner wall surface of the air mixing chamber is a smooth arc surface.
Further, the gas mixing chamber comprises a conical cylindrical chamber, a cylindrical chamber positioned at the larger opening end of the conical cylindrical chamber, a circular ring-shaped cover plate positioned at the opening end of the cylindrical chamber and a cylindrical fixed end positioned at the inner hole position of the circular ring-shaped cover plate;
all the connecting parts of the conical cylindrical cavity, the annular cover plate and the cylindrical fixed end are connected into a whole through circular arc smooth transition;
the smaller opening end of the conical cylindrical cavity is a honeycomb duct mounting hole; the first diversion holes are circumferentially distributed along the side wall of the conical cylindrical cavity to form a group of diversion units; the multiple groups of flow guiding units are axially distributed along the conical cylindrical cavity;
the inner hole of the cylindrical fixed end is an air inlet.
Further, the diameter of the first diversion hole is 2-8mm, and the included angle between the central axis of the first diversion hole and the central axis of the chemical vapor infiltration furnace is 10-45 degrees.
Further, the diameter of the first diversion hole is 5mm, and the included angle between the central axis of the first diversion hole and the central axis of the chemical vapor infiltration furnace is 25 degrees.
Further, the conical cylindrical chamber is formed by butt joint of two symmetrical semi-conical cylindrical chambers; the cylindrical cavity is formed by butt joint of two symmetrical semi-cylindrical cavities; the annular cover plate is formed by butt joint of two symmetrical semicircular cover plates; the cylindrical fixed ends are formed by butt joint of two symmetrical semicircular cylinders; all the butt joint parts are positioned on the same plane, and after butt joint, the butt joint parts are fastened by connecting pieces.
Further, the material of the gas mixing chamber and the connecting piece is high temperature resistant material, such as electrode graphite or high purity graphite; the honeycomb duct is made of high temperature resistant materials such as electrode graphite, high purity graphite, graphite paper, ceramic composite material or homogeneous ceramic.
Further, the flow guide pipe can be formed by combining a plurality of sectional flow guide pipes.
The invention also provides a chemical vapor infiltration furnace for preparing the ceramic composite slender pipe fitting, which is characterized in that: comprises a chemical vapor infiltration furnace body and at least one chemical vapor infiltration diversion device positioned in the chemical vapor infiltration furnace body; the air inlet of the chemical vapor infiltration diversion device is communicated with the air inlet of the chemical vapor infiltration furnace body positioned in the furnace body, and the free end of the diversion pipe faces to the tray in the chemical vapor infiltration furnace body.
The invention also provides a process method for preparing the ceramic composite slender pipe fitting by using the equipment, which is characterized by comprising the following steps of:
outside diameter of draft tube: ensuring that the honeycomb duct can be inserted into the ceramic composite slender pipe fitting and ensuring that a uniform radial gap exists between the honeycomb duct and the ceramic composite slender pipe fitting;
area of the opening of the first diversion hole in the gas mixing chamber: the sum of the opening areas of the first diversion holes is the same as the inner sectional area of the diversion pipe;
step 5, fixing the ceramic composite material slender pipe fitting to be prepared on a material supporting tray in the chemical vapor infiltration furnace, inserting the flow guide pipe on the flow guide device assembled in the step 4 into the ceramic composite material slender pipe fitting, and ensuring uniform radial clearance between the two;
step 6, communicating an air inlet of the diversion equipment with an air inlet of the chemical vapor infiltration furnace in the furnace body;
and 7, executing a chemical vapor infiltration process according to the process flow.
The beneficial effects of the invention are as follows:
1. according to the invention, a part of the reaction mixture in the chemical vapor infiltration furnace is directly introduced into the core part of the ceramic composite material slender pipe fitting through the diversion equipment with a specific structure, so that the deposition efficiency inside the slender pipe fitting is greatly improved.
2. According to the size characteristics and the use requirements of the ceramic composite material slender pipe fitting, the proportion of air flow entering the inside and the outside of the slender pipe fitting can be regulated by regulating the conical part diversion holes of the air mixing chamber, so that the effect of uniform deposition of the outer wall and the inner wall of the slender pipe fitting is achieved, and the density gradient in the material is reduced or eliminated.
3. Through setting up a plurality of water conservancy diversion equipment, can realize the preparation of many work pieces in a chemical vapor infiltration stove simultaneously, promote production efficiency when guaranteeing product quality.
Drawings
FIG. 1 is a schematic diagram of a diversion apparatus according to the present invention;
FIG. 2 is a schematic diagram of the structure of the air mixing chamber in the diversion apparatus of the present invention;
FIG. 3 is a schematic view of a flow guide tube in the flow guide device of the present invention;
FIG. 4 is a schematic diagram of the assembly of the deflector apparatus of the present invention with a chemical vapor infiltration furnace;
FIG. 5 is an enlarged schematic view of the structure shown at A in FIG. 4;
the reference numerals in the drawings are:
the device comprises a 1-gas mixing chamber, a 2-flow guide pipe, a 21-second flow guide hole, a 3-nut, a 4-bolt, a 5-chemical vapor infiltration furnace, an air inlet, a 7-tray, an 8-air outlet and a 9-ceramic composite slender pipe fitting, wherein the 6-chemical vapor infiltration furnace is positioned in the furnace body;
the device comprises an air inlet 11, a first diversion hole 12, a diversion pipe mounting hole 13, a conical cylindrical chamber 14, a cylindrical chamber 15, a circular annular cover plate 16 and a cylindrical fixed end 17;
Detailed Description
So that the manner in which the above recited objects, features and advantages of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments, some of which are illustrated in the appended drawings. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present invention is not limited to the specific embodiments disclosed below.
Further, reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic can be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.
Further, in describing the embodiments of the present invention in detail, the cross-sectional view of the device structure is not partially enlarged to a general scale for convenience of description, and the schematic is only an example, which should not limit the scope of protection of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
Also in the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper, lower, inner and outer", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first, or second," are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The terms "mounted, connected, and coupled" should be construed broadly in this disclosure unless otherwise specifically indicated and defined, such as: may be a fixed connection, a removable connection or an integral connection. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example 1
As shown in fig. 1 and 2, the chemical vapor infiltration diversion apparatus of this embodiment includes a gas mixing chamber 1 and a diversion pipe 2, the diversion pipe 2 is fixed at the bottom of the gas mixing chamber 1 and is communicated with the gas mixing chamber 1, a structure similar to a long neck funnel is integrally formed, and an air inlet 11 is formed at the top for connecting with an air inlet 6 of a chemical vapor infiltration furnace located inside the furnace body. Of course, in other embodiments, the air mixing chamber 1 may also take the shape of a sphere, an ellipsoid, etc., so as to ensure that the inner wall of the air mixing chamber is a smooth cambered surface.
For convenience in describing the overall structure of the air mixing chamber 1 of the present embodiment, in conjunction with fig. 2, the air mixing chamber 1 may be divided into, in order from bottom to top: the device comprises a conical cylindrical chamber 14, a cylindrical chamber 15 positioned at the larger opening end of the conical cylindrical chamber 14, a circular cover plate 16 positioned at the opening end of the cylindrical chamber 15, and a cylindrical fixed end 17 positioned at the inner hole position of the circular cover plate. The flow guide pipe 2 is arranged at the smaller opening end of the conical cylindrical cavity 14, a plurality of first flow guide holes 12 are formed in the side wall of the conical cylindrical cavity 14, the diameter of each first flow guide hole 12 is 2-8mm, the included angle between the central axis of each first flow guide hole and the central axis of the chemical vapor infiltration furnace is 10-45 degrees, the diameter of each first flow guide hole 12 is 5mm, the included angle between the central axis of each flow guide hole and the central axis of the chemical vapor infiltration furnace is 25 degrees, and the plurality of first flow guide holes 12 are circumferentially distributed along the side wall of the conical cylindrical cavity 14 to form a group of flow guide units; the multiple sets of flow directing units are axially arranged along the conical cylindrical chamber 14. The sum of the opening areas of the first plurality of flow guide holes 12 is the same as the inner cross-sectional area of the flow guide pipe 2.
The gas mixing chamber 1 is made of high temperature resistant materials, such as electrode graphite or high purity graphite, and is machined by a machining method, in order to facilitate manufacturing and assembly, in this embodiment, the gas mixing chamber 1 is formed by mutually butting two bilaterally symmetrical half shells, and the assembly is completed by fastening the bolts 4 through flange holes of the flanges and nuts 3. Specifically, the conical cylindrical chamber 14 may be formed by butt-jointing two symmetrical semi-conical cylindrical chambers 14; the cylindrical chamber 15 can be formed by butt joint of two symmetrical semi-cylindrical chambers; the annular cover plate 16 can be formed by butt joint of two symmetrical semicircular cover plates; the cylindrical fixed end 17 is formed by butt joint of two symmetrical semicircular cylinders, and all butt joint parts are positioned on the same plane; after the butt joint, the butt joint part is fastened by a screw 4 and a nut 3.
As can be seen from fig. 3, in this embodiment, the wall of the flow guiding tube 2 is uniformly provided with a plurality of second flow guiding holes 21 for communicating the inner cavity of the flow guiding tube 2 with the inner cavity of the ceramic composite elongated tube 9 to be processed; the axial length of the flow guide pipe 2 is 0.75 time of the axial length of the ceramic composite slender pipe fitting 9 to be processed, the outer diameter is 0.4 time of the inner diameter of the ceramic composite slender pipe fitting 9, and the wall thickness is 2.5mm; the diameter of the second diversion hole 21 is 3mm, and the included angle between the central axis of the diversion hole and the central axis of the chemical vapor infiltration furnace is 45 degrees. In other embodiments, the axial length of the flow guide pipe 2 is 0.7-1.0 times of the axial length of the ceramic composite material slender pipe fitting 9 to be processed; the outer diameter of the honeycomb duct 2 is 0.3-0.7 times of the inner diameter of the ceramic composite slender pipe fitting 9; the wall thickness of the flow guide pipe 2 is 1-5mm; the diameter of the second diversion hole 21 is 2-8mm, and the included angle between the central axis of the second diversion hole 21 and the central axis of the chemical vapor infiltration furnace is 10-45 degrees. The draft tube 2 may be formed by combining a plurality of segmented draft tubes 2.
Based on the above-mentioned diversion equipment, the preparation of the ceramic composite elongated pipe fitting 9 can be realized by adopting the following processes:
the two half shells are in butt joint and are connected by adopting a connecting piece, and meanwhile, the flow guide pipe 2 is clamped in the flow guide pipe mounting hole 13 at the bottom of the gas mixing chamber 1, and when the two half shells are clamped, the direction of the central axis of the second flow guide hole 21 is ensured to face the direction of the gas outlet 8 of the chemical vapor infiltration furnace. After the step is completed, the diversion equipment is obtained.
Step 5, as shown in fig. 4 and 5, the flow guide pipe 2 of the flow guide device is inserted into the ceramic composite material slender pipe fitting 9, and the flow guide pipe 2 cannot be contacted with the slender pipe fitting, and the uniform radial distance is kept as much as possible. The bottom of the ceramic composite slender pipe fitting 9 is fixed on a tray 7 in the chemical vapor infiltration furnace 5. And then the upper part of the gas mixing chamber 1 of the diversion equipment is connected with the gas inlet 11 of the chemical vapor infiltration furnace 5, and the auxiliary fixation can be realized by adopting the connecting piece.
And 6, executing a chemical vapor infiltration process according to the process flow.
By arranging a plurality of diversion devices, the multi-workpiece simultaneous preparation can be realized in one chemical vapor infiltration furnace 5, and the production efficiency is improved while the product quality is ensured.
After the diversion equipment is adopted, the density gradient of the slender pipe fitting along the wall thickness direction is reduced, the hoop strength of the pipe fitting is more than 100MPa, and the hoop strength of the pipe fitting is improved by 20-30% compared with the prior art.
Claims (10)
1. A chemical vapor infiltration diversion device, characterized in that: comprises a gas mixing chamber (1) and a flow guide pipe (2); the gas mixing chamber (1) is used for uniformly mixing chemical gas phase reaction gases; an air inlet (11) is formed in the top of the gas mixing chamber (1), and the air inlet (11) is used for being connected with an air inlet (6) of the chemical gas permeation furnace, which is positioned in the furnace body; the bottom of the mixed air chamber (1) is provided with a honeycomb duct mounting hole (13); a plurality of first diversion holes (12) are formed in the side wall close to the bottom of the gas mixing chamber (1), and the first diversion holes (12) are used for communicating the inner cavity of the gas mixing chamber (1) with the hearth of the chemical vapor infiltration furnace; the sum of the opening areas of the first diversion holes (12) is the same as the inner sectional area of the diversion pipe (2);
the air mixing chamber (1) comprises a conical cylindrical cavity (14), a cylindrical cavity (15) positioned at the larger opening end of the conical cylindrical cavity (14), a circular cover plate (16) positioned at the opening end of the cylindrical cavity (15) and a cylindrical fixed end (17) positioned at the inner hole position of the circular cover plate (16);
the connecting parts of the conical cylindrical cavity (14), the cylindrical cavity (15), the annular cover plate (16) and the cylindrical fixed end (17) are connected into a whole through circular arc smooth transition;
the smaller opening end of the conical cylindrical cavity (14) is a honeycomb duct mounting hole (13); the first diversion holes (12) are circumferentially distributed along the side wall of the conical cylindrical cavity (14) to form a group of diversion units; a plurality of groups of flow guiding units are axially distributed along the conical cylindrical cavity (14);
the inner hole of the cylindrical fixed end (17) is an air inlet (11);
the diameter of the first diversion hole (12) is 2-8mm, and the included angle between the central axis of the first diversion hole (12) and the central axis of the chemical vapor infiltration furnace is 10-45 degrees;
one end of the flow guide pipe (2) is fixed in a flow guide pipe mounting hole (13) of the air mixing chamber (1); the free end of the draft tube (2) faces to a tray (7) in the chemical vapor infiltration furnace body; the pipe wall of the flow guide pipe (2) is provided with a plurality of second flow guide holes (21) which are used for communicating the inner cavity of the flow guide pipe (2) with the inner cavity of the ceramic composite material slender pipe fitting (9) to be processed; the axial length of the flow guide pipe (2) is 0.7-1.0 times of that of the ceramic composite material slender pipe fitting (9) to be processed; the outer diameter of the flow guide pipe (2) is 0.3-0.7 times of the inner diameter of the ceramic composite material slender pipe fitting (9) to be processed; the wall thickness of the flow guide pipe (2) is 1-5mm; the diameter of the second diversion hole (21) is 2-8mm, and the included angle between the central axis of the second diversion hole (21) and the central axis of the chemical vapor infiltration furnace is 10-45 degrees;
when the ceramic composite slender pipe fitting is prepared, the ceramic composite slender pipe fitting (9) to be prepared is fixed on a tray (7) in the chemical vapor infiltration furnace (5), the honeycomb duct (2) is inserted into the ceramic composite slender pipe fitting (9), and uniform radial clearance is ensured between the ceramic composite slender pipe fitting and the honeycomb duct.
2. The chemical vapor infiltration diversion apparatus of claim 1, wherein: the second diversion holes (21) are uniformly distributed on the pipe wall of the diversion pipe (2).
3. The chemical vapor infiltration diversion apparatus of claim 2, wherein: the length of the flow guide pipe (2) is 0.75 time of the axial length of the ceramic composite slender pipe fitting, the outer diameter of the flow guide pipe is 0.4 time of the inner diameter of the ceramic composite slender pipe fitting, and the wall thickness of the flow guide pipe is 2.5mm; the diameter of the second diversion hole (21) is 3mm, and the included angle between the central axis of the second diversion hole (21) and the central axis of the chemical vapor infiltration furnace is 45 degrees.
4. A chemical vapor infiltration diversion apparatus according to claim 3, wherein: the inner wall surface of the air mixing chamber (1) is a smooth arc surface.
5. The chemical vapor infiltration diversion apparatus of claim 4, wherein: the diameter of the first diversion hole (12) is 5mm, and the included angle between the central axis of the first diversion hole (12) and the central axis of the chemical vapor infiltration furnace is 25 degrees.
6. The chemical vapor infiltration diversion apparatus of claim 5, wherein: the conical cylindrical cavity (14) is formed by butt joint of two symmetrical semi-conical cylindrical cavities; the cylindrical chamber (15) is formed by butt joint of two symmetrical semi-cylindrical chambers; the annular cover plate (16) is formed by butt joint of two symmetrical semicircular cover plates; the cylindrical fixed end (17) is formed by butt joint of two symmetrical semicircular cylinders;
all the butt joint parts are positioned on the same plane; after butt joint, the butt joint parts are fastened by connecting pieces.
7. The chemical vapor infiltration diversion apparatus of claim 6, wherein: the material of the gas mixing chamber (1) and the connecting piece is electrode graphite or high-purity graphite high-temperature resistant material; the honeycomb duct (2) is made of electrode graphite, high-purity graphite, graphite paper, ceramic composite material or homogeneous ceramic high-temperature resistant material.
8. The chemical vapor infiltration diversion apparatus of claim 7, wherein: the flow guide pipe (2) is formed by combining a plurality of sectional flow guide pipes.
9. A chemical vapor infiltration furnace for preparing ceramic composite elongated pipe fittings, which is characterized in that: comprising a chemical vapor infiltration furnace body and at least one chemical vapor infiltration diversion apparatus according to any one of claims 1-8 positioned inside the chemical vapor infiltration furnace body; an air inlet (11) of the chemical vapor infiltration diversion device is communicated with an air inlet (6) of the chemical vapor infiltration furnace, which is positioned in the furnace body, and the free end of the diversion pipe (2) faces to a tray (7) in the chemical vapor infiltration furnace body.
10. A method of producing ceramic composite tubes using the apparatus of any one of claims 1-9, comprising the steps of:
step 1, determining the inner diameter size of a ceramic composite slender pipe fitting (9) to be prepared;
step 2, determining the outer diameter of the flow guide pipe (2) and the opening area of a first flow guide hole (12) in the gas mixing chamber (1) according to the parameters determined in the step 1;
outside diameter of the flow guide pipe (2): ensuring that the honeycomb duct (2) can be inserted into the ceramic composite slender pipe fitting (9) and ensuring that a uniform radial gap exists between the honeycomb duct and the ceramic composite slender pipe fitting;
the opening area of the first diversion hole (12) in the gas mixing chamber (1): the sum of the opening areas of the first diversion holes (12) is the same as the inner sectional area of the diversion pipe (2);
step 3, machining the gas mixing chamber (1) and the guide pipe (2) by adopting a machining method according to the size parameters and the rest set parameters determined in the step 2;
step 4, fixing the flow guide pipe (2) in a flow guide pipe mounting hole (13) of the gas mixing chamber (1);
step 5, fixing a ceramic composite material slender pipe fitting (9) to be prepared on a material supporting tray (7) in the chemical vapor infiltration furnace (5), inserting the flow guide pipe (2) on the flow guide equipment assembled in the step 4 into the ceramic composite material slender pipe fitting (9), and ensuring uniform radial clearance between the two;
step 6, communicating an air inlet (11) of the diversion equipment with an air inlet (6) of the chemical vapor infiltration furnace, which is positioned in the furnace body;
and 7, executing a chemical vapor infiltration process according to the process flow.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111412169.4A CN114105679B (en) | 2021-11-25 | 2021-11-25 | Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same |
| PCT/CN2022/096450 WO2023092980A1 (en) | 2021-11-25 | 2022-05-31 | Chemical vapor infiltration flow guide device and method for preparing ceramic composite pipes by means of same |
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| CN202111412169.4A CN114105679B (en) | 2021-11-25 | 2021-11-25 | Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same |
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| CN114105679B true CN114105679B (en) | 2023-05-16 |
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| CN114105679B (en) * | 2021-11-25 | 2023-05-16 | 西安鑫垚陶瓷复合材料有限公司 | Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same |
| CN114789415B (en) * | 2022-05-09 | 2023-07-07 | 西安鑫垚陶瓷复合材料有限公司 | Rudder shaft component assembly tool and assembly method for ceramic matrix composite aircraft |
| CN115181960B (en) * | 2022-06-23 | 2023-11-24 | 西安鑫垚陶瓷复合材料股份有限公司 | CVI guiding device of thin-wall pointed cone rotating member and using method thereof |
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| EP2215282A2 (en) * | 2007-10-11 | 2010-08-11 | Valence Process Equipment, Inc. | Chemical vapor deposition reactor |
| CN102344294A (en) * | 2011-06-30 | 2012-02-08 | 山东理工大学 | Method for preparing carbon-silicon carbide composite material by using chemical gas-phase permeation method |
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| FR2670507B1 (en) * | 1990-12-18 | 1993-12-31 | Propulsion Ste Europeenne | CHEMICAL STEAM INFILTRATION PROCESS. |
| EP1322801B1 (en) * | 2000-09-22 | 2010-01-06 | Aixtron Ag | Cvd-method and gas inlet mechanism for carrying out the method |
| CN101215182B (en) * | 2008-01-09 | 2010-11-17 | 西安航天复合材料研究所 | Device and method for preparing carbon/carbon composite material with gradient distribution density |
| DE102010000479A1 (en) * | 2010-02-19 | 2011-08-25 | Aixtron Ag, 52134 | Device for homogenizing a vaporized aerosol and device for depositing an organic layer on a substrate with such a homogenizing device |
| WO2015188354A1 (en) * | 2014-06-12 | 2015-12-17 | 深圳市大富精工有限公司 | Vacuum coating device and vacuum coating method |
| CN104342636B (en) * | 2014-10-22 | 2017-04-12 | 宁波正力药品包装有限公司 | CVD reaction chamber device for coating inner wall of container |
| CN204281857U (en) * | 2014-12-05 | 2015-04-22 | 西安超码科技有限公司 | A kind of crucible chemical vapour deposition limit gas frock |
| CN105463410B (en) * | 2015-12-15 | 2018-09-21 | 西安鑫垚陶瓷复合材料有限公司 | The method and gas piping structure that a kind of CVI for open containers is densified |
| CN107058975B (en) * | 2017-01-23 | 2019-06-04 | 上海大学 | High throughput chemical gas-phase permeation technique, application and device based on parameter region control |
| US11532459B2 (en) * | 2017-11-09 | 2022-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chemical vapor deposition apparatus with cleaning gas flow guiding member |
| CN107699865B (en) * | 2017-11-10 | 2024-04-19 | 西安鑫垚陶瓷复合材料股份有限公司 | Device for uniformly feeding air for vapor deposition furnace |
| CN108218461A (en) * | 2018-01-24 | 2018-06-29 | 航天睿特碳材料有限公司 | A kind of quick CVD method for densifying of single crystal growing furnace carbon/carbon thermal field structure product |
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| CN114105679B (en) * | 2021-11-25 | 2023-05-16 | 西安鑫垚陶瓷复合材料有限公司 | Chemical vapor infiltration diversion equipment and method for preparing ceramic composite pipe fitting by using same |
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| EP2215282A2 (en) * | 2007-10-11 | 2010-08-11 | Valence Process Equipment, Inc. | Chemical vapor deposition reactor |
| CN102344294A (en) * | 2011-06-30 | 2012-02-08 | 山东理工大学 | Method for preparing carbon-silicon carbide composite material by using chemical gas-phase permeation method |
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| WO2023092980A1 (en) | 2023-06-01 |
| CN114105679A (en) | 2022-03-01 |
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Address after: 710117 West Section 912 of Biyuan Road, Xi'an High-tech Zone, Shaanxi Province Patentee after: Xi'an Xinyao Ceramic Composite Co.,Ltd. Country or region after: China Address before: 710117 West Section 912 of Biyuan Road, Xi'an High-tech Zone, Shaanxi Province Patentee before: XI'AN GOLDEN MOUNTAIN CERAMIC COMPOSITES CO.,LTD. Country or region before: China |