CN114061630B - Flexible seal beard-imitating underwater flow field sensor and preparation method thereof - Google Patents
Flexible seal beard-imitating underwater flow field sensor and preparation method thereof Download PDFInfo
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- CN114061630B CN114061630B CN202111362417.9A CN202111362417A CN114061630B CN 114061630 B CN114061630 B CN 114061630B CN 202111362417 A CN202111362417 A CN 202111362417A CN 114061630 B CN114061630 B CN 114061630B
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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Abstract
The invention discloses a flexible seal beard-imitating underwater flow field sensor and a preparation method thereof. The sensor includes: the bionic beard cylinder comprises a bionic beard cylinder body, a flexible substrate and a piezoresistive unit; a flexible column is arranged on the flexible substrate; the bionic beard cylinder is arranged on the flexible cylinder; the bionic beard cylinder has a wavy plaque-imitated seal beard shape; the piezoresistive units are distributed on the side surface of the flexible cylinder; the piezoresistive unit is led through the flexible substrate; the piezoresistive unit is used for converting strain generated on the flexible cylinder into an electric signal so as to detect an underwater flow field. The invention can reduce the noise of underwater flow field detection.
Description
Technical Field
The invention relates to the field of flow field detection, in particular to a flexible seal beard-imitating underwater flow field sensor and a preparation method thereof.
Background
The miniaturized, light and flexible flow field sensor has great significance for the underwater unmanned underwater vehicle, can assist the underwater vehicle to realize high-concealment and low-noise environment detection, realize autonomous cruising and obstacle avoidance, even track underwater objects such as fishes and the like, and has wide application prospect. Inspired by marine life, research in this field is currently focused on various columnar flow field sensors. However, due to the karman vortex street effect, when the mast is exposed to the water flow, periodic vortex streets are generated downstream of the mast, which can cause the mast to vibrate strongly and thus act as strong noise for the sensor.
Disclosure of Invention
Based on the above, the embodiment of the invention provides a flexible seal beard-imitated underwater flow field sensor and a preparation method thereof, so as to reduce noise of underwater flow field detection.
In order to achieve the purpose, the invention provides the following scheme:
a flexible seal beard simulating underwater flow field sensor comprises: the bionic beard cylinder comprises a bionic beard cylinder body, a flexible substrate and a piezoresistive unit;
the flexible column is arranged on the flexible substrate; the bionic beard cylinder is arranged on the flexible cylinder; the bionic beard cylinder has a wavy imitated spot seal beard shape; the piezoresistive units are distributed on the side surface of the flexible column body; the piezoresistive unit is led through the flexible substrate; the piezoresistive unit is used for converting strain generated on the flexible column body into an electric signal so as to detect an underwater flow field.
Optionally, the cross section of the bionic beard cylinder is elliptical, and the size of the cross section of the bionic beard cylinder periodically changes along the direction of a beard axis.
Optionally, the piezoresistive unit is a mixture of carbon nanotubes and silver nanoparticles;
a plurality of micro-flow units are arranged on the side surface of the flexible column body; the mixture of the carbon nano tubes and the silver nano particles is placed in each micro-flow unit; a plurality of through holes are formed in the flexible substrate;
the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder; the two micro channels are communicated with each other near two ends of the bionic beard cylinder; two ends of the two micro-channels, which are close to the flexible substrate, are respectively led through one through hole, so that each micro-channel is connected with one electric connection end.
Optionally, the flexible column and the flexible substrate are both made of polydimethylsiloxane.
Optionally, a unidirectional pointed micro-texture is arranged in the micro-channel.
Optionally, the piezoresistive unit covers the surface of the micro-channel by using a liquid directional continuous transportation principle.
Optionally, a distance between two ends of the two micro channels close to the flexible substrate in the micro-flow unit is greater than or equal to a distance between two ends of the two micro channels close to the bionic beard cylinder.
Alternatively to this, the first and second parts may, four micro-flow units are uniformly arranged on the side surface of the flexible column body along the circumferential direction; the number of the through holes on the flexible substrate is eight.
The invention also provides a preparation method of the flexible seal beard-imitating underwater flow field sensor, which comprises the following steps:
printing the bionic beard cylinder by utilizing a photocuring printing technology; the bionic beard cylinder has a wavy plaque-imitated seal beard shape;
printing the mold by using a photocuring printing technology; the mould is used for preparing a flexible cylinder and a flexible substrate;
fixing the mould at the bottom of the bionic beard cylinder, pouring polydimethylsiloxane on the mould, and forming the flexible cylinder and the flexible substrate by using a mould turning technology; the side surface of the flexible cylinder is provided with a plurality of microflow units; the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder; the two micro channels are communicated with each other near two ends of the bionic beard cylinder;
processing the flexible cylinder and the flexible substrate by using a plasma processing technology to form a hydrophilic surface;
placing a resistance unit in the microfluidic unit; each micro-channel in the micro-fluidic unit passes through a through hole lead on the flexible substrate respectively so that each micro-channel is connected with an electric connection end;
and spraying polydimethylsiloxane on the surface of the micro-flow unit to form a waterproof film, thereby obtaining the flexible seal beard-imitating underwater flow field sensor.
Optionally, the piezoresistive unit is a mixture of carbon nanotubes and silver nanoparticles;
the placing of the resistance unit in the microfluidic unit specifically includes:
and dripping the mixture of the carbon nano tube and the silver nano particles into the micro-flow unit, and covering the surface of the micro-flow unit by utilizing a liquid directional continuous transportation principle.
Compared with the prior art, the invention has the beneficial effects that:
the embodiment of the invention provides a flexible seal beard-imitating underwater flow field sensor and a preparation method thereof, wherein the sensor comprises: the bionic beard cylinder comprises a bionic beard cylinder body, a flexible substrate and a piezoresistive unit; a flexible column is arranged on the flexible substrate; the bionic beard cylinder is arranged on the flexible cylinder; the bionic beard cylinder has a wavy plaque-imitated seal beard shape; the piezoresistive units are distributed on the side surface of the flexible cylinder; the piezoresistive units are led through the flexible substrate; the piezoresistive unit is used for converting strain generated on the flexible cylinder into an electric signal so as to detect an underwater flow field. The bionic beard cylinder with the simulated spot seal beard appearance is adopted, so that the bionic seal beard cylinder has the same appearance profile as a real seal, the formation of a downstream Karman vortex street can be inhibited, the flow field resistance borne by the beard cylinder is reduced, the vortex-induced vibration of the beard cylinder is inhibited, and the sensor noise caused by the vortex-induced vibration is obviously reduced, therefore, the low-noise underwater flow field detection can be realized, and the bionic beard cylinder is small in size, low in cost, high in integration level and convenient to manufacture.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic view of the appearance of seal beard;
FIG. 2 is a schematic diagram showing the comparison of the tails of seal beard, cylinder and elliptic cylinder;
fig. 3 is a schematic structural diagram of a flexible seal beard-imitated underwater flow field sensor provided by an embodiment of the invention;
fig. 4 is a structural top view of the flexible seal beard-imitating underwater flow field sensor provided by the embodiment of the invention;
fig. 5 is a partially enlarged view of a flexible cylinder of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention;
FIG. 6 is a partially enlarged view of a micro flow channel of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the present invention;
fig. 7 is a schematic diagram of signal output of four piezoresistive units of the flexible seal-imitated beard underwater flow field sensor according to the embodiment of the invention along with the change of an attack angle;
fig. 8 is a flow velocity output contrast diagram of the flexible seal beard imitating underwater flow field sensor provided by the embodiment of the invention under different water flow attack angles;
fig. 9 is a comparison graph of vortex-induced vibration amplitudes of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention under different water flow attack angles;
fig. 10 is a preparation process diagram of the flexible seal beard-imitating underwater flow field sensor provided by the embodiment.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Fig. 1 is a schematic view of the appearance of seal beard. Referring to fig. 1, the seal beard has a wavy outline, an oval cross section, and the size of the cross section varies periodically along the direction of the beard axis. Where M is half the period of the wave, equal to 0.91mm. a and b are the major and minor axes of the elliptical cross-section, 0.595mm and 0.24mm respectively. K and l are the major and minor axes of the elliptical cross-section, 0.475mm and 0.29mm respectively. Alpha is the included angle between the large section of the beard and the horizontal plane, and the included angle is 15.27 degrees; beta is the included angle between the small section of the beard and the horizontal plane, and the included angle is 17.6 degrees. X, -Y and Z are coordinate axes, wherein Z is the axial direction of the beard. FIG. 2 is a schematic diagram showing the comparison of the tails of the beard, cylinder and elliptic cylinder of seal. Referring to fig. 2, research shows that the seal beard can significantly inhibit the formation of downstream karman vortex streets and reduce the vibration amplitude of the beard. Based on this, this embodiment provides a flexible seal beard of imitating underwater flow field sensor.
Fig. 3 is a schematic structural diagram of a flexible seal beard-imitated underwater flow field sensor provided by an embodiment of the invention. Referring to fig. 3, the flexible seal beard-like underwater flow field sensor of the present embodiment includes: the bionic beard cylinder comprises a bionic beard cylinder body 1, a flexible cylinder body 2, a flexible substrate 3 and a piezoresistive unit 4.
The flexible column 2 is arranged on the flexible substrate 3; the bionic beard cylinder 1 is arranged on the flexible cylinder 2; the bionic beard cylinder 1 has a wavy imitated patch seal beard shape; the piezoresistive units 4 are arranged on the side surface of the flexible cylinder 2; the piezoresistive unit 4 is led through the flexible substrate 3; the bionic beard cylinder 1 is used for reducing resistance and inhibiting vortex-induced vibration; the flexible substrate 3 is used for leading wires and sticking the wires on the surface of an object to be detected; the flexible cylinder 2 is used for generating strain under the action of a flow field; the piezoresistive unit 4 is used for converting the strain generated on the flexible cylinder 2 into an electrical signal to detect an underwater flow field. The detection principle is as follows: under the condition of electrifying, when strain is generated, the resistance value of the piezoresistive unit 4 can be changed, a processor electrically connected with the piezoresistive unit 4 can record the change of the resistance value, and the change of the resistance value reflects the magnitude of the strain, so that the underwater flow field is determined according to the change of the resistance value.
In one example, the material of the bionic beard cylinder 1 is resin, and the Young modulus is similar to that of a real beard. The cross section of the bionic beard cylinder 1 is oval, and the size of the cross section of the bionic beard cylinder 1 periodically changes along the direction of a beard axis.
In one example, the piezoresistive unit 4 is plural; the piezoresistive unit 4 is a mixture of carbon nanotubes and silver nanoparticles (carbon nanotubes/silver nanoparticles, CNT/AgNPs); a plurality of micro-flow units are arranged on the side surface of the flexible cylinder 2; the mixture of the carbon nano tubes and the silver nano particles is placed in each micro-flow unit, and the mixture is transported on the surface of the micro-flow unit by utilizing the liquid directional continuous transportation principle; a plurality of through holes 5 are formed in the flexible substrate 3; the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder 2; the two micro channels are communicated with each other near the two ends of the bionic beard cylinder 1; two ends of the two micro channels close to the flexible substrate 3 are respectively led through one through hole 5 (connecting signal wire), so that each micro channel is connected with one electric connection end.
In one example, the micro flow channel extends from the surface of the flexible cylinder 2 to the surface of the flexible substrate 3 so as to connect with the through hole 5 on the flexible substrate 3, and the electric connection terminal is connected through the through hole 5.
In one example, the distance between two ends of the micro flow channels close to the flexible substrate 3 in the micro flow unit is greater than or equal to the distance between two ends of the micro flow channels close to the bionic beard cylinder 1. Fig. 4 is a structural top view of the flexible seal beard-imitating underwater flow field sensor provided by the embodiment of the invention; fig. 5 is a partially enlarged view of a flexible cylinder of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention. Referring to fig. 4 and 5, the distance between two ends of the two micro flow channels close to the flexible substrate 3 in the micro flow unit is greater than the distance between two ends of the two micro flow channels close to the bionic beard cylinder 1, and each micro flow unit is a zigzag micro flow channel formed by two micro flow channels.
In one example, the flexible cylinder 2 and the flexible substrate 3 are made of Polydimethylsiloxane (PDMS). The flexible cylinder 2 has a low young's modulus and exhibits significant deformation under stress and thus a greater degree of bending under water flow. The flexible substrate 3 is able to adapt to curved surfaces without curvature and thus to the curvature of the aircraft.
In one example, a unidirectional pointed microtexture 6 is provided within the microchannel as shown in fig. 6. The one-way pointed micro-texture 6 imitates a groove structure of a pig cage grass opening edge, can provide capillary force and promotes one-way carrying of liquid.
In one example, the number of the piezoresistive units 4 is four, so that four microfluidic units are uniformly arranged on the side surface of the flexible cylinder 2 along the circumferential direction; the number of the through holes 5 on the flexible substrate 3 is eight. For example, the micro flow channels extend from the surface of the flexible cylinder 2 to the surface of the flexible substrate 3, and 4 micro flow channels shaped like a Chinese character ji are formed on the surfaces of the flexible cylinder 2 and the flexible substrate 3; one end of the inverted U-shaped micro flow channel is connected with one through hole 5 on the flexible substrate 3, extends towards the flexible column 2, turns to the surface of the flexible column 2 after reaching the root of the flexible column 2, and then turns via the inverted U-shaped on the flexible column 2, and the other end is connected with the other through hole 5 on the flexible substrate 3. And (3) dripping the mixture of the carbon nano tube and the silver nano particles into the micro-flow unit of the flexible substrate 3, and covering the surface of the micro-flow unit by utilizing the liquid directional continuous transportation principle to obtain the four piezoresistive units 4.
In one example, a hole is arranged at the upper end of the flexible column 2, and the bionic beard column 1 is connected with the flexible column 2 through the hole.
Fig. 7 is a schematic signal output diagram of four piezoresistive units of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention along with the change of an attack angle.
As shown in fig. 7, the sensor can resolve different force directions. The sensor beard is pushed, the deflection degree of the sensor beard is kept the same, and the deflection direction of the beard is changed. The four piezoresistive elements 4 respectively assume different states of compression or tension corresponding to different angles of attack. From an attack angle of 0 degrees to an attack angle of 180 degrees, the four piezoresistive units 4 all show trigonometric function changes, and have better resolution capability on the acting force direction.
Fig. 8 is a flow velocity output contrast diagram of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention under different water flow attack angles; fig. 9 is a comparison graph of vortex-induced vibration amplitudes of the flexible seal-imitated beard underwater flow field sensor provided by the embodiment of the invention under different water flow attack angles.
As shown in fig. 8 and 9, the flow velocity output and the vortex-induced vibration amplitude of the sensor are different at different water flow attack angles, i.e., wide-faced incident flow and narrow-faced incident flow of the beard; under an attack angle of 0 degrees (beard narrow face incident flow), the flow speed output of the sensor is smaller, and the vortex-induced vibration amplitude is also obviously smaller than that under an attack angle of 90 degrees (beard wide face incident flow); the sensor exhibits different sensitivity for different flow velocity directions.
When the beard sensor is in a normal working posture (an attack angle is 0 degree), the flow field resistance borne by the beard is smaller, the vortex-induced vibration amplitude is smaller, the posture stability of the sensor is kept, and the noise caused by vibration is reduced; when the flow field disturbance is detected, the vibration of the beard in the direction perpendicular to the flow field (the direction of the broad surface of the beard) is more remarkable: this form of operation helps to distinguish between flow field noise and the detected signal.
The flexible seal beard-imitating underwater flow field sensor of the embodiment has the following advantages:
1) The flexible seal beard-imitating underwater flow field sensor provided by the embodiment has the appearance of a spot seal beard, can inhibit the formation of a downstream karman vortex street, reduces the flow field resistance received by a beard column, inhibits the vortex-induced vibration of the beard column, and obviously reduces the sensor noise caused by the vortex-induced vibration.
2) The flexible seal beard-imitating underwater flow field sensor provided by the embodiment adopts a polydimethylsiloxane flexible material, can convert flow field force into material strain, and has the characteristics of large strain and high response speed; the flexible substrate allows the sensor to be attached to curved surfaces and the like of underwater vehicles.
3) The flexible seal beard-imitating underwater flow field sensor provided by the embodiment adopts a liquid directional continuous transportation principle, and carries and covers the used liquid material (a mixture of carbon nanotubes and silver nanoparticles) to the surface of a microfluidic unit through a micro-channel; the implementation method is simple to operate, and the manufacturing process can be implemented on the three-dimensional structure.
The invention also provides a preparation method of the flexible seal beard-imitating underwater flow field sensor, which is used for preparing the flexible seal beard-imitating underwater flow field sensor in the embodiment.
Fig. 10 is a preparation process diagram of the flexible seal beard-imitating underwater flow field sensor provided by the embodiment.
Referring to fig. 10, the preparation method includes:
step 101: printing a bionic beard cylinder by utilizing a photocuring printing technology; the bionic beard cylinder has a wavy plaque-imitating seal beard shape.
Step 102: printing the mold by using a photocuring printing technology; the mold is used for preparing a flexible column and a flexible substrate. The mold is shown in part (a) of fig. 10.
Step 103: assembling the mold with the biomimetic beard cylinder as shown in part (b) of fig. 10. After assembly, pouring polydimethylsiloxane on the mold, and forming the flexible column and the flexible substrate by using an over-mold technology, as shown in part (c) of fig. 10; the side surface of the flexible cylinder is provided with a plurality of microflow units; the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder; the two micro-channels are communicated with each other near the two ends of the bionic beard cylinder.
Step 103, specifically: putting the mould into a vacuum box, and evaporating perfluorosilane for hydrophobic treatment: a few drops of perfluorosilane are added dropwise, vacuum-pumping is carried out and the mixture is placed for about 4 hours; pouring polydimethylsiloxane, and removing bubbles in vacuum; left to cure at 70 ℃ for about 4 hours; and peeling the polydimethylsiloxane from the mold to obtain the flexible cylinder and the flexible substrate.
Step 104: and processing the flexible cylinder and the flexible substrate by using a plasma processing technology to form a hydrophilic surface.
Step 105: placing a resistance unit in the microfluidic unit; each micro-channel in the micro-fluidic unit passes through a through hole lead on the flexible substrate respectively, so that each micro-channel is connected with an electric connection end.
The piezoresistive units are a mixture of carbon nanotubes and silver nanoparticles; the placing of the resistance unit in the microfluidic unit specifically includes:
and dripping the mixture of the carbon nano tube and the silver nano particles into the micro-flow unit, and covering the surface of the micro-flow unit by utilizing a liquid directional continuous transportation principle.
Step 106: and spraying polydimethylsiloxane on the surface of the micro-flow unit to form a waterproof film, thereby obtaining the flexible seal beard-imitating underwater flow field sensor.
The flexible seal-imitated beard underwater flow field sensor prepared by the preparation method can inhibit the formation of a downstream Karman vortex street, reduce the flow field resistance borne by a beard column, inhibit the vortex-induced vibration of the beard column, obviously reduce the sensor noise caused by the vortex-induced vibration and realize low-noise underwater flow field detection.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (6)
1. The utility model provides a flexible imitative seal beard is flow field sensor under water which characterized in that includes: the bionic beard cylinder comprises a bionic beard cylinder body, a flexible substrate and a piezoresistive unit;
the flexible column is arranged on the flexible substrate; the bionic beard cylinder is arranged on the flexible cylinder; the bionic beard cylinder has a wavy imitated spot seal beard shape; the piezoresistive units are distributed on the side surface of the flexible cylinder; the piezoresistive unit is led through the flexible substrate; the piezoresistive unit is used for converting strain generated on the flexible cylinder into an electric signal so as to detect an underwater flow field;
the piezoresistive units are a mixture of carbon nanotubes and silver nanoparticles;
a plurality of micro-flow units are arranged on the side surface of the flexible column body; the mixture of the carbon nano tubes and the silver nano particles is placed in each micro-flow unit; a plurality of through holes are formed in the flexible substrate;
the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder; the two micro channels are communicated with each other near two ends of the bionic beard cylinder; two ends of the two micro channels, which are close to the flexible substrate, are respectively led through one through hole, so that each micro channel is connected with one electric connection end;
the mixture of the carbon nano tubes and the silver nano particles is transported on the surface of the microfluidic unit by utilizing the liquid directional continuous transportation principle;
and a unidirectional pointed micro-texture is arranged in the micro-channel.
2. The flexible seal-imitated beard underwater flow field sensor according to claim 1, wherein the cross section of the bionic beard cylinder is elliptical, and the cross section size of the bionic beard cylinder periodically changes along a beard axis direction.
3. The flexible seal-imitated beard underwater flow field sensor according to claim 1, wherein the flexible cylinder and the flexible substrate are made of polydimethylsiloxane.
4. The flexible seal-imitated beard underwater flow field sensor according to claim 1, wherein the distance between two ends of the two micro flow channels close to the flexible substrate in the micro flow unit is greater than or equal to the distance between two ends of the two micro flow channels close to the bionic beard cylinder.
5. The flexible seal beard-imitating underwater flow field sensor according to claim 1, wherein four micro-flow units are uniformly arranged on the side surface of the flexible cylinder along the circumferential direction; the number of the through holes on the flexible substrate is eight.
6. A preparation method of a flexible seal beard-imitating underwater flow field sensor, which is used for preparing the flexible seal beard-imitating underwater flow field sensor according to any one of claims 1 to 5, and comprises the following steps:
printing the bionic beard cylinder by utilizing a photocuring printing technology; the bionic beard cylinder has a wavy plaque-imitated seal beard shape;
printing the mold by using a photocuring printing technology; the mould is used for preparing a flexible cylinder and a flexible substrate;
fixing the mould at the bottom of the bionic beard cylinder, pouring polydimethylsiloxane on the mould, and forming the flexible cylinder and the flexible substrate by using a mould turning technology; the side surface of the flexible cylinder is provided with a plurality of microflow units; the micro-flow unit comprises two micro-flow channels which are arranged along the axial direction of the flexible cylinder; the two micro channels are communicated with each other near two ends of the bionic beard cylinder;
processing the flexible cylinder and the flexible substrate by using a plasma processing technology to form a hydrophilic surface;
placing a piezoresistive cell in the microfluidic cell; each micro-channel in the micro-fluidic unit passes through a through hole lead on the flexible substrate respectively so that each micro-channel is connected with an electric connection end;
spraying polydimethylsiloxane on the surface of the micro-flow unit to form a waterproof film, so as to obtain the flexible seal beard-imitating underwater flow field sensor;
the piezoresistive units are a mixture of carbon nanotubes and silver nanoparticles;
the piezoresistive unit is placed in the microfluidic unit, and specifically comprises:
and dripping the mixture of the carbon nano tube and the silver nano particles into the micro-flow unit, and covering the surface of the micro-flow unit by utilizing a liquid directional continuous transportation principle.
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| CN211784189U (en) * | 2020-03-11 | 2020-10-27 | 中国人民解放军国防科技大学 | Fluid motion measurement sensor device based on artificial tentacles |
| CN111473904A (en) * | 2020-03-27 | 2020-07-31 | 厦门大学 | Integrated flexible three-dimensional force touch sensor and manufacturing method thereof |
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