CN114087460A - Sensor heat insulation structure - Google Patents

Sensor heat insulation structure Download PDF

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Publication number
CN114087460A
CN114087460A CN202010859365.5A CN202010859365A CN114087460A CN 114087460 A CN114087460 A CN 114087460A CN 202010859365 A CN202010859365 A CN 202010859365A CN 114087460 A CN114087460 A CN 114087460A
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CN
China
Prior art keywords
base
sensor
heat insulation
hinge assembly
insulation structure
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010859365.5A
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Chinese (zh)
Other versions
CN114087460B (en
Inventor
尹光才
马汝坤
彭云平
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN202010859365.5A priority Critical patent/CN114087460B/en
Publication of CN114087460A publication Critical patent/CN114087460A/en
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Publication of CN114087460B publication Critical patent/CN114087460B/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00Thermal insulation in general
    • F16L59/02Shape or form of insulating materials, with or without coverings integral with the insulating materials
    • F16L59/021Shape or form of insulating materials, with or without coverings integral with the insulating materials comprising a single piece or sleeve, e.g. split sleeve, two half sleeves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16BDEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B35/00Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
    • F16B35/04Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws with specially-shaped head or shaft in order to fix the bolt on or in an object
    • F16B35/041Specially-shaped shafts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00Thermal insulation in general
    • F16L59/02Shape or form of insulating materials, with or without coverings integral with the insulating materials
    • F16L59/028Composition or method of fixing a thermally insulating material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00Thermal insulation in general
    • F16L59/12Arrangements for supporting insulation from the wall or body insulated, e.g. by means of spacers between pipe and heat-insulating material; Arrangements specially adapted for supporting insulated bodies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fire-Detection Mechanisms (AREA)

Abstract

The invention provides a sensor heat insulation structure, comprising: the base has relative top surface and bottom surface, the heat insulating board passes through connect the support interval set up in on the top surface of base, connect the support and include along axial first portion and the second part that connects gradually, the first portion is used for wearing to locate the base, the second part is used for the joint the heat insulating board is in order to inject the position of heat insulating board. Compared with the prior art, the heat insulation plate is arranged at intervals with the base through the connecting support, and a glue dispensing mode of a rubber space ring is not used, so that the situation that glue loses efficacy due to high-low temperature cyclic impact is avoided; in addition, one part of the connecting support is clamped with the heat insulation plate to limit the position of the heat insulation plate, and the other part of the connecting support is arranged on the base in a penetrating mode to fix the position of the base, so that the assembling precision is higher and the assembling is simpler and more convenient compared with a dispensing fixing mode.

Description

Sensor heat insulation structure
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a heat insulation structure of a sensor.
Background
The heat insulation structure of the sensor on the traditional photoetching machine adopts a method of dispensing rubber space rings to install a heat insulation plate on a base, the absorption of the heat insulation plate is to absorb a large amount of heat brought by light spots, and the rubber space rings for dispensing are distributed to prevent the heat absorbed on the heat insulation plate from being transferred to the base.
During actual use, the working condition that the sensor intermittently receives a large amount of heat exists, namely the working condition that impact heat load exists, so that high-low temperature circulation exists at the dispensing position of the space ring, the structure has high requirements on the characteristics of glue, and the glue is easy to lose efficacy after being heated. In addition, the process between the heat insulation plate and the base is complex due to the existence of the dispensing process, the position error between the heat insulation plate and the base is difficult to guarantee, and the assembly time is long.
Disclosure of Invention
The invention aims to provide a sensor heat insulation structure to solve one or more problems of the existing sensor heat insulation structure.
In order to solve the above technical problem, the present invention provides a sensor heat insulation structure, including: the base has relative top surface and bottom surface, the heat insulating board passes through connect the support interval set up in on the top surface of base, connect the support and include along axial first portion and the second part that connects gradually, first portion is used for wearing to locate the base, the second part is used for accepting the heat insulating board is in order to inject the position of heat insulating board.
Optionally, in the sensor thermal insulation structure, the first portion includes a hinge assembly and a fixing rod, one end of the hinge assembly is connected to the second portion, the other end of the hinge assembly is connected to the fixing rod, and the fixing rod is used for fixing the hinge assembly to the base.
Optionally, in the sensor thermal insulation structure, the hinge assembly includes a first flexible hinge and a second flexible hinge, the first flexible hinge is disposed along an axial direction, the second flexible hinge is disposed along a radial direction, and the first flexible hinge is closer to the second portion than the second flexible hinge.
Optionally, in the sensor heat insulation structure, the base has a counter bore, the fixing rod has a first convex ring arranged along the circumferential direction, the first convex ring is arranged at one end of the fixing rod connected with the hinge assembly, and the fixing rod is in contact with the counter bore surface of the counter bore through the first convex ring.
Optionally, in the sensor heat insulation structure, the first convex ring has a fitting portion, the first convex ring is in contact with the counter bore surface through the fitting portion, and a cross-sectional width of the fitting portion gradually decreases from an end close to the hinge assembly to an end away from the hinge assembly to 0.
Optionally, in the sensor heat insulation structure, the fixing rod has a second convex ring arranged along the circumferential direction, the second convex ring is arranged on one side of the counterbore surface, which is far away from the first convex ring, and the second convex ring is in contact with the inner wall of the counterbore.
Optionally, in the sensor heat insulation structure, the fixing rod is circumferentially provided with a thread, the thread is provided at an end of the fixing rod close to the bottom surface of the base, and the first portion further includes a nut, and the nut is used in cooperation with the thread to define a relative position of the fixing rod and the base.
Optionally, in the heat insulation structure of the sensor, the heat insulation plate has a positioning opening, the second portion has a groove, and at least a part of the second portion is clamped in the positioning opening along a radial direction through the groove.
Optionally, in the sensor heat insulation structure, the sensor heat insulation structure includes at least 2 connecting supports, and all the connecting supports are uniformly arranged along the circumferential direction.
Optionally, in the sensor heat insulation structure, the base and the heat insulation plate are both provided with through holes, and the through holes of the base and the heat insulation plate are axially and correspondingly arranged, so as to be used for external installation of the sensor heat insulation structure.
In the sensor heat insulating structure provided by the present invention, the sensor heat insulating structure includes: the base has relative top surface and bottom surface, the heat insulating board passes through connect the support interval set up in on the top surface of base, connect the support and include along axial first portion and the second part that connects gradually, the first portion is used for wearing to locate the base, the second part is used for the joint the heat insulating board is in order to inject the position of heat insulating board. Compared with the prior art, the heat insulation plate is arranged at intervals with the base through the connecting support, and a glue dispensing mode of a rubber space ring is not used, so that the situation that glue loses efficacy due to high-low temperature cyclic impact is avoided; in addition, one part of the connecting support is clamped with the heat insulation plate to limit the position of the heat insulation plate, the other part of the connecting support penetrates through the base to fix the position of the connecting support, and compared with a dispensing fixing mode, the assembling precision is higher and the assembling is simpler and more convenient.
Drawings
FIG. 1 is a three-dimensional view of a sensor insulation structure provided by an embodiment of the present invention;
FIG. 2 is an exploded view of a sensor insulation structure provided by an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a sensor insulation structure provided by an embodiment of the present invention;
FIG. 4 is a three-dimensional view of a connecting support in an embodiment of the present invention;
FIG. 5 is a bottom view of a sensor insulation structure provided by an embodiment of the present invention;
wherein the reference numerals are as follows:
1-a base; 2-insulating board; 3-connecting a support; 301-a first portion; 302-a second portion; 31-a hinge assembly; 32-a fixation rod; 311-a first flexible hinge; 312-a second flexible hinge; 101-a counterbore; 321-a first convex ring; 322-a second collar; 3211-an assembly; 33-a nut; 34-a plastic gasket; 102-a positioning port; 103-I-shaped groove; 104-a through hole; 105-avoiding holes; 201-a counter bore surface; 11-optical and/or electrical components; 12-boss.
Detailed Description
The sensor thermal insulation structure proposed by the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
Referring to fig. 1, fig. 2 and fig. 3 in combination with fig. 4, the present embodiment provides a sensor thermal insulation structure, including: the heat insulation plate comprises a base 1, a heat insulation plate 2 and a connecting support 3, wherein the base 1 is provided with a top surface and a bottom surface which are opposite, the heat insulation plate 2 is arranged on the top surface of the base 1 at intervals through the connecting support 3, the connecting support 3 comprises a first part 301 and a second part 302 which are sequentially connected along the axial direction, the first part 301 is used for penetrating through the base 1, and the second part 302 is used for receiving the heat insulation plate 2 so as to limit the position of the heat insulation plate 2.
In the embodiment, the heat insulation plate 2 is fixed above the top surface of the base 1 at intervals through the connecting support 3, and a glue dispensing mode through a rubber spacer ring is not used, so that the situation that the heat insulation effect is poor due to failure of glue caused by high and low temperature cyclic impact is avoided; in addition, a part of the connecting support 3 receives the heat insulation board 2 to limit the position of the heat insulation board 2, and the other part of the connecting support 3 is arranged on the base 1 in a penetrating way to fix the position of the connecting support, so that the assembly is simpler and more convenient compared with a glue dispensing fixing mode.
Preferably, referring to fig. 4, the first portion 301 includes a hinge assembly 31 and a fixing rod 32, one end of the hinge assembly 31 is connected to the second portion 302, the other end of the hinge assembly 31 is connected to the fixing rod 32, and the fixing rod 32 is used for fixing the hinge assembly 31 to the base 1. The first portion 301 is connected to the second portion 302 by the hinge assembly 31, which can increase thermal resistance, release thermal stress, improve thermal insulation effect and reduce deformation of a connection structure. Specifically, the hinge assembly 31 may include a first flexible hinge 311 and a second flexible hinge 312, the first flexible hinge 311 is disposed along an axial direction, that is, the first flexible hinge 311 may be twisted around the axial direction to release thermal stress along the axial direction, the second flexible hinge 312 is disposed along a radial direction, that is, the second flexible hinge 312 may be twisted around the radial direction to release thermal stress along the radial direction, and the first flexible hinge 311 is closer to the second portion 302 than the second flexible hinge 312, so that the configuration may exhibit better isolation effect and reduce deformation of the connection structure more effectively. It should be noted that, here, the axial direction and the radial direction refer to the axial direction and the radial direction of the connection holder, respectively.
In other embodiments, the first portion may also only adopt the first flexible hinge 311, and when only adopting the first flexible hinge 31, the first portion may also increase thermal resistance, release thermal stress, improve thermal insulation effect, and reduce deformation of the connection structure, but the effect is relatively slightly inferior to that of the first flexible hinge 311 and the second flexible hinge 312. In addition, any other structure similar to the flexible hinge, which has the deformation in the Rx and Ry directions and is thus rotatable around the central axis, is also within the scope of the present application.
In this embodiment, with continuing reference to fig. 4 and with reference to fig. 3, preferably, the base 1 has a counterbore 101, the fixing rod 32 has a first protruding ring 321 disposed along a circumferential direction, the first protruding ring 321 is disposed at an end of the fixing rod 32 connected to the hinge assembly 31, and the fixing rod 32 contacts with a counterbore surface 201 of the counterbore 101 through the first protruding ring 321. That is, the first male ring 321, and thus the entire connection support 3, is carried by the counterbore face 201 of the counterbore 101. In other embodiments, the fixing rod 32 can be directly fixed to the base 1 by screwing, but compared with other fixing methods, the method of using the convex ring and the counterbore 101 together can greatly reduce the contact area of the fixing rod 32 and the base 1, thereby reducing the heat transfer to the base 1 through the connecting support 3.
In this embodiment, it is further preferable that the first collar 321 has a fitting portion 3211, the first collar 321 contacts the countersunk surface 201 through the fitting portion 3211, and a cross-sectional width of the fitting portion 3211 gradually decreases from an end close to the hinge assembly 31 to an end away from the hinge assembly 31 to 0. As shown in fig. 3, the fitting portion 3211 may have a ring shape, and a cross-section thereof may have a semicircular shape; alternatively, the number of the assembling portions 3211 is plural, and the assembling portions 3211 are circumferentially disposed on the bottom surface of the protruding ring, and the cross-section thereof may be semicircular or triangular.
Besides the first convex ring 321, the fixing rod 32 may further have a second convex ring 322 disposed along the circumferential direction, the second convex ring 322 is disposed on a side of the counterbore surface 201 away from the first convex ring 321, the second convex ring 322 contacts with an inner wall of the counterbore 101, the thermal transmission is reduced by reducing the contact area to increase the thermal resistance, and preferably, the cross-sectional width of the second convex ring 322 is gradually reduced to 0 along a direction away from the axial center to reduce the contact area between the whole fixing rod 32 and the base 1.
In a preferred embodiment of the present invention, further, the fixing rod 32 is circumferentially provided with a thread (not shown in the drawings), the thread is provided at one end of the fixing rod 32 close to the bottom surface of the base 1, the first portion 301 further includes a nut 33, and the nut 33 is used in cooperation with the thread to define a relative position of the fixing rod 32 and the base 1. Of course, the first portion 301 may further include a plastic gasket 34, and after the plastic gasket 34 is sleeved on the fixing rod 32, the screw is sleeved on the fixing rod 32, and the fixing rod 32 is fixed to the base 1 through the screw.
In addition, referring to fig. 2 in combination with fig. 3, the heat insulation board 2 and the connection socket may be provided as follows: the heat insulation plate 2 is provided with a positioning opening 102, the second part 302 is provided with a tool-shaped groove 103, the thickness of the bottom wall of the positioning opening 102 is matched with the width of the tool-shaped groove 103, and the second part 302 is at least partially clamped in the positioning opening 102 through the tool-shaped groove 103 along the radial direction. With the configuration, the I-shaped groove 103 is in transition fit with the heat insulation plate 2, so that the connecting support 3 and the heat insulation plate 2 can be ensured to pass through the bottom wall of the positioning opening 102, and the position precision between the heat insulation plate 2 and the base 1 is ensured.
For the connecting supports 3, in order to ensure that the heat insulation board 2 can be stably supported, preferably, the number of the connecting supports is at least 2, and all the connecting supports 3 are uniformly arranged along the circumferential direction, specifically, for example, 3 or 4. In the present embodiment, as shown in fig. 1, it is preferable that the number of the coupling holders 3 is 3, and 3 coupling holders allow the heat insulating board 2 to be supported evenly while controlling the total amount of heat transferred through the coupling holders 3.
In the sensor thermal insulation structure provided in the present embodiment, as shown in fig. 5, an optical component and/or an electrical component 11 may be mounted on the bottom surface of the base 1. In addition, in order to install the sensor heat insulation structure on an external structure, through holes 104 may be provided on the base 1 and the heat insulation plate 2, the number of the through holes 104 may be plural, when the number of the through holes 104 is plural, all the through holes 104 are uniformly arranged along the circumferential direction, and the through holes 104 of the base 1 and the through holes 104 of the heat insulation plate 2 are correspondingly provided in the axial direction. In addition, as shown in fig. 2, the base 1 may further have a boss 12 for providing other internal structures, and correspondingly, the heat insulation plate 2 may further have an avoiding hole 105 matched with the boss 12, and after the heat insulation plate 2 is fixed to the base 1, the top surface of the boss 12 is flush with the top surface of the heat insulation plate 2.
The assembly process of the sensor heat insulation structure provided by the preferred embodiment can be as follows:
(1) clamping the second part 302 of the connecting support 3 on the heat insulation plate 2;
(2) inserting said fixing rod 32 of said first portion 301 of said connection seat 3 in a counter bore 101 of said base 1;
(3) and sequentially penetrating the plastic gasket 34 and the nut 33 through one end of the fixing rod 32 close to the bottom surface of the base 1, and then screwing the nut 33 to limit the position of the connecting support 3 relative to the base 1, thereby completing the assembly of the sensor heat insulation structure.
It can be seen from the above assembling process that the assembly mode of the heat insulation structure for the sensor provided by the embodiment is more convenient and faster than the dispensing mode.
In conclusion, the sensor heat insulation structure provided by the invention solves the problems that the heat insulation effect of the existing sensor heat insulation structure is easy to become poor and the assembly is complex.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.

Claims (10)

1. A sensor thermal insulation structure, comprising: the base has relative top surface and bottom surface, the heat insulating board passes through connect the support interval set up in on the top surface of base, connect the support and include along axial first portion and the second part that connects gradually, first portion is used for wearing to locate the base, the second part is used for accepting the heat insulating board is in order to inject the position of heat insulating board.
2. The sensor insulation of claim 1, wherein the first portion comprises a hinge assembly and a retaining rod, one end of the hinge assembly being coupled to the second portion and the other end of the hinge assembly being coupled to the retaining rod, the retaining rod being configured to secure the hinge assembly to the base.
3. The sensor insulation of claim 2, wherein the hinge assembly comprises a first flexible hinge and a second flexible hinge, the first flexible hinge being disposed axially, the second flexible hinge being disposed radially, and the first flexible hinge being closer to the second portion than the second flexible hinge.
4. The sensor thermal insulation structure of claim 2, wherein the base has a counterbore, the fixing rod has a first raised ring circumferentially disposed at an end of the fixing rod connected to the hinge assembly, and the fixing rod contacts the counterbore surface of the counterbore through the first raised ring.
5. The sensor thermal insulation structure of claim 4, wherein the first collar has a fitting portion through which the first collar is in contact with the counterbore surface, and a cross-sectional width of the fitting portion gradually decreases from an end close to the hinge assembly to an end away from the hinge assembly to 0.
6. The sensor thermal insulation structure of claim 4, wherein the fixing rod has a second protruding ring arranged along the circumferential direction, the second protruding ring is arranged on the side of the counterbore surface far away from the first protruding ring, the second protruding ring is in contact with the inner wall of the counterbore, and the cross-sectional width of the second protruding ring gradually decreases in the direction away from the axial center until the cross-sectional width is 0.
7. The sensor insulation of claim 2, wherein the retaining bar is circumferentially threaded at an end of the retaining bar proximate the bottom surface of the base, and wherein the first portion further comprises a nut that cooperates with the threads to define the relative position of the retaining bar and the base.
8. The sensor insulation of claim 1, wherein said insulation panel has a positioning opening, said second portion having a shaped groove, said positioning opening having a bottom wall thickness matching a width of said shaped groove, such that said second portion is at least partially radially engaged within said positioning opening by said shaped groove.
9. The sensor insulation of claim 1, wherein the sensor insulation comprises at least 2 of the connection pedestals, all of which are uniformly arranged in a circumferential direction.
10. The sensor insulation structure of claim 1, wherein the base and the insulation board each have a through-hole, and the through-holes of the base and the insulation board are arranged to correspond in an axial direction for external mounting of the sensor insulation structure.
CN202010859365.5A 2020-08-24 2020-08-24 Sensor heat insulation structure Active CN114087460B (en)

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Application Number Priority Date Filing Date Title
CN202010859365.5A CN114087460B (en) 2020-08-24 2020-08-24 Sensor heat insulation structure

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Application Number Priority Date Filing Date Title
CN202010859365.5A CN114087460B (en) 2020-08-24 2020-08-24 Sensor heat insulation structure

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CN114087460A true CN114087460A (en) 2022-02-25
CN114087460B CN114087460B (en) 2023-05-05

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105259635A (en) * 2015-11-17 2016-01-20 中国科学院长春光学精密机械与物理研究所 Whiffletree support structure applied to statically determined support of large-aperture reflector
CN206116534U (en) * 2016-09-29 2017-04-19 万向一二三股份公司 Laminate polymer battery plastic -aluminum membrane heat -seal structure
CN107448459A (en) * 2016-05-30 2017-12-08 湖北龙铁实业有限公司 A kind of flexible fastener bolt for elastic coupling
CN107797217A (en) * 2016-08-30 2018-03-13 上海微电子装备(集团)股份有限公司 Projection objective support meanss and photoetching machine equipment
JP2018145062A (en) * 2017-03-08 2018-09-20 富士フイルム株式会社 Optical element manufacturing device
CN108930703A (en) * 2018-09-30 2018-12-04 重庆长安汽车股份有限公司 A kind of studs type suspension installation structure
CN208442132U (en) * 2018-05-25 2019-01-29 张艺家 A kind of fork type invisible connecting piece and its component for Furniture panel connection
CN208634650U (en) * 2018-06-21 2019-03-22 深圳恒之博电子信息技术有限公司 A kind of thermal-insulating pipe case of novel LNG cylinder group vaporization sled conveyance conduit
CN111055931A (en) * 2019-11-22 2020-04-24 中国兵器工业第五九研究所 Mounting structure with good thermal break effect
CN211286194U (en) * 2019-09-24 2020-08-18 深圳市华辉装饰工程有限公司 Energy-conserving curtain convenient to installation is effectively thermal-insulated

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105259635A (en) * 2015-11-17 2016-01-20 中国科学院长春光学精密机械与物理研究所 Whiffletree support structure applied to statically determined support of large-aperture reflector
CN107448459A (en) * 2016-05-30 2017-12-08 湖北龙铁实业有限公司 A kind of flexible fastener bolt for elastic coupling
CN107797217A (en) * 2016-08-30 2018-03-13 上海微电子装备(集团)股份有限公司 Projection objective support meanss and photoetching machine equipment
CN206116534U (en) * 2016-09-29 2017-04-19 万向一二三股份公司 Laminate polymer battery plastic -aluminum membrane heat -seal structure
JP2018145062A (en) * 2017-03-08 2018-09-20 富士フイルム株式会社 Optical element manufacturing device
CN208442132U (en) * 2018-05-25 2019-01-29 张艺家 A kind of fork type invisible connecting piece and its component for Furniture panel connection
CN208634650U (en) * 2018-06-21 2019-03-22 深圳恒之博电子信息技术有限公司 A kind of thermal-insulating pipe case of novel LNG cylinder group vaporization sled conveyance conduit
CN108930703A (en) * 2018-09-30 2018-12-04 重庆长安汽车股份有限公司 A kind of studs type suspension installation structure
CN211286194U (en) * 2019-09-24 2020-08-18 深圳市华辉装饰工程有限公司 Energy-conserving curtain convenient to installation is effectively thermal-insulated
CN111055931A (en) * 2019-11-22 2020-04-24 中国兵器工业第五九研究所 Mounting structure with good thermal break effect

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