CN114089310A - Laser beam target coupling sensor - Google Patents
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- CN114089310A CN114089310A CN202111407061.6A CN202111407061A CN114089310A CN 114089310 A CN114089310 A CN 114089310A CN 202111407061 A CN202111407061 A CN 202111407061A CN 114089310 A CN114089310 A CN 114089310A
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Abstract
A laser beam target coupling sensor solves the problem of high-precision beam target coupling and belongs to the field of photoelectric sensors. The invention comprises the following steps: the side path monitoring unit is positioned at the side direction of the experimental target and is used for determining the target surface position of the experimental target and performing coarse positioning; the distance measurement module is used for determining the target surface position of the experimental target and performing fine positioning; in the positioning process, the focusing platform is utilized to drive the sensor main body to move, so that the experimental target is located at the pre-calibrated sensor conjugate position. The focal spot of the main laser beam and the target point on the experimental target are in an optical conjugate relation with the external reflecting surface of the double-sided reflector; the target point monitoring unit is positioned in the forward direction of the experimental target and monitors the position of the target point on the experimental target; the main laser beam monitoring unit is used for monitoring the laser focal spot position during beam target coupling; and determining the relative position relation between the target point and the focal spot, the beam collimation condition and the beam combination condition by using the conversion relation between the target point and the focal spot position. And adjusting the incident position of the main laser to complete the laser beam target coupling.
Description
Technical Field
The invention relates to an ultra-small F # laser beam target coupling sensor, and relates to the field of photoelectric sensors.
Background
Ultra small F#The high-energy laser targeting physical experiment is an important research means in the advanced fields of extreme physics, relativistic plasma physics, strong radiation source, laser accelerator, laser nuclear physics and the like. In the high-energy laser targeting experiment, the precision positioning of the experimental target and the coupling of the high-precision beam target are important factors influencing the experimental result. As the target-hitting laser is approximately in normal incidence relative to the target, the requirements on target positioning and beam-target coupling precision are high, and the beam combination monitoring requirement is met, particularly F of the main laser beam#The laser focal spot is only between F/2 and F/3, the size of the laser focal spot is only 3-5 microns, the accurate positioning of the focal spot center is very difficult, the laser linewidth is large, the dispersion error is difficult to control, and the conventional optical conjugate beam target coupling sensor is difficult to meet the experimental requirements in the aspects of functions and indexes.
Disclosure of Invention
Aiming at the problem of high-precision beam target coupling of the existing optical conjugate sensor, the invention provides an ultra-small F # laser beam target coupling sensor.
The invention relates to an ultra-small F # laser beam target coupling sensor, which comprises:
the device comprises a target point monitoring unit, a side path monitoring unit, a main laser beam monitoring unit, a double-sided reflector 1, a distance measuring module 7, a No. 1 half-reflecting and half-transmitting mirror 8 and a focusing platform 14;
the target point monitoring unit is positioned in the forward direction of the experimental target 9, emergent light of the target point monitoring unit illuminates the forward direction of the experimental target 9 after being reflected by the internal reflection surface of the double-sided reflector 1, images the target surface of the experimental target 9 and monitors the position of the target point on the experimental target 9;
the side path monitoring unit is positioned at the side of the experimental target 9, the emergent light of the side path monitoring unit illuminates the side surface of the experimental target 9,
imaging the side surface of the experimental target 9 for determining the target surface position of the experimental target 9;
the No. 1 half-reflecting and half-transmitting mirror 8 is positioned between the experimental target 9 and the double-sided reflector 1, the distance measuring module 7 is positioned above the No. 1 half-reflecting and half-transmitting mirror 8, measuring light emitted by the distance measuring module 7 reaches the surface of the experimental target 9 after being reflected by the No. 1 half-reflecting and half-transmitting mirror 8, and the distance measuring module 7 is used for determining the target surface position of the experimental target 9;
the focal spot of the main laser beam and the target point on the experimental target 9 are in an optical conjugate relation with the outer reflecting surface of the double-sided reflecting mirror 1;
the main laser beam is incident to the outer reflecting surface of the double-sided reflector 1, and is converged to the main laser beam monitoring unit after being reflected by the outer reflecting surface of the double-sided reflector 1, and the main laser beam monitoring unit is used for monitoring the position of a laser focal spot during beam target coupling, the convergence quality of the main laser beam during focusing and the direction of the main laser beam during convergence;
the target point monitoring unit, the side path monitoring unit, the main laser beam monitoring unit, the double-sided reflector 1, the distance measuring module 7 and the No. 1 half-reflecting and half-transmitting mirror 8 jointly form a beam target coupling sensor main body;
the beam target coupling sensor main body is arranged on the focusing platform 14, and the focusing platform 14 drives the sensor main body to move, so that the target surface of the experimental target 9 is positioned at a pre-calibrated sensor conjugate position.
The invention relates to a beam target coupling method of an ultra-small F # laser beam target coupling sensor, which comprises the following steps:
s1, fixing the experimental target 9, monitoring the target surface position of the experimental target 9 by using a side monitoring unit, and adjusting the focusing platform 14 to drive the sensor main body to move so that the target surface of the experimental target 9 is positioned at a pre-calibrated sensor conjugate position to realize coarse positioning;
s2, monitoring the target surface position of the experimental target 9 by using the ranging module 7, and adjusting the focusing platform 14 to drive the sensor main body to move so that the target surface of the experimental target 9 is located at the pre-calibrated sensor conjugate position to realize fine positioning;
s3, determining the conversion relation between the target position monitored by the target monitoring unit and the laser focal spot position monitored by the main laser beam monitoring unit;
s4, the target point monitoring unit monitors the target point position A on the experimental target 9, and obtains the position B of the target point position corresponding to the laser focal spot on the main laser beam monitoring unit according to the conversion relation;
s5, enabling a main laser beam emitted by the main laser to be incident to an outer reflecting surface of the double-sided reflecting mirror 1 and converged to the main laser beam monitoring unit, and adjusting the normal incidence position of the main laser until the position of a laser focal spot monitored by the main laser beam monitoring unit is located at a position B;
s6, removing the ultra-small F # laser beam target coupling sensor, and performing beam target coupling by using the normal incidence position of the experimental target 9 and the main laser at the moment.
The beam target coupling sensor has the advantages that the mode that the multiple detectors are used for respectively monitoring the experimental target and the laser focal spot is adopted, the experimental target and the laser focal spot are accurately positioned, high-precision beam target coupling is realized, and the relative position relation between the target and the laser focal spot, the beam collimation condition and the beam combination condition are obtained through the technologies of target point micro-imaging, laser focal spot reflection amplification monitoring and the like.
Drawings
Fig. 1 is a schematic diagram of the principle of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
The invention relates to an ultra-small F # laser beam target coupling sensor, which comprises a target point monitoring unit, a side path monitoring unit, a main laser beam monitoring unit, a double-sided reflector 1, a distance measuring module 7, a No. 1 semi-reflecting and semi-transmitting mirror 8 and a focusing platform 14;
the target point monitoring unit is positioned in the forward direction of the experimental target 9, emergent light of the target point monitoring unit illuminates the forward direction of the experimental target 9 after being reflected by the internal reflection surface of the double-sided reflector 1, images the target surface of the experimental target 9 and monitors the position of the target point on the experimental target 9;
the side path monitoring unit is positioned at the side direction of the experimental target 9, and emergent light of the side path monitoring unit illuminates the side surface of the experimental target 9 and images the side surface of the experimental target 9 to determine the target surface position of the experimental target 9;
the No. 1 half-reflecting and half-transmitting mirror 8 is positioned between the experimental target 9 and the double-sided reflector 1, and the mirror surface and the optical axis of the target point monitoring unit after being turned by the double-sided reflector for 90 degrees form an angle of 45 degrees;
the distance measurement module 7 is positioned above the No. 1 transflective mirror 8, measurement light emitted by the distance measurement module 7 reaches the surface of the experimental target 9 after being reflected by the No. 1 transflective mirror 8, and the distance measurement module 7 is used for determining the target surface position of the experimental target 9;
the focal spot of the main laser beam and the target point on the experimental target 9 are in an optical conjugate relation with the outer reflecting surface of the double-sided reflecting mirror 1;
the main laser beam is incident to the outer reflecting surface of the double-sided reflector 1, and is converged to the main laser beam monitoring unit after being reflected by the outer reflecting surface of the double-sided reflector 1, and the main laser beam monitoring unit is used for monitoring the position of a laser focal spot during beam target coupling, the convergence quality of the main laser beam during focusing and the direction of the main laser beam during convergence;
the target point monitoring unit, the side path monitoring unit, the main laser beam monitoring unit, the double-sided reflector 1, the distance measuring module 7 and the No. 1 half-reflecting and half-transmitting mirror 8 jointly form a beam target coupling sensor main body;
the beam target coupling sensor main body is arranged on a focusing platform 14, and the motion direction of the focusing platform 14 is consistent with the direction of an optical axis of a target surface imaging objective lens 2 which turns 90 degrees after being reflected by a double-sided reflector 1; the focusing platform 14 drives the sensor body to move, so that the target surface of the experimental target 9 is located at a pre-calibrated sensor conjugate position.
In the embodiment, the side path monitoring unit and the distance measuring module 7 are arranged to perform rough positioning and accurate positioning on the experimental target 9 respectively, after the position of the experimental target 9 is determined, the target point monitoring unit and the main laser beam monitoring unit are used for monitoring the target point and the focal spot in real time to complete the alignment of the emergent focal spot of the main laser and the target point of the experimental target 9, and then beam target coupling can be performed.
The side path monitoring unit of the embodiment comprises a side path imaging objective lens 4, a side path monitoring CCD5 and a side path focusing platform 6;
the side path imaging objective lens 4, the side path monitoring CCD5 and the side path focusing platform 6 are located at the side direction of the experimental target, the side path imaging objective lens 4 and the side path monitoring CCD5 are carried by the side path focusing platform 6, and the motion direction of the side path focusing platform 6 is consistent with the optical axis direction of the side path imaging objective lens 4. The distance from the front end of the side path imaging objective 4 to the side surface of the experimental target is equal to the working distance of the side path imaging objective 4.
The coaxial illumination light source of the side path imaging objective 4 provides illumination for the side surface of the experimental target 9, the side surface of the experimental target 9 is imaged through the side path imaging objective 4, the side path monitoring CCD5 acquires images, and the target height position coarse positioning is carried out on the experimental target 9.
And the side path focusing platform 6 is used for focusing the side path imaging objective lens 4 and the side path monitoring CCD5 so as to adapt to experimental targets with different sizes.
The distance measuring module 7 of the embodiment is located above the No. 1 transflective mirror 8, the optical axis of the distance measuring module is 45 degrees with the mirror surface of the No. 1 transflective mirror 8, and the sum of the distance from the front end of the distance measuring module 7 to the No. 1 transflective mirror 8 along the direction of the optical axis and the distance from the No. 1 transflective mirror 8 to the experimental target 9 is equal to the working distance of the distance measuring module 7.
The measuring light emitted by the distance measuring module 7 is reflected by the No. 1 half-reflecting and half-transmitting mirror 8 and then reaches the surface of the experimental target 9, the position of the target surface is accurately measured, and the focusing platform 14 drives the sensor main body to move, so that the target surface is located at the pre-calibrated sensor conjugate position.
The target monitoring unit of the embodiment comprises a target surface imaging objective lens 2 and a target surface monitoring CCD 3;
the optical axis of the target surface imaging objective lens 2 and the reflecting surface of the double-sided reflector 1 form an angle of 45 degrees. The experimental target 9 is positioned on an optical axis of the target monitoring unit which is reflected by the double-sided reflector 1 and then turns 90 degrees, and the sum of the distance from the experimental target 9 to the double-sided reflector 1 and the distance from the front end of the target surface imaging objective lens 2 to the double-sided reflector 1 is equal to the working distance of the target surface imaging objective lens 2.
The illumination light emitted by the coaxial illumination light source of the target surface imaging objective lens 2 is reflected by the internal reflection surface of the double-sided reflector 1 and then transmitted through the No. 1 semi-reflecting and semi-transparent mirror 8 to provide illumination for the experimental target 9, the target surface imaging objective lens 2 performs 6 multiplied imaging on the experimental target, the target surface monitoring CCD3 acquires images, and the target position on the experimental target 9 is monitored.
The main laser beam monitoring unit of the embodiment comprises an ellipsoidal mirror 10, a No. 2 half-reflecting and half-transmitting mirror 11, a focal spot monitoring CCD12 and a coherent detector 13;
one focal point of the ellipsoidal mirror 10 coincides with the focal spot of the main laser beam and is in optical conjugate relation with the target point on the experimental target 9 relative to the outer reflecting surface of the double-sided reflecting mirror 1, and the long axis of the ellipsoidal mirror 10 is perpendicular to the optical axis of the main laser beam. The No. 2 semi-reflecting and semi-transparent mirror 11 is positioned between the ellipsoidal mirror 10 and the focal spot monitoring CCD 12. The normal direction of the image surface of the focal spot monitoring CCD12 forms 7.18 degrees with the long axis direction of the ellipsoidal mirror 10, and the image surface of the focal spot monitoring CCD12 coincides with the other focus of the ellipsoidal mirror 10. The coherent detector 13 is positioned on the light emergent side of the No. 2 transflective mirror 11, and the image plane of the coherent detector and the image plane of the focal spot monitoring CCD12 are in an optical conjugate relation with respect to the reflecting plane of the No. 2 transflective mirror 11.
The main laser beam reflected by the outer reflecting surface of the double-sided reflector 1 is incident to the corner point of the ellipsoid 10, the ellipsoid 10 performs 8 x amplification imaging on the main laser beam focal spot, the amplified main laser beam focal spot is incident to the No. 2 semi-reflective and semi-transparent mirror 11, the main laser beam focal spot of the transmission part of the No. 2 semi-reflective and semi-transparent mirror 11 is collected by a focal spot monitoring CCD12, the main laser beam focal spot of the reflection part of the No. 2 semi-reflective and semi-transparent mirror 11 is collected by a coherent detector 13 and is used for obtaining the phase difference of the light beams when the main laser beams are combined, when the state of the two main laser beams needs to be monitored, the direction of the two light beams is monitored, and the situation of the same wave surface of the two light beams, namely the phase difference of the two light beams, is also monitored; an image plane of the coherent detector 13 and an image plane of the focal spot monitoring CCD12 are in an optical conjugate relation with respect to a reflecting plane of the No. 2 transflective mirror 11.
The function of the focal spot monitoring CCD12 includes three aspects: and monitoring the position of a laser focal spot during beam target coupling, the focusing quality of a light beam during focusing of the main laser beam and the direction of the light beam during focusing of the main laser beam.
The double-sided reflector 1, the target surface imaging objective lens 2, the target surface monitoring CCD3, the side path imaging objective lens 4, the side path monitoring CCD5, the side path focusing platform 6, the distance measuring module 7, the No. 1 transflective mirror 8, the experimental target 9, the ellipsoidal mirror 10, the No. 2 transflective mirror 11, the focal spot monitoring CCD12 and the coherent detector 13 jointly form a beam target coupling sensor main body.
The embodiment also comprises a vertical rotary table 15, a six-degree-of-freedom positioning platform 16 and a vertical lifting platform 17;
the vertical turntable 15 is located below the focusing platform 14, bears and drives the focusing platform 14 and the beam target coupling sensor main body to rotate, and the rotating shaft direction of the vertical turntable is the vertical direction. The vertical turntable 15 is used to bring the beam target coupling sensor body into and out of the target chamber, and to make vertical direction adjustment in the target chamber. The six-degree-of-freedom positioning platform 16 is located between the vertical rotary table 15 and the vertical lifting platform 17, the upper working plane is connected with the bottom of the vertical rotary table 15, and the lower base plane is connected with the vertical lifting platform 17. The six-degree-of-freedom positioning platform 16 is used for adjusting the spatial pose of the beam target coupling sensor main body in the center of the target chamber. The vertical lifting platform 17 is located at the lowest part, bears the six-degree-of-freedom positioning platform 16, the vertical rotary table 15, the focusing platform 14 and the beam target coupling sensor main body, and has a vertical motion direction.
The vertical turntable 15 drives the sensor body to rotate so as to meet the beam target coupling requirements of the incident main laser beams with different azimuth angles (theta angles). The vertical lift platform 17 is used to transport the beam target coupling sensor into and out of the target chamber, as well as to make extensive vertical (Z-direction) adjustments within the target chamber. When the experimental target deviates from the center of the target chamber according to the target practice experiment requirements, the beam target coupling position can be adjusted to any point P (rho, theta, z) in the cylindrical surface coordinate system by adjusting the focusing platform 14, the vertical rotary table 15 and the vertical lifting platform 17, wherein rho is the focusing distance of the focusing platform 14, theta is the rotation angle of the vertical rotary table 15, and z is the vertical movement distance of the vertical lifting platform 17.
The embodiment also provides a beam target coupling method of the ultra-small F # laser beam target coupling sensor, which comprises the following steps:
s1, fixing the experimental target 9, monitoring the target surface position of the experimental target 9 by using a side monitoring unit, and adjusting the focusing platform 14 to drive the sensor main body to move so that the target surface of the experimental target 9 is positioned at a pre-calibrated sensor conjugate position to realize coarse positioning;
s2, monitoring the target surface position of the experimental target 9 by using the ranging module 7, and adjusting the focusing platform 14 to drive the sensor main body to move so that the target surface of the experimental target 9 is located at the pre-calibrated sensor conjugate position to realize fine positioning;
s3, determining the conversion relation between the target position monitored by the target monitoring unit and the laser focal spot position monitored by the main laser beam monitoring unit;
s4, the target point monitoring unit monitors the target point position A on the experimental target 9, and obtains the position B of the target point position corresponding to the laser focal spot on the main laser beam monitoring unit according to the conversion relation;
in the embodiment, the conversion relation between the position of the target point on the target surface monitoring CCD3 and the position of the laser focal spot on the focal spot monitoring CCD12 is obtained through pre-calibration;
s5, enabling a main laser beam emitted by the main laser to be incident to an outer reflecting surface of the double-sided reflecting mirror 1 and converged to the main laser beam monitoring unit, and adjusting the normal incidence position of the main laser until the position of a laser focal spot monitored by the main laser beam monitoring unit is located at a position B;
when the wire harness target is coupled, the set target position is brought into a conversion relation, the theoretical position of the laser focal spot on the focal spot monitoring CCD12 is calculated, and the main laser beam focal spot is adjusted to the position, so that the beam target coupling is completed;
s6, removing the ultra-small F # laser beam target coupling sensor, and performing beam target coupling by using the normal incidence position of the experimental target 9 and the main laser at the moment.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that various dependent claims and the features described herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (10)
1. A laser beam target coupling sensor, comprising:
the device comprises a target point monitoring unit, a side path monitoring unit, a main laser beam monitoring unit, a double-sided reflector, a distance measuring module, a No. 1 semi-reflecting and semi-transmitting mirror and a focusing platform;
the target point monitoring unit is positioned in the forward direction of the experimental target, emergent light of the target point monitoring unit illuminates the forward direction of the experimental target after being reflected by the internal reflection surface of the double-sided reflector, images the target surface of the experimental target and monitors the position of the target point on the experimental target;
the side path monitoring unit is positioned at the side of the experimental target, and emergent light of the side path monitoring unit illuminates the side surface of the experimental target and images the side surface of the experimental target to determine the target surface position of the experimental target;
the distance measurement module is positioned above the No. 1 semi-reflective and semi-transparent mirror, the measurement light emitted by the distance measurement module reaches the surface of the experimental target after being reflected by the No. 1 semi-reflective and semi-transparent mirror, and the distance measurement module is used for determining the position of the target surface of the experimental target;
the focal spot of the main laser beam and the target point on the experimental target are in an optical conjugate relation with the external reflecting surface of the double-sided reflector;
the main laser beam is incident to the outer reflecting surface of the double-sided reflector, and is converged to the main laser beam monitoring unit after being reflected by the outer reflecting surface of the double-sided reflector, and the main laser beam monitoring unit is used for monitoring the position of a laser focal spot during beam target coupling, the convergence quality of a light beam during focusing of the main laser beam and the direction of the light beam during convergence of the main laser beam;
the target point monitoring unit, the side path monitoring unit, the main laser beam monitoring unit, the double-sided reflector, the distance measuring module and the No. 1 half-reflecting and half-transmitting mirror jointly form a beam target coupling sensor main body;
the beam target coupling sensor main body is arranged on the focusing platform, and the focusing platform drives the sensor main body to move, so that the target surface of the experimental target is located at a pre-calibrated sensor conjugate position.
2. The laser beam target coupling sensor according to claim 1, wherein the main laser beam monitoring unit comprises an ellipsoidal mirror, a No. 2 semi-reflecting and semi-transmitting mirror, a focal spot monitoring CCD and a coherent detector;
the main laser beam reflected by the outer reflecting surface of the double-sided reflector is incident to the corner point of the ellipsoid, the ellipsoid amplifies the focal spot of the main laser beam, the amplified focal spot of the main laser beam is incident to the No. 2 transflective mirror, the focal spot of the main laser beam passing through the No. 2 transflective mirror transmission part is collected by a focal spot monitoring CCD, and the focal spot of the main laser beam passing through the No. 2 transflective mirror transmission part is collected by a coherent detector and is used for obtaining the phase difference of the beams when the main laser beams are combined;
an image surface of the coherent detector and a focal spot monitoring CCD image surface are in an optical conjugate relation with respect to a reflecting surface of the No. 2 transflective mirror.
3. The laser beam target coupling sensor according to claim 2, wherein the major axis of the ellipsoidal mirror is perpendicular to the optical axis of the main laser beam, the normal direction of the focal spot monitoring CCD image plane is 7.18 ° to the major axis direction of the ellipsoidal mirror, the focal spot monitoring CCD image plane coincides with the other focal point of the ellipsoidal mirror, and the main laser beam focal spot is imaged by 8 times amplification through the ellipsoidal mirror.
4. The laser beam target coupling sensor according to claim 1, wherein the target point monitoring unit comprises a target surface imaging objective lens and a target surface monitoring CCD;
a coaxial illumination light source of the target surface imaging objective lens is incident to the double-sided reflector, and is reflected by the double-sided reflector and then transmitted through the semi-reflective and semi-transparent mirror 8 to provide illumination for the experimental target;
the target surface imaging objective lens is used for magnifying and imaging the experimental target, and images are collected by the target surface monitoring CCD 3.
5. The laser beam target coupling sensor according to claim 1, wherein the side path monitoring unit includes a side path imaging objective lens and a side path monitoring CCD;
the coaxial illumination light source of the side imaging objective provides illumination for the side face of the experimental target, the side face of the experimental target is imaged through the side imaging objective, the side monitoring CCD acquires images, and the target height position coarse positioning is carried out on the experimental target.
6. The laser beam target coupling sensor of claim 1, wherein the side path monitoring unit further comprises a side path focusing stage;
the side path imaging objective lens and the side path monitoring CCD are arranged on a side path focusing platform, the motion direction of the side path focusing platform is consistent with the optical axis direction of the side path imaging objective lens, and the side path imaging objective lens and the side path monitoring CCD are focused to adapt to experimental targets of different sizes.
7. The laser beam target coupling sensor of claim 1, further comprising a vertical turntable; the focusing platform is arranged on the vertical rotary table, and the sensor main body is driven to rotate through the vertical rotary table.
8. The laser beam target coupling sensor according to claim 1, further comprising a vertical elevating platform on which a vertical turntable is provided for moving the beam target coupling sensor body into and out of the target chamber and for vertical direction adjustment within the target chamber.
9. The laser beam target coupling sensor according to claim 1, further comprising a six-degree-of-freedom positioning platform disposed between the vertical turntable and the vertical elevating platform for adjusting the spatial pose of the beam target coupling sensor body at the center of the target chamber.
10. The beam target coupling method of the laser beam target coupling sensor according to claim 1, comprising:
s1, fixing the experimental target, monitoring the target surface position of the experimental target by using a side path monitoring unit, and adjusting a focusing platform to drive a sensor main body to move so that the target surface of the experimental target is positioned at a pre-calibrated sensor conjugate position to realize coarse positioning;
s2, monitoring the target surface position of the experimental target by using a ranging module, and adjusting a focusing platform to drive a sensor main body to move so that the target surface of the experimental target is positioned at a pre-calibrated sensor conjugate position to realize fine positioning;
s3, determining the conversion relation between the target position monitored by the target monitoring unit and the laser focal spot position monitored by the main laser beam monitoring unit;
s4, monitoring a target point position A on the experimental target by the target point monitoring unit, and obtaining a position B of the target point position corresponding to a laser focal spot on the main laser beam monitoring unit according to the conversion relation;
s5, enabling a main laser beam emitted by the main laser to be incident to an outer reflecting surface of the double-sided reflecting mirror and converged to the main laser beam monitoring unit, and adjusting the normal incidence position of the main laser until the position of a laser focal spot monitored by the main laser beam monitoring unit is located at a position B;
s6, removing the laser beam target coupling sensor, and performing beam target coupling by using the normal incidence position of the experimental target and the main laser at the moment.
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| CN107003123A (en) * | 2014-04-22 | 2017-08-01 | 巴斯夫欧洲公司 | Detector at least one object of optical detection |
| CN105259361A (en) * | 2015-11-02 | 2016-01-20 | 中国地质大学（北京） | Laser plasma generated target speed measuring device and method |
| CN109470223A (en) * | 2018-12-21 | 2019-03-15 | 中国工程物理研究院激光聚变研究中心 | A kind of small scale focal spot positioning system for laser target range |
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