CN114096802A - 一种陀螺仪及惯性传感器 - Google Patents

一种陀螺仪及惯性传感器 Download PDF

Info

Publication number
CN114096802A
CN114096802A CN202080001602.2A CN202080001602A CN114096802A CN 114096802 A CN114096802 A CN 114096802A CN 202080001602 A CN202080001602 A CN 202080001602A CN 114096802 A CN114096802 A CN 114096802A
Authority
CN
China
Prior art keywords
resonant
ring
gyroscope
driving
metal wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202080001602.2A
Other languages
English (en)
Other versions
CN114096802B (zh
Inventor
娄迅
王红超
沈健
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Goodix Technology Co Ltd
Original Assignee
Shenzhen Goodix Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Goodix Technology Co Ltd filed Critical Shenzhen Goodix Technology Co Ltd
Publication of CN114096802A publication Critical patent/CN114096802A/zh
Application granted granted Critical
Publication of CN114096802B publication Critical patent/CN114096802B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

一种陀螺仪及惯性传感器,该陀螺仪包括磁性部件(1)、至少两个谐振环(21)和多条金属线(3),各谐振环(21)同心设置形成谐振多环(2),磁性部件(1)位于谐振多环内腔(22),金属线(3)的至少部分设置于谐振环(21)。通过增加谐振环(21)的数量,能够增加金属线(3)的设置长度,进而提升金属线(3)受到的安培力,同时设置多个谐振环(21)还能够增加陀螺仪的振动质量,降低陀螺仪工作时产生的布朗噪声,进而提升陀螺仪的信噪比和抗冲击性能。

Description

PCT国内申请,说明书已公开。

Claims (19)

  1. PCT国内申请,权利要求书已公开。
CN202080001602.2A 2020-05-15 2020-05-15 一种陀螺仪及惯性传感器 Active CN114096802B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/090473 WO2021226993A1 (zh) 2020-05-15 2020-05-15 一种陀螺仪及惯性传感器

Publications (2)

Publication Number Publication Date
CN114096802A true CN114096802A (zh) 2022-02-25
CN114096802B CN114096802B (zh) 2024-03-01

Family

ID=78526303

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080001602.2A Active CN114096802B (zh) 2020-05-15 2020-05-15 一种陀螺仪及惯性传感器

Country Status (2)

Country Link
CN (1) CN114096802B (zh)
WO (1) WO2021226993A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114485600B (zh) * 2022-03-15 2022-09-13 重庆天箭惯性科技股份有限公司 一种多锚点高强度多波动环形结构集成陀螺
CN116124111A (zh) * 2023-04-13 2023-05-16 中国人民解放军国防科技大学 一种电磁式熔融石英环形微陀螺仪及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1312906A (zh) * 1998-08-11 2001-09-12 Bae系统公共有限公司 角速度传感器
CN1710383A (zh) * 2005-06-17 2005-12-21 东南大学 调谐式微机电陀螺
CN102089620A (zh) * 2008-07-12 2011-06-08 大西洋惯性系统有限公司 振动结构陀螺仪的或者涉及振动结构陀螺仪的改进
CN103363970A (zh) * 2013-06-20 2013-10-23 上海交通大学 电磁驱动电磁检测体声波谐振三轴微陀螺及其制备方法
CN109269490A (zh) * 2018-11-02 2019-01-25 杨荣彬 一种多单元耦合的酒杯模态陀螺仪及其操作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2322196B (en) * 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
CN104976996B (zh) * 2015-08-07 2017-11-21 中国人民解放军国防科学技术大学 带周期分布集中质量块的嵌套环式mems振动陀螺
CN108007449B (zh) * 2017-12-06 2021-04-20 中国人民解放军国防科技大学 带周期分布柔性子系统的嵌套环式mems振动陀螺
GB2570732B (en) * 2018-02-06 2023-01-11 Atlantic Inertial Systems Ltd Angular rate sensors
CN108955662B (zh) * 2018-04-27 2022-08-23 苏州大学 具有频差调节结构的中心轴对称谐振陀螺仪
CN108613669B (zh) * 2018-06-27 2022-02-22 苏州文智芯微系统技术有限公司 正多边形盘状mems谐振陀螺

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1312906A (zh) * 1998-08-11 2001-09-12 Bae系统公共有限公司 角速度传感器
CN1710383A (zh) * 2005-06-17 2005-12-21 东南大学 调谐式微机电陀螺
CN102089620A (zh) * 2008-07-12 2011-06-08 大西洋惯性系统有限公司 振动结构陀螺仪的或者涉及振动结构陀螺仪的改进
CN103363970A (zh) * 2013-06-20 2013-10-23 上海交通大学 电磁驱动电磁检测体声波谐振三轴微陀螺及其制备方法
CN109269490A (zh) * 2018-11-02 2019-01-25 杨荣彬 一种多单元耦合的酒杯模态陀螺仪及其操作方法

Also Published As

Publication number Publication date
CN114096802B (zh) 2024-03-01
WO2021226993A1 (zh) 2021-11-18

Similar Documents

Publication Publication Date Title
CN114096802A (zh) 一种陀螺仪及惯性传感器
EP1455162A1 (en) Rotary gyroscope
US10746548B2 (en) Ring gyroscope structural features
US6367326B1 (en) Angular velocity sensor
EP0851212B1 (en) Angular velocity sensor
US9568314B2 (en) Bell-shaped vibrator type angular rate gyro
JPH10267667A (ja) 振動構造ジャイロスコープ
JPH06241812A (ja) 振動ジャイロ用振動子および振動ジャイロ用検出回路
CN104931031A (zh) 一种外缘固定式静电驱动多环陀螺及其制备方法
CN111156980A (zh) Mems陀螺仪
CN109186576A (zh) 一种新型正八边环形谐振式微机械陀螺
EP1014037A1 (en) Spring for a resonance ring of an angular rate sensor
CN107796996B (zh) 具有单自由端的弯曲梁微谐振式静电计及电荷检测方法
JPH05248872A (ja) 慣性センサー
CN105371832A (zh) 一种圆盘多环内双梁孤立圆环谐振陀螺及其制备方法
CN113029121A (zh) Mems陀螺仪
CN112683256A (zh) Mems陀螺仪
CN214149332U (zh) Mems陀螺仪及电子产品
CN100483073C (zh) 微型振动式双轴感测陀螺仪
CN213090780U (zh) 一种mems陀螺仪及电子产品
CN216410213U (zh) 微机械陀螺仪
CN213120570U (zh) 一种mems陀螺仪及电子产品
CN214149333U (zh) Mems陀螺仪及电子产品
EP3820028A1 (en) Variable reluctance resolver
CN213120571U (zh) 陀螺仪

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant