CN114100716A - Microfluidic device and driving method thereof - Google Patents
Microfluidic device and driving method thereof Download PDFInfo
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- CN114100716A CN114100716A CN202111451337.0A CN202111451337A CN114100716A CN 114100716 A CN114100716 A CN 114100716A CN 202111451337 A CN202111451337 A CN 202111451337A CN 114100716 A CN114100716 A CN 114100716A
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- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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Abstract
The invention discloses a microfluidic device and a driving method thereof, wherein the microfluidic device comprises: a first substrate base plate; a driving layer on the first substrate base, the driving layer including a heating element; the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area; the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate. The liquid drops in the first channel are controlled through the heating element, extra driving equipment is not needed, the size of the equipment is reduced, and the integration of the microfluidic device is realized.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a microfluidic device and a driving method thereof.
Background
The Micro-fluidic (Micro Fluidics) technology belongs to a new technology, is a new interdiscipline related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, can accurately control the movement of liquid drops, realizes the operations of fusion, separation and the like of the liquid drops, completes various biochemical reactions, and is a technology which is mainly characterized by controlling the fluid in a micron-scale space. The technology is crossed with chemical, biological, engineering, physics and other subjects, and shows wide application prospect.
At present, continuous microfluidics cannot be completely replaced by digital microfluidics, namely, qualitative analysis and more precise quantitative analysis are still required to be carried out in large fluid for some biochemical detection, and the quantitative analysis needs precise control of digital microfluidics upgrading, so that a device similar to a negative pressure pump is still required for controlling liquid drops with different flow volumes in a microfluidic device. At present, the microfluidic chip controls the fluid by an external driving pump or a negative pressure device, the external device has a large volume and is inconvenient to carry, point-of-care testing (POCT) type detection equipment cannot be integrated, and portability difficulty is increased.
Disclosure of Invention
In view of this, the present invention provides a microfluidic device and a driving method thereof, in which a heating element is used to control a droplet in a first channel, and no additional driving device is required, so that the volume of the device is reduced, and the integration of the microfluidic device is realized.
In one aspect, the present invention provides a microfluidic device comprising:
a first substrate base plate;
a drive layer on the first substrate base, the drive layer comprising a heating element;
the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area;
the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate.
In yet another aspect, the present invention provides a method of driving a microfluidic device, the microfluidic device including:
a first substrate base plate;
a drive layer on the first substrate base, the drive layer comprising a heating element;
the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area;
the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate;
the driving method includes:
introducing liquid drops into the first channel;
applying a heating signal to the heating element, the heating element causing air within the heating zone to expand, dividing a droplet located within the heating zone into a plurality of sub-droplets;
and driving the sub-droplets to move within the first channel.
Compared with the prior art, the micro-fluidic device and the driving method thereof provided by the invention comprise a first substrate, a driving layer is positioned on the first substrate, and the driving layer comprises a heating element; the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area; the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate. The heating element is integrated in the microfluidic device, the orthographic projection of the heating element on the plane of the first substrate base plate is at least partially overlapped with the orthographic projection of the heating zone on the plane of the first substrate base plate, air in the heating zone is expanded through the heating element, the liquid drop in the heating zone is divided into a plurality of sub-liquid drops, and the sub-liquid drops are driven to move in the first channel, so that additional driving equipment is not needed, the volume of the equipment is reduced, and the use portability is increased.
Of course, it is not necessary for any product in which the present invention is practiced to specifically achieve all of the above technical effects simultaneously.
Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
FIG. 1 is a schematic diagram of a prior art microfluidic device;
FIG. 2 is a schematic structural diagram of a microfluidic device according to the present invention;
FIG. 3 is a cross-sectional view taken along line N-N' of FIG. 2;
FIG. 4 is an enlarged view of a portion of A in FIG. 2;
FIG. 5 is a schematic structural diagram of another microfluidic device provided in the present invention;
FIG. 6 is a cross-sectional view taken along line M-M' of FIG. 5;
FIG. 7 is a further cross-sectional view taken along line M-M' of FIG. 5;
FIG. 8 is a further cross-sectional view taken along line M-M' of FIG. 5;
FIG. 9 is a further cross-sectional view taken along line M-M' of FIG. 5;
FIG. 10 is a further cross-sectional view taken along line M-M' of FIG. 5;
fig. 11 is a flowchart of a driving method of a microfluidic device according to the present invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a microfluidic device in the prior art. The prior art provides a microfluidic device 100, which includes a substrate base plate 01 and a microfluidic channel 03 located on the substrate base plate 01, a syringe pump (not shown in the figure) is used to provide negative pressure to sample the microfluidic device 100, and a sample liquid 02 enters the microfluidic channel 03 through a channel port.
However, the general driving device for the injection pump or the constant pressure pump has a large volume, is inconvenient to carry, and cannot realize system integration, and a biochemical experiment still needs large-flow fluid to run in a flow channel structure, so that external driving cannot be integrated into a device, which is a problem to be solved.
In order to solve the technical problem, the invention provides a microfluidic device and a driving method thereof. As for embodiments of the microfluidic device and the driving method thereof provided by the present invention, the following will be described in detail.
In this embodiment, please refer to fig. 2 and fig. 3, in which fig. 2 is a schematic structural diagram of a microfluidic device according to the present invention, and fig. 3 is a cross-sectional view along the direction N-N' in fig. 2. The microfluidic device 200 in the present embodiment includes: a first substrate base plate 00; a driving layer 10, the driving layer 10 being located on the first substrate base 00, the driving layer 10 including a heating element R; the microfluidic structure layer 20 is positioned on one side, away from the first substrate base plate 00, of the driving layer 10, the microfluidic structure layer 20 comprises at least one first channel 21, and the first channel 21 comprises a heating area H and a driving area Q; the orthographic projection of the heating element R on the plane of the first substrate base plate 00 at least partially overlaps with the orthographic projection of the heating area H on the plane of the first substrate base plate 00.
Wherein the microfluidic structure layer 20 includes at least one first channel 21, the first channel 21 functions to define a droplet moving path, and the number of the first channels 21 may be different according to different experimental schemes, and fig. 3 only illustrates the case of including one first channel 21, but is not limited thereto.
The first substrate base plate 00 is used as a bearing object of the microfluidic panel 200, and is used for stacking other film layers on the substrate base plate 00 in sequence.
It can be understood that the microfluidic device 200 provided in this embodiment is provided with the heating element R on the driving layer 10, and the orthographic projection of the heating element R on the plane of the first substrate base plate 00 is at least partially overlapped with the orthographic projection of the heating area H of the first channel 21 in the microfluidic structure layer 20 on the plane of the first substrate base plate 00. In the use process of the microfluidic device, the first channel 21 is filled with liquid droplets, and the heating element R is instantaneously heated (above 100 ℃) by utilizing the principle of thermal expansion, so that the air in the heating area H at the position corresponding to the heating element R is rapidly expanded, the liquid droplets in the heating area H are divided into a plurality of sub-liquid droplets, an initial driving force is provided for the sub-liquid droplets, and the sub-liquid droplets are driven to move in the first channel 21. That is, the micro-fluidic device 200 provided in this embodiment integrates the large fluid driving structure inside the device by using the heating element R, so as to further expand the detection application range of the digital micro-fluidic chip, be compatible with fluids of different magnitudes, increase the integration level of the device, replace an external driving device, reduce the volume of the device, and increase the use portability. After the heating zone H provides the initial force to the droplet, the droplet moves to the driving zone Q, which continues to provide a driving force to the droplet, so that the droplet can also move to the target position. The specific structure of the driving region Q is not specifically limited herein, and will be described in detail later.
The heating element R is heated to 100 ℃ or higher instantaneously, the specific heating temperature may be determined according to the properties of the droplet, the specific heating temperature is not limited in the present application, and the following examples will be described with reference to 100 ℃.
In some alternative embodiments, and with continued reference to fig. 2 and 3, the present embodiment provides that the heating element R in the microfluidic device 200 is a heating electrode R0.
It should be understood that the present embodiment only uses the heating element R as the heating electrode R0, but is not limited thereto, and may also be a structure such as a heat bubble micro pump. The heating element R is provided as the heating electrode R0, and the heating electrode R0 is integrated in the driving layer 10, instead of an external driving device, so that the volume of the device is reduced, and the use portability is increased. Since the driving layer 10 may further be provided with other metal layers, for example, a stacked driving component may be provided, the driving component may be a transistor, the transistor may include a first metal layer or a second metal layer used as a gate or a source/drain, and may also be an electrode layer used for transmitting a driving signal, and the heating electrode R0 may be provided in the same layer as the metal layer in the driving layer 10, which is beneficial to the thinning process, and the details will be described later.
In some alternative embodiments, and with continued reference to fig. 2 and 3, the present embodiment provides that the heating electrode R0 in the microfluidic device 200 is a metal electrode.
It is understood that, in the microfluidic device 200 provided in the present embodiment, only the heating electrode R0 is used as a metal electrode, but the present invention is not limited thereto, and a transparent oxide electrode, a graphite electrode, or the like may be provided. The metal electrode can be a molybdenum electrode or an aluminum electrode, optionally, the metal electrode is a molybdenum electrode, and the molybdenum electrode is heat-resistant and has high thermal conductivity, so that the requirement on instantaneous heating of the heating electrode can be met. However, the present invention is not limited thereto, and the material of the heating electrode R0 may be selected according to the actual situation, and any material having good thermal conductivity and heat resistance is within the scope of the present invention.
In some alternative embodiments, shown in fig. 2 and 4, fig. 4 is a partial enlarged view of a in fig. 2. The present embodiment provides a microfluidic device 200: the heating elements R include a first heating element R1 and a second heating element R2; the heating zone H includes a first heating zone H1 and a second heating zone H2, the first heating zone H1 and the second heating zone H2 being respectively located at both ends of the first passage 21; an orthographic projection of the first heating element R1 on the plane of the first substrate base plate 00 and an orthographic projection of the first heating area H1 on the plane of the first substrate base plate 00 at least partially overlap, and an orthographic projection of the second heating element R2 on the plane of the first substrate base plate 00 and an orthographic projection of the second heating area H2 on the plane of the first substrate base plate 00 at least partially overlap.
In fig. 4, only the orthographic projection of the first heating element R1 on the plane of the first substrate base plate 00 and the orthographic projection of the first heating area H1 on the plane of the first substrate base plate 00 overlap each other, and the orthographic projection of the second heating element R2 on the plane of the first substrate base plate 00 and the orthographic projection of the second heating area H2 on the plane of the first substrate base plate 00 overlap each other as an example, but not limited thereto, the heating element and the heating area may be completely overlapped, and the present application is not limited thereto.
It can be understood that in the microfluidic device 200 provided in this embodiment, the heating region H includes a first heating region H1 and a second heating region H2, and the first heating region H1 and the second heating region H2 are respectively located at two ends of the first channel 21, where the first heating region H1 and the second heating region H2 are respectively located at two ends of the first channel 21, and the two ends are not limited to the head and the tail ends of the first channel, but may be two positions of one channel. The heating element R comprises a first heating element R1 and a second heating element R2, an orthographic projection of the first heating element R1 on the plane of the first substrate base plate 00 and an orthographic projection of the first heating area H1 on the plane of the first substrate base plate 00 at least partially overlap, an orthographic projection of the second heating element R2 on the plane of the first substrate base plate 00 and an orthographic projection of the second heating area H2 on the plane of the first substrate base plate 00 at least partially overlap, that is, the first heating element R1 and the second heating element R2 are respectively arranged at two positions of the first channel 21, by respectively controlling the first heating element R1 and the second heating element R2, the temperatures of the first heating element R1 and the second heating element R2 are alternately set high and low, for example, at a time a, the second heating element R2 does not receive a heating signal, the temperature of the second heating element R2 may be room temperature, and the first heating element R1 applies a heating signal to the first heating element R1, the first heating element R1 receives the heating signal and increases in temperature (above 100 ℃), air in the first heating zone H1 at the position corresponding to the first heating element R1 is thermally expanded to cause the droplet to move along the first heating zone H1 toward the second heating zone H2, at the next time b, the first heating element R1 does not receive the heating signal, the temperature of the first heating element R1 may be room temperature, the heating signal is applied to the second heating element R2, the second heating element R2 receives the heating signal and increases in temperature (above 100 ℃), air in the second heating zone H2 corresponding to the second heating element R2 is thermally expanded to cause the droplet to move along the second heating zone H2 toward the first heating zone H1, so as to set time a and time b, the droplet reciprocates between the first heating zone H1 and the second heating zone H2, and the droplet in the first heating zone H1 and the second heating zone H2 is agitated by the first heating zone R3521, so that the droplets in the first channel 21 are sufficiently merged for reaction. It should be noted that, it is only necessary to apply a temperature decreasing signal to the first heating element R1 to make the temperature of the first heating element R1 lower than that of the second heating element R2 at the time b, and optionally, the temperature of the first heating element R1 may be room temperature, so that the air expands faster due to the higher temperature difference between the first heating element R1 and the second heating element R2, and the liquid droplets move in a reciprocating manner to accelerate, thereby increasing the stirring rate.
In some alternative embodiments, as shown in fig. 5 and fig. 6, fig. 5 is a schematic structural diagram of another microfluidic device provided by the present invention, and fig. 6 is a cross-sectional view along direction M-M' in fig. 5. The driving layer 10 in the microfluidic device 200 in this embodiment further includes at least one driving electrode P, and an orthogonal projection of the driving electrode P on the plane of the first substrate 00 at least partially overlaps an orthogonal projection of the driving region Q on the plane of the first substrate 00.
In fig. 6, only the same layer of the driving electrode P and the heating electrode R0 is taken as an example, and the same layer of the driving electrode P and the heating electrode R0 is advantageous for the process of the microfluidic device 200 and for the thinning of the microfluidic device 200, but the present invention is not limited thereto, and the driving electrode P and the heating electrode R0 may be arranged in different layers, and the specific situation may be set according to a specific required film structure in the microfluidic device 200.
It can be understood that the driving layer 10 of the microfluidic device 200 provided in this embodiment further includes a driving electrode P, and an orthogonal projection of the driving electrode P on the plane of the first substrate 00 at least partially overlaps an orthogonal projection of the driving region Q on the plane of the first substrate 00. Introducing liquid drops into the first channel 21, and instantly heating the heating element R (above 100 ℃) by utilizing the principle of thermal expansion to rapidly expand air in the heating area H at the position corresponding to the heating element R, dividing the liquid drops in the heating area H into a plurality of sub-liquid drops, providing an initial force for the sub-liquid drops to move in the first channel 21, moving the subsequent sub-liquid drops to the driving area Q, and continuously driving the sub-liquid drops to continuously move in the first channel 21 by controlling the potential of the driving electrode P corresponding to the driving area Q to finally reach the required position; in fig. 5, only 2 driving electrodes P are provided for each first channel 21 as an example, but the number of the driving electrodes P is not limited thereto, and the number, shape and arrangement of the driving electrodes P may be set according to actual requirements.
In some alternative embodiments, shown in conjunction with FIG. 7, FIG. 7 is a further cross-sectional view taken along line M-M' of FIG. 5. The present embodiment provides a microfluidic device 200: the micro-fluidic structure layer further comprises a second substrate base plate 30 which is oppositely arranged, the second substrate base plate 30 is positioned on one side of the micro-fluidic structure layer 20 away from the driving layer 10, and the second substrate base plate 30 comprises a common electrode layer 31; the orthographic projection of the common electrode layer 31 on the plane of the first substrate 00 at least partially overlaps with the orthographic projection of the driving electrode P on the plane of the first substrate 00.
It can be understood that the microfluidic device 200 provided in this embodiment further includes a second substrate base plate 30 disposed opposite to the first substrate base plate 00, the second substrate base plate 30 includes a common electrode layer 31 on a side away from the first substrate base plate 00, and an orthogonal projection of the common electrode layer 31 on a plane where the first substrate base plate 00 is located and an orthogonal projection of the driving electrode P on a plane where the first substrate base plate 00 is located are disposed to at least partially overlap each other, and further, by respectively controlling voltages of the common electrode layer 31 and the driving electrode P, a voltage between the common electrode layer 31 and the driving electrode P is greater than a droplet movement threshold voltage, a droplet is driven to move by the common electrode layer 31 and the driving electrode P, where fig. 7 only takes the common electrode layer 31 as a plane electrode as an example, but is not limited thereto, as long as it is ensured that the orthogonal projection of the common electrode layer 31 on the plane where the first substrate base plate 00 is located and the orthogonal projection of the driving electrode P on the plane where the first substrate base plate 00 is located are at least partially overlapped, the liquid droplets may be driven to move by forming an electric field between the common electrode layer 31 and the driving electrode P.
In some alternative embodiments, shown in fig. 8 and 9, fig. 8 is a further cross-sectional view along M-M 'in fig. 5, and fig. 9 is a further cross-sectional view along M-M' in fig. 5. The present embodiment provides a microfluidic device 200: the driving layer 10 is arranged on the microfluidic structure layer 20, the third substrate base plate 40 is arranged on one side, away from the driving layer 10, of the microfluidic structure layer 20, the third substrate base plate 40 comprises at least one through hole 41 penetrating through the third substrate base plate 40, and an orthographic projection of the through hole 41 on a plane where the first substrate base plate 00 is located and an orthographic projection of the first channel 21 on the plane where the first substrate base plate 00 is located at least partially overlap.
It can be understood that the microfluidic device 200 provided in this embodiment further includes a third substrate base plate 40 disposed opposite to the first substrate base plate 00, the third substrate base plate 40 includes at least one through hole 41 penetrating through the third substrate base plate 40, an orthogonal projection of the through hole 41 on the plane of the first substrate base plate 00 at least partially overlaps with an orthogonal projection of the first channel 21 on the plane of the first substrate base plate 00, and the through hole 41 is a feed inlet of the first channel 21 and is used for adding the liquid drop to be fused at any time. With continued reference to fig. 9, the third substrate base plate 40 further includes a negative pressure through hole 42 penetrating through the third substrate base plate 40, the negative pressure through hole 42 may be located on a side of the heating region H away from the driving region Q, that is, after the heating element R is heated to expand the air in the heating region to promote the movement of the liquid droplets, the air may enter through the negative pressure through hole 42 to release the negative pressure, so as to achieve the air pressure balance between the inner and outer first channels 21.
In some alternative embodiments, as shown in fig. 8, the present embodiment provides that the orthogonal projection of the through hole 41 on the plane of the first substrate base 00 at least partially overlaps the orthogonal projection of the heating region H on the plane of the first substrate base 00 in the microfluidic device 200.
It can be understood that, in the microfluidic device 200 provided in this embodiment, the orthographic projection of the through hole 41 on the plane of the first substrate base plate 00 is at least partially overlapped with the orthographic projection of the heating area H on the plane of the first substrate base plate 00, that is, the heating area H is at the projection position of the third substrate base plate 40, a feed port for a droplet is provided on the third substrate base plate 40, and the droplet entering the first channel 21 through the through hole 41 can be just located in the heating area H, so that the heating element R heats and expands the air in the heating area H, and the droplet is further pushed to move toward the first channel 21, thereby avoiding the problem that the driving force is insufficient when the droplet is too far away from the heating area H.
In some alternative embodiments, and continuing with fig. 3, the present embodiment provides a microfluidic device 200: a hydrophobic layer 50 is also included, the hydrophobic layer 50 being located between the driving layer 10 and the microfluidic structure layer 20.
It can be understood that the microfluidic device 200 provided in the embodiment further includes the hydrophobic layer 50, and the hydrophobic layer 50 can prevent the liquid droplet from penetrating into the substrate of the microfluidic device 200, so as to not only reduce the loss of the liquid droplet and facilitate the liquid droplet to move in the first channel 21, but also prevent the liquid droplet from penetrating into the microfluidic device. Specifically, the water-repellent layer 50 is an insulating water-repellent layer, and the insulating water-repellent layer 50 also has an insulating function, whereby the driving electrodes P and the heating elements R can be electrically insulated from the droplets. Illustratively, the hydrophobic layer 50 may be formed of teflon (teflon), and the hydrophobic layer 50 may also be formed of an inorganic insulating material or an organic insulating material, for example, a resin, which is not limited by the present invention.
In some alternative embodiments, shown in conjunction with FIG. 10, FIG. 10 is a further cross-sectional view taken along line M-M' of FIG. 5. The present embodiment provides a microfluidic device 200: the driving layer 10 further includes a heating signal line 11, and the heating signal line 11 is electrically connected to the heating element R for providing a heating signal to the heating element R.
It can be understood that the driving layer 10 in the micro-fluidic device 200 provided in this embodiment includes a first metal layer M1, a second metal layer M2, and a first electrode layer M3 sequentially stacked on the first substrate 00, an insulating layer J is disposed between adjacent first metal layer M1, second metal layer M2, and first electrode layer M3, the driving electrode P and the heating element R are both located in the first electrode layer M3, and the driving electrode P and the heating element R are disposed in the same layer, which may be beneficial to the lightness and thinness of the micro-fluidic device 200, but is not limited thereto, and different layers of the driving electrode P and the heating element R may also be disposed. Further, the driving layer 10 further includes a heating signal line 11, the heating signal line 11 is located on the second metal layer M2, the heating signal line 11 is electrically connected to the heating element R for providing a heating signal to the heating element R, the heating element R adopts a passive driving mode, and can be directly connected to a driving circuit board (not shown in the figure) of the microfluidic device 200 through the heating signal line 11, and the heating element R can be controlled through the heating signal line 11 by presetting a timing sequence in the driving circuit board. The driving electrode P may be driven actively, the driving electrode P may be electrically connected to a source of the transistor TFT, a drain of the transistor TFT is also electrically connected to a driving circuit board (not shown), and the driving circuit board controls a voltage of the driving electrode P by presetting a timing sequence, so as to drive the droplet to move. The source and the drain of the transistor TFT are also located in the second metal layer M2, and the same layer of the heating signal line 11 and the source and the drain of the transistor TFT is provided, which is beneficial to simplifying the process of the driving layer 10 and also beneficial to thinning the microfluidic device 200, but not limited thereto, the heating signal line 11 may also be provided with other metal layers, or a metal layer on one side is separately provided, and the specific structure may be set according to the actual situation.
In some alternative embodiments, referring to fig. 11, fig. 11 is a flow chart of a driving method of a microfluidic device according to the present invention. The present embodiment provides a method for driving a microfluidic device, which is suitable for driving the microfluidic device 200 shown in fig. 2 and 3, that is, the structure of the microfluidic device 200 can be combined with that shown in fig. 2 and 3: the microfluidic device comprises: a first substrate base plate 00; a driving layer 10, the driving layer 10 being located on the first substrate base 00, the driving layer 10 including a heating element R; the microfluidic structure layer 20 is positioned on one side, away from the first substrate base plate 00, of the driving layer 10, the microfluidic structure layer 20 comprises at least one first channel 21, and the first channel 21 comprises a heating area H and a driving area Q; the orthographic projection of the heating element R on the plane of the first substrate base plate 00 at least partially overlaps with the orthographic projection of the heating area H on the plane of the first substrate base plate 00;
the driving method comprises the following steps:
step S1: introducing liquid drops into the first channel;
step S2: applying a heating signal to a heating element, the heating element expanding air within a heating zone, dividing a droplet located within the heating zone into a plurality of sub-droplets;
step S3: and driving the daughter droplets to move within the first channel.
It can be understood that, in the driving method of the microfluidic device provided in this embodiment, the structure of the microfluidic device 200 is first defined, the microfluidic device 200 is provided with the heating element R on the driving layer 10, and an orthographic projection of the heating element R on the plane of the first substrate base plate 00 is at least partially overlapped with an orthographic projection of the heating area H of the first channel 21 in the microfluidic structure layer 20 on the plane of the first substrate base plate 00. And then introducing liquid drops into the first channel 21, instantly heating the heating element R (above 100 ℃) by utilizing the principle of thermal expansion, so that the air in the heating area H at the position corresponding to the heating element R is rapidly expanded, dividing the liquid drops in the heating area H into a plurality of sub-liquid drops, and driving the sub-liquid drops to move in the first channel 21. That is, the micro-fluidic device 200 provided in this embodiment integrates the large fluid driving structure inside the device by using the heating element R, so as to further expand the detection application range of the digital micro-fluidic chip, be compatible with fluids of different magnitudes, increase the integration level of the device, replace an external driving device, reduce the volume of the device, and increase the use portability.
In some alternative embodiments, referring to fig. 11, the present embodiment provides a method for driving a microfluidic device, which is suitable for driving the microfluidic device 200 shown in fig. 4, wherein the heating element R in the microfluidic device 200 includes a first heating element R1 and a second heating element R2; the heating zone H includes a first heating zone H1 and a second heating zone H2, the first heating zone H1 and the second heating zone H2 being respectively located at both ends of the first passage 21; the orthographic projection of the first heating element R1 on the plane of the first substrate base plate 00 and the orthographic projection of the first heating area H1 on the plane of the first substrate base plate 00 at least partially overlap, and the orthographic projection of the second heating element R2 on the plane of the first substrate base plate 00 and the orthographic projection of the second heating area H2 on the plane of the first substrate base plate 00 at least partially overlap;
the driving method further includes:
step S2 further includes: sending a first heating signal to the first heating element and a second heating signal to the second heating element; the working time of the micro-fluidic device comprises a first time and a second time, and the voltage value of the first heating signal is greater than that of the second heating signal at the first time; at the second moment, the voltage value of the first heating signal is smaller than that of the second heating signal.
It can be understood that in the driving method of the microfluidic device provided in this embodiment, the heating region H defined in the microfluidic device 200 includes a first heating region H1 and a second heating region H2, and the first heating region H1 and the second heating region H2 are respectively located at two ends of the first channel 21, wherein the first heating region H1 and the second heating region H2 are respectively located at two ends of the first channel 21, and the two ends are not limited to the head and the tail ends of the first channel, but may be two positions of one channel. The heating element R comprises a first heating element R1 and a second heating element R2, an orthographic projection of the first heating element R1 on the plane of the first substrate base plate 00 and an orthographic projection of the first heating area H1 on the plane of the first substrate base plate 00 at least partially overlap, and an orthographic projection of the second heating element R2 on the plane of the first substrate base plate 00 and an orthographic projection of the second heating area H2 on the plane of the first substrate base plate 00 at least partially overlap, namely, the first heating element R1 and the second heating element R2 are respectively arranged on two positions of the first channel 21. Sending a first heating signal to the first heating element R1 and a second heating signal to the second heating element R2; the working moments of the microfluidic device include a first moment and a second moment, at the first moment, the second heating element R2 does not receive a heating signal, the temperature of the second heating element R2 can be room temperature, a heating signal is applied to the first heating element R1, the temperature of the first heating element R1 receiving the heating signal is increased (above 100 ℃), the voltage value of the first heating signal is greater than that of the second heating signal, and at the moment, air in the first heating zone H1 at the position corresponding to the first heating element R1 is thermally expanded, so that the liquid drops are driven to move along the direction from the first heating zone H1 to the second heating zone H2; at the second time, the first heating element R1 does not receive the heating signal, the temperature of the first heating element R1 may be room temperature, the heating signal is applied to the second heating element R2, the temperature of the second heating element R2 receiving the heating signal increases (above 100 ℃), and the voltage value of the first heating signal is smaller than that of the second heating signal, at this time, the air in the second heating zone H2 corresponding to the position of the second heating element R2 is thermally expanded, so that the liquid droplet is caused to move along the direction of the second heating zone H2 pointing to the first heating zone H1, so as to set the first time and the second time in a reciprocating manner, the liquid droplet reciprocates between the first heating zone H1 and the second heating zone H2, that is, stirring of the liquid droplet between the first heating zone H1 and the second heating zone H2 of the first channel 21 is achieved, so that the liquid droplet in the first channel 21 is sufficiently fused and reacted.
In some alternative embodiments, as shown in fig. 11, the present embodiment provides a driving method of a microfluidic device in which the first time and the second time are alternately performed.
It can be understood that, by setting the first time and the second time to alternate, the temperature of the first heating element R1 at one time can be higher than that of the second heating element R2, and the temperature of the first heating element R1 at the next time can be lower than that of the second heating element R2, and the reciprocating setting is implemented to stir the liquid drops between the first heating area H1 and the second heating area H2 of the first channel 21, so that the liquid drops in the first channel 21 are fully fused and reacted.
As can be seen from the above embodiments, the microfluidic device and the driving method thereof according to the present invention at least achieve the following advantages:
compared with the prior art, the micro-fluidic device and the driving method thereof provided by the invention comprise a first substrate, a driving layer is positioned on the first substrate, and the driving layer comprises a heating element; the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area; the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate. The heating element is integrated in the microfluidic device, the orthographic projection of the heating element on the plane of the first substrate base plate is at least partially overlapped with the orthographic projection of the heating zone on the plane of the first substrate base plate, air in the heating zone is expanded through the heating element, the liquid drop in the heating zone is divided into a plurality of sub-liquid drops, and the sub-liquid drops are driven to move in the first channel, so that additional driving equipment is not needed, the volume of the equipment is reduced, and the use portability is increased.
Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.
Claims (13)
1. A microfluidic device, comprising:
a first substrate base plate;
a drive layer on the first substrate base, the drive layer comprising a heating element;
the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area;
the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate.
2. The microfluidic device according to claim 1, wherein the heating element is a heating electrode.
3. The microfluidic device according to claim 2, wherein the heating electrode is a metal electrode.
4. The microfluidic device of claim 1, wherein the heating element comprises a first heating element and a second heating element;
the heating zones comprise a first heating zone and a second heating zone, and the first heating zone and the second heating zone are respectively positioned at two ends of the first channel;
the orthographic projection of the first heating element on the plane of the first substrate base plate and the orthographic projection of the first heating area on the plane of the first substrate base plate at least partially overlap, and the orthographic projection of the second heating element on the plane of the first substrate base plate and the orthographic projection of the second heating area on the plane of the first substrate base plate at least partially overlap.
5. The microfluidic device according to claim 1, wherein the driving layer further comprises at least one driving electrode, and an orthographic projection of the driving electrode on the plane of the first substrate at least partially overlaps with an orthographic projection of the driving region on the plane of the first substrate.
6. The microfluidic device according to claim 5, further comprising a second substrate disposed opposite to the microfluidic structure layer, the second substrate being located on a side of the microfluidic structure layer away from the driving layer, the second substrate comprising a common electrode layer;
the orthographic projection of the common electrode layer on the plane of the first substrate base plate is at least partially overlapped with the orthographic projection of the driving electrode on the plane of the first substrate base plate.
7. The microfluidic device according to claim 1, further comprising a third substrate base plate disposed oppositely, the third substrate base plate being located on a side of the microfluidic structure layer away from the driving layer,
the third substrate base plate comprises at least one through hole penetrating through the third substrate base plate, and the orthographic projection of the through hole on the plane of the first substrate base plate is at least partially overlapped with the orthographic projection of the first channel on the plane of the first substrate base plate.
8. The microfluidic device according to claim 7, wherein an orthographic projection of the through hole on the plane of the first substrate base plate at least partially overlaps with an orthographic projection of the heating region on the plane of the first substrate base plate.
9. The microfluidic device according to claim 1, further comprising a hydrophobic layer between the driving layer and the microfluidic structure layer.
10. The microfluidic device according to claim 1, wherein the driving layer further comprises a heating signal line electrically connected to the heating element for providing a heating signal to the heating element.
11. A method of driving a microfluidic device, the microfluidic device comprising:
a first substrate base plate;
a drive layer on the first substrate base, the drive layer comprising a heating element;
the microfluidic structure layer is positioned on one side, far away from the first substrate base plate, of the driving layer and comprises at least one first channel, and the first channel comprises a heating area and a driving area;
the orthographic projection of the heating element on the plane of the first substrate base plate at least partially overlaps with the orthographic projection of the heating area on the plane of the first substrate base plate;
the driving method includes:
introducing liquid drops into the first channel;
applying a heating signal to the heating element, the heating element causing air within the heating zone to expand, dividing a droplet located within the heating zone into a plurality of sub-droplets;
and driving the sub-droplets to move within the first channel.
12. The driving method according to claim 11, wherein the heating element includes a first heating element and a second heating element, the heating zones include a first heating zone and a second heating zone, the first heating zone and the second heating zone are respectively located at both ends of the first channel;
the orthographic projection of the first heating element on the plane of the first substrate base plate and the orthographic projection of the first heating area on the plane of the first substrate base plate at least partially overlap, and the orthographic projection of the second heating element on the plane of the first substrate base plate and the orthographic projection of the second heating area on the plane of the first substrate base plate at least partially overlap;
the driving method further includes:
sending a first heating signal to the first heating element and a second heating signal to the second heating element;
the working time of the micro-fluidic device comprises a first time and a second time, and the voltage value of the first heating signal is greater than that of the second heating signal at the first time; and at the second moment, the voltage value of the first heating signal is smaller than that of the second heating signal.
13. The driving method according to claim 12, wherein the first timing and the second timing are alternately performed.
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