CN114104500A

CN114104500A - Improve photomask inner box of fastening power and remove with outer box

Info

Publication number: CN114104500A
Application number: CN202111011652.1A
Authority: CN
Inventors: 李絃万
Original assignee: Pmc International Co ltd
Current assignee: Pmc International Co ltd
Priority date: 2020-09-01
Filing date: 2021-08-31
Publication date: 2022-03-01
Also published as: KR102352196B1

Abstract

An outer box for moving the inner box of the photomask, which improves the fastening force. The invention provides an outer box for moving a photomask inner box, which improves fastening force through a fastening part for fastening a side frame arranged on the outer box and a main frame and prevents the fastening force from being exposed to the outside, and relates to the outer box for moving the photomask inner box, wherein the fastening part for fastening the main frame and the side frame mutually improves the fastening force, the fastening part adopts a non-protruding structure, the fastening part can also prevent the fastening part from being damaged in advance during moving, a supporting part for improving the fastening force is utilized to fix a bracket to a placing part in the outer box, the bracket is an essential structural element when the photomask inner box is moved to the inner part of the outer box, and a folding prevention component is arranged to prevent a sheet from folding part when the sheet is connected to a frame forming the outer box through rivets and support the bracket.

Description

Improve photomask inner box of fastening power and remove with outer box

Technical Field

The present invention relates to an outer box for moving an inner box of a photomask, and more particularly, to an outer box in which a fastening force is improved and an outer exposure is prevented by a fastening portion for fastening a side frame provided in the outer box to a main frame.

Background

First, in the related art, the mobile box is generally a rectangular flat plate-shaped substrate including a glass substrate for manufacturing a Liquid Crystal Display (LCD) panel or a Plasma Display (PD) panel, a mask base on which a light shielding film, an etching resist film, or the like is laminated on a surface of the glass substrate, a photomask for forming a circuit pattern by a photolithography process, and the like.

Such a substrate is manufactured in a clean room that maintains a cleanliness of, for example, about 100 level because it requires a high cleanliness in each manufacturing process and a film deposition process or an exposure process which is a subsequent process.

In the clean room, the manufactured substrate is housed in a substrate box (inner box) of a dust-free structure and sealed.

The substrate as described above is a weight.

For example, in the case of a substrate having a diagonal dimension of about 18m, the mass of a single substrate is about 50kg, and in the case of a substrate having a diagonal dimension of about 24m level, the mass of a single substrate exceeds 100 kg.

Therefore, it is not practical to lift and transport the substrate box accommodating the substrate by human power.

In contrast, in order to facilitate movement of the substrate box for accommodating the substrate, casters are provided at the lower end of the substrate box.

In a conventional substrate box, a substrate is accommodated in the substrate box in a vertical posture in which a front surface and a back surface are vertical.

Alternatively, after the substrate is accommodated in the substrate box, the substrate box is erected so that the substrate is in the vertical posture.

Casters are provided at four corners of the bottom of the box at this time as a lower end.

In a clean room with moderate cleanliness called a transfer window, a substrate box for housing substrates is packaged by a box lid portion made of a cloth for suppressing generation of dust, which is used as a clean cloth.

The case lid portion has an opening portion on a lower surface side, and a bag shape covering the case body portion from above, and a bottom surface portion extending from one vertical surface side (for example, a surface side of the base plate) to the other vertical surface side (for example, a back surface side of the base plate) extending in parallel to each other in the vertical direction is formed on a lower surface side.

For example, the bottom surface portion is formed in a tongue shape passing through the lower side of the box body portion in a region where the caster is not disposed, and is locked by surface-locking and attached to the other vertical surface side.

Therefore, when the substrate case is transported, the case body portion is covered by the case lid portion, and particles (dust) do not easily adhere thereto.

The base plate case, which is packaged by the case cover portion, is moved from the transfer window to the normal environment.

In the course of transportation, the substrate case (inner case) packed by the case lid portion is accommodated in a larger transport case (outer case) and transported in a strictly protected state.

Since the substrate is a heavy object as described above, it is difficult for a person to lift and move the substrate transport box.

Therefore, casters are also provided at the lower end of the substrate transport box.

The substrate packaged in the substrate case, the case lid, and the substrate transport case is transported from the substrate manufacturing plant to a next-process plant by a transport means such as a truck or an airplane while being moved by casters or a forklift in the plant.

In recent years, the LCD panel and the PD panel have been further increased in size, and a large substrate having a diagonal dimension of more than 2m has been required.

As the substrate becomes larger, the mass also increases, for example, the mass of a single substrate of 1800 × 1600 × 17mm size is up to 110 kg.

In order to protect and stably move such an enlarged and weighted substrate, there are various problems that cannot be solved only by scaling up the existing substrate cassette.

First, as in the related art, when the substrate is accommodated in the substrate box in a vertically-disposed posture, there is a problem that the size of the substrate box becomes larger than a required shape size based on the size of the substrate.

That is, since the center of gravity position increases as the size of the substrate increases, the thickness of the substrate case needs to be increased more than originally necessary in consideration of the flip stability.

When the substrate is in a vertical posture in which the short side of the substrate extends in the vertical direction, the height of the substrate case is 1800mm and the center of gravity is 900 mm. At this time, if the substrate case is inclined by about 8 ° due to the inclination of the floor surface or the like, the substrate case 101 is turned upside down.

When the static flip angle is set to 15 ° which is a standard of general household electrical appliances, the thickness of the necessary substrate case is about 480 mm.

At this time, the volume of the space occupied by the substrate case is about twice as large as the substrate case based on the size of the substrate.

Considering that the substrate case accommodating the substrate is a heavy object having a mass of about 300kg and the expensive substrate has a great risk of damage when turned over, etc., the turning angle is preferably set to a larger angle.

In the case where this static flip angle is set to 30 °, the volume of the space occupied by the substrate tank exceeds four times that of the substrate tank based on the size of the substrate.

On the other hand, in the case where casters are provided at the four corners of the bottom surface, the distance between the supporting points for supporting the load is increased, and therefore the substrate case is easily bent and deformed by the load applied to the substrate case. If it is attempted to suppress this by an additional structure, a problem arises that the structure of the box is complicated.

Also, in such a conventional case lid portion, a problem has been pointed out that the effect of preventing particles from adhering to the case lid portion is still insufficient when the substrate is transported.

Specifically, when the box lid portion is opened in a clean room of medium cleanliness at a substrate transportation destination, in practice, a large number of particles adhere to the outer surface of the box body portion, and a large number of man-hours are required to remove the particles.

That is, there is a problem that a man-hour is required for a carrying-in process from opening the substrate box to taking out the substrate.

As described above, when the substrate is transported from the substrate manufacturing plant to the next process plant, a transport vehicle such as a truck or an airplane is used.

During such transport, an impact or vibration is applied to the substrate transport box from the outside (e.g., the floor surface of a truck).

However, the conventional publication does not provide a means for absorbing such shock and vibration.

Therefore, there is a fear that external impact or vibration may be transmitted to the substrate through the substrate transport box and the substrate box, thereby damaging the substrate.

When fixing a frame provided in a box and a sheet connected to the frame, a rivet is generally used, but the sheet is bent by the action of the rivet, and a foreign substance is introduced from the outside to the inside of the box through a gap caused by the bending, resulting in a problem that the foreign substance adheres to a substrate.

Further, when the substrate is moved into the box, a bracket having a predetermined slope is used, and the bracket is disposed on one side of the inside of the box after the substrate is moved into the box, and the fixing force may be reduced during the disposition, thereby causing damage to the substrate.

Further, since the fastening portion for fastening the main frame and the side frame provided in the outer box to each other is simply installed and fixed, the outer box is frequently broken, twisted or opened during movement, and the fastening portion simply installed and fixed is broken, thereby causing the problem of opening the side frame.

In contrast, Korean laid-open patent No. 10-2014-0065874 "substrate mask and photomask packaging container", and Korean laid-open patent No. 10-2015-0013515 "substrate case, substrate transport case, case cover part, substrate transport system, and substrate transport method" are disclosed, but the above-described problems are not improved.

Disclosure of Invention

Technical problem to be solved by the invention

The present invention has been made to solve the above-mentioned problems occurring in the prior art, and a main object of the present invention is to provide an outer box for moving an inner mask box, in which a fastening force is improved by a fastening part structure for fastening a main frame and a side frame to each other, the fastening part has a non-protruding structure, the fastening part is prevented from being damaged in advance during movement, a bracket is fixed to a placement part inside the outer box by a support part for improving the fixing force, the bracket is an essential structural element for moving the inner mask box into the outer box, and a folding prevention member is provided to prevent a folded portion of a sheet from being generated when the sheet is connected to the frame constituting the outer box by a rivet and to support the bracket.

Means for solving the problems

To achieve the above object, the present invention provides an outer box for moving an inner mask box, which improves a fastening force, the outer box for moving the inner mask box comprising: a frame for keeping and moving a photomask inner box which is provided with a photomask inside and has wheels at the lower part and forms an inner space; a resting part arranged at the lower side of the inside of the frame; a Danpul tab (danpla sheet) bonded to an outer side of the frame; a plurality of wheels connected to a lower portion of the frame; the track is positioned at the upper part of the placing part and is used for moving the inner box of the photomask; and a bracket for moving the inner photomask box to the inside and the outside by using a rail, wherein the outer photomask box for moving the inner photomask box for improving fastening force is characterized in that the frame is composed of a main frame and side frames, the main frame forms an integral frame, the side frames are respectively positioned at two sides of the main frame, and fastening parts for fixing the side frames at two sides are arranged at the front and the back of the main frame.

ADVANTAGEOUS EFFECTS OF INVENTION

The photomask inner case moving outer case according to the present invention having improved fastening force has the following effects: the fastening part structure of the main frame and the side frame can improve the fastening force, the fastening part can not collide to prevent damage in advance when moving through the non-protruding type fastening part, the bracket required for moving the inner box of the photomask to the inner part and the outer part of the outer box is supported from the inner part of the outer box to the side surface, the front surface and the back surface to improve the supporting force, when the frame is combined with the sheet, the folding prevention component can be arranged at the combination part to prevent the sheet from folding in advance, thereby preventing foreign matters from flowing in through the folding part.

Drawings

FIG. 1 is a perspective view showing the combination of a mobile outer box according to the present invention;

FIG. 2 is a front view showing the connection of FIG. 1;

fig. 3 is an enlarged view illustrating the connection of the fastening part in the structure of fig. 2;

FIG. 4 is a front view showing another embodiment of FIG. 2;

fig. 5 is an enlarged view illustrating the connection of the fastening part in the structure of fig. 4;

FIG. 6 is a plan view showing the operation of the locking member in the structure of the present invention;

FIG. 7 is a side view showing another embodiment of FIG. 6;

FIG. 8 is a front sectional view showing a moving outer box of the present invention;

fig. 9 is a top sectional view showing a line a-a of fig. 8;

FIG. 10 is a side sectional view showing a moving outer box of the present invention;

fig. 11 is a plan view showing a support portion a and a bracket B of the present invention;

FIG. 12 is a side view showing an embodiment of the front and back brackets of the present invention;

fig. 13 is a plan view showing a state where a and B of fig. 11 are combined;

FIG. 14 is a side view showing a prior art rivet connection;

FIG. 15 is a side view showing the rivet connection of the present invention;

FIG. 16 is a front cross-sectional view showing an embodiment of an outer box of the present invention.

Description of the reference numerals

10: outer box for moving photomask inner box

20: photomask inner case 21: wheel

30: fastening portion 31: fastening hook 31 a: clamping groove

33: fastening unit 33 a: locking member 33 b: rotating part

100: the frame 110: main frame 120: side frame

200: the placement section 210: supporting part

211: side bracket 213: front bracket 215: back support

300: danpu tab 400: wheel 500: track

600: bracket 700: rivet 800: anti-folding component

Detailed Description

Hereinafter, preferred configurations and operations of the present invention for achieving the above object will be described with reference to fig. 1 to 16 with respect to the attached drawings.

First, in the photomask inner case moving outer case according to the present invention for improving a fastening force, the photomask inner case moving outer case includes: a frame 100 for keeping and moving a photomask inner case in which a photomask is placed and which has wheels 21 at a lower portion to form an inner space; a shelf 200 provided at the lower side of the inside of the frame 100; a Danpula sheet 300 coupled to an outer side of the frame 100; a plurality of wheels 400 connected to a lower portion of the frame 100; a rail 500 which is positioned at the upper part of the placing part 200 and is used for moving the inner box of the photomask; and a bracket 600 for moving the inner photo mask box to the inside and the outside by using the rail 500, the frame 100 being composed of a main frame 110 and side frames 120, the main frame 110 forming an integral frame, the side frames 120 being respectively located at both sides of the main frame 110, and fastening portions 30 for fixing the side frames 120 at both sides being provided at the front and the back of the main frame 110.

The present invention as described above will be explained in more detail.

First, the outer box for moving an inner mask box of the present invention is used for storing and moving an inner mask box having a lower wheel 21 and a mask placed therein, and is substantially composed of a frame 100, a placement part 200, a Danpu tab 300, a wheel 400, a rail 500, and a bracket 600.

The frame 100 is composed of a main frame 110 and side frames 120 respectively located at both side surfaces of the main frame 110, and is provided with fastening portions 30 for fastening and fixing the main frame 110 and the side frames 120 to each other.

When fastened to the main frame 110, the upper portion of the side frame 120 is fastened for the first time by a hinge or a hinge provided at the upper portion of the main frame 110, and after the side frame 120 is closed, the fastening is performed for the second time by the fastening portion 30, thereby completing the locking.

The fastening portions 30 are members for preventing the opening of the main frame 110 after the side frames 120 are fixed to the main frame 110, and are provided in plurality on the front and rear surfaces of the main frame 110, respectively.

The fastening part 30 is formed to protrude or not protrude outward for connecting and fixing the main frame 110 and the side frame 120 to each other.

The protruding fastening portion 30 is composed of a fastening hook 31 and a fastening unit 33, the fastening hook 31 is provided on the side frame 120, and the fastening unit 33 is provided on the main frame 110 and is provided with a locking member 33a locked to the fastening hook 31.

The fastening hook 31 is formed in a simple protruding type or formed in a bent portion in a direction opposite to the locking direction after protruding, so as to prevent easy separation even after fastening.

Also, a closing portion is separately provided to the fastening hook 31 to prevent separation after the locking member 33a completes locking.

By the structure of the closing portion, the fastening of the latching member 33a operates as follows: when the closing portion is pressed for the first time, a part of the closing portion is pressed to generate a space, and the locking member 33a is brought into contact with the fastening hook 31 through the space, and at this time, the pressed part of the closing portion is restored to the original position by a spring provided at one side.

Thus, the locking member 33a is not separated from the closing portion and the fastening hook 31, and the fastening force is improved, except when an external force is applied or when the external force is broken.

The non-protruding type fastening portion 30 includes a fastening hook 31 and a fastening unit 33, wherein a locking groove 31a is formed in a portion of the fastening hook 31 on the inner side of the side frame 120, and the main frame 110 includes a locking member 33a formed by locking a first bent portion of the side frame 120 by the locking groove 31a, a rotating member 33b for rotating the locking member 33a, and a switch member for operating the rotating member 33b, in the fastening unit 33.

The fastening hook 31 is a member for locking the locking member 33a, and the locking groove 31a is a groove that secures a space that can be rotated so that the locking member 33a that is rotated and locked is locked to the fastening hook 31.

A first bent portion is formed at an end of the locking member 33a to be locked to the fastening hook 31 by the locking groove 31 a.

The locking member 33a is rotated by a rotating member 33b, and the rotating member 33b is rotated by providing a separate opening member and closing member.

Hereinafter, description will be given with reference to fig. 6.

When the closing member is pressed, the rotating member 33b rises, the locking member 33a is lifted, and the lifted locking member 33a is fastened to the fastening hook 31 through the locking groove 31 a.

When the opening member is pressed, the rotating member 33b descends, the locking member 33a separates from the fastening hook 31, and the side frame 120 is thereby opened.

A cover portion is further provided to surround and cover the outside of the protruding fastening portion 30 or the non-protruding fastening portion 30.

The cover portion surrounds the outside of the protruding or non-protruding fastening portion 30, prevents damage in advance to provide a first protection, and prevents problems due to exposure to provide a second protection.

In the case of the non-protruding type fastening portion 30, the fastening portion 30 is located inside the surface where the main frame 110 is located, and even if a cover is provided, it is not exposed to the outside from the surface where the main frame 110 is located.

The frame 100 is an integral frame for constituting the moving outer box 10, and is generally made of aluminum or iron material.

The shelf 200 is provided in the inner space of the frame 100 and at the center of the bottom surface.

A bracket 600 described later is placed on the placement portion 200.

The placement portion 200 is provided with a support portion 210, and the support portion 210 positions a bracket 600, which will be described later, on the placement portion 200.

The support portion 210 has the same shape as the outer shape of the bracket 600, and has a shape that is wide at the front side and becomes narrower toward the rear side.

The support portion 210 is provided with a placing portion for placing the bracket 600, a side bracket 211, a front bracket 213, and a rear bracket.

Side brackets 211 are respectively provided at both sides to support the side portions of the bracket 600 when the bracket 600 is placed on a placing portion.

The side brackets 211 are disposed in such a manner as to have the same angle as the side of the bracket 600.

The front bracket 213 supports the front end of the tray 600 when the tray 600 is placed on the placing part.

The front bracket 213 is provided in order to prevent the front portion of the tray 600 from moving in the front direction when the front bracket 213 is placed on the placing part and the side bracket 211 supports the side of the tray 600.

The front holder 213 is provided with a locking portion to support the front end of the tray 600.

The engaging part being formed in a stepped shape or at a predetermined angle

And (4) shape.

In order to prevent the tray 600 from moving to the front part even after being locked to the locking part, the tray is fastened to the placing part by a fastening unit after penetrating the front bracket 213.

The locking part and the fastening unit provided to the front bracket 213 may be provided simultaneously or separately.

The rear bracket 215 is coupled to a rear surface of the bracket 600 to support.

The rear bracket 215 is supported in a structure in which the bottom surface of the rear surface of the bracket 600 is surrounded at the upper portion.

In this case, the locking portion or the fastening means may be provided in the rear holder 215, similarly to the front holder 213.

As shown in fig. 5, the front bracket 213 and the rear bracket 215 may be disposed on the front surface and the rear surface of the bracket 600, respectively, and may be supported to surround the upper portions of the front surface and the rear surface, respectively.

The locking part and the fastening unit may be provided at the same time or separately.

Referring to fig. 5, the front bracket 213 and the rear bracket 215 may also be rotated in a horizontal direction and support the tray 600.

The portions contacting the front and rear surfaces of the tray 600 when rotated in the horizontal direction may also form separate locking portions.

The

holders

211, 213, 215 may be separately provided or integrally formed by being connected to each other.

When formed as one body, it may be provided as a single component by three brackets combined or by two of the three brackets connected to each other.

The danpula sheet 300 is coupled to the outside of the frame 100.

If the frame 100, which is an outer frame, is manufactured using a commonly used angular tube, the Danpul sheet 300 for covering the remaining portion of the frame is combined with the frame 100.

At this time, the rivet 700 is generally used to combine and fix the frame 100 and the dan-pula sheet 300.

A plurality of wheels 400 are connected to a lower portion of the frame 100.

The wheels 400 are wheels 400 that are generally used as a moving means of the moving outer box 10.

The rail 500 is used to move the photomask inner case to the inside or outside of the moving outer case 10.

The rails 500 are respectively disposed at one side or both sides centering on the rest portion 200.

The bracket 600 connects the bottom surface with the rail 500 to introduce the inner photomask box into the interior of the outer box 10.

After the moving box 10 reaches the destination, the bottom surface is connected to the rail 500 so as to be drawn out from the inside of the box 10 to the outside.

A rivet 700 connects the frame 100 with the dan-pula sheet 300.

At this time, as shown in fig. 7, the periphery of the portion connected to the rivet 700 is protruded in one direction by the force of the portion connected to the rivet 700.

The protrusions form gaps, respectively, through which fine foreign substances flow into the inside of the outer box 10, which becomes a factor of the foreign substances adhering to the inner box of the photomask.

In order to solve such a problem, the present invention preferentially inserts and couples the separate anti-folding member 800 to a portion connected to the rivet 700.

The inner circumference of the folding prevention member 800 is the same as the outer circumference of the rivet 700, and a urethane material is used in the present invention, but a separate structural element capable of preventing a gap may be provided.

The anti-folding member 800 is formed of two layers, and the inner portion is shorter than the outer portion.

The inside and outside lengths of the folding prevention member 800 are to prevent the gap in advance and to prevent the deformation of the frame 100 and the Danpul sheet 300 in advance.

The photo mask is placed inside the photo mask inner case located inside the outer case 10 of the present invention, and has wheels 21 at both sides of the lower portion, and the photo mask inner case can be located inside the outer case 10 by the bracket 600 and the rail 500.

When the inner mask case is positioned in the outer case 10, the wheels 21 are positioned on the upper portion of the rails 500, and the inner mask case is positioned on the upper portion of the shelf 200 at a predetermined interval.

According to the present invention, since the supporting force is increased by supporting the brackets from the inside of the outer box to the side, front and back surfaces thereof, which are required for moving the inner box of the photomask to the inside and outside of the outer box, the folding prevention member can be provided at the coupling portion to prevent the sheet from being folded in advance when the frame is coupled to the sheet, thereby preventing the foreign matter from flowing in through the folding portion.

Claims

1. The utility model provides an improve box removal with outer box in photomask of fastening force, relates to a box removal with outer box in photomask, and it includes:

a frame (100) for keeping and moving a photomask inner box (20) which is provided with a photomask inside and wheels (21) at the lower part and forms an inner space;

a placement part (200) arranged at the lower side of the interior of the frame (100);

a Danp tab (300) coupled to an outer side of the frame (100);

a plurality of wheels (400) connected to a lower portion of the frame (100);

the track (500) is positioned at the upper part of the placing part (200) and is used for the movement of the photomask inner box; and

a carriage (600) for moving the inner photomask box to the inside and the outside by using a rail (500),

the photomask inner box moving outer box for improving the fastening force is characterized in that,

the frame (100) is composed of a main frame (110) and side frames (120), the main frame (110) forms an integral frame, the side frames (120) are respectively formed on two sides of the main frame (110) at two sides of the main frame (110),

fastening portions (30) for fixing the side frames (120) on both sides are provided on the front and rear surfaces of the main frame (110).

2. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

the fastening portion (30) is composed of a fastening hook (31) and a fastening unit (33),

in the fastening hook (31), a locking groove (31a) is formed on a part of the inner side of the side frame (120),

in the fastening unit (33), the main frame (110) is provided with a locking member (33a) which forms a first bent portion for locking the side frame (120) by the locking groove (31a), a rotating member (33b) for rotating the locking member (33a), and a switch member for operating the rotating member (33 b).

3. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

a cover portion is provided that surrounds and covers the outside of the fastening portion (30).

4. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

a support part (210) is provided on the placement part (200) so that the bracket (600) is positioned on the support part (210).

5. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

side brackets (211) are provided on both sides of the support part (210), have the same shape as the outer shape of the bracket (600), and support the side parts of the bracket (600).

6. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

a front bracket (213) for supporting the front end of the bracket (600) is provided on the support part (210).

7. The photomask inner case moving outer case capable of improving a fastening force according to claim 1,

the support part (210) is provided with a back support (215) which is connected with the back of the bracket (600) for supporting.