CN114061485A - Control device for automatically adjusting laser incident angle and use method thereof - Google Patents

Control device for automatically adjusting laser incident angle and use method thereof Download PDF

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Publication number
CN114061485A
CN114061485A CN202111362683.1A CN202111362683A CN114061485A CN 114061485 A CN114061485 A CN 114061485A CN 202111362683 A CN202111362683 A CN 202111362683A CN 114061485 A CN114061485 A CN 114061485A
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China
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fixedly connected
moving mechanism
laser
control device
rod
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张志成
李艳
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Guilin Ouled Technology Co ltd
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Guilin Ouled Technology Co ltd
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Priority to CN202111362683.1A priority Critical patent/CN114061485A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/14Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a control device for automatically adjusting a laser incident angle and a using method thereof, wherein the control device comprises a working box, one end of the top of the working box is provided with a clamping mechanism, the top of one end of the working box, which is close to the clamping mechanism, is provided with a Y-axis moving mechanism, the top of the Y-axis moving mechanism is provided with a Z-axis moving mechanism, one end of the outer wall of the Z-axis moving mechanism is provided with an X-axis moving mechanism, dead corners of the bottom of the working box are provided with damping mechanisms, the Y-axis moving mechanism comprises a moving block, and the Z-axis moving mechanism comprises a moving block, the control device has the advantages that: according to the shape change of the product, the rotary table is used for actively adjusting the surface of the product facing the laser head, so that the self-adaptive measurement of the laser incident angle can be realized; the linear motor drives the moving block to move, the second stepping motor drives the moving block to move, and the second electric push rod drives the extension rod to move, so that the position of the laser ranging sensor can be conveniently adjusted; through using the pneumatic cylinder to drive the hydraulic stem removal, the shock attenuation of the device of being convenient for can change holistic length simultaneously for the device can keep the level.

Description

Control device for automatically adjusting laser incident angle and use method thereof
Technical Field
The invention relates to the technical field of laser measurement, in particular to a control device for automatically adjusting a laser incident angle and a using method thereof.
Background
The laser measurement technology is commercialized, samples are made, a lot of experience is accumulated, a lot of practical problems are solved, the laser scanning technology has good market prospect, the laser scanning technology has universal adaptability and particularly has applicability to products with large curvature change, and the application of the laser scanning technology is more automatic and intelligent.
The measurement principle of the laser measuring head is generally a trigonometry, the method requires that a sensor faces a product, the conditions that the incident light angle is not good and the angle of reflected light exceeds a receiving range often occur in the scanning of complex parts such as blades and screws, the current technology only compensates the laser incident angle through the rotation of a Z axis, but the technology cannot compensate the incident angle exceeding the range caused by the inclination of the product, and the problem can be solved only through a gyroscope structure with space steering, and the method is very troublesome.
Disclosure of Invention
The invention provides a control device for automatically adjusting a laser incident angle and a use method thereof.
To solve the problems set forth in the background art described above.
In order to solve the technical problems, the invention provides the following technical scheme: the utility model provides an automatic adjusting laser incident angle's controlling means, includes the work box, work box top one end is equipped with latch mechanism, the work box is close to latch mechanism one end top and is equipped with Y axle moving mechanism, Y axle moving mechanism top is equipped with Z axle moving mechanism, Z moving mechanism outer wall one end is equipped with X axle moving mechanism, work box bottom dead angle all is equipped with damper, Y axle moving mechanism includes the movable block, Z axle moving mechanism includes the movable block.
In a further embodiment, clamping mechanism includes revolving stage and workstation, revolving stage fixed connection is in work box outer wall top one end, the workstation is at the first step motor of revolving stage bottom one end fixedly connected with, first step motor passes the first ejector pin of revolving stage one end fixedly connected with, workstation fixed connection is close to revolving stage one end at the work box top, workstation top one end outer wall fixedly connected with crossbearer, the first electric putter of the inside fixedly connected with of crossbearer, first electric putter passes the first ejector pin of crossbearer one end fixedly connected with second ejector pin, the joint has the work piece between first ejector pin and the second ejector pin, is convenient for fixed work piece through first ejector pin and second ejector pin, and it is rotatory to drive the work piece simultaneously.
In a further embodiment, the Y-axis moving mechanism comprises two tracks, the two tracks are symmetrically in threaded connection with the top of the working box, the two tracks are connected with linear motors in a sliding mode, each track is connected with two linear motors in a sliding mode, the tops of the four linear motors are fixedly connected to the bottom of the moving block, the linear motors drive the moving block to move, and therefore the device can move along the Y axis conveniently.
In a further embodiment, the Z-axis moving mechanism comprises a vertical arm, the vertical arm is fixedly connected to the top of the moving block, a second stepping motor is fixedly connected to one end of the top of an inner cavity of the vertical arm, a threaded rod is fixedly connected to the bottom output end of the second stepping motor, moving blocks are connected to the threaded rod in a threaded manner, and the number of the moving blocks is two, so that the laser ranging sensor can move along the Z axis conveniently.
In a further embodiment, the X-axis moving mechanism comprises a cross arm, a movable block is fixedly connected to the cross arm, a second electric push rod is fixedly connected to one end inside the cross arm, an output end of the second electric push rod is fixedly connected with an extension rod, and a laser ranging sensor is fixedly connected to the extension rod, penetrates through one end of the cross arm, and is convenient for the laser ranging sensor to move along the X axis.
In a further embodiment, damper includes the pneumatic cylinder, pneumatic cylinder top fixed connection is in the work box bottom, pneumatic cylinder bottom fixedly connected with support, the pneumatic cylinder passes support one end fixedly connected with hydraulic stem, the inside sliding connection of support has a pressure section of thick bamboo, the hydraulic stem passes pressure section of thick bamboo one end joint and has the spring, the oil storage jar has been seted up to the pressure section of thick bamboo inner wall, drives the hydraulic stem through using the pneumatic cylinder and removes, and the shock attenuation of the device of being convenient for can change holistic length simultaneously for the device can keep the level.
In further embodiment, pneumatic cylinder quantity is four, four the pneumatic cylinder is fixed connection respectively on bottom of the case four corners, the inside packing of pressure cylinder has hydraulic oil, hydraulic stem bottom fixedly connected with logical fuel tap, the intercommunication mouth has been seted up with the pressure cylinder inner chamber to the oil storage cylinder, stores the cooperation of hydraulic oil and spring through the oil storage cylinder, the shock attenuation of the device of being convenient for.
Preferably, the control device for automatically adjusting the laser incident angle and the use method thereof based on the above include the following steps:
s1, firstly, mounting a workpiece to be measured on a rotary table, adjusting a laser ranging sensor to a proper position, and starting measurement;
s2, locking the Z axis, rotating a first ejector rod on the top of the rotary table for one circle, keeping a constant distance between the X axis and the product in a self-adaptive manner, completing scanning, connecting a current measuring point with a previous measuring point by the automatic laser incident angle adjusting system in measurement and control software, considering that the direction of the straight line is the current tangential direction of the product, and the optimal angle of the incident angle of the straight line and the laser line is 90 degrees, calculating and monitoring the angle in real time by the measurement and control software, and when the angle exceeds a threshold value, suspending measurement and rotating the workpiece to restore the tangential direction of the product to 90 degrees;
s3, after the product rotates, the coordinates (X1, Y1) of the current measuring point are converted into polar coordinates (R1, A1) in control software, the polar coordinates are added with the angle A2 of the rotation of the workpiece 3, the polar coordinates are converted into rectangular coordinates (X2, Y2) again according to the new polar coordinates (R1, (A1+ A2)), the three-coordinate platform is moved from (X1, Y1) to (X2, Y2), the laser point can be kept on the same point continuously, and then the scanning point collecting operation is recovered;
and S4, converting the final measurement result into a coordinate when the angle of the first ejector rod is 0, outputting the coordinate, and repeating the steps to realize the self-adaptive measurement operation of the laser incidence angle.
The invention has the following beneficial effects:
1. according to the change of the shape of the product, the rotary table is used for actively adjusting the surface of the product facing the laser head in a rotating manner, so that the rotary table has better applicability and can realize the self-adaptive measurement of the laser incident angle;
2. the linear motor drives the moving block to move, so that the laser ranging sensor can conveniently move along the Y axis, the second stepping motor drives the moving block to move, so that the laser ranging sensor can conveniently move along the Z axis, the second electric push rod drives the extension rod to move, and the laser ranging sensor can conveniently move along the X axis;
3. through using the pneumatic cylinder to drive the hydraulic stem removal, the shock attenuation of the device of being convenient for can change holistic length simultaneously for the device can keep the level.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic cross-sectional view of the clamping mechanism of the present invention;
FIG. 3 is a schematic perspective view of the track of the present invention;
FIG. 4 is a cross-sectional structural schematic view of the Z-axis moving mechanism of the present invention;
FIG. 5 is a schematic perspective view of the X-axis moving mechanism of the present invention;
fig. 6 is a schematic sectional view of the shock-absorbing structure of the present invention.
In the figure: 1. a work box; 2. a clamping mechanism; 21. a turntable; 22. a first stepper motor; 23. a first ejector rod; 24. a work table; 25. a transverse block; 26. a first electric push rod; 27. a second ejector rod; 3. a workpiece; 4. a Y-axis moving mechanism; 41. a track; 42. a linear motor; 43. a moving block; 5. a Z-axis moving mechanism; 51. a vertical arm; 52. a second stepping motor; 53. a threaded rod; 54. a movable block; 6. an X-axis moving mechanism; 61. a cross arm; 62. a second electric push rod; 63. an extension bar; 64. a laser ranging sensor; 7. a damping mechanism; 71. a hydraulic cylinder; 72. a support; 73. a hydraulic lever; 74. a pressure cylinder; 75. a spring; 76. the reserve tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in figure 1, the control device for automatically adjusting the laser incident angle and the use method thereof comprise a working box 1, wherein one end of the top of the working box 1 is provided with a clamping mechanism 2 for clamping a workpiece 3 conveniently, the top of one end of the working box 1, which is close to the clamping mechanism 2, is provided with a Y-axis moving mechanism 4, the top of the Y-axis moving mechanism 4 is provided with a Z-axis moving mechanism 5, one end of the outer wall of the Z-axis moving mechanism 5 is provided with an X-axis moving mechanism 6, the position of a laser ranging sensor 64 is convenient to move through each axial moving mechanism, dead corners of the bottom of the working box 1 are provided with damping mechanisms 7 for reducing the vibration of the device and facilitating the adjustment of the height of the working box 1 so as to keep the working box horizontal, the Y-axis moving mechanism 4 comprises a moving block 43, and the Z-axis moving mechanism 5 comprises a moving block 54.
When the existing sensor faces the scanning of complex parts, the condition that the incident light angle is not good and the angle of reflected light exceeds the receiving range often occurs, the existing technology only compensates the laser incident angle through the rotation of a Z axis, but the technology cannot compensate the incident angle exceeding the range caused by the inclination of a product, a gyroscope structure with space steering is needed, and the problem can be solved by using a Y-axis moving mechanism 4, a Z-axis moving mechanism 5 and an X-axis moving mechanism 6 to move the structure, so that the scanning of the complex parts is facilitated.
Example 2
Referring to fig. 1-2, a further improvement is made on the basis of embodiment 1:
for quick fixed work piece 3, latch mechanism 2 includes revolving stage 21 and workstation 24, and revolving stage 21 fixed connection is in 1 outer wall top one end of work box, and work box 1 is at the first step motor 22 of 21 bottom one end fixedly connected with of revolving stage, and first step motor 22 passes the first ejector pin 23 of 21 one end fixedly connected with of revolving stage, and it is rotatory to drive first ejector pin 23 through first step motor 22, and the rotatory work piece 3 of being convenient for changes its angle.
In this embodiment, in order to adapt to different work piece 3 sizes, workstation 24 fixed connection is close to revolving stage 21 one end at 1 top of work box, 24 top pieces of workstation are close to revolving stage 21 one end outer wall fixedly connected with horizontal piece 25, the first electric putter 26 of the inside fixedly connected with of horizontal piece 25, horizontal piece 25 one end fixedly connected with second ejector pin 27 is passed to first electric putter 26 output, the joint has work piece 3 between first ejector pin 23 and the second ejector pin 27, it removes to drive second ejector pin 27 through first electric putter 26, be convenient for two ejector pins extrusion fixed not unidimensional work piece 3.
Example 3
Please refer to fig. 1, fig. 3, fig. 4 and fig. 5, which are further improved based on embodiment 1:
for the laser range finding sensor 64 of adjusting device to remove along the Y axle, Y axle moving mechanism 4 includes two tracks 41, two track 41 threaded connection are at work box 1 top, sliding connection has linear electric motor 42 respectively on two tracks 41, linear electric motor 42 quantity is four, four linear electric motor 42 evenly distributed are on two tracks 41, four linear electric motor 42 top fixed connection are in the movable block 43 bottom, through linear electric motor 42's removal, be convenient for drive laser range finding sensor 64 and remove, the position that can its removal of accurate control simultaneously.
In this embodiment, in order to adjust laser rangefinder sensor 64 and remove along the Z axle, Z axle moving mechanism 5 includes perpendicular arm 51, perpendicular arm 51 fixed connection is in movable block 43 top one end, perpendicular arm 51 inner chamber top one end fixedly connected with second step motor 52, perpendicular arm 51 top one end fixedly connected with threaded rod 53 is kept away from to second step motor 52, threaded connection has two movable blocks 54 on the threaded rod 53, rotation through second step motor 52, it is rotatory to drive threaded rod 53, be convenient for remove movable block 54, change device's position.
In order to adjust the laser distance measuring sensor 64 to move along the X axis, the X axis moving mechanism 6 comprises a cross arm 61, two movable blocks 54 are fixedly connected to the cross arm 61, a second electric push rod 62 is fixedly connected to one end, far away from the workpiece 3, of the inside of the cross arm 61, an extension rod 63 is fixedly connected to the output end of the second electric push rod 62, the extension rod 63 penetrates through one end of the cross arm 61, the laser distance measuring sensor 64 is fixedly connected to the end, far away from the workpiece 3, of the cross arm 61, and the extension rod 63 moves through the second electric push rod 62, so that the distance between the laser distance measuring sensor 64 and the workpiece 3 can be changed conveniently.
Example 4
Referring to fig. 6, a further improvement is made on the basis of embodiment 1:
in order to change the height of the device, keep the device horizontal and prevent the device from being inclined to influence the use effect, the damping mechanism 7 comprises four hydraulic cylinders 71, the number of the hydraulic cylinders 71 is four, the tops of the four hydraulic cylinders 71 are fixedly connected to four corners of the bottom of the work box 1, supports 72 are fixedly connected to the bottoms of the four hydraulic cylinders 71, one ends of the hydraulic cylinders 71 penetrating through the supports 72 are fixedly connected with hydraulic rods 73, the hydraulic rods 73 are driven to move through the hydraulic cylinders 71, the height of the device can be slightly changed, and the device is kept horizontal.
In this embodiment, in order to reduce the vibrations of device, the inside sliding connection of support 72 has a pressure section of thick bamboo 74, hydraulic stem 73 passes pressure section of thick bamboo 74 one end joint and has had spring 75, oil storage cylinder 76 has been seted up to pressure section of thick bamboo 74 inner wall, the inside packing of pressure section of thick bamboo 74 has hydraulic oil, hydraulic stem 73 bottom fixedly connected with leads to the fuel valve, the intercommunication mouth has been seted up with pressure section of thick bamboo 74 inner chamber to oil storage cylinder 76, make hydraulic oil enter into oil storage cylinder 76 inside through hydraulic stem 73 extrusion spring 75, be convenient for reduce the vibrations of device.
Specifically, when the invention is used, firstly, a workpiece 3 to be measured is arranged on a rotary table 21, a first electric push rod 26 is opened to drive a second push rod 27 to move, the workpiece 3 is fixed, the laser distance measuring sensor 64 is adjusted to a proper position by using a Y-axis moving mechanism 4, a Z-axis moving mechanism 5 and an X-axis moving mechanism 6, measurement is started, then the Z-axis is locked, the first push rod 23 at the top of the rotary table 21 rotates for one circle, the X-axis self-adaptation keeps a constant distance with a product, scanning is completed, meanwhile, a laser incident angle automatic adjusting system is arranged in measurement and control software, a current measuring point is connected with a previous measuring point, the direction of a straight line is determined to be the current tangential direction of the product, the optimal angle of the incident angle with a laser line is 90 degrees, the measurement and control software calculates and monitors the angle in real time, when the angle exceeds a threshold value, measurement is suspended, the workpiece 3 is rotated, the tangential direction of the product is restored to 90 degrees, after the product rotates, the coordinates (X1, Y1) of the current measuring point are converted into polar coordinates (R1, A1) in control software, the polar coordinates are added with the angle A2 of the rotation of the workpiece 3, the coordinates are converted into rectangular coordinates (X2, Y2) again according to the new polar coordinates (R1, (A1+ A2)), the three-coordinate platform is moved from (X1, Y1) to (X2, Y2), the laser point can be kept on the same point, then the scanning point collecting operation is restored, finally the measuring result is converted into the coordinate when the angle of the first ejector 23 is 0 to be output, and the steps are repeated, so that the laser incident angle self-adaptive measuring operation can be realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The utility model provides an automatic adjusting laser incident angle's controlling means, its characterized in that, includes work box (1), work box (1) top one end is equipped with latch mechanism (2), work box (1) is close to latch mechanism (2) one end top and is equipped with Y axle moving mechanism (4), Y axle moving mechanism (4) top is equipped with Z axle moving mechanism (5), Z axle moving mechanism (5) outer wall one end is equipped with X axle moving mechanism (6), work box (1) bottom dead angle all is equipped with damper (7), Y axle moving mechanism (4) include movable block (43), Z axle moving mechanism (5) include movable block (54).
2. The control device for automatically adjusting the laser incidence angle according to claim 1, wherein the clamping mechanism (2) comprises a rotary table (21) and a workbench (24), the rotary table (21) is fixedly connected to one end of the top of the outer wall of the workbench (1), one end of the bottom of the workbench (1) is fixedly connected with a first stepping motor (22), the first stepping motor (22) penetrates through one end of the rotary table (21) and is fixedly connected with a first ejector rod (23), the workbench (24) is fixedly connected to one end of the top of the workbench (1) close to the rotary table (21), one end of the outer wall of the top of the workbench (24) is fixedly connected with a transverse block (25), a first electric push rod (26) is fixedly connected to the inside of the transverse block (25), one end of the first electric push rod (26) penetrating through the transverse block (25) is fixedly connected with a second ejector rod (27), and a workpiece (3) is clamped between the first ejector rod (23) and the second ejector rod (27).
3. The control device for automatically adjusting the laser incidence angle according to claim 1, wherein the Y-axis moving mechanism (4) comprises two rails (41), two rails (41) are symmetrically screwed on the top of the work box (1), linear motors (42) are slidably connected on the rails (41), two linear motors (42) are slidably connected on each rail (41), and the tops of four linear motors (42) are fixedly connected to the bottom of the moving block (43).
4. The control device for automatically adjusting the laser incidence angle according to claim 1, wherein the Z-axis moving mechanism (5) comprises a vertical arm (51), the vertical arm (51) is fixedly connected to the top of the moving block (43), one end of the top of the inner cavity of the vertical arm (51) is fixedly connected with a second stepping motor (52), the output end of the bottom of the second stepping motor (52) is fixedly connected with a threaded rod (53), the threaded rod (53) is in threaded connection with a moving block (54), and the number of the moving blocks (54) is two.
5. The control device for automatically adjusting the laser incidence angle according to claim 1, wherein the X-axis moving mechanism (6) comprises a cross arm (61), a movable block (54) is fixedly connected to the cross arm (61), a second electric push rod (62) is fixedly connected to one end inside the cross arm (61), an output end of the second electric push rod (62) is fixedly connected with an extension rod (63), and a laser ranging sensor (64) is fixedly connected to the extension rod (63) through one end of the cross arm (61).
6. The control device for automatically adjusting the laser incidence angle according to claim 1, wherein the damping mechanism (7) comprises a hydraulic cylinder (71), the top of the hydraulic cylinder (71) is fixedly connected to the bottom of the working box (1), a support (72) is fixedly connected to the bottom of the hydraulic cylinder (71), a hydraulic rod (73) is fixedly connected to one end of the hydraulic cylinder (71) penetrating through the support (72), a pressure cylinder (74) is slidably connected to the inside of the support (72), a spring (75) is clamped to one end of the hydraulic rod (73) penetrating through the pressure cylinder (74), and an oil storage cylinder (76) is arranged on the inner wall of the pressure cylinder (74).
7. The control device for automatically adjusting the laser incidence angle according to claim 6, wherein the number of the hydraulic cylinders (71) is four, the four hydraulic cylinders (71) are respectively and fixedly connected to four corners of the bottom of the working box (1), the pressure cylinder (74) is filled with hydraulic oil, the bottom of the hydraulic rod (73) is fixedly connected with an oil valve, and the oil cylinder (76) and the inner cavity of the pressure cylinder (74) are provided with communication ports.
8. The control device for automatically adjusting the laser incidence angle and the use method thereof as claimed in claim 1 are characterized by comprising the following steps:
s1, firstly, a workpiece (3) to be measured is arranged on a rotary table (21), a laser ranging sensor (64) is adjusted to a proper position, and measurement is started;
s2, locking the Z axis, rotating a first ejector rod (23) at the top of the rotary table (21) for one circle, keeping a constant distance between the X axis and the product in a self-adaptive manner, completing scanning, connecting a current measuring point with a previous measuring point by the automatic laser incident angle adjusting system in measurement and control software, considering that the direction of the straight line is the current tangential direction of the product, and the optimal angle between the current measuring point and the incident angle of a laser line is 90 degrees, calculating and monitoring the angle in real time by the measurement and control software, suspending measurement when the angle exceeds a threshold value, and rotating the workpiece 3 to restore the tangential direction of the product to 90 degrees;
s3, after the product rotates, the coordinates (X1, Y1) of the current measuring point are converted into polar coordinates (R1, A1) in control software, the polar coordinates are added with the rotating angle A2 of the workpiece (3), the coordinates are converted into rectangular coordinates (X2, Y2) again according to new polar coordinates (R1, (A1+ A2)), the three-coordinate platform is moved from (X1, Y1) to (X2, Y2), the laser point can be kept on the same point, and then the scanning point collecting operation is recovered;
and S4, converting the final measurement result into a coordinate when the angle of the first ejector rod is 0, outputting the coordinate, and repeating the steps to realize the self-adaptive measurement operation of the laser incidence angle.
CN202111362683.1A 2021-11-17 2021-11-17 Control device for automatically adjusting laser incident angle and use method thereof Pending CN114061485A (en)

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CN115283205A (en) * 2022-07-28 2022-11-04 广奕电子科技(宁波)有限公司 Flatness measuring device and method for glue spreading developing machine
CN115865192A (en) * 2023-02-16 2023-03-28 钇芯光子技术(深圳)有限公司 Quick testing arrangement of optical device
CN115865192B (en) * 2023-02-16 2023-05-12 钇芯光子技术(深圳)有限公司 Quick testing device of optical device

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